CN102401841A - Multi-cantilever acceleration transducer - Google Patents
Multi-cantilever acceleration transducer Download PDFInfo
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- CN102401841A CN102401841A CN2011102535869A CN201110253586A CN102401841A CN 102401841 A CN102401841 A CN 102401841A CN 2011102535869 A CN2011102535869 A CN 2011102535869A CN 201110253586 A CN201110253586 A CN 201110253586A CN 102401841 A CN102401841 A CN 102401841A
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Abstract
The invention relates to a multi-cantilever acceleration transducer which comprises a mass block, wherein cantilevers are arranged on the side surfaces of the a mass block, and piezoresistors are arranged on the cantilevers; the multi-cantilever acceleration transducer is characterized in that each cantilever consists of two or more than two sub-cantilevers each of which has the same height as that of the mass block. According to the multi-cantilever acceleration transducer, a plurality of sub-cantilever structures can greatly improve the flexibility of the structure under the circumstance that the load restraining on non-sensitive directions is not changed by the structure; and the capacity of restraining cross coupling of the structure can be greatly improved under the circumstance that the structure sensitivity is not changed. Meanwhile, the cantilevers adopt structures which have the same height as the mass blocks, so as to be easy to realize and manufacture.
Description
Technical field
The invention belongs to the microelectromechanical systems field, be specifically related to a kind of acceleration transducer of plane vibration cantilever beam structure.
The present invention is promptly guaranteeing under the constant situation of OILS STRUCTURE DEPRESSION cross-couplings ability the sensitivity that improves structure with solving acceleration transducer sensitivity and suppressing cross-couplings ability contradiction between the two; Guarantee to improve the inhibition ability of structure under the constant situation of structural sensitivity to non-sensitive direction.
Background technology
Micro-machine acceleration transducer is a kind of important inertia measurement device, has that volume is little, in light weight, response is fast, is easy to advantage such as processing.High g acceleration transducer is the general designation to high-range acceleration transducer, is widely used in the measurement of shock load in dynamic knockout process and the high-speed motion process.At present, high g value acceleration transducer is mainly piezoresistance type acceleration sensor, because its structure and outer detecting circuit simply are widely used.The principle of work of piezoresistance type acceleration sensor is based on the piezoresistive effect of silicon materials etc., and than the acceleration transducer of other types, its sensitivity is generally lower, and suppress the cross-couplings ability a little less than.
Acceleration sensor structure mainly comprises: semi-girder, mass, voltage dependent resistor (VDR).Wherein semi-girder mainly is divided into single-ended semi-girder and two-end fixed beam, and it mainly acts on is quality of connection piece and matrix, and the size of its rigidity is determining the range and the natural frequency of structure simultaneously.In the acceleration transducer in early days, semi-girder and mass be the height such as grade not, adopts the mode (shown in accompanying drawing 1) of vibration outside the plane; The beam of this kind version since its rigidity less, natural frequency is lower, impact resistance a little less than; Cross-couplings is big (non-sensitive direction is to the influence on the sensitive direction) also since with mass height such as grades not, identical between the different disk of the very difficult assurance of the thickness work in-process of beam; Be that machining reproducibility is relatively poor, be difficult to satisfy the requirement of higher performance accelerometer.In acceleration transducer afterwards; Adopt the thickness and the mass equal height (shown in accompanying drawing 2) of semi-girder, this kind cantilever beam structure form rigidity is bigger, has improved the natural frequency of structure greatly; Also strengthened simultaneously the anti-HI high impact ability of structure; But the beam of this kind form structure just requires the rigidity of beam bigger, thereby makes that the sensitivity on sensitive direction is lower suppressing non-sensitive direction load preferably under the situation; Guaranteeing that the cross-couplings of structure is bigger under the constant situation of sensitive direction and sensitivity.For acceleration transducer, improving its sensitivity is vital with suppressing cross-linked ability.Therefore, design sensitivity and the cross-linked ability of inhibition that a kind of semi-girder improves sensor construction, solve the main difficult technical that contradiction between the two becomes the acceleration transducer development and uses.
Summary of the invention
The object of the invention is exactly for the sensitivity that solves existing acceleration transducer existence and suppresses the contradiction that cross-linked ability can not be taken into account, and a kind of many semi-girders acceleration transducer that is used to improve acceleration sensor structure sensitivity and suppresses the cross-couplings ability is provided.
The technical scheme that the present invention adopts:
A kind of many semi-girders acceleration transducer comprises mass, and the side of mass is provided with semi-girder, and semi-girder is provided with voltage dependent resistor (VDR), it is characterized in that: said semi-girder is made up of two and sub-semi-girder plural and height such as mass grade.
On the basis of technique scheme, the following technical scheme that further develops can be arranged:
A side of mass is provided with two and sub-semi-girder plural and height such as mass grade, or two sides of mass are respectively equipped with two and sub-semi-girder plural and height such as mass grade.
Design concept provided by the invention is following:
Can know according to the rigidity formula, when the length of semi-girder
lOne regularly, this moment beam moment of flexure rigidity by the inertia of beam apart from determine.Can know according to the moment of inertia formula, when the width of beam
bOne regularly, the size of its moment of inertia and the thickness of beam
hBe the cube relation.When architecture quality piece size constancy, promptly under the identical condition of extraneous load, the inertial force size that mass produces is identical, establishes with cross-sectional area to do
ASingle beam be divided into
NThe small cantilever beam of root condition of equivalent thickness, the area sum of girder does
A, thickness is A/Nb, wherein the radical of girder need be selected according to design feature and processing technology, and when then load being arranged for structure directions X as shown in Figure 3,
NThe root girder construction is identical with the stress intensity and the micrometric displacement of single-spar construction, and promptly the inhibition ability to load on the non-sensitive direction is identical, and the load for the Y direction is sensitive direction, and when being the monolithic beam, the moment of flexure rigidity of beam does
K=EA 3 /4
l 3 b 2 , its single beam rigidity does after the monolithic beam is divided into multiple tooth girder
k 1 =EA 3 /4
l 3 b 2 n 3 , because the monolithic beam is divided into
NThe root girder is established many little deflection of beams unanimities in the ideal case, and then the global stiffness of many beams does
k Always =EA 3 /4
l 3 b 2 n 3 Can draw by formula; Adopt a plurality of plane vibration semi-girders can reduce the rigidity of beam on sensitive direction greatly; And rigidity is constant on non-sensitive direction, thereby under the inhibiting effect that guarantees non-sensitive direction load, effectively raises the sensitivity of structure; Promptly guaranteeing under the constant situation of structural sensitivity on the contrary, improving the inhibition ability of structure non-sensitive direction load influence.The design of this kind beam also has same function at two-end fixed beam.
A plurality of sub-cantilever beam structure of the present invention, promptly the semi-girder of this kind structure is made up of two and two less sub-semi-girders of above rigidity, and it can not change under the condition that structure suppresses non-sensitive direction load the sensitivity that improves structure greatly; Under the constant situation of structural sensitivity, improve the inhibition cross-couplings ability of structure greatly.Semi-girder adopts and structure such as height such as mass grade simultaneously, is easy to realize processing.
Description of drawings:
Fig. 1 is several kinds of traditional acceleration sensor structure figure;
A. the single-ended acceleration sensor structure figure that does not wait high semi-girder;
The acceleration sensor structure figure of b. existing single-ended semi-girder and height such as mass grade;
The acceleration sensor structure figure of c. existing both-end semi-girder;
Fig. 2 is the structural drawing of the embodiment of the invention one, embodiment two;
A. single-ended five sub-semi-girder acceleration sensor structure figure of embodiment one;
B. single-ended five sub-semi-girder acceleration transducer three bit architecture figure of embodiment one;
C. five sub-semi-girder acceleration sensor structure figure of both-end of embodiment two;
Fig. 3 single-ended monolithic semi-girder acceleration transducer and single-ended five sub-semi-girder acceleration transducers are sensitive direction and non-sensitive direction micrometric displacement figure analogous diagram under the 1000g loading, wherein:
(a) Y sensitive direction, the left side are the monolithic cantilever beam structure, and the right is five sub-cantilever beam structures;
(b) directions X, the left side are the monolithic cantilever beam structure, and the right is five sub-cantilever beam structures;
(c) Z direction, the left side are the monolithic cantilever beam structure, and the right is five sub-cantilever beam structures;
Five sub-semi-girder acceleration transducers of Fig. 4 both-end monolithic semi-girder acceleration transducer and both-end are sensitive direction and non-sensitive direction micrometric displacement figure analogous diagram under the 1000g loading, wherein:
(a) Y sensitive direction, the left side are both-end monolithic cantilever beam structure, and the right is five sub-cantilever beam structures of both-end;
(b) directions X, the left side are both-end monolithic cantilever beam structure, and the right is five sub-cantilever beam structures of both-end;
(c) Z direction, the left side are both-end monolithic cantilever beam structure, and the right is five sub-cantilever beam structures of both-end;
Instance one, single-ended five sub-semi-girder acceleration transducers:
Single-ended five sub-semi-girder acceleration transducers provided by the invention; Shown in a among Fig. 2, b; Mass size is 100 (μ m) * 100 (μ m) * 100 (μ m); Mass left end (side) is provided with five root semi-girders, and each sub-semi-girder is of a size of 100 (μ m) * 4 (μ m) * 100 (μ m).
Single-ended five the sub-semi-girder acceleration transducers that adopt present embodiment to provide; With existing single-ended monolithic semi-girder acceleration transducer contrast simulation experiment; Single-ended monolithic semi-girder acceleration transducer is shown in Fig. 1 b: mass size is 100 (μ m) * 100 (μ m) * 100 (μ m), and the monolithic semi-girder is of a size of 100 (μ m) * 20 (μ m) * 100 (μ m).
Extraneous load is 1000g, utilizes structural design finite element analysis software ANSYS to analyze emulation, and the result is shown in Fig. 3 a, Fig. 3 b, Fig. 3 c.Use its beam end of monolithic cantilever beam structure to be respectively 0.112E-8 (m), 0.685E-11 (m), 0.918E-10 (m) through finding out among the figure, use five sub-cantilever beam structure device beam ends to be respectively 0.479E-8 (m), 0.666E-11 (m), 0.911E-10 (m) at the micrometric displacement of sensitive direction (Y direction) and non-sensitive direction (X, Z direction) at the micrometric displacement of sensitive direction (Y direction) and non-sensitive direction (X, Z direction).Can find out through emulated data; Adopt the micrometric displacement of five sub-cantilever beam structures on sensitive direction greater than the monolithic cantilever beam structure; Simultaneously both are at the micrometric displacement of non-sensitive direction much at one; This has also proved and has adopted many semi-girders guaranteeing to have improved the sensitivity on the sensitive direction under the prerequisite constant to non-sensitive direction inhibition ability.
Instance two: five sub-semi-girder acceleration transducers of both-end:
Five sub-semi-girder acceleration transducers of both-end of the present invention; Shown in Fig. 2 c; Mass size is 100 (μ m) * 100 (μ m) * 100 (μ m), and the mass two ends are respectively equipped with five sub-semi-girders, and each sub-semi-girder is of a size of 100 (μ m) * 4 (μ m) * 100 (μ m).
The both-end single cantilever beam acceleration transducer of experiment contrast is shown in Fig. 1 c, and mass size is 100 (μ m) * 100 (μ m) * 100 (μ m), and two ends monolithic semi-girder is of a size of 100 (μ m) * 20 (μ m) * 100 (μ m).
Extraneous load is 1000g, utilizes ANSYS to analyze emulation, and the result is shown in Fig. 4 a, Fig. 4 b, Fig. 4 c.Use its beam end of monolithic cantilever beam structure to be respectively 0.125E-9 (m), 0.472E-11 (m), 0.184E-10 (m) through finding out among the figure at the micrometric displacement of sensitive direction (Y direction) and non-sensitive direction (X, Z direction); Use five sub-cantilever beam structure device beam ends to be respectively 0.236E-8 (m), 0.409E-11 (m), 0.200E-10 (m) at the micrometric displacement of sensitive direction (Y direction) and non-sensitive direction (X, Z direction).Can find out through emulated data; Adopt the micrometric displacement of five sub-cantilever beam structures on sensitive direction greater than the monolithic cantilever beam structure; Simultaneously both are at the micrometric displacement of non-sensitive direction much at one; This has also proved and has adopted many semi-girders guaranteeing to have improved the sensitivity on the sensitive direction under the prerequisite constant to non-sensitive direction inhibition ability.
Claims (3)
1. semi-girder acceleration transducer more than a kind comprises mass, and the side of mass is provided with semi-girder, and semi-girder is provided with voltage dependent resistor (VDR), it is characterized in that: said semi-girder is made up of two and sub-semi-girder plural and height such as mass grade.
2. a kind of many semi-girders acceleration transducer according to claim 1 is characterized in that: a side of mass is provided with two and sub-semi-girder plural and height such as mass grade.
3. a kind of many semi-girders acceleration transducer according to claim 1 is characterized in that: two sides of mass are respectively equipped with two and sub-semi-girder plural and height such as mass grade.
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| CN2011102535869A CN102401841A (en) | 2011-08-31 | 2011-08-31 | Multi-cantilever acceleration transducer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN106771557A (en) * | 2017-01-24 | 2017-05-31 | 东南大学 | Si base micro machineries cantilever beam couples direct-heating type millimeter-wave signal detector |
| CN108646561A (en) * | 2018-05-15 | 2018-10-12 | 浙江工业大学 | One kind is based on cross-linked Multi-arm robots set time parameter identification and position synchronization control method |
| CN111596345A (en) * | 2020-06-17 | 2020-08-28 | 防灾科技学院 | Optical fiber acceleration sensor for earthquake monitoring and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1752757A (en) * | 2005-09-12 | 2006-03-29 | 中北大学 | Resonance tunnel through pressure resistance type micro acceleration meter |
| CN201083760Y (en) * | 2007-10-19 | 2008-07-09 | 中国电子科技集团公司第十三研究所 | Three axis integrated piezoresistance type acceleration sensor |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
| CN201909670U (en) * | 2010-01-13 | 2011-07-27 | 陈建明 | Passive wireless vibrating sensor |
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2011
- 2011-08-31 CN CN2011102535869A patent/CN102401841A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1752757A (en) * | 2005-09-12 | 2006-03-29 | 中北大学 | Resonance tunnel through pressure resistance type micro acceleration meter |
| CN201083760Y (en) * | 2007-10-19 | 2008-07-09 | 中国电子科技集团公司第十三研究所 | Three axis integrated piezoresistance type acceleration sensor |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
| CN201909670U (en) * | 2010-01-13 | 2011-07-27 | 陈建明 | Passive wireless vibrating sensor |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN104482930B (en) * | 2014-12-04 | 2017-09-29 | 中国科学院半导体研究所 | Apply the weak coupling elastic beam structure in MEMS |
| CN106771557A (en) * | 2017-01-24 | 2017-05-31 | 东南大学 | Si base micro machineries cantilever beam couples direct-heating type millimeter-wave signal detector |
| CN106771557B (en) * | 2017-01-24 | 2019-03-05 | 东南大学 | Si base micro machinery cantilever beam couples direct-heating type millimeter-wave signal detector |
| CN108646561A (en) * | 2018-05-15 | 2018-10-12 | 浙江工业大学 | One kind is based on cross-linked Multi-arm robots set time parameter identification and position synchronization control method |
| CN111596345A (en) * | 2020-06-17 | 2020-08-28 | 防灾科技学院 | Optical fiber acceleration sensor for earthquake monitoring and preparation method thereof |
| CN111596345B (en) * | 2020-06-17 | 2023-12-29 | 防灾科技学院 | Optical fiber acceleration sensor for earthquake monitoring and preparation method thereof |
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Application publication date: 20120404 |