CN109765541B - Scanning device and laser radar - Google Patents
Scanning device and laser radar Download PDFInfo
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- CN109765541B CN109765541B CN201910034596.XA CN201910034596A CN109765541B CN 109765541 B CN109765541 B CN 109765541B CN 201910034596 A CN201910034596 A CN 201910034596A CN 109765541 B CN109765541 B CN 109765541B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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Abstract
A scanning apparatus and lidar, the scanning apparatus comprising: the vibrating mirrors are arranged along a light path in sequence, each vibrating mirror is provided with a moving part, each moving part is provided with a reflecting surface suitable for reflecting light, and the vibrating mirrors change the propagation direction of the light reflected by the reflecting surfaces through the swinging of the moving parts; at least one elastic connecting member having two ends respectively connected to the moving portions of the adjacent two galvanometers. According to the technical scheme, on the premise of not increasing or even reducing the requirements on machining and assembling precision, the swinging of the motion parts of the at least two vibrating mirrors can be fused into the same resonance mode according to a certain phase, so that the cost reduction and the performance improvement are both considered.
Description
Technical Field
The invention relates to the field of laser detection, in particular to a scanning device and a laser radar.
Background
Laser radar is a range finding sensor commonly used, has characteristics such as detection range is far away, resolution ratio is high, receive environmental disturbance little, and the wide application is in fields such as intelligent robot, unmanned aerial vehicle, unmanned driving. In recent years, the automatic driving technology has been rapidly developed, and the laser radar has become indispensable as a core sensor for distance sensing.
In the galvanometer type solid-state laser radar, light is reflected by a reflecting surface of the galvanometer to form light for scanning. The scanning field of view that single galvanometer can reach often is not enough to satisfy the field angle demand of device, for the application demand, often will set up a plurality of galvanometers in same laser radar. In order to increase the field angle as much as possible, the galvanometer needs to work at the resonant frequency thereof; in practical application, the resonant frequencies of the independent galvanometers are not consistent due to the existence of process errors.
The improvement of the accuracy of the resonant frequency is often accompanied with the improvement of the requirements of the processing and assembling accuracy of the galvanometer, so that the equipment cost is increased.
Disclosure of Invention
The invention provides a scanning device and a laser radar, which can not only not increase the requirements on the processing and assembling difficulty of galvanometers, but also lead the moving parts of at least two galvanometers to swing in the same resonance mode, thereby achieving the consideration of low cost and high performance.
To solve the above problems, the present invention provides a scanning device, comprising:
the vibrating mirrors are arranged along a light path in sequence, each vibrating mirror is provided with a moving part, each moving part is provided with a reflecting surface suitable for reflecting light, and the vibrating mirrors change the propagation direction of the light reflected by the reflecting surfaces through the swinging of the moving parts; at least one elastic connecting member having two ends respectively connected to the moving portions of the adjacent two galvanometers.
Optionally, the reflecting surfaces of the at least two galvanometers are sequentially arranged oppositely, so that the light rays are sequentially reflected on the reflecting surfaces to change the propagation direction of the light rays.
Optionally, the at least two galvanometers have the same design resonant frequency.
Optionally, the elastic connection member comprises: a spring.
Optionally, the elastic connecting member and the moving part are integrally manufactured; or the elastic connecting component is fixedly connected with the moving part.
Optionally, the at least two galvanometers are provided with rotating shafts, the moving part swings around the rotating shafts, and the rotating shafts of the at least two galvanometers are arranged in parallel; the elastic connecting component is arranged in a first plane perpendicular to the rotating shaft, and the elastic connecting component is elastically deformed in the first plane.
Optionally, the moving part is in an axisymmetric structure with respect to the first plane.
Optionally, the moving part has at least one end surface perpendicular to the reflecting surface of the moving part; the two end portions of the elastic connecting member are respectively connected with the end surfaces of the moving portions of the adjacent two galvanometers.
Optionally, the rotating shafts of two adjacent galvanometers define a second plane; two end portions of the elastic connection member connecting the adjacent two galvanometers are located on one side of the second plane.
Optionally, the rotating shafts of two adjacent galvanometers define a second plane; two ends of the elastic connecting member connecting the two adjacent galvanometers are respectively positioned on two sides of the second plane.
Optionally, the elastic connecting member is in any one shape of a V shape, a U shape, an arc shape, a Z shape, or an S shape.
Optionally, the galvanometer comprises a MEMS galvanometer.
Optionally, the galvanometer is a one-dimensional galvanometer or a two-dimensional galvanometer.
In addition, the present invention also provides a laser radar including: the scanning device comprises a laser emitting device, a scanning device and a receiving device.
Compared with the prior art, the technical scheme of the invention has the following advantages:
in the technical scheme of the invention, the moving parts of two adjacent vibrating mirrors are connected through the elastic connecting member, so that the moving parts of the two adjacent vibrating mirrors can swing in the same resonance mode, and even if the resonance frequencies are different, the swinging of the moving parts of the two adjacent vibrating mirrors can be fused into the same resonance mode according to a certain phase, namely, the technical scheme of the invention can fuse the swinging of the moving parts of the at least two vibrating mirrors into the same resonance mode according to a certain phase on the premise of not increasing or even reducing the requirements on processing and assembling precision, thereby considering cost reduction and performance improvement.
In an alternative aspect of the invention, the at least two galvanometers have the same design resonant frequency. The scanning device is provided with the vibrating mirrors with the same designed resonant frequency, the resonant modes of the at least two vibrating mirrors are close, the stability of the resonant mode to which the at least two vibrating mirrors are fused can be effectively improved, and the stability and the precision of the scanning device are improved.
In an alternative scheme of the invention, the reflecting surfaces of the at least two galvanometers are sequentially arranged oppositely, and the light rays are sequentially reflected on the reflecting surfaces so as to change the propagation direction; therefore, along with the swing of the motion part, the change angle of the propagation direction of the light rays reflected for multiple times by the reflecting surfaces of the at least two galvanometers is increased, so that the field angle of the scanning light rays formed by the scanning device can be effectively expanded.
In an alternative scheme of the invention, the elastic connecting member and the moving part can be integrally manufactured, so that the elastic connecting member can be manufactured in the manufacturing process of the galvanometer, the process precision is improved, and the process cost is reduced; the elastic connecting component can also be fixedly connected with the moving part, namely the arrangement of the elastic connecting component does not need to influence the technical process of the existing galvanometer. The flexible arrangement mode of the elastic connecting component can effectively reduce the manufacturing cost of the scanning device.
In an alternative scheme of the invention, the elastic connecting member is arranged in a first plane perpendicular to the rotating shafts of the at least two galvanometers, so that the direction of elastic deformation of the elastic connecting member is located in the first plane, and the direction of elastic deformation of the elastic connecting member is matched with the swinging direction of the at least two galvanometers, thereby effectively realizing the fusion of the same resonance mode.
In an alternative scheme of the invention, the moving part is in an axisymmetric structure relative to the first plane, so that the stability of the moving parts of the at least two galvanometers swinging in the same resonance mode can be effectively ensured, and the reliability and the stability of the scanning device can be effectively ensured.
Drawings
Fig. 1 is a schematic diagram of an optical path structure according to a first embodiment of the present invention;
FIG. 2 is a schematic view of the optical path of the scanning light formed by the galvanometer;
FIG. 3 is a schematic diagram of an optical path structure according to a second embodiment of the present invention;
fig. 4 is a schematic diagram of an optical path structure according to a third embodiment of the present invention.
Detailed Description
As known from the background art, the scanning device with a plurality of galvanometers in the prior art often has the problem that the requirements on the machining and assembling precision of the galvanometers are high. For example, when designing a galvanometer with a resonant frequency of 600Hz, the resonant frequency of a single galvanometer after processing is finished may be 601Hz, 602Hz, 599Hz, or 598Hz due to process floating and processing error.
On the other hand, the conventional laser radar scanning device has a problem that the angle of view is too small. The scanning field angle which can be achieved by a single galvanometer is often not enough to meet the field angle requirement of the device. To solve this problem, one approach is to use multiple beams of laser light to strike the mirrors from different angles, thereby stitching a larger field of view to meet the demand. However, because of the use of multiple laser beams, multiple independent optical transceiver modules are required, and the assembly precision between the modules is required, which makes the system costly. In addition, the complexity of the related control method is greatly increased by multi-view field splicing.
Another method is to use a multi-surface galvanometer to vibrate at the same frequency and synchronous phase, so as to reflect the received light for multiple times, thereby increasing the scanning field angle. In order to increase the field angle as much as possible, the galvanometers used in this method need to operate at the same resonant frequency. However, due to the difference of the resonant frequencies of the independent galvanometers, beat frequency occurs in the scanning angle, so that the scanning field of view is unstable, and the problems that some areas are not scanned, the scanning speed of some areas is high and the like occur.
In addition, since the quality factor (Q value) of the galvanometer is high and the bandwidth is small, driving the independent galvanometer with the same frequency also tends to cause a problem of extremely small angle of view.
To solve the above technical problem, the present invention provides a scanning device, including:
the vibrating mirrors are arranged along a light path in sequence, each vibrating mirror is provided with a moving part, each moving part is provided with a reflecting surface suitable for reflecting light, and the vibrating mirrors change the propagation direction of the light reflected by the reflecting surfaces through the swinging of the moving parts; at least one elastic connecting member having two ends respectively connected to the moving portions of the adjacent two galvanometers. According to the technical scheme, on the premise of not increasing or even reducing the requirements on machining and assembling precision, the swinging of the motion parts of the at least two vibrating mirrors can be fused into the same resonance mode according to a certain phase, so that the cost reduction and the performance improvement are both considered.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1, a schematic diagram of an optical path structure according to a first embodiment of the present invention is shown.
As shown in fig. 1, the scanning apparatus includes: at least two galvanometers 110 arranged in sequence along an optical path, wherein the galvanometers 110 are provided with a moving part 111, the moving part 111 is provided with a reflecting surface 111r suitable for reflecting light, and the galvanometers 110 change the propagation direction of the light reflected by the reflecting surface 111r through the swinging of the moving part 111; at least one elastic connection member 120, wherein the elastic connection member 120 has two end portions 121, and the two end portions 121 are respectively connected to the moving portions 111 of two adjacent galvanometers 110.
The moving parts 111 of two adjacent galvanometers 110 are connected through the elastic connecting member 120, so that the moving parts 111 of the two adjacent galvanometers 110 can swing in the same resonance mode, and even if the resonance frequencies are different, the swinging of the moving parts 111 of the two adjacent galvanometers 110 can be fused into the same resonance mode according to a certain phase, that is, the technical scheme of the invention can fuse the swinging of the moving parts 111 of the at least two galvanometers 110 into the same resonance mode according to a certain phase on the premise of not increasing or even reducing the requirements on processing and assembling precision, thereby reducing the cost and improving the performance.
The technical scheme of the invention is explained in detail in the following with the accompanying drawings.
The galvanometer 110 includes a moving part 111 having a reflecting surface 111r for reflecting the received light and changing a propagation direction of the light formed by reflection by the reflecting surface 111r by a swing of the moving part 111, thereby forming a light for scanning.
Referring to fig. 2 in combination, a schematic diagram of the optical path of the scanning light line formed by the galvanometer is shown.
A partial surface of the moving portion 111 of the galvanometer 110 is the reflecting surface 111r, and the light projected to the reflecting surface 111r is reflected by the reflecting surface 111r to form a light 132 a.
The galvanometer 110 has a rotating shaft 112, and the moving part 111 swings around the rotating shaft 112; as the moving portion 111 swings, the reflecting surface 111r also swings.
It should be noted that fig. 1 only schematically illustrates the rotating shaft 112, and in an embodiment of the present invention, an axis of the rotating shaft 112 is disposed perpendicular to a paper plane; the moving part 111 swings around the rotating shaft 112. However, this arrangement is merely an example, and the present invention is not limited to the position and arrangement of the rotating shaft.
As shown in fig. 2, when the moving part 111 rotates around the rotating shaft 112 by an angle α, the reflecting surface 111r also rotates by an angle α; at this time, an included angle between the light ray 132b formed by being reflected by the reflecting surface 111r and the light ray 132a formed when the rotation does not occur is 2 α. Therefore, when the oscillating angle of the galvanometer 110 is α, the angle of view of the light formed by the reflecting surface 111r is 2 α.
With continued reference to fig. 1, the scanning device includes at least two galvanometers 110, the at least two galvanometers 110 are sequentially disposed along the optical path, and the reflective surfaces 111r of the at least two galvanometers 110 are sequentially disposed opposite to each other, so that the light is sequentially reflected on the reflective surfaces 111r to change the propagation direction of the light.
Therefore, as the moving portion 111 swings, the angle of change in the propagation direction of the light reflected by the reflecting surfaces 111r of the at least two galvanometers 110 a plurality of times increases, and the angle of view of the scanning light formed by the scanning device can be effectively expanded.
Specifically, as shown in fig. 1, the scanning device includes two galvanometers 110 arranged along an optical path, and a light ray 131 is projected onto a reflection surface 111r of one of the galvanometers 110 and reflected by the reflection surface 111r to form a light ray 132 a; when the moving portion 111 of the galvanometer 110 rotates by an angle α, a light ray 132b is formed, and an included angle between the light ray 132a and the light ray 132b is 2 α, that is, an angle of view of the light ray formed by reflection by one galvanometer is 2 α.
The light ray 132a is projected onto the reflecting surface 111r of the other galvanometer 110, and is reflected by the reflecting surface 111r of the other galvanometer 110 to form a light ray 133 a; meanwhile, when the moving part 111 of the other galvanometer 110 correspondingly rotates by α, a light ray 133b is formed, and an included angle between the light ray 133a and the light ray 133b is 4 α, that is, the angle of view of the light ray formed by the reflection of the two galvanometers is 4 α.
In this embodiment, the at least two galvanometers 110 have the same design resonant frequency. The galvanometers 110 with the same designed resonant frequency are arranged in the scanning device, and the resonant modes of the at least two galvanometers 110 are close to each other, so that the stability of the same resonant mode to which the at least two galvanometers 110 are fused can be effectively improved, and the stability and the precision of the scanning device can be favorably ensured.
It should be noted that, in other embodiments of the present invention, the at least two galvanometers may have different designed resonant frequencies. Since the quality factor Q is a dimensionless physical quantity representing the damping properties of the galvanometer and also represents the magnitude of the resonant frequency of the galvanometer with respect to the bandwidth, the upper limit of the difference between the resonant frequencies of the at least two galvanometers depends on f/Q, where f is the resonant frequency of the galvanometer and Q is the quality factor. It should be further noted that, in the present embodiment, the galvanometer 110 includes a MEMS galvanometer. By setting the galvanometer 110 in the scanning device as an MEMS galvanometer, the integration level of the scanning device can be effectively improved, and the scanning frequency of the scanning device can be improved.
As shown in fig. 1, the scanning apparatus further includes at least one elastic connection member 120, where the elastic connection member 120 is located between the moving portions 111 of two adjacent galvanometers 110, and is used for realizing elastic connection between the moving portions 111 of two adjacent galvanometers 110.
Specifically, the elastic connection member 120 is elastically deformable, and two end portions 121 of the elastic connection member 120 are respectively connected to the moving portions 111 of two adjacent galvanometers 110. When two motion parts 111 connected by the same elastic connection member 120 swing, because the two motion parts are elastically connected, the swing of the two motion parts 111 can be fused into the same resonance mode according to a certain phase after being stabilized, that is, even if the resonance mode frequencies of the two adjacent galvanometers 110 are different, the swing of the two motion parts 111 can be fused into the same resonance mode, so that the swing of the two motion parts 111 can be fused into the same resonance mode, and the requirements on the assembly and processing precision of the two galvanometers 110 can not be increased or even reduced, thereby realizing the balance of cost reduction and performance improvement.
For example, the resonant frequencies of the two galvanometers 110 shown in FIG. 1 are 601Hz and 602Hz, respectively. Since the two galvanometers 110 are elastically connected by the elastic connecting member 120; when stabilized, the oscillations of the moving parts 110 of the two galvanometers 110 merge into the same resonant mode, and the resonant frequency after coupling may be 601.5 Hz.
When the oscillation amplitudes of the two galvanometers 110 are α, the light received by the scanning device is reflected by the reflecting surfaces 111r of the two galvanometers 110 in sequence, and the angle of view of the formed light for scanning is 4 α.
In order to perform the function of elastic connection, the elastic connection member 120 can be elastically deformed by an external force. In this embodiment, the elastic connection member 120 includes: a spring, such as a coil spring, a spiral spring, or a leaf spring. In other embodiments of the present invention, the elastic connection member 120 may also be a connection structure supported by an elastic material.
In this embodiment, the elastic connection member 120 and the moving portion 111 are integrally manufactured, that is, the elastic connection member 120 and the moving portion 111 are manufactured at the same time in the process of processing the galvanometer 110. The elastic connection member 120 is manufactured in the manufacturing process of the galvanometer 110, so that the manufacturing precision of the elastic connection member 120 can be effectively improved, and the manufacturing cost is reduced.
For example, in some embodiments, the galvanometer includes a steel sheet including a torsion shaft and an inner frame connected thereto, the inner frame as the moving portion having a smooth surface as the reflecting surface and a back surface opposite to the reflecting surface; the galvanometer further comprises a fixed connecting part, and the fixed part is attached to the back surface; the elastic connecting component extends out of one side of the fixed connecting part and is integrally connected with the fixed connecting part.
In another embodiment of the present invention, the elastic connection member may be fixedly connected to the moving portion, that is, the elastic connection member and the galvanometer are separately manufactured and then fixedly connected. Specifically, two end parts of the elastic connecting component are respectively fixedly connected with the moving parts of the two adjacent vibrating mirrors in a clamping manner, a welding manner and the like. The elastic connecting component and the galvanometer are manufactured separately, so that the manufacturing and the setting of the elastic connecting component do not influence the process of the existing galvanometer.
The elastic connecting component can be integrally manufactured with the moving part; and the elastic connecting components can be fixedly connected after the manufacture is finished, and the flexible arrangement mode of the elastic connecting components can effectively reduce the manufacture cost of the scanning device.
With continued reference to fig. 1, each of the at least two galvanometers 110 has a rotating shaft 112, the moving part 111 swings around the rotating shaft 112, and the rotating shafts 112 of the at least two galvanometers 110 are arranged in parallel with each other; the elastic connection member 120 is disposed in a first plane (not shown) perpendicular to the rotation shaft 112, and the elastic connection member 120 is elastically deformed in the first plane. The elastic connection member 120 is disposed in the first plane, so that the direction of elastic deformation of the elastic connection member 120 is located in the first plane, and thus the direction of elastic deformation of the elastic connection member 120 is matched with the swinging direction of the at least two galvanometers 110, so as to effectively realize the fusion of the same resonance mode.
In this embodiment, the moving portion 111 is axially symmetric with respect to the first plane, and the elastic connection member 120 is elastically deformed in the first plane, so that after stabilization, the two moving portions 111 connected to the elastic connection member 120 can effectively ensure stability and reliability of swing, which is beneficial to improving performance of the scanning apparatus.
As shown in fig. 1, the moving part 111 has at least one end surface (not shown) perpendicular to the reflecting surface 111r of the moving part 111; the two end portions 121 of the elastic connection member 120 are connected to the end surfaces of the moving portions 110 of the adjacent two galvanometers 110, respectively.
In this embodiment, the rotating shafts 112 of two adjacent galvanometers 110 define a second plane (not shown); two end portions 121 of the elastic connection member 120 connecting two adjacent galvanometers 110 are located on the same side of the second plane. As mentioned above, in the present embodiment, the rotation shaft 112 is disposed perpendicular to the paper, so the second plane is perpendicular to the paper in fig. 1.
Specifically, the two moving portions 111 connected to the elastic connection member 120 are arranged in a V shape. Therefore, in order to connect the moving portions 111 of the two galvanometers 110, the elastic connecting member 120 is formed in any one of a V shape, a U shape, and a circular arc shape in the present embodiment. The light 131 received by the scanning device and the light 133a or 133b formed by the two galvanometers 110 sequentially reflected are both located on the same side of the second plane. In addition, two end portions 121 of the elastic connection member 120 connecting two adjacent galvanometers 110 are located on the same side of a second plane defined by the rotation axes 112 of the two adjacent galvanometers 110.
It should be noted that, as shown in fig. 1, in the present embodiment, the galvanometer 110 is configured as a one-dimensional galvanometer, and the moving part 111 swings around a single rotating shaft; the elastic connection member 120 is connected between the moving parts of the two one-dimensional galvanometers. However, this is merely an example, and in other embodiments of the present invention, the galvanometer may be configured as a two-dimensional galvanometer, and the elastic connection member may implement elastic connection between the two-dimensional galvanometer moving parts.
In this embodiment, the two moving portions 111 connected by the elastic connecting member 120 are arranged in a V shape. However, this is merely an example, and in other embodiments of the present invention, the elastic connection member may be disposed in other shapes according to different optical path requirements.
Referring to fig. 3, a schematic diagram of an optical path structure according to a second embodiment of the present invention is shown.
The present embodiment is the same as the previous embodiment, and the description of the present invention is omitted. The present embodiment is different from the previous embodiment in that the two moving portions 211 connected to the elastic connection member 220 are arranged approximately in parallel in the present embodiment.
Specifically, two end portions 221 of the elastic connection member 220 connecting two adjacent galvanometers 210 are respectively located at two sides of a second plane defined by the rotation axis 212 of the two adjacent galvanometers 210. In this embodiment, the elastic connection member 120 is provided in any one of a zigzag shape and an S-shape to connect the moving portions 211 of the two galvanometers 210.
As shown in fig. 3, in this embodiment, the light 231 received by the scanning device and the light 233a or 233b formed by the two galvanometers 210 sequentially reflected are respectively located on two sides of the second plane.
It should be noted that, as shown in fig. 1 and 3, in the first embodiment and the second embodiment, the number of galvanometers in the scanning device is two. However, this is merely an example, and in other embodiments of the present invention, the number of galvanometers in the scanning device may be more than two.
Referring to fig. 4, a schematic diagram of an optical path structure according to a third embodiment of the present invention is shown.
Specifically, the first galvanometer 310a, the second galvanometer 310b, and the third galvanometer 310c are sequentially and oppositely arranged, and light is reflected to the second galvanometer 310b through the first galvanometer 310a and then reflected to the third galvanometer 310c through the second galvanometer 310 b.
In this embodiment, the scanning device includes at least two elastic connection members 320 respectively located between the first galvanometer 310a and the second galvanometer 310b and between the second galvanometer 310b and the third galvanometer 310 c. The two elastic connection members 320 respectively realize elastic connections between the first galvanometer 310a and the second galvanometer 310b and between the second galvanometer 310b and the third galvanometer 310 c. Therefore, after stabilization, the three galvanometers in the present embodiment can be fused into the same resonance mode at a certain phase.
Therefore, when the swing amplitudes of the three galvanometers in the scanning apparatus are all α, the angle of view of the light ray 332 reflected by the first galvanometer 310a is 2 α, the angle of view of the light ray 333 reflected by the second galvanometer 310b is 4 α, and the angle of view of the light ray 8 α reflected by the third galvanometer 310c is maintained as long as the incident direction of the received light ray 331 is unchanged. Therefore, the size of the angle of view of the light used for scanning can be controlled by setting the number of the galvanometers in the scanning device so as to meet the requirements of various devices.
Moreover, due to the arrangement of the elastic connecting member 320, even if a plurality of galvanometers are arranged in the scanning device, the moving parts of the galvanometers still can swing in the same resonance mode, so that the requirements on the machining and assembling precision of the galvanometers are not required to be improved or even can be reduced.
Correspondingly, the invention also provides a laser radar, comprising: the device comprises a laser emitting device, a scanning device and a receiving device, wherein the scanning device is the scanning device provided by the invention.
The laser emitting device includes a laser as a light source to generate laser light for detection. In this embodiment, the specific technical solution of the laser emitting device refers to a light source of an existing laser radar, which is not described in detail herein.
The scanning device receives the light generated by the laser emitting device to form scanning light. The scanning device is the scanning device provided by the invention. The specific technical solution of the scanning device refers to the aforementioned embodiment of the scanning device, and the present invention is not described herein again.
Including two at least mirrors that shake through elastic connection component elasticity links to each other in the scanning device, consequently two shake the mirror motion portion can realize the swing with same resonance mode, even resonant frequency has the difference, the swing of the motion portion of two consecutive mirrors that shake can fuse for same resonance mode according to certain phase place to can not increase or even reduce under the prerequisite of processing and assembly required precision, make two at least shake the mirror the swing of motion portion fuses for same resonance mode according to certain phase place, in order to reach the purpose of taking into account cost reduction and performance improvement.
In some embodiments of the present invention, the reflecting surfaces of the at least two galvanometers are sequentially disposed opposite to each other, and the light generated by the laser emitting device is projected to the scanning device and sequentially reflected on the reflecting surfaces to change the propagation direction; along with the swinging of the motion part, the change angle of the propagation direction of the light rays reflected for multiple times by the reflecting surfaces of the at least two galvanometers is increased, so that the field angle of the scanning light rays formed by the scanning device can be effectively expanded.
The scanning light formed by the scanning device is reflected by the target to be detected to form echo light. The receiving device receives the echo light and carries out photoelectric conversion on the echo light to form an electric signal so as to realize detection. In this embodiment, the specific technical solution of the receiving apparatus refers to the existing receiving apparatus of the laser radar, which is not described in detail herein.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (14)
1. A scanning device, comprising:
the optical system comprises at least two vibrating mirrors, a light path and a light source, wherein the vibrating mirrors are sequentially arranged along the light path, each vibrating mirror is provided with a moving part, each moving part is provided with a reflecting surface suitable for reflecting light, the vibrating mirrors change the propagation direction of the light reflected by the reflecting surfaces through the swinging of the moving parts, each vibrating mirror is provided with a rotating shaft, and the moving parts swing around the rotating shafts;
the elastic connecting component is provided with two end parts which are respectively connected with the moving parts of the two adjacent galvanometers, and rotating shafts of the two galvanometers connected with the elastic connecting component are parallel to each other.
2. The scanning device according to claim 1, wherein the reflecting surfaces of the at least two galvanometers are sequentially disposed opposite to each other so that the light rays are sequentially reflected on the reflecting surfaces to change the propagation direction of the light rays.
3. The scanning device of claim 1, wherein the at least two galvanometers have the same design resonant frequency.
4. The scanning device as claimed in claim 1, wherein said elastic connection member comprises: a spring.
5. The scanning device according to claim 1, characterized in that said elastic connecting member is made integral with said moving part;
or the elastic connecting component is fixedly connected with the moving part.
6. The scanning device according to claim 2, wherein the elastic connection member is disposed in a first plane perpendicular to the rotation axis, and the elastic connection member is elastically deformed in the first plane.
7. The scanning device according to claim 6, wherein said moving part has an axisymmetric structure with respect to said first plane.
8. The scanning device according to claim 6, wherein the moving part has at least one end surface perpendicular to a reflecting surface of the moving part;
the two end portions of the elastic connecting member are respectively connected with the end surfaces of the moving portions of the adjacent two galvanometers.
9. The scanning device according to claim 8, wherein the rotation axes of two adjacent galvanometers define a second plane;
two end portions of the elastic connection member connecting the adjacent two galvanometers are located on one side of the second plane.
10. The scanning device according to claim 8, wherein the rotation axes of two adjacent galvanometers define a second plane;
two ends of the elastic connecting member connecting the two adjacent galvanometers are respectively positioned on two sides of the second plane.
11. The scanning device according to claim 8, wherein the elastic connection member has any one of a V-shape, a U-shape, a circular arc shape, a Z-shape, or an S-shape.
12. The scanning device of claim 1, wherein the galvanometer comprises a MEMS galvanometer.
13. The scanning device according to claim 1, wherein the galvanometer is a one-dimensional galvanometer or a two-dimensional galvanometer.
14. A lidar, comprising: a laser emitting device, a scanning device, and a receiving device, the scanning device being the scanning device of any one of claims 1 to 13.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910034596.XA CN109765541B (en) | 2019-01-14 | 2019-01-14 | Scanning device and laser radar |
| PCT/CN2020/070853 WO2020147625A1 (en) | 2019-01-14 | 2020-01-08 | Scanning device and laser radar |
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| CN201910034596.XA CN109765541B (en) | 2019-01-14 | 2019-01-14 | Scanning device and laser radar |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE10034250C2 (en) * | 2000-07-14 | 2003-04-17 | Siemens Ag | Confocal imaging system |
| US7014115B2 (en) * | 2003-08-25 | 2006-03-21 | Advanced Nano Systems, Inc. | MEMS scanning mirror with distributed hinges and multiple support attachments |
| JP2005128147A (en) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | Optical deflector and optical apparatus using the same |
| CN102175326B (en) * | 2011-01-21 | 2012-09-26 | 天津港东科技发展股份有限公司 | Optical distance doubled dynamic collimation interferometer |
| CN104482930B (en) * | 2014-12-04 | 2017-09-29 | 中国科学院半导体研究所 | Apply the weak coupling elastic beam structure in MEMS |
| CN105043550B (en) * | 2015-09-01 | 2017-08-25 | 中国科学院合肥物质科学研究院 | Both arms sweeping formula interferometer system |
| EP3411660A4 (en) * | 2015-11-30 | 2019-11-27 | Luminar Technologies, Inc. | Lidar system with distributed laser and multiple sensor heads and pulsed laser for lidar system |
| CN107526071A (en) * | 2017-02-24 | 2017-12-29 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| CN107272190A (en) * | 2017-06-29 | 2017-10-20 | 北京华信智航科技有限公司 | The laser dazzling device of reflection is vibrated based on minute surface |
| CN109765541B (en) * | 2019-01-14 | 2020-11-24 | 上海禾赛科技股份有限公司 | Scanning device and laser radar |
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| WO2020147625A1 (en) | 2020-07-23 |
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