CN106871885A - For the folded spring group and MEMS sensor of MEMS sensor - Google Patents
For the folded spring group and MEMS sensor of MEMS sensor Download PDFInfo
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- CN106871885A CN106871885A CN201510916566.3A CN201510916566A CN106871885A CN 106871885 A CN106871885 A CN 106871885A CN 201510916566 A CN201510916566 A CN 201510916566A CN 106871885 A CN106871885 A CN 106871885A
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- movable member
- folded spring
- mems sensor
- folded
- fixed component
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
For the folded spring group of MEMS sensor, including at least one folded spring, the folded spring connects a movable member and a fixed component, the movable member, fixed component and folded spring are set in the same plane, and the axial direction of the folded spring is vertical with the effective exercise direction of the movable member.
Description
Technical field
The present invention relates to micro mechanical technology field, more particularly, to the folded spring group and MEMS sensor of MEMS sensor.
Background technology
Using MEMS (Micro Electro Mechanical System, MEMS) technology manufacture accelerometer, the general principle of the product such as gyroscope and microphone be to calculate the numerical value of the signal by detecting motion state of the MEMS sensor movable member therein under outer signals.The movable member is generally known as mass.Therefore, the athletic posture of mass how is effectively controlled, is the problem that must be solved in MEMS sensor.
In order that the motion of mass is controllable, a kind of effective method is to apply elastic connecting element between mass and fixed component, is optimized by physical quantitys such as the coefficient of elasticity to the elastic connecting element, can effectively control the motion of mass.These elastic connecting elements can produce error in the fabrication process, and then the physical quantitys such as coefficient of elasticity is changed.Therefore the foozle of these elastic connecting elements how is reduced, is prior art problem demanding prompt solution.
The content of the invention
The technical problems to be solved by the invention are to provide folded spring group and MEMS sensor for MEMS sensor, reduce the foozle of elastic connecting element.
In order to solve the above problems, the invention provides a kind of folded spring group for MEMS sensor, including at least one folded spring, the folded spring connects a movable member and a fixed component, the movable member, fixed component and folded spring are set in the same plane, and the axial direction of the folded spring is vertical with the effective exercise direction of the movable member.
Optionally, the number of the folded spring group is two, each folded spring is connected to the movable member of identical one and a fixed component, the movable member, fixed component and folded spring are set in the same plane, the axial direction of each folded spring is vertical with the effective exercise direction of the movable member, and described two folded springs are axially disposed within same straight line.
Optionally, the side wall of the folded spring has one to be more than 0 degree and the angle less than 90 degree with the plane for setting the movable member, fixed component and folded spring.
Optionally, the MEMS sensor is gyroscope, and the movable member is selected from any one in detection mass and driving mass.
Present invention also offers a kind of MEMS sensor, including setting movable member in the same plane, fixed component and at least one folded spring, the folded spring connects a movable member and a fixed component, the movable member, fixed component and folded spring are set in the same plane, characterized in that, the axial direction of the folded spring is vertical with the effective exercise direction of the movable member.
Optionally, movable member is multiple, including X-direction is the movable member in effective exercise direction, and Y-direction is the movable member in effective exercise direction
Optionally, the MEMS sensor includes multigroup folded spring, the each group of number of folded spring is two, each of which folded spring is all connected with the movable member and fixed component, the axial direction of each folded spring is vertical with the effective exercise direction of the movable member being connected, and described two folded springs are axially disposed within same straight line.
Optionally, the side wall of the folded spring has one to be more than 0 degree and the angle less than 90 degree with the plane for setting the movable member, fixed component and folded spring.
Optionally, the MEMS sensor is gyroscope, and the movable member is selected from any one in detection mass and driving mass.
The axial direction of above-mentioned two folded spring is vertical with the effective exercise direction of the movable member, and two folded springs are axially disposed within same straight line.In the motion process of movable member, two retracted position contrasts of the folded spring along Impact direction with phase homonymy wall inclination angle, it is so just the opposite along bonding force outside the face of folding direction, therefore bonding force can be cancelled by two being symmetrical arranged for folded spring just outside the two faces, and then reduce bonding force outside the face brought due to manufacture deviation.
Brief description of the drawings
Accompanying drawing 1A and accompanying drawing 1B is the structural representation of the folded spring group for being used for MEMS sensor described in specific embodiment of the invention.
Accompanying drawing 2 is the structural representation of gyro described in specific embodiment of the invention.
Accompanying drawing 3 is the enlarged diagram of a movable member in structure shown in accompanying drawing 2.
Specific embodiment
The folded spring group and the specific embodiment of MEMS sensor provided by the present invention for MEMS sensor are elaborated below in conjunction with the accompanying drawings.
The specific embodiment of the folded spring group for MEMS sensor of the invention is given with reference to accompanying drawing first.
It is the structural representation of this specific embodiment shown in accompanying drawing 1A, including movable member 11, fixed component 10 and folded spring 12a and 12b.The movable member 11, fixed component 10 and folded spring 12a and 12b are arranged in same X/Y plane.The folded spring 12a is vertical with the axial direction of 12b and the effective exercise direction of the movable member 11, and described two folded springs are axially disposed within same straight line.In accompanying drawing 1A, the signal that movable member 11 is moved along the X direction is the useful signal that can be detected by comb electrodes 14, therefore X-direction is its effective exercise direction.
The effect of folded spring 12a and 12b is the motion amplitude for controlling movable member 11, by adjusting the physical-property parameter such as coefficient of elasticity of folded spring 12a and 12b, the motion of movable member 11 can be made to keep linear in the larger context.But because folded spring 12a and 12b easily produce deviation in the fabrication process, make it in addition to producing along the pulling force in drawing, can also produce the traction force at an angle with drawing, coupled referred to as outside face.It has been investigated that, folded spring in MEMS sensor is due to being to etch what is formed along the direction perpendicular to drawing using etching technics, therefore main foozle comes from etching technics along vertically producing one to be more than 0 degree and inclination angle less than 90 degree on the side wall of folded spring with the direction of drawing, for being usually used in manufacturing the single crystal silicon material of MEMS sensor, this inclination angle is less than 1 degree, does not make spring that obvious deformation occurs.But this etching inclination angle can make the symmetry of spring there occurs change, so as to generate bonding force outside face, and the direction of this outer bonding force of one side is determined by the direction at side wall inclination angle and the retracted position of spring.Movable member 11 along with fold vertical direction, when direction i.e. axially in parallel with spring is moved, the out-of-plane deformation of any two foldings symmetrical relative to spring center symmetrically, makes the out-of-plane deformation caused by inclination angle cancel out each other in folded spring, i.e., the two ends of folded beam can be in same level.So only burst can be caused to be coupled outside the face of folded beam by the out-of-plane deformation that inclination angle is caused, but the characteristics of because of folded spring due to its flat structure, cause to account for smaller along the perimeter side wall of folding direction, and it is larger along the perimeter side wall accounting perpendicular to folding direction, therefore the coupling can than in movable member 11 along small when being moved with folded parallel direction.Folded spring 12a is vertical with the axial direction of 12b and the effective exercise direction of the movable member 11, can so reduce bonding force outside the face produced in the motion process of movable member 11.And it is symmetrical arranged two folded springs 12a and 12b, and folded spring 12a and 12b is axially disposed within same straight line, and the motion state of movable member 11 can be made more stable, is a kind of more excellent technical scheme.
It is the structural representation of another specific embodiment of the folded spring group for MEMS sensor shown in accompanying drawing 1B, including movable member 11, fixed component 10 and folded spring 12c, 12d, 12e and 12f.The movable member 11, fixed component 10 and folded spring 12c, 12d, 12e and 12f are arranged in same X/Y plane.In this specific embodiment, the motion mode of movable member 11 is the reciprocating rotation in drawing, and effective exercise direction should be the tangential of rotational trajectory.Therefore, the axial direction of described folded spring 12c, 12d, 12e and 12f and the effective exercise direction of the movable member 11 are still that two vertical and relative folded springs are axially disposed within same straight line.Above-mentioned is set-up mode, also meets folded spring setting condition axially vertical with the effective exercise direction of movable member, therefore coupled outside generation face when movable member can also be avoided to move.
Next the specific embodiment of MEMS sensor of the invention is given by taking gyro as an example.It is the structural representation of gyro described in this specific embodiment shown in refer to the attached drawing 2, the gyro includes setting movable member 211,212,213 and 214 in the same plane, fixed component 20, and multiple folded springs.In this specific embodiment, movable member is 4, is arranged on a rood beam 23, is set up respectively along two Vertical Squares of X and Y.Fixed component 20 is the housing of gyro.In other specific embodiments, the MEMS sensor can also be other types of sensor, such as accelerometer.
It is the enlarged diagram of movable member 211 shown in accompanying drawing 3, described folded spring 32a, 32b, 32c and 32d connect the movable member 211 and fixed component 20.The axial direction of described folded spring 32a, 32b, 32c and 32d is vertical with the effective exercise direction of the movable member 211.For the gyro shown in accompanying drawing 2, the signal that movable member 211 is moved along the X direction is the useful signal that can be detected, therefore X-direction is its effective exercise direction.Folded spring 32a and 32b's is axially disposed within same straight line, and folded spring 32c and 32d's is axially disposed within same straight line.In the motion process of movable member 211, folded spring 32a is vertical with the axial direction of 32d and the effective exercise direction of the movable member 211 with 32b and 32c, can so reduce bonding force outside the face produced in the motion process of movable member 211.And being axially disposed within same straight line for two folded spring 32a and 32b and 32c and 32d is symmetrical arranged, the motion state of movable member 211 can be made more stable, be a kind of more excellent technical scheme.
Each in other movable members is connected also through folded spring with housing, and two axial directions of folded spring in described each group are vertical with the effective exercise direction of the movable member, and described two folded springs are axially disposed within same straight line.
The folded spring connects the movable member 213 and fixed component 20.The axial direction of the folded spring is vertical with the effective exercise direction of the movable member 213.The signal that movable member 213 is moved along the X direction is the useful signal that can be detected, therefore X-direction is its effective exercise direction.Folded spring is axially disposed within same straight line.In the motion process of movable member 213, the axial direction of folded spring is vertical with the effective exercise direction of the movable member 213, can so reduce bonding force outside the face produced in the motion process of movable member 213.And being axially disposed within same straight line for two folded spring 32a and 32b and 32c and 32d is symmetrical arranged, the motion state of movable member 213 can be made more stable, be a kind of more excellent technical scheme.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; some improvements and modifications can also be made, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (9)
1. a kind of folded spring group for MEMS sensor, including at least one folded spring, the folded spring connects a movable member and a fixed component, the movable member, fixed component and folded spring are set in the same plane, characterized in that, the axial direction of the folded spring is vertical with the effective exercise direction of the movable member.
2. the folded spring group for MEMS sensor according to claim 1, it is characterized in that, the number of the folded spring group is two, each folded spring is connected to the movable member of identical one and a fixed component, the movable member, fixed component and folded spring are set in the same plane, the axial direction of each folded spring is vertical with the effective exercise direction of the movable member, and described two folded springs are axially disposed within same straight line.
3. the folded spring group for MEMS sensor according to claim 1, it is characterised in that the side wall of the folded spring has to be more than 0 degree and the angle less than 90 degree with the plane for setting the movable member, fixed component and folded spring.
4. the folded spring group for MEMS sensor according to claim 1, it is characterised in that the MEMS sensor is gyroscope, the movable member is selected from detection mass and drives any one in mass.
5. a kind of MEMS sensor, including setting movable member in the same plane, fixed component and at least one folded spring, the folded spring connects a movable member and a fixed component, the movable member, fixed component and folded spring are set in the same plane, characterized in that, the axial direction of the folded spring is vertical with the effective exercise direction of the movable member.
6. MEMS sensor according to claim 5, it is characterised in that movable member is multiple, including X-direction is the movable member in effective exercise direction, and Y-direction is the movable member in effective exercise direction.
7. MEMS sensor according to claim 5, it is characterized in that, the MEMS sensor includes multigroup folded spring, the each group of number of folded spring is two, each of which folded spring is all connected with the movable member and fixed component, the axial direction of each folded spring is vertical with the effective exercise direction of the movable member being connected, and described two folded springs are axially disposed within same straight line.
8. MEMS sensor according to claim 5, it is characterised in that the side wall of the folded spring has to be more than 0 degree and the angle less than 90 degree with the plane for setting the movable member, fixed component and folded spring.
9. MEMS sensor according to claim 5, it is characterised in that the MEMS sensor is gyroscope, the movable member is selected from detection mass and drives any one in mass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510916566.3A CN106871885A (en) | 2015-12-10 | 2015-12-10 | For the folded spring group and MEMS sensor of MEMS sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510916566.3A CN106871885A (en) | 2015-12-10 | 2015-12-10 | For the folded spring group and MEMS sensor of MEMS sensor |
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| CN106871885A true CN106871885A (en) | 2017-06-20 |
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| CN103185574A (en) * | 2011-12-30 | 2013-07-03 | 财团法人工业技术研究院 | Micro electro mechanical system device with oscillation module |
| US20140000367A1 (en) * | 2010-10-25 | 2014-01-02 | Rosemount Aerospace Inc. | Mems gyros with quadrature reducing springs |
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| CN105074384A (en) * | 2012-12-24 | 2015-11-18 | 原子能和替代能源委员会 | Gyroscope with simplified calibration and simplified calibration method for a gyroscope |
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| CN1511259A (en) * | 2001-03-21 | 2004-07-07 | Vti | Method for manufacturing silicon sensor and silicon sensor |
| US20100186507A1 (en) * | 2007-09-10 | 2010-07-29 | Guenthner Stefan | Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression |
| CN102365524A (en) * | 2009-03-02 | 2012-02-29 | Vti技术有限公司 | Micro-mechanical sensor of angular velocity |
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Application publication date: 20170620 |
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