CN107907993A - Resonant mode scanning mirror, scan method, the measuring method of angle and processing method - Google Patents
Resonant mode scanning mirror, scan method, the measuring method of angle and processing method Download PDFInfo
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- CN107907993A CN107907993A CN201711303151.4A CN201711303151A CN107907993A CN 107907993 A CN107907993 A CN 107907993A CN 201711303151 A CN201711303151 A CN 201711303151A CN 107907993 A CN107907993 A CN 107907993A
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- steel disc
- inside casing
- resonant mode
- scanning mirror
- angle
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
A kind of resonant mode scanning mirror, scan method, the measuring method of angle and processing method, the resonant mode scanning mirror include：Steel disc, magnet, driving coil and angle measurement coil, wherein：The steel disc includes：First torsional axis and the inside casing being attached thereto, the inside casing is provided with smooth surface, suitable for the reflected beams；The magnet is suitable for the magnetic field that single direction is produced in the horizontal plane of the steel disc；The driving coil is located at the inside casing of the steel disc, and during suitable for input driving current, the stress in the magnetic field that the magnet produces, drives the inside casing to rotate；The angle measurement coil is located at the inside casing of the steel disc, suitable for measuring the scanning angle of the inside casing.Using above-mentioned resonant mode scanning mirror, on the one hand the scanning of heavy caliber, wide-angle can be realized with relatively low cost；On the other hand, the method that the pressure drag used in MEMS technology or capacitance realize angular surveying is simplified, technique is simple, cost is low.
Description
Technical field
The present embodiments relate to technical field of environmental perception, more particularly to a kind of resonant mode scanning mirror, scan method, angle
The measuring method and processing method of degree.
Background technology
Continuous with automatic Pilot technology promotes, and resonant mode scanning mirror (i.e. galvanometer) formula laser radar is considered solid-state and swashs
An important technology route in optical radar scheme.Resonant mode scanning mirror can be used for the light beam of scanning light source transmitting, widely
Applied to micro- projection display system.Relative to traditional projection imaging, resonant mode scanning mirror can be used not only for laser pulse hair
When penetrating, reflected laser pulse be scanned, can be used for receive and reflected laser pulse echo-signal.
For the laser radar system of long range detection, it is desirable to which optics bore when resonant mode scanning mirror receives has larger
Size, such as, it is desirable to the diameter of scanning mirror minute surface is more than 7mm, and optical scan angle maximum in vertical direction can reach
It can reach 120 degree or so to 40 degree or so, optical scan angle maximum in the horizontal direction.
In existing products scheme, using MEMS (Micro Electromechanical Systems, MEMS)
Technique makes resonant mode scanning mirror, such as the two-dimensional scanning mirrors that company Microvision makes.Made using MEMS technology
Resonant mode scanning mirror minute surface size is typically small, and general diameter 1-2mm, the flatness of minute surface is difficult to ensure that, can not realize big
The resonant mode scanning mirror of bore and high scan angles, so as to influence resonant mode scanning mirror in the laser radar of long range detection
Using.
The content of the invention
The technical problem that the embodiment of the present invention solves is such as how relatively low cost, realizes a kind of heavy caliber, wide angle scanning
The resonant mode scanning mirror of degree.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of resonant mode scanning mirror, including：Steel disc, magnet, drive
Moving winding and angle measurement coil, wherein：The steel disc includes：First torsional axis and the inside casing being attached thereto, the inside casing are provided with
Smooth surface, suitable for the reflected beams；The magnet is suitable for the magnetic field that single direction is produced in the horizontal plane of the steel disc；The drive
Moving winding is located at the inside casing of the steel disc, suitable for input driving current when, the magnet produce magnetic field in stress, drive institute
State inside casing rotation；The angle measurement coil is located at the inside casing of the steel disc, suitable for measuring the scanning angle of the inside casing.
Alternatively, the steel disc further includes：Outline border and the second torsional axis, wherein：The inside and outside both direction of the outline border point
Axis connection is not reversed with first torsional axis and described second；The driving coil is located at the outline border of the steel disc, suitable for defeated
When entering driving current, the stress in the magnetic field that the magnet produces, by first torsional axis, drives the inside casing to rotate.
Alternatively, the shape of the outline border for it is following any one：Ellipse, circular ring shape and polygon.
Alternatively, the polygon is octagon.
Alternatively, the shape of the inside casing for it is following any one：Circular, square, ellipse, rectangle and diamond shape.
Alternatively, the smooth surface is minute surface.
Alternatively, the magnet is located at the upper side and lower side of the steel disc, relative to the steel disc in diagonal distribution and
Pole orientation both vertically and horizontally is contrary.
Alternatively, the magnet is located at the downside of the steel disc.
Alternatively, the driving current is alternating signal.
The embodiment of the present invention provides a kind of processing method of resonant mode scanning mirror, and above-mentioned is realized based on steel disc processing technology
A kind of steel disc of resonant mode scanning mirror.
The embodiment of the present invention provides a kind of scan method, using any of the above-described kind of resonant mode scanning mirror, in the drives line
Under the driving of circle, by the smooth surface the reflected beams of the inside casing, it is scanned.
The embodiment of the present invention provides a kind of measuring method of scanning angle, using any of the above-described kind of resonant mode scanning mirror, leads to
Cross the scanning angle that the angle measurement coil measures the inside casing.
The embodiment of the present invention provides a kind of computer-readable recording medium, is stored thereon with computer instruction, the calculating
The step of any of the above-described kind of scan method is performed during machine instruction operation.
The embodiment of the present invention provides a kind of computer-readable recording medium, is stored thereon with computer instruction, the calculating
The step of measuring method of any of the above-described kind of scanning angle is performed during machine instruction operation.
The embodiment of the present invention provides a kind of system, including memory and processor, and being stored with the memory can be in institute
The computer instruction run on processor is stated, the processor performs any of the above-described kind of scanning side when running the computer instruction
The step of method.
The embodiment of the present invention provides a kind of system, including memory and processor, and being stored with the memory can be in institute
The computer instruction run on processor is stated, the processor performs any of the above-described kind of scan angle when running the computer instruction
The step of measuring method of degree.
Compared with prior art, the technical solution of the embodiment of the present invention has the advantages that：
An embodiment of the present invention provides a kind of resonant mode scanning mirror based on steel disc processing technology, by being set on steel disc
Driving coil and angle measurement coil, on the one hand by driving coil, driving inside casing rotation, passes through the smooth surface reflected light of inside casing
Beam, can realize the scanning of heavy caliber, wide-angle with relatively low cost；On the other hand, scanning angle is realized by angle measurement coil
Measurement, simplify the method that the pressure drag used in MEMS technology or capacitance realize angular surveying, technique is simple, cost is low.
Further, driving coil is arranged at outline border, and passes through the first torsional axis, driving inside casing rotation, due to drives line
Circle is arranged on outline border, and outline border quality is larger, and frequency is relatively low, and inside casing remains to keep higher frequency, thus the first torsional axis and
Second torsional axis has larger difference on the frequency, so as to fulfill raster scanning.
Further, using oval outline border, be advantageously implemented the resonant mode scanning mirror of miniaturization, further reduce into
This.
Further, using octagon outline border, it is possible to reduce the distortion of oval outline border scanning pattern, lifting scanning property
Energy.
Further, magnet is arranged at the downside of steel disc, can discharge the space on the upside of steel disc, so as to fulfill sweeping for bigger
Retouch space and scanning angle.In addition, unilateral magnet installation is more convenient and simple, installation cost can be further reduced.
Brief description of the drawings
Fig. 1 is a kind of structure diagram of resonant mode scanning mirror provided in an embodiment of the present invention；
Fig. 2 is a kind of dimensional structure diagram of resonant mode scanning mirror provided in an embodiment of the present invention；
Fig. 3 is the dimensional structure diagram of another resonant mode scanning mirror provided in an embodiment of the present invention；
Fig. 4 is a kind of structure diagram of steel disc provided in an embodiment of the present invention；
Fig. 5 is the structure diagram of another steel disc provided in an embodiment of the present invention；
Fig. 6 is a kind of detail flowchart of scan method provided in an embodiment of the present invention；
Fig. 7 is a kind of detail flowchart of the measuring method of scanning angle provided in an embodiment of the present invention.
Embodiment
In existing products scheme, resonant mode scanning mirror is made using MEMS technology, minute surface size is typically small, usually straight
Footpath is 1-2mm, and the flatness of minute surface is difficult to ensure that, can not realize heavy caliber and the resonant mode scanning mirror of high scan angles, so that
Influence application of the resonant mode scanning mirror in the laser radar of long range detection.
An embodiment of the present invention provides a kind of resonant mode scanning mirror based on steel disc processing technology, by being set on steel disc
Driving coil and angle measurement coil, on the one hand by driving coil, driving inside casing rotation, passes through the smooth surface reflected light of inside casing
Beam, can realize the scanning of heavy caliber, wide-angle with relatively low cost；On the other hand, scanning angle is realized by angle measurement coil
Measurement, simplify the method that the pressure drag used in MEMS technology or capacitance realize angular surveying, technique is simple, cost is low.
It is understandable to enable above-mentioned purpose, feature and the beneficial effect of the present invention to become apparent, below in conjunction with the accompanying drawings to this
The specific embodiment of invention is described in detail.
Referring to Fig. 1, an embodiment of the present invention provides a kind of resonant mode scanning mirror 10, including：Steel disc 11, magnet 12, driving
Coil 13 and angle measurement coil 14, wherein：
The steel disc 11 includes：First torsional axis 111 and the inside casing 112 being attached thereto, the inside casing 112 is provided with smooth
Surface, suitable for the reflected beams.
The magnet 12 is suitable for the magnetic field that single direction is produced in the horizontal plane of the steel disc.
The driving coil 13 is located at the inside casing 112 of the steel disc, suitable for input driving current when, produced in the magnet 12
Stress in raw magnetic field, drives the inside casing 112 to rotate.
The angle measurement coil 14 is located at the inside casing 112 of the steel disc, suitable for measuring the scanning angle of the inside casing 112.
In specific implementation, when the magnet 12 is diagonally distributed relative to the steel disc 11, and in vertical direction and level
When the pole orientation in direction is contrary, the magnetic field of a single direction can be produced in the horizontal level where the steel disc 11.
The driving coil 13 under the driving of driving current, can be subject in magnetic field upper left side outwardly, lower right side Ampere force inwardly
Effect, so as to produce moment of torsion, drives the inside casing 112 to rotate, and carries out spacescan.
In specific implementation, when the driving coil 13 is located at the inside casing 112, by the driving coil 13 and institute
State inside casing 112 and belong to same physical entity, therefore the inside casing 112 is under the driving of the driving coil 13, can only be towards identical
Direction rotate., can be by the driving coil 13 and the inside casing 112 in order to provide the scanning space of bigger and scanning angle
It is arranged at different physical entities.
In an embodiment of the present invention, the steel disc 11 further includes：113 and second torsional axis 114 of outline border, wherein：It is described
The inside and outside both direction of outline border 113 is connected with first torsional axis 111 and second torsional axis 114 respectively.The driving
Coil 13 is located at the outline border 113 of the steel disc 11, suitable for input driving current when, the magnet 12 produce magnetic field in by
Power, by first torsional axis 111, drives the inside casing 112 to rotate.
Driving coil is arranged at outline border, and passes through the first torsional axis, driving inside casing rotation, since driving coil is arranged in
On outline border, outline border quality is larger, and frequency is relatively low, and inside casing remains to keep higher frequency, therefore the first torsional axis and second reverses
Axis has larger difference on the frequency, so as to fulfill raster scanning.
In specific implementation, the shape of the outline border 113 can be ellipse, or circular ring shape, can also be more
Side shape.
Using oval outline border, the resonant mode scanning mirror of miniaturization is advantageously implemented, is further reduced the cost.
In an embodiment of the present invention, the shape of the outline border 113 is octagon.
Using octagon outline border, it is possible to reduce the distortion of oval outline border scanning pattern, lifts scan performance.
In specific implementation, the size of the inside casing can be appointing in circular, square, oval, rectangle and diamond shape
Meaning is a kind of.
In specific implementation, the smooth surface can be minute surface, be suitable for the reflected beams.
In specific implementation, the driving current can be alternating signal.
In specific implementation, the magnet 12 can be located at the upper side and lower side of the steel disc 11, relative to the steel disc
11, in being diagonally distributed and being contrary in pole orientation both vertically and horizontally, can also be only located at the steel disc 11
Downside.
When magnet is located at the upper side and lower side of steel disc, and relative to steel disc it is diagonally distributed when, vertical direction can be set
Magnet poles direction on the contrary, the magnet poles direction of horizontal direction on the contrary, so that magnetic field is squeezed and is distributed in steel disc
The horizontal level at place.
When magnet is arranged at the downside of steel disc, the space on the upside of steel disc can be discharged, it is empty so as to fulfill the scanning of bigger
Between and scanning angle.In addition, unilateral magnet installation is more convenient and simple, installation cost can be further reduced.
Using above-mentioned resonant mode scanning mirror, by setting driving coil and angle measurement coil on steel disc, on the one hand pass through drive
Moving winding, driving inside casing rotation, by the smooth surface the reflected beams of inside casing, can realize heavy caliber, big with relatively low cost
The scanning of angle；On the other hand, the measurement of scanning angle is realized by angle measurement coil, simplifies the pressure drag used in MEMS technology
Or the method that capacitance realizes angular surveying, technique is simple, cost is low.
To more fully understand those skilled in the art and implementing the present invention, an embodiment of the present invention provides a kind of resonant mode
The dimensional structure diagram of scanning mirror, as shown in Figure 2.
Referring to Fig. 2, the resonant mode scanning mirror includes：Steel disc 21, relative to the steel disc 21 be in diagonally be distributed four pieces
Magnet 22, driving coil 23 and corner coil 24, wherein the steel disc 21 includes：First torsional axis 211, inside casing 212, second are turned round
Shaft 213 and outline border 214, the driving coil 23 are located at the outline border 214, and the corner coil 24 is located at the inside casing 212.
In specific implementation, the steel disc 21, magnet 22, the driving coil 23, the corner coil 24, described
First torsional axis 211, the inside casing 212, same Fig. 1 of position relationship and function of second torsional axis 213 and the outline border 214
The position relationship and function of shown respective modules, details are not described herein again.
In specific implementation, the magnet 22 is diagonally distributed relative to the steel disc 21, and in vertical direction and level side
To magnet poles direction be contrary so that where steel disc horizontal level produce a single direction magnetic field.The drive
Moving winding 23 under the driving of driving current, in magnetic field can be subject to upper left side outwardly, Ampere force is acted on inwardly for lower right side, from
And moment of torsion is produced, drive second torsional axis 213 and first torsional axis 211 to vibrate.When the driving current of input is friendship
During varying signal, the Ampere force that the driving coil 23 is subject to is also the alternating force of a corresponding frequencies, when vibration frequency with it is described
When second torsional axis 213 is consistent with the resonant frequency of first torsional axis 211, corresponding effect of vibration can be exaggerated, so that
Produce the torsion of a wide-angle and drive the inside casing 212 to rotate, carry out spacescan.
To more fully understand those skilled in the art and implementing the present invention, an embodiment of the present invention provides another resonance
The dimensional structure diagram of formula scanning mirror, as shown in Figure 3.
Referring to Fig. 3, the resonant mode scanning mirror includes：Steel disc 31, the magnet 32 positioned at the downside of steel disc 31, the steel
The function of piece 31 and the magnet 32 is with the function of the respective modules shown in Fig. 1, and details are not described herein again.
When magnet is arranged at the downside of steel disc, the space on the upside of steel disc can be discharged, it is empty so as to fulfill the scanning of bigger
Between and scanning angle.In addition, unilateral magnet installation is more convenient and simple, installation cost can be further reduced.
To more fully understand those skilled in the art and implementing the present invention, an embodiment of the present invention provides a kind of steel disc
Structure diagram, as shown in Figure 4.
Referring to Fig. 4, the steel disc 40 includes：First torsional axis 41, inside casing 42, the second torsional axis 43 and outline border 44, it is described
The shape of outline border 44 is ellipse, using oval outline border, is advantageously implemented the resonant mode scanning mirror of miniaturization, reduces cost.
First torsional axis 41, the inside casing 42, second torsional axis 43 and the outline border 44 position relationship and
Function is with the position relationship and function of the respective modules shown in Fig. 1, and details are not described herein again.
To more fully understand those skilled in the art and implementing the present invention, an embodiment of the present invention provides a kind of steel disc
Structure diagram, as shown in Figure 5.
Referring to Fig. 5, the steel disc 50 includes：First torsional axis 51, inside casing 52, the second torsional axis 53 and outline border 54, it is described
The shape of outline border 54 is octagon, using octagon outline border, it is possible to reduce the distortion of oval outline border scanning pattern, lifting scanning
Performance.
First torsional axis 51, the inside casing 52, second torsional axis 53 and the outline border 54 position relationship and
Function is with the position relationship and function of the respective modules shown in Fig. 1, and details are not described herein again.
An embodiment of the present invention provides a kind of processing method of resonant mode scanning mirror, realized based on steel disc processing technology above-mentioned
The steel disc of any resonant mode scanning mirror.
In specific implementation, can be realized based on steel disc processing technology the steel disc and it includes inside casing, first reverse
Axis, can also be realized based on steel disc processing technology the steel disc and it includes inside casing, the first torsional axis, outline border and second reverse
Axis.
Processing technology based on steel disc is conventional mechanical processing technique, and cost is low, easy to Project Realization, can manufacture milli
Meter level even the large scale scanning mirror of centimeter-scale.
In specific implementation, the smooth surface of the inside casing can be integrally manufactured on the inside casing by integration mode,
Extra load module can also be utilized to combine on the inside casing, the embodiment of the present invention is not limited.
To more fully understand those skilled in the art and implementing the present invention, an embodiment of the present invention provides a kind of scanning side
Method, using any of the above-described kind of resonant mode scanning mirror, under the driving of the driving coil, passes through the smooth table of the inside casing
Face the reflected beams, are scanned.
Referring to Fig. 6, an embodiment of the present invention provides a kind of scan method, may include steps of：
Step S601, receives laser pulse signal.
In specific implementation, the laser pulse of laser transmitting can be directly received, collimation or transmission can also be received
Laser pulse afterwards, the embodiment of the present invention are not limited.
Step S602, space, and the laser pulse echo-signal of reception space barrier reflection are reflexed to by laser pulse.
In specific implementation, using above-mentioned resonant mode scanning mirror, under the driving of driving coil, be able to will be swashed by swinging
Light pulse reflexes to the diverse location in space, and the laser pulse echo-signal of reception space barrier reflection at the same time.
Using above-mentioned scan method, heavy caliber, the spacescan of wide-angle can be realized, and obtain with relatively low cost
The echo-signal of barrier reflection.
The embodiment of the present invention provides a kind of computer-readable recording medium, is stored thereon with computer instruction, the calculating
During machine instruction operation the step of above-mentioned scan method.
The embodiment of the present invention provides a kind of system, including memory and processor, and being stored with the memory can be in institute
The computer instruction run on processor is stated, the processor performs the step of above-mentioned scan method when running the computer instruction
Suddenly.
To more fully understand those skilled in the art and implementing the present invention, the embodiment of the present invention provides a kind of scanning angle
Measuring method, using any of the above-described kind of resonant mode scanning mirror, pass through the scanning that the angle measurement coil measures the inside casing
Angle.
Referring to Fig. 7, an embodiment of the present invention provides a kind of measuring method of scanning angle, may include steps of：
Step S701, extracts the angle signal of angle measurement coil.
In specific implementation, the angle signal is produced by the angle measurement coil, can be used for calculating the side angle coil rotation
The angle turned.
Step S702, based on the angle signal, calculates and obtains scanning angle.
In specific implementation, difference that can be based on the angle signal and reference signal, calculates and obtains scanning angle.
Using the above method, the scanning angle of resonant mode scanning mirror can be obtained, so as to preferably evaluate resonant mode scanning
The scan performance of mirror.
The embodiment of the present invention provides a kind of computer-readable recording medium, is stored thereon with computer instruction, the calculating
During machine instruction operation the step of the measuring method of above-mentioned scanning angle.
The embodiment of the present invention provides a kind of system, including memory and processor, and being stored with the memory can be in institute
The computer instruction run on processor is stated, the processor performs the survey of above-mentioned scanning angle when running the computer instruction
The step of amount method.
One of ordinary skill in the art will appreciate that all or part of step in the various methods of above-described embodiment is can
To instruct relevant hardware to complete by program, which can be stored in a computer-readable recording medium, storage
Medium can include：ROM, RAM, disk or CD etc..
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, are not departing from this
In the spirit and scope of invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the scope of restriction.
Claims (10)
- A kind of 1. resonant mode scanning mirror, it is characterised in that including：Steel disc, magnet, driving coil and angle measurement coil, wherein：The steel disc includes：First torsional axis and the inside casing being attached thereto, the inside casing is provided with smooth surface, suitable for reflected light Beam；The magnet is suitable for the magnetic field that single direction is produced in the horizontal plane of the steel disc；The driving coil is located at the inside casing of the steel disc, suitable for input driving current when, the magnet produce magnetic field in Stress, drives the inside casing to rotate；The angle measurement coil is located at the inside casing of the steel disc, suitable for measuring the scanning angle of the inside casing.
- 2. resonant mode scanning mirror according to claim 1, it is characterised in thatThe steel disc further includes：Outline border and the second torsional axis, wherein：The inside and outside both direction of the outline border is respectively with described first Torsional axis and described second reverses axis connection；The driving coil is located at the outline border of the steel disc, suitable for input driving current when, the magnet produce magnetic field in Stress, by first torsional axis, drives the inside casing to rotate.
- 3. resonant mode scanning mirror according to claim 2, it is characterised in that the shape of the outline border is following any one Kind：Ellipse, circular ring shape and polygon.
- 4. resonant mode scanning mirror according to claim 3, it is characterised in that the polygon is octagon.
- 5. resonant mode scanning mirror according to any one of claims 1 to 4, it is characterised in that the shape of the inside casing be with Descend any one：Circular, square, ellipse, rectangle and diamond shape.
- 6. resonant mode scanning mirror according to claim 5, it is characterised in that the smooth surface is minute surface.
- 7. resonant mode scanning mirror according to claim 5, it is characterised in that the magnet be located at the steel disc upside and Downside, is contrary in diagonal distribution and in pole orientation both vertically and horizontally relative to the steel disc.
- 8. a kind of processing method of resonant mode scanning mirror, it is characterised in that claim 1 to 7 is realized based on steel disc processing technology Any one of them steel disc.
- 9. a kind of scan method, it is characterised in that using claim 1 to 7 any one of them resonant mode scanning mirror, described Under the driving of driving coil, by the smooth surface the reflected beams of the inside casing, it is scanned.
- 10. a kind of measuring method of scanning angle, it is characterised in that swept using claim 1 to 7 any one of them resonant mode Mirror is retouched, the scanning angle of the inside casing is measured by the angle measurement coil.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711303151.4A CN107907993A (en) | 2017-12-08 | 2017-12-08 | Resonant mode scanning mirror, scan method, the measuring method of angle and processing method |
| EP18886962.2A EP3722862A4 (en) | 2017-12-08 | 2018-12-07 | Laser radar system and control method thereof, method of obtaining scanning angle, and vehicle |
| KR1020207019292A KR20210006320A (en) | 2017-12-08 | 2018-12-07 | Laser radar system and its control method, scan angle acquisition method and vehicle |
| JP2020549857A JP7309743B2 (en) | 2017-12-08 | 2018-12-07 | LASER RADAR SYSTEM AND CONTROL METHOD THEREFOR, SCANNING ANGLE ACQUISITION METHOD, VEHICLE |
| PCT/CN2018/119684 WO2019109993A1 (en) | 2017-12-08 | 2018-12-07 | Laser radar system and control method thereof, method of obtaining scanning angle, and vehicle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711303151.4A CN107907993A (en) | 2017-12-08 | 2017-12-08 | Resonant mode scanning mirror, scan method, the measuring method of angle and processing method |
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| CN107907993A true CN107907993A (en) | 2018-04-13 |
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| CN201711303151.4A Pending CN107907993A (en) | 2017-12-08 | 2017-12-08 | Resonant mode scanning mirror, scan method, the measuring method of angle and processing method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108519673A (en) * | 2018-04-28 | 2018-09-11 | 重庆大学 | The scanning micro-mirror of integrated differential type angle transducer |
| CN109298405A (en) * | 2018-11-16 | 2019-02-01 | 上海禾赛光电科技有限公司 | A kind of scanning means |
| CN109991611A (en) * | 2019-04-30 | 2019-07-09 | 上海禾赛光电科技有限公司 | Two-dimensional scanner and its driving method |
| CN110726984A (en) * | 2019-11-05 | 2020-01-24 | 深圳市镭神智能系统有限公司 | Galvanometer and laser radar |
| CN111273435A (en) * | 2020-03-27 | 2020-06-12 | 昂纳信息技术（深圳）有限公司 | Micro-vibration mirror scanning structure, electric energy driving system and angle detection system |
| CN113359310A (en) * | 2020-03-06 | 2021-09-07 | 台湾东电化股份有限公司 | Optical element driving mechanism and optical system |
| CN115616530A (en) * | 2022-12-16 | 2023-01-17 | 青岛镭测创芯科技有限公司 | Laser radar optical scanning device |
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