CN107271720A - Eight beam 3-axis acceleration sensors of low inter-axis coupling degree - Google Patents
Eight beam 3-axis acceleration sensors of low inter-axis coupling degree Download PDFInfo
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- CN107271720A CN107271720A CN201710350327.5A CN201710350327A CN107271720A CN 107271720 A CN107271720 A CN 107271720A CN 201710350327 A CN201710350327 A CN 201710350327A CN 107271720 A CN107271720 A CN 107271720A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
Abstract
The invention discloses a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, including frame（1）, the frame（1）Middle part is provided with sensitive-mass block（2）, the sensitive-mass block（2）Pass through two parallel rectangular beams per side（3）With frame（1）Connection；Specifically, the sensitive-mass block（2）The right passes through beam L1 and beam L2 and frame（1）Connection, its top pass through beam L3 and beam L4 and frame（1）Connection, its left side pass through beam L5 and beam L6 and frame（1）Connect, it passes through beam L7 and beam L8 and frame below（1）Connection.The present invention by reasonably increase piezo-resistance quantity and correctly arrangement piezo-resistance position, solving necessarily causes the big problem of inter-axis coupling degree in girder construction piezoresistance type acceleration sensor structure, effectively reduce the inter-axis coupling degree of sensor.
Description
Technical field
The present invention relates to MEMS（Microelectric Mechanical Systems）Pressure resistance type in sensor field
Acceleration transducer, specially a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree.
Background technology
Acceleration transducer be widely used in game control, handle vibration and rock, automobile brake start detection, earthquake inspection
The multiple fields such as survey, engineering vibration measuring, geological prospecting, vibratory test ＆ analysis and security vibration scouting.
Acceleration transducer is divided into single-axis acceleration sensors and 3-axis acceleration sensor.3-axis acceleration sensor can
Combined or single-chip integration by three single-axis acceleration sensors.The former volume is big, assembly precision is low promotes single-chip integration
The development of 3-axis acceleration sensor.Piezoresistance type acceleration sensor is good due to its stability, and the advantages of can producing in batches has
Have wide practical use.
But the center of piezoresistance type acceleration sensor mass and the center of beam are not at grade, non-detection output
The acceleration in direction can cause detection directional acceleration to the piezo-resistance to detecting that the piezo-resistance of outbound course produces stress
The stress of generation is decreased or increased, and produces inter-axis coupling.
The present invention is based on problem above and has carried out the design of eight beam 3-axis acceleration sensors to reduce the acceleration of three axles
Spend the inter-axis coupling degree of sensor.
The content of the invention
It is big the invention aims to solve the above-mentioned beam 3-axis acceleration sensor inter-axis coupling of existing pressure resistance type eight
Problem, and be used to reduce the sensor of eight beam 3-axis acceleration sensor inter-axis couplings there is provided a kind of.
The present invention is achieved by the following technical solutions：
A kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, whole sensor is symmetrical structure.It is described including frame
Sensitive-mass block is provided with the middle part of frame, the sensitive-mass block is connected per side by two parallel rectangular beams with frame；Specifically
For, described sensitive-mass block the right is connected by beam L1 and beam L2 with frame, its top is connected by beam L3 and beam L4 with frame,
Its left side is connected by beam L5 and beam L6 with frame, it is connected by beam L7 and beam L8 with frame below.
On the basis of Fig. 2, distribution of the piezo-resistance on eight rectangular beams is as follows：
The inner of the beam L1（Close mass one end, similarly hereinafter）Top is provided with piezo-resistance X4, its outer end（Close to frame one
End, similarly hereinafter）Bottom is provided with piezo-resistance A3；
The inner upper and lower part of the beam L2 is respectively equipped with piezo-resistance Z1 and piezo-resistance A1, its outer end upper and lower part point
She You not piezo-resistance X2 and piezo-resistance C2；
The inner left side of the beam L3 and right side are respectively equipped with piezo-resistance Y4 and piezo-resistance C4, its outer end left side and right side point
She You not piezo-resistance Z3 and piezo-resistance B3；
The inner right side of the beam L4 is provided with piezo-resistance Y2 provided with piezo-resistance B1, its outer end left side；
The inner bottom of the beam L5 is provided with piezo-resistance X1 provided with piezo-resistance A2, its outer end top；
The inner upper and lower part of the beam L6 is respectively equipped with piezo-resistance X3 and piezo-resistance C1, its outer end upper and lower part point
She You not piezo-resistance Z2 and piezo-resistance A4；
The inner left side of the beam L7 and right side are respectively equipped with piezo-resistance Z4 and piezo-resistance B2, its outer end left side and right side point
She You not piezo-resistance Y1 and piezo-resistance C3；
The inner left side of the beam L8 is provided with piezo-resistance B4 provided with piezo-resistance Y3, its outer end right side.
Definition：Piezo-resistance M, M are X, Y, Z；Piezo-resistance N, N are A, B, C；
Then, piezo-resistance M and piezo-resistance N constitute the favour of three directional accelerations of detection this electric bridge, M1, M2, M3, M4 respectively with
Corresponding N1, N2, N3, N4 constitutes an arm of Wheatstone bridge.
The Wheatstone bridge in eight traditional three directions of beam 3-axis acceleration sensor is made up of four piezo-resistances, non-defeated
The stress that outgoing direction acceleration is produced to outbound course piezo-resistance is inevitable.The present invention passes through in each direction favour stone electricity
Increase a resistance on the arm of bridge so that there are two piezo-resistances on the arm of each outbound course Wheatstone bridge.It is non-defeated when having
The acceleration effect of outgoing direction is when on sensor, and two piezo-resistances on each arm of outbound course Wheatstone bridge are by non-
Outbound course acceleration and the stress intensity that produces is equal, symbol is opposite；When the acceleration effect of outbound course is in sensor,
The stress that two piezo-resistances on each arm of outbound course Wheatstone bridge are produced is compression or tension.This method
The inter-axis coupling degree that eight beam 3-axis acceleration sensors can be realized in theory is zero.
In order to verify the feasibility of this programme, checking analysis is carried out by finite element emulation software, each beam longitudinally takes
Two paths, longitudinal centre line of the path Jing Guo piezo-resistance, the numbering in path is as shown in Fig. 2 P1, P2, P3, P4 etc..Road
Terminate from quality BOB(beginning of block) to frame in footpath.In view of X-direction and the symmetry of Y-direction, testing for X-direction and Z-direction is only carried out
Card.
1st, X-direction electric bridge is analyzed
1.1st, when the acceleration that has of X-direction, when Y and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by X-direction acceleration effect, Y and Z-direction, the stress variation of beam is as schemed
Shown in 4.It can be seen that piezo-resistance X1, X4, A1, A4 are by compression, resistance diminishes；Piezo-resistance X2, X3, A2,
A3 is by tensile stress, and resistance becomes big.The change of each piezo-resistance of X-direction Wheatstone bridge is as shown in Figure 5.
Assuming that piezo-resistance X1, X2, X3, X4 and piezo-resistance A1, A2, A3, A4 initial value are all R, variable quantity is all
, then
Output voltage
1.2nd, when Y-direction has acceleration, and X and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by Y-direction acceleration effect, X and Z-direction, the stress variation of beam is as schemed
Shown in 6.It can be seen that piezo-resistance X1, X2, X3, X4 are by tensile stress, resistance becomes big；Piezo-resistance A1, A2, A3,
A4 compression chords, resistance diminishes.The change of each piezo-resistance of X-direction Wheatstone bridge is as shown in Figure 7.
Assuming that piezo-resistance X1, X2, X3, X4 and piezo-resistance A1, A2, A3, A4 initial value are all R, variable quantity is all
, then
Output voltage
So, when Y-direction has acceleration input, X-direction Wheatstone bridge does not export the output coupling of response, i.e. Y-axis to X-axis
It is combined into zero.
1.3rd, when Z-direction has acceleration, and X and Y-direction do not have acceleration
When accelerometer is not only had acceleration effect by Z-direction acceleration effect, X and Y-direction, the stress variation of beam is as schemed
Shown in 8.It can be seen that piezo-resistance X1, X2, A3, A4 are by tensile stress, resistance becomes big；Piezo-resistance A1, A2, X3,
X4 compression chords, resistance diminishes.The change of each piezo-resistance of X-direction Wheatstone bridge is as shown in Figure 9.
Assuming that piezo-resistance X1, X2, X3, X4 and piezo-resistance A1, A2, A3, A4 initial value are all R, variable quantity is all
, then
Output voltage
So, when Z-direction has acceleration input, X-direction Wheatstone bridge does not export the output coupling of response, i.e. Z axis to X-axis
It is combined into zero.
2nd, Z-direction electric bridge is analyzed
2.1 have acceleration when Z-direction, when X and Y-direction do not have acceleration
When accelerometer is not only had acceleration effect by Z-direction acceleration effect, X and Y-direction, the stress variation of beam is as schemed
Shown in 8.It can be seen that piezo-resistance Z2, Z3, C2, C3 are by tensile stress, resistance becomes big；Piezo-resistance Z1, Z4, C1,
C4 compression chords, resistance diminishes.The change of each piezo-resistance of Z-direction Wheatstone bridge is as shown in Figure 10.
Assuming that piezo-resistance Z1, Z2, Z3, Z4 and piezo-resistance C1, C2, C3, C4 initial value are all R, variable quantity is all
, then
Output voltage
2.2nd, when X-direction has acceleration, and Y and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by X-direction acceleration effect, Y and Z-direction, the stress variation of beam is as schemed
Shown in 4.It can be seen that piezo-resistance Z3, Z4, C1, C2 are by tensile stress, resistance becomes big；Piezo-resistance Z1, Z2, C3,
C4 compression chords, resistance diminishes.The change of each resistance of Z-direction Wheatstone bridge is as shown in figure 11.
Assuming that piezo-resistance Z1, Z2, Z3, Z4 and piezo-resistance C1, C2, C3, C4 initial value are all R, variable quantity is all
, then
Output voltage
So, when X-direction has acceleration input, Z-direction Wheatstone bridge does not export the output coupling of response, i.e. X-axis to Z axis
It is combined into zero.
3.3rd, when Y-direction has acceleration, and X and Z-direction do not have acceleration
When accelerometer is not only had acceleration effect by Y-direction acceleration effect, X and Z-direction, the stress variation of beam is as schemed
Shown in 6.It can be seen that piezo-resistance Z3, Z4, C1, C2 are by tensile stress, resistance becomes big；Piezo-resistance Z1, Z2, C3,
C4 compression chords, resistance diminishes.The change of each piezo-resistance of Z-direction Wheatstone bridge is as shown in figure 12.
Assuming that piezo-resistance Z1, Z2, Z3, Z4 and piezo-resistance C1, C2, C3, C4 initial value are all R, variable quantity is all
, then
Output voltage
So, when Y-direction has acceleration input, Z-direction Wheatstone bridge does not export the output coupling of response, i.e. Y-axis to Z axis
It is combined into zero.
In order to verify that designed structure has the function of reduction sensor inter-axis coupling, set respectively to original sensor and newly
The sensor of meter is emulated.Simulation result is as shown in table 1, table 2, table 3, it can be seen that the between centers of new construction from three tables
The degree of coupling reduces about an order of magnitude than the inter-axis coupling degree of original structure.
When X-direction applies 50g acceleration, when Y and Z-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 1.
When Y-direction applies 50g acceleration, when X and Z-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 2.
When Z-direction applies 50g acceleration, when X and Y-direction do not have acceleration, traditional structure and new construction X, Y and Z tri-
The output sensitivity of direction electric bridge is as shown in table 3.
Two kinds of acceleration transducers, three direction electric bridge output sensitivities when table 1 applies 50g acceleration only in an X direction
Two kinds of acceleration transducers, three direction electric bridge output sensitivities when table 2 only applies 50g acceleration in the Y direction
Two kinds of acceleration transducers, the three direction electric bridge output sensitivities only when Z-direction applies 50g acceleration of table 3
The present invention is a kind of beam 3-axis acceleration sensor of MEMS piezoresistive eight for detecting three directional accelerations of moving object, is led to
Cross the quantity of rational increase piezo-resistance and correctly arrange the position of piezo-resistance, solve girder construction piezoresistance type acceleration
Necessarily cause the big problem of inter-axis coupling degree on sensor construction, effectively reduce the inter-axis coupling degree of sensor.
The present invention has simple in construction, and technical maturity, cost be low, suitable for producing in enormous quantities and the application prospect spy such as extensively
Point.
Brief description of the drawings
Fig. 1 represents the structure schematic cross-sectional view of inventive sensor.
Fig. 2 represents distribution of the inventive sensor piezo-resistance on beam.
Fig. 3 a represent the Wheatstone bridge for the detection X-direction acceleration that piezo-resistance is constituted.
Fig. 3 b represent the Wheatstone bridge for the detection Y-direction acceleration that piezo-resistance is constituted.
Fig. 3 c represent the Wheatstone bridge for the detection Z-direction acceleration that piezo-resistance is constituted.
Fig. 4 a represent accelerometer only by X-direction stress on beam during the acceleration effect of X-direction.
Fig. 4 b represent accelerometer only by Y-direction stress on beam during the acceleration effect of X-direction.
Fig. 5 represents that accelerometer is only changed by each resistance of X-direction electric bridge during X-direction acceleration.
Fig. 6 a represent accelerometer only by the stress of beam X-direction during the acceleration effect of Y-direction.
Fig. 6 b represent accelerometer only by the stress of beam Y-direction during the acceleration effect of Y-direction.
Fig. 7 represents that accelerometer is only changed by each resistance of X-direction electric bridge during Y-direction acceleration.
Fig. 8 a represent accelerometer only by the stress on the stress of beam X-direction during the acceleration effect of Z-direction.
Fig. 8 b represent accelerometer only by the stress on the stress of beam Y-direction during the acceleration effect of Z-direction.
Fig. 9 represents that accelerometer is only changed by each resistance of X-direction electric bridge during Z-direction acceleration.
Figure 10 represents that accelerometer is only changed by each resistance of Z-direction electric bridge during Z-direction acceleration.
Figure 11 represents that accelerometer is only changed by each resistance of Z-direction electric bridge during X-direction acceleration.
Figure 12 represents that accelerometer is only changed by each resistance of Z-direction electric bridge during Y-direction acceleration.
Embodiment
The specific embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
A kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, as shown in figure 1, the sensor is by a sensitive matter
Gauge block 2, a frame 1 and eight rectangular beams 3 are constituted, and two rectangles being parallel to each other are distributed in each edge of mass and frame
Beam, whole sensor is symmetrical structure.Specifically, be connected on the right of the sensitive-mass block 2 by beam L1 and beam L2 with frame 1,
Its top is connected by beam L3 and beam L4 with frame 1, its left side is connected by beam L5 and beam L6 with frame 1, it is below by beam
L7 and beam L8 are connected with frame 1.
Distribution of the piezo-resistance on eight rectangular beams is as follows, as shown in Figure 2：
Beam L1 the inner（Close mass one end, similarly hereinafter）Top is provided with piezo-resistance X4, its outer end（Close to frame one end, under
Together）Bottom is provided with piezo-resistance A3.
Beam L2 inner upper and lower part is respectively equipped with piezo-resistance Z1 and piezo-resistance A1, its outer end upper and lower part point
She You not piezo-resistance X2 and piezo-resistance C2.
Beam L3 inner left side and right side are respectively equipped with piezo-resistance Y4 and piezo-resistance C4, its outer end left side and right side point
She You not piezo-resistance Z3 and piezo-resistance B3.
Beam L4 inner right side is provided with piezo-resistance Y2 provided with piezo-resistance B1, its outer end left side.
Beam L5 inner bottom is provided with piezo-resistance X1 provided with piezo-resistance A2, its outer end top.
Beam L6 inner upper and lower part is respectively equipped with piezo-resistance X3 and piezo-resistance C1, its outer end upper and lower part point
She You not piezo-resistance Z2 and piezo-resistance A4.
Beam L7 inner left side and right side are respectively equipped with piezo-resistance Z4 and piezo-resistance B2, its outer end left side and right side point
She You not piezo-resistance Y1 and piezo-resistance C3.
Beam L8 inner left side is provided with piezo-resistance B4 provided with piezo-resistance Y3, its outer end right side.
Definition：Piezo-resistance M, M are X, Y, Z；Piezo-resistance N, N are A, B, C；
Then, piezo-resistance M and piezo-resistance N constitute the favour of three directional accelerations of detection this electric bridge, M1, M2, M3, M4 respectively with
Corresponding N1, N2, N3, N4 constitutes an arm of Wheatstone bridge, as shown in Fig. 3 a, 3b, 3c.
During specific preparation, the physical dimension of sensitive-mass block 2（Length is generous）For 380 μm of 3200 μ m, 3200 μ m；Frame 1
Width be 1000 μm, thickness be 395 μm；The physical dimension of rectangular beam 3（Length is generous）It is pressure-sensitive for 15 μm of 700 μ m, 200 μ m
The physical dimension of resistance（Length and width）For 8 μm of 8 μ m.
The specific embodiment of the present invention is these are only, but is not limited thereto.It is any to be solved substantially based on the present invention
Identical technical problem, or realize essentially identical technique effect, made ground simple change, equivalent substitution or modification etc.,
Belong in protection scope of the present invention.
Claims (2)
1. a kind of eight beam 3-axis acceleration sensors of low inter-axis coupling degree, it is characterised in that：Including frame（1）, the frame
（1）Middle part is provided with sensitive-mass block（2）, the sensitive-mass block（2）Pass through two parallel rectangular beams per side（3）With frame
（1）Connection；Specifically, the sensitive-mass block（2）The right passes through beam L1 and beam L2 and frame（1）Connection, its top pass through beam
L3 and beam L4 and frame（1）Connection, its left side pass through beam L5 and beam L6 and frame（1）Connect, it passes through beam L7 and beam L8 below
With frame（1）Connection；
The inner top of the beam L1 is provided with piezo-resistance A3 provided with piezo-resistance X4, its outer end bottom,
The inner upper and lower part of the beam L2 is respectively equipped with piezo-resistance Z1 and piezo-resistance A1, its outer end upper and lower part point
Not She You piezo-resistance X2 and piezo-resistance C2,
The inner left side of the beam L3 and right side are respectively equipped with piezo-resistance Y4 and piezo-resistance C4, its outer end left side and right side point
Not She You piezo-resistance Z3 and piezo-resistance B3,
The inner right side of the beam L4 is provided with piezo-resistance Y2 provided with piezo-resistance B1, its outer end left side,
The inner bottom of the beam L5 is provided with piezo-resistance X1 provided with piezo-resistance A2, its outer end top,
The inner upper and lower part of the beam L6 is respectively equipped with piezo-resistance X3 and piezo-resistance C1, its outer end upper and lower part point
Not She You piezo-resistance Z2 and piezo-resistance A4,
The inner left side of the beam L7 and right side are respectively equipped with piezo-resistance Z4 and piezo-resistance B2, its outer end left side and right side point
Not She You piezo-resistance Y1 and piezo-resistance C3,
The inner left side of the beam L8 is provided with piezo-resistance B4 provided with piezo-resistance Y3, its outer end right side；
Definition：Piezo-resistance M, M are X, Y, Z；Piezo-resistance N, N are A, B, C；
Then, piezo-resistance M and piezo-resistance N constitute the favour of three directional accelerations of detection this electric bridge, M1, M2, M3, M4 respectively with
Corresponding N1, N2, N3, N4 constitutes an arm of Wheatstone bridge.
2. eight beam 3-axis acceleration sensors of low inter-axis coupling degree according to claim 1, it is characterised in that：Sensitive matter
Gauge block（2）Physical dimension be 380 μm of 3200 μ m, 3200 μ m, frame（1）Width be 1000 μm, thickness be 395 μm, square
Ellbeam（3）Physical dimension be 15 μm of 700 μ m, 200 μ m, the physical dimension of piezo-resistance is 8 μm of 8 μ m.
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|---|---|---|---|
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| CN107727885A (en) * | 2017-11-13 | 2018-02-23 | 中北大学 | The pressure resistance type three axis accelerometer of height output stability |
| CN112903088A (en) * | 2021-01-18 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof |
| CN116143062A (en) * | 2023-04-21 | 2023-05-23 | 中北大学 | H-shaped monocrystalline film piezoelectric vibration sensor and preparation method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107727885A (en) * | 2017-11-13 | 2018-02-23 | 中北大学 | The pressure resistance type three axis accelerometer of height output stability |
| CN112903088A (en) * | 2021-01-18 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof |
| CN112903088B (en) * | 2021-01-18 | 2023-06-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS bionic vector acoustic wave sensor with cross-shaped sensitive structure and processing method thereof |
| CN116143062A (en) * | 2023-04-21 | 2023-05-23 | 中北大学 | H-shaped monocrystalline film piezoelectric vibration sensor and preparation method thereof |
| CN116143062B (en) * | 2023-04-21 | 2023-06-23 | 中北大学 | H-shaped monocrystalline film piezoelectric vibration sensor and preparation method thereof |
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| Publication number | Publication date |
|---|---|
| CN107271720B (en) | 2019-04-19 |
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