CN104897144B - More driving electrodes modal coupling micro-solid mode gyroscopes - Google Patents
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The present invention discloses a kind of more driving electrodes modal coupling micro-solid mode gyroscopes, it include: piezoelectric vibrator, multipair driving electrodes, reference electrode, signal detection electrode and isolation electrode, wherein: driving electrodes, reference electrode, signal detection electrode and isolation electrode are respectively positioned on the upper and lower surface of piezoelectric vibrator and piezoelectric vibrator forms a fixed connection.The present invention is vibrated using the vibration under the special mode of piezoelectric vibrator as reference, while carrying out the detection of output signal come sensitive extraneous input angular velocity using coriolis effect and piezoelectric effect.The present invention refers to vibration velocity amplitude by introducing multipair driving electrodes increase, improves microthrust test detection sensitivity；Optimize the size of piezoelectric vibrator, so that it is identical as the intrinsic frequency both under sensed-mode with reference to mode, using modal coupling effect increase detection vibration amplitude, improve the output sensitivity of gyro.The present invention greatly improves the detection sensitivity of micro-solid mode gyroscope.
Description
Technical field
The present invention relates to a kind of microthrust tests of field of micro electromechanical technology, specifically, what is involved is one kind to drive more
Electrode modal coupling micro-solid mode gyroscope.
Background technique
Micro-solid mode gyroscope, as driving and detection part, is that a kind of novel all solid state MEMS is micro- using piezoelectric material
Gyro.Different from general MEMS oscillation gyro, micro-solid mode gyroscope does not support or moving component, thus have it is overload-resistant,
Strong shock resistance, resonant frequency of operation are high, do not need Vacuum Package, the starting time is by the advantageous characteristics such as short, in consumer electronics
The fields such as product, aircraft navigation, intelligent projectile and guidance are with a wide range of applications.
Through the literature search of existing technologies, in January, 2006, in the MEMS2006 meeting that Turkey Istanbul is held
In view, Japanese scholars k.Maenaka et al. has delivered the paper of one entitled " novel micro- solid-state gyro ", which is incorporated in
Page 634 to page 637, a kind of all solid state microthrust test based on the special mode of oscillation of piezoelectrics has been put forward for the first time it.Researcher
It was found that there is a kind of special mode of oscillation, under this mode of oscillation, piezoelectrics under some frequency in rectangular piezoelectrics mass block
Mass block makees stretching or compression movement along the same direction, and (one is stretching to the direction of vibration of adjacent two seamed edge on the contrary
When, then another is compression).Using the vibration under this special mode as with reference to vibration, it is assumed that the polarization direction of piezoelectrics is the side Z
To, with reference to vibration be X-direction, when the external world have the turning rate input of Y-direction when, due to the effect of coriolis force, piezoelectrics are polarizing
Induction vibration is generated on direction.Due to the piezoelectric effect of piezoelectrics, charge inducing or electricity will be generated perpendicular to the surface of Z-direction
Pressure, and its magnitude is directly proportional to extraneous input angular velocity, can be obtained by the amplified charge of detection peripheral circuit or voltage
The size of extraneous input angular velocity.
This technology exists following insufficient: firstly, piezoelectric vibrator upper and lower surface only respectively has a pair of of driving electrodes, surface uses effect
Rate is not high, and driving electrodes spacing is relatively large, and electric field strength is smaller, causes smaller with reference to vibration amplitude；Secondly, piezoelectric vibrator
Resonant frequency and the driven-mode frequency for detecting mode of oscillation are not consistent, when to carry out piezoelectrics drive with reference to vibration modal frequency
When dynamic, vibration amplitude and not up to maximum value are detected, leads to the reduction of voltage magnitude at detecting electrode, affects microthrust test Gao Ling
The acquisition of sensitivity.
Summary of the invention
In view of the deficiencies of the prior art, it is an object of the present invention to provide a kind of micro- solid moulds of more driving electrodes modal couplings
State gyro is worked using the special mode of oscillation of piezoelectric vibrator, using the piezoelectric effect of coriolis effect and piezoelectric material into
Row detection；By introducing multipair driving electrodes in piezoelectric vibrator upper and lower surface, the surface Lai Tigao service efficiency increases electric-field strength
Degree, and then increase and refer to vibration velocity amplitude；In addition, making to detect mode of oscillation and with reference to vibration by adjusting the size of piezoelectrics
Dynamic Modal frequency is consistent, can reinforce the induction vibration in polarization direction, improve the sensitivity of microthrust test.
The present invention is achieved by the following technical solutions:
The present invention provides a kind of more driving electrodes modal coupling micro-solid mode gyroscopes, comprising: a piezoelectric vibrator, multipair
Driving electrodes, multiple reference electrodes, multiple signal detection electrodes and multiple isolation electrodes, driving electrodes, reference electrode, signal inspection
Survey electrode, isolation electrode is respectively positioned on the upper and lower surfaces of piezoelectric vibrator, and forms a fixed connection with piezoelectric vibrator；
The driving electrodes share four pairs, wherein two pairs of driving electrodes are evenly distributed on the center of piezoelectric vibrator upper surface
Place, in addition two pairs of driving electrodes are evenly distributed on the centre of piezoelectric vibrator lower surface；The driving electrodes are for motivating piezoelectricity
Oscillator generates the driven-mode vibration shape；
There are four the reference electrode is total, two of them reference electrode is distributed in the seamed edge of piezoelectric vibrator upper surface with respect to two
Neighbouring middle position, other two reference electrode are distributed in the interposition near the seamed edge of piezoelectric vibrator lower surface with respect to two
It sets；The reference electrode for monitor piezoelectric vibrator under the excitation of driving electrodes whether normal starting of oscillation, and track operational vibration
Mode makes piezoelectric vibrator steady operation under operational vibration mode；
The signal detection electrode shares eight, wherein four signal detection electrodes are distributed in the four of piezoelectric vibrator upper surface
On a angle, four additional signal detection electrode is distributed on four angles of piezoelectric vibrator lower surface；The signal detection electrode is used
In the induced voltage generated in detection piezoelectric vibrator polarization direction；
The isolation electrode altogether there are four, two of them be located at the driving electrodes of piezoelectric vibrator upper surface and reference electrode,
Between signal detection electrode, other two is located at the driving electrodes and reference electrode, signal detection electrode of piezoelectric vibrator lower surface
Between；The isolation electrode is used for influence of the isolation drive voltage to signal detection electrode, reference electrode output voltage or charge.
Preferably, when applying alternating voltage in the driving electrodes with selected resonant frequency, the piezoelectric vibrator
There are the special mode of oscillations of certain rank under the excitation of alternating voltage, and it is basic at the same frequency to push electric tachometer indicator each point in the mode
It moves in the same direction, and the direction of vibration in adjacent two edges is opposite (one is when stretching, then another is compression), relatively
Two sides on direction of vibration it is exactly like (being all stretching or compression), using the special vibration under this frequency as with reference to shake
It is dynamic, and the polarization direction of piezoelectric vibrator and piezoelectric vibrator are perpendicular with reference to direction of vibration.
Preferably, when having turning rate input perpendicular to reference direction of vibration, effect of the piezoelectric vibrator in coriolis force
Under, polarization direction can induce detection vibration, and amplitude is directly proportional to extraneous input angular velocity size, utilize reference mode and inspection
The coupling of survey mode reaches the maximum value under the frequency so that detecting vibration amplitude, passes through piezoelectric electro in detection signal detection electrode
The reversing situation and variable quantity of pressure are to get the size for arriving extraneous input angular velocity.
Preferably, the piezoelectric vibrator is rectangular parallelepiped structure, and material is piezoelectric ceramics or other piezoelectric materials.
Preferably, the piezoelectric vibrator length, width and height is selected so that it is with reference to vibration modal frequency and detection mode of oscillation frequency
Rate is identical.
Preferably, guarantee the voltage for being applied to adjacent driven electrode on piezoelectric vibrator the same face when the driving electrodes work
Frequency having the same, amplitude, but polarity is opposite.
Preferably, the driving electrodes, the reference electrode, the signal detection electrode, the material that electrode is isolated
It is metal, structure is rectangle.
Compared with prior art, the invention has the following advantages:
The present invention provides a kind of micro-solid mode gyroscope of more driving electrodes modal couplings, in the upper and lower surface of piezoelectric vibrator
Multipair driving electrodes are introduced, surface service efficiency can not only be improved, moreover it is possible to increase electric field strength, and then increase and refer to vibration velocity
Amplitude；Selecting again for microthrust test size ensure that the consistency with reference to mode and sensed-mode intrinsic frequency, using referring to mould
State and sensed-mode intercouple to increase detection vibration amplitude.Present invention optimizes the sizes of microthrust test, finally improve micro-
The output sensitivity and performance of gyro.
Detailed description of the invention
Fig. 1,2 are general structure schematic diagram of the invention；
Fig. 3 is respectively driven-mode of the invention, sensed-mode vibration shape emulation schematic diagram, wherein (a) is driven-mode vibration
Type emulation schematic diagram, 3 (b) emulate schematic diagram for the sensed-mode vibration shape；
Fig. 4 is the present invention under 5 various sizes of height, driven-mode, sensed-mode connecting curve figure；
In figure: piezoelectric vibrator 1, driving electrodes 6,7,8,9,18,19,20,21, reference electrode 3,12,15,24, signal inspection
Survey electrode 2,4,11,13,14,16,23,25 and isolation electrode 5,10,17,22.
Specific embodiment
It elaborates with reference to the accompanying drawing to the embodiment of the present invention, before the present embodiment is with technical solution of the present invention
It mentions, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to following embodiments.
As shown in Figure 1, 2, the present embodiment provides a kind of micro-solid mode gyroscopes of more driving electrodes modal couplings, including pressure
Electric tachometer indicator 1, driving electrodes 6,7,8,9,18,19,20,21, reference electrode 3,12,15,24, signal detection electrode 2,4,11,13,
14,16,23,25 and isolation electrode 5,10,17,22.
In the present embodiment, the piezoelectric vibrator 1 is rectangular parallelepiped structure, and material is piezoelectric ceramics or other piezoelectric materials, length
The selections of width and height dimensions is so that identical as detection vibration modal frequency with reference to vibration modal frequency, specifically such as Fig. 4 connecting curve institute
Show, polarization direction is along Z axis.
In the present embodiment, 6,7,8,9,18,19,20,21 material of driving electrodes is metal, and structure is rectangle, in which:
Driving electrodes 6,7,8,9 are evenly distributed on the centre of 1 upper surface of piezoelectric vibrator, 18,19,20,21 piezoelectric vibrator 1 of driving electrodes
The centre of lower surface, for motivating piezoelectric vibrator 1 to generate the driven-mode vibration shape；When work, on the same surface of piezoelectric vibrator 1
Apply constant amplitude, driven-mode frequency alternating voltage (the polarity of voltage phase in such as driving electrodes 6,7 of reverse phase on adjacent driven electrode
Instead, the polarity but on 6,8 is identical), the situation in the driving electrodes of lower surface is similar with upper surface.
In the present embodiment, 3,12,15,24 material of reference electrode is metal, and structure is rectangle, in which: reference electrode
3,12 it is distributed in the middle position near the seamed edge of 1 upper surface of piezoelectric vibrator with respect to two, reference electrode 15,24 is distributed in piezoelectricity vibration
Middle position near the sub seamed edge of 1 lower surface with respect to two, for whether just to monitor piezoelectric vibrator 1 under the excitation of driving electrodes
Chang Qizhen, and operational vibration mode is tracked, make 1 steady operation of piezoelectric vibrator under operational vibration mode.
In the present embodiment, 2,4,11,13,14,16,23,25 material of signal detection electrode is metal, and structure is square
Shape, in which: signal detection electrode 2,4,11,13 is distributed on four angles of 1 upper surface of piezoelectric vibrator, signal detection electrode 14,
16, it 23,25 is distributed on four angles of 1 lower surface of piezoelectric vibrator, for detecting the induction generated in 1 polarization direction of piezoelectric vibrator
Voltage.
In the present embodiment, 5,10,17,22 material of isolation electrode is metal, and structure is rectangle, is located at driving electricity
Between pole and reference electrode, signal detection electrode, for influence of the driving voltage to output voltage to be isolated, reduce common-mode signal
It influences.
In the present embodiment, all electrodes (including driving electrodes 6,7,8,9,18,19,20,21, reference electrode 3,12,15,
24, signal detection electrode 2,4,11,13,14,16,23,25 and isolation electrode 5,10,17,22), by MEMS technology, use
Dual surface lithography and electroplating technology are made in the upper and lower surfaces of piezoelectric vibrator 1.
As shown in Fig. 2, 1 structure of piezoelectric vibrator described in the present embodiment is cuboid, L indicates its length, and W indicates its width, H
Indicate its height, the direction where height is its polarization direction.Using with reference to mode when due to the work of micro- solid-state mode gyroscope
With the coupling effect of sensed-mode, so the selection of the length, width and height size of piezoelectric vibrator 1 needs to meet certain relationship.This implementation
In example, the variation range of 1 length L of piezoelectric vibrator is 4.8mm to 5.6mm, and the variation range of width W is 3mm to 4mm, height H choosing
5 different sizes have been taken, have been 2.8mm, 2.9mm, 3.0mm, 3.1mm and 3.2mm respectively.It has been investigated that one timing of thickness,
The increase of length or the increase of width can all cause the reduction of driven-mode frequency, but influence of the width to driven-mode frequency
It is more significant；Sensed-mode frequency can reduce with the increase of length, increase with the increase of width, with driven-mode frequency
Unlike, sensed-mode frequency is sensitiveer to the variation of length.
As shown in figure 3, showing to obtain the mode of oscillation of piezoelectric vibrator 1 by finite element analysis with the emulation of the sensed-mode vibration shape
It is intended to.The alternating voltage signal for applying selected frequency in driving electrodes 6,7,8,9,18,19,20,21, wherein the electricity on 6,7
Press polarity on the contrary, but polarity on 6,8,19,21 it is identical, reference special since inverse piezoelectric effect generates of piezoelectric vibrator 1 is vibrated
Mode, as shown in Fig. 3 (a).Under the mode of oscillation, 1 each point of piezoelectric vibrator makees stretching or compression movement substantially along Y-direction,
The direction of vibration of adjacent two seamed edge on the contrary, the direction of vibration on opposite two sides is then identical, at this time seamed edge nearby middle by
The reason of power is maximum, and the displacement on four angles is maximum, this is reference electrode and signal detection electrode distribution design.When X-direction has
When turning rate input, since a pair of of signal detection electrode 2,4 in Y-axis moves along X-axis contrary, they be will receive on the contrary
Coriolis force, but direction along polarization direction Z-direction, i.e., the detection direction of vibration of signal detection electrode 2,4 is on the contrary, cause signal to be examined
The output signal surveyed on electrode 2,4 changes on the contrary, wherein the amplitude of output signal and input angular velocity size are related.Pass through Y-axis
On a pair of of signal detection electrode 2,4 output signal amplitudes subtract each other the size that Y-axis input angular velocity just can be obtained.Such as Fig. 3 (b)
Shown, when there is turning rate input in the external world, the detection mode of oscillation that polarization direction induces, detection vibration frequency and reference vibration are frequently
Rate is identical.
As shown in figure 4, be the present invention under 5 various sizes of height, driven-mode, sensed-mode connecting curve figure.
When motivating piezoelectric vibrator 1 with driving resonance frequencies, under coriolis effect, piezoelectricity effect collective effect, polarization direction is induced together
The detection of frequency is vibrated, if the intrinsic frequency of driven-mode, sensed-mode is identical, i.e. driven-mode and sensed-mode phase mutual coupling
It closes, then the amplitude for detecting vibration is up to maximum value under the frequency, and then increases output signal at signal detection electrode 2,4
Variation, to be conducive to the raising of sensitivity.In Fig. 4, each point indicates to meet one group long under the conditions of modal coupling on curve
The high registration of width, and every curve corresponds to a kind of height of piezoelectric vibrator 1, height from left to right be respectively 2.8mm, 2.9mm,
3.0mm, 3.1mm and 3.2mm.As shown in Figure 4, with the increase of 1 height H of piezoelectric vibrator, curve is more and more precipitous, i.e., with height
The increase of degree, modal coupling curve are more and more sensitiveer to the variation of width, can optimize micro- solid-state mould according to the size on curve
The size of state gyro, so that identical as sensed-mode with reference to mode.
3 points are chosen from every curve of Fig. 4, and 15 various sizes of piezoelectric vibrators can be obtained.Pass through finite element fraction
Analysis obtains corresponding reference mode, sensed-mode resonant frequency under different sizes, then applies the angle speed of 1rad/s in X-direction
Degree, measures its scale factor, detail parameters are as shown in the table.Reference mode, the intrinsic frequency of sensed-mode of 15 points are basic
Unanimously, meet the requirement of modal coupling.There it can be seen that thickness H is bigger when length L is remained unchanged, scale factor can be with
Become larger；When thickness H is constant, scale factor can reduce with the increase of length L.
Following table is the design parameter of partial dot on Fig. 4 curve, size, modal coupling frequency, correspondence including piezoelectric vibrator
Sensitivity:
As a preferred embodiment, more driving electrodes modal coupling micro-solid mode gyroscopes utilize piezoelectric ceramics base
Body first sputters one layer of seed layer using double-sided alignment technique on matrix；It is then spin coated onto photoresist, utilizes the exposure mask made
Plate carries out photoetching；Develop later, is graphical；Following plating metal electrode forms driving electrodes, reference electrode, signal detection electricity
Pole, isolation electrode；Finally connect peripheral circuit, encapsulation obtains finished product.
The present invention is vibrated using the vibration under the special mode of piezoelectric vibrator as reference, while utilizing coriolis effect and piezoelectricity
Effect carrys out the detection that sensitive extraneous input angular velocity carries out output signal.The present invention is by introducing multipair driving electrodes increase reference
Vibration velocity amplitude improves microthrust test detection sensitivity；Optimize the size of piezoelectric vibrator, so that with reference under mode and sensed-mode
The intrinsic frequency of the two is identical, using modal coupling effect increase detection vibration amplitude, improves the output sensitivity of gyro.This hair
It is bright sensitive come the detection for greatly improving micro-solid mode gyroscope by using more driving electrodes and driving sensed-mode coupling effect
Degree.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not only limited to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention belong to protection category of the invention.It should be understood that for the art
Technical staff for, several improvements and modifications under the premise of not departing from the present invention also all should be considered as protection model of the invention
It encloses.
Claims (5)
1. a kind of more driving electrodes modal coupling micro-solid mode gyroscopes characterized by comprising a piezoelectric vibrator, multipair
Driving electrodes, multiple reference electrodes, multiple signal detection electrodes and multiple isolation electrodes, driving electrodes, reference electrode, signal inspection
Survey electrode, isolation electrode is respectively positioned on the upper and lower surfaces of piezoelectric vibrator, and forms a fixed connection with piezoelectric vibrator；
The driving electrodes share four pairs, wherein two pairs of driving electrodes are evenly distributed on the centre of piezoelectric vibrator upper surface, separately
Outer two pairs of driving electrodes are evenly distributed on the centre of piezoelectric vibrator lower surface；The driving electrodes are for motivating piezoelectric vibrator to produce
The raw driven-mode vibration shape；
There are four the reference electrode is total, two of them reference electrode is distributed near the seamed edge of piezoelectric vibrator upper surface with respect to two
Middle position, other two reference electrode is distributed in the middle position near the seamed edge of piezoelectric vibrator lower surface with respect to two；Institute
State reference electrode for monitor piezoelectric vibrator under the excitation of driving electrodes whether normal starting of oscillation, and track operational vibration mode,
Make piezoelectric vibrator steady operation under operational vibration mode；
The signal detection electrode shares eight, wherein four signal detection electrodes are distributed in four angles of piezoelectric vibrator upper surface
On, four additional signal detection electrode is distributed on four angles of piezoelectric vibrator lower surface；The signal detection electrode is for examining
Survey the induced voltage generated in piezoelectric vibrator polarization direction；
There are four the isolation electrode is total, two of them are located at the driving electrodes and reference electrode, signal of piezoelectric vibrator upper surface
Between detecting electrode, other two is located between the driving electrodes and reference electrode, signal detection electrode of piezoelectric vibrator lower surface；
The isolation electrode is used for influence of the isolation drive voltage to signal detection electrode, reference electrode output voltage or charge；
When applying alternating voltage in the driving electrodes with selected resonant frequency, the piezoelectric vibrator is in alternating voltage
Excitation is lower, and there are the special mode of oscillations of certain rank, push electric tachometer indicator each point in the mode and transport in the same direction substantially at the same frequency
It is dynamic, and direction of vibration in adjacent two edges is on the contrary, the direction of vibration on opposite two sides is exactly like, under this frequency
Special vibration is as reference vibration, and the polarization direction of piezoelectric vibrator and piezoelectric vibrator are perpendicular with reference to direction of vibration；
When having turning rate input perpendicular to reference direction of vibration, the piezoelectric vibrator is under the action of coriolis force, polarization direction
Detection vibration can be induced, amplitude is directly proportional to extraneous input angular velocity size, utilizes the coupling of reference mode and sensed-mode
It closes so that detection vibration amplitude reaches the maximum value under the frequency, the polarity by detecting piezoelectric voltage in signal detection electrode changes
Become situation and variable quantity to get the size of extraneous input angular velocity is arrived.
2. a kind of more driving electrodes modal coupling micro-solid mode gyroscopes according to claim 1, characterized in that the pressure
Electric tachometer indicator is rectangular parallelepiped structure, and material is piezoelectric ceramics or other piezoelectric materials.
3. a kind of more driving electrodes modal coupling micro-solid mode gyroscopes according to claim 1, characterized in that the pressure
Electric tachometer indicator length, width and height are selected so that it is identical as detection vibration modal frequency with reference to vibration modal frequency.
4. a kind of more driving electrodes modal coupling micro-solid mode gyroscopes according to claim 1, characterized in that the drive
Guarantee the voltage frequency having the same, the amplitude that are applied to adjacent driven electrode on piezoelectric vibrator the same face when moving electrode works,
But polarity is opposite.
5. a kind of more driving electrodes modal coupling micro-solid mode gyroscopes according to claim 1-4, feature
It is that the driving electrodes, the reference electrode, the signal detection electrode, the material that electrode is isolated are metal, structure
It is rectangle.
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| CN109470231A (en) * | 2018-11-21 | 2019-03-15 | 中国船舶重工集团公司第七0七研究所 | Expand the piezoelectric electrode design structure of metal resonant gyroscope range |
| CN109655049B (en) * | 2018-12-21 | 2022-05-17 | 陕西航天时代导航设备有限公司 | Method for extracting vibration amplitude of cup-shaped gyroscope with high precision |
| CN113297707B (en) * | 2021-06-21 | 2023-09-05 | 上海交通大学 | Resonance gyro optimization method and system based on joint simulation |
| CN114113813B (en) * | 2021-11-24 | 2022-06-28 | 北京中科飞龙传感技术有限责任公司 | Self-adaptive MEMS electric field sensor and structure thereof |
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