CN107271720B - Eight beam 3-axis acceleration sensors of low inter-axis coupling degree - Google Patents
Eight beam 3-axis acceleration sensors of low inter-axis coupling degree Download PDFInfo
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- CN107271720B CN107271720B CN201710350327.5A CN201710350327A CN107271720B CN 107271720 B CN107271720 B CN 107271720B CN 201710350327 A CN201710350327 A CN 201710350327A CN 107271720 B CN107271720 B CN 107271720B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
Abstract
The invention discloses a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, including frame (1), sensitive-mass block (2) are equipped in the middle part of the frame (1), the every side of the sensitive-mass block (2) is connect by two parallel rectangular beams (3) with frame (1)；Specifically, being connect by beam L1 and beam L2 with frame (1) on the right of the sensitive-mass block (2), its top is connect by beam L3 and beam L4 with frame (1), its left side is by the way that beam L5 and beam L6 is connect with frame (1), it passes through beam L7 below and beam L8 is connect with frame (1).The present invention passes through the quantity for reasonably increasing varistor and correctly arranges the position of varistor, solves the problems, such as necessarily to cause inter-axis coupling degree big in girder construction piezoresistance type acceleration sensor structure, effectively reduces the inter-axis coupling degree of sensor.
Description
Technical field
The present invention relates to MEMS(Microelectric Mechanical Systems) pressure resistance type in sensor field
Acceleration transducer, specially a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree.
Background technique
Acceleration transducer is widely used in game control, handle vibration and rocks, automobile brake starting detection, earthquake inspection
The multiple fields such as survey, engineering vibration measuring, geological prospecting, vibratory test & analysis and security vibration scouting.
Acceleration transducer is divided into single-axis acceleration sensors and 3-axis acceleration sensor.3-axis acceleration sensor can
It is composed of three single-axis acceleration sensors or single-chip integration.The former volume is big, assembly precision is low promotes single-chip integration
The development of 3-axis acceleration sensor.Piezoresistance type acceleration sensor since its stability is good, the advantages that can producing in batches tool
Have wide practical use.
But the center of piezoresistance type acceleration sensor mass block and the center of beam are not in the same plane, non-detection output
The acceleration in direction can generate stress to the varistor of detection outbound course, cause detection direction acceleration to the varistor
The stress of generation is decreased or increased, and generates inter-axis coupling.
The present invention is based on problem above and has carried out the design of eight beam 3-axis acceleration sensors to reduce the acceleration of three axis
Spend the inter-axis coupling degree of sensor.
Summary of the invention
Big the purpose of the present invention is to solve above-mentioned existing eight beam 3-axis acceleration sensor inter-axis coupling of pressure resistance type
Problem, and provide a kind of sensor for reducing eight beam 3-axis acceleration sensor inter-axis couplings.
The present invention is achieved by the following technical solutions:
A kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, entire sensor are symmetrical structure.Including frame,
Sensitive-mass block is equipped in the middle part of the frame, the every side of sensitive-mass block is connect by two parallel rectangular beams with frame；
Specifically, being connect by beam L1 and beam L2 with frame on the right of the sensitive-mass block, its top passes through beam L3 and beam L4 and frame
Connection, its left side are by the way that beam L5 and beam L6 is connect with frame, it passes through beam L7 below and beam L8 is connect with frame.
With reference to figure 2, distribution of the varistor on eight rectangular beams is as follows:
Inner end (close to mass block one end, similarly hereinafter) top of the beam L1 is equipped with varistor X4, its outer end (close to frame
One end, similarly hereinafter) lower part is equipped with varistor A3；
The inner end upper and lower part of the beam L2 be respectively equipped with varistor Z1 and varistor A1, its outer end top and under
Portion is respectively equipped with varistor X2 and varistor C2；
The inner end left and right side of the beam L3 is respectively equipped with varistor Y4 and varistor C4, its outer end left side and the right side
Side is respectively equipped with varistor Z3 and varistor B3；
Varistor B1 is equipped on the right side of the inner end of the beam L4, its outer end left side is equipped with varistor Y2；
The inner end lower part of the beam L5 is equipped with varistor A2, its outer end top is equipped with varistor X1；
The inner end upper and lower part of the beam L6 be respectively equipped with varistor X3 and varistor C1, its outer end top and under
Portion is respectively equipped with varistor Z2 and varistor A4；
The inner end left and right side of the beam L7 is respectively equipped with varistor Z4 and varistor B2, its outer end left side and the right side
Side is respectively equipped with varistor Y1 and varistor C3；
Varistor Y3 is equipped on the left of the inner end of the beam L8, its outer end right side is equipped with varistor B4.
Definition: varistor M, M X, Y, Z；Varistor N, N A, B, C；
Then, varistor M and varistor N constitutes this electric bridge of the favour of three directional accelerations of detection, and M1, M2, M3, M4 divide
An arm of Wheatstone bridge is not constituted with corresponding N1, N2, N3, N4.
There are four varistors to form for the Wheatstone bridge in eight traditional three directions of beam 3-axis acceleration sensor, non-defeated
The stress that directional acceleration generates outbound course varistor out is inevitable.The present invention passes through in each direction favour stone electricity
Increase a resistance on the arm of bridge, so that there are two varistors on the arm of each outbound course Wheatstone bridge.It is non-defeated when having
For the acceleration effect in direction when on sensor, two varistors on each arm of outbound course Wheatstone bridge are by non-out
Outbound course acceleration and the stress intensity that generates is equal, symbol is opposite；When the acceleration effect of outbound course is when sensor,
The stress that two varistors on each arm of outbound course Wheatstone bridge generate is compression or tensile stress.This method
The inter-axis coupling degree that can theoretically realize eight beam 3-axis acceleration sensors is zero.
In order to verify the feasibility of this programme, verifying analysis is carried out by finite element emulation software, each beam longitudinally takes
The longitudinal centre line of varistor is passed through in two paths, path, and the number in path is as shown in Fig. 2, P1, P2, P3, P4 etc..Road
Diameter terminates from quality BOB(beginning of block) to frame.In view of the symmetry of X-direction and Y-direction, testing for X-direction and Z-direction is only carried out
Card.
1, X-direction electric bridge is analyzed
1.1, when the acceleration that has of X-direction, when Y and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by X-direction acceleration effect, Y and Z-direction, the stress variation of beam
As shown in Figure 4.It can be seen from the figure that varistor X1, X4, A1, A4, by compression, resistance becomes smaller；Varistor X2,
X3, A2, A3 are become larger by tensile stress, resistance.The variation of each varistor of X-direction Wheatstone bridge is as shown in Figure 5.
Assuming that the initial value of varistor X1, X2, X3, X4 and varistor A1, A2, A3, A4 are all R, variable quantity is all,
Then
Output voltage
1.2, when Y-direction has acceleration, and X and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by Y-direction acceleration effect, X and Z-direction, the stress variation of beam
As shown in Figure 6.It can be seen from the figure that varistor X1, X2, X3, X4, by tensile stress, resistance becomes larger；Varistor A1,
A2, A3, A4 compression chord, resistance become smaller.The variation of each varistor of X-direction Wheatstone bridge is as shown in Figure 7.
Assuming that the initial value of varistor X1, X2, X3, X4 and varistor A1, A2, A3, A4 are all R, variable quantity is all,
Then
Output voltage
So X-direction Wheatstone bridge does not have output response, i.e., Y-axis is to the defeated of X-axis when Y-direction has acceleration input
It is coupled as zero out.
1.3, when Z-direction has acceleration, and X and Y-direction do not have acceleration
When accelerometer is not only had acceleration effect by Z-direction acceleration effect, X and Y-direction, the stress variation of beam
As shown in Figure 8.It can be seen from the figure that varistor X1, X2, A3, A4, by tensile stress, resistance becomes larger；Varistor A1,
A2, X3, X4 compression chord, resistance become smaller.The variation of each varistor of X-direction Wheatstone bridge is as shown in Figure 9.
Assuming that the initial value of varistor X1, X2, X3, X4 and varistor A1, A2, A3, A4 are all R, variable quantity is all
, then
Output voltage
So X-direction Wheatstone bridge does not have output response, i.e., Z axis is to the defeated of X-axis when Z-direction has acceleration input
It is coupled as zero out.
2, Z-direction electric bridge is analyzed
2.1 have acceleration when Z-direction, when X and Y-direction do not have acceleration
When accelerometer is not only had acceleration effect by Z-direction acceleration effect, X and Y-direction, the stress variation of beam
As shown in Figure 8.It can be seen from the figure that varistor Z2, Z3, C2, C3, by tensile stress, resistance becomes larger；Varistor Z1,
Z4, C1, C4 compression chord, resistance become smaller.The variation of each varistor of Z-direction Wheatstone bridge is as shown in Figure 10.
Assuming that the initial value of varistor Z1, Z2, Z3, Z4 and varistor C1, C2, C3, C4 are all R, variable quantity is all,
Then
Output voltage
2.2, when X-direction has acceleration, and Y and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by X-direction acceleration effect, Y and Z-direction, the stress variation of beam
As shown in Figure 4.It can be seen from the figure that varistor Z3, Z4, C1, C2, by tensile stress, resistance becomes larger；Varistor Z1,
Z2, C3, C4 compression chord, resistance become smaller.The variation of each resistance of Z-direction Wheatstone bridge is as shown in figure 11.
Assuming that the initial value of varistor Z1, Z2, Z3, Z4 and varistor C1, C2, C3, C4 are all R, variable quantity is all
, then
Output voltage
So Z-direction Wheatstone bridge does not have output response, i.e., X-axis is to the defeated of Z axis when X-direction has acceleration input
It is coupled as zero out.
3.3, when Y-direction has acceleration, and X and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by Y-direction acceleration effect, X and Z-direction, the stress variation of beam
As shown in Figure 6.It can be seen from the figure that varistor Z3, Z4, C1, C2, by tensile stress, resistance becomes larger；Varistor Z1,
Z2, C3, C4 compression chord, resistance become smaller.The variation of each varistor of Z-direction Wheatstone bridge is as shown in figure 12.
Assuming that the initial value of varistor Z1, Z2, Z3, Z4 and varistor C1, C2, C3, C4 are all R, variable quantity is all
, then
Output voltage
So Z-direction Wheatstone bridge does not have output response, i.e., Y-axis is to the defeated of Z axis when Y-direction has acceleration input
It is coupled as zero out.
Have the function of reducing sensor inter-axis coupling to verify designed structure, be set respectively to original sensor and newly
The sensor of meter is emulated.Simulation result is as shown in table 1, table 2, table 3, it can be seen that the between centers of new construction from three tables
The degree of coupling reduces about an order of magnitude than the inter-axis coupling degree of original structure.
When X-direction applies 50g acceleration, when Y and Z-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 1.
When Y-direction applies 50g acceleration, when X and Z-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 2.
When Z-direction applies 50g acceleration, when X and Y-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 3.
Two kinds of acceleration transducers, three direction electric bridge output sensitivities when table 1 applies 50g acceleration only in an X direction
Two kinds of acceleration transducers, three direction electric bridge output sensitivities when table 2 only applies 50g acceleration in the Y direction
Table 3 only Z-direction apply 50g acceleration when two kinds of acceleration transducers, three direction electric bridge output sensitivities
The present invention is a kind of eight beam 3-axis acceleration of MEMS piezoresistive sensing for detecting three directional accelerations of moving object
Device, by reasonably increase varistor quantity and correctly arrange varistor position, solve girder construction pressure resistance type
The problem for necessarily causing inter-axis coupling degree big in acceleration sensor structure effectively reduces the inter-axis coupling degree of sensor.
The present invention have structure it is simple, technical maturity, it is at low cost, be suitable for produce in enormous quantities and application prospect extensively etc. it is special
Point.
Detailed description of the invention
Fig. 1 shows the schematic structural cross-sectional views of inventive sensor.
Fig. 2 indicates distribution of the inventive sensor varistor on beam.
Fig. 3 a indicates the Wheatstone bridge for the detection X-direction acceleration that varistor is constituted.
Fig. 3 b indicates the Wheatstone bridge for the detection Y-direction acceleration that varistor is constituted.
Fig. 3 c indicates the Wheatstone bridge for the detection Z-direction acceleration that varistor is constituted.
Fig. 4 a indicate accelerometer only acceleration effect by X-direction when beam on X-direction stress.
Fig. 4 b indicate accelerometer only acceleration effect by X-direction when beam on Y-direction stress.
The variation of each resistance of X-direction electric bridge when Fig. 5 indicates accelerometer only by X-direction acceleration.
Fig. 6 a indicate accelerometer only acceleration effect by Y-direction when beam X-direction stress.
Fig. 6 b indicate accelerometer only acceleration effect by Y-direction when beam Y-direction stress.
The variation of each resistance of X-direction electric bridge when Fig. 7 indicates accelerometer only by Y-direction acceleration.
Fig. 8 a indicate accelerometer only acceleration effect by Z-direction when beam X-direction stress on stress.
Fig. 8 b indicate accelerometer only acceleration effect by Z-direction when beam Y-direction stress on stress.
The variation of each resistance of X-direction electric bridge when Fig. 9 indicates accelerometer only by Z-direction acceleration.
The variation of each resistance of Z-direction electric bridge when Figure 10 indicates accelerometer only by Z-direction acceleration.
The variation of each resistance of Z-direction electric bridge when Figure 11 indicates accelerometer only by X-direction acceleration.
The variation of each resistance of Z-direction electric bridge when Figure 12 indicates accelerometer only by Y-direction acceleration.
Specific embodiment
Specific embodiments of the present invention are described in detail with reference to the accompanying drawing.
A kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, as shown in Figure 1, the sensor is by a sensitive matter
2, frames 1 of gauge block and eight rectangular beams 3 are constituted, and two rectangles being parallel to each other are distributed in each edge of mass block and frame
Beam, entire sensor are symmetrical structure.Specifically, connect by beam L1 and beam L2 with frame 1 on the right of the sensitive-mass block 2,
Its top is connect by beam L3 and beam L4 with frame 1, its left side is by the way that beam L5 and beam L6 is connect with frame 1, it passes through beam below
L7 and beam L8 are connect with frame 1.
Distribution of the varistor on eight rectangular beams is as follows, as shown in Figure 2:
Inner end (close to mass block one end, similarly hereinafter) top of beam L1 is equipped with varistor X4, its outer end (close to frame one
End, similarly hereinafter) lower part be equipped with varistor A3.
The inner end upper and lower part of beam L2 is respectively equipped with varistor Z1 and varistor A1, its outer end upper and lower part point
It She You not varistor X2 and varistor C2.
The inner end left and right side of beam L3 is respectively equipped with varistor Y4 and varistor C4, its outer end left and right side point
It She You not varistor Z3 and varistor B3.
Varistor B1 is equipped on the right side of the inner end of beam L4, its outer end left side is equipped with varistor Y2.
The inner end lower part of beam L5 is equipped with varistor A2, its outer end top is equipped with varistor X1.
The inner end upper and lower part of beam L6 is respectively equipped with varistor X3 and varistor C1, its outer end upper and lower part point
It She You not varistor Z2 and varistor A4.
The inner end left and right side of beam L7 is respectively equipped with varistor Z4 and varistor B2, its outer end left and right side point
It She You not varistor Y1 and varistor C3.
Varistor Y3 is equipped on the left of the inner end of beam L8, its outer end right side is equipped with varistor B4.
Definition: varistor M, M X, Y, Z；Varistor N, N A, B, C；
Then, varistor M and varistor N constitutes this electric bridge of the favour of three directional accelerations of detection, and M1, M2, M3, M4 divide
An arm for not constituting Wheatstone bridge with corresponding N1, N2, N3, N4, as shown in Fig. 3 a, 3b, 3c.
When specific preparation, the structure size (length is generous) of sensitive-mass block 2 is 380 μm of 3200 μ m, 3200 μ m；Frame 1
Width be 1000 μm, with a thickness of 395 μm；The structure size (length is generous) of rectangular beam 3 is 15 μm of 700 μ m, 200 μ m, pressure-sensitive
The structure size (length and width) of resistance is 8 μm of 8 μ m.
The above is only specific embodiments of the present invention, and however, it is not limited to this.It is any to be solved substantially based on the present invention
Identical technical problem, or realize essentially identical technical effect, made ground simple change, equivalent replacement or modification etc.,
In all belonging to the scope of protection of the present invention.
Claims (2)
1. a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, it is characterised in that: including frame (1), the frame
(1) middle part is equipped with sensitive-mass block (2), and the every side of the sensitive-mass block (2) passes through two parallel rectangular beams (3) and frame
(1) it connects；Specifically, being connect by beam L1 and beam L2 with frame (1) on the right of the sensitive-mass block (2), its top passes through beam
L3 and beam L4 is connect with frame (1), its left side is by the way that beam L5 and beam L6 is connect with frame (1), it passes through beam L7 and beam L8 below
It is connect with frame (1)；
The inner end top of the beam L1 is equipped with varistor X4, its outer end lower part is equipped with varistor A3,
The inner end upper and lower part of the beam L2 is respectively equipped with varistor Z1 and varistor A1, its outer end upper and lower part point
Not She You varistor X2 and varistor C2,
The inner end left and right side of the beam L3 is respectively equipped with varistor Y4 and varistor C4, its outer end left and right side point
Not She You varistor Z3 and varistor B3,
It is equipped with varistor Y2 equipped with varistor B1, its outer end left side on the right side of the inner end of the beam L4,
The inner end lower part of the beam L5 is equipped with varistor A2, its outer end top is equipped with varistor X1,
The inner end upper and lower part of the beam L6 is respectively equipped with varistor X3 and varistor C1, its outer end upper and lower part point
Not She You varistor Z2 and varistor A4,
The inner end left and right side of the beam L7 is respectively equipped with varistor Z4 and varistor B2, its outer end left and right side point
Not She You varistor Y1 and varistor C3,
Varistor Y3 is equipped on the left of the inner end of the beam L8, its outer end right side is equipped with varistor B4；
Definition: varistor M, M X, Y, Z；Varistor N, N A, B, C；
Then, varistor M and varistor N constitute this electric bridge of the favour of three directional accelerations of detection, M1, M2, M3, M4 respectively with
Corresponding N1, N2, N3, N4 constitute an arm of Wheatstone bridge, it may be assumed that varistor X1 and varistor A1, varistor
X2 and varistor A2, varistor X3 and varistor A3, varistor X4 and varistor A4, varistor Y1 and pressure-sensitive
Resistance B1, varistor Y2 and varistor B2, varistor Y3 and varistor B3, varistor Y4 and varistor B4,
Varistor Z1 and varistor C1, varistor Z2 and varistor C2, varistor Z3 and varistor C3, varistor
Z4 and varistor C4 respectively constitutes an arm of Wheatstone bridge.
2. eight beam 3-axis acceleration sensors of low inter-axis coupling degree according to claim 1, it is characterised in that: sensitive matter
The structure size of gauge block (2) is 380 μm of 3200 μ m, 3200 μ m, and the width of frame (1) is 1000 μm, with a thickness of 395 μm, square
The structure size of ellbeam (3) is 15 μm of 700 μ m, 200 μ m, and the structure size of varistor is 8 μm of 8 μ m.
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| CN201710350327.5A CN107271720B (en) | 2017-05-18 | 2017-05-18 | Eight beam 3-axis acceleration sensors of low inter-axis coupling degree |
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| CN201710350327.5A CN107271720B (en) | 2017-05-18 | 2017-05-18 | Eight beam 3-axis acceleration sensors of low inter-axis coupling degree |
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| CN107271720B true CN107271720B (en) | 2019-04-19 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107727885A (en) * | 2017-11-13 | 2018-02-23 | 中北大学 | The pressure resistance type three axis accelerometer of height output stability |
| CN112903088B (en) * | 2021-01-18 | 2023-06-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof |
| CN116143062B (en) * | 2023-04-21 | 2023-06-23 | 中北大学 | H-shaped monocrystalline film piezoelectric vibration sensor and preparation method thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63169078A (en) * | 1987-01-06 | 1988-07-13 | Nippon Denso Co Ltd | Semiconductor vibration and acceleration sensor |
| DE3740688A1 (en) * | 1987-12-01 | 1989-06-15 | Messerschmitt Boelkow Blohm | Micromechanical acceleration pick-up having high axial selectivity |
| CN1281986A (en) * | 2000-08-25 | 2001-01-31 | 华北工学院微米纳米技术研究中心 | Integrated silicon microresistance type acceleration sensor and its manufacturing method |
| CN101038299A (en) * | 2007-04-21 | 2007-09-19 | 中北大学 | Uniaxle integrated inertia measurement device based on single mass-block |
| CN101042411A (en) * | 2007-04-19 | 2007-09-26 | 中北大学 | Three-axis piezoresistance micro-accelerometer |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
| CN102435776A (en) * | 2011-10-20 | 2012-05-02 | 中北大学 | Single-chip integrated eight-beam-arm triaxial accelerometer |
| CN103616531A (en) * | 2013-12-11 | 2014-03-05 | 中北大学 | Tri-axial piezoresistive type acceleration sensor based on double-circuit cyclic electric bridge detection |
| CN203838169U (en) * | 2014-05-12 | 2014-09-17 | 商巧玲 | High-sensitivity accelerometer |
-
2017
- 2017-05-18 CN CN201710350327.5A patent/CN107271720B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63169078A (en) * | 1987-01-06 | 1988-07-13 | Nippon Denso Co Ltd | Semiconductor vibration and acceleration sensor |
| DE3740688A1 (en) * | 1987-12-01 | 1989-06-15 | Messerschmitt Boelkow Blohm | Micromechanical acceleration pick-up having high axial selectivity |
| CN1281986A (en) * | 2000-08-25 | 2001-01-31 | 华北工学院微米纳米技术研究中心 | Integrated silicon microresistance type acceleration sensor and its manufacturing method |
| CN101042411A (en) * | 2007-04-19 | 2007-09-26 | 中北大学 | Three-axis piezoresistance micro-accelerometer |
| CN101038299A (en) * | 2007-04-21 | 2007-09-19 | 中北大学 | Uniaxle integrated inertia measurement device based on single mass-block |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
| CN102435776A (en) * | 2011-10-20 | 2012-05-02 | 中北大学 | Single-chip integrated eight-beam-arm triaxial accelerometer |
| CN103616531A (en) * | 2013-12-11 | 2014-03-05 | 中北大学 | Tri-axial piezoresistive type acceleration sensor based on double-circuit cyclic electric bridge detection |
| CN203838169U (en) * | 2014-05-12 | 2014-09-17 | 商巧玲 | High-sensitivity accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| "叠加电桥检测的加速度传感器设计";宋小鹏 等;《传感器与微系统》;20131231;第32卷(第4期);106-110页 |
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