CN110388983A - Four-element array piezoelectric vibration pickup - Google Patents
Four-element array piezoelectric vibration pickup Download PDFInfo
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- CN110388983A CN110388983A CN201910577966.4A CN201910577966A CN110388983A CN 110388983 A CN110388983 A CN 110388983A CN 201910577966 A CN201910577966 A CN 201910577966A CN 110388983 A CN110388983 A CN 110388983A
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- 239000002131 composite material Substances 0.000 claims abstract description 9
- 239000010409 thin film Substances 0.000 claims description 18
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- 238000012360 testing method Methods 0.000 description 7
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- 230000010287 polarization Effects 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Abstract
The invention discloses four-element array piezoelectric vibration pickups, including four symmetrically arranged sensing units, sensing unit includes cuboid column, cross composite beam, sensitivity conversion pad and square Si substrate, cross composite beam includes four cantilever beams, the cuboid uprights vertical is set at the central crossbar of cantilever beam, the end of four cantilever beams is equipped with supporting leg, supporting leg lower end is provided with sensitive conversion pad, sensitivity conversion pad is arranged on square Si substrate, square Si substrate bottom surface position corresponding with four sensitivity conversion pads is etched with the identical circular groove of structure size, square Si substrate top surface part corresponding with each circular groove forms circular membrane layer；Four sensing units only difference is that the length of cuboid column is different.The present invention can detect the vibration signal of different size and frequency in same physical process, widen its engineer application range by four symmetrically arranged sensing units with different length cuboid column.
Description
Technical field
The invention belongs to oscillation sensor field more particularly to four-element array piezoelectric vibration pickups.
Background technique
With MEMS technology, the development of semiconductor and IC, sensor starts to integrated, miniaturization,
Feature is small in size, light weight, high sensitivity, simultaneously because the good characteristic of silicon, these sensors have higher overload-resistant energy
Power can be widely applied to the fields such as acoustics, mechanics, medicine and aerospace.Common vibrating sensor is become as electromechanical currently on the market
Changing principle classification has: pressure resistance type, piezoelectric type, condenser type, inductance type, photo-electric and electrodynamic type etc..Wherein due to piezoelectric type vibration
Sensor has that high sensitivity, low in energy consumption, intrinsic frequency is high, and signal-to-noise ratio is high, advantages of simple structure and simple is concerned.
However, the same physical process needs to measure the vibration of many different frequencies and size in many testing fields
Signal, some even have the vibration acceleration value of difference hundreds of times to need to measure, and such as analyze body during launch and flight
Stress condition when, both need to test multiple and different acceleration values in emission process, it is also necessary to multiple during test flight
Different acceleration values.It is difficult to meet test request with the vibrating sensor comprising a sensing unit in these occasions.In order to
Solve the problems, such as this, the present invention proposes four-element array piezoelectric vibration pickup, due to each in the four-element array vibrating sensor
Sensing unit has different measurement sensitivity and working band, therefore can operate with the essence of the vibration signal of Variable Amplitude and frequency
Really measurement.
Summary of the invention
In consideration of it, it is an object of the present invention to propose a kind of four-element array piezoelectric vibration pickup, it is intended to overcome existing
Vibrating sensor comprising single sensing unit is not able to satisfy the vibration of measure various web value and frequency in the same test process
The shortcomings that dynamic signal.
In order to achieve the above object of the invention, and then the technical solution taken is as follows:
Four-element array piezoelectric vibration pickup, including four symmetrically arranged sensing units, the sensing unit include
Cuboid column, cross composite beam, sensitive conversion pad and square Si substrate, the cross composite beam include four root knots
The identical cantilever beam of structure, the cuboid uprights vertical are set at the central crossbar of cantilever beam, the end of four cantilever beams
End is equipped with supporting leg, and four supporting leg lower ends are provided with sensitive conversion pad, and the sensitive conversion pad includes lower electrode layer, top electrode
Layer and the piezoelectric thin film layer being arranged between lower electrode layer and upper electrode layer, the sensitive conversion pad setting are served as a contrast in square silicon
On bottom, square Si substrate bottom surface position corresponding with four sensitivity conversion pads is etched with the complete phase of structure size respectively
With circular groove, square Si substrate top surface part formation circular membrane layer corresponding with each circular groove；It is described
It is overlapped at the center that four cantilever beams intersect with square Si substrate center, four lower electrode layer structure sizes complete one
It causes, four piezoelectric thin film layer structural parameters are completely the same, and four upper electrode layer structural parameters are completely the same；
Four sensing units only difference is that: the length of the cuboid column is different, each sensing unit setting
Cuboid column be respectively that the first cuboid column, the second cuboid column, third cuboid column and the 4th cuboid are vertical
Column, the four ipsilateral settings of root long cube column.
Preferably, the sensitive conversion pad is circle, and its axial line is overlapped with the axial line of the circular groove, described
Sensitivity conversion pad diameter is less than the diameter of circular membrane layer.
Preferably, the lower electrode layer is Pt/Ti electrode layer, the piezoelectric thin film layer is PZT piezoelectric membrane, described to power on
Pole layer is Au/Ti electrode layer.
Wherein, square Si substrate plays a supportive role.When specific measurement, cuboid column leads to the vibration signal experienced
It crosses cross composite beam and passes to the circular membrane layer for being provided with sensitive conversion pad, circular membrane layer is made to generate ess-strain, from
And cause to be arranged in the sensitive conversion pad on circular membrane layer and generate direct piezoelectric effect, upper and lower surface generates opposite polarity equivalent
Ess-strain is converted to electric signal by polarization charge, is caused on four sensing units in corresponding X-direction by upper/lower electrode
8 output in 8 outputs and Y-direction changes, to realize the detection to the vibration signal of different frequency range and amplitude.
The corresponding sensing unit of cuboid column of four different lengths of four-element array piezoelectric vibration pickup of the present invention
Sensitivity and working band it is all different, can apply in the vibration signal detection of Variable Amplitude and frequency, widen its application
Range.
Four-element array piezoelectric vibration pickup intrinsic frequency of the present invention are as follows:
Wherein, b is cantilever beam length, and m is cantilever beam quality, m2For the quality of cuboid column, L is cuboid column
Length, k are equivalent elastic coefficient, and g is acceleration of gravity, IG、IG2Respectively represent the rotary inertia to Y and Z axis.
Four-element array piezoelectric vibration pickup output voltage of the present invention are as follows:
V0=g σ t (2)
Wherein, g is piezoelectric constant, and σ is stress, and t is piezoelectric thin film layer thickness.The piezoelectricity of its output voltage and piezoelectric material
Constant, suffered stress, piezoelectric thin film layer thickness are related.Piezoelectric thin film layer selection of the present invention has the PZT-2 of more high piezoelectric constant
Piezoelectric material, to obtain higher sensitivity.
Stress and transducer sensitivity on sensing unit circular membrane layer is directly proportional, and produced stress and cuboid are vertical
Column length is directly related, and column is longer, and stress is bigger, and sensitivity is higher；And the higher resonant frequency of column is lower, effectively work frequency
Band is narrower.Therefore, the feature of comprehensive practical tested vibration signal, comprehensively considers sensitivity and working band, can according to formula (1) and
(2) on the basis of determining array structure parameter (column width, thickness, circular membrane thickness degree and radius etc.), flexible choice
The length for the cuboid column being arranged on four sensing units.
The beneficial effects of the present invention are: 1) present invention uses right-angled intersection+column micro-structure, and it is based on piezoelectric principle, frequency
Bandwidth, it is low in energy consumption, the charge density and charge pole that four piezoelectric thin film layers in two mutually perpendicular directions generate can be utilized
Property realize 360 ° within the scope of vibration source size and orientation detection；2) present invention on the same chip integrate four it is symmetrically arranged quick
Feel unit, and the cuboid strut length being arranged on each sensing unit is different, corresponding measurement sensitivity and effective working band
Also different, therefore can be used in the vibration signal detection of Variable Amplitude and frequency values.The present invention is real with single vibrating sensor
Show the sensor array in small size, overcomes the inconsistency of each sensor in traditional sensor array, and single
Piece is integrated to be easily installed and tests, and installation accuracy is improved.
Detailed description of the invention
The attached drawing constituted part of this application is used to provide further understanding of the present invention, schematic reality of the invention
It applies example and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the portion A structural schematic diagram of the invention；
Fig. 3 is the portion A cross-sectional view of the invention；
Fig. 4 is the working principle of the invention schematic diagram；
Fig. 5 is the operation principle schematic diagram of the embodiment of the present invention.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
In order to make those skilled in the art more fully understand application scheme, below in conjunction in the embodiment of the present application
Attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is only
The embodiment of the application a part, instead of all the embodiments.Based on the embodiment in the application, ordinary skill people
Member's every other embodiment obtained without making creative work, all should belong to the model of the application protection
It encloses.
As shown in Figure 1-3, four-element array piezoelectric vibration pickup, including four symmetrically arranged sensing units, it is described
Sensing unit includes cuboid column, cross composite beam 2, sensitive conversion pad 4 and square Si substrate 3, the cross
Composite beam 2 includes four completely identical in structure cantilever beams 21, and the cuboid uprights vertical is set to the center of cantilever beam 21
Infall, the end of four cantilever beams 21 are equipped with supporting leg 22, and four 22 lower ends of supporting leg are provided with sensitive conversion pad 4, described
Sensitivity conversion pad 4 includes lower electrode layer 43, upper electrode layer 41 and the pressure being arranged between lower electrode layer 43 and upper electrode layer 41
Thin film layer 42, the sensitive conversion pad 4 are arranged on square Si substrate 3,3 bottom surface of square Si substrate and four it is quick
The sense conversion corresponding position of pad 4 is etched with the identical circular groove 31 of structure size, the square Si substrate 3 respectively
Top surface part corresponding with each circular groove 31 forms circular membrane layer 32；At the center that four cantilever beams 21 intersect with
3 center of square Si substrate is overlapped, and four lower electrode layers, 43 structure size is completely the same, four 42 structures of piezoelectric thin film layer
Parameter is completely the same, and four 41 structural parameters of upper electrode layer are completely the same；
Four sensing units only difference is that: the length of the cuboid column is different, each sensing unit setting
Cuboid column be respectively the first cuboid column 1, the second cuboid column 5, third cuboid column 6 and the 4th cuboid
Column 7, the four ipsilateral settings of root long cube column.
The sensitive conversion pad 4 is circle, and its axial line is overlapped with the axial line of the circular groove 31, the sensitivity
Conversion 4 diameters of pad are less than the diameter of circular membrane layer 32.
The lower electrode layer 43 is Pt/Ti electrode layer, and the piezoelectric thin film layer 42 is PZT piezoelectric membrane, the top electrode
Layer 41 is Au/Ti electrode layer.
When detecting on signal function to cuboid column, cuboid column is generated according to the size and Orientation of vibration signal
Different deformation drives cantilever beam and then makes sensitive conversion pad that corresponding deformation occur, and the piezoelectric thin film layer of sensitivity conversion pad produces
Raw piezoelectric effect, upper and lower surface generate opposite polarity equivalent polarization charge, ess-strain are converted to electric signal, by upper and lower
Electrode passes to output end, realizes the detection of signal.
Stress and transducer sensitivity on sensing unit circular membrane layer is directly proportional, and stress and cuboid strut length
Directly related, column is longer, and stress is bigger, and sensitivity is higher；And the higher resonant frequency of column is lower, effective working band is got over
It is narrow.
Comprehensively consider vibrating sensor sensitivity and working band, initial setting array microstructure geometric dimension such as 1 institute of table
Show:
The four-element array vibrating sensor geometrical scale of the present invention of table 1
Static analysis, model analysis and Harmony response point have been carried out to array microstructure using ANSYS finite element emulation software
Analysis, obtains intrinsic frequency, the maximum output voltage of different length cuboid column sensing unit.Corresponding first cube is sensitive single
First intrinsic frequency is 1.23kHz, maximum output voltage 2.71mv, and corresponding second cube sensing unit intrinsic frequency is
1.8kHz, maximum output voltage 2.05mv, corresponding third cube sensing unit intrinsic frequency are 6.02kHz, maximum stress
For 1.47mv, corresponding 4th cube sensing unit intrinsic frequency is 10.54kHz, maximum output voltage 0.86mv, it can be seen that
Each sensitive body has different sensitivity and effective working band in the array structure, it can relatively accurately measure 0~
Any one vibration signal in 10.54kHz frequency band, can be used for measuring the vibration signal of different characteristics in same physical process.
It further illustrates in the way of of the invention be specifically directed:
In same sensing unit, two cantilever beams being located along the same line constitute a crossbeam, are mutually perpendicular to two-by-two
Crossbeam using its center infall as origin, and establish coordinate system XOY along two vertical crossbeam directions, be connected on X-direction crossbeam
Two PZT piezoelectric thin film layers it is most sensitive to X-direction vibration signal, on Y-direction crossbeam be connected two PZT piezoelectric thin film layers pair
Y-direction vibration signal is most sensitive.
Recursive model is as shown in Figure 4.In figure, P is vibration source position, and θ is the horizontal azimuth of vibration signal, and range is
[0,2π].Assuming that the road sensitive body X of the present invention and the output of the road Y are respectively vx、vy, then the horizontal azimuth θ of vibration source can pass through following formula meter
It obtains:
Due under single coordinate system and the axisymmetric vibration source point of coordinate can all cause similarly to vibrate, P as shown in Figure 41,
P2, P3, that is, there are port and starboard ambiguities, and four-element array piezoelectric vibration pickup of the present invention can utilize piezoelectric thin film layer
Charge polarity, the i.e. specific orientation of the phase judgment vibration source of output voltage signal.
In order to further appreciate that in the way of of the invention be specifically directed, as shown in figure 5, when vibration source target P is absolutely being sat
When under mark system XOY first quartile, after cuboid column of the invention perceives the vibration signal, column alongDirection inclination, it is right
Circular membrane A tension in coordinate system XOY, circular membrane B tension are answered, circular membrane C is pressurized, and circular membrane D is pressurized, it is assumed that piezoelectricity
The voltage signal exported when film layer is by tensile stress is positive, and the voltage signal exported when by compression is negative, four corresponding
Piezoelectric membrane output is denoted as v respectivelyAx、vBy、vCx=-vAx、vDy=-vBy, then v at this timeAx> 0, vBy> 0, vCx< 0, vDy< 0；When
Vibration source target P1When under the second quadrant of absolute coordinate system XOY, column alongDirection tilts, round in respective coordinates system XOY
Film A is pressurized, circular membrane B tension, circular membrane C tension, and circular membrane D is pressurized, then corresponds to four piezoelectric membranes and export vAx
< 0, vBy> 0, vCx> 0, vDy< 0；As vibration source target P2When under absolute coordinate system XOY third quadrant, column alongSide
To inclination, circular membrane A is pressurized in respective coordinates system XOY, and circular membrane B is pressurized, circular membrane C tension, circular membrane D by
It draws, then corresponds to four piezoelectric membranes and export vAx< 0, vBy< 0, vCx> 0, vDy> 0；As vibration source target P3In absolute coordinate system XOY
When under fourth quadrant, column alongDirection tilts, and circular membrane A tension in respective coordinates system XOY, circular membrane B is pressurized,
Circular membrane C is pressurized, circular membrane D tension, then corresponds to four piezoelectric membranes and export vAx> 0, vBy< 0, vCx< 0, vDy> 0；When
Vibration source target P4In X positive axis, column along X negative direction tilt, then theoretically in respective coordinates system XOY circular membrane A by
It draws, circular membrane C is pressurized, and circular membrane B and D do not stress, then corresponds to four piezoelectric membranes and export vAx> 0, vBy=0, vCx< 0,
vDy=0；As vibration source target P5In the negative semiaxis of X, column is tilted along X positive direction, then theoretically round in respective coordinates system XOY
Film A is pressurized, and circular membrane C tension, circular membrane B and D do not stress, then corresponds to four piezoelectric membranes and export vAx< 0, vBy=
0, vCx> 0, vDy=0；As vibration source target P6In Y positive axis, column is tilted along Y negative direction, then theoretically respective coordinates system
Circular membrane B tension in XOY, circular membrane D are pressurized, and circular membrane A and C do not stress, then correspond to four piezoelectric thin film layer outputs
vAx=0, vBy> 0, vCx=0, vDy<0；As vibration source target P7In the negative semiaxis of Y, column is tilted along Y positive direction, then theoretically right
Circular membrane B in coordinate system XOY is answered to be pressurized, circular membrane D tension, circular membrane A and C do not stress, then it is thin to correspond to four piezoelectricity
Film exports vAx=0, vBy< 0, vCx=0, vDy>0.Therefore according to the output voltage of four piezoelectric membranes corresponding under single coordinate system
The problem of amplitude and phase accurately can position vibration source, eliminate port and starboard ambiguity.
Assuming that being calculated using four tunnels output in relative coordinate system XOY90 ° of 0 °≤θ ' <, then root
According to the phase of four road output voltages, determine that specific azimuth angle theta is as shown in table 2:
2 azimuth estimated result of table
Single sensing unit can realize the orientation within the scope of 360 °, and four different lengths are arranged in four sensing units of the present invention
Cuboid column, measurement sensitivity and effective working band are all different, therefore can apply in Variable Amplitude and frequency values
In vibration signal detection, its application range has been widened.And the present invention realizes single-chip integration array, realizes the group in small size
Battle array, consistency is good, is easily installed and tests, improves installation accuracy.
Sensing unit of the present invention can be formed to different arrays according to demand in the specific implementation, such as linear rectangle
Array, the transformation that triangular array etc. is done based on the present invention, should all be included in the protection scope of the present invention.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (3)
1. four-element array piezoelectric vibration pickup, including four symmetrically arranged sensing units, it is characterised in that: the sensitivity
Unit includes cuboid column, cross composite beam, sensitive conversion pad and square Si substrate, the cross composite beam packet
Four completely identical in structure cantilever beams are included, the cuboid uprights vertical is set at the central crossbar of cantilever beam, and four outstanding
The end of arm beam is equipped with supporting leg, and four supporting leg lower ends are provided with sensitive conversion pad, and the sensitive conversion pad includes lower electrode
Layer, upper electrode layer and the piezoelectric thin film layer being arranged between lower electrode layer and upper electrode layer, the sensitive conversion pad setting exist
On square Si substrate, square Si substrate bottom surface position corresponding with four sensitivity conversion pads is etched with structure respectively
The identical circular groove of size, square Si substrate top surface part corresponding with each circular groove form round thin
Film layer；
Four sensing units only difference is that: the length of the cuboid column is different, the length of each sensing unit setting
Cube column is respectively the first cuboid column, the second cuboid column, third cuboid column and the 4th cuboid column, and four
The ipsilateral setting of root long cube column.
2. four-element array piezoelectric vibration pickup according to claim 1, it is characterised in that: the sensitive conversion, which is padded, is
Circle, and its axial line is overlapped with the axial line of the circular groove.
3. four-element array piezoelectric vibration pickup according to claim 1, it is characterised in that: the lower electrode layer is
Pt/Ti electrode layer, the piezoelectric thin film layer are PZT piezoelectric membrane, and the upper electrode layer is Au/Ti electrode layer.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114002324A (en) * | 2021-11-02 | 2022-02-01 | 吉林大学 | Positioning detection device and method for composite material subsurface microcracks |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102426054A (en) * | 2011-10-29 | 2012-04-25 | 中北大学 | Monolithic integration composite range vector hydrophone |
| CN205142048U (en) * | 2015-10-29 | 2016-04-06 | 苏州工业园区纳米产业技术研究院有限公司 | Wide band piezoelectric type MEMS vibration energy collector |
| CN108731790A (en) * | 2018-05-08 | 2018-11-02 | 山西大学 | Highly sensitive broadband piezoelectric type MEMS vector hydrophone |
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2019
- 2019-06-28 CN CN201910577966.4A patent/CN110388983A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102426054A (en) * | 2011-10-29 | 2012-04-25 | 中北大学 | Monolithic integration composite range vector hydrophone |
| CN205142048U (en) * | 2015-10-29 | 2016-04-06 | 苏州工业园区纳米产业技术研究院有限公司 | Wide band piezoelectric type MEMS vibration energy collector |
| CN108731790A (en) * | 2018-05-08 | 2018-11-02 | 山西大学 | Highly sensitive broadband piezoelectric type MEMS vector hydrophone |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114002324A (en) * | 2021-11-02 | 2022-02-01 | 吉林大学 | Positioning detection device and method for composite material subsurface microcracks |
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Application publication date: 20191029 |