CN207908555U - A kind of continuous detecting wafer piece detector - Google Patents

Abstract

The utility model is related to automatic detection tooling technical fields, disclose a kind of continuous detecting wafer piece detector, including substrate, connecting pole, the downside of substrate is equipped with left plate, right plate, horizontal shaft is equipped between left plate and right plate, the left end of shaft is equipped with rotating bracket, the upper end of rotating bracket, lower end is equipped with positioning seat, probe assembly is equipped on positioning seat, probe assembly includes probe positioning plate, several probes being fixed on probe positioning plate, probe positioning plate is equipped with junction block, every probe is electrically connected with junction block, substrate is equipped with cable socket, it is connected by winding displacement between junction block and cable socket；The right end of shaft is equipped with external toothing, and substrate is equipped with lifting electric cylinders, and the shaft end for lifting electric cylinders is equipped with the rack engaged with external toothing.The utility model extends the probe replacement cycle, the time of probe replacement is shortened, to improve wafer piece detection efficiency.

Description

A kind of continuous detecting wafer piece detector

Technical field

The utility model is related to test technique automatic field more particularly to a kind of continuous detecting wafer piece detectors.

Background technology

Wafer (Wafer) is the carrier for producing used in integrated circuits, refers to monocrystalline silicon wafer more, be also wafer chip.Commonly Silica sand, which is drawn, to be refined, and silicon single crystal rod is made by dissolving, purification, distillation a series of measures, silicon single crystal rod is by polishing, being sliced it Afterwards, just become wafer piece.Many one sound of laughing wafers are distributed in one discoid wafer on piece, and wafer is arranged in array, Wafer needs to be detected its performance before encapsulation is manufactured into chip, since a wafer on piece is brilliant there are hundreds and thousands of Member is manually detected each wafer by probe, and workload is very big, and is easy missing inspection；Therefore it is detected to improve Efficiency is detected automatically by detection device at present, and probe is the important component on wafer piece detection device, and probe in detecting is big It is easy to wear after the wafer piece of amount, it needs to regularly replace, the probe on detector replaces trouble at present, and frequently replaces probe Detection efficiency can be reduced.

Utility model content

The utility model provides a kind of continuous detecting wafer piece to solve the above-mentioned problems in the prior art Detector, this kind of detector can extend the probe replacement cycle, to improve wafer piece detection efficiency.

To achieve the goals above, the utility model adopts the following technical solution：

A kind of continuous detecting wafer piece detector, including substrate, with the fixed connecting pole of substrate, under the substrate Side is equipped with left plate, right plate, and horizontal shaft is equipped between the left plate and right plate, and the left end of the shaft is equipped with Rotating bracket, upper end, the lower end of the rotating bracket are equipped with positioning seat, probe assembly, institute are equipped on the positioning seat Several probes that the probe assembly stated includes probe positioning plate, is fixed on probe positioning plate, the probe positioning plate are equipped with Junction block, every probe are electrically connected with junction block, and the substrate is equipped with cable socket, and the junction block is inserted with winding displacement It is connected by winding displacement between seat；The right end of the shaft is equipped with external toothing, and the substrate is equipped with lifting electric cylinders, the lifting electricity The shaft end of cylinder is equipped with the rack engaged with external toothing.

Connecting pole is mechanically connected with detection device, and cable socket passes through the detecting system on another winding displacement and detection device It connects, probe assembly is all loaded onto on two positioning seats；When detection, the probe assembly on the downside of rotating bracket is contacted with wafer piece Detection, the probe assembly being located on the upside of rotating bracket is idle, (reaches specified inspection after the probe assembly of downside detects specified number The probe should be scrapped after surveying number), stop detection at this time, lifting electric cylinders shaft end declines, and rack moves downwards through external toothing Shaft is driven to rotate 180 degree, to continue to detect, which only needs can complete within several seconds；Probe assembly reaches volume After determining number, lifting electric cylinders reset, and then replace two probe assemblies simultaneously；This kind of wafer piece detector is by the probe replacement cycle One times is extended, half, and integral replacing probe assembly are eliminated to which the time for replacing probe will be shut down, than being individually replaced Probe is more laborsaving, time saving.

Preferably, the right end of the rotating bracket is fixed with turntable, the edge of the turntable sets that there are two about in The bottom of the symmetrical limit hole of the heart, the substrate is equipped with horizontal electric cylinders, and the shaft end of the horizontal electric cylinders is equipped with coaxial with limit hole Spacer pin.When probe assembly works normally, the shaft end of horizontal electric cylinders is stretched out, and spacer pin is inserted into limit hole；Work as probe assembly On probe reach specified detection number after, the shaft end retraction of horizontal electric cylinders, spacer pin are extracted out of limit hole, then lifting electricity Cylinder shaft end declines, after turntable rotates 180 degree, the action of horizontal electric cylinders, to by spacer pin again insertable into being positioned in limit hole, from And effectively prevent rotating bracket in probe assembly detection process from deflecting, and then ensure accuracy of detection.

Preferably, the left side of the left plate is equipped with arc limit slot, the right side of the turntable is equipped with limit The head of column, the limited post is stretched into arc limit slot；When limited post is located at the both ends of arc limit slot, the limit Pin is coaxial with limit hole.

Preferably, the positioning seat takes the shape of the letter U, it is equipped with guide groove on two opposite medial surfaces of positioning seat, is led It is equipped with rubber sheet gasket to the side of slot, the bottom surface of guide groove is equipped with outside the gap of positioning seat lateral surface, the positioning seat End is equipped with clamping screw.Clamping screw is unclamped, the both sides of probe positioning plate are caught in guide groove, then tighten bolt again, Gap becomes smaller, and the two side walls of guide groove clamp probe positioning plate, and to be positioned to probe positioning plate, positioning is very convenient.

Therefore, in the utility model, after a probe assembly detection reaches specified number, another probe groups is used automatically Part shortens the time shut down and replace probe, and then improve the detection of wafer piece to extend the replacement cycle of probe assembly Efficiency.

Description of the drawings

Fig. 1 is a kind of structural schematic diagram of the utility model.

Fig. 2 is the left view of Fig. 1.

Fig. 3 is the vertical view of positioning seat.

Fig. 4 is the left view of left plate in Fig. 1.

Fig. 5 is close-up schematic view at A in Fig. 2.

In figure：Substrate 1, connecting pole 2, left plate 3, arc limit slot 30, right plate 4, shaft 5, external toothing 50, rotation branch Frame 6, positioning seat 7, guide groove 70, rubber sheet gasket 71, gap 72, clamping screw 73, probe assembly 8, probe positioning plate 80, probe 81, junction block 82, cable socket 9, winding displacement 10, lifting electric cylinders 11, rack 12, turntable 13, limit hole 130, limited post 131, water Ordinary telegram cylinder 14, spacer pin 15.

Specific implementation mode

The utility model is further described with reference to the accompanying drawings and detailed description：

A kind of continuous detecting wafer piece detector as depicted in figs. 1 and 2, including substrate 1 and the fixed connection of substrate The downside of column 2, substrate is equipped with left plate 3, right plate 4, and horizontal shaft 5 is equipped between left plate and right plate, shaft Left end is equipped with rotating bracket 6, and rotating bracket is fixedly connected with shaft, and shaft is rotatablely connected with left plate 3, right plate 4, rotation branch Upper end, the lower end of frame are equipped with positioning seat 7, are equipped with probe assembly 8 on positioning seat, probe assembly include probe positioning plate 80, Several probes 81 being fixed on probe positioning plate, probe positioning plate are equipped with junction block 82, and every probe is electric with junction block Connection, substrate are equipped with cable socket 9, are connected by winding displacement 10 between junction block and cable socket；As shown in Figure 3 and Figure 5, fixed Position seat 7 takes the shape of the letter U, and guide groove 70 is equipped on two opposite medial surfaces of positioning seat, and the side of guide groove is equipped with rubber sheet gasket 71, the bottom surface of guide groove is equipped with through the gap 72 of positioning seat lateral surface, and the outer end of positioning seat is equipped with clamping screw 73；Shaft 5 right end is equipped with external toothing 50, and substrate is equipped with lifting electric cylinders 11, and the shaft end for lifting electric cylinders is equipped with the rack engaged with external toothing 12。

The right end of rotating bracket 6 is fixed with turntable 13, and the edge of turntable sets that there are two about centrosymmetric limit hole 130, the bottom of substrate is equipped with horizontal electric cylinders 14, and the shaft end of horizontal electric cylinders is equipped with the spacer pin 15 coaxial with limit hole, such as Fig. 4 institutes Show, the left side of left plate 3 is equipped with arc limit slot 30, and the right side of turntable 13 is equipped with limited post 131, the head of limited post It stretches into arc limit slot；When limited post is located at the both ends of arc limit slot, spacer pin is coaxial with limit hole.

In conjunction with attached drawing, the application method of the utility model is as follows：Connecting pole is mechanically connected with detection device, and cable socket is logical It crosses another winding displacement to connect with the detecting system on detection device, probe assembly is all loaded onto on two positioning seats；When detection, it is located at Probe assembly on the downside of rotating bracket contacts detection with wafer piece, and the probe assembly being located on the upside of rotating bracket is idle, works as downside Probe assembly detect after specified number (probe should be scrapped after reaching specified detection number), stop detection at this time, it is horizontal The shaft end retraction of electric cylinders, spacer pin are extracted out of limit hole, and lifting electric cylinders shaft end declines, and limited post is from one end of arc limit slot It is moved to the other end, after turntable just rotates 180 degree, spacer pin is in coaxial state with limit hole, then horizontal electric cylinders shaft end It stretches out, spacer pin is inserted into limit hole and is positioned, to effectively prevent rotating bracket in probe assembly detection process from occurring partially Turn, and then ensures accuracy of detection.The probe replacement cycle is extended one times by this kind of wafer piece detector, is visited to shut down replacement The time of needle eliminates half, and integral replacing probe assembly, more laborsaving, more time saving than being individually replaced probe.

Claims (4)

1. a kind of continuous detecting wafer piece detector, including substrate and the fixed connecting pole of substrate, characterized in that described The downside of substrate is equipped with left plate, right plate, and horizontal shaft is equipped between the left plate and right plate, the shaft Left end is equipped with rotating bracket, and upper end, the lower end of the rotating bracket are equipped with positioning seat, probe are equipped on the positioning seat Component, the probe assembly includes probe positioning plate, several probes for being fixed on probe positioning plate, the probe positioning plate Be equipped with junction block, every probe be electrically connected with junction block, and the substrate is equipped with cable socket, the junction block and It is connected by winding displacement between cable socket；The right end of the shaft is equipped with external toothing, and the substrate is equipped with lifting electric cylinders, described The shaft end of lifting electric cylinders is equipped with the rack engaged with external toothing.

2. a kind of continuous detecting wafer piece detector according to claim 1, characterized in that the right side of the rotating bracket End is fixed with turntable, and the edge of the turntable is set there are two about centrosymmetric limit hole, and the bottom of the substrate is equipped with The shaft end of horizontal electric cylinders, the horizontal electric cylinders is equipped with the spacer pin coaxial with limit hole.

3. a kind of continuous detecting wafer piece detector according to claim 2, characterized in that the left side of the left plate Face is equipped with arc limit slot, and the right side of the turntable is equipped with limited post, and arc limit slot is stretched on the head of the limited post It is interior；When limited post is located at the both ends of arc limit slot, the spacer pin and limit hole are coaxial.

4. a kind of continuous detecting wafer piece detector according to claim 1, characterized in that the positioning seat is in U Shape, guide groove is equipped on two opposite medial surfaces of positioning seat, and the side of guide groove is equipped with rubber sheet gasket, the bottom of guide groove Face is equipped with through the gap of positioning seat lateral surface, and the outer end of the positioning seat is equipped with clamping screw.