CN205142048U - Wide band piezoelectric type MEMS vibration energy collector - Google Patents
Wide band piezoelectric type MEMS vibration energy collector Download PDFInfo
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- CN205142048U CN205142048U CN201520858032.5U CN201520858032U CN205142048U CN 205142048 U CN205142048 U CN 205142048U CN 201520858032 U CN201520858032 U CN 201520858032U CN 205142048 U CN205142048 U CN 205142048U
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Abstract
The utility model provides a piezoelectric type MEMS vibration energy collector of wide band response converts the electric energy into through the energy of vibration with in the environment, utilizes piezoelectric material's positive piezo electric effect to realize that mechanical energy is to electric transformation of energy. Adopt easily to produce resonant cantilever beam - quality block structure with the environment and as basic chip, utilizes the integrated total the power output who improves energy gatherer spare of how basic chip array, the frequency band scope is widened in the utilization respectively structural parameters of basic chip difference to be applied to multiple vibration ring border. The utility model provides an energy collection system has wide band response ability, having widened work response frequency channel, and how basic chip integration has a high energy output, collects the environmental vibration energy through the device, possesses self -power, stability, advantage such as sustainable, is expected to solve application system's such as wireless sensor network self -power problem.
Description
Technical field
The utility model relates to a kind of electricity energy harvester, particularly relates to a kind of broadband piezoelectric formula MEMS vibration energy collector.
Background technology
Along with the progressively development of radio sensing network, its application spreads to the social every field such as environmental monitoring, traffic administration from military defense.Sensor network nodes is the basis building radio sensing network, and radio sensing network node has features such as quantity is many, low-power consumption, complex distribution, traditional wire is powered and the mode such as powered battery can not meet the power demands steady in a long-term of radio sensing network node.Therefore, novel method of supplying power to is that the powerup issue solving radio sensing network node long-term stability provides new thinking.
Vibrational energy in environment, luminous energy, radiant energy, heat energy etc. can be converted into electric energy by energy acquisition technology, are stored in the energy-storage travelling wave tube such as electric capacity or battery, are embodied as radio sensing network node and power.Vibrational energy is as a kind of energy ubiquitous in environment, and vibrational energy acquisition technique mainly comprises piezoelectric type, electromagnetic type, electrostatic and magnetostriction type.It is less that electromagnetic energy harvester exports energy, and be subject to chip size restriction; Electrostatic energy collecting device, due to needs additional power source, is applied limited; Theoretical model and the parameter optimization of magnetostriction type energy acquisition device not yet form integral framework, are still at present and attempt the exploratory stage.Relative to other modes, the vibrational energy harvester based on piezoelectric effect has that structure is relatively simple, high-energy-density, without electromagnetic interference and the advantage such as do not need additional power supply to power, become the research emphasis in vibrational energy collection field.
And the current MEMS vibration energy collector based on piezoelectric type also exists the shortcomings such as working band is narrow, power output is low, resonance frequency is high, be difficult to meet practical application request.Based on this, the utility model proposes a kind of piezoelectric type MEMS vibration energy collector of wideband response, to solve the problems such as existing MEMS energy acquisition device resonance frequency is high, power output is low, operating frequency range is narrow.
Utility model content
The utility model is in order to solve the problem that existing MEMS vibration energy collector resonance frequency is high, output energy is low, operating frequency range is narrow, propose a kind of broadband piezoelectric formula MEMS vibration energy collector, the multiple chips array integrated device being basic chips unit with cantilever beam-mass foundation structure.
Broadband piezoelectric formula MEMS vibration energy collector of the present utility model, comprise perimeter base and to be somely integrated on described perimeter base the base chip that series connection exports, resonance frequency is close, described base chip comprises some cantilever beams that framework, one end are connected with described frame inner surface respectively and the mass supported by each described cantilever beam other end, and each described cantilever beam includes two piezoelectric vibrators be in series.
Further, described cantilever beam comprise piezoelectric layer, cover described piezoelectric layer upper surface and the upper electrode layer disconnected and cover described piezoelectric layer lower surface lower electrode layer to form the two described piezoelectric vibrators be in series.
Further, described frame inner surface is at least connected with four equally distributed described cantilever beams.
Further, described perimeter base is provided with some external lead wire bonding welding pads, described upper electrode layer and be all connected with lead-in wire between described lower electrode layer and described external lead wire bonding welding pad.
Further, described piezoelectric layer is PZT piezoelectric membrane.
Further, described perimeter base is integrated with the described base chip of four array distribution.
By such scheme, the utility model at least has the following advantages:
1, based on the base chip of the cantilever beam-mass block structure of PZT piezoelectric membrane piezoelectric effect, the output energy of effective increased device, has easily and environment produces the feature resonated;
2, adopt the close many base chip array combination of resonance frequency can respond in wider frequency band range and all have comparatively macro-energy to export, having the advantages that working band is wide, output energy is high.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of specification, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present utility model.
Accompanying drawing explanation
Fig. 1 is structure vertical view of the present utility model;
Fig. 2 is base chip perspective view of the present utility model;
Fig. 3 is base chip planar structure schematic diagram of the present utility model.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but are not used for limiting scope of the present utility model.
See Fig. 1 to Fig. 3, a kind of broadband piezoelectric formula MEMS vibration energy collector is many base chip 20 array integrated devices, comprises four groups and is fixed on base chip 20 on perimeter base 10.Perimeter base 10 is fixed with external lead wire bonding welding pad 11; Base chip 20 comprises some cantilever beams 22 that framework 21, one end are connected with framework 21 inner surface respectively and the mass 23 supported by each cantilever beam 22 other end, each cantilever beam 22 includes piezoelectric layer 30, cover piezoelectric layer 30 upper surface and the upper electrode layer 40 disconnected and cover piezoelectric layer 30 lower surface lower electrode layer 50 to form two piezoelectric vibrators be in series.All be connected with lead-in wire between the polarization surface of the piezoelectric layer 30 of each base chip 20 and external lead wire bonding welding pad 11, connecting to make each base chip 20 exports.
During concrete enforcement, each base chip 20 cantilever beam 22 that selecting structure dimensional parameters is different respectively and mass 23, be close to make the resonance frequency of each base chip 20, the number of the cantilever beam 22 of each base chip 20 is four, the outer face of four cantilever beams 22 is fixed on the inner surface of rectangular frame 21 respectively equably, mass 23 is fixed on the inner face of four cantilever beams 22 simultaneously, the two ends, upper surface left and right of the piezoelectric layer on cantilever beam 22 are covered upper electrode layer 40, disconnect in middle position by upper electrode layer 40, like this, piezoelectric layer 30 shares lower electrode layer 50, the mode that upper electrode layer 40 disconnects can make the piezoelectricity transfer ratio on cantilever beam 22 reach maximum.
Preferably, the piezoelectric layer in the utility model adopts PZT piezoelectric membrane, has the feature of high sensitivity and low electrical noise, has very high corresponding speed and larger output stress.
Specific works process is as follows: each cantilever beam 22 vibrates because the mechanical oscillation in environment drive respectively with the base chip 20 that mass 23 forms, mass 23 drives cantilever beam 22 to produce Bending Deformation, the PZT piezoelectric membrane inside on cantilever beam 22 is made to produce polarization phenomena, and there is contrary sign polarization charge on its surface, convert vibration signal to the signal of telecommunication thus.In the process, the active force that inside and outside cantilever beam 22, two ends are subject to is contrary, be respectively tension stress and compression, therefore the electric charge that inside and outside PZT piezoelectric membrane, polarization surface in two ends produces is also contrary, share by adopting bottom electrode, the mode that top electrode disconnects realizes the series connection of inside and outside two ends PZT piezoelectric membrane, increases and exports electric energy.Further, each base chip 20 series connection is fixed on perimeter base 10, perimeter base 10 is fixed with external lead wire bonding welding pad 11, all lead-in wire is connected with between the electrode of PZT piezoelectric membrane upper and lower surface and external lead wire pad 11, during work, by lead-in wire and external lead wire bonding welding pad 11, the signal of telecommunication is exported.
The utility model is multiple chips array device, each base chip 20 is chosen for close cantilever beam 22-mass 23 structure of resonance frequency, when wherein a certain base chip 20 reaches resonance with environment, export energy maximum, other base chip 20 are also with close to maximization Energy transmission; Equally, when another base chip 20 can reach resonance in another vibration environment, export energy maximum, other base chip 20 maximize Energy transmission with close equally; Finally by the energy series connection that each base chip 20 exports by perimeter base 10, reach output energy maximization.Effectively can utilize the output energy of each base chip 20 like this, add the output of device; The frequency response range of device has also been widened in the combination of many base chip 20 that each resonance frequency is close, is applicable to more applied environments.
The above is only preferred implementation of the present utility model; be not limited to the utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection range of the present utility model.
Claims (6)
1. a broadband piezoelectric formula MEMS vibration energy collector, it is characterized in that: comprise perimeter base and to be somely integrated on described perimeter base the base chip that series connection exports, resonance frequency is close, described base chip comprises some cantilever beams that framework, one end are connected with described frame inner surface respectively and the mass supported by each described cantilever beam other end, and each described cantilever beam includes two piezoelectric vibrators be in series.
2. broadband piezoelectric formula MEMS vibration energy collector according to claim 1, is characterized in that: described cantilever beam comprises piezoelectric layer, cover described piezoelectric layer upper surface and the upper electrode layer disconnected and cover described piezoelectric layer lower surface lower electrode layer to form the two described piezoelectric vibrators be in series.
3. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, is characterized in that: described frame inner surface is at least connected with four equally distributed described cantilever beams.
4. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, it is characterized in that: described perimeter base is provided with some external lead wire bonding welding pads, described upper electrode layer and be all connected with lead-in wire between described lower electrode layer and described external lead wire bonding welding pad.
5. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, is characterized in that: described piezoelectric layer is PZT piezoelectric membrane.
6. the broadband piezoelectric formula MEMS vibration energy collector according to any one of claim 1-5, is characterized in that: the described base chip described perimeter base being integrated with four array distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201520858032.5U CN205142048U (en) | 2015-10-29 | 2015-10-29 | Wide band piezoelectric type MEMS vibration energy collector |
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| CN201520858032.5U CN205142048U (en) | 2015-10-29 | 2015-10-29 | Wide band piezoelectric type MEMS vibration energy collector |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105262371A (en) * | 2015-10-29 | 2016-01-20 | 苏州工业园区纳米产业技术研究院有限公司 | Broadband piezoelectric type MEMS vibration energy collector |
| CN108593160A (en) * | 2018-05-23 | 2018-09-28 | 太原理工大学 | A kind of manufacturing method of diaphragm type cantilever beam surface stress biosensor |
| CN110388983A (en) * | 2019-06-28 | 2019-10-29 | 山西大学 | Four-element array piezoelectric vibration pickup |
-
2015
- 2015-10-29 CN CN201520858032.5U patent/CN205142048U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105262371A (en) * | 2015-10-29 | 2016-01-20 | 苏州工业园区纳米产业技术研究院有限公司 | Broadband piezoelectric type MEMS vibration energy collector |
| CN108593160A (en) * | 2018-05-23 | 2018-09-28 | 太原理工大学 | A kind of manufacturing method of diaphragm type cantilever beam surface stress biosensor |
| CN110388983A (en) * | 2019-06-28 | 2019-10-29 | 山西大学 | Four-element array piezoelectric vibration pickup |
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