CN207908631U - A kind of rotary type wafer piece detector - Google Patents
A kind of rotary type wafer piece detector Download PDFInfo
- Publication number
- CN207908631U CN207908631U CN201820211656.1U CN201820211656U CN207908631U CN 207908631 U CN207908631 U CN 207908631U CN 201820211656 U CN201820211656 U CN 201820211656U CN 207908631 U CN207908631 U CN 207908631U
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- bracket
- probe
- shaft
- positioning seat
- wafer piece
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model is related to automatic detection tooling technical fields, disclose a kind of rotary type wafer piece detector, including U-bracket, connecting pole, shaft is equipped between the lower end of U-bracket, it is fixed with pedestal in the shaft, four sides of pedestal are equipped with positioning seat, it is equipped with probe assembly on each positioning seat, probe assembly includes probe positioning plate, several probes being fixed on probe positioning plate, probe positioning plate is equipped with junction block, every probe is electrically connected with junction block, U-bracket is equipped with cable socket, it is connected by winding displacement between junction block and cable socket；The right end of shaft is equipped with driven gear, and the right side of U-bracket is equipped with stepper motor, and the shaft end of stepper motor is equipped with the driving gear engaged with driven gear, and automatic locking mechanism is equipped between shaft and U-bracket.The utility model extends the probe replacement cycle, the time of probe replacement is shortened, to improve wafer piece detection efficiency.
Description
Technical field
The utility model is related to test technique automatic field more particularly to a kind of rotary type wafer piece detectors.
Background technology
Wafer (Wafer) is the carrier for producing used in integrated circuits, refers to monocrystalline silicon wafer more, be also wafer chip.Commonly
Silica sand, which is drawn, to be refined, and silicon single crystal rod is made by dissolving, purification, distillation a series of measures, silicon single crystal rod is by polishing, being sliced it
Afterwards, just become wafer piece.Many one sound of laughing wafers are distributed in one discoid wafer on piece, and wafer is arranged in array,
Wafer needs to be detected its performance before encapsulation is manufactured into chip, since a wafer on piece is brilliant there are hundreds and thousands of
Member is manually detected each wafer by probe, and workload is very big, and is easy missing inspection；Therefore it is detected to improve
Efficiency is detected automatically by detection device at present, and probe is the important component on wafer piece detection device, and probe in detecting is big
It is easy to wear after the wafer piece of amount, it needs to regularly replace, the probe on detector replaces trouble at present, and frequently replaces probe
Detection efficiency can be reduced.
Utility model content
The utility model provides a kind of rotary type wafer piece inspection to solve the above-mentioned problems in the prior art
Gauge head, this kind of detector often rotate once with regard to one group of probe assembly of automatic quick-replaceable, and spy is replaced to greatly shorten shutdown
The time of needle, and then improve wafer piece detection efficiency.
To achieve the goals above, the utility model adopts the following technical solution：
A kind of rotary type wafer piece detector, including U-bracket, connecting pole are equipped between the lower end of U-bracket and turn
Axis is fixed with pedestal in the shaft, and the pedestal is in rectangular parallelepiped structure, and four sides of pedestal are equipped with positioning seat, often
It is equipped with probe assembly on a positioning seat, if the probe assembly includes probe positioning plate, is fixed on probe positioning plate
Dry probe, the probe positioning plate are equipped with junction block, and every probe is electrically connected with junction block, is set on the U-bracket
There is cable socket, is connected by winding displacement between the junction block and cable socket；The right end of the shaft is equipped with driven gear,
The right side of the U-bracket is equipped with stepper motor, and the shaft end of the stepper motor is equipped with the driving gear engaged with driven gear,
Automatic locking mechanism is equipped between the shaft and U-bracket.
Connecting pole is mechanically connected with detection device, and cable socket passes through the detection on other independent winding displacements and detection device
System connects, and probe assembly is all loaded onto on the positioning seat of four sides of pedestal, this kind of detector configures four probe assemblies；Detection
When, it is located at the probe assembly on the downside of rotating bracket and contacts detection with wafer piece, remaining probe assembly is idle, when the probe of downside
After the specified number of component detection (probe should be scrapped after reaching specified detection number), stop detection, automatic locking machine at this time
Structure unlocks, and stepper motor rotates specified angle, and shaft rotates 90 degree at this time, and second probe assembly is turning to wafer piece just
Top, automatic locking mechanism locking shaft, is then detected, and so on, until four probe assemblies detect specified time
Then number disposably replaces four probe assemblies, stepper motor can rotate forward, invert, and is just circling or instead to control shaft
It circles；The time switched between two probe assemblies is very short, can relatively ignore with the manual time for replacing probe assembly
Disregard, therefore, the service life of this kind of wafer piece detector is four times of conventional detection head, is shut down more to greatly reduce
It changes the stand-by period of probe, improves the detection efficiency of wafer piece.
Preferably, the automatic locking mechanism includes connector sleeve, frictional disk, the frictional disk is fixed on shaft
On, the connector sleeve is set in the outside of frictional disk, and the right end of connector sleeve is fixedly connected with U-bracket, on the U-bracket
Equipped with vertical sliding sleeve, slide bar is equipped in the sliding sleeve, the inside of the connector sleeve is equipped with and the fixed brake of the lower end of the slider
Piece, the upper end of the U-bracket are equipped with the electric cylinders being connect with slide bar upper end.When electric cylinders shaft end is stretched out, brake block pressing friction disk,
It is positioned from by shaft, when needing to switch probe assembly, electric cylinders shaft end retraction, to which stepper motor can easily drive shaft to turn
It is dynamic.
Preferably, the positioning seat takes the shape of the letter U, it is equipped with guide groove on two opposite medial surfaces of positioning seat, is led
It is equipped with rubber sheet gasket to the side of slot, the bottom surface of guide groove is equipped with outside the gap of positioning seat lateral surface, the positioning seat
End is equipped with clamping screw.Clamping screw is unclamped, the both sides of probe positioning plate are caught in guide groove, then tighten bolt again,
Gap becomes smaller, and the two side walls of guide groove clamp probe positioning plate, and to be positioned to probe positioning plate, positioning is very convenient.
Preferably, being located at driven gear on the U-bracket, the outside of driving gear is equipped with protective cover.Protective cover rises
To protective action, prevent winding displacement etc. from twisting in gear.
Therefore, in the utility model, after the detection of probe assembly reaches specified number, automatically switch to second, the
Three, the 4th probe assembly, to extend the replacement cycle of probe assembly, shorten shut down replace probe assembly when
Between, and then improve the detection efficiency of wafer piece.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the utility model.
Fig. 2 is the connection diagram of pedestal, positioning seat, probe assembly.
Fig. 3 is the structural schematic diagram of automatic locking mechanism.
Fig. 4 is close-up schematic view at A in Fig. 2.
In figure：U-bracket 1, connecting pole 2, shaft 3, pedestal 4, positioning seat 5, guide groove 50, rubber sheet gasket 51, gap 52,
Clamping screw 53, probe assembly 6, probe positioning plate 60, probe 61, junction block 62, cable socket 7, winding displacement 8, driven gear 9,
Stepper motor 10, protective cover 12, automatic locking mechanism 13, connector sleeve 130, frictional disk 131, sliding sleeve 132, is slided driving gear 11
Bar 133, brake block 134, electric cylinders 135.
Specific implementation mode
The utility model is further described with reference to the accompanying drawings and detailed description：
A kind of rotary type wafer piece detector as depicted in figs. 1 and 2, including U-bracket 1, connecting pole 2, U-bracket
Lower end between be equipped with shaft 3, be rotatablely connected between shaft 3 and U-bracket, be fixed with pedestal 4 in shaft, pedestal is in cuboid
Four sides of structure, pedestal are equipped with positioning seat 5, and probe assembly 6 is equipped on each positioning seat, and probe assembly 6 includes visiting
Needle positioning plate 60, several probes 61 being fixed on probe positioning plate, probe positioning plate are equipped with junction block 62, and every probe is equal
It is electrically connected with junction block, U-bracket is equipped with cable socket 7, is connected by winding displacement 8 between institute junction block and cable socket；Turn
The right end of axis is equipped with driven gear 9, and the right side of U-bracket is equipped with stepper motor 10, and the shaft end of stepper motor is equipped with and passive tooth
The driving gear 11 of engagement is taken turns, driven gear is located on U-bracket, the outside of driving gear is equipped with protective cover 12, shaft and U-shaped
Automatic locking mechanism 13 is equipped between holder；As shown in figure 4, positioning seat 5 takes the shape of the letter U, on two opposite medial surfaces of positioning seat
It is equipped with guide groove 50, the side of guide groove is equipped with rubber sheet gasket 51, and the bottom surface of guide groove is equipped with through positioning seat lateral surface
The outer end in gap 52, positioning seat is equipped with clamping screw 53；Dotted line is the side of U-bracket 1 in Fig. 2, replaces probe assembly
When, first the probe assembly of pedestal both sides is replaced, then shaft rotates 90 degree, then other two probe assembly is replaced, such U
Shape holder will not interfere with the replacement of probe assembly.
As shown in figure 3, automatic locking mechanism 13 includes connector sleeve 130, frictional disk 131, frictional disk is fixed in shaft 3,
Connector sleeve is set in the outside of frictional disk, and the right end of connector sleeve is fixedly connected with U-bracket, and U-bracket is equipped with vertical cunning
Set 132, is equipped with slide bar 133 in sliding sleeve, the inside of connector sleeve be equipped with the fixed brake block 134 of the lower end of the slider, U-bracket it is upper
End is equipped with the electric cylinders 135 being connect with slide bar upper end.
In conjunction with attached drawing, the application method of the utility model is as follows：Connecting pole is mechanically connected with detection device, and cable socket is logical
It crosses other independent winding displacements to connect with the detecting system on detection device, probe groups is all loaded onto on the positioning seat of four sides of pedestal
Part, this kind of detector configure four probe assemblies；When detection, it is located at the probe assembly on the downside of rotating bracket and contacts inspection with wafer piece
It surveys, remaining probe assembly is idle, (reaches the probe after specified detection number after the probe assembly of downside detects specified number
Should scrap), stop detection, the retraction of electric cylinders shaft end at this time, automatic locking mechanism unlocks, and stops after stepper motor rotation nominal angle
Only, shaft stops after rotating 90 degree at this time, when the stretching of electric cylinders shaft end, brake block pressing friction disk, from by spindle lock fastening position, so
Be detected afterwards using second probe assembly, and so on until four probe assemblies detect specified number, then once
Property replace four probe assemblies, stepper motor can rotate forward, invert, to control shaft just circling or it is counter circle, to
Prevent shaft from causing winding displacement to be broken too much along the same direction turnning circle；The time switched between two probe assemblies is very
It is short, it relatively can be ignored with the manual time for replacing probe assembly, therefore, the service life of this kind of wafer piece detector is
Four times of conventional detection head shut down the stand-by period for replacing probe to greatly reduce, improve the detection efficiency of wafer piece.
Claims (4)
1. a kind of rotary type wafer piece detector, characterized in that including U-bracket, connecting pole, between the lower end of U-bracket
Equipped with shaft, pedestal is fixed in the shaft, the pedestal is in rectangular parallelepiped structure, and four sides of pedestal are equipped with positioning
, it is equipped with probe assembly on each positioning seat, the probe assembly includes probe positioning plate, is fixed on probe positioning plate
Several probes, the probe positioning plate is equipped with junction block, and every probe is electrically connected with junction block, the U-bracket
It is equipped with cable socket, is connected by winding displacement between the junction block and cable socket；The right end of the shaft is equipped with passive
The right side of gear, the U-bracket is equipped with stepper motor, and the shaft end of the stepper motor is equipped with the active engaged with driven gear
Gear is equipped with automatic locking mechanism between the shaft and U-bracket.
2. a kind of rotary type wafer piece detector according to claim 1, characterized in that the automatic locking mechanism
Including connector sleeve, frictional disk, the frictional disk is fixed in shaft, and the connector sleeve is set in the outside of frictional disk, even
The right end of female connector is fixedly connected with U-bracket, and the U-bracket is equipped with vertical sliding sleeve, and slide bar is equipped in the sliding sleeve,
The inside of the connector sleeve is equipped with to be equipped with and slide bar upper end company with the fixed brake block of the lower end of the slider, the upper end of the U-bracket
The electric cylinders connect.
3. a kind of rotary type wafer piece detector according to claim 1 or 2, characterized in that the positioning seat is in U
Shape, guide groove is equipped on two opposite medial surfaces of positioning seat, and the side of guide groove is equipped with rubber sheet gasket, the bottom of guide groove
Face is equipped with through the gap of positioning seat lateral surface, and the outer end of the positioning seat is equipped with clamping screw.
4. a kind of rotary type wafer piece detector according to claim 1, characterized in that be located on the U-bracket
Driven gear, driving gear outside be equipped with protective cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820211656.1U CN207908631U (en) | 2018-02-06 | 2018-02-06 | A kind of rotary type wafer piece detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820211656.1U CN207908631U (en) | 2018-02-06 | 2018-02-06 | A kind of rotary type wafer piece detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207908631U true CN207908631U (en) | 2018-09-25 |
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ID=63563446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820211656.1U Active CN207908631U (en) | 2018-02-06 | 2018-02-06 | A kind of rotary type wafer piece detector |
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| Country | Link |
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| CN (1) | CN207908631U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109865675A (en) * | 2019-03-23 | 2019-06-11 | 江西师范大学 | A kind of electronic component surface detection apparatus |
-
2018
- 2018-02-06 CN CN201820211656.1U patent/CN207908631U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109865675A (en) * | 2019-03-23 | 2019-06-11 | 江西师范大学 | A kind of electronic component surface detection apparatus |
| CN109865675B (en) * | 2019-03-23 | 2023-06-13 | 江西师范大学 | Electronic component surface detection device |
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