CN207909835U - A kind of integrated detection head assembly based on the detection of wafer piece - Google Patents
A kind of integrated detection head assembly based on the detection of wafer piece Download PDFInfo
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- CN207909835U CN207909835U CN201820211613.3U CN201820211613U CN207909835U CN 207909835 U CN207909835 U CN 207909835U CN 201820211613 U CN201820211613 U CN 201820211613U CN 207909835 U CN207909835 U CN 207909835U
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- probe
- positioning plate
- vertical pivot
- pressure roller
- pedestal
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model is related to automatic detection tooling technical fields, disclose a kind of integrated detection head assembly detected based on wafer piece, including pedestal, connecting pole, the bottom surface both ends of pedestal extend outward to form four independent support bars, probe assembly includes probe positioning plate, probe array, and the bottom surface both side of probe positioning plate is equipped with the guiding raised line coordinated with limiting slot；The lower end of connecting pole is equipped with turning set, the both sides of turning set are equipped with one group about centrosymmetric linking arm, the outer end of linking arm is equipped with vertical pivot, vertical pivot is equipped with pressure roller, it is slidably connected between pressure roller and vertical pivot, position on vertical pivot between pressure roller and linking arm is equipped with compression spring, and the top surface of probe positioning plate is equipped with arc groove, the guide groove being connected to the intrados of arc groove.The utility model middle probe unit replacement is convenient, greatly improves wafer piece detection efficiency.
Description
Technical field
The utility model is related to test technique automatic field more particularly to a kind of integrated form inspections based on the detection of wafer piece
Gauge head component.
Background technology
Wafer (Wafer) is the carrier for producing used in integrated circuits, refers to monocrystalline silicon wafer more, be also wafer chip.Commonly
Silica sand, which is drawn, to be refined, and silicon single crystal rod is made by dissolving, purification, distillation a series of measures, silicon single crystal rod is by polishing, being sliced it
Afterwards, just become wafer piece.Many one sound of laughing wafers are distributed in one discoid wafer on piece, and wafer is arranged in array,
Wafer needs to be detected its performance before encapsulation is manufactured into chip, since a wafer on piece is brilliant there are hundreds and thousands of
Member is manually detected each wafer by probe, and workload is very big, and is easy missing inspection；Therefore it is detected to improve
Efficiency is detected automatically by detection device at present, and probe is the important component on wafer piece detection device, and probe in detecting is big
It is easy to wear after the wafer piece of amount, it needs replacing, the probe on detector replaces trouble at present, to reduce detection efficiency.
Utility model content
The utility model is provided and a kind of is detected based on wafer piece to solve the above-mentioned problems in the prior art
Integrated detection head assembly, this kind, which detects, uses probe assembly, probe assembly to be very convenient in head assembly, to effective
Improve detection efficiency.
To achieve the goals above, the utility model adopts the following technical solution：
A kind of integrated detection head assembly based on the detection of wafer piece, including pedestal, the company for being fixed on base top surface center
Column is connect, the bottom surface both ends of the pedestal extend outward to form four independent support bars, are located at two branch of pedestal the same side
Stay is mutually parallel, and the top surface of every support bar is equipped with limiting slot, and spy is equipped between two support bars of pedestal the same side
Needle assemblies, the probe assembly includes probe positioning plate, the probe array that is fixed on probe positioning plate, probe positioning plate
Top surface is equipped with junction block, and every probe in probe array is electrically connected with junction block, and the top surface of the pedestal is inserted equipped with winding displacement
Seat, is connected between the junction block and cable socket by winding displacement, and the bottom surface both side of the probe positioning plate is equipped with and limit
The guiding raised line of slot cooperation；The lower end of the connecting pole is equipped with turning set, and the both sides of the turning set are equipped with one group about center
Symmetrical linking arm, the outer end of the linking arm are equipped with vertical pivot, and the vertical pivot is equipped with pressure roller, the pressure roller and vertical pivot it
Between be slidably connected, the position on vertical pivot between pressure roller and linking arm be equipped with compression spring, the top surface of the probe positioning plate is equipped with
Arc groove, the guide groove being connected to the intrados of arc groove.
Connecting pole is mechanically connected with detection device, and cable socket passes through the detecting system of another winding displacement and detection device electricity
Connection；Multiple probes are integrated on probe positioning plate and form probe assembly, directly replace probe assembly every time；Probe assembly is replaced
When, first the winding displacement on junction block is pulled out, then by turning set rotate an angle so that pressure roller enters in guide groove, then to
Outer pulling probe assembly, probe assembly are removed along limiting slot, are then inserted into new probe assembly along limiting slot, are inserted into
Pressure roller enters along guide groove in arc groove in journey, turning set is finally rotated an angle so that pressure roller is moved along arc groove
Move the end of arc groove, at this time probe assembly it is lateral, vertically limited by pressure roller, the longitudinal direction of probe assembly is limited
The limit of position slot, to realize that probe assembly positions completely；This kind of probe assembly is very convenient to, so as to shorten probe
Replacing construction improves the detection efficiency of wafer piece.
Preferably, wedge-shaped limiting slot is equipped between the inner end of the support bar and the end face of pedestal, the probe positioning
One side of plate is the positioning inclined-plane coordinated with wedge-shaped limiting slot.Probe positioning plate is shifted onto after bottom, and positioning inclined-plane enters wedge
It is limited completely in shape limiting slot, positioning accuracy is high；Positioning inclined-plane also has markd effect simultaneously, is used for label probe positioning plate
Direction of insertion.
Preferably, the outer end of the limiting slot, which is equipped with, is oriented to notch.Notch is oriented to convenient for the guiding on probe positioning plate
Raised line is quickly caught in limiting slot.
Preferably, the depth of the guide groove gradually increases from outer end to inner end, the depth of the arc groove is from centre
Gradually increase to both ends.With the insertion of probe positioning plate, pressure roller is moved along guide groove, pressure of the pressure roller to probe positioning plate
Constantly increase, when pressure roller is moved to the both ends of arc groove along arc groove, pressure further increases, so that it is guaranteed that compression spring has foot
Enough pressure compresses probe assembly.
Therefore, in the utility model, connecting pole is mechanically connected with detection device, and cable socket passes through winding displacement and detection device
On detecting system electrical connection, probe after a period of use, directly replaces probe assembly, is not necessarily to integral demounting, probe assembly
Replacing construction is short, and it is convenient to replace.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the utility model.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the state diagram that turning set rotates after an angle in Fig. 2.
Fig. 4 is pressure roller, shaft, the connection diagram of linking arm.
In figure：Pedestal 1, support bar 3, limiting slot 30, is oriented to notch 31, wedge-shaped limiting slot 32, probe assembly at connecting pole 2
4, probe positioning plate 40, probe array 41, guiding raised line 42, arc groove 43, guide groove 44, junction block 5, cable socket 6, winding displacement
7, turning set 8, linking arm 9, vertical pivot 10, pressure roller 11, linear bearing 12, compression spring 13.
Specific implementation mode
The utility model is further described with reference to the accompanying drawings and detailed description：
A kind of integrated detection head assembly based on the detection of wafer piece as depicted in figs. 1 and 2, including pedestal 1, be fixed on
The bottom surface both ends of the connecting pole 2 at base top surface center, pedestal extend outward to form four independent support bars 3, are located at pedestal
Two support bars of the same side are mutually parallel, and the top surface of every support bar is equipped with limiting slot 30, and the outer end of limiting slot, which is equipped with, leads
Wedge-shaped limiting slot 32, two support bars of pedestal the same side are equipped with to notch 31, between the inner end of support bar and the end face of pedestal
Between be equipped with probe assembly 4, probe assembly 4 includes probe positioning plate 40, the probe array 41 being fixed on probe positioning plate,
The top surface of probe positioning plate is equipped with junction block 5, and every probe in probe array is electrically connected with junction block, and the top surface of pedestal is set
There is cable socket 6, connected by winding displacement 7 between junction block and cable socket, the bottom surface both side of probe positioning plate is equipped with and limit
The guiding raised line 42 of slot cooperation, a side of probe positioning plate is the positioning inclined-plane coordinated with wedge-shaped limiting slot；Connecting pole
Lower end is equipped with turning set 8, and the both sides of turning set are equipped with one group about centrosymmetric linking arm 9, as shown in figure 4, linking arm
Outer end is equipped with vertical pivot 10, and vertical pivot is equipped with pressure roller 11, is slidably connected by linear bearing 12 between pressure roller and vertical pivot, vertical pivot is upper
Position between pressure roller and linking arm is equipped with compression spring 13, and the lower face of pressure roller is spherical surface, and the top surface of probe positioning plate 40 is equipped with
Arc groove 43, the guide groove 44 being connected to the intrados of arc groove, the depth of guide groove gradually increase from outer end to inner end, arc
The depth of slot gradually increases from the middle to both ends.
In conjunction with attached drawing, the application method of the utility model is as follows：Connecting pole is mechanically connected with detection device, and cable socket is logical
Another winding displacement is crossed to be electrically connected with the detecting system of detection device；Multiple probes are integrated on probe positioning plate and form probe groups
Part directly replaces probe assembly every time；When probe assembly is replaced, first the winding displacement on junction block is pulled out, then turning set is rotated
The state of one angle, state set is converted to the state of Fig. 2 from Fig. 3 so that pressure roller enters in guide groove, then pulls out spy
Needle assemblies, probe assembly are removed along limiting slot, are then inserted into new probe assembly along limiting slot, pressure roller in insertion process
Enter in arc groove along guide groove, turning set is finally rotated into an angle so that pressure roller is moved to arc along arc groove
The end of slot, at this time the state of turning set the state of Fig. 3 is converted to by the state of Fig. 2, due to guide groove, arc groove depth become
Change, pressure roller constantly increases the pressure of probe assembly until probe assembly positions completely, probe assembly it is lateral, vertical by
It is limited to the longitudinal direction of the limit of pressure roller, probe assembly by limiting slot；This kind of probe assembly is very convenient to, so as to shorten
The replacing construction of probe improves the detection efficiency of wafer piece, and probe assembly positioning accuracy is high, it is ensured that probe assembly is more
Positional precision after changing.
Claims (4)
1. a kind of integrated detection head assembly based on the detection of wafer piece, including pedestal, the connection for being fixed on base top surface center
Column, characterized in that the bottom surface both ends of the pedestal extend outward to form four independent support bars, are located at pedestal the same side
Two support bars are mutually parallel, and the top surface of every support bar is equipped with limiting slot, between two support bars of pedestal the same side
Equipped with probe assembly, the probe assembly includes probe positioning plate, the probe array that is fixed on probe positioning plate, and probe is fixed
The top surface of position plate is equipped with junction block, and every probe in probe array is electrically connected with junction block, and the top surface of the pedestal is equipped with
Cable socket is connected between the junction block and cable socket by winding displacement, and the bottom surface both side of the probe positioning plate is equipped with
With the guiding raised line of limiting slot cooperation；The lower end of the connecting pole is equipped with turning set, and the both sides of the turning set are equipped with one group of pass
In centrosymmetric linking arm, the outer end of the linking arm is equipped with vertical pivot, and the vertical pivot is equipped with pressure roller, the pressure roller with
It is slidably connected between vertical pivot, the position on vertical pivot between pressure roller and linking arm is equipped with compression spring, the top of the probe positioning plate
The guide groove that face is equipped with arc groove, is connected to the intrados of arc groove.
2. a kind of integrated detection head assembly based on the detection of wafer piece according to claim 1, characterized in that the branch
Wedge-shaped limiting slot is equipped between the inner end of stay and the end face of pedestal, a side of the probe positioning plate is to be limited with wedge shape
The positioning inclined-plane of slot cooperation.
3. a kind of integrated detection head assembly based on the detection of wafer piece according to claim 1, characterized in that the limit
The outer end of position slot, which is equipped with, is oriented to notch.
4. a kind of integrated detection head assembly based on the detection of wafer piece according to claim 1, characterized in that described to lead
Gradually increase from outer end to inner end to the depth of slot, the depth of the arc groove gradually increases from the middle to both ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820211613.3U CN207909835U (en) | 2018-02-06 | 2018-02-06 | A kind of integrated detection head assembly based on the detection of wafer piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820211613.3U CN207909835U (en) | 2018-02-06 | 2018-02-06 | A kind of integrated detection head assembly based on the detection of wafer piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207909835U true CN207909835U (en) | 2018-09-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820211613.3U Active CN207909835U (en) | 2018-02-06 | 2018-02-06 | A kind of integrated detection head assembly based on the detection of wafer piece |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113140477A (en) * | 2020-01-20 | 2021-07-20 | 创意电子股份有限公司 | Probe card module |
-
2018
- 2018-02-06 CN CN201820211613.3U patent/CN207909835U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113140477A (en) * | 2020-01-20 | 2021-07-20 | 创意电子股份有限公司 | Probe card module |
| CN113140477B (en) * | 2020-01-20 | 2022-09-16 | 创意电子股份有限公司 | Probe card module |
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