CN101900555B - Reflective oblique moire fringe displacement detection-based micro-machined gyroscope and realization method thereof - Google Patents
Reflective oblique moire fringe displacement detection-based micro-machined gyroscope and realization method thereof Download PDFInfo
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- CN101900555B CN101900555B CN2010102218582A CN201010221858A CN101900555B CN 101900555 B CN101900555 B CN 101900555B CN 2010102218582 A CN2010102218582 A CN 2010102218582A CN 201010221858 A CN201010221858 A CN 201010221858A CN 101900555 B CN101900555 B CN 101900555B
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Abstract
The invention discloses a reflective oblique moire fringe displacement detection-based micro-machined gyroscope and a realization method thereof and belongs to the field of optical detection. A mechanism consists of a structural layer and a substrate, wherein sensitive movable comb teeth on the structural layer and sensitive fixed comb teeth on the substrate form a measuring optical grating pair; geometrical interference is produced under the irradiation of a light source so as to form moire fringes; the sensitive movable comb teeth move under the action of Coriolis force; the moire fringes move correspondingly in proportion; and the number of moving moire fringes can be read through a subsequent signal processing module and is used for evaluating an angular speed input from outside. The method has the advantages of no damage to a measured surface due to the adoption of non-contact measurement, high measuring speed, high detection accuracy, capability of detecting displacement under the size of nanometer and preventing the rigidity change of a system due to the introduction of unknown electrostatic force into the system in comparison to an electricity method and contribution to stabilizing system performance.
Description
Affiliated field
The present invention relates to a kind of micromechanical gyro and its implementation that detects based on reflective oblique moire fringe displacement, belong to the optical detection field.
Background technology
Gyroscope is a kind of instrument that can accurately confirm the orientation of moving object, and it is modern aviation, navigation, widely used a kind of inertial navigation instrument in space flight and the national defense industry.Use the basic functional principle of the micromechanical gyro of MEMS technology all to be based on Ke Shi (Coriolis) stress effect at present, i.e. moving object meeting in the rotating coordinate system receives the effect of the inertial force vertical with velocity reversal.Coriolis force is directly proportional with rotational angular velocity, through detecting the angular velocity that coriolis force obtains rotation system.And the responsive mode of micromechanical gyro comprises capacitance detecting, pressure drag detection and piezoelectric detection etc.In practical application; Because capacitance determining method does not receive the influence of factors such as humidity; And have higher detection sensitivity, therefore, the scheme of capacitance detecting adopts in micromechanical gyro at most; Like number of patent application is 200610114485, and denomination of invention discloses the micromechanical gyro that a kind of condenser type detects for the patent of " a kind of capacitive type complete decoupling horizontal axis miniature mechanical gyro ".
But be based on the capacitance detecting mode following deficiency arranged:
1) electric capacity of micro-mechanical capacitance type gyro little (about several pF), variable quantity is littler, extracts so little capacitance variations signal, requires very high to support circuit; 2) testing circuit can be introduced circuit noise, and the introducing of noise can restrict the further lifting of Gyro Precision; When 3) adopting capacitance determining method, because extraction is feeble signal, parasitic stray capacitance is easy to flood useful signal around the circuit, and is bigger to the electric circuit inspection influence; 4) electric capacity receives external environment bigger such as the influence of humidity or ground connection situation etc., makes that zero inclined to one side drift output of micromechanical gyro is bigger, thereby influences the precision of system.
Summary of the invention
The objective of the invention is to disclose a kind of micromechanical gyro and its implementation that detects based on reflective oblique moire fringe displacement, to solve following problem of the prior art: 1) extract the weak capacitive variable signal support circuit is required very high problem; 2) the circuit noise problem of testing circuit; 3) the parasitic stray capacitance problem of testing circuit; 4) zero of micromechanical gyro inclined to one side drifting problem.
The present invention proposes a kind of micromechanical gyro that detects based on reflective oblique moire fringe displacement, comprise structural sheet 1 and substrate 2, structural sheet 1 is semiconductor material with substrate 2 materials.
For sake of clarity, definition x direction is the sensitive direction of gyro, and the y direction is the driving direction of gyro, according to right-hand rule definition z direction; Structural sheet 1 comprises mass 9, flexible beam 7, drive unit and the responsive broach 5 that moves; Mass 9 is suspended on the anchor point 8 of substrate 2 through flexible beam 7, is connected with drive unit on the mass 9, and drive unit promptly produces driving force on the driving direction of gyro in the y direction, moves along the y direction thereby drive mass 9; The responsive broach 5 that moves also is connected on the mass 9, it with place the responsive fixed fingers 4 in the substrate 2 corresponding, both projections on xoy plane θ that has a certain degree is overlapping, 0＜θ≤1 °; The simultaneously responsive broach 5 that moves is higher than the peak of responsive fixed fingers 4 in the minimum point of z direction, to form relative motion space between the two; The width of responsive fixed fingers 4 is w
1, the gap between two responsive fixed fingers 4 is g
1The responsive width that moves broach 5 is w
2, the vertical range that two sensitivities move between the broach 5 is g
2Satisfy relational expression: w between them
1+ g
1≠ w
2+ g
2Relation between the width of the wavelength X of LASER Light Source 3 and gap between the broach and broach satisfies simultaneously: 0＜w
1+ g
1≤10 λ, 0＜w
2+ g
2≤10 λ.
The implementation method of the above-mentioned micromechanical gyro that detects based on reflective oblique moire fringe displacement comprises the steps:
Step 1: consult Fig. 1; The monochromatic light that is sent by LASER Light Source 3 becomes directional light behind collector lens 6, responsive fixed fingers 4 on the illumination micromechanical gyro and responsive mobile broach 5, and responsive fixed fingers 4 constitutes one group of measurement grating pair with the responsive broach 5 that moves; Responsive fixed fingers 4 is equivalent to indication grating; The responsive broach 5 that moves is equivalent to the scale grating, and θ is overlapping at an angle because responsive fixed fingers 4 is with the responsive mobile projection of broach 5 on the xoy plane, when rayed; Can produce a kind of geometrical interference phenomenon, produce Moire fringe; For micromechanical gyro, when sensitive direction moved, corresponding mobile also can take place to responsive mobile broach 5 in Moire fringe under the coriolis force effect; The responsive broach 5 that moves moves a pitch, and Moire fringe moves a striped pitch; When sensitivity moves broach 5 when moving in the other direction, Moire fringe also changes direction of motion thereupon, just can detect the displacement of responsive mobile broach 5 through the displacement of measuring mobile Moire fringe;
Step 2: the Moire fringe that produces in the step 1 is received by photodetector 11; Obtain corresponding electric signal, with this sine wave signal, after differential amplifier amplifies; Form square wave by the Si Mite shaping circuit, become the steep spike pulse in forward position through differentiating circuit again;
Step 3: the spike pulse that produces in the step 2 is passed through by the pulse of positive dirction or negative direction through rectification circuit, gets into electronic counter then and counts;
Step 4: responsive so mobile broach 5 moves pitch d, wherein a d=w
2+ g
2, electronic counter is just counted a number, and the Moire fringe that output is at last moved is counted n;
Step 5: the displacement detecting principle by grating can know that the responsive broach 5 that moves moves past n pitch d accordingly, and what then responsive mobile broach 5 moved apart from l is: l=nd; Simultaneously, can know the displacement components u of the responsive mode direction of micromechanical gyro by the principle of work of micromechanical gyro
yFor:
U wherein
xBe the displacement of gyro driving mode direction,
F
eBe the driving force of driving direction, Q '
dBe the total quality factor of micromechanical gyro driving direction, k
xBe the total stiffness coefficient of micromechanical gyro driving direction, Q '
sBe the total quality factor of micromechanical gyro sensitive direction, Ω is extraneous input angular velocity, f '
sResonance frequency for the micromechanical gyro sensitive direction; Therefore,
Homogeneity by offset variable requires to get nd=u simultaneously
y, therefore,
Thereby solve extraneous input angular velocity
The invention has the beneficial effects as follows: 1) adopt non-cpntact measurement, thereby can not damage measured surface; 2) measuring speed is high; 3) accuracy of detection is high, can detect the displacement under the nm size; 4) compare with electrical method, can not introduce unknown electrostatic force, thereby cause the variation of system stiffness, help the stable of system performance to system.
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Description of drawings
Fig. 1: the detection schematic diagram that the present invention proposes based on the displacement detecting method of the responsive mode of micromechanical gyro of reflective oblique moire fringe
Fig. 2: micromechanical gyro structural front view in the embodiment of the invention 1
Fig. 3: structural sheet schematic top plan view in the embodiment of the invention 1
Fig. 4: basalis schematic top plan view in the embodiment of the invention 1
Fig. 5: micromechanical gyro structural front view in the embodiment of the invention 2
Fig. 6: structural sheet schematic top plan view in the embodiment of the invention 2
Fig. 7: basalis schematic top plan view in the embodiment of the invention 2
Among the figure, 1-structural sheet, 2-substrate, 3-LASER Light Source, the responsive fixed fingers of 4-; Responsive broach, 6-collector lens, 7-flexible beam, 8-anchor point, the 9-mass of moving of 5-; 10-drives and moves broach, 11-photodetector, 12-drive fixing broach, 13-conductive channel, 14-drive electrode
Consult Fig. 2, Fig. 3 and Fig. 4; For sake of clarity, definition x direction is the sensitive direction of gyro, and the y direction is the driving direction of gyro; According to right-hand rule definition z direction; The invention discloses a kind of micromechanical gyro that detects based on reflective oblique moire fringe displacement, comprise structural sheet 1 and substrate 2, structural sheet 1 is silicon with substrate 2 materials; Structural sheet 1 comprises mass 9, folded beam 7, drives and move broach 10 and the responsive broach 5 that moves; Mass 9 is suspended on the anchor point 8 of substrate 2 through folded beam 7; Be connected with on the mass 9 to drive and move broach 10; It with place the drive fixing broach 12 in the substrate 2 corresponding, both constitute drive unit, drive unit is in the y direction; Be to produce driving force on the driving direction of gyro, move along the y direction thereby drive mass 9; The responsive broach 5 that moves also is connected on the mass 9, it with place the responsive fixed fingers 4 in the substrate 2 corresponding, both projections on xoy plane θ that has a certain degree is overlapping, θ=0.01rad; The height of responsive fixed fingers 4 is 30um, and width is w
1=3um, the gap between the responsive fixed fingers 4 is g
1=2um, the responsive height that moves broach 5 is 30um, width is w
2=2um, the responsive vertical range that moves between the broach 4 is g
2=2um, the responsive broach 5 that moves is 10um in the distance of the minimum point of z direction and the peak of responsive fixed fingers 4, with formation relative motion space between the two.
The implementation method of the micromechanical gyro that detects based on reflective oblique moire fringe displacement of present embodiment is following:
After system opened, micromechanical gyro was in resonant condition at driving direction under the driving of electrostatic force, when not having extraneous angular velocity to import; Micromechanical gyro is actionless at sensitive direction, by the monochromatic light that LASER Light Source 3 sends, λ=0.76um; Behind collector lens 6, become directional light, responsive fixed fingers 4 on the illumination micromechanical gyro and the responsive broach 5 that moves, responsive fixed fingers 4 constitutes one group of grating pair with the responsive broach 5 that moves; Because responsive fixed fingers 4 is overlapping at an angle with responsive mobile broach 5; When rayed, can produce a kind of geometrical interference phenomenon, produce Moire fringe; When there is the angular velocity input in the external world; Because the influence of coriolis force effect; Resonance can take place in the mass 9 of micromechanical gyro on sensitive direction, move on sensitive direction thereby the sensitivity on the drive mass 9 moves broach 5, and Moire fringe also corresponding mobile can take place.The responsive broach 5 that moves moves a pitch, and Moire fringe moves a striped pitch.When sensitivity moves broach 5 when moving in the other direction, Moire fringe also changes direction of motion thereupon; This Moire fringe is received by photodetector 11, obtains corresponding electric signal, with this sine wave signal, after differential amplifier amplifies, forms square wave by the Si Mite shaping circuit, becomes the steep spike pulse in forward position through differentiating circuit again; This spike pulse is passed through by the pulse of positive dirction through rectification circuit, gets into electronic counter then and counts; Responsive so mobile broach 5 moves a pitch d, and in the present embodiment, d=5um, electronic counter just count a number, and the Moire fringe that output is at last moved is counted n; N=1 can be known that by the displacement detecting principle of grating what mobile broach moved apart from l is: l=nd=5um; Simultaneously, can know the displacement components u of the responsive mode direction of micromechanical gyro by the principle of work of micromechanical gyro
yFor:
F
eFor broach drives electrostatic force, F in the present embodiment
e=6.2 * 10
-7N; Q '
dBe the total quality factor of micromechanical gyro driving direction, Q ' in the present embodiment
d=229.99; Q '
sBe the total quality factor of micromechanical gyro sensitive direction, Q ' in the present embodiment
s=229.99; Ω is extraneous input angular velocity, and Ω is to be measured in the present embodiment; f
sBe the resonance frequency of micromechanical gyro sensitive direction, f in the present embodiment
s=3614.5Hz; k
xBe the total stiffness coefficient of micromechanical gyro driving direction, k in the present embodiment
x=1.17 * 10
2N/m; π is a circular constant, in the present embodiment π=3.14159265; Homogeneity by offset variable requires and can get like this,
Thereby solve:
Consult Fig. 5, Fig. 6 and Fig. 7, for sake of clarity, definition x direction is the sensitive direction of gyro; The y direction is the driving direction of gyro, according to right-hand rule definition z direction, the invention discloses a kind of micromechanical gyro that detects based on reflective oblique moire fringe displacement; Comprise structural sheet 1 and substrate 2; Structural sheet 1 is germanium with substrate 2 materials, and drive electrode 14 is arranged on the structural sheet 1, and material is a metallic aluminium; Structural sheet 1 comprises mass 9, U type beam 7, strip conductive channel 13 and the responsive broach 5 that moves; Mass 9 is suspended on the anchor point 8 of substrate 2 through U type beam 7; Be distributed with 7 on the mass 9 and be parallel to the wide strip conductive channel 13 that the y direction runs through; They are separated by 8 rectangular gaps of alternate equidistance that are parallel to the y direction, strip conductive channel 13 and the drive electrode 14 common formation drive units that place on the structural sheet 1; After drive electrode 14 powers up, the electric current strip conductive channel 13 of flowing through, behind the magnetic field that adds the z direction, drive unit promptly produces driving force on the driving direction of gyro in the y direction, moves along the y direction thereby drive mass 9; The responsive broach 5 that moves also is connected on the mass 9, it with place the responsive fixed fingers 4 in the substrate 2 corresponding, both projections on xoy plane θ that has a certain degree is overlapping, θ=0.02rad; The height of responsive fixed fingers 4 is 25um, and width is w
1=3um, the gap between the responsive fixed fingers 4 is g
1=3um, the responsive height that moves broach 5 is 25um, width is w
2=2um, the responsive vertical range that moves between the broach 4 is g
2=2um, the responsive broach 5 that moves is 15um in the distance of the minimum point of z direction and the peak of responsive fixed fingers 4, with formation relative motion space between the two.
The implementation method of the micromechanical gyro that detects based on reflective oblique moire fringe displacement of present embodiment is following:
After system opened, micromechanical gyro was in resonant condition at driving direction under the driving of electrostatic force, when not having extraneous angular velocity to import; Micromechanical gyro is actionless at sensitive direction, by the monochromatic light that LASER Light Source 3 sends, λ=1.51um; Behind collector lens 6, become directional light, responsive fixed fingers 4 on the illumination micromechanical gyro and the responsive broach 5 that moves, responsive fixed fingers 4 constitutes one group of grating pair with the responsive broach 5 that moves; Because responsive fixed fingers 4 is overlapping at an angle with responsive mobile broach 5; When rayed, can produce a kind of geometrical interference phenomenon, produce Moire fringe; When there is the angular velocity input in the external world; Because the influence of coriolis force effect; Resonance can take place in the mass 9 of micromechanical gyro on sensitive direction, move on sensitive direction thereby the sensitivity on the drive mass 9 moves broach 5, and Moire fringe also corresponding mobile can take place.The responsive broach 5 that moves moves a pitch, and Moire fringe moves a striped pitch.When moving broach 5 Moire fringe when moving in the other direction, sensitivity also changes direction of motion thereupon; This Moire fringe is received by photodetector 11, obtains corresponding electric signal, with this sine wave signal, after differential amplifier amplifies, forms square wave by the Si Mite shaping circuit, becomes the steep spike pulse in forward position through differentiating circuit again; This spike pulse is passed through by the pulse of negative direction through rectification circuit, gets into electronic counter then and counts; Responsive so mobile broach 5 moves a pitch d, and in the present embodiment, d=4um, electronic counter just count a number, and the Moire fringe that output is at last moved is counted n; N=2 can be known that by the displacement detecting principle of grating what mobile broach moved apart from l is: l=nd=8um; Simultaneously, can know the displacement components u of the responsive mode direction of micromechanical gyro by the principle of work of micromechanical gyro
yFor:
F
eBe electromagnetic actuation force, in the present embodiment F
e=4.2 * 10
-6N; Q '
dBe the total quality factor of micromechanical gyro driving direction, Q ' in the present embodiment
d=160.45; Q '
sBe the total quality factor of micromechanical gyro sensitive direction, Q ' in the present embodiment
s=160.45; Ω is extraneous input angular velocity, and Ω is to be measured in the present embodiment; f
sBe the resonance frequency of micromechanical gyro sensitive direction, f in the present embodiment
s=2476.3Hz; k
xBe the total stiffness coefficient of micromechanical gyro driving direction, k in the present embodiment
x=5.47 * 10
1N/m; π is a circular constant, in the present embodiment π=3.14159265; Homogeneity by offset variable requires and can get like this,
Thereby solve:
Claims (4)
1. micromechanical gyro that detects based on reflective oblique moire fringe displacement, it is characterized in that: comprise structural sheet (1) and substrate (2), structural sheet (1) and substrate (2) material are semiconductor material; Said structural sheet (1) comprises mass (9), flexible beam (7), drive unit and the responsive broach (5) that moves; Mass (9) is suspended on the anchor point (8) of substrate (2) through flexible beam (7), and mass is connected with drive unit on (9), and drive unit promptly produces driving force on the driving direction of gyro in the y direction, moves along the y direction thereby drive mass (9); The responsive broach (5) that moves also is connected on the mass (9), it with place the responsive fixed fingers (4) in the substrate (2) corresponding, both projections on xoy plane θ that has a certain degree is overlapping, 0＜θ≤1 °; The simultaneously responsive broach (5) that moves is higher than the peak of responsive fixed fingers (4) in the minimum point of z direction, to form relative motion space between the two; The width of responsive fixed fingers (4) is w
1, the gap between two responsive fixed fingers (4) is g
1The responsive width that moves broach (5) is w
2, the vertical range that two sensitivities move between the broach (5) is g
2Satisfy relational expression: w between them
1+ g
1≠ w
2+ g
2Relation between the width of the wavelength X of LASER Light Source (3) and gap between the broach and broach satisfies simultaneously: 0＜w
1+ g
1≤10 λ, 0＜w
2+ g
2≤10 λ.
2. a micromechanical gyro that detects based on reflective oblique moire fringe displacement as claimed in claim 1 is characterized in that described drive unit is the static driven broach.
3. a micromechanical gyro that detects based on reflective oblique moire fringe displacement as claimed in claim 1 is characterized in that described drive unit is an electromagnetic actuator device.
4. one kind is used the described micromechanical gyro measured angular method of velocity that detects based on reflective oblique moire fringe displacement of claim 1, it is characterized in that, comprises the steps:
Step 1: the monochromatic light that is sent by LASER Light Source (3) becomes directional light behind collector lens (6); Responsive fixed fingers (4) on the illumination micromechanical gyro and the responsive broach (5) that moves; Responsive fixed fingers (4) and the responsive broach (5) that moves constitute one group of measurement grating pair, and responsive fixed fingers (4) is equivalent to indication grating, and the responsive broach (5) that moves is equivalent to the scale grating; When rayed, produce Moire fringe;
Step 2: the Moire fringe that produces in the step 1 is received by photodetector (11); Obtain corresponding electric signal; Said electric signal is a sine wave signal, with this sine wave signal, after differential amplifier amplifies; Form square wave by the Si Mite shaping circuit, become the steep spike pulse in forward position through differentiating circuit again;
Step 3: the spike pulse that produces in the step 2 is passed through by the pulse of positive dirction or negative direction through rectification circuit, gets into electronic counter then and counts;
Step 4: the Moire fringe that output is moved is counted n;
Step 5: calculate extraneous input angular velocity Ω,
F wherein
eBe the driving force of driving direction, Q '
dBe the total quality factor of micromechanical gyro driving direction, k
xBe the total stiffness coefficient of micromechanical gyro driving direction, Q '
sBe the total quality factor of micromechanical gyro sensitive direction, f
sBe the resonance frequency of micromechanical gyro sensitive direction, d is a pitch, d=w
2+ g
2
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| CN102636122A (en) * | 2012-03-29 | 2012-08-15 | 杜金昌 | Laser-imaging scanning type grating displacement sensor |
| CN103557854B (en) * | 2013-11-06 | 2017-01-04 | 中北大学 | A kind of novel gyroscope based on nanometer grating detection |
| CN106679629B (en) * | 2017-01-13 | 2021-03-23 | 西南交通大学 | Ruler type level meter based on grating diffraction and method for measuring inclined plane inclination angle |
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| US5408317A (en) * | 1990-12-28 | 1995-04-18 | The Charles Stark Draper Laboratory, Inc. | Scattered light moire-brillouin gyroscope |
| CN100335906C (en) * | 2006-05-16 | 2007-09-05 | 北京航空航天大学 | Pendulous silicon MEMS angular acceleration transducer |
| CN1948906B (en) * | 2006-11-10 | 2011-03-23 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
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