CN101789329A - Three-dimensional multidirectional-sensitive micromechanical inertial electrical switch - Google Patents
Three-dimensional multidirectional-sensitive micromechanical inertial electrical switch Download PDFInfo
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Abstract
The invention discloses a three-dimensional multidirectional-sensitive micromechanical inertial electrical switch in the technical field of micromechanical systems. The switch comprises a mass block electrode, a horizontal cantilever beam fixing electrode, a spiral horizontal fixing electrode, a vertical cantilever beam fixing electrode, a plurality of groups of serpentine springs, an insulating substrate, a spiral fixing electrode support seat, a spring support seat, a vertical fixing electrode support seat and a cantilever beam support seat, wherein the mass block electrode is connected with one end of each of four groups of serpentine springs respectively, the other end of the serpentine spring is connected with the spring support seat and suspends the mass block electrode between the insulating substrate and the vertical cantilever beam fixing electrode, the spring support seat and the cantilever beam support seat are fixedly arranged on the insulating substrate respectively and positioned around the mass block electrode, and the spiral horizontal fixing electrode and the spiral fixing electrode support seat are fixedly arranged on the substrate in turn. The micromechanical inertial electrical switch is sensitive to the acceleration shock in horizontal and vertical multiple directions.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive.
Background technology
Be that the inertia switch of basic engineering and manufacturing has because of it that volume is little, cost low and advantage such as batch process receives much concern with the micro electro mechanical system (MEMS) technology.Micro-mechanical inertia switch in the past, because of its processing method is based on micro electro mechanical system (MEMS) technology, the preparation of switch is to be that etching or plating are carried out in the basis with silicon under a lot of situations, by dry etching SOI (Silicon on Insulator) but silicon chip obtain can be unsettled the horizontal movement structure, and utilizing the sidewall inclined-plane that etches to realize the turn-on power loss of inertia switch, this is the micro-mechanical inertia switch of horizontal drive; And by plating and sacrifice layer process technology on monocrystal silicon substrate, then can realize the micro-mechanical inertia switch of vertical drive, but because the internal stress that is difficult to avoid in the electroplating process, this has just determined that the height of entire device can not be too thick, in order there to be enough big mass to respond to extraneous acceleration effect, finally cause the entire area of device bigger.
The most forms that adopt cantilever beam or spring quality of connection cube electrode to remove another fixed electrode of contact-impact of the design of micro-mechanical inertia electrical switch, the switching device of making or be horizontal drive, or be vertical drive only, acceleration on needs while detection level and vertical direction is done the time spent, can only unite the inertia electrical switch that uses these two kinds of different driving modes, not only caused the quantitative waste of switching device, and made the encapsulation of system integrated more difficult, complicated.Thereby, how to use few inertia switch number of devices to respond to, detect as far as possible from multidirectional acceleration percussion, it is the direction that people make great efforts that the enough responsive three-dimensional multidirectional acceleration of energy collecting act on a kind of microswitching device always, and the result is various constantly to be suggested in order to the micro-mechanical inertia electrical switch design that improves above-mentioned deficiency.
Find through literature search prior art, Wei Ma etc. are at " Sensors and Actuators A " (" sensor and actuator A ", 2004 111 phase 63-70 pages or leaves) delivered the paper that is entitled as " Fabrication and packaging of inertiamicro-switch using low-temperature photo-resist molded metal-electroplatingtechnology " (" making and the miniature electrical switch of inertia that encapsulates ") with the low-temperature metal electroplating technology, proposition is based on silicon substrate, the method of plated metal realizes the preparation of micro-mechanical inertia switch thereon, this minitype inertial switch is that the mass that connects with cantilever beam is as one of electrode, another electrode is positioned on the substrate of mass below, perhaps with mass on same plane, thereby realize driving on the vertical direction, the perhaps driving on the horizontal direction.For the inertia electrical switch of horizontal drive, owing to can't electroplate too thick mass on silicon base, mass need occupy bigger area and produce enough big inertia-activated power with trigger switch, and inertia switch does not have stereochemical structure clearly; And for the inertia switch of vertical drive, its mass electrode is when being located immediately at suprabasil another electrode collide and contacting, and both rigidity is all very big, to such an extent as to the contact effect is bad and the time is of short duration, the mass of adding the high speed resilience may cause device impaired without any Border Protection.The more important thing is that the switching device of any type of drive that proposes in the paper all can not independently make and be used for detecting simultaneously the acceleration percussion of a plurality of directions.
Summary of the invention
The present invention is directed to the prior art above shortcomings; a kind of micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive is provided; make whole micro-mechanical inertia electrical switch can be simultaneously responsive from the acceleration percussion on level and the vertical a plurality of directions; and its movable mass electrode is had with fixed electrode contact effect preferably; the limit movement of mass electrode is between dielectric substrate and fixed electrode, and the unexpected overload impact that device is subjected to plays the certain protection effect.
The present invention is achieved by the following technical solutions, the present invention includes: the mass electrode, cantilever beam horizontal fixed electrode, spiral type horizontal fixed electrode, cantilever beam vertical fixing electrode, some groups of serpentine springs, dielectric substrate, screw fixed electrode supporting seat, the spring supporting seat, vertical fixing electrode supporting seat and cantilever beam supporting seat, wherein: the mass electrode links to each other with an end of four groups of serpentine springs respectively, the other end of serpentine spring is connected with the spring supporting seat and the mass electrode is suspended between dielectric substrate and the cantilever beam vertical fixing electrode, spring supporting seat and cantilever beam supporting seat be fixedly set on the dielectric substrate respectively and be positioned at the mass electrode around, spiral type horizontal fixed electrode and screw fixed electrode supporting seat are fixedly set on the substrate successively.
Described mass electrode is that lamination metal is electroplated the ring structure that forms, 1000 ~ 2000 microns of its external diameters, 200 ~ 1200 microns of internal diameters, high 50 ~ 500 microns, and four outstanding semicircle inside radius of periphery are 400 ~ 1000 microns.
The cantilever design that described cantilever beam horizontal fixed electrode forms for one or more layers metal plating, its width is 50 ~ 200 microns, length is 100 ~ 400 microns, 50 ~ 500 microns of thickness, the oblique section angle is 30 ~ 60 °, and this cantilever beam horizontal fixed electrode adopts hanging structure, can effectively reduce its rigidity of structure, and cooperate the contact of corresponding oblique section, can improve well between two electrodes and contact effect.
Described spiral type horizontal fixed electrode is the helical structure that the above metal plating of three circles forms, and its root width is 50 ~ 200 microns, and 50 ~ 500 microns of thickness, the radius of spin are 100 ~ 500 microns, 60 ~ 120 ° of helical angles.
Described cantilever beam vertical fixing electrode is circular configuration or the fan blade shape structure that metal plating forms, and the radius of described circular configuration is 150 ~ 650 microns; Described fan blade shape structure is three fan blades or windy leaf, and wherein: the angle between three fan blades is 120 °, and the root width is 50 ~ 200 microns, 10 ~ 50 microns of thickness, and end radius is 10 ~ 50 microns.
Described serpentine spring is a circle or the multi-turn structure that metal plating forms, its live width is 5 ~ 50 microns, thickness is 4 ~ 50 microns, the internal diameter of semicircle is 20 ~ 100 microns, the vertical length that connects between semicircle is 50 ~ 500 microns, this serpentine spring is after being subjected to extraneous acceleration effect, and the motion of unsettled serpentine spring and mass electrode can keep consistency, harmony, and it is reliable to help stabilized contact.
Described dielectric substrate can be insulating material preparations such as quartz, glass.
Described screw fixed electrode supporting seat is the square or circular cylindrical shape structure that forms by metals such as electronickelling or copper.
Described spring supporting seat is the square or circular cylindrical structure that forms by metals such as electronickelling or copper.
Described vertical fixing electrode supporting seat is the square or circular cylindrical shape structure that forms by metals such as electronickelling or copper.
Described cantilever beam supporting seat is the square or circular cylindrical structure that forms by metals such as electronickelling or copper.
When the micro-mechanical inertia electrical switch of the enough big negative acceleration in the external world along dielectric substrate surface normal directive effect in three-dimensional multidirectional-sensitive of the present invention, when perhaps enough big positive acceleration acts on above-mentioned electrical switch along dielectric substrate lower surface normal direction, the mass electrode will touch cantilever beam vertical fixing electrode, thereby realize the connection to external circuit in vertical direction; When the enough big acceleration in the external world when being parallel to dielectric substrate upper surface either direction and acting on above-mentioned electrical switch, the mass electrode will touch cantilever beam horizontal fixed electrode or spiral type horizontal fixed electrode, thereby realize the connection to external circuit on level is multi-direction.
The present invention adopts the method for repeatedly not disturbing lamination to electroplate whole construction of switch mutually on dielectric substrate such as quartz or glass under the room temperature to make based on the MEMS (micro electro mechanical system) process technology.The present invention is under extraneous acceleration effect, rely on inertia force to drive the unsettled mass electrode movement of serpentine spring, thereby touch cantilever beam horizontal fixed electrode at regular intervals, spiral type horizontal fixed electrode or cantilever beam vertical fixing electrode with it, under acting force of the spring, fast the mass electrode is retracted again subsequently, finally realize the circuit snap switch.
The present invention is directed in the past, micro-mechanical inertia electrical switch only is single horizontal drive or vertical drive, can only unite the switch that uses these two kinds of different driving modes detects simultaneously from the acceleration effect on level and the vertical direction, switching device problems such as waste have quantitatively been caused, a kind of serpentine spring that has has been proposed, the three-dimensional multidirectional-sensitive micro-mechanical inertia electrical switch of spiral type horizontal fixed electrode and cantilever beam vertical fixing electrode, only use a microswitching device can detect simultaneously from multidirectional acceleration percussion, when improving between electrode the contact effect well, also made things convenient for the system in package in its use.
Description of drawings
Fig. 1 is the three-dimensional multidirectional-sensitive micro-mechanical inertia electrical switch structural representation that embodiment 1 has fan blade shape cantilever beam vertical fixing electrode
Fig. 2 is the mass electrode structure schematic diagram of embodiment 1
Fig. 3 is the band fan blade shape cantilever beam vertical fixing electrode structure schematic diagram of embodiment 1
Fig. 4 is spiral type horizontal fixed electrode, the cantilever beam horizontal fixed electrode structure schematic diagram of embodiment 1
Fig. 5 is the three-dimensional multidirectional-sensitive micro-mechanical inertia electrical switch structural representation that embodiment 2 has one deck cantilever beam horizontal fixed electrode
Fig. 6 is the three-dimensional multidirectional-sensitive micro-mechanical inertia electrical switch structural representation that embodiment 3 has circular porous vertical fixing electrode
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: mass electrode 1, cantilever beam vertical fixing electrode 2, cantilever beam horizontal fixed electrode 3, spiral type horizontal fixed electrode 4, serpentine spring 5, dielectric substrate 6, spring supporting seat 7, cantilever beam supporting seat 8, screw fixed electrode supporting seat 9 and vertical fixing electrode supporting seat 10, wherein: mass electrode 1 links to each other with an end of four groups of serpentine springs 5 respectively, the other end of four groups of serpentine springs 5 is connected with spring supporting seat 7 and mass electrode 1 is suspended on 10 ~ 50 microns places in top and cantilever beam vertical fixing electrode 2 belows of dielectric substrate 6, spring supporting seat 7 and cantilever beam supporting seat 8 are separately fixed on the dielectric substrate 6 and are positioned at around the mass electrode 1, be spaced apart 10 ~ 50 microns between this cantilever beam supporting seat 8 and the mass electrode 1, spiral type horizontal fixed electrode 4 is positioned at mass 1 center, and be fixed on the substrate 6 by screw fixed electrode supporting seat 9, and and mass electrode 1 between 10 ~ 50 microns gap is arranged.
Described mass electrode 1 is an annular, and its size is: outer radius long 1500 microns, 500 microns of inside radius, high 100 microns, and four outstanding semicircle inside radius of periphery are 400 microns, adopt repeatedly metal such as lamination electronickelling or copper to make;
Angle between 2 three fan blades of described fan blade shape cantilever beam vertical fixing electrode is 120 °, and the root width is 150 microns, 30 microns of thickness, and end radius is 20 microns;
Described cantilever beam horizontal fixed electrode 3 length are 300 microns, and width is 100 microns, 50 microns of thickness, and the oblique section angle is 60 °;
Described spiral type horizontal fixed electrode 4 root width are 150 microns, and 100 microns of thickness, the radius of spin are 100 microns, 120 ° of helical angles;
Described serpentine spring 5,10 microns of its live widths, 20 microns of thickness, 20 microns of the interior diameters at semicircle place, 40 microns of overall diameters;
Described dielectric substrate 6 is of a size of 2000 microns of radiuses, high 50 ~ 100 microns;
Described spring supporting seat 7 is the annular sector structure, and outer radius is 2000 microns, and 1800 microns of inside radius are high 100 microns, and fan-shaped angle is 30 °;
Described horizontal boom beam fixed electrode support seat 8 is the annular sector structure, and outer radius is 2000 microns, and 1800 microns of inside radius are high 100 microns, and fan-shaped angle is 30 °;
Described screw fixed electrode supporting seat 9 is the circular cylindrical shape structure, and its cross section inside radius is 200 microns, highly is 15 microns;
Described vertical cantilever fixed electrode support seat 10 is the circular cylindrical shape structure, and its cross section inside radius is 200 microns, highly is 20 microns.
As shown in Figure 2, the perspective view that has the mass electrode 1 of fan blade shape cantilever beam vertical fixing electrode 2 for present embodiment, be positioned at mass electrode 1 spring supporting seat 7 and horizontal boom beam fixed electrode support seat 8 on every side and electroplate on dielectric substrate 6, serpentine spring 5 is unsettled with the mass electrode 1 and the cantilever beam horizontal fixed electrode 3 that are attached thereto.
As shown in Figure 3, be the structural representation of present embodiment as the fan blade shape baffle plate beam of vertical cantilever fixed electrode 2, screw fixed electrode supporting seat 9 is electroplated on dielectric substrate 6, spiral type fixed electrode 4 is unsettled, the vertical cantilever fixed electrode support seat 10 that its top connects is unsettled with fan blade shape baffle plate beam, the layer structure integral body of forming links to each other with dielectric substrate 6, is positioned at dielectric substrate 6 central authorities, annular mass 1 center.
As shown in Figure 4, structural representation for present embodiment spiral type horizontal fixed electrode 4, spiral type horizontal fixed electrode 4 is made up of three helical blades as seen from the figure, and it is it is unsettled in dielectric substrate 6 central authorities by screw fixed electrode supporting seat 9, and at regular intervals between three groups of cantilever beam horizontal fixed electrodes 3 of dielectric substrate 6 peripheries, cantilever beam horizontal fixed electrode supporting seat 8 is electroplated at dielectric substrate 6 peripheries.
The two poles of the earth of external circuit are connected to mass electrode 1 and the vertical cantilever fixed electrode 2 or the cantilever beam horizontal fixed electrode 3 (or spiral type horizontal fixed electrode level 4) of the micro-mechanical inertia electrical switch of above-mentioned three-dimensional multidirectional-sensitive respectively, after being subjected to the sensitive axes direction that extraneous enough big acceleration acts on this switch (being dielectric substrate 6 normal to a surface directions or the direction surperficial parallel here) with dielectric substrate 6, under the driving of mass inertia force, by unsettled mass electrodes 1 motion of serpentine spring 5 to and touch vertical cantilever fixed electrode 2, perhaps cantilever beam horizontal fixed electrode 3, or spiral type horizontal fixed electrode level 4, drawn back by serpentine spring 5 again subsequently, thereby realize quick break-make to external circuit, the structure of vertical cantilever fixed electrode 2, the structure of spiral type fixed electrode 4 and cantilever beam horizontal fixed electrode 3 has all reduced its rigidity separately, Fast Collision to mass electrode 1 under the inertia force driving has played certain mitigation, has promoted switch contact effect.Simultaneously, the present invention only use an inertia switch can be responsive from the acceleration percussion on level and the vertical a plurality of directions, realized that the enough responsive three-dimensional multidirectional acceleration of energy collecting act on a kind of advantage of microswitching device.
As shown in Figure 5, the cantilever beam horizontal fixed electrode 3 of employing single layer structure is arranged at the periphery of mass electrode 1 in the present embodiment, the three-dimensional multidirectional-sensitive micro-mechanical inertia electrical switch that has fan blade shape cantilever beam vertical fixing electrode among the size of this micro-mechanical inertia electrical switch and the embodiment 1 is consistent, and except horizontal boom beam fixed electrode, the shape of remaining part, size are consistent with embodiment 1.
As shown in Figure 6, adopt the cantilever beam vertical fixing electrode 2 on cylinder plane with holes in the present embodiment, the cylinder plan radius of this vertical fixing electrode 2 is 500 ~ 1000 microns, thickness is 20 ~ 50 microns, through hole 11 radiuses on it are 10 ~ 50 microns, be distributed in equably on the cylinder, distribute spacing is 50 ~ 100 microns, and all the other features of this micro-mechanical inertia electrical switch are similar to Example 1.
Claims (9)
1. the micro-mechanical inertia electrical switch of a three-dimensional multidirectional-sensitive, comprise: the mass electrode, cantilever beam horizontal fixed electrode, spiral type horizontal fixed electrode, cantilever beam vertical fixing electrode, some groups of serpentine springs, dielectric substrate, screw fixed electrode supporting seat, the spring supporting seat, vertical fixing electrode supporting seat and cantilever beam supporting seat, it is characterized in that: the mass electrode links to each other with an end of four groups of serpentine springs respectively, the other end of serpentine spring is connected with the spring supporting seat and the mass electrode is suspended between dielectric substrate and the cantilever beam vertical fixing electrode, spring supporting seat and cantilever beam supporting seat be fixedly set on the dielectric substrate respectively and be positioned at the mass electrode around, spiral type horizontal fixed electrode and screw fixed electrode supporting seat are fixedly set on the substrate successively.
2. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 1, it is characterized in that, described mass electrode is that lamination metal is electroplated the ring structure that forms, 1000 ~ 2000 microns of its external diameters, 200 ~ 1200 microns of internal diameters, high 50 ~ 500 microns, four outstanding semicircle inside radius of periphery are 400 ~ 1000 microns.
3. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 1, it is characterized in that, the cantilever design that described cantilever beam horizontal fixed electrode forms for one or more layers metal plating, its width is 50 ~ 200 microns, length is 100 ~ 400 microns, 50 ~ 500 microns of thickness, oblique section angle are 30 ~ 60 °.
4. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 1, it is characterized in that, described spiral type horizontal fixed electrode is the helical structure that the above metal plating of three circles forms, its root width is 50 ~ 200 microns, 50 ~ 500 microns of thickness, the radius of spin is 100 ~ 500 microns, 60 ~ 120 ° of helical angles.
5. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 1 is characterized in that, described cantilever beam vertical fixing electrode is circular configuration or the fan blade shape structure that metal plating forms.
6. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 5 is characterized in that, the radius of described circular configuration is 150 ~ 650 microns.
7. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 5, it is characterized in that, described fan blade shape structure is three fan blades or windy leaf, wherein: the angle between three fan blades is 120 °, the root width is 50 ~ 200 microns, 10 ~ 50 microns of thickness, end radius are 10 ~ 50 microns.
8. the micro-mechanical inertia electrical switch of three-dimensional multidirectional-sensitive according to claim 1, it is characterized in that, described serpentine spring is a circle or the multi-turn structure that metal plating forms, its live width is 5 ~ 50 microns, thickness is 4 ~ 50 microns, the internal diameter of semicircle is 20 ~ 100 microns, and the vertical length that connects between semicircle is 50 ~ 500 microns.
9. the micro-mechanical inertia electrical switch of 1 described three-dimensional multidirectional-sensitive as requested is characterized in that, is spaced apart 10 ~ 50 microns between described cantilever beam supporting seat and the mass electrode.
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| CN201010127247A CN101789329B (en) | 2010-03-19 | 2010-03-19 | Three-dimensional multidirectional-sensitive micromechanical inertial electrical switch |
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| CN201010127247A CN101789329B (en) | 2010-03-19 | 2010-03-19 | Three-dimensional multidirectional-sensitive micromechanical inertial electrical switch |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102306583A (en) * | 2011-08-31 | 2012-01-04 | 上海交通大学 | Miniature pressure switch with three-dimensional multidirectional sensitivity property |
| CN102426959A (en) * | 2011-11-28 | 2012-04-25 | 上海交通大学 | Three-dimensional multi-directional pressure switch applied to medical intervention and supported by annular spring |
| CN102522262A (en) * | 2011-12-15 | 2012-06-27 | 华东光电集成器件研究所 | MEMS acceleration switch |
| CN106871885A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | For the folded spring group and MEMS sensor of MEMS sensor |
| CN106908718A (en) * | 2017-01-18 | 2017-06-30 | 沈阳理工大学 | The test system of threshold value tunable mems inertia switch |
| CN106971915A (en) * | 2017-03-07 | 2017-07-21 | 上海交通大学 | A kind of micro-mechanical inertia switch of stepping adhesive electrostatic locking |
| CN107359057A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of universal inertia switches of MEMS in recognizable load orientation section |
| CN107919254A (en) * | 2017-10-30 | 2018-04-17 | 上海交通大学 | A kind of electrostatic locking inertia switch with flexible array contact |
| CN109212261A (en) * | 2018-10-28 | 2019-01-15 | 曲靖师范学院 | A kind of three axis threshold acceleration meters that can effectively avoid non-sensitive direction false triggering |
| CN110021497A (en) * | 2019-05-17 | 2019-07-16 | 北京大学 | Universal conducting micro-impulse breaker of one kind and preparation method thereof |
| CN110571069A (en) * | 2019-08-20 | 2019-12-13 | 南京理工大学 | Micro-mechanical collision switch control device |
| CN112428958A (en) * | 2020-11-23 | 2021-03-02 | 广西贵港高曼信息科技有限公司 | Motor vehicle anti-theft alarm equipment capable of preventing false alarm |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102306583A (en) * | 2011-08-31 | 2012-01-04 | 上海交通大学 | Miniature pressure switch with three-dimensional multidirectional sensitivity property |
| CN102426959A (en) * | 2011-11-28 | 2012-04-25 | 上海交通大学 | Three-dimensional multi-directional pressure switch applied to medical intervention and supported by annular spring |
| CN102426959B (en) * | 2011-11-28 | 2014-01-15 | 上海交通大学 | Three-dimensional multi-directional pressure switch applied to medical intervention and supported by annular spring |
| CN102522262A (en) * | 2011-12-15 | 2012-06-27 | 华东光电集成器件研究所 | MEMS acceleration switch |
| CN106871885A (en) * | 2015-12-10 | 2017-06-20 | 上海矽睿科技有限公司 | For the folded spring group and MEMS sensor of MEMS sensor |
| CN107359057B (en) * | 2016-05-09 | 2019-07-12 | 南京理工大学 | A kind of universal inertia switch of MEMS in recognizable load orientation section |
| CN107359057A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of universal inertia switches of MEMS in recognizable load orientation section |
| CN106908718A (en) * | 2017-01-18 | 2017-06-30 | 沈阳理工大学 | The test system of threshold value tunable mems inertia switch |
| CN106971915A (en) * | 2017-03-07 | 2017-07-21 | 上海交通大学 | A kind of micro-mechanical inertia switch of stepping adhesive electrostatic locking |
| CN107919254A (en) * | 2017-10-30 | 2018-04-17 | 上海交通大学 | A kind of electrostatic locking inertia switch with flexible array contact |
| CN107919254B (en) * | 2017-10-30 | 2019-12-10 | 上海交通大学 | Electrostatic locking inertial switch with flexible array contact |
| CN109212261A (en) * | 2018-10-28 | 2019-01-15 | 曲靖师范学院 | A kind of three axis threshold acceleration meters that can effectively avoid non-sensitive direction false triggering |
| CN109212261B (en) * | 2018-10-28 | 2023-11-24 | 曲靖师范学院 | Triaxial threshold accelerometer capable of effectively avoiding false triggering in non-sensitive direction |
| CN110021497A (en) * | 2019-05-17 | 2019-07-16 | 北京大学 | Universal conducting micro-impulse breaker of one kind and preparation method thereof |
| CN110571069A (en) * | 2019-08-20 | 2019-12-13 | 南京理工大学 | Micro-mechanical collision switch control device |
| CN112428958A (en) * | 2020-11-23 | 2021-03-02 | 广西贵港高曼信息科技有限公司 | Motor vehicle anti-theft alarm equipment capable of preventing false alarm |
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