CN211627643U

CN211627643U - Probe card mounting device applied to probe station

Info

Publication number: CN211627643U
Application number: CN201922413038.2U
Authority: CN
Inventors: 孙军; 徐志源
Original assignee: Wuxi Xinweiyang Technology Co ltd
Current assignee: Wuxi Xinweiyang Technology Co ltd
Priority date: 2019-12-27
Filing date: 2019-12-27
Publication date: 2020-10-02
Anticipated expiration: 2029-12-27

Abstract

The utility model discloses a probe card installation device applied to a probe station, which relates to an auxiliary device of the probe station and aims to solve the problem that a rectangular probe card cannot be installed in the prior art, and the key points of the technical scheme comprise an installation groove arranged on the side wall of a main body of the probe station, wherein a support table is arranged in the installation groove, a holding tank is arranged on the support table, two positioning components for supporting the probe card are arranged in the holding tank, the two positioning components are arranged oppositely, a distance adjusting component for adjusting the relative movement of the two positioning components is arranged in the holding tank, and an installation space for installing the probe card is arranged on the bottom wall of the holding tank; before testing, the supporting table is arranged in the mounting groove, the distance between the two positioning assemblies is adjusted through the distance adjusting assembly according to the shape of the probe card, and the two sides of the probe card are clamped and fixed through the positioning assemblies, so that rectangular probe cards with different widths can be clamped.

Description

Probe card mounting device applied to probe station

Technical Field

The present invention relates to an auxiliary device for a probe station, and more particularly, to a probe card mounting device for a probe station.

Background

The probe station is also called a middle test station, and is mainly applied to the test of semiconductor industry, photoelectric industry, integrated circuits and packaging. The method is widely applied to the research and development of precise electrical measurement of complex and high-speed devices, and aims to ensure quality and reliability and reduce research and development time and cost of device manufacturing processes. Typically, after the wafer processing is completed, the wafer is subjected to a chip acceptance test. The probe on the probe card is directly contacted with the welding pad or the bump on the wafer chip to lead out the chip signal, and then the aim of automatic measurement is achieved by matching with a peripheral test instrument and software control. The probe card is usually fixed on a probe station, and the taking and placing work of the probe card is very important.

Chinese patent No. CN205067532U discloses a probe station, which includes a probe station main body and a probe card placing table, wherein a circular groove is formed in the probe station main body, the probe card placing table is disposed in the circular groove, through holes are formed in the center of the probe card placing table and the center of the bottom of the circular groove, and the bottom of the probe card placing table is connected to a lifting control device. The utility model discloses a probe card is placed the platform and is under lift control device's effect, carries out elevating movement in probe platform main part is inside, can get after rising and put the probe card operation, makes the probe card have bigger contact space, and convenient and fast ground gets and puts the probe card, and the probe card that will place after the decline is fixed and is placed bench surface and circular slot at the probe card in, is convenient for carry out normal test to the probe card. The utility model discloses save time and energy of getting and putting the probe card, had quick, convenient beneficial effect of getting and putting the probe card.

When the probe table in the prior art is used, the probe card is placed in the circular groove for installation, but in practical application, the probe card has a circular shape and a rectangular shape, so when the rectangular probe card needs to be installed, the probe card cannot be placed in the circular groove for installation, and improvement is needed.

SUMMERY OF THE UTILITY MODEL

To the deficiency that prior art exists, the utility model aims to provide a be applied to probe card installation device of probe station, its advantage lies in can installing the probe card of rectangle.

The above object of the present invention can be achieved by the following technical solutions:

the utility model provides a be applied to probe card installation device of probe card platform, is including setting up the mounting groove on detecting platform main part lateral wall, be equipped with the brace table in the mounting groove, be equipped with the holding tank on the brace table, be equipped with two locating component that are used for supporting the probe card in the holding tank, two locating component sets up relatively, be equipped with the roll adjustment subassembly that is used for adjusting two locating component relative motion in the holding tank, be equipped with the installation space who supplies the probe card installation on the tank bottom wall of holding tank.

By adopting the technical scheme, the supporting table is arranged in the mounting groove before testing, the distance between the two positioning components is adjusted by the distance adjusting component according to the shape of the probe card, and the two sides of the probe card are clamped and fixed by the positioning components, so that rectangular probe cards with different widths can be clamped.

Furthermore, a support frame is arranged in the accommodating groove;

the positioning assembly comprises two lead screws which are rotatably arranged on the support frame, the axes of the two lead screws are collinear, the screw thread turning directions of the two lead screws are opposite, the side walls of the lead screws are in threaded connection with connecting rods, the opposite end walls of the lead screws are respectively provided with a driven cone pulley, the support frame is provided with a driving cone pulley which is meshed with the driven cone pulley, and the driving cone pulley is coaxially provided with a rotating rod;

just be equipped with the spout along the axial of lead screw on the inside wall of holding tank, the one end that the lead screw was kept away from to the connecting rod stretches into in the spout, the one end that the lead screw was kept away from to the connecting rod is equipped with the slider that slides in the spout.

Through adopting above-mentioned technical scheme, before fixed probe card, according to the width of probe card, rotate the dwang, drive the initiative cone pulley and rotate to the driven cone pulley of drive rotates, drives the lead screw rotation then, slides in the spout through the slider, thereby two connecting rods can relative motion or opposite movement, can adjust the distance between two connecting rods with this, is favorable to adapting to the probe card of different width.

Furthermore, a supporting plate is arranged on the bottom wall of the accommodating groove, and a waist-shaped hole for the connecting rod to penetrate through is formed in the side wall of the supporting plate.

Through adopting above-mentioned technical scheme, utilize the backup pad to support the connecting rod, be favorable to increasing the stability that the connecting rod removed.

Furthermore, a handle is arranged at one end, away from the driving cone pulley, of the rotating rod.

Through adopting above-mentioned technical scheme, when the lead screw is adjusted to needs, through the handle, the workman of being convenient for rotates the dwang.

Furthermore, the positioning assembly comprises an installation block arranged on the side wall of the connecting rod, a through groove is formed in one side, away from the connecting rod, of the installation block, two positioning rods are arranged on the groove wall of the through groove, a driving wheel and a driven wheel are respectively and rotatably arranged on the side walls of the two positioning rods, the driving wheel and the driven wheel are mutually meshed, clamping blocks are arranged on the side walls of the driving wheel and the driven wheel, and the clamping blocks extend out of the through groove;

the slot wall of the through slot is provided with an installation notch, one side of the driving wheel, which is far away from the driven wheel, extends out of the installation notch, one side of the installation block, which is close to the installation notch, is provided with a positioning block, the side wall of the positioning block is provided with a positioning hole, the axis of the positioning hole is parallel to the axis of the positioning rod, the bottom wall of the positioning hole is provided with a spring, one end of the spring, which is far away from the bottom wall of the positioning hole, is provided with a gear shaping, and one end of.

Through adopting above-mentioned technical scheme, according to the shape of probe card, remove the gear shaping, the extrusion spring breaks away from the action wheel with the gear shaping, rotates the action wheel again, drives from the driving wheel rotation to can adjust the angle between the grip block, four grip block centre gripping probe cards of rethread, loosen the gear shaping again, the spring inserts the tooth shaping in the tooth's socket of action wheel, carries on spacingly with the action wheel and from the driving wheel, thereby can centre gripping probe card. Therefore, the probe card mounting device can adapt to probe cards with different shapes, and the application range of the mounting device is increased.

Furthermore, a supporting plate for supporting the probe card is arranged on one side, away from the mounting block, of the clamping block.

By adopting the technical scheme, the supporting plate is utilized to support the probe card, so that the stability of installing the probe card is increased.

Furthermore, rubber pads are arranged on the side walls of the supporting plate and the clamping block.

By adopting the technical scheme, the rubber pad is utilized, so that the clamping force of the clamping block and the supporting plate on the probe card is favorably reduced, and the damage to the probe card is reduced.

Furthermore, a sliding hole is formed in the bottom wall of the positioning hole, and a pull rod penetrating through the sliding hole is arranged at one end, close to the spring, of the gear shaping.

Through adopting above-mentioned technical scheme, when needs remove the gear shaping, through removing the pull rod, be favorable to increasing the convenience of removing the gear shaping.

To sum up, the utility model discloses following beneficial effect has:

1. according to the width of the probe card, the distance between the two positioning assemblies is adjusted through the distance adjusting assembly, and then the two positioning assemblies are used for supporting the two sides of the probe card, so that the rectangular probe card can be clamped;

2. the support plate is utilized to support the connecting rod, the connecting rod slides in the waist-shaped hole, and the moving stability of the connecting rod is improved;

3. the supporting plate is used for supporting the probe card, so that the mounting stability of the probe card is improved.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment.

Fig. 2 is a partial structure view showing a cross section along a-a in fig. 1.

FIG. 3 is a schematic structural diagram of a support plate, a kidney-shaped hole, a sliding groove and a sliding block in the embodiment.

Fig. 4 is an enlarged view of a portion a in fig. 3.

FIG. 5 is a cross-sectional view of a mounting block and a locating block embodying an embodiment.

In the figure: 1. a probe station body; 10. mounting grooves; 11. a ring plate; 12. a bolt; 2. a support table; 20. accommodating grooves; 21. an installation space; 22. a support frame; 23. a chute; 24. a support plate; 25. a kidney-shaped hole; 3. a positioning assembly; 30. a lead screw; 31. a connecting rod; 32. a driven cone pulley; 33. a driving cone pulley; 34. rotating the rod; 35. a slider; 36. a handle; 4. a distance adjusting component; 40. mounting blocks; 41. a through groove; 42. positioning a rod; 43. a driving wheel; 44. a driven wheel; 45. a clamping block; 46. installing a notch; 47. positioning blocks; 48. positioning holes; 49. a spring; 400. gear shaping; 401. a support plate; 402. a rubber pad; 403. a sliding hole; 404. a pull rod; 406. connecting blocks; 407. a clamping surface.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b):

referring to fig. 1 and 2, a probe card installation device applied to a probe station comprises an installation groove 10 arranged on the side wall of a detection station main body 1, wherein a support table 2 is arranged in the installation groove 10, a ring plate 11 is arranged on the top wall of the support table 2 in a bending mode, the ring plate 11 is arranged on the side wall of the detection station main body 1, a plurality of bolts 12 are uniformly distributed on the side wall of the ring plate 11, and the bolts 12 penetrate through one end of the ring plate 11 and are in threaded connection with the detection station main body 1.

Referring to fig. 1 and 2, an accommodating groove 20 is formed in the side wall of the supporting table 2 and along the height direction of the probing table main body 1, a supporting frame 22 is arranged in the accommodating groove 20, two positioning assemblies 3 for supporting a probe card are arranged in the accommodating groove 20, the two positioning assemblies 3 are arranged oppositely, a distance adjusting assembly 4 for adjusting the relative movement of the two positioning assemblies 3 is arranged in the accommodating groove 20, and an installation space 21 for installing the probe card is formed in the bottom wall of the accommodating groove 20; when the rectangular probe card is used for measurement, the supporting table 2 is clamped into the mounting groove 10, the ring plate 11 is lapped on the side wall of the detection table main body 1, the bolt 12 is screwed, the distance between the two positioning assemblies 3 is adjusted through the distance adjusting assembly 4 according to the width of the probe card, and the positioning assemblies 3 are reused for supporting two sides of the probe card, so that the rectangular probe card with different widths can be conveniently and quickly clamped.

Referring to fig. 2, the positioning assembly 3 includes two lead screws 30 rotatably disposed on the support frame 22 and a connecting rod 31 threadedly connected to a side wall of the lead screws 30, axes of the two lead screws 30 are collinear, the axis of the lead screw 30 is perpendicular to a depth direction of the receiving groove 20, thread turning directions of the two lead screws 30 are opposite, opposite end walls of the lead screws 30 are respectively provided with a driven cone pulley 32, the support frame 22 is provided with a driving cone pulley 33 engaged with the driven cone pulley 32, the driving cone pulley 33 is coaxially provided with a rotating rod 34, and one end of the rotating rod 34 away from the driving cone pulley 33 is provided with a handle 36; it is convenient to rotate the rotating rod 34.

Referring to fig. 2 and 3, a sliding groove 23 is formed in the inner side wall of the accommodating groove 20 and along the axial direction of the lead screw 30, the sliding groove 23 is shaped like a T, one end of the connecting rod 31, which is far away from the lead screw 30, extends into the sliding groove 23, and one end of the connecting rod 31, which is far away from the lead screw 30, is provided with a sliding block 35 which slides in the sliding groove 23; when a probe card needs to be clamped, the handle 36 is rotated to sequentially drive the rotating rod 34, the driving cone pulley 33, the driven cone pulley 32 and the lead screw 30 to rotate, the sliding block 35 slides in the sliding groove 23, and meanwhile, the two connecting rods 31 move oppositely or oppositely by utilizing the reverse direction of the threads on the two lead screws 30, so that the probe card can adapt to probe cards with different widths.

Referring to fig. 3, a supporting plate 24 is arranged on the bottom wall of the accommodating groove 20, a waist-shaped hole 25 for a connecting rod 31 to pass through is arranged on the side wall of the supporting plate 24, and the waist-shaped hole 25 is arranged along the axial direction of the lead screw 30; the lead screw 30 slides in the waist-shaped hole 25, so that the moving stability of the lead screw 30 is improved.

Referring to fig. 3 and 4, the positioning assembly 3 includes an installation block 40 horizontally disposed on the side wall of the connecting rod 31, the installation block 40 is disposed along the radial direction of the connecting rod 31, a through groove 41 is disposed on one side of the installation block 40 away from the connecting rod 31, two positioning rods 42 are disposed on the groove wall of the through groove 41, the axes of the positioning rods 42 are parallel to the axis of the rotating rod 34, a driving wheel 43 and a driven wheel 44 are respectively rotatably disposed on the side walls of the two positioning rods 42, the driving wheel 43 and the driven wheel 44 are engaged with each other, a connecting block 406 is disposed on the side walls of the driving wheel 43 and the driven wheel 44, the through groove 41 is extended from one side of the two connecting blocks 406 away from the driving wheel 43 and the driven wheel 44, a clamping block 45.

Referring to fig. 4, a supporting plate 401 for supporting the probe card is disposed on a side of the clamping block 45 away from the connecting block 406; increasing the stability of supporting the probe card.

Referring to fig. 4 and 5, a mounting notch 46 is formed in a groove wall of the through groove 41, one side of the driving wheel 43, which is away from the driven wheel 44, extends out of the mounting notch 46, a positioning block 47 is arranged on one side of the mounting block 40, which is close to the mounting notch 46, a positioning hole 48 is formed in a side wall of the positioning block 47 and along an axial direction of the positioning rod 42, an axial line of the positioning hole 48 is parallel to an axial line of the positioning rod 42, a spring 49 is arranged on a bottom wall of the positioning hole 48, a gear shaping 400 is arranged at one end of the spring 49, which is away from a bottom wall of the positioning hole.

Referring to fig. 4 and 5, a sliding hole 403 is formed in the bottom wall of the positioning hole 48, and a pull rod 404 penetrating through the sliding hole 403 is arranged at one end of the gear shaping 400 close to the spring 49, so that convenience in pulling the gear shaping 400 is improved; after the connecting rod 31 is adjusted, the pull rod 404 is pulled to press the spring 49, the gear shaping 400 is moved out of the tooth groove of the driving wheel 43, the driving wheel 43 is rotated to drive the driven wheel 44, and further the angle between the clamping blocks 45 can be driven, if a rectangular probe card is clamped, the two clamping surfaces 407 are adjusted to be positioned on the same plane, the four clamping blocks 45 clamp the side wall of the probe card, if a circular probe card is clamped, the clamping blocks 45 are rotated to adjust the two clamping surfaces 407 to be opposite, then the probe card is clamped, finally the pull rod 404 is loosened, the spring 49 extends the gear shaping 400, the gear shaping 400 is inserted into the tooth groove of the driving wheel 43, the driving wheel 43 and the driven wheel 44 are fixed, and the gear shaping can be clamped to adapt to probe cards of different shapes.

Referring to fig. 5, rubber pads 402 are arranged on the side walls of the supporting plate 401 and the clamping block 45; the elasticity of rubber pad 402 is beneficial to reducing the damage of clamping blocks 45 and supporting plate 401 to the surface of the probe card.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.

Claims

1. A probe card mounting device applied to a probe station is characterized in that: including setting up mounting groove (10) on surveying platform main part (1) lateral wall, be equipped with brace table (2) in mounting groove (10), be equipped with holding tank (20) on brace table (2), be equipped with two locating component (3) that are used for supporting the probe card in holding tank (20), two locating component (3) set up relatively, be equipped with in holding tank (20) and be used for adjusting the roll adjustment subassembly (4) of two locating component (3) relative motion, be equipped with on the tank bottom wall of holding tank (20) and supply installation space (21) of probe card installation.

2. The probe card mounting apparatus applied to a probe station according to claim 1, wherein: a support frame (22) is arranged in the accommodating groove (20);

the positioning assembly (3) comprises two lead screws (30) rotatably arranged on a support frame (22), the axes of the two lead screws (30) are collinear, the thread turning directions of the two lead screws (30) are opposite, a connecting rod (31) is in threaded connection with the side wall of each lead screw (30), driven cone pulleys (32) are arranged on the opposite end walls of the lead screws (30), a driving cone pulley (33) meshed with the driven cone pulleys (32) is arranged on the support frame (22), and a rotating rod (34) is coaxially arranged on the driving cone pulley (33);

on the inside wall of holding tank (20) and along the axial of lead screw (30) be equipped with spout (23), the one end that lead screw (30) were kept away from in connecting rod (31) stretches into spout (23), the one end that lead screw (30) were kept away from in connecting rod (31) is equipped with slider (35) that slide in spout (23).

3. The probe card mounting apparatus applied to a probe station according to claim 2, wherein: the bottom wall of the accommodating groove (20) is provided with a supporting plate (24), and the side wall of the supporting plate (24) is provided with a waist-shaped hole (25) for the connecting rod (31) to pass through.

4. The probe card mounting apparatus applied to a probe station according to claim 2, wherein: and a handle (36) is arranged at one end of the rotating rod (34) far away from the driving cone pulley (33).

5. The probe card mounting apparatus applied to a probe station according to claim 2, wherein: the positioning assembly (3) comprises a mounting block (40) arranged on the side wall of the connecting rod (31), a through groove (41) is formed in one side, away from the connecting rod (31), of the mounting block (40), two positioning rods (42) are arranged on the groove wall of the through groove (41), a driving wheel (43) and a driven wheel (44) are respectively arranged on the side walls of the two positioning rods (42) in a rotating mode, the driving wheel (43) and the driven wheel (44) are meshed with each other, clamping blocks (45) are arranged on the side walls of the driving wheel (43) and the driven wheel (44), and the clamping blocks (45) extend out of the through groove (41);

be equipped with installation breach (46) on the cell wall of logical groove (41), one side that driven wheel (44) was kept away from in action wheel (43) stretches out installation breach (46), one side that installation piece (40) are close to installation breach (46) is equipped with locating piece (47), be equipped with locating hole (48) on the lateral wall of locating piece (47), the axis of locating hole (48) is parallel with the axis of locating lever (42), be equipped with spring (49) on locating hole (48) hole bottom wall, the one end that locating hole (48) hole bottom wall was kept away from in spring (49) is equipped with at gear shaping (400), the one end that spring (49) were kept away from in gear shaping (400) stretches out locating hole (48) and meshes with action wheel (43).

6. The probe card mounting apparatus applied to a probe station according to claim 5, wherein: and a supporting plate (401) for supporting the probe card is arranged on one side of the clamping block (45) far away from the mounting block (40).

7. The probe card mounting apparatus applied to a probe station according to claim 6, wherein: and rubber pads (402) are arranged on the side walls of the supporting plate (401) and the clamping block (45).

8. The probe card mounting apparatus applied to a probe station according to claim 5, wherein: the gear shaping machine is characterized in that a sliding hole (403) is formed in the bottom wall of the positioning hole (48), and a pull rod (404) penetrating out of the sliding hole (403) is arranged at one end, close to the spring (49), of the gear shaping (400).