CN205910230U - Detector head assembly based on probe - Google Patents
Detector head assembly based on probe Download PDFInfo
- Publication number
- CN205910230U CN205910230U CN201620794220.0U CN201620794220U CN205910230U CN 205910230 U CN205910230 U CN 205910230U CN 201620794220 U CN201620794220 U CN 201620794220U CN 205910230 U CN205910230 U CN 205910230U
- Authority
- CN
- China
- Prior art keywords
- probe
- cavity
- head assembly
- assembly based
- detection head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model relates to an automatic frock technical field that detects discloses a detector head assembly based on probe, including the probe seat, the upper end center of probe seat is equipped with the cavity, the cavity bottom is equipped with a plurality of probe positioning hole, be equipped with the probe in the probe positioning hole, probe positioning hole's both ends are equipped with the cover and establish the insulation clamping sleeve in the probe outside, the lower extreme surface of probe is located insulation clamping sleeve department and is equipped with limiting convex ring, the upper end of probe is equipped with conductive sleeve, conductive sleeve's outer end is equipped with leads electrical pillar, be equipped with annular step surface on the inner wall of cavity, the last circuit board that is equipped with of annular step surface, the circuit board with lead between the electrical pillar electricity and be connected, the open end of cavity is equipped with the end cover, threaded connection between end cover and the cavity open end, the side center of going up of end cover is equipped with the spliced pole, the bottom surface center of probe seat is equipped with spacing post. The utility model discloses be connected the use with automated inspection equipment, greatly improve the detection efficiency of wafer piece, the probe damages the back and changes the convenience.
Description
Technical field
The utility model is related to test technique automatic field, more particularly, to a kind of detection head assembly based on probe.
Background technology
Wafer is to produce the carrier of used in integrated circuits, refers to monocrystalline silicon wafer more, is also wafer chip.Common silica sand draws
Refine, make silicon single crystal rod through dissolving, purification, distillation series of measures, silicon single crystal rod, after polishing, section, just becomes
For wafer piece.A lot of one sound of laughing wafers are distributed with, wafer is arranged in array, wafer is in envelope on one discoid wafer piece
Dress needs its performance is detected there are hundreds and thousands of wafers due on a wafer piece, manually before being manufactured into chip
By probe, being detected, workload is very big to each wafer, and easy missing inspection.
Utility model content
The utility model is in order to solve the problems, such as that in prior art, wafer piece detection efficiency is low, there is provided one kind can be suitably used for
Automatic checkout equipment, is greatly improved the detection head assembly based on probe of detection efficiency.
To achieve these goals, the utility model adopts the following technical scheme that
A kind of detection head assembly based on probe, including probe base, the upper end center of described probe base is provided with cavity, described
Cavity bottom is provided with some probe positioning through hole, is provided with probe in described probe positioning through hole, and the two of described probe positioning through hole
End is provided with the insulating jacket being set in outside probe, and the rear surface of described probe is located at and is provided with position limiting convex ring at insulating jacket,
The upper end of described probe is provided with conductive sleeve, and the outer end of described conductive sleeve is provided with conductive pole, and the inwall of described cavity is provided with annular
Cascaded surface, described annular step tread is provided with wiring board, electrically connects between described wiring board and conductive pole, described cavity
Openend is provided with end cap, threadeds between end cap and cavity openend, and the upper side center of described end cap is provided with connecting post；Institute
The bottom center stating probe base is provided with limited post.
Connecting post is connected with the elevating mechanism on automatic checkout equipment, and wafer piece is arranged on sliding support, probe base to
Lower movement once, the wafer Elastic Contact on all of probe and wafer piece surface, detection, then move on probe base, sliding support
Wafer piece is driven to move a segment distance, probe base declines detection, circulates successively, all wafers on wafer piece are all detected one
Secondary, directly from automatic detection system, read testing result after detection, greatly improve the detection efficiency of wafer piece；Circuit
Plate, probe pin upper ends electrical connection are all encapsulated in cavity, little by external interference, have good waterproof and dustproof performance good；Probe
Stroke receive the restriction of limited post, prevent probe excess compression from damaging, improve probe service life；The two ends of probe lead to
Cross two insulating jackets spacing and insulate and probe base between, probe pin upper ends are connected with conductive sleeve, and probe lower end is by limit convex
Ring is spacing, and probe using needing to change it is only necessary to unload conductive sleeve, unloads the insulating jacket of probe pin upper ends for a long time, then will
Probe is extracted out from lower end, replaces with new probe, probe is very convenient to.
Preferably, threadeding between described limited post and probe base, the outside of described limited post is arranged with adjusting set,
Described limited post is stud, threadeds, the side of described adjusting set is provided with spacing spiral shell between described adjusting set and limited post
Bolt, the lower end of described adjusting set is provided with buffering spacer.Adjusting set can adjust spacing height, and the probe adapting to different model is adjusted
Section.
Preferably, the side of described cavity is provided with fairlead, the data wire on wiring board passes through fairlead, data wire
Outer end is provided with data pin, and described lead in the hole is provided with waterproof jacket.Data wire on wiring board stretches out at fairlead, data
Joint is directly connected to the interface in automation equipment, realizes data transfer；Waterproof jacket seals to fairlead, plays waterproof and makees
With preventing the steam in the external world from entering in cavity and leading to probe short circuit.
Preferably, the downside edge of described end cap and wiring board edge are provided with sealing ring.Sealing ring plays sealing
Effect, prevents outside moisture from entering in cavity and causes short circuit.
Preferably, described insulating jacket includes chuck body, is located at the back-up ring of chuck body one end, described chuck is originally
The other end lateral surface of body is tapered.Chuck body head is easy in taper can be in quick insertion probe positioning through hole, and back-up ring reveals
Outside probe positioning through hole, it is easy to take out insulating jacket.
Preferably, the detection end face of all probes is sphere, the detection end face of all probes is coplanar.Detection end face and crystalline substance
Unit's contact detection, sphere be can ensure that and contacted well with wafer.
Therefore, the utility model is connected use with automatic checkout equipment, and the detection efficiency of wafer piece is greatly improved；Certainly simultaneously
Body good seal performance, water proof and dust proof performance is good, good stability；It is very convenient to after tissue damage.
Brief description
Fig. 1 is a kind of structural representation of the present utility model.
Fig. 2 is the sectional view of Fig. 1.
Fig. 3 is close-up schematic view at a in Fig. 2.
Fig. 4 is close-up schematic view at b in Fig. 2.
In figure: probe base 1, cavity 2, probe positioning through hole 3, probe 4, insulating jacket 5, conductive sleeve 6, conductive pole 7, annular
Cascaded surface 8, wiring board 9, end cap 10, sealing ring 11, connecting post 12, fairlead 13, data wire 14, data pin 15, waterproof jacket
16th, limited post 17, adjusting set 18, caging bolt 19, buffering spacer 20, position limiting convex ring 40, chuck body 50, back-up ring 51.
Specific embodiment
With reference to the accompanying drawings and detailed description the utility model is further described:
A kind of detection head assembly based on probe as depicted in figs. 1 and 2, including probe base 1, in the upper end of probe base 1
The heart is provided with cavity 2, and cavity bottom is provided with some probe positioning through hole 3, is provided with probe 4, in the present embodiment in probe positioning through hole
Probe have 16, the matrix distribution in 4x4, the two ends of probe positioning through hole 3 are provided with the insulating jacket being set in outside probe
5, probe base bottom surface is stretched out in the lower end of probe, and the detection end face of probe is sphere, and the detection end face of all probes is coplanar；As Fig. 3
Shown, insulating jacket 5 includes chuck body 50, is located at the back-up ring 51 of chuck body one end, the other end lateral surface of chuck body
Tapered, the rear surface of probe 4 is located at and is provided with position limiting convex ring 40, as shown in figure 4, the upper end of probe is provided with and leads at insulating jacket
Electricity set 6, the outer end of conductive sleeve 6 is provided with conductive pole 7, and the inwall of cavity is provided with annular step tread 8, and annular step tread is provided with line
Road plate 9, electrically connects between wiring board and conductive pole, and the openend of cavity is provided with end cap 10, spiral shell between end cap and cavity openend
Line connects, and the downside edge of end cap and wiring board edge are provided with sealing ring 11, and the upper side center of end cap is provided with connecting post
12；The side of cavity is provided with fairlead 13, and the data wire 14 on wiring board passes through fairlead, and the outer end of data wire is provided with data and inserts
15, lead in the hole is provided with waterproof jacket 16；The bottom center of probe base is provided with limited post 17, screw thread between limited post and probe base
Connect, the outside of limited post is arranged with adjusting set 18, limited post is stud, threadeds between adjusting set and limited post, adjust
The side of set is provided with caging bolt 19, and the lower end of adjusting set is provided with buffering spacer 20.
In conjunction with accompanying drawing, using method of the present utility model is as follows: connecting post is connected with the elevating mechanism on automatic checkout equipment
Connect, data pin is connected with the socket on automatic checkout equipment, wafer piece is arranged on sliding support, and probe base moves down one
Secondary, the probe of 4x4 corresponds Elastic Contact, detection with the wafer of the 4x4 on wafer piece surface respectively, then moves on probe base,
Sliding support drives wafer piece to move a segment distance, and probe base declines detection, circulates successively, by all wafers on wafer piece all
Detection once, is directly read testing result from automatic detection system, is greatly improved the detection effect of wafer piece after detection
Rate；The connection of wiring board, probe and conducting strip is all completely in cavity, little by external interference, waterproof and dustproof performance
Good；After tissue damage, it is very convenient to.
Claims (6)
1. a kind of detection head assembly based on probe, is characterized in that, including probe base, the upper end center of described probe base is provided with recessed
Chamber, described cavity bottom is provided with some probe positioning through hole, is provided with probe in described probe positioning through hole, and described probe positioning is logical
The two ends in hole are provided with the insulating jacket being set in outside probe, the rear surface of described probe be located at be provided with insulating jacket spacing
Bulge loop, the upper end of described probe is provided with conductive sleeve, and the outer end of described conductive sleeve is provided with conductive pole, and the inwall of described cavity is provided with
Annular step tread, described annular step tread is provided with wiring board, electrically connects between described wiring board and conductive pole, described recessed
The openend in chamber is provided with end cap, threadeds between end cap and cavity openend, and the upper side center of described end cap is provided with connection
Post；The bottom center of described probe base is provided with limited post.
2. a kind of detection head assembly based on probe according to claim 1, is characterized in that, described limited post and probe base
Between threaded, the outside of described limited post is arranged with adjusting set, and described limited post is stud, described adjusting set with spacing
Threaded between post, the side of described adjusting set is provided with caging bolt, and the lower end of described adjusting set is provided with buffering spacer.
3. a kind of detection head assembly based on probe according to claim 1, is characterized in that, the side of described cavity is provided with
Fairlead, the data wire on wiring board passes through fairlead, and the outer end of data wire is provided with data pin, and described lead in the hole is provided with
Waterproof jacket.
4. a kind of detection head assembly based on probe according to claim 1 or 2 or 3, is characterized in that, under described end cap
Lateral edge and wiring board edge are provided with sealing ring.
5. a kind of detection head assembly based on probe according to claim 1, is characterized in that, described insulating jacket includes
Chuck body, it is located at the back-up ring of chuck body one end, the other end lateral surface of described chuck body is tapered.
6. a kind of detection head assembly based on probe according to claim 1, is characterized in that, the detection end face of all probes
For sphere, the detection end face of all probes is coplanar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794220.0U CN205910230U (en) | 2016-07-26 | 2016-07-26 | Detector head assembly based on probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794220.0U CN205910230U (en) | 2016-07-26 | 2016-07-26 | Detector head assembly based on probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205910230U true CN205910230U (en) | 2017-01-25 |
Family
ID=57803025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620794220.0U Active CN205910230U (en) | 2016-07-26 | 2016-07-26 | Detector head assembly based on probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205910230U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107861054A (en) * | 2017-12-08 | 2018-03-30 | 张家港市得道电子有限公司 | A kind of quick test fixture of circuit board |
| CN107884704A (en) * | 2017-12-12 | 2018-04-06 | 张家港市得道电子有限公司 | A kind of quick test fixture of improved circuit board |
| CN109507457A (en) * | 2017-09-15 | 2019-03-22 | 中华精测科技股份有限公司 | Probe card device and its circular probe |
-
2016
- 2016-07-26 CN CN201620794220.0U patent/CN205910230U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109507457A (en) * | 2017-09-15 | 2019-03-22 | 中华精测科技股份有限公司 | Probe card device and its circular probe |
| CN107861054A (en) * | 2017-12-08 | 2018-03-30 | 张家港市得道电子有限公司 | A kind of quick test fixture of circuit board |
| CN107884704A (en) * | 2017-12-12 | 2018-04-06 | 张家港市得道电子有限公司 | A kind of quick test fixture of improved circuit board |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205910230U (en) | Detector head assembly based on probe | |
| CN104914278A (en) | Test fixture for single layer capacitor | |
| CN206479559U (en) | Self-adaptive electric power semiconductor die testing adapter | |
| CN106680546A (en) | Adaptive power semiconductor chip test adapter | |
| CN205911514U (en) | Wafer piece multiprobe detects head | |
| CN205911288U (en) | Probe needle assembly based on wafer piece detects | |
| CN205911513U (en) | Wafer piece detects head convenient to change probe | |
| CN205910301U (en) | Stable form wafer piece detector head assembly | |
| CN204989232U (en) | A test fixture for individual layer electric capacity | |
| CN205910231U (en) | Regulation formula wafer piece detector head assembly | |
| CN202394845U (en) | Insulativity testing device for plastic encapsulated microelectronic device | |
| CN208953581U (en) | A kind of insulation compression-resistant type wafer detection probe | |
| CN206020479U (en) | A kind of wafer piece detects header structure | |
| CN215070566U (en) | New energy battery detects electric wire quick connecting device | |
| CN205229222U (en) | Simple and easy probe fixing seat | |
| CN207909835U (en) | A kind of integrated detection head assembly based on the detection of wafer piece | |
| CN204160371U (en) | A kind of bonding type thyristor chip test adapter | |
| CN105067934B (en) | A kind of multicore cable detects tool | |
| CN211955758U (en) | Clamp for detecting voltage internal resistance of battery | |
| CN208902823U (en) | A kind of automobile connector detection device | |
| CN208953585U (en) | A kind of wafer piece detection combined type detector | |
| CN209198495U (en) | A kind of power battery Soft Roll test fixture | |
| CN205880107U (en) | Reserve core of cable extends and connects | |
| CN205229402U (en) | First structure of wafer chip assay | |
| CN205229221U (en) | Wafer automated inspection is probe positioning fixture for equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |