CN109765541A - Scanning means and laser radar - Google Patents
Scanning means and laser radar Download PDFInfo
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- CN109765541A CN109765541A CN201910034596.XA CN201910034596A CN109765541A CN 109765541 A CN109765541 A CN 109765541A CN 201910034596 A CN201910034596 A CN 201910034596A CN 109765541 A CN109765541 A CN 109765541A
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- galvanometer
- scanning means
- elastic connection
- connection element
- movement portion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- Computer Networks & Wireless Communication (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
A kind of scanning means and laser radar, the scanning means includes: at least two galvanometers set gradually along optical path, the galvanometer has movement portion, the movement portion has the reflecting surface suitable for reflection light, and the galvanometer changes the direction of propagation of the light through the reflective surface by the swing in the movement portion；At least one elastic connection element, there are two ends for the elastic connection element tool, and described two ends are connected with the movement portion of two adjacent galvanometers respectively.Technical solution of the present invention can make the swing in the movement portion of at least two galvanometer be fused to same resonance mode by a phase bit under the premise of not increasing even reduces processing and assembly precision requirement, to take into account, cost is reduced and performance improves.
Description
Technical field
The present invention relates to laser acquisition fields, in particular to a kind of scanning means and laser radar.
Background technique
Laser radar is a kind of common distance measuring sensor, has remote detection range, high resolution, little interference by environment etc.
Feature is widely used in the fields such as intelligent robot, unmanned plane, unmanned.In recent years, automatic Pilot technology is quickly grown,
Core sensor of the laser radar as its perceived distance, it is indispensable.
In mirror-vibrating solid-state laser radar, the light for scanning is formed by the reflective surface light of galvanometer
Line.The single attainable scanning field of view of galvanometer is often insufficient for the field angle demand of device, for application demand, often
Multiple galvanometers are set in same laser radar.In order to increase field angle as far as possible, galvanometer needs work in its resonance frequency
On；And in practical application, due to the presence of fabrication error, the resonance frequency of mutually independent galvanometer is not consistent.
The raising of accuracy of resonant frequencies, be usually associated with galvanometer processing and assembly precision requirement raising, cause equipment at
This increase.
Summary of the invention
Problems solved by the invention is to provide a kind of scanning means and laser radar, and the neither processing of increase galvanometer and assembly is difficult
The requirement of degree, and realize the movement portion of at least two galvanometer with same resonance mode and swing, to reach low cost, Gao Xing
Energy is taken into account.
To solve the above problems, the present invention provides a kind of scanning means, comprising:
At least two galvanometers set gradually along optical path, the galvanometer have movement portion, and the movement portion, which has, to be suitable for instead
The reflecting surface of light is penetrated, the galvanometer changes the propagation of the light through the reflective surface by the swing in the movement portion
Direction；At least one elastic connection element, elastic connection element tool there are two end, described two ends respectively with it is adjacent
The movement portions of two galvanometers be connected.
Optionally, the reflecting surface of at least two galvanometer is successively oppositely arranged, so that the light is described anti-
It penetrates on face and successively reflects to change the direction of propagation of the light.
Optionally, at least two galvanometer design resonance frequency having the same.
Optionally, the elastic connection element includes: spring.
Optionally, the elastic connection element and the movement integrally make；Alternatively, the elastic connection element with
The movement portion is fixedly linked.
Optionally, at least two galvanometer all has shaft, the movement portion around the shaft swing, and it is described at least
The shaft of two galvanometers is arranged in parallel；The elastic connection element is set to first plane perpendicular with the shaft
It is interior, and the elastic connection element carries out elastic deformation in first plane.
Optionally, the movement portion is relative to first plane axisymmetricly structure.
Optionally, the movement portion has at least one end face perpendicular with the reflecting surface in the movement portion；The elasticity
Described two ends of connecting elements are connected with the end face in the movement portion of two adjacent galvanometers respectively.
Optionally, the shaft of two adjacent galvanometers defines the second plane；Connect two adjacent vibrations
Two ends of the elastic connection element of mirror are located at the side of second plane.
Optionally, the shaft of two adjacent galvanometers defines the second plane；Connect two adjacent vibrations
Two ends of the elastic connection element of mirror are located at the two sides of second plane.
Optionally, the elastic connection element is any one in V-shape, U-shaped, circular arc type, Z-shaped or S font
Shape.
Optionally, the galvanometer includes MEMS galvanometer.
Optionally, the galvanometer is one-dimensional galvanometer or 2-D vibration mirror.
In addition, the present invention also provides a kind of laser radars, comprising: laser beam emitting device, scanning means and reception dress
It sets, the scanning means is scanning means of the invention.
Compared with prior art, technical solution of the present invention has the advantage that
In technical solution of the present invention, the movement portion of two adjacent galvanometers passes through the elastic connection element phase
Even, therefore the movement portion of two adjacent galvanometers can be realized with same resonance mode and be swung, even if resonance frequency
It has differences, the swing in the movement portion of two adjacent galvanometers can be fused to same resonant mode by a phase bit
State, that is to say, that technical solution of the present invention can make institute under the premise of not increasing even reduces processing and assembly precision requirement
The swing for stating the movement portion of at least two galvanometers is fused to same resonance mode by a phase bit, to take into account cost reduction
It is improved with performance.
In optinal plan of the present invention, at least two galvanometers design resonance frequency having the same.It is filled in the scanning
The identical galvanometer of design resonance frequency is centered, the resonance mode of at least two galvanometer is close, can effectively improve institute
The stability for stating the resonance mode that at least two galvanometers are fused to is conducive to the stability and precision that improve scanning means.
In optinal plan of the present invention, the reflecting surface of at least two galvanometer is successively oppositely arranged, and the light exists
It successively reflects to change the direction of propagation on the reflecting surface；Therefore with the swing in the movement portion, through described at least two
The angle changing of the light direction of propagation of the reflecting surface multiple reflections of galvanometer also increases with it, so as to effectively extend described sweep
The field angle of the formed scanning ray of imaging apparatus.
In optinal plan of the present invention, the elastic connection element can make with the movement integrally, so as to
Realize the production of elastic connection element, in the galvanometer manufacturing process to improve craft precision, reduce process costs；The bullet
Property connecting elements can also be fixedly linked with the movement portion, i.e., the setting of the described elastic connection element is without influencing existing galvanometer
Technical process.The flexible set-up mode of elastic connection element, can be effectively reduced the cost of manufacture of the scanning means.
In optinal plan of the present invention, the elastic connection element is set to perpendicular with the shaft of at least two galvanometer
The first plane in, be located in first plane so as to make the elastic connection element that elastically-deformable direction occur,
Make that elastically-deformable direction occurs for the elastic connection element and the swaying direction of at least two galvanometer matches, with effective
Realize the fusion of same resonance mode.
In optinal plan of the present invention, the movement portion can effectively be protected relative to first plane axisymmetricly structure
The stability in the movement portion at least two galvanometer that card is swung with same resonance mode can effectively ensure that the scanning dress
The reliability and stability set.
Detailed description of the invention
Fig. 1 is the light channel structure schematic diagram of technical solution of the present invention first embodiment；
Fig. 2 is the light path schematic diagram that galvanometer forms scanning ray；
Fig. 3 is the light channel structure schematic diagram of technical solution of the present invention second embodiment；
Fig. 4 is the light channel structure schematic diagram of technical solution of the present invention 3rd embodiment.
Specific embodiment
It can be seen from background technology that in the prior art often there is processing and the dress of galvanometer in the scanning means with multiple galvanometers
With the higher problem of required precision.For example, design resonance frequency be all 600Hz galvanometer, floated due to technique, mismachining tolerance
Presence, after processing is completed, for single galvanometer, resonance frequency may be 601Hz, it is also possible to be 602Hz, Huo Zhewei
599Hz、598Hz。
On the other hand, the existing laser radar scanning device problem too small there is also field angle.Single galvanometer is attainable
Scanning field of view angle is often insufficient for the field angle demand of device.In order to solve this problem, a kind of method is using multi beam
Laser is incident on mirror surface from different angles, to be spliced into bigger visual field with meet demand.But due to using multi beam to swash
Light, that just needs multiple relatively independent optical transmitting and receiving mould groups, and assembly precision from each other needs to reach certain requirement, this
Meeting is so that the cost of system is got higher.In addition, more field stitchings, also considerably increase the complexity of corresponding control methods.
Another method is to be vibrated using multi-panel galvanometer with identical frequency and locking phase, to the received light of institute into
Row multiple reflections, to play the role of increasing scanning field of view angle.In order to increase field angle as far as possible, employed in this method
Galvanometer need work in same resonance frequency.But between independent galvanometer resonance frequency difference, scanning angle can be made to occur
Beat frequency, it is unstable so as to cause scanning field of view, occur some regions do not scan, some regions scanning speed quickly the problems such as.
Further, since the quality factor (Q value) of galvanometer are higher, bandwidth is smaller, drives independent galvanometer using same frequency,
The problem that field angle can be easy to cause minimum.
To solve the technical problem, the present invention provides a kind of scanning means, comprising:
At least two galvanometers set gradually along optical path, the galvanometer have movement portion, and the movement portion, which has, to be suitable for instead
The reflecting surface of light is penetrated, the galvanometer changes the propagation of the light through the reflective surface by the swing in the movement portion
Direction；At least one elastic connection element, elastic connection element tool there are two end, described two ends respectively with it is adjacent
The movement portions of two galvanometers be connected.Technical solution of the present invention can even reduce processing and assembly not increasing
Under the premise of required precision, the swing in the movement portion of at least two galvanometer is made to be fused to same resonance by a phase bit
Mode, to take into account, cost is reduced and performance improves.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
With reference to Fig. 1, the light channel structure schematic diagram of technical solution of the present invention first embodiment is shown.
As shown in Figure 1, the scanning means includes: at least two galvanometers 110 set gradually along optical path, the galvanometer
110 have movement portion 111, and the movement portion 111 has the reflecting surface 111r suitable for reflection light, and the galvanometer 110 passes through institute
The swing in movement portion 111 is stated to change the direction of propagation of the light through reflecting surface 111r reflection；At least one elastic connection
Component 120, the elastic connection element 120 tool there are two end 121, described two ends 121 respectively with two adjacent institutes
The movement portion 111 for stating galvanometer 110 is connected.
The movement portion 111 of the galvanometer 110 of adjacent two is connected by the elastic connection element 120, therefore
The movement portion 111 of two adjacent galvanometers 110 can be realized with same resonance mode and be swung, even if resonance frequency is deposited
In the swing of difference, the movement portion 111 of two adjacent galvanometers 110 same resonance can be fused to by a phase bit
Mode, that is to say, that technical solution of the present invention can make under the premise of not increasing even reduces processing and assembly precision requirement
The swing in the movement portion 111 of at least two galvanometer 110 is fused to same resonance mode by a phase bit, to take into account
Cost reduces and performance improves.
Technical solution of the present invention is described in detail with reference to the accompanying drawing.
The galvanometer 110 includes the movement portion 111 with reflecting surface 111r, the received light for reflecting, and is passed through
The swing in the movement portion 111 changes the direction of propagation that light is formed by through reflecting surface 111r reflection, to form use
In the light of scanning.
In conjunction with reference Fig. 2, the light path schematic diagram that galvanometer forms scanning ray is shown.
The part of the surface in the movement portion 111 of the galvanometer 110 is the reflecting surface 111r, is projected to the reflecting surface 111r
Light reflected through the reflecting surface 111r, formed light 132a.
The galvanometer 110 has shaft 112, and the movement portion 111 is swung around the shaft 112；With the movement portion
111 swing, the reflecting surface 111r are also swung therewith.
It should be noted that Fig. 1 schematically shows only the shaft 112, it is described in one embodiment of this invention
The vertical paper setting of the axis of shaft 112；The movement portion 111 is swung around the shaft 112.But this setup is only
One example, the present invention are not intended to limit position and the set-up mode of the shaft.
As shown in Fig. 2, when the movement portion 111 around the shaft 112 turn over angle be α when, the reflecting surface 111r
The rotation of α angle occurs；It is formed at this point, being formed by light 132b through reflecting surface 111r reflection with when not rotating
Light 132a between angle be 2 α.So when 110 swing angle of galvanometer is α, through reflecting surface 111r institute shape
Field angle at light is 2 α.
It continues to refer to figure 1, the scanning means includes at least two galvanometers 110, and at least two galvanometer 110 is along optical path
It sets gradually, and the reflecting surface 111r of at least two galvanometer 110 is successively oppositely arranged, so that the light is in institute
State the direction of propagation for successively reflecting to change the light on reflecting surface 111r.
Therefore with the swing in the movement portion 111, the reflecting surface 111r multiple reflections through at least two galvanometer 110
The angle changing of the light direction of propagation also increase with it, so as to effectively extend the formed scanning ray of the scanning means
Field angle.
Specifically, light 131 projects as shown in Figure 1, the scanning means includes two galvanometers 110 along optical path setting
To the reflecting surface 111r of a galvanometer 110, light 132a is reflected to form through the reflecting surface 111r；In the galvanometer
110 movement portion 111 turn over angle be α when, formed light 132b, angle is 2 α between light 132a and light 132b, that is, is passed through
The field angle that one vibration mirror reflected is formed by light is 2 α.
The light 132a is projected on the reflecting surface 111r of another galvanometer 110, through another described described vibration
The reflecting surface 111r of mirror 110 reflects to form light 133a；The movement portion 111 of another galvanometer 110 also turns accordingly simultaneously
When crossing α, light 133b is formed, angle is 4 α between light 133a and light 133b, i.e., is formed by light through two vibration mirror reflecteds
The field angle of line is 4 α.
In the present embodiment, at least two galvanometer 110 design resonance frequency having the same.In the scanning means
The identical galvanometer 110 of setting design resonance frequency, the resonance mode of at least two galvanometer 110 is close, can effectively improve
The stability for the same resonance mode that at least two galvanometer 110 is fused to, advantageously ensure that scanning means stability and
Precision.
It should be noted that at least two galvanometer also can have different designs in other embodiments of the invention
Resonance frequency.Since quality factor q is the dimensionless physical quantity for indicating galvanometer damping property, the resonant frequency phase of galvanometer is also illustrated that
For the size of bandwidth, therefore the difference upper limit of the resonance frequency of at least two galvanometer depends on f/Q, wherein f is described
The resonance frequency of galvanometer, Q are quality factor.It should also be noted that, the galvanometer 110 includes MEMS galvanometer in the present embodiment.
MEMS galvanometer is set by the galvanometer 110 using in the scanning means, the collection of the scanning means can be effectively improved
Cheng Du improves the scan frequency of the scanning means.
As shown in Figure 1, the scanning means further includes at least one elastic connection element 120, the elastic connection element
120 are located between the movement portion 111 of two adjacent galvanometers 110, for realizing the fortune of two adjacent galvanometers 110
Elastic connection between dynamic portion 111.
Specifically, elastic deformation can occur for the elastic connection element 120, two of the elastic connection element 120
End 121 is connected with the movement portion 111 of two adjacent galvanometers 110 respectively.When same elastic connection element 120 connects
When the two movement portions 111 connect are swung, due to being that elasticity is connected between the two, the swing in described two movement portions 111
After stabilization the same resonance mode can be fused by a phase bit, that is to say, that even if two adjacent galvanometers 110
Resonance mode frequency has differences, and the swing in two movement portions 111 can be fused to same resonance mode, can either make two
The swing in a movement portion 111 is fused to same resonance mode, and can not increase the dress even reduced to described two galvanometers 110
With the requirement with machining accuracy, so that cost of implementation reduces and what performance improved takes into account.
For example, the resonance frequency of two galvanometers 110 shown in FIG. 1 is respectively 601Hz and 602Hz.Due to described two vibrations
Elastic connection is realized by the elastic connection element 120 between mirror 110；After stabilization, the movement of described two galvanometers 110
The swing in portion 110 can be fused to the same resonance mode, and the resonance frequency after coupling can be 601.5Hz.
Moreover, when the amplitude of fluctuation of described two galvanometers 110 is α, by the received light of scanning means institute according to
The secondary reflecting surface 111r reflection by two galvanometers 110, the field angle for being formed by the light for scanning is 4 α.
In order to realize the function of elastic connection, elastic shape can occur under external force for the elastic connection element 120
Become.In the present embodiment, the elastic connection element 120 includes: spring, such as helical spring, scroll spring or spring leaf etc..
In other embodiments of the invention, the connection structure of the elastic connection element 120 or resilient material.
In the present embodiment, the elastic connection element 120 production integrated with the movement portion 111, i.e., in the galvanometer
In 110 process, the elastic connection element 120 completes simultaneously with the movement portion 111.In the galvanometer 110
The production that elastic connection element 120 is realized in manufacturing process can effectively improve the production essence of the elastic connection element 120
Degree reduces cost of manufacture.
For example, in some embodiments, the galvanometer includes steel disc, the steel disc includes torsional axis and is attached thereto interior
Frame, the inside casing as the movement portion have smooth surface and the back opposite with the reflecting surface as the reflecting surface
Face；The galvanometer further includes being fixedly connected with portion, and the fixed part fits in the back side；The elastic connection element is from described solid
Determine interconnecting piece side to extend, and is integrally connected with the portion of being fixedly connected.
It should be noted that the elastic connection element can also be solid with the movement portion in other embodiments of the invention
Fixed to be connected, i.e., the described elastic connection element is fabricated separately after completion with the galvanometer and is fixedly linked again.Specifically, the elasticity
Two ends of connecting elements are fixed with the movement portion of two adjacent galvanometers by the modes such as being clamped, welding respectively
It is connected.It is fabricated separately the elastic connection element with the galvanometer, therefore the production and setting of the elastic connection element are not
It will affect the technical process of existing galvanometer.
The elastic connection element can either make with the movement integrally；It again can be solid again after completing
Fixed to be connected, the flexible set-up mode of elastic connection element can be effectively reduced the cost of manufacture of the scanning means.
It continues to refer to figure 1, at least two galvanometer 110 all has shaft 112, and the movement portion 111 is around the shaft
112 swing, and the shaft 112 of at least two galvanometer 110 is arranged in parallel；The elastic connection element 120 is set to
In the first plane (not shown) perpendicular with the shaft 112, and the elastic connection element 120 is flat described first
Elastic deformation is carried out in face.The elastic connection element 120 is arranged in first plane can make the elastic connection structure
Part 120 occurs elastically-deformable direction and is located in first plane, to make the elastic connection element 120 that elastic shape occur
The direction of change and the swaying direction of at least two galvanometer 110 match, effectively to realize the fusion of same resonance mode.
It should be noted that in the present embodiment, the movement portion 111 relative to first plane axisymmetricly structure,
And the elastic connection element 120 carries out elastic deformation in first plane, after stabilization is effectively ensured, institute
Stability and reliability that two movement portions 111 that elastic connection element 120 is connected are swung are stated, the scanning means is conducive to
The improvement of performance.
As shown in Figure 1, the movement portion 111 has at least one perpendicular with the reflecting surface 111r in the movement portion 111
End face (does not indicate) in figure；Described two ends 121 of the elastic connection element 120 respectively with two adjacent galvanometers
The end face in the 110 movement portion 110 is connected.
In the present embodiment, the shaft 112 of the galvanometer 110 of adjacent two defines the second plane and (does not show in figure
Out)；Two ends 121 for connecting the elastic connection element 120 of the galvanometer 110 of adjacent two are flat positioned at described second
Face it is ipsilateral.As previously mentioned, in the present embodiment, the setting of the shaft 112 vertical paper, therefore the second plane described in Fig. 1 is hung down
Directly in paper.
Specifically, the V-shaped setting in two movement portions 111 that the elastic connection element 120 is connected.So to realize institute
State the connection between the movement portion 111 of two galvanometers 110, in the present embodiment, the elastic connection element 120 is in V-shape, U-shaped
Any one shape in type or circular arc type.The received light 131 of scanning means institute with it is successively anti-through described two galvanometers 110
It is formed by light 133a or 133b after penetrating and is respectively positioned on the ipsilateral of second plane.In addition, two vibrations that connection is adjacent
Two ends 121 of the elastic connection element 120 of mirror 110 are located at the shaft 112 of two adjacent galvanometers 110
Definition the second plane it is ipsilateral.
It should be noted that as described in Figure 1, in the present embodiment, the galvanometer 110 is set as one-dimensional galvanometer, the movement
Portion 111 is around unique shaft swing；The elastic connection element 120 is connected between the movement portion of two one-dimensional galvanometers.
But this way is only an example, in other embodiments of the invention, the galvanometer may be arranged as 2-D vibration mirror, the bullet
Property connecting elements realizes the elastic connection between 2-D vibration mirror movement portion.
It should be noted that two connected movement portions 111 of the elastic connection element 120 are V-shaped to be set in the present embodiment
It sets.But this way is only an example, in other embodiments of the invention, according to different optical path demands, the elastic connection
Component can also be arranged with other shapes.
With reference to Fig. 3, the light channel structure schematic diagram of technical solution of the present invention second embodiment is shown.
The present embodiment and previous embodiment something in common, details are not described herein by the present invention.The present embodiment and previous embodiment
The difference is that in the present embodiment, connected two 211 less parallels of the movement portion setting of the elastic connection element 220.
Specifically, two ends 221 for connecting the elastic connection element 220 of two adjacent galvanometers 210 are divided
The two sides for the second plane that the shaft 212 of two galvanometers 210 that Wei Yu be not adjacent defines.It is described in the present embodiment
Elastic connection element 120 is set as any one shape in Z-shaped or S font, to connect the movement of described two galvanometers 210
Portion 211.
As shown in figure 3, in the present embodiment, the received light 231 of scanning means institute with through described two galvanometers 210 according to
The two sides that light 233a or 233b are located at second plane are formed by after secondary reflection.
It should be noted that as shown in figures 1 and 3, in first embodiment and second embodiment, vibration in the scanning means
The quantity of mirror is two.But this way is only an example, and in other embodiments of the invention, galvanometer in the scanning means
Quantity can be with more than two.
With reference to Fig. 4, the light channel structure schematic diagram of technical solution of the present invention 3rd embodiment is shown.
It is arranged specifically, the first galvanometer 310a, the second galvanometer 310b and the third galvanometer 310c are successively opposite
Column setting, light reflexes to the second galvanometer 310b through the first galvanometer 310a, then is reflected by the second galvanometer 310b
To the third galvanometer 310c.
In the present embodiment, the scanning means includes at least two elastic connection elements 320, is located at described the
Between one galvanometer 310a and the second galvanometer 310b and the second galvanometer 310b and the third galvanometer 310c.Described two
A elastic connection element 320 realizes the first galvanometer 310a and the second galvanometer 310b and second galvanometer respectively
Elastic connection between 310b and the third galvanometer 310c.Therefore, after stabilization, three galvanometers in the present embodiment can
Same resonance mode is fused to by a phase bit.
So when the amplitude of fluctuation of three galvanometers in the scanning means is α, in received 331 incidence side of light
Under the premise of constant, the field angle of the light 332 through the first galvanometer 310a reflection is 2 α, the light reflected through the second galvanometer 310b
The field angle of line 333 is 4 α, 8 α of field angle of the light through third galvanometer 310c reflection.As it can be seen that can be filled by the scanning
The setting of middle galvanometer quantity is set, the size of light field angle of the control for scanning is to meet the needs of various equipment.
It is the multiple even if multiple galvanometers are arranged in the scanning means and due to the setting of elastic connection element 320
The movement portion of galvanometer can still be realized with same resonance mode and be swung, and even can reduce to the multiple without improving
Galvanometer processing and assembly precision requirement.
Correspondingly, the present invention also provides a kind of laser radars, comprising: laser beam emitting device, scanning means and reception dress
It sets, the scanning means is scanning means provided by the present invention.
The laser beam emitting device includes laser, and the laser beam for detection is generated as light source.The present embodiment
In, the specific technical solution of the laser beam emitting device refers to the light source of existing laser radar, and the present invention repeats no more this.
The scanning means receives light caused by the laser beam emitting device to form scanning ray.The scanning dress
It is set to scanning means provided by the present invention.The specific technical solution of the scanning means refers to the implementation of aforementioned scanning means
Example, details are not described herein by the present invention.
It include at least two galvanometers being connected by elastic connection element elasticity in the scanning means, therefore described two
The movement portion of galvanometer can be realized with same resonance mode and be swung, even if resonance frequency has differences, two connected vibrations
The swing in the movement portion of mirror can be fused to same resonance mode by a phase bit, so as to not increase even reduction processing
Under the premise of requiring with assembly precision, it is fused to the swing in the movement portion of at least two galvanometer together by a phase bit
One resonance mode, to achieve the purpose that take into account, cost is reduced and performance improves.
Moreover, the reflecting surface of at least two galvanometer is successively oppositely arranged, described in some embodiments of the invention
Light caused by laser beam emitting device is projected to the scanning means, and successively reflects to change biography on the reflecting surface
Broadcast direction；With the swing in the movement portion, the light direction of propagation of the reflecting surface multiple reflections through at least two galvanometer
Angle changing also increase with it, so as to effectively extend the field angle of the formed scanning ray of the scanning means.
The scanning means is formed by scanning ray and reflects to form echo light through target to be detected.The reception device
It receives the echo light and photoelectric conversion is carried out to the echo light to form electric signal to realize detection.The present embodiment
In, the specific technical solution of the reception device refers to the reception device of existing laser radar, and the present invention repeats no more this.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (14)
1. a kind of scanning means characterized by comprising
At least two galvanometers set gradually along optical path, the galvanometer have movement portion, and the movement portion, which has, is suitable for reflected light
The reflecting surface of line, the galvanometer change the propagation side of the light through the reflective surface by the swing in the movement portion
To；
At least one elastic connection element, elastic connection element tool there are two end, described two ends respectively with it is adjacent
The movement portions of two galvanometers be connected.
2. scanning means as described in claim 1, which is characterized in that the reflecting surface of at least two galvanometer successively phase
To setting, so that the light successively reflects to change the direction of propagation of the light on the reflecting surface.
3. scanning means as described in claim 1, which is characterized in that at least two galvanometers design resonance having the same
Frequency.
4. scanning means as described in claim 1, which is characterized in that the elastic connection element includes: spring.
5. scanning means as described in claim 1, which is characterized in that the elastic connection element and the movement integrally
Production；
Alternatively, the elastic connection element is fixedly linked with the movement portion.
6. scanning means as claimed in claim 2, which is characterized in that at least two galvanometer all has shaft, the fortune
The portion of moving is around the shaft swing, and the shaft of at least two galvanometer is arranged in parallel；
The elastic connection element is set in the first plane perpendicular with the shaft, and the elastic connection element is in institute
It states and carries out elastic deformation in the first plane.
7. scanning means as claimed in claim 6, which is characterized in that the movement portion is in axis pair relative to first plane
Claim structure.
8. scanning means as claimed in claim 6, which is characterized in that the movement portion has at least one and the movement portion
The perpendicular end face of reflecting surface；
Described two ends of the elastic connection element are respectively and described in the movement portion of two adjacent galvanometers
End face is connected.
9. scanning means as claimed in claim 8, which is characterized in that the shafts of two adjacent galvanometers definition the
Two planes；
Two ends for connecting the elastic connection element of two adjacent galvanometers are located at the side of second plane.
10. scanning means as claimed in claim 8, which is characterized in that the shaft of two adjacent galvanometers defines
Second plane；
Two ends for connecting the elastic connection element of two adjacent galvanometers are located at second plane
Two sides.
11. scanning means as claimed in claim 8, which is characterized in that the elastic connection element is V-shape, U-shaped, circle
Any one shape in camber, Z-shaped or S font.
12. scanning means as described in claim 1, which is characterized in that the galvanometer includes MEMS galvanometer.
13. scanning means as described in claim 1, which is characterized in that the galvanometer is one-dimensional galvanometer or 2-D vibration mirror.
14. a kind of laser radar characterized by comprising laser beam emitting device, scanning means and reception device, it is described to sweep
Imaging apparatus is the scanning means as described in claim 1 to 13 any one.
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| CN201910034596.XA CN109765541B (en) | 2019-01-14 | 2019-01-14 | Scanning device and laser radar |
| PCT/CN2020/070853 WO2020147625A1 (en) | 2019-01-14 | 2020-01-08 | Scanning device and laser radar |
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| WO2020147625A1 (en) * | 2019-01-14 | 2020-07-23 | 上海禾赛光电科技有限公司 | Scanning device and laser radar |
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| CN109765541B (en) | 2020-11-24 |
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