CN111983623A - Two-dimensional scanning device and driving method thereof - Google Patents

Two-dimensional scanning device and driving method thereof Download PDF

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Publication number
CN111983623A
CN111983623A CN202010710883.0A CN202010710883A CN111983623A CN 111983623 A CN111983623 A CN 111983623A CN 202010710883 A CN202010710883 A CN 202010710883A CN 111983623 A CN111983623 A CN 111983623A
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axis
torsion arm
scanning
driving
component
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CN111983623B (en
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高永丰
向少卿
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Hesai Photonics Technology Co Ltd
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Hesai Photonics Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention provides a two-dimensional scanning device and a driving method thereof. The two-dimensional scanning device includes: a scanning unit and a driving unit; the scanning part comprises a scanning plate and a plurality of torsion arms extending along the direction of a first axis or a second axis, the first axis is perpendicular to the second axis, and the plurality of torsion arms comprise a first torsion arm extending along the first axis, a second torsion arm extending along the second axis and a third torsion arm extending along the direction parallel to the first axis; the driving part is suitable for driving the scanning part through a driving signal, and the first torsion arm, the second torsion arm and the third torsion arm are suitable for respectively oscillating at respective working frequencies under the action of the driving signal, wherein the second working frequency is greater than the first working frequency, and the third working frequency is an even multiple of the second working frequency, so that the scanning plate performs approximate raster type two-dimensional scanning on a target space.

Description

Two-dimensional scanning device and driving method thereof
The application is a divisional application of a Chinese patent application 201910367254.X (named as a two-dimensional scanning device and a driving method thereof) which is filed on 30.4.4.2019.
Technical Field
The invention relates to the technical field of laser detection, in particular to a two-dimensional scanning device and a driving method thereof.
Background
Lidar is an advanced detection method that combines laser technology with photoelectric detection technology. Laser radar is widely applied to the fields of automatic driving, traffic communication, unmanned aerial vehicles, intelligent robots, energy safety detection, resource exploration and the like due to the advantages of high resolution, good concealment, strong active interference resistance, good low-altitude detection performance, small volume, light weight and the like.
The laser radar can realize the deflection of a light beam by adopting a vibrating mirror, specifically, the vibrating mirror comprises a reflecting mirror, and a light beam can be emitted onto the reflecting mirror and then reflected to a target detection area by the reflecting mirror; the light beam can be deflected by swinging the reflector around two torsion arms which are arranged perpendicular to each other, and the reflected light beam moves along a preset track on the detection area to form an image. The swinging speeds of the reflector around the two torsion arms which are perpendicular to each other are generally different, the twisted arm with the relatively high swinging speed is called as a fast shaft according to the relative size of the swinging speeds, and correspondingly, the swinging of the reflector around the fast shaft is the swinging in the fast shaft direction, so that the reflector realizes the scanning in the fast shaft direction, and a light beam scanning track line in the fast shaft direction is obtained; and the twisted arm with relatively small swing speed is called as a slow axis, and accordingly, the swing of the reflecting mirror around the slow axis is the swing in the slow axis direction, so that the reflecting mirror realizes the scanning in the slow axis direction, and the light beam scanning track line in the slow axis direction is obtained.
In the laser radar based on the scanning galvanometer, the scanning track of the light beam is more in a zigzag shape, so that the quality of the obtained point cloud is low, and various problems exist in subsequent processing, for example, when the point cloud data of the scanning galvanometer is fused with the image data of a camera, the complexity of an algorithm is increased.
Disclosure of Invention
Referring to fig. 1 and 2, fig. 1 is a scanning track of a scanning galvanometer, and fig. 2 is another scanning track of the scanning galvanometer, and in fig. 1 and 2, a horizontal axis is a fast axis direction and a vertical axis is a slow axis direction. As described in the background art, the data fusion between the existing scanning galvanometer and the camera is complicated because the data of the camera is arranged in an orthogonal grid, and the point cloud data generated by the zigzag scanning track of the scanning galvanometer shown in fig. 1 is arranged in a non-orthogonal manner. In order to improve the matching degree of the data of the scanning galvanometer and the camera, the scanning galvanometer can be approximately in raster scanning as shown in fig. 2, and the generated point cloud data is in orthogonal arrangement, so that the data fusion algorithm of the scanning galvanometer and the camera can be simplified.
After a lot of experimental verification and theoretical derivation, the inventor finds that, in order to implement the grating scanning shown in fig. 2, the key point is that the offset of the scanning track formed by the reflected light beam of the scanning portion in the slow axis direction has a step waveform, and the step waveform can be decomposed into the sum of a low-frequency scanning waveform and a high-frequency sawtooth waveform, the frequency of the sawtooth waveform is twice of the motion frequency in the fast axis direction, and in order to achieve a larger amplitude in the slow axis of the scanning galvanometer, the first-order resonant frequency of the scanning galvanometer can be designed to be close to the working frequency, and the working frequency of the fast axis can be much higher than that of the slow axis, which results in that the slow axis with only the first-order resonant frequency hardly realizes the slow axis motion frequency twice of the fast. To solve this problem, a high-frequency mode with a scanning motion in the slow axis direction needs to be designed in the galvanometer so as to be close to twice the fast axis working frequency.
In order to implement such approximate-grating two-dimensional scanning without affecting the scanning mirror area and the mirror size of the scanning plate, an embodiment of the present invention provides a two-dimensional scanning apparatus, including: a scanning unit and a driving unit; the scanning section includes: a scan plate, and a plurality of torsion arms extending in a direction of a first axis or a second axis, the first axis and the second axis being mutually perpendicular, the plurality of torsion arms comprising: a first torsion arm extending along the first axis, a second torsion arm extending along the second axis, and a third torsion arm extending in a direction parallel to the first axis;
the driving part is suitable for driving the scanning part to swing through a driving signal, and the first torsion arm, the second torsion arm and the third torsion arm are suitable for oscillating at a first working frequency, a second working frequency and a third working frequency respectively under the action of the driving signal, wherein the second working frequency is greater than the first working frequency, and the third working frequency is an even multiple of the second working frequency, so that the scanning plate approximately performs grating type two-dimensional scanning on a target space. In the present application, the first torsion arm and the third torsion arm correspond to the slow axis, and the second torsion arm corresponds to the fast axis.
Optionally, the drive signal comprises a first drive component and a second drive component having different frequencies, the first torsion arm and the third torsion arm being adapted to oscillate at the first operating frequency and the third operating frequency, respectively, under the action of the first drive component, the second torsion arm being adapted to oscillate at the second operating frequency under the action of the second drive component;
the first drive component comprises a drive sub-component having a frequency twice the frequency of the second drive component, and the first drive component and the second drive component have the same initial phase.
Optionally, the first drive component further comprises a drive sub-component having a frequency four times the frequency of the second drive component.
Optionally, the first drive component comprises a first drive sub-component and a second drive sub-component; wherein the first torsion arm is adapted to oscillate at a first operating frequency under the influence of the first drive sub-component, the third torsion arm is adapted to oscillate at a third operating frequency under the influence of the second drive sub-component, the frequency of the second drive sub-component is twice the frequency of the second drive component, and the second drive sub-component and the second drive component have the same initial phase.
Optionally, the operating frequency of the first torsion arm is 1/2 of the scanning frame rate of the two-dimensional scanning device.
Optionally, the scanning unit further comprises: the outer frame, the said scanning board is set up in the said outer frame; the supporting part is arranged on the periphery of the outer frame, and a preset distance is reserved between the supporting part and the outer frame; the outer frame is coupled to the support part through the first torsion arm, the second torsion arm and the third torsion arm are connected to form a composite torsion arm, and the scanning plate is coupled to the outer frame through the composite torsion arm.
Optionally, the scanning part includes two first torsion arms symmetrically disposed at both sides of the outer frame with respect to the second axis; and/or the scanning part comprises two composite torsion arms formed by the second torsion arm and the third torsion arm, and the two composite torsion arms are symmetrically arranged on two sides of the scanning plate relative to the first axis.
Optionally, each of the third torsion arms includes a first sub torsion arm and a second sub torsion arm that are parallel to each other, the first sub torsion arm is coupled to the scan plate, the second sub torsion arm is coupled to the outer frame, and two ends of the second torsion arm are coupled to the first sub torsion arm and the second sub torsion arm, respectively; wherein the length of the first sub torsion arm is not greater than the diameter of the scan plate.
Optionally, the scanning device further includes two fourth torsion arms, two ends of the first sub torsion arm are coupled to the scanning plate through the two fourth torsion arms, respectively, and two ends of the second sub torsion arm are directly connected to the outer frame.
Optionally, the first and second sub torsion arms are symmetrically disposed with respect to the second axis.
Optionally, the outer frame is an ellipse, a major axis of the outer frame is collinear with the second axis, and a minor axis of the outer frame is collinear with the first axis; or the outer frame is rectangular.
An embodiment of the present invention further provides a driving method for a two-dimensional scanning device, which is used to drive the two-dimensional scanning device of the embodiment of the present invention, and the driving method includes: inputting a driving signal to the driving part, the driving signal being adapted to drive the scanning part to oscillate, the driving signal including a first driving component and a second driving component having different frequencies, the first torsion arm and the third torsion arm being adapted to oscillate at the first operating frequency and the second operating frequency, respectively, under the action of the first driving component, and the second torsion arm being adapted to oscillate at the third operating frequency under the action of the second driving component;
the first drive component includes a drive sub-component having a frequency twice a frequency of the second drive component, and the first drive component and the second drive component have the same initial phase.
Optionally, the first drive component further comprises a drive sub-component having a frequency four times the frequency of the second drive component.
Optionally, the first drive component is adapted to drive the scan plate to swing around the first axis, and the beam scan trajectory formed by the scan plate swinging around the first axis has a step waveform; the second drive component is adapted to drive the scan plate to oscillate about the second axis, and a beam scan trajectory formed by the oscillation of the scan plate about the second axis has a sinusoidal waveform.
Optionally, the first drive component comprises a first drive sub-component and a second drive sub-component, the first torsion arm is adapted to oscillate at the first operating frequency under the action of the first drive sub-component, the third torsion arm is adapted to oscillate at the third operating frequency under the action of the second drive sub-component, the frequency of the second drive sub-component is twice that of the second drive component, and the second drive sub-component and the second drive component have the same initial phase.
Optionally, the first driving sub-component is adapted to drive the scan plate to perform a slow-axis low-frequency oscillation around the first axis, and a light beam scanning track line formed by the slow-axis low-frequency oscillation of the scan plate around the first axis has a triangular waveform; the second driving sub-component is suitable for driving the scanning plate to do slow-axis high-frequency oscillation around the first axis, and a light beam scanning track line formed by the scanning plate doing the slow-axis high-frequency oscillation around the first axis has a sawtooth waveform.
Optionally, a frequency of the first driving sub-component is equal to 1/2 of a scanning frame rate of the two-dimensional scanning device, and a peak-to-peak value of the first driving sub-component is determined according to a maximum angle of view of the two-dimensional scanning device reached by swinging around the first axis.
Optionally, before the driving signal is input to the driving section, the driving method further includes: generating the drive signal.
Compared with the prior art, the technical scheme of the embodiment of the invention has the following beneficial effects:
the two-dimensional scanning device of the embodiment of the invention comprises a scanning part and a driving part. The first torsion arm, the second torsion arm and the third torsion arm of the scanning part are suitable for oscillating at a first working frequency, a second working frequency and a third working frequency respectively under the action of a driving signal, and the scanning plate rotates around the first axis, the second axis and the first axis respectively. Wherein the second operating frequency is greater than the first operating frequency, and the third operating frequency is an even multiple of the second operating frequency. By designing that the working frequencies of the three torsion arms meet a preset size relationship, the first torsion arm and the third torsion arm can be respectively used as a first-order modal torsion shaft and a high-order modal torsion shaft of the scanning motion of the scanning plate in the direction (such as the slow axis direction) around the first axis, and the second torsion arm can be used as a first-order modal torsion shaft of the scanning motion of the scanning plate in the direction (such as the fast axis direction) around the second axis.
Further, the scanning part further includes an outer frame and a support part, the outer frame is coupled to the support part through the first torsion arm, the second torsion arm and the third torsion arm are connected to each other to form a composite torsion arm, and the scanning plate is coupled to the outer frame through the composite torsion arm. The first torsion arm directly acts on the outer frame, the outer frame rotates to drive the scanning plate to rotate, the composite torsion arm directly acts on the outer frame and the scanning plate, the first torsion arm is correspondingly a slow shaft, the scanning plate is relatively small in mass and relatively high in working frequency, and the second torsion arm is correspondingly a fast shaft due to the fact that the common outer frame is relatively large in mass and relatively low in working frequency. Because the third torsion arm and the second torsion arm are connected, the space between the scanning plate and the outer frame can be reasonably utilized, the structural design is more compact, and the increase of the device area or the reduction of the mirror surface size of the scanning plate caused by additionally arranging the third torsion arm is avoided.
Further, the third torsion arm includes a first sub torsion arm and a second sub torsion arm that are parallel to each other, the first sub torsion arm is coupled to the scan plate, the second sub torsion arm is coupled to the outer frame, and two ends of the second torsion arm are coupled to the first sub torsion arm and the second sub torsion arm respectively; the length of the first torsion sub-arm is not greater than the diameter of the scanning plate, so that on one hand, the area of the whole scanning device which is possibly caused by the composite torsion arm of the I-shaped structure formed by the second torsion arm and the third torsion arm can be prevented from being increased, and on the other hand, the mirror surface size of the scanning plate can be prevented from being reduced caused by the composite torsion arm of the I-shaped structure formed by the second torsion arm and the third torsion arm under the condition that the size of the scanning device is fixed.
An embodiment of the present invention further provides a driving method for a two-dimensional scanning device, which is used to drive the two-dimensional scanning device of the embodiment of the present invention, and the driving method includes: the driving part is provided with a first torsion arm and a third torsion arm, the first torsion arm and the third torsion arm are suitable for oscillating at the first working frequency and the second working frequency respectively under the action of the first driving component, the second torsion arm is suitable for oscillating at the third working frequency under the action of the second driving component, and the scanning plate rotates around the first axis, the second axis and the first axis. Because the frequency of the first driving component is twice the frequency of the second driving component, the frequency of the scanning plate rotating around the first axis is approximately twice the frequency of the scanning plate rotating around the second axis, and because the first driving component and the second driving component have the same initial phase, the scanning plate can complete twice scanning position correction in the slow axis direction at the narrowing position of the two ends of the scanning line in the fast axis direction formed by the scanning plate rotating around the second axis, thereby realizing approximate grating type two-dimensional scanning. Further, the first driving component not only includes a driving subcomponent with a frequency twice that of the second driving component, but also includes a driving subcomponent with a frequency four times that of the second driving component, so that one or more high-frequency stepping small-angle corrections are superimposed at the narrowing positions of two ends of each fast axis direction scanning line of the scanning plate, so that the inclined fast axis direction scanning line approaches to a horizontal scanning line more, and thus, the grating type two-dimensional scanning is realized more accurately.
Further, the first drive component comprises a first drive sub-component and a second drive sub-component; wherein the first torsion arm oscillates at the first operating frequency in response to the first drive sub-component, the third torsion arm oscillates at the third operating frequency in response to the second drive sub-component, the first torsion arm can act as a slow-axis first-order mode torsion axis due to the frequency of the second drive sub-component being higher than the frequency of the first drive sub-component, the operating frequency of the first torsion arm determines a scan frame frequency of the two-dimensional scanning apparatus, and the maximum amplitude of the first torsion arm determines a maximum scan field of view that can be reached by the two-dimensional scanning apparatus swinging around the first axis; and because the frequency of the second driving sub-component is 2 times of the frequency of the second driving sub-component, and the second driving sub-component have the same initial phase, the third torsion arm can be used as a slow-axis high-order torsion shaft to superpose high-frequency small-angle correction signals at the narrowing positions of two ends of a scanning line obtained by fast-axis scanning, so that the fast-axis scanning line of the scanning plate completes step movement in the slow-axis direction at the two ends of the scanning line, and further approximate raster type two-dimensional scanning is realized.
Drawings
FIG. 1 is a scan trace of a scanning galvanometer;
FIG. 2 is another scan trajectory of the scanning galvanometer;
FIG. 3 is a schematic diagram of the scanning galvanometer 10 of one embodiment of the present invention;
fig. 4 is a block diagram of a two-dimensional scanning device 20 according to another embodiment of the present invention;
fig. 5 is a motion waveform and an exploded view of a scanning track line formed by a reflected light beam of the scanning portion 21 according to an embodiment of the present invention under the action of a driving signal received by the driving portion 22;
fig. 6 is a block diagram of a two-dimensional scanning device 30 according to another embodiment of the present invention;
fig. 7 is a schematic structural diagram of the scanning unit 31 of the two-dimensional scanning device 30 according to an embodiment of the present invention;
fig. 8 is a schematic view of a motion mode of the scanning unit 31 of the two-dimensional scanning device 30 shown in fig. 7;
fig. 9 is a flowchart of a driving method of a two-dimensional scanning apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts in the embodiments are referred to each other.
As described above, in the conventional laser radar based on the scanning galvanometer, the scanning track of the light beam is often in a zigzag shape, so that the quality of the obtained point cloud is low, and various problems may occur in the subsequent processing.
In order to realize approximate raster type two-dimensional scanning, the invention provides various embodiments of two-dimensional scanning devices. For example, referring to fig. 3, fig. 3 is a schematic structural diagram of a scanning galvanometer 10 according to an embodiment of the present invention. The scanning galvanometer 10 comprises a first torsion arm 11 and a third torsion arm 13 which extend along a first axis, a second torsion arm 12 which extends along a second axis, a scanning plate 15 and an outer frame 16. The object generates a dynamic response under external excitation, and the mode can be used for analyzing the state of the dynamic response of the object under the excitation state, wherein the first torsion arm 11 can be used as a slow-axis first-order mode torsion shaft, the second torsion arm 12 can be used as a fast-axis first-order mode torsion arm, and the third torsion arm 13 can be used as a slow-axis high-frequency mode torsion shaft. The high-frequency mode of the third torsion arm 13 can superimpose high-frequency small-angle correction signals at the narrowing positions of the two ends of the scanning line obtained by fast axis scanning, so that the fast axis scanning line of the scanning plate 15 completes step movement in the slow axis direction at the two ends thereof. However, since the third torsion arm 13 occupies a part of the space originally belonging to the scanning plate 15, the structure of the galvanometer in this embodiment is not compact enough, which may increase the device area or reduce the size of the mirror surface.
Further, in order to realize such approximate grating type two-dimensional scanning without affecting the area of the scanning galvanometer and the size of the mirror surface of the scanning plate, the embodiment of the present invention provides another two-dimensional scanning apparatus. Specifically, referring to fig. 4, fig. 4 is a block diagram of a two-dimensional scanning device 20 according to another embodiment of the present invention. In some embodiments, the two-dimensional scanning device 20 may include a scanning section 21 and a driving section 22.
The scanning unit 21 includes a scanning plate 210, and a plurality of torsion arms extending in a direction of a first axis or a second axis, the first axis and the second axis being perpendicular to each other, the plurality of torsion arms including: a first torsion arm 211 extending along a first axis, a second torsion arm 212 extending along a second axis, and a third torsion arm 213 extending in a direction parallel to the first axis.
In some embodiments, the third torsion arm 213 and the first torsion arm 211 are not collinear.
In some embodiments, the scanning part 21 may include two first torsion arms 211, two second torsion arms 212, and two third torsion arms 213, the two first torsion arms 211 being symmetrically disposed on both sides of the scanning plate 210 with respect to the second axis, the two second torsion arms 212 being symmetrically disposed on both sides of the scanning plate 210 with respect to the first axis, and the two third torsion arms 213 being symmetrically disposed on both sides of the scanning plate 210 with respect to the first axis.
The driving part 22 is adapted to drive the scanning part 21 by a driving signal, and the first torsion arm 211, the second torsion arm 212 and the third torsion arm 213 can oscillate at a first operating frequency, a second operating frequency and a third operating frequency under the action of the driving signal, and correspondingly, the scanning plate 210 rotates at a low frequency around the first axis, rotates at a high frequency around the second axis and rotates at a higher frequency around the first axis, wherein the third operating frequency is greater than the second operating frequency, and the third operating frequency is an even multiple of the second operating frequency, so that the scanning plate 210 performs an approximately raster-type two-dimensional scanning on the target space.
For any torsion arm, the torsion arm resonates (or resonates) when the excitation frequency of the outside world is equal to its natural frequency. When the first torsion arm 211, said second torsion arm 212 and said third torsion arm 213 are all operated in the resonance state, the "operation frequency" referred to herein is approximately equal to the resonance frequency of each torsion arm.
It should be noted that, during the operation of the first torsion arm 211, the second torsion arm 212, and the third torsion arm 213 in response to the driving signal, there is no specific sequence. Also, in order to improve immunity to interference, in an implementation, first torsion arm 211 may also operate in a non-resonant state. Therefore, it is possible to control the two-dimensional scanning device 20 to perform two-dimensional scanning of an approximate raster pattern on the target space by designing the natural frequencies of each of the first torsion arm 211, the second torsion arm 212, and the third torsion arm 213, and inputting the driving signal having the predetermined waveform and the predetermined frequency.
In some embodiments, the driving signal may include a first driving component and a second driving component having different frequencies, and the first torsion arm 211 and the third torsion arm 213 may oscillate at the first operating frequency and the third operating frequency, respectively, in response to the first driving component under the driving action of the first driving component, and the second torsion arm 212 may oscillate at the second operating frequency in response to the second driving component under the driving action of the second driving component. Wherein the third operating frequency may be twice the first operating frequency, and the first driving component and the second driving component have the same initial phase.
In some embodiments, the first driving component may additionally include a driving sub-component with a frequency four times the frequency of the second driving component on the basis of including a driving sub-component with a frequency two times the frequency of the second driving component, and further may even additionally include a driving sub-component with a frequency six times the frequency of the second driving component, so that the tilted fast axis scanning line, i.e., the beam scanning track line realized by swinging around the fast axis, may be closer to the horizontal scanning line, so as to realize the grating scanning more accurately. Accordingly, the two-dimensional scanning device 20 should further add at least two torsion arms capable of generating resonance under the driving action of the quadruple frequency driving sub-component, and even further add at least two torsion arms capable of generating resonance under the driving action of the quadruple frequency driving sub-component. In other words, the driver sub-components and the torsion arms are arranged to cooperate to adjust the composition of the driver sub-components, and cooperatively, the torsion arms are arranged to respond to the driver sub-components.
In other embodiments, the first driving component may further include a driving sub-component having a frequency eight times, even an even number of times, such as ten times, the frequency of the second driving component, which is not described herein again, but these are within the protection scope of the present invention.
In some embodiments, the operating frequency of the first torsion arm 211 is 1/2 of the scanning frame rate of the two-dimensional scanning device 20.
Referring to fig. 5, fig. 5 is a motion waveform and a decomposition waveform diagram of a scanning trace of a light beam formed by deflecting a reflected light beam by the scanning portion 21 swinging under the action of a driving signal received by the driving portion 22, a horizontal axis represents time, a vertical axis represents the magnitude of a light beam offset, for any time, a position where the vertical axis is zero is a light beam offset corresponding to an equilibrium position, the equilibrium position is a position where a plane of the scanning plate is parallel to an axis perpendicular to an axis, such as a position where the scanning plate swings around a first axis, and the equilibrium position is a position where the plane of the scanning plate is parallel to a second axis.
In some embodiments, the driving signal received by the driving portion 22 can be decomposed into a first driving component and a second driving component, the first driving component is suitable for driving the scanning plate 210 to swing around the first axis, and the scanning track of the light beam formed by the scanning plate 210 swinging around the first axis has a step waveform S1. The second driving component is adapted to drive the scanning plate 210 to swing around the second axis, and the scanning track of the light beam formed by the scanning plate 210 swinging around the second axis has a sinusoidal waveform S2. Wherein the first driving component can be decomposed into a first driving sub-component and a second driving sub-component, the first driving sub-component is suitable for driving the scan plate 210 to oscillate around the first axis with a low frequency of the slow axis, and the scan trajectory formed by the scan plate 210 oscillating around the first axis with the low frequency of the slow axis has a triangular waveform S11; the second driving sub-component is adapted to drive the scan plate 210 to perform a slow-axis high-frequency oscillation around the first axis, and a scan locus formed by the slow-axis high-frequency oscillation of the scan plate 210 around the first axis has a sawtooth waveform S12. The first torsion arm 211 oscillates at a first operating frequency in response to the driving of the first driving sub-component, the second torsion arm 212 oscillates at a second operating frequency in response to the driving of the second driving sub-component, the third torsion arm 213 oscillates at a third operating frequency in response to the driving of the second driving sub-component, the frequency of the second driving sub-component is 2 times the frequency of the second driving component, and the second driving sub-component and the second driving component have the same initial phase. Thus, the frequency of the rotation of the scanning plate around the third torsion arm is twice that of the rotation of the second torsion arm, so that the light beam deflected by the scanning plate approximately realizes two-dimensional raster scanning of the target detection area.
Under the action of the first driving sub-component, the second driving sub-component and the second driving component, the first torsion arm 211 can be used as a slow-axis first-order modal torsion shaft, the second torsion arm 212 can be used as a fast-axis first-order modal torsion shaft, the third torsion arm 213 can be used as a slow-axis high-order modal torsion shaft, the working frequency of the slow-axis high-order modal torsion shaft is twice of the working frequency of the fast-axis first-order modal torsion shaft, the third torsion arm can be used as a slow-axis high-order torsion shaft, and high-frequency small-angle correction signals are superposed at the narrowing positions at two ends of a scanning track line obtained by fast-axis scanning, so that the fast-axis scanning track line of the scanning plate completes step movement in the slow-axis direction at the two ends of the scanning track line, and therefore two-dimensional scanning similar to a raster type can be realized.
In order to make the present invention easier for those skilled in the art to implement, the embodiment of the present invention further provides another two-dimensional scanning apparatus 30. Referring to fig. 6 and 7, fig. 6 is a block diagram of a two-dimensional scanning device 30 according to another embodiment of the present invention, and fig. 7 is a schematic structural diagram of a scanning unit 31 of the two-dimensional scanning device 30 according to an embodiment of the present invention.
The two-dimensional scanning device 30 includes a scanning section 31 and a driving section 32, the scanning section 31 including a scanning plate 310, a first torsion arm 311 extending along a first axis, a second torsion arm 312 extending along a second axis, and a third torsion arm 313 extending in a direction parallel to the first axis, the first axis and the second axis being perpendicular to each other. In some embodiments, the third torsion arm 313 is non-collinear with the first torsion arm 311.
The driving portion 32 is adapted to drive the scanning portion 31 to swing through a driving signal, the first torsion arm 311, the second torsion arm 312 and the third torsion arm 313 are adapted to oscillate at a first operating frequency, a second operating frequency and a third operating frequency respectively under the action of the driving signal, the scanning plate 310 swings at a low frequency around the first axis, rotates at a high frequency around the second axis, and swings at a small angle at a high frequency around the first axis, wherein the second operating frequency is greater than the first operating frequency, and the third operating frequency is an even multiple of the second operating frequency, so that the scanning plate 310 performs an approximately raster-type two-dimensional scanning on a target space.
In some embodiments, the scanning portion 31 further includes an outer frame 315 and a supporting portion 316 (shown in fig. 6 and not shown in fig. 7). The scan plate 310 is disposed in the outer frame 315, and the support portion 316 is disposed at the periphery of the outer frame 315 and has a predetermined distance from the outer frame 315. The outer frame 315 is coupled to the supporting portion 316 through the first torsion arm 311, the second torsion arm 312 and the third torsion arm 313 are connected to form an i-shaped composite torsion arm 314, and the scan plate 310 is coupled to the outer frame 315 through the composite torsion arm 314.
In some embodiments, the scan plate 310 has a flat mirror or mirror disposed thereon, the flat mirror or mirror having a smooth surface adapted to reflect the light beam. The support portion 316 is adapted to provide support for the first torsion arm 311, and is spatially fixed.
As shown in fig. 6, in some embodiments, the scanning part 31 may include two first torsion arms 311, the two first torsion arms 311 are symmetrically disposed on both sides of the outer frame 315 with respect to the second axis, the scanning part 31 may further include two composite torsion arms 314 formed by connecting the second torsion arm 312 and the third torsion arm 313 to each other, and the two composite torsion arms 314 are symmetrically disposed on both sides of the scanning plate 310 with respect to the first axis and located in a space between the outer frame 315 and the scanning plate 310.
In some embodiments, the third torsion arm 313 includes a first sub torsion arm 313a and a second sub torsion arm 313b that are parallel to each other, the first sub torsion arm 313a is coupled to the scan plate 310, the second sub torsion arm 313b is coupled to the outer frame 315, and two ends of the second torsion arm 312 are directly connected to the first sub torsion arm 313a and the second sub torsion arm 313b, respectively. In other words, the first sub torsion arm 313a and the second sub torsion arm 313b are disposed parallel to each other, but not collinear, and the first sub torsion arm 313a is relatively closer to the scan plate 310, and the second sub torsion arm 313b is relatively closer to the outer frame 315.
Specifically, both ends of the second torsion arm 312 may be directly connected to a midpoint of the first sub torsion arm 313a and a midpoint of the second sub torsion arm 313b, respectively, to form an i-shaped composite torsion arm 314. The natural frequency of the first sub torsion arm 313a and the natural frequency of the second sub torsion arm 313b may be equal.
In some embodiments, the length of the first torsion sub-arm 313a is not greater than the diameter of the scan plate 310, so that on one hand, the increase in the area of the scan portion 31 due to the "i" shaped design of the second torsion sub-arm 312 and the third torsion sub-arm 313 can be avoided, and on the other hand, the reduction in the mirror surface size of the scan plate 310 due to the "i" shaped design of the second torsion sub-arm 312 and the third torsion sub-arm 313 can be avoided with a fixed size of the two-dimensional scan device.
In some embodiments, there are two each of the first and second sub torsion arms 313a and 313b, and two each of the first sub torsion arms 313a are symmetrically disposed with respect to the first axis, and two each of the second sub torsion arms 313b are symmetrically disposed with respect to the first axis, and each of the first sub torsion arms 313a is symmetrically disposed with respect to the second axis, and each of the second sub torsion arms 313b is symmetrically disposed with respect to the second axis.
In some embodiments, the two-dimensional scanning device 30 further includes two fourth torsion arms 317 (as shown in fig. 7), two ends of the first sub torsion arm 313a are respectively coupled to the scanning plate 310 through the two fourth torsion arms 317, and two ends of the second sub torsion arm 313b are directly connected to the outer frame 315. Specifically, the two fourth torsion arms 317 may extend in a direction parallel to the second axis, respectively, and be symmetrical about the second axis.
In some embodiments, the outer frame 315 can be an oval, a major axis of the outer frame 315 can be collinear with the second axis, and a minor axis of the outer frame 315 can be collinear with the first axis.
In other embodiments, the outer frame 315 may be a rectangle, the length of the rectangle may be parallel to the second axis, and the width of the rectangle may be parallel to the first axis.
In other embodiments, the outer frame 315 may have other shapes, which is not limited in this embodiment of the invention.
In some embodiments, the scan plate 310 may be circular, and the scan plate 310 is disposed concentrically with the outer frame 315. The scanning plate 310 may be provided with a flat mirror throughout, and the flat mirror may be provided to reflect the light beam throughout the entire surface of the scanning plate 310, or a portion of the scanning plate 310 may be provided with a flat mirror and the portion of the scanning plate 310 may be provided with a light beam.
In some embodiments, the driving portion 32 may include an electromagnetic component, for example, a magnet and a driving coil, the magnet is adapted to generate a magnetic field having a magnetic field component in a plane in which the driving coil is located, the driving coil may be disposed on the scanning portion 31, and the driving coil is adapted to receive a driving current signal and rotate under force in the magnetic field to drive the scanning portion 31 to generate a periodic motion.
In some embodiments, the driving part 32 may further include a signal generator adapted to input a driving signal having a specific waveform and frequency to the driving coil.
Similarly to the foregoing embodiment, the two-dimensional scanning device 31 may be controlled to perform approximately raster two-dimensional scanning on the target space by designing the natural frequencies of each of the first torsion arm 311, the second torsion arm 312, and the third torsion arm 313, and inputting the driving signal having the predetermined waveform and the predetermined frequency. In this embodiment, the response of the plurality of driving components included in the driving signal and the response of the first torsion arm 311, the second torsion arm 312, and the third torsion arm 313 to each driving component can refer to the embodiments shown in fig. 4 to 5, and details thereof are not repeated here.
Referring to fig. 8, fig. 8 shows a motion mode of the scanning unit 31 of the two-dimensional scanning apparatus 30 shown in fig. 7, and fig. 8 can be regarded as a side view of fig. 7 in which components such as an outer frame are omitted.
The second torsion arm 312 oscillates under the action of the driving signal, and the scan plate 310 can rotate away from the equilibrium position, which is indicated by the dashed line in fig. 8.
The embodiment of the invention also provides a driving method of the two-dimensional scanning device, which is used for driving the two-dimensional scanning device in the previous embodiment of the invention.
Referring to fig. 9, fig. 9 is a flowchart of a driving method of a two-dimensional scanning apparatus according to an embodiment of the present invention. In some embodiments, the driving method includes step S43: inputting a driving signal to the driving portion, wherein the driving signal includes a first driving component and a second driving component having different frequencies, the first torsion arm and the third torsion arm oscillate at the first working frequency and the second working frequency respectively under the action of the first driving component, so that the scanning plate has a low-frequency oscillation and a high-frequency oscillation around the first axis, the second torsion arm oscillates at a third working frequency in response to the second driving component, and so that the scanning plate oscillates around the second axis at a high frequency.
Wherein the first drive component comprises a drive sub-component having a frequency that is twice the frequency of the second drive component such that the high frequency of rotation of the scan plate about the first axis under the influence of the drive signal is approximately twice the frequency of rotation of the scan plate about the second axis. In some embodiments, the first axis corresponds to a slow axis direction and the second axis corresponds to a fast axis direction. And the first driving component and the second driving component have the same initial phase, and the third torsion arm can be used as a slow-axis high-order torsion shaft to superpose high-frequency small-angle correction signals at the narrowing positions of two ends of a scanning line obtained by scanning a fast axis, so that the fast axis scanning line of the scanning plate completes step movement in the slow axis direction at the two ends of the fast axis scanning line, and further approximate grating type two-dimensional scanning is realized.
In some embodiments, the first driving component may include a driving sub-component with a frequency twice that of the second driving component, and further may additionally include a driving sub-component with a frequency four times that of the second driving component, and even further includes a driving sub-component with a frequency six times that of the second driving component, so that one or more small angle corrections of high frequency steps are superimposed on both ends of each fast axis scan line formed by the scan plate, so that the inclined fast axis scan line is closer to the horizontal scan line, thereby more accurately implementing the raster two-dimensional scan. In other embodiments, the first driving component may further include a driving sub-component having a frequency eight times, even ten times or even times the frequency of the second driving component.
In some embodiments, the first driving component is adapted to drive the scanning plate to swing around the first axis, and a scanning trajectory of the light beam formed by the scanning plate swinging around the first axis has a step waveform as shown by S1 in fig. 5. The second driving component is adapted to drive the scan plate to swing around the second axis, and a scanning trajectory of the light beam formed by the scan plate swinging around the second axis has a sinusoidal waveform as shown at S2 in fig. 5.
In some embodiments, the first drive component may comprise a first drive sub-component and a second drive sub-component. Wherein the first torsion arm oscillates at the first operating frequency in response to driving of the first drive sub-component, and the third torsion arm oscillates at the third operating frequency in response to driving of the second drive sub-component. The first torsion arm can be used as a first-order mode torsion shaft for the scanning movement of the scanning plate around the first axis direction, and the working frequency of the first-order mode torsion shaft determines the scanning frame frequency of the two-dimensional scanning device. And the frequency of the second driving subcomponent is twice the frequency of the second driving subcomponent, and the second driving subcomponent have the same initial phase, that is, the third torsion arm works in response to the driving of the second driving subcomponent, and can be used as a slow-axis high-order torsion axis of the scanning plate for scanning motion around the first axis, and is used for superimposing high-frequency small-angle correction signals at the narrowing positions at two ends of a fast-axis scanning line formed by the scanning plate scanning around the second axis, so that the fast-axis scanning line of the scanning plate generates step-type movement in the slow-axis direction at the two ends thereof, thereby realizing grating type scanning.
In some embodiments, the first driving sub-component is adapted to drive the scan plate to perform a slow-axis low-frequency oscillation around the first axis, and the scan trajectory formed by the slow-axis low-frequency oscillation of the scan plate around the first axis has a triangular waveform as shown in S11 of fig. 5. The second driving sub-component is adapted to drive the scan plate to perform slow-axis high-frequency oscillation around the first axis, and a scan track line formed by the scan plate performing the slow-axis high-frequency oscillation around the first axis has a sawtooth waveform as shown in S12 in fig. 5.
In some embodiments, the frequency of the first drive sub-component is equal to 1/2 of the scan frame rate of the two-dimensional scanning device, because the scan frame rate of the two-dimensional scanning device is mainly determined by the operating frequency of the first torsion arm. The peak-to-peak value of the first drive subcomponent may be determined in dependence on the maximum field of view of the two-dimensional scanning apparatus reached by swinging about the first axis, also referred to as slow-axis field of view, since the slow-axis field of view of the two-dimensional scanning apparatus is mainly determined by the maximum amplitude of the first torsion arm.
In some embodiments, before the driving signal is input to the driving part, the driving method may further include step S41: generating the drive signal. In particular, the driving signal may be a single driving signal, and the single driving signal may be a superposition of a plurality of driving signals.
In summary, the two-dimensional scanning apparatus of the embodiment of the invention includes a scanning portion and a driving portion. The first torsion arm, the second torsion arm and the third torsion arm of the scanning part are suitable for oscillating at a first working frequency, a second working frequency and a third working frequency respectively under the action of a driving signal, and the scanning plate rotates around the first axis, the second axis and the first axis respectively. Wherein the second operating frequency is greater than the first operating frequency, and the third operating frequency is an even multiple of the second operating frequency. By designing that the working frequencies of the three torsion arms meet a preset size relationship, the first torsion arm and the third torsion arm can be respectively used as a first-order modal torsion shaft and a high-order modal torsion shaft of the scanning motion of the scanning plate in the direction (such as the slow axis direction) around the first axis, and the second torsion arm can be used as a first-order modal torsion shaft of the scanning motion of the scanning plate in the direction (such as the fast axis direction) around the second axis.
Further, the scanning part further includes an outer frame and a support part, the outer frame is coupled to the support part through the first torsion arm, the second torsion arm and the third torsion arm are connected to each other to form a composite torsion arm, and the scanning plate is coupled to the outer frame through the composite torsion arm. The first torsion arm directly acts on the outer frame, the outer frame rotates to drive the scanning plate to rotate, the composite torsion arm directly acts on the outer frame and the scanning plate, the first torsion arm is correspondingly a slow shaft, the scanning plate is relatively small in mass and relatively high in working frequency, and the second torsion arm is correspondingly a fast shaft due to the fact that the common outer frame is relatively large in mass and relatively low in working frequency. Because the third torsion arm and the second torsion arm are connected, the space between the scanning plate and the outer frame can be reasonably utilized, the structural design is more compact, and the increase of the device area or the reduction of the mirror surface size of the scanning plate caused by additionally arranging the third torsion arm is avoided.
Further, the third torsion arm includes a first sub torsion arm and a second sub torsion arm that are parallel to each other, the first sub torsion arm is coupled to the scan plate, the second sub torsion arm is coupled to the outer frame, and two ends of the second torsion arm are coupled to the first sub torsion arm and the second sub torsion arm respectively; the length of the first torsion sub-arm is not greater than the diameter of the scanning plate, so that on one hand, the area of the whole scanning device which is possibly caused by the composite torsion arm of the I-shaped structure formed by the second torsion arm and the third torsion arm can be prevented from being increased, and on the other hand, the mirror surface size of the scanning plate can be prevented from being reduced caused by the composite torsion arm of the I-shaped structure formed by the second torsion arm and the third torsion arm under the condition that the size of the scanning device is fixed.
An embodiment of the present invention further provides a driving method for a two-dimensional scanning device, which is used to drive the two-dimensional scanning device of the embodiment of the present invention, and the driving method includes: the driving part is provided with a first torsion arm and a third torsion arm, the first torsion arm and the third torsion arm are suitable for oscillating at the first working frequency and the second working frequency respectively under the action of the first driving component, the second torsion arm is suitable for oscillating at the third working frequency under the action of the second driving component, and the scanning plate rotates around the first axis, the second axis and the first axis. Because the frequency of the first driving component is twice the frequency of the second driving component, the frequency of the scanning plate rotating around the first axis is approximately twice the frequency of the scanning plate rotating around the second axis, and because the first driving component and the second driving component have the same initial phase, the scanning plate can complete twice scanning position correction in the slow axis direction at the narrowing position of the two ends of the scanning line in the fast axis direction formed by the scanning plate rotating around the second axis, thereby realizing approximate grating type two-dimensional scanning. Further, the first driving component not only includes a driving subcomponent with a frequency twice that of the second driving component, but also includes a driving subcomponent with a frequency four times that of the second driving component, so that one or more high-frequency stepping small-angle corrections are superimposed at the narrowing positions of two ends of each fast axis direction scanning line of the scanning plate, so that the inclined fast axis direction scanning line approaches to a horizontal scanning line more, and thus, the grating type two-dimensional scanning is realized more accurately.
Further, the first drive component comprises a first drive sub-component and a second drive sub-component; wherein the first torsion arm oscillates at the first operating frequency in response to the first drive sub-component, the third torsion arm oscillates at the third operating frequency in response to the second drive sub-component, the first torsion arm can act as a slow-axis first-order mode torsion axis due to the frequency of the second drive sub-component being higher than the frequency of the first drive sub-component, the operating frequency of the first torsion arm determines a scan frame frequency of the two-dimensional scanning apparatus, and the maximum amplitude of the first torsion arm determines a maximum scan field of view that can be reached by the two-dimensional scanning apparatus swinging around the first axis; and because the frequency of the second driving sub-component is twice of the frequency of the second driving sub-component, and the second driving sub-component have the same initial phase, the third torsion arm can be used as a slow-axis high-order torsion shaft to superpose high-frequency small-angle correction signals at the narrowing positions of two ends of a scanning line obtained by fast-axis scanning, so that the fast-axis scanning line of the scanning plate can complete stepped movement in the slow-axis direction at the two ends of the scanning line, and further approximate raster type two-dimensional scanning is realized.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (10)

1. A driving method of a two-dimensional scanning device including a scanning section and a driving section, wherein the scanning section includes: a scan plate and a plurality of torsion arms extending in a direction along a first axis or a second axis, the first axis and the second axis being mutually perpendicular, the plurality of torsion arms including a first torsion arm extending along the first axis, a second torsion arm extending along the second axis, and a third torsion arm extending in a direction parallel to the first axis; the driving part is suitable for driving the scanning part to swing through a driving signal, the first torsion arm, the second torsion arm and the third torsion arm are suitable for respectively oscillating at a first working frequency, a second working frequency and a third working frequency under the action of the driving signal, wherein the second working frequency is greater than the first working frequency, and the third working frequency is an even multiple of the second working frequency, so that the scanning plate approximately performs raster type two-dimensional scanning on a target space, and the driving method comprises the following steps:
inputting a driving signal to the driving part, the driving signal being adapted to drive the scanning part to swing, the driving signal including a first driving component and a second driving component having different frequencies, the first torsion arm and the third torsion arm being adapted to oscillate at the first operating frequency and the third operating frequency, respectively, under the action of the first driving component, and the second torsion arm being adapted to oscillate at the second operating frequency under the action of the second driving component;
the first drive component includes a drive sub-component having a frequency twice a frequency of the second drive component, and the first drive component and the second drive component have the same initial phase.
2. The driving method of claim 1, wherein the first drive component further comprises a drive sub-component having a frequency four times a frequency of the second drive component.
3. The driving method of claim 1, wherein the first driving component is adapted to drive the scan plate to oscillate about the first axis, and a beam scan trajectory formed by the scan plate oscillating about the first axis has a stepped waveform;
the second drive component is adapted to drive the scan plate to oscillate about the second axis, and a beam scan trajectory formed by the oscillation of the scan plate about the second axis has a sinusoidal waveform.
4. The driving method according to claim 1, wherein the first drive component includes a first drive sub-component and a second drive sub-component,
the first torsion arm is adapted to oscillate at the first operating frequency under the action of the first drive sub-component, the third torsion arm is adapted to oscillate at the third operating frequency under the action of the second drive sub-component, the frequency of the second drive sub-component is twice that of the second drive component, and the second drive sub-component and the second drive component have the same initial phase.
5. The driving method as recited in claim 4 wherein said first drive subcomponent is adapted to drive said scan plate in a slow-axis low frequency wobble about said first axis and wherein a beam trace formed by said slow-axis low frequency wobble of said scan plate about said first axis has a triangular waveform;
the second driving sub-component is suitable for driving the scanning plate to do slow-axis high-frequency oscillation around the first axis, and a light beam scanning track line formed by the scanning plate doing the slow-axis high-frequency oscillation around the first axis has a sawtooth waveform.
6. The driving method according to claim 4, wherein the frequency of the first driving subcomponent is equal to 1/2 of a scanning frame rate of the two-dimensional scanning device, and a peak-to-peak value of the first driving subcomponent is determined according to a maximum angle of view of the two-dimensional scanning device to which a swing about the first axis is reached.
7. The driving method according to claim 1, wherein before the driving signal is input to the driving section, the driving method further comprises: generating the drive signal.
8. The driving method according to claim 1, wherein the scanning section further includes:
the outer frame, the said scanning board is set up in the said outer frame; and
the supporting part is arranged on the periphery of the outer frame, and a preset distance is reserved between the supporting part and the outer frame;
the outer frame is coupled to the support part through the first torsion arm, the second torsion arm and the third torsion arm are connected to form a composite torsion arm, and the scanning plate is coupled to the outer frame through the composite torsion arm.
9. The driving method according to claim 8, wherein the scanning part includes two first torsion arms symmetrically disposed at both sides of the outer frame with respect to the second axis; and/or
The scanning part comprises two composite torsion arms formed by the second torsion arm and the third torsion arm, and the two composite torsion arms are symmetrically arranged on two sides of the scanning plate relative to the first axis.
10. The driving method according to claim 9, wherein each of the third torsion arms includes a first sub torsion arm and a second sub torsion arm which are parallel to each other, the first sub torsion arm is coupled to the scan plate, the second sub torsion arm is coupled to the outer frame, and both ends of the second torsion arm are coupled to the first sub torsion arm and the second sub torsion arm, respectively; wherein the length of the first sub torsion arm is not greater than the diameter of the scan plate;
the two-dimensional scanning device further comprises two fourth torsion arms, two ends of the first sub torsion arm are coupled with the scanning plate through the two fourth torsion arms respectively, and two ends of the second sub torsion arm are directly connected with the outer frame;
the first sub torsion arm and the second sub torsion arm are respectively symmetrical with respect to the second axis;
the outer frame is in an oval shape, the long axis of the outer frame is collinear with the second axis, and the short axis of the outer frame is collinear with the first axis; or the outer frame is rectangular.
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