CN104482930B - Apply the weak coupling elastic beam structure in MEMS - Google Patents
Apply the weak coupling elastic beam structure in MEMS Download PDFInfo
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- CN104482930B CN104482930B CN201410734012.7A CN201410734012A CN104482930B CN 104482930 B CN104482930 B CN 104482930B CN 201410734012 A CN201410734012 A CN 201410734012A CN 104482930 B CN104482930 B CN 104482930B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
A kind of weak coupling elastic beam structure applied in MEMS, including：One coupled beams；One first support beam, its one end is vertically fixed on the side in coupled beams；One second support beam, its one end is vertically fixed on the opposite side in coupled beams；First support beam and the second support beam are separated by a preset distance.The present invention has physical dimension small, simple in construction, the characteristics of reliability is high.
Description
Technical field
The invention belongs to microelectronics technology, particularly a kind of coupling elastic beam structure applied in MEMS.
Background technology
In MEMS structure, in order to ensure the uniformity of correlated quality block vibration, it usually needs one group of coupling elasticity
Beam connects two masses, and the two ends of coupling spring beam are separately fixed on two masses, and typical case's application has tuning fork
Gyro, multiple degrees of freedom gyro etc..
The spring beam in MEMS structure on mass is connected in addition to spring beam is coupled, also support beam, support beam
One end be connected with mass, the other end is fixed in substrate or other immovable structures.Mass, support beam, coupled beams structure
Into a double freedom resonator system, its resonance mode is the in phase vibration and anti-phase vibration of two correlated quality blocks.Two
The difference of the resonant frequency of resonance mode depends on coupling spring beam and the ratio of support beam coefficient of elasticity, and this ratio is smaller, then
The distance of two resonant frequencies is nearer, on the contrary then more remote.
For MEMS structure as tuning fork gyroscope, it is desirable to which two resonant frequencies are distant, to prevent same phase
The resonance characteristic of resonance mode disturbs the effective quality factor of anti-phase resonance mode, so as to influence the precision of tuning fork gyroscope.Cause
The rigidity of this general tuning fork gyroscope coupling spring beam is 1/2 to the 1/20 of support spring beam rigidity, and this is easy to by increasing structure
Realized into the length or series connection number of the folded beam of coupled beams.
And for multiple degrees of freedom gyro, it is desirable to two resonant frequencies are closer to the distance, to ensure the displacement of its mass
Harmony response curve includes a flat gain interval so that the sensitivity of gyro is effectively amplified, and not by temperature, confession
The influence of the environmental factors such as piezoelectric voltage.Therefore the rigidity of general linear multi degrees of freedom gyro coupling spring beam is support spring beam rigidity
1/10 to 1/500, the spring beam of so small coefficient only just seems by increase folding beam length or increase series connection number is difficult
Realize, the beam series connection of long beam or excessive number can all cause the degradation of device reliability.
The content of the invention
It is an object of the present invention to provide a kind of connection in series-parallel by simple beam can be achieved with the elasticity of weak coupling power transmission
Girder construction, the structure has size small, simple in construction, the characteristics of reliability is high.
The present invention provides a kind of weak coupling elastic beam structure applied in MEMS, including：
One coupled beams；
One first support beam, its one end is vertically fixed on the side in coupled beams；
One second support beam, its one end is vertically fixed on the opposite side in coupled beams；
First support beam and the second support beam are separated by a preset distance.
The beneficial effects of the invention are as follows, it is small with size, it is simple in construction, the characteristics of reliability is high.
Brief description of the drawings
To further illustrate the technology contents of the present invention, accompanying drawing is listed with reference to embodiments, is described in detail as after, its
In：
Fig. 1 is a kind of first embodiment for the weak coupling elastic beam structure applied in MEMS proposed by the present invention
Schematic diagram；
Fig. 2 is a kind of second embodiment for the weak coupling elastic beam structure applied in MEMS proposed by the present invention
Schematic diagram；
Fig. 3 is a kind of 3rd embodiment for the weak coupling elastic beam structure applied in MEMS proposed by the present invention
Schematic diagram；
Fig. 4 is a kind of fourth embodiment for the weak coupling elastic beam structure applied in MEMS proposed by the present invention
Schematic diagram.
Embodiment
Refering to shown in Fig. 1-Fig. 4, the present invention provides a kind of weak coupling elastic beam structure applied in MEMS.Bag
Include：
One coupled beams 1；
One first support beam 2, its one end is vertically fixed on the side in coupled beams 1；
One second support beam 3, its one end is vertically fixed on the opposite side in coupled beams 1；
The support beam 3 of first support beam 2 and second is separated by a preset distance.
The material of coupled beams 1, the first support beam 2 and the second support beam 3 is silicon, carborundum, quartz, silicon nitride, aluminium nitride
Or jewel.
The both ends or one end of coupled beams 1 are fixing end, and fixing point is located at the MEMS using weak coupling elastic beam structure
Substrate or other immovable structures on.
One end of first support beam 2 is connected with coupled beams 1, remaining end and the MEMS using weak coupling elastic beam structure
A mass be connected.
One end of second support beam 3 is connected with coupled beams 1, remaining end and the MEMS using weak coupling elastic beam structure
A mass be connected, the mass being connected with the second support beam 3 is different from the mass being connected with the first support beam 2.
When the mass being connected with the first support beam 2 produces displacement under force, the He of the first support beam 2 will be caused
The coupled beams 1 being attached thereto are deformed upon, the change in displacement for causing the second support beam 3 to be connected a little with coupled beams 1, are caused and second
The connected mass of support beam 3 produces displacement, it is achieved thereby that the mass that is connected with the first support beam 2 and with the second support beam
Displacement transmission between 3 connected masses.
When the mass being connected with the second support beam 3 produces displacement under force, the He of the second support beam 3 will be caused
The coupled beams 1 being attached thereto are deformed upon, the change in displacement for causing the first support beam 2 to be connected a little with coupled beams 1, are caused and first
The connected mass of support beam 2 produces displacement, it is achieved thereby that the mass that is connected with the second support beam 3 and with the first support beam
Displacement transmission between 2 connected masses.
To become apparent the purpose of the present invention, feature, the embodiment to the present invention is made below in conjunction with the accompanying drawings
Further instruction, it is pointed out that claim of the invention is covering but not limited to four embodiments provided.
Embodiment one
As shown in fig.1, in the embodiment, coupled beams 1 are the body of rod always, and two ends are fixing end；First support beam 2
The body of rod always is shaped as, its one end is vertically fixed on the side in coupled beams 1；The bar being shaped as always of second support beam 3
Body, its one end is vertically fixed on the side in coupled beams 1, separated by a distance with the first support beam 2.
Embodiment two
As shown in fig.2, in the embodiment, coupled beams 1 are the bow font of bending, and two ends are fixing end；First support beam 2
The body of rod being shaped as always, its one end is vertically fixed on the side in coupled beams 1；Second support beam 3 is shaped as always
The body of rod, its one end is vertically fixed on the side in coupled beams 1, separated by a distance with the first support beam 2.
Embodiment three
As shown in fig.3, in the embodiment, coupled beams 1 are recessed "U" shaped, and one end is fixing end；First support beam
2 " U " word that is shaped as folds shape, and its one end is vertically fixed on the side in coupled beams 1；Second support beam 3 is shaped as one " U "
Word folds shape, and its one end is vertically fixed on the side in coupled beams 1, separated by a distance with the first support beam 2.
Example IV
As shown in fig.4, in the embodiment, coupled beams 1 are the body of rod always, and two ends are fixing end；First support beam 2
Shape M-shaped, its one end is vertically fixed on the side in coupled beams 1；Second support beam 3 is shaped as twofold shape, one
End is vertically fixed on the side in coupled beams 1, separated by a distance with the first support beam 2.
The embodiment of the present invention is the foregoing is only, is not intended to limit the invention, it is all the present invention's
Within spirit and principle, any modification, equivalent substitution and improvements done etc. should be included in the scope of the protection.
Claims (6)
1. a kind of weak coupling elastic beam structure applied in MEMS, including：
One coupled beams, the two ends of the coupled beams are fixing end, and the coupled beams are the body of rod always；
One first support beam, its one end is vertically fixed on the side in coupled beams；
One second support beam, its one end is vertically fixed on the opposite side in coupled beams；
First support beam and the second support beam are separated by a preset distance.
2. the weak coupling elastic beam structure according to claim 1 applied in MEMS, wherein described coupled beams
Material be silicon, carborundum, quartz, silicon nitride, aluminium nitride or jewel.
3. the weak coupling elastic beam structure according to claim 1 applied in MEMS, wherein described first
The material for supportting beam is silicon, carborundum, quartz, silicon nitride, aluminium nitride or jewel.
4. the weak coupling elastic beam structure according to claim 1 applied in MEMS, wherein described second
The material for supportting beam is silicon, carborundum, quartz, silicon nitride, aluminium nitride or jewel.
5. the weak coupling elastic beam structure according to claim 3 applied in MEMS, wherein described first
Support the body of rod being shaped as always of beam, " U " word and fold shape, twofold shape or M-shaped.
6. the weak coupling elastic beam structure according to claim 4 applied in MEMS, wherein described second
Support the body of rod being shaped as always of beam, " U " word and fold shape, twofold shape or M-shaped.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410734012.7A CN104482930B (en) | 2014-12-04 | 2014-12-04 | Apply the weak coupling elastic beam structure in MEMS |
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| CN201410734012.7A CN104482930B (en) | 2014-12-04 | 2014-12-04 | Apply the weak coupling elastic beam structure in MEMS |
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| CN104482930A CN104482930A (en) | 2015-04-01 |
| CN104482930B true CN104482930B (en) | 2017-09-29 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106871885A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | For the folded spring group and MEMS sensor of MEMS sensor |
| CN109765541B (en) * | 2019-01-14 | 2020-11-24 | 上海禾赛科技股份有限公司 | Scanning device and laser radar |
| CN114878030A (en) * | 2022-05-06 | 2022-08-09 | 西安思微传感科技有限公司 | Wide-range high-precision silicon resonance pressure sensor chip and preparation method thereof |
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| CN101050966A (en) * | 2007-05-21 | 2007-10-10 | 哈尔滨工业大学 | Double freedom double decouple micro mechanical vibration gyrosope senser |
| CN102401841A (en) * | 2011-08-31 | 2012-04-04 | 华东光电集成器件研究所 | Multi-cantilever acceleration transducer |
| CN102507981A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure |
| CN102798386A (en) * | 2011-05-25 | 2012-11-28 | 上海飞恩微电子有限公司 | Three-degree-of-freedom resonance silicon micromechanical gyroscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6223598B1 (en) * | 1997-06-18 | 2001-05-01 | Analog Devices, Inc. | Suspension arrangement for semiconductor accelerometer |
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2014
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|---|---|---|---|---|
| CN101050966A (en) * | 2007-05-21 | 2007-10-10 | 哈尔滨工业大学 | Double freedom double decouple micro mechanical vibration gyrosope senser |
| CN102798386A (en) * | 2011-05-25 | 2012-11-28 | 上海飞恩微电子有限公司 | Three-degree-of-freedom resonance silicon micromechanical gyroscope |
| CN102401841A (en) * | 2011-08-31 | 2012-04-04 | 华东光电集成器件研究所 | Multi-cantilever acceleration transducer |
| CN102507981A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure |
Non-Patent Citations (3)
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| Experimental nonlinear localization in a periodically forced repetitive system of coupled magnetoelastic beams;Jassim Emad et.al;《Physica. Section D: Nonlinear Phenomena 》;20001231;第192-201页 * |
| 一种增大MEMS平板电容驱动器有效行程的新方法;饶伏波等;《航空制造技术》;20071231(第6期);第1节 * |
| 新型硅微加速度传感器的设计与制作;李军俊等;《清华大学学报》;19991231;第39卷(第S1期);第84-87页 * |
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