CN207866262U

CN207866262U - Nanometer grating decouples microthrust test device certainly

Info

Publication number: CN207866262U
Application number: CN201721084955.5U
Authority: CN
Inventors: 李孟委; 耿浩; 梁洲鑫; 吴倩楠; 李秀源
Original assignee: North University of China
Current assignee: North University of China
Priority date: 2017-08-28
Filing date: 2017-08-28
Publication date: 2018-09-14
Anticipated expiration: 2027-08-28

Abstract

A kind of nanometer grating is from decoupling microthrust test device, primary structure includes lower substrate, it is bonded framework, upper substrate, driving magnet, detect magnet, determine grating, drive mass block, detect mass block, spring beam, dynamic grating composition, lower substrate is symmetrical arranged square drive magnet, detect magnet, 2 are determined grating, bonding framework is fixedly connected with upper substrate and lower substrate, driving mechanism is arranged in upper substrate, testing agency, drive mass block, detect mass block, detect the centrally disposed removable slit of mass block, this apparatus structure novelty can be played from decoupling effect, utilize the faint Ke Shili of nanometer grating vectorial optical effect detection, with high sensitivity, precision is high, noise is small, it is not affected by temperature, detection data is accurate, good reliability.

Description

Nanometer grating decouples microthrust test device certainly

Technical field

The utility model is related to a kind of nanometer gratings from decoupling microthrust test device, belong to the measuring instrument instrument of aviation aircraft The related field of parts.

Background technology

Gyroscope is a kind of inertia device for capableing of sensitive carrier angle or angular speed, in gesture stability and navigator fix etc. There is very important effect in field.

Currently, for the gyroscope of silicon emblem, coupling error is an important factor for influencing its performance.In the ideal case, When not having turning rate input, simple drive motion is not coupled to detection direction, and similarly, simple detection campaign is not yet Driving direction can be coupled to.But certainly existing due to mismachining tolerance, in the case where not accounting for Decoupling design, driving fortune It is dynamic to influence each other between detection movement, even if can have displacement if detection direction in the case of no turning rate input, The main reason for being generated here it is coupling error.The decoupling-structure of the utility model design is that a kind of reductions drives and sensed-mode Between interactional effective means.The principle of decoupling is exactly by being reasonably laid out driving mechanism, Jian Ce mechanisms, limitation detection Mechanism is only moved along detection direction, to efficiently reduce coupling error.

Nanometer grating refers to the optical grating construction that screen periods are close to or smaller than optical wavelength, and nanometer grating detection is spread out based on vector Theory is penetrated, optical principle is：When light is propagated in the uniform dielectric (such as air), show as a series of carrying out along the direction of propagation Plane wave, when plane wave encounters obstacle, if barrier includes multiple slits, the wave that diffraction comes out is mutual by each slit What effect obtained, when the size of slit changes, acute variation will occur therewith for the light intensity come out by slit diffraction, The micro-displacement that can get femtometre grade by this principle detects resolving power, more existing at least high an order of magnitude of capacitance detecting precision, It can be seen that nanometer grating detection advantage protrudes.

In the prior art, a kind of novel gyroscope (application number based on nanometer grating detection： CN201320697940.1), the utility model compares therewith using electromagnetic drive mode, can obtain the displacement space of bigger, And then make the coriolis force bigger obtained when equivalent angular speed input under identical driving frequency；In addition the driving of the utility model design Mechanism and testing agency are reached dynamic grating and are only moved in sensed-mode, driven with comparison patent by cleverly structure design Mode is moved along grid line direction, and sensed-mode is entirely different in structure along being moved perpendicular to grid line direction, can effectively avoid by Grating side wall out-of-flatness makes have noise signal output under driven-mode, it can be seen that the practicability and foreground of the utility model are more It is broad.

Utility model content

Purpose of utility model

The purpose of this utility model is aiming at the deficiency of background technology, a kind of self solving using nanometer grating detection of design Coupling micromechanical gyro device improves accuracy of detection, keeps detection data more accurate so that the coupling error of gyroscope is greatly lowered Really, full and accurate, reliable.

Technical solution

The utility model primary structure by：Lower substrate, determine grating, driving magnet, detection magnet, bonding framework, upper substrate, Driving mechanism, testing agency, driving mass block, detection mass block, dynamic grating composition；Lower substrate 3 is by being bonded framework 2 and upper base Plate 1 is firmly bonded.

The upper substrate 1 is rectangle, and centrally disposed driving mass block 20 is equipped with first at 20 4 angles of driving mass block and drives Motivation structure 14, the second driving mechanism 15, third driving mechanism 16 and the 4th driving mechanism 17, left and right settings first detect quality Block 18 and second detects mass block 19, and detection mass block is front and back to be equipped with the first testing agency 10, the second testing agency 11, third Testing agency 12 and the 4th testing agency 13, the first detection mass block 18 and second detect 19 center of mass block and set respectively There are the first dynamic grating 4 and the second dynamic grating 5, dynamic grating is generated by dry etching technology.

The 4 group testing agencies parallel with X-axis are very big in the rigidity of X-direction, limit dynamic grating in the position of X-direction It moves, this structure can reduce the coupling error brought by stiffness coupling, and only have turning rate input, detect mass block 18,19 vibrate in the Y direction, can avoid being distorted by the output that grating processing side wall out-of-flatness is brought.

The bonding framework 2, for being connected and fixed upper and lower base plate, and it is dynamic to determine the dynamic grating 4, second of grating 6,7 and first Grating 5 provides grating gap c.

The lower substrate 3 is rectangle, is symmetrical set driving magnet 9, detection and is firmly bonded magnet 8, determine grating 6, 7, determine grating and is generated by dry etching technology.

The driving magnet 9 be driving mass block 20 magnetic field is provided, when driving mass block 20 on driving magnet position pair When the conducting wire answered is passed through alternating current, driving mass block is set to generate resonance in the driven direction by Ampere force.

The detection magnet 8 for rear portion processing circuit provide with the relevant electric signal of driven-mode, when driving mass block 20 When along driving direction resonance, conducting wire cutting magnetic induction line corresponding with detection magnet positions on mass block 20 is driven, induced electricity is generated Stream, due to driving frequency it is known that induced current caused by different resonance shifts amounts is of different sizes, by faradic size The size of control driving voltage can realize the effect of fixed ampllitude driving.

First driving mechanism 14, the second driving mechanism 15, third driving mechanism 16 and the 4th driving mechanism 17 and One testing agency 10, the second testing agency 11, third testing agency 12 and the 4th testing agency 13 are all inflection girder construction, main Want structure by：Coupling block 24,25, spring beam 22,23 form.

Advantageous effect

The utility model has apparent advance compared with the background art, this detection device is set using overall structure Meter, the driving mechanism of detection Z-direction angular speed, sensitive mechanism are integrated to be made in same braced frame, reasonable in design, It is suitble to the micromation of device；Using nanometer grating detection mode, detection mass block is provided with dynamic grating, is right against in lower substrate and sets That sets determines grating, and resolving power is high, is not affected by temperature, and the driven-mode and sensed-mode coupling error of the utility model are small, by Grating sidewall surfaces flatness influences small, simple in structure, good reliability, easy single-chip integration, suitable for the survey of high-precision angular speed Amount.

Description of the drawings

Fig. 1 is overall structure partial sectional view

Fig. 2 is overall structure diagram

Fig. 3 is overall structure front view

Fig. 4 is upper substrate structure schematic diagram

Fig. 5 is upper substrate vertical view

Fig. 6 is bonding framework structural schematic diagram

Fig. 7 is lower substrate vertical view

Fig. 8 is lower substrate left view

Fig. 9 is lower substrate front view

Figure 10 is double-layer nanometer optical grating construction schematic diagram

Figure 11 is double-layer nanometer grating sectional view

Figure 12 is inflection girder construction schematic diagram

Figure 13 is inflection beam vertical view

As shown in the figure, list of numerals is as follows：

1, upper substrate, 2, bonding framework, 3, lower substrate, the 4, first dynamic grating, the 5, second dynamic grating, 6, first fixes nanometer Grating, 7, second fix nanometer grating, and 8, detection magnet, 9, driving magnet, the 10, first testing agency, the 11, second detection machine Structure, 12, third testing agency, the 13, the 4th testing agency, the 14, first driving mechanism, the 15, second driving mechanism, 16, third drives Motivation structure, the 17, the 4th driving mechanism, 18, first detection mass block, 19, second detection mass block, 20, driving mass block, 21, Dynamic grating grid, 22, determine grating grid, the 23, first spring beam, the 24, second spring beam, 25, articulated beam, 26, coupling block, a, move B, grating grid slit determines grating grid slit, c, double-layer grating gap.

Specific implementation mode

The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and should not be understood as to the utility model Limitation.

In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in utility model.

The utility model is described further below in conjunction with attached drawing：

Fig. 1, shown in 2, the nanometer grating from decoupling microthrust test device include lower substrate 3, determine grating 6, driving magnet 9, Detect magnet 8, bonding framework 2, upper substrate 1, testing agency 10, driving mechanism 14, driving mass block 20, detection mass block 18, Dynamic grating 4 forms；The upper substrate 1 is rectangle, and centrally disposed driving mass block 20 is front and back equipped with first in driving mass block 20 Driving mechanism 14, the second driving mechanism 15, third driving mechanism 16 and the 4th driving mechanism 17 are set in driving mass block 20 or so The first detection mass block 18 and second detection mass block 19 is set, front and back first testing agency 10, second that is equipped with of detection mass block examines Mechanism 11, third testing agency 12 and the 4th testing agency 13 are surveyed, the first detection mass block 18 and second detects in mass block 19 Heart position is respectively equipped with the first dynamic grating 4 and the second dynamic grating 5.The lower substrate 3 is bonded by being bonded framework 2 with upper substrate 1 Securely.

Fig. 4, be 1 schematic diagram of the utility model upper substrate shown in 5, the nanometer grating from decoupling microthrust test device be side Shape structure, the bonding framework 2 are hollow square frame structure, and the upper substrate 1 is symmetrical set the first detection quality Block 18 and second detects mass block 19, and center setting drives mass block 20, the first inspection is symmetrical arranged before and after detection mass block 18 Mechanism 10, the second testing agency 11 are surveyed, center setting moves grating 4, detects symmetrical third testing agency before and after mass block 19 12 and the 4th testing agency 13, center setting move grating 5, driving mass block 20 is all around arranged symmetrically the first driving mechanism 14, the second driving mechanism 15, third driving mechanism 16 and the 4th driving mechanism 17, certainly to nanometer grating described in Sensitive Detection Decouple microthrust test device Coriolis force displacement.

It is 3 schematic diagram of the utility model lower substrate shown in Fig. 7,8,9, lower substrate 3 is symmetrical set the first fixation nanometer Grating 6 and second fixes nanometer grating 7, and center is symmetrical arranged driving magnet 8, detection magnet 9, specifically, the driving Magnet 8, detection magnet 9 are correspondingly arranged at the centre position of the lower substrate 3 respectively, in the driving magnet 8, detection magnet 9 It is mutually equidistant with the center line of the lower substrate 3, the driving magnet 8, detection magnet 9 and the lower substrate 3 center to phase It is mutually parallel；

First nanometer grating 6 is set between 3 avris of the driving magnet 8 and the lower substrate, in the detection Second nanometer grating 7 is set between 3 avris of magnet 9 and the lower substrate, and described first fixes nanometer grating 6 and second Fixed nanometer grating 7 is placed in the both sides of the lower substrate, and the two is symmetrically set.

Further, the driving magnet 8, detection magnet 9 are higher by the surface of the lower substrate, and the height of the two Unanimously.

Figure 10, it is the utility model nanometer grating schematic diagram shown in 11, the dynamic grating and determines grating and pass through dry etching Technology generates, and the dynamic grating grid 21 is equidistant evenly distributed grating structure, and the dynamic grating grid 21 is along level point Cloth, grid line width are less than laser source wavelength, move grating grid slit a width and are less than laser source wavelength, described to determine grating grid Line 22 is less than laser light source along horizontal distribution, grid line width, determines 22 slit b width of grating grid and is less than laser source wavelength, moves Grating and the grating gap for determining grating are c.

Figure 12, shown in 13, the utility model driving mechanism is identical as testing agency's structure, is all inflection girder construction, described Inflection girder construction is fine strip shape beam texture, and further, articulated beam 25 is connected and fixed with 26 center of coupling block, and coupling block 26 is left Right part is connected and fixed with the first spring beam 23, the second spring beam 24.First spring beam 23, the connection of the second spring beam 24, Size can be determined according to application environment and stiffness coefficient.

The arbitrary detection mass block 18,19 is connected to institute by two driving mechanisms (10,11 or 12,13) It states on upper substrate 1；

The arranged direction of four testing agencies 10,11,12,13 is parallel, two of which detection mass block position 18, At 19 opposite Liang Ge testing agencies (10,12 or 11,13) on the same line, and the testing agency 10,11,12,13 Arranged direction is first direction；The arranged direction of the testing agency 10,11,12,13 is spring beam 23,24 and tie-beam 25 Arranged direction.

The driving mass block 20 is placed in two detection mass blocks 18, on 19 first directions between；

The arranged direction of four driving mechanisms 14,15,16,17 is mutually parallel, and the driving mechanism 14,15,16, 17 arranged direction is second direction, and the second direction is mutually perpendicular to the first direction, two be on same avris At the arranged direction of a driving mechanism 14,15,16,17 on the same line.

The dynamic grating 4 and 5 includes multiple dynamic grating grids 21, wherein the arranged direction of the dynamic grating grid 21 and institute State that first direction is parallel, the central point of multiple dynamic grating grids 21 is on same straight line, and the straight line and described the Two directions are parallel.

Two groups of driving mechanisms (14,15 that magnet 8 and the driving magnet 9 are detected respectively with place on the same line Or 16,17) position corresponds

By structure provided by the utility model, it can realize that nanometer grating is applied to from decoupling microthrust test, realize Under the premise of utmost compactness structure, the precision of detection is not still influenced.

Utility model principle is：

Drive mass block in X-direction resonance under electromagnetism power drive.And the 4 group testing agencies parallel with X-axis are in the rigid of X-direction Degree is very big, limits displacement of the dynamic grating in X-direction, and driving mass block has the degree of freedom of X-Y both directions.When there is Z-direction Turning rate input when, due to the effect of coriolis force, detection mass block, which will drive, to be moved grating and vibrates in the Y direction, and left and right two is passed through The dynamic grating of group vibration displacement in the Y direction, make grating with respect to determine grating between relative position change.It is irradiated with laser light source The variation of nanometer grating, relative position will cause the reflected light for the input light for being irradiated to nanometer grating and the energy of transmitted light to change Become, that is, the light intensity for projecting photodetector changes, and the variation of relative position will cause projection light intensity that violent change occurs Change, thus a faint Coriolis force signal can be converted into a larger optical signalling, pass through photodetector Electrical signal is converted optical signals into, by interface circuit pickoff signals, demodulated, amplification, filtering, zeroing output Obtain the information of angular speed.

In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ", The description of " example ", " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, knot Structure, material or feature are contained at least one embodiment or example of the utility model.In the present specification, to above-mentioned art The schematic representation of language may not refer to the same embodiment or example.Moreover, description specific features, structure, material or Person's feature can be combined in any suitable manner in any one or more of the embodiments or examples.

While there has been shown and described that the embodiments of the present invention, it will be understood by those skilled in the art that Can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and objective, modification, replaced And modification, the scope of the utility model are limited by claim and its equivalent.

Claims

1. nanometer grating is from decoupling microthrust test device, which is characterized in that the microthrust test device includes：

Upper substrate, being symmetrically arranged on the upper substrate has detection mass block, and the detection mass block center arrangement moves grating；

Between two detection mass blocks driving mass block is provided at position；

Lower substrate, the lower substrate upper side are firmly bonded by being bonded framework with the upper substrate, corresponding on the lower substrate It is disposed at the position of dynamic grating and determines grating.

2. nanometer grating according to claim 1 decouples microthrust test device certainly, which is characterized in that the arbitrary detection quality The opposite end of another detection mass block of block not face is connected to by driving mechanism on the upper substrate.

3. nanometer grating according to claim 2 decouples microthrust test device certainly, which is characterized in that the driving mass block Four corners are connected to by driving mechanism on the upper substrate.

4. nanometer grating according to claim 3 decouples microthrust test device certainly, which is characterized in that the arbitrary detection quality Block is connected to by Liang Ge testing agencies on the upper substrate；

The arranged direction of four testing agencies is parallel, and two of which detects the opposite Liang Ge testing agencies in mass block position Locate on the same line, and the arranged direction of the testing agency is first direction.

5. nanometer grating according to claim 4 decouples microthrust test device certainly, which is characterized in that the driving mass block is set Between on two driving mass block first directions；

The arranged direction of four driving mechanisms is mutually parallel, and the arranged direction of the driving mechanism is second direction, institute It states second direction to be mutually perpendicular to the first direction, the arranged direction of two be on same avris driving mechanism is in together On one straight line.

6. nanometer grating according to claim 5 decouples microthrust test device certainly, which is characterized in that the dynamic grating includes more A dynamic grating grid, wherein the arranged direction of the dynamic grating grid is parallel with the first direction, multiple dynamic grating grid The central point of line is on same straight line, and the straight line is parallel with the second direction.

7. nanometer grating according to claim 6 from decoupling microthrust test device, which is characterized in that it is described two determine grating it Between be provided with detection magnet and driving magnet；

The detection magnet is corresponded with the two groups of driving mechanism positions of place on the same line respectively with the driving magnet.

8. nanometer grating according to claim 3 decouples microthrust test device certainly, which is characterized in that the driving mechanism and inspection It is identical to survey mechanism structure, is all inflection girder construction, articulated beam is connected and fixed with coupling block center, coupling block left and right part and spring beam It is connected and fixed.

9. nanometer grating according to claim 1 decouples microthrust test device certainly, which is characterized in that the dynamic grating has dynamic Grating grid, grid line width are less than laser source wavelength, move grating grid slit width and are less than laser source wavelength；

Described to determine grating and have determine grating grid, grid line width is less than laser light source, determines grating grid slit width less than laser Optical source wavelength.