CN105262371A - Broadband piezoelectric type MEMS vibration energy collector - Google Patents
Broadband piezoelectric type MEMS vibration energy collector Download PDFInfo
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- CN105262371A CN105262371A CN201510725018.2A CN201510725018A CN105262371A CN 105262371 A CN105262371 A CN 105262371A CN 201510725018 A CN201510725018 A CN 201510725018A CN 105262371 A CN105262371 A CN 105262371A
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- 239000012528 membrane Substances 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000004044 response Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000006641 stabilisation Effects 0.000 abstract 1
- 238000011105 stabilization Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The present invention provides a broadband responsive piezoelectric type MEMS vibration energy collector which realizes the conversion from mechanical energy to electric energy by the utilization of the direct piezoelectric effect of a piezoelectric material by converting the environmental vibration energy into electric energy. A cantilever-mass structure easily to resonate with the environment is used as the basis chip, the multi-basis chip array integration improves the total output electric energy of the energy collector, various structure parameters of each basis chip are used for broadening the frequency band range so that the energy collector is applied to various vibration environment. The energy collector has the broadband response capability and broadens working response frequency bands. The multi-basis chip integration has the high output energy. The energy collector has the advantages of self-powered mode, stabilization, sustainability and the like by collecting the environment vibration energy, and would solve the self-powered problem of the application system such as wireless sensor network and the like.
Description
Technical field
The present invention relates to a kind of electricity energy harvester, particularly relate to a kind of broadband piezoelectric formula MEMS vibration energy collector.
Background technology
Along with the progressively development of radio sensing network, its application spreads to the social every field such as environmental monitoring, traffic administration from military defense.Sensor network nodes is the basis building radio sensing network, and radio sensing network node has features such as quantity is many, low-power consumption, complex distribution, traditional wire is powered and the mode such as powered battery can not meet the power demands steady in a long-term of radio sensing network node.Therefore, novel method of supplying power to is that the powerup issue solving radio sensing network node long-term stability provides new thinking.
Vibrational energy in environment, luminous energy, radiant energy, heat energy etc. can be converted into electric energy by energy acquisition technology, are stored in the energy-storage travelling wave tube such as electric capacity or battery, are embodied as radio sensing network node and power.Vibrational energy is as a kind of energy ubiquitous in environment, and vibrational energy acquisition technique mainly comprises piezoelectric type, electromagnetic type, electrostatic and magnetostriction type.It is less that electromagnetic energy harvester exports energy, and be subject to chip size restriction; Electrostatic energy collecting device, due to needs additional power source, is applied limited; Theoretical model and the parameter optimization of magnetostriction type energy acquisition device not yet form integral framework, are still at present and attempt the exploratory stage.Relative to other modes, the vibrational energy harvester based on piezoelectric effect has that structure is relatively simple, high-energy-density, without electromagnetic interference and the advantage such as do not need additional power supply to power, become the research emphasis in vibrational energy collection field.
And the current MEMS vibration energy collector based on piezoelectric type also exists the shortcomings such as working band is narrow, power output is low, resonance frequency is high, be difficult to meet practical application request.Based on this, the present invention proposes a kind of piezoelectric type MEMS vibration energy collector of wideband response, to solve the problems such as existing MEMS energy acquisition device resonance frequency is high, power output is low, operating frequency range is narrow.
Summary of the invention
The present invention is in order to solve the problem that existing MEMS vibration energy collector resonance frequency is high, output energy is low, operating frequency range is narrow, propose a kind of broadband piezoelectric formula MEMS vibration energy collector, the multiple chips array integrated device being basic chips unit with cantilever beam-mass foundation structure.
Broadband piezoelectric formula MEMS vibration energy collector of the present invention, comprise perimeter base and to be somely integrated on described perimeter base the base chip that series connection exports, resonance frequency is close, described base chip comprises some cantilever beams that framework, one end are connected with described frame inner surface respectively and the mass supported by each described cantilever beam other end, and each described cantilever beam includes two piezoelectric vibrators be in series.
Further, described cantilever beam comprise piezoelectric layer, cover described piezoelectric layer upper surface and the upper electrode layer disconnected and cover described piezoelectric layer lower surface lower electrode layer to form the two described piezoelectric vibrators be in series.
Further, described frame inner surface is at least connected with four equally distributed described cantilever beams.
Further, described perimeter base is provided with some external lead wire bonding welding pads, described upper electrode layer and be all connected with lead-in wire between described lower electrode layer and described external lead wire bonding welding pad.
Further, described piezoelectric layer is PZT piezoelectric membrane.
Further, described perimeter base is integrated with the described base chip of four array distribution.
By such scheme, the present invention at least has the following advantages:
1, based on the base chip of the cantilever beam-mass block structure of PZT piezoelectric membrane piezoelectric effect, the output energy of effective increased device, has easily and environment produces the feature resonated;
2, adopt the close many base chip array combination of resonance frequency can respond in wider frequency band range and all have comparatively macro-energy to export, having the advantages that working band is wide, output energy is high.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 is structure vertical view of the present invention;
Fig. 2 is base chip perspective view of the present invention;
Fig. 3 is base chip planar structure schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 1 to Fig. 3, a kind of broadband piezoelectric formula MEMS vibration energy collector is many base chip 20 array integrated devices, comprises four groups and is fixed on base chip 20 on perimeter base 10.Perimeter base 10 is fixed with external lead wire bonding welding pad 11; Base chip 20 comprises some cantilever beams 22 that framework 21, one end are connected with framework 21 inner surface respectively and the mass 23 supported by each cantilever beam 22 other end, each cantilever beam 22 includes piezoelectric layer 30, cover piezoelectric layer 30 upper surface and the upper electrode layer 40 disconnected and cover piezoelectric layer 30 lower surface lower electrode layer 50 to form two piezoelectric vibrators be in series.All be connected with lead-in wire between the polarization surface of the piezoelectric layer 30 of each base chip 20 and external lead wire bonding welding pad 11, connecting to make each base chip 20 exports.
During concrete enforcement, each base chip 20 cantilever beam 22 that selecting structure dimensional parameters is different respectively and mass 23, be close to make the resonance frequency of each base chip 20, the number of the cantilever beam 22 of each base chip 20 is four, the outer face of four cantilever beams 22 is fixed on the inner surface of rectangular frame 21 respectively equably, mass 23 is fixed on the inner face of four cantilever beams 22 simultaneously, the two ends, upper surface left and right of the piezoelectric layer on cantilever beam 22 are covered upper electrode layer 40, disconnect in middle position by upper electrode layer 40, like this, piezoelectric layer 30 shares lower electrode layer 50, the mode that upper electrode layer 40 disconnects can make the piezoelectricity transfer ratio on cantilever beam 22 reach maximum.
Preferably, the piezoelectric layer in the present invention adopts PZT piezoelectric membrane, has the feature of high sensitivity and low electrical noise, has very high corresponding speed and larger output stress.
Specific works process is as follows: each cantilever beam 22 vibrates because the mechanical oscillation in environment drive respectively with the base chip 20 that mass 23 forms, mass 23 drives cantilever beam 22 to produce Bending Deformation, the PZT piezoelectric membrane inside on cantilever beam 22 is made to produce polarization phenomena, and there is contrary sign polarization charge on its surface, convert vibration signal to the signal of telecommunication thus.In the process, the active force that inside and outside cantilever beam 22, two ends are subject to is contrary, be respectively tension stress and compression, therefore the electric charge that inside and outside PZT piezoelectric membrane, polarization surface in two ends produces is also contrary, share by adopting bottom electrode, the mode that top electrode disconnects realizes the series connection of inside and outside two ends PZT piezoelectric membrane, increases and exports electric energy.Further, each base chip 20 series connection is fixed on perimeter base 10, perimeter base 10 is fixed with external lead wire bonding welding pad 11, all lead-in wire is connected with between the electrode of PZT piezoelectric membrane upper and lower surface and external lead wire pad 11, during work, by lead-in wire and external lead wire bonding welding pad 11, the signal of telecommunication is exported.
The present invention is multiple chips array device, each base chip 20 is chosen for close cantilever beam 22-mass 23 structure of resonance frequency, when wherein a certain base chip 20 reaches resonance with environment, export energy maximum, other base chip 20 are also with close to maximization Energy transmission; Equally, when another base chip 20 can reach resonance in another vibration environment, export energy maximum, other base chip 20 maximize Energy transmission with close equally; Finally by the energy series connection that each base chip 20 exports by perimeter base 10, reach output energy maximization.Effectively can utilize the output energy of each base chip 20 like this, add the output of device; The frequency response range of device has also been widened in the combination of many base chip 20 that each resonance frequency is close, is applicable to more applied environments.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (6)
1. a broadband piezoelectric formula MEMS vibration energy collector, it is characterized in that: comprise perimeter base and to be somely integrated on described perimeter base the base chip that series connection exports, resonance frequency is close, described base chip comprises some cantilever beams that framework, one end are connected with described frame inner surface respectively and the mass supported by each described cantilever beam other end, and each described cantilever beam includes two piezoelectric vibrators be in series.
2. broadband piezoelectric formula MEMS vibration energy collector according to claim 1, is characterized in that: described cantilever beam comprises piezoelectric layer, cover described piezoelectric layer upper surface and the upper electrode layer disconnected and cover described piezoelectric layer lower surface lower electrode layer to form the two described piezoelectric vibrators be in series.
3. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, is characterized in that: described frame inner surface is at least connected with four equally distributed described cantilever beams.
4. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, it is characterized in that: described perimeter base is provided with some external lead wire bonding welding pads, described upper electrode layer and be all connected with lead-in wire between described lower electrode layer and described external lead wire bonding welding pad.
5. broadband piezoelectric formula MEMS vibration energy collector according to claim 2, is characterized in that: described piezoelectric layer is PZT piezoelectric membrane.
6. the broadband piezoelectric formula MEMS vibration energy collector according to any one of claim 1-5, is characterized in that: the described base chip described perimeter base being integrated with four array distribution.
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| CN201510725018.2A CN105262371A (en) | 2015-10-29 | 2015-10-29 | Broadband piezoelectric type MEMS vibration energy collector |
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| CN105262371A true CN105262371A (en) | 2016-01-20 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593091A (en) * | 2018-04-28 | 2018-09-28 | 哈尔滨工程大学 | A kind of fault diagnosis and health monitoring device based on piezoelectric vibration energy collection |
| CN111082699A (en) * | 2019-12-13 | 2020-04-28 | 合肥工业大学 | Piezoelectric vibrator with non-sinusoidal periodic resonance |
| CN113904586A (en) * | 2021-08-29 | 2022-01-07 | 北京工业大学 | Local resonance type piezoelectric metamaterial plate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100141096A1 (en) * | 2005-11-23 | 2010-06-10 | Churchill David L | Piezoelectric Composite Beam with Automatically Adjustable Natural Frequency |
| CN102931340A (en) * | 2012-11-15 | 2013-02-13 | 重庆大学 | Wideband micro piezoelectric vibration energy collector and manufacturing method thereof |
| CN103245409A (en) * | 2013-04-17 | 2013-08-14 | 中北大学 | Piezoelectric-effect-based vector hydroacoustic sensor with MEMS biomimetic structure |
| US9142857B2 (en) * | 2011-08-30 | 2015-09-22 | Electronics And Telecommunications Research Institute | Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof |
| CN205142048U (en) * | 2015-10-29 | 2016-04-06 | 苏州工业园区纳米产业技术研究院有限公司 | Wide band piezoelectric type MEMS vibration energy collector |
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2015
- 2015-10-29 CN CN201510725018.2A patent/CN105262371A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100141096A1 (en) * | 2005-11-23 | 2010-06-10 | Churchill David L | Piezoelectric Composite Beam with Automatically Adjustable Natural Frequency |
| US9142857B2 (en) * | 2011-08-30 | 2015-09-22 | Electronics And Telecommunications Research Institute | Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof |
| CN102931340A (en) * | 2012-11-15 | 2013-02-13 | 重庆大学 | Wideband micro piezoelectric vibration energy collector and manufacturing method thereof |
| CN103245409A (en) * | 2013-04-17 | 2013-08-14 | 中北大学 | Piezoelectric-effect-based vector hydroacoustic sensor with MEMS biomimetic structure |
| CN205142048U (en) * | 2015-10-29 | 2016-04-06 | 苏州工业园区纳米产业技术研究院有限公司 | Wide band piezoelectric type MEMS vibration energy collector |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593091A (en) * | 2018-04-28 | 2018-09-28 | 哈尔滨工程大学 | A kind of fault diagnosis and health monitoring device based on piezoelectric vibration energy collection |
| CN111082699A (en) * | 2019-12-13 | 2020-04-28 | 合肥工业大学 | Piezoelectric vibrator with non-sinusoidal periodic resonance |
| CN113904586A (en) * | 2021-08-29 | 2022-01-07 | 北京工业大学 | Local resonance type piezoelectric metamaterial plate |
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