CN205911288U - Probe needle assembly based on wafer piece detects - Google Patents
Probe needle assembly based on wafer piece detects Download PDFInfo
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- CN205911288U CN205911288U CN201620794219.8U CN201620794219U CN205911288U CN 205911288 U CN205911288 U CN 205911288U CN 201620794219 U CN201620794219 U CN 201620794219U CN 205911288 U CN205911288 U CN 205911288U
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- probe
- screw rod
- connecting seat
- cavity
- detection
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Abstract
The utility model relates to an automatic frock technical field that detects discloses a probe needle assembly based on wafer piece detects, including the probe seat, the probe seat is equipped with the cavity by ceramic grinding, the upper end center of probe seat, and the cavity bottom is equipped with a plurality of probe positioning hole, is equipped with the probe in the probe positioning hole, the last circuit board that is equipped with of annular step surface, and the open end of cavity is equipped with the end cover, and the outside of probe seat is equipped with a plurality of annular radiating grooves, the side center of going up of end cover is equipped with the screw rod, rotates between the lower extreme of screw rod and the end cover and is connected, is equipped with the swivel nut on the bottom plate of connecting seat, the screw rod pass the swivel nut, the upper end of screw rod is equipped with the regulating wheel, still is equipped with the guide bar parallel with the screw rod on the end cover, guide bar and connecting seat sliding connection, the top of connecting seat is equipped with the spliced pole. The utility model discloses can be applicable to automated inspection equipment, the installation is adjusted conveniently, can greatly improve detection efficiency, sealing performance was good while self, and waterproof dirt resistance can be good, and stability is good.
Description
Technical field
The utility model is related to test technique automatic field, more particularly, to a kind of probe groups based on the detection of wafer piece
Part.
Background technology
Wafer (wafer), is the carrier producing used in integrated circuits, refers to monocrystalline silicon wafer more, be also wafer chip.Commonly
Silica sand draws refinement, makes silicon single crystal rod through dissolving, purification, distillation series of measures, silicon single crystal rod is through polishing, cutting into slices it
Afterwards, just become wafer piece.A lot of one sound of laughing wafers are distributed with, wafer is arranged in array on one discoid wafer piece,
Wafer needed its performance is detected before encapsulation is manufactured into chip, brilliant due to there being hundreds and thousands of on a wafer piece
Unit, manually detects, workload is very big by probe to each wafer, and easy missing inspection.
Utility model content
The utility model is in order to solve the problems, such as that in prior art, wafer piece detection efficiency is low, there is provided one kind can be suitably used for
Automatic checkout equipment, installs easy to adjust, and the probe assembly based on wafer piece detection of detection efficiency can be greatly improved.
To achieve these goals, the utility model adopts the following technical scheme that
A kind of probe assembly based on the detection of wafer piece, including probe base, described probe base is made up of pottery, described spy
The upper end center of needle stand is provided with cavity, and described cavity bottom is provided with some probe positioning through hole, sets in described probe positioning through hole
There is a probe, probe base bottom surface is stretched out in the lower end of probe, the inwall of described cavity is provided with annular step tread, described ring ladder
Face is provided with wiring board, electrically connects, the openend of described cavity is provided with end cap, described probe between described wiring board and probe
The outside of seat is provided with some circular radiating grooves；The upper side center of described end cap is provided with screw rod, between the lower end of screw rod and end cap
Rotate and connect, the surface of described end cap is provided with connecting seat, and the base plate of connecting seat is provided with swivel nut, and described screw rod passes through spiral shell
Set, the upper end of described screw rod is provided with left regulation wheel, is provided with pretension stage clip, described end cap between described left regulation wheel and the top surface of connecting seat
On be additionally provided with the guide post parallel with screw rod, the upper end of described guide post passes through the base plate of connecting seat to be formed and is slidably connected, described
The top of connecting seat is provided with connecting post.
Connecting post is connected with the elevating mechanism on automatic checkout equipment, and the lifting displacement of elevating mechanism is fixing, wafer
Piece is arranged on sliding support, drives screw rod to rotate by left regulation wheel and realizes the integral elevating of probe base, thus adjust probe with
Decrement during wafer contact, it is ensured that probe is stably contacted with wafer, regulates the automatic pretension of pretension stage clip, prevents detection process
Rotate between middle screw rod and swivel nut；Probe base moves down once, and all of probe is elastic with the wafer on wafer piece surface
Contact, detection, then move on probe base, and sliding support drives wafer piece to move a segment distance, and probe base declines detection, follows successively
Ring, all wafers on wafer piece are all detected once, directly read testing result, pole after detection from automatic detection system
The big detection efficiency that improve wafer piece；Wiring board, probe pin upper ends electrical connection are all encapsulated in cavity, have good preventing
Water, anti-dust performance are good, good stability；Probe base is made up of pottery, good insulation preformance, and cooperation circular radiating groove is it is ensured that wiring board
Good radiating.
Preferably, the two ends of described probe positioning through hole are provided with the insulating jacket being set in outside probe, described probe
Rear surface be located at and be provided with position limiting convex ring at insulating jacket, the upper end of described probe is provided with conductive sleeve, described conductive sleeve outer
End is provided with conductive pole, electrically connects between described conductive pole and wiring board.It is spacing simultaneously that two insulating jackets are passed through at the two ends of probe
Insulate and probe base between, probe pin upper ends are connected with conductive sleeve, probe lower end is spacing by position limiting convex ring, and probe uses for a long time
Need to change it is only necessary to unload conductive sleeve, unload the insulating jacket of probe pin upper ends, then probe is extracted out from lower end, replace with
New probe, probe is very convenient to.
Preferably, described insulating jacket includes chuck body, is located at the back-up ring of chuck body one end, described chuck is originally
The other end lateral surface of body is tapered.Chuck body head is easy in taper can be in quick insertion probe positioning through hole, and back-up ring reveals
Outside probe positioning through hole, it is easy to take out insulating jacket.
Preferably, the side of described cavity is provided with fairlead, the data wire on wiring board passes through fairlead, data wire
Outer end is provided with data pin, and described lead in the hole is provided with waterproof jacket.Data wire on wiring board stretches out at fairlead, data
Joint is directly connected to the interface in automation equipment, realizes data transfer；Waterproof jacket seals to fairlead, plays waterproof and makees
With preventing the steam in the external world from entering in cavity and leading to probe short circuit.
Preferably, the downside edge of described end cap and wiring board edge are provided with sealing ring.Sealing ring plays sealing
Effect, prevents outside moisture from entering in cavity and causes short circuit.
Preferably, the detection end face of all probes is sphere, the detection end face of all probes is coplanar.Detection end face and crystalline substance
Unit's contact detection, sphere be can ensure that and contacted well with wafer.
Preferably, the bottom center of described probe base is provided with limited post, between described limited post and probe base, screw thread connects
Connect, the outside of described limited post is arranged with adjusting set, and described limited post is stud, and the lower end of described adjusting set is provided with cushion pad
Piece.The distance between buffering spacer and probe base bottom surface can be adjusted by rotating adjusting set, thus controlling the maximum pressure of probe
Contracting amount is it is ensured that probe；When the elevating mechanism on automatic checkout equipment breaks down, it is prevented from probe and stabs wafer piece.
Therefore, the utility model can be suitably used for automatic checkout equipment, installs easy to adjust, detection efficiency can be greatly improved；
Self seal performance is good simultaneously, and water proof and dust proof performance is good, good stability；It is very convenient to after tissue damage.
Brief description
Fig. 1 is a kind of structural representation of the present utility model.
Fig. 2 is the internal structure schematic diagram of probe base.
Fig. 3 is close-up schematic view at a in Fig. 2.
Fig. 4 is close-up schematic view at b in Fig. 2.
In figure: probe base 1, cavity 2, probe positioning through hole 3, probe 4, insulating jacket 5, conductive sleeve 6, conductive pole 7, annular
Cascaded surface 8, wiring board 9, end cap 10, sealing ring 11, screw rod 12, fairlead 13, data wire 14, data pin 15, waterproof jacket 16,
Connecting seat 17, swivel nut 18, pretension stage clip 19, left regulation wheel 20, guide post 21, connecting post 22, limited post 23, adjusting set 24, buffering
Pad 25, rotatable lamella 26, position limiting convex ring 40, chuck body 50, back-up ring 51, circular radiating groove 100.
Specific embodiment
With reference to the accompanying drawings and detailed description the utility model is further described:
A kind of probe assembly based on the detection of wafer piece as depicted in figs. 1 and 2, including probe base 1, probe base is by pottery
Make, the outside of probe base is provided with some circular radiating grooves 100, and the upper end center of probe base 1 is provided with cavity 2, and cavity bottom sets
There are some probe positioning through hole 3, in probe positioning through hole, be provided with probe 4, the probe in the present embodiment has 16, the square in 4x4
Battle array distribution, the two ends of probe positioning through hole 3 are provided with the insulating jacket 5 being set in outside probe, and probe base is stretched out in the lower end of probe
Bottom surface, the detection end face of probe is sphere, and the detection end face of all probes is coplanar；As shown in figure 3, insulating jacket 5 includes chuck
Body 50, it is located at the back-up ring 51 of chuck body one end, the other end lateral surface of chuck body is tapered, the rear surface of probe 4
It is provided with position limiting convex ring 40 at insulating jacket, as shown in figure 4, the upper end of probe is provided with conductive sleeve 6, the outer end of conductive sleeve 6 sets
There is conductive pole 7, the inwall of cavity is provided with annular step tread 8, and annular step tread is provided with wiring board 9, wiring board and conductive pole
Between electrically connect, the openend of cavity is provided with end cap 10, threadeds between end cap and cavity openend, the downside side of end cap
Edge and wiring board edge are provided with sealing ring 11, and the side of cavity is provided with fairlead 13, and the data wire 14 on wiring board passes through and draws
String holes, the outer end of data wire is provided with data pin 15, and lead in the hole is provided with waterproof jacket 16.
The upper side center of end cap is provided with screw rod 12, rotates and be connected between the lower end of screw rod and end cap, the surface of end cap
It is provided with connecting seat 17, the base plate of connecting seat is provided with swivel nut 18, screw rod passes through swivel nut, sets between left regulation wheel and the top surface of connecting seat
There is pretension stage clip 19, between left regulation wheel and pretension stage clip, be provided with rotatable lamella 26, the upper end of screw rod is provided with left regulation wheel 20, on end cap also
It is provided with the guide post 21 parallel with screw rod, the upper end of guide post passes through the base plate of connecting seat to be formed and is slidably connected, the top of connecting seat
Portion is provided with connecting post 22；The bottom center of probe base is provided with limited post 23, threadeds between limited post and probe base, limited post
Outside be arranged with adjusting set 24, limited post be stud, threaded between adjusting set and limited post, the lower end of adjusting set is provided with
Buffering spacer 25.
In conjunction with accompanying drawing, using method of the present utility model is as follows: connecting post is connected with the elevating mechanism on automatic checkout equipment
Connect, data pin is connected with the socket on automatic checkout equipment, drive screw rod to rotate the entirety realizing probe base by left regulation wheel
Lifting, thus adjust decrement when probe is contacted with wafer it is ensured that probe is stably contacted with wafer；Wafer piece is arranged on slip
On support, probe base moves down once, and the probe of 4x4 corresponds elastic connecting with the wafer of the 4x4 on wafer piece surface respectively
Tactile, detection, then moves on probe base, and sliding support drives wafer piece to move a segment distance, probe base decline detection, follows successively
Ring, all wafers on wafer piece are all detected once, directly read testing result, pole after detection from automatic detection system
The big detection efficiency that improve wafer piece；The connection of wiring board, probe and conducting strip is all completely in cavity, by outer
Boundary's interference is little, and waterproof and dustproof performance is good；After tissue damage, it is very convenient to.
Claims (6)
1. a kind of probe assembly based on the detection of wafer piece, is characterized in that, including probe base, described probe base is by pottery system
Become, the upper end center of described probe base is provided with cavity, described cavity bottom is provided with some probe positioning through hole, described probe positioning
It is provided with probe, probe base bottom surface is stretched out in the lower end of probe, and the inwall of described cavity is provided with annular step tread, described in through hole
Annular step tread is provided with wiring board, electrically connects, the openend of described cavity is provided with end cap between described wiring board and probe,
The outside of described probe base is provided with some circular radiating grooves；The upper side center of described end cap is provided with screw rod, the lower end of screw rod with
Rotate between end cap and connect, the surface of described end cap is provided with connecting seat, the base plate of connecting seat is provided with swivel nut, described screw rod
Through swivel nut, the upper end of described screw rod is provided with left regulation wheel, is provided with pretension stage clip, institute between described left regulation wheel and the top surface of connecting seat
State and the guide post parallel with screw rod is additionally provided with end cap, the upper end of described guide post passes through the base plate of connecting seat to form the company of slip
Connect, the top of described connecting seat is provided with connecting post.
2. a kind of probe assembly based on the detection of wafer piece according to claim 1, is characterized in that, described probe positioning is logical
The two ends in hole are provided with the insulating jacket being set in outside probe, the rear surface of described probe be located at be provided with insulating jacket spacing
Bulge loop, the upper end of described probe is provided with conductive sleeve, and the outer end of described conductive sleeve is provided with conductive pole, described conductive pole and wiring board
Between electrically connect.
3. a kind of probe assembly based on the detection of wafer piece according to claim 2, is characterized in that, described insulating jacket
Including chuck body, the back-up ring that is located at chuck body one end, the other end lateral surface of described chuck body is tapered.
4. a kind of probe assembly based on the detection of wafer piece according to claim 1 or 2 or 3, is characterized in that, described cavity
Side be provided with fairlead, the data wire on wiring board passes through fairlead, and the outer end of data wire is provided with data pin, and described draws
It is provided with waterproof jacket in string holes.
5. a kind of probe assembly based on the detection of wafer piece according to claim 1, is characterized in that, the downside of described end cap
Face edge and wiring board edge are provided with sealing ring.
6. a kind of probe assembly based on the detection of wafer piece according to claim 1, is characterized in that, the bottom of described probe base
Face center is provided with limited post, threadeds between described limited post and probe base, and the outside of described limited post is arranged with adjusting set,
Described limited post is stud, threadeds, the lower end of described adjusting set is provided with cushion pad between described adjusting set and limited post
Piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794219.8U CN205911288U (en) | 2016-07-26 | 2016-07-26 | Probe needle assembly based on wafer piece detects |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794219.8U CN205911288U (en) | 2016-07-26 | 2016-07-26 | Probe needle assembly based on wafer piece detects |
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| Publication Number | Publication Date |
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| CN205911288U true CN205911288U (en) | 2017-01-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620794219.8U Active CN205911288U (en) | 2016-07-26 | 2016-07-26 | Probe needle assembly based on wafer piece detects |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106802248A (en) * | 2017-02-04 | 2017-06-06 | 东莞市圣荣自动化科技有限公司 | A kind of thermal source generating means in radiator test equipment |
| CN115754556A (en) * | 2022-11-25 | 2023-03-07 | 温州众彩汽车零部件有限公司 | Vehicle panel aging deformation rate detection equipment with multiple touch hands |
-
2016
- 2016-07-26 CN CN201620794219.8U patent/CN205911288U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106802248A (en) * | 2017-02-04 | 2017-06-06 | 东莞市圣荣自动化科技有限公司 | A kind of thermal source generating means in radiator test equipment |
| CN106802248B (en) * | 2017-02-04 | 2018-10-30 | 唐山盈德众创空间有限公司 | A kind of heat source generating means in radiator test equipment |
| CN115754556A (en) * | 2022-11-25 | 2023-03-07 | 温州众彩汽车零部件有限公司 | Vehicle panel aging deformation rate detection equipment with multiple touch hands |
| CN115754556B (en) * | 2022-11-25 | 2024-01-05 | 温州众彩汽车零部件有限公司 | Multi-tentacle vehicle panel aging deformation rate detection equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |