CN220525941U

CN220525941U - Wafer chip detects frock

Info

Publication number: CN220525941U
Application number: CN202322005208.XU
Authority: CN
Inventors: 郭宏毅; 罗九斌
Original assignee: Zhangjiagang Integrated Circuit Industry Development Co ltd
Current assignee: Zhangjiagang Integrated Circuit Industry Development Co ltd
Priority date: 2023-07-28
Filing date: 2023-07-28
Publication date: 2024-02-23
Anticipated expiration: 2033-07-28

Abstract

The utility model discloses a wafer chip detection tool which comprises supporting legs, wherein anti-slip pads are arranged at the bottom ends of the supporting legs, a workbench is arranged at the top ends of the supporting legs, a mounting block is arranged at the top end inside a detection box, and dismounting structures are arranged at two sides of the mounting block. According to the wafer chip detection tool, the limiting plate is arranged at the top end of the moving plate, the limiting plate is connected with the moving plate through the threaded rod and the guide rod, the threaded rod is connected with the limiting plate through the threads, the threaded rod can be screwed to drive the threaded rod to rotate, the threaded rod can rotate to drive the limiting plate which is connected with the threaded rod through the threads to lift, the limiting plate can limit the wafer chip on the moving plate through lifting, the wafer chip is prevented from being deviated, the friction force of the limiting plate can be enhanced through anti-skid patterns, the guide rod penetrates through the limiting plate, and the guide rod can guide the limiting plate, so that the wafer chip detection tool is convenient for limiting the wafer chip.

Description

Wafer chip detects frock

Technical Field

The utility model relates to the technical field of wafer chip detection, in particular to a wafer chip detection tool.

Background

Wafer chip refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and the original material is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon, and the silicon crystal rod is ground, polished and sliced to form a silicon wafer, namely a wafer. The domestic wafer production line mainly uses 8 inches and 12 inches, and after the wafer chip is processed, a wafer chip detection tool is needed to detect the wafer chip, so that whether a crack exists on the wafer chip can be detected.

Therefore, the utility model discloses a wafer chip detection tool in the technical field of detection tools in the specification of patent number CN205229403U, which comprises a circuit board and a connecting seat, wherein one end of the connecting seat is connected with the circuit board, two sides of the other end of the connecting seat are respectively provided with a row of measuring needles, each measuring needle comprises a measuring needle sleeve and a telescopic measuring needle head arranged in the measuring needle sleeve, the measuring needle sleeves are connected with the end surfaces of the connecting seat through a glue layer, the measuring needle heads of each measuring needle are higher than the end surfaces of the glue layer, and the measuring needle sleeves of each measuring needle are connected with the circuit board through wires. The utility model has the advantages of being applicable to automatic detection equipment and greatly improving the detection efficiency.

However, the existing wafer chip detection tool still has some problems, and the specific problems are as follows:

1. the wafer chip detection tool is difficult to limit the wafer chip, and when the wafer chip is detected, the wafer chip is required to be limited, so that the wafer chip can be stably detected, and the wafer chip is prevented from being deviated.

2. The wafer chip detection tool is difficult to automatically adjust the position of the wafer chip, and the wafer chip needs to be automatically adjusted in the process of processing, so that the wafer chip can automatically move into the detection box for detection.

Disclosure of Invention

First, the technical problem to be solved

The utility model aims to provide a wafer chip detection tool which is used for solving the defects that the existing wafer chip detection tool is difficult to limit a wafer chip and difficult to automatically adjust the position of the wafer chip.

(II) summary of the utility model

In order to solve the technical problems, the utility model provides the following technical scheme: a wafer chip detection tool comprises supporting legs;

the bottom ends of the supporting legs are provided with anti-slip pads, and the top ends of the supporting legs are provided with a workbench;

the automatic detection device comprises a workbench, and is characterized in that a movable structure is arranged in the workbench, a movable plate is arranged at the top end of the workbench, a limiting structure is arranged at the top end of the movable plate, the limiting structure comprises a limiting plate, anti-skid threads, a guide rod and a threaded rod, the guide rod is arranged at the top end of the movable plate, the top end of the guide rod is movably connected with the limiting plate, one end of the limiting plate penetrates through the threaded rod, and a detection box is arranged at the top end of the workbench;

the detection box is characterized in that inlets are formed in two sides of the detection box, an installation block is installed at the top end of the inside of the detection box, a detector is installed at the bottom end of the installation block, and dismounting structures are installed on two sides of the installation block.

When the device is used, firstly, the servo motor works to drive the screw rod to rotate, the screw rod and the moving block form threaded connection, the screw rod rotates to move the moving block which can be driven to move, the moving block moves to drive the moving plate at the top end of the moving block to move, the moving plate can move to the inside of the detection box, the wafer chip at the top end of the moving plate can be detected by the detector, the connecting rod penetrates through the moving block, the connecting rod can guide the moving block, the detector can detect the wafer chip, and whether a crack exists on the wafer chip is detected.

Preferably, the moving structure comprises a servo motor, a screw rod, a connecting rod and a moving block, wherein the servo motor is arranged on one side of the workbench, one side of the servo motor is movably connected with the screw rod, the outer side of the screw rod is movably connected with the moving block, the servo motor works to drive the screw rod to rotate, and the screw rod can be rotated to drive the moving block which is in threaded connection with the screw rod to move.

Preferably, both ends of the moving block are provided with sliding blocks, a sliding groove is formed in the workbench, the moving block and the workbench form a sliding structure, and the moving block can slide in the workbench.

Preferably, connecting rods are arranged at two ends of the moving block, the connecting rods are symmetrically distributed relative to the central axis of the moving block, and the connecting rods can guide movement of the moving block.

Preferably, the top of detector is provided with the fixture block, the bottom of installation piece is provided with the draw-in groove, detector and installation piece constitute the block structure, and the block structure convenient to detach.

Preferably, the dismouting structure includes mounting panel, spring and buckle, the top at the detection incasement portion is installed to the mounting panel, the spring is installed to one side of mounting panel, and the buckle is installed to one side of spring, and the buckle can block into inside the detector, can fix the detector, lets the detector can the dismouting.

Preferably, the external screw threads are uniformly arranged on the outer side wall of the threaded rod, the internal screw threads matched with the external screw threads are uniformly arranged on the inner side wall of the limiting plate, the threaded rod is in threaded connection with the limiting plate, and the threaded rod can be screwed to drive the limiting plate to lift.

(III) beneficial effects

The wafer chip detection tool provided by the utility model has the advantages that: through being provided with the limiting plate on the top of movable plate, connect through threaded rod and guide bar between limiting plate and the movable plate, threaded rod and limiting plate constitute threaded connection, can twist the threaded rod and drive the threaded rod and rotate, the threaded rod is rotatory just can drive the limiting plate that constitutes threaded connection with it go up and down, the limiting plate goes up and down just can carry out spacing to the wafer chip on the movable plate, prevent the circumstances that the wafer chip from appearing the skew, the friction force of limiting plate can be strengthened to the antiskid line, the guide bar runs through the limiting plate, the guide bar can lead to the limiting plate, thereby reach the wafer chip and detect the frock and be convenient for carry out spacing purpose to the wafer chip;

the servo motor is arranged on one side of the workbench, the servo motor works to drive the screw rod to rotate, the screw rod and the moving block form threaded connection, the screw rod rotates to drive the moving block on the top of the moving block to move, the moving plate can move to the inside of the bottom detection box, the wafer chip on the top of the moving plate can be detected by the detector, the connecting rod penetrates through the moving block, and the connecting rod can guide the moving block, so that the purpose that the wafer chip detection tool is convenient for driving the wafer chip to move is achieved;

through the bottom swing joint at the installation piece has the detector, detector and installation piece constitute the block structure, block structure convenient to detach can be gone into the detector card inside the installation piece, connect through the spring between mounting panel and the buckle, the spring has elasticity, the elasticity of spring can drive the buckle and remove, the buckle can remove the card and go into inside installation piece and detector, fix the detector, when needing to change the detector, pull open the buckle just can dismantle the detector and change the detector, thereby reach the purpose that wafer chip detects the frock and be convenient for change the detector.

Drawings

FIG. 1 is a schematic cross-sectional elevation view of the present utility model;

FIG. 2 is a schematic top view of the present utility model;

FIG. 3 is an enlarged partial cross-sectional view of the structure of FIG. 1A according to the present utility model;

FIG. 4 is a schematic view of a three-dimensional structure of a spacing structure according to the present utility model;

fig. 5 is a schematic top view of the present utility model.

Reference numerals in the drawings illustrate: 1. a work table; 2. a moving structure; 201. a servo motor; 202. a screw; 203. a connecting rod; 204. a moving block; 3. a support leg; 4. an anti-slip pad; 5. an inlet; 6. a detector; 7. a mounting block; 8. a disassembly and assembly structure; 801. a mounting plate; 802. a spring; 803. a buckle; 9. a detection box; 10. a moving plate; 11. a limit structure; 1101. a limiting plate; 1102. anti-skid lines; 1103. a guide rod; 1104. a threaded rod.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-5, an embodiment of the present utility model is provided: a wafer chip detection tool comprises support legs 3.

The slipmat 4 is installed to the bottom of stabilizer blade 3, and workstation 1 is installed on the top of stabilizer blade 3.

The internally mounted of workstation 1 has movable structure 2, and movable structure 2 includes servo motor 201, screw rod 202, connecting rod 203 and movable block 204, and servo motor 201 installs in one side of workstation 1, and one side swing joint of servo motor 201 has screw rod 202, and the outside swing joint of screw rod 202 has movable block 204, and the both ends of movable block 204 all are provided with connecting rod 203, and connecting rod 203 is symmetrical about the axis of movable block 204 to be distributed.

Both ends of the moving block 204 are provided with sliding blocks, the inside of the workbench 1 is provided with sliding grooves, and the moving block 204 and the workbench 1 form a sliding structure.

In the first embodiment, the servo motor 201 is firstly operated to drive the screw 202 to rotate, the screw 202 and the moving block 204 form threaded connection, the screw 202 rotates to drive the moving block 204 to move, the moving block 204 moves to drive the moving plate 10 at the top end of the moving block to move, the moving plate 10 can move into the bottom detection box 9, the wafer chip at the top end of the moving plate 10 can be detected by the detector 6, the connecting rod 203 penetrates through the moving block 204, the connecting rod 203 can guide the moving block 204, the detector 6 can detect the wafer chip, and whether the wafer chip has cracks is detected.

The movable plate 10 is installed on the top of workstation 1, and limit structure 11 is installed on the top of movable plate 10, limit structure 11 includes limiting plate 1101, anti-skidding line 1102, guide bar 1103 and threaded rod 1104, and the top at movable plate 10 is installed to guide bar 1103, and the top swing joint of guide bar 1103 has limiting plate 1101, and threaded rod 1104 has been run through to the one end of limiting plate 1101, evenly is provided with the external screw thread on the lateral wall of threaded rod 1104, evenly is provided with the internal screw thread mutually supporting with the external screw thread on the inside wall of limiting plate 1101, threaded rod 1104 is threaded connection with limiting plate 1101.

In a second embodiment, the limiting plate 1101 and the moving plate 10 are connected through the threaded rod 1104 and the guide rod 1103, the threaded rod 1104 and the limiting plate 1101 form a threaded connection, the threaded rod 1104 can be screwed to drive the threaded rod 1104 to rotate, the threaded rod 1104 can rotate to drive the limiting plate 1101 which is in threaded connection with the threaded rod 1104 to lift, the limiting plate 1101 can limit the wafer chip on the moving plate 10 during lifting, the wafer chip is prevented from being deviated, the anti-skid patterns 1102 can strengthen the friction force of the limiting plate 1101, the guide rod 1103 penetrates through the limiting plate 1101, and the guide rod 1103 can guide the limiting plate 1101.

The detection case 9 is installed on the top of workstation 1, and the both sides of detection case 9 all are provided with entry 5, and installation piece 7 is installed on the inside top of detection case 9, and detector 6 is installed to the bottom of installation piece 7, and the top of detector 6 is provided with the fixture block, and the bottom of installation piece 7 is provided with the draw-in groove, and detector 6 and installation piece 7 constitute the block structure.

The dismouting structure 8 is all installed to the both sides of installation piece 7, and dismouting structure 8 includes mounting panel 801, spring 802 and buckle 803, and mounting panel 801 installs on the inside top of detection case 9, and spring 802 is installed to one side of mounting panel 801, and buckle 803 is installed to one side of spring 802.

In the third embodiment, the detector 6 and the mounting block 7 form a clamping structure, the clamping structure is convenient to detach, the detector 6 can be clamped into the mounting block 7, the mounting plate 801 and the buckle 803 are connected through the spring 802, the spring 802 has elasticity, the elasticity of the spring 802 can drive the buckle 803 to move, the buckle 803 can be clamped into the mounting block 7 and the detector 6 in a moving manner, the detector 6 is fixed, and when the detector 6 needs to be replaced, the detector 6 can be detached and replaced by pulling the buckle 803 open.

Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.

Claims

1. A wafer chip detection tool comprises support legs (3);

the method is characterized in that:

the bottom ends of the supporting legs (3) are provided with anti-slip pads (4), and the top ends of the supporting legs (3) are provided with a workbench (1);

the automatic detection device is characterized in that a moving structure (2) is arranged in the workbench (1), a moving plate (10) is arranged at the top end of the workbench (1), a limiting structure (11) is arranged at the top end of the moving plate (10), the limiting structure (11) comprises a limiting plate (1101), anti-skid patterns (1102), a guide rod (1103) and a threaded rod (1104), the guide rod (1103) is arranged at the top end of the moving plate (10), the limiting plate (1101) is movably connected to the top end of the guide rod (1103), the threaded rod (1104) penetrates through one end of the limiting plate (1101), and a detection box (9) is arranged at the top end of the workbench (1);

the detector is characterized in that inlets (5) are formed in two sides of the detection box (9), an installation block (7) is installed at the top end of the inside of the detection box (9), a detector (6) is installed at the bottom end of the installation block (7), and dismounting structures (8) are installed on two sides of the installation block (7).

2. The die inspection tool of claim 1, wherein: the movable structure (2) comprises a servo motor (201), a screw rod (202), a connecting rod (203) and a movable block (204), wherein the servo motor (201) is arranged on one side of the workbench (1), one side of the servo motor (201) is movably connected with the screw rod (202), and the outside of the screw rod (202) is movably connected with the movable block (204).

3. The die inspection tool as claimed in claim 2, wherein: both ends of the moving block (204) are provided with sliding blocks, a sliding groove is formed in the workbench (1), and the moving block (204) and the workbench (1) form a sliding structure.

4. The die inspection tool as claimed in claim 2, wherein: connecting rods (203) are arranged at two ends of the moving block (204), and the connecting rods (203) are symmetrically distributed about the central axis of the moving block (204).

5. The die inspection tool of claim 1, wherein: the top of detector (6) is provided with the fixture block, the bottom of installation piece (7) is provided with the draw-in groove, detector (6) and installation piece (7) constitute the block structure.

6. The die inspection tool of claim 1, wherein: the dismounting structure (8) comprises a mounting plate (801), a spring (802) and a buckle (803), wherein the mounting plate (801) is mounted at the top end of the inside of the detection box (9), the spring (802) is mounted on one side of the mounting plate (801), and the buckle (803) is mounted on one side of the spring (802).

7. The die inspection tool of claim 1, wherein: external threads are uniformly arranged on the outer side wall of the threaded rod (1104), internal threads matched with the external threads are uniformly arranged on the inner side wall of the limiting plate (1101), and the threaded rod (1104) is in threaded connection with the limiting plate (1101).