CN207176119U - A kind of carborundum processes cooling device - Google Patents
A kind of carborundum processes cooling device Download PDFInfo
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- CN207176119U CN207176119U CN201720771010.4U CN201720771010U CN207176119U CN 207176119 U CN207176119 U CN 207176119U CN 201720771010 U CN201720771010 U CN 201720771010U CN 207176119 U CN207176119 U CN 207176119U
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- heating furnace
- cooling water
- water pipe
- electrode plate
- cavity
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Abstract
The utility model discloses a kind of carborundum to process cooling device,Including first electrode plate,Second electrode plate and heating furnace,The outside of the first electrode plate and second electrode plate is provided with installing plate,The installing plate is installed on the inside of heating furnace by screw,The inside of the heating furnace is provided with cavity by cross thermal insulation board,The inside of the cavity is provided with the first cooling water pipe,The interior of the heating furnace is provided with the second cooling water pipe,The bottom of the heating furnace is provided with the first water inlet,The top of the heating furnace is provided with the first delivery port,The utility model cooling water enters the second cooling water pipe,Second cooling water pipe internal cooling water will integrally cool to heating furnace,Then the cooling water of the first cooling water pipe is passed through again,Cavity is cooled,The single internal temperature to cavity is not influenceed by other on cavity,After thermal field is stable,Lower seed crystal,Thermal field skewness is avoided single-crystal silicon carbide is glued pot,Improve the qualification rate of crystal,Reduce production cost.
Description
Technical field
Cooling device technical field is the utility model is related to, specially a kind of carborundum processing cooling device.
Background technology
Cooling circulating water system in silicon carbide monocrystal growth furnace body traditional at present is all that a set of overall cooling follows
Loop system, i.e., whole body of heater lower end set a water inlet, and upper end sets a delivery port.So in silicon carbide monocrystal growth
During in body of heater the thermal field of all directions be difficult to control, cause thermal field skewness, the temperature in some possible direction is low, and
Other direction temperature rather moderates, thus it is particularly easy to the phenomenon that single-crystal silicon carbide glues pot occur, so that the carbon of growth
Substantial amounts of bubble be present inside SiClx monocrystalline, or even the cracking of crystal can be caused, cause the qualification rate of crystal to reduce, cost is significantly
Increase, therefore, we release a kind of carborundum processing cooling device.
Utility model content
The purpose of this utility model is to provide a kind of carborundum processing cooling device, to solve to carry in above-mentioned background technology
The problem of going out.
To achieve the above object, the utility model provides following technical scheme：A kind of carborundum processes cooling device, including
Symmetrically arranged semicircle first electrode plate, second electrode plate and the heating furnace of two electrode peripheries, it is characterised in that：Described first
Battery lead plate and second electrode plate are connected to the tungsten heating rod upper end being vertically arranged, and the lower end of the tungsten heating rod is plugged with tungsten
Ring, the outside of the first electrode plate and second electrode plate are provided with installing plate, and the surface of the installing plate is provided with mounting hole, described
Installing plate is installed on the inside of heating furnace by screw, and the upper end of the heating furnace is provided with upper lid, and the inside of the heating furnace leads to
Cross that cross is heat-insulated to be divided into four cavitys, the inside of the cavity is provided with the first cooling water pipe, the interior of the heating furnace
The second cooling water pipe is circumferentially with, bottom, the top of the heating furnace are communicated with the first water inlet of the first cooling water pipe respectively
Mouthful, the first delivery port, lower right side, the left upper portion of the heating furnace be respectively equipped with the second cooling water pipe of connection, second enter
The mouth of a river, the second delivery port.
Preferably, the tungsten heating rod is equidistantly to be symmetrical arranged.
Preferably, for the mounting hole to be symmetrical arranged, the screw is bolted in the inside of mounting hole.
Preferably, the upper lid is provided with sealing gasket with heating furnace contact position.
Compared with prior art, the beneficial effects of the utility model are：The utility model cooling water enters the second cooling water
Pipe, the second cooling water pipe internal cooling water will integrally cool to heating furnace, then pass through the cooling of the first cooling water pipe again
Water, cavity being cooled, the single internal temperature to cavity is not influenceed by other on cavity, after thermal field is stable, seeding down
Crystalline substance, the growth of crystal is controlled, the single-crystal silicon carbide for so avoiding the appearance of thermal field skewness glues pot phenomenon, so as to grow
Go out the single-crystal silicon carbide of high quality, improve the qualification rate of crystal, reduce production cost.
Brief description of the drawings
Fig. 1 is the utility model overlooking the structure diagram；
Fig. 2 is the utility model internal structure schematic diagram；
Fig. 3 is the utility model positive structure diagram.
In figure：1 installing plate, 2 mounting holes, 3 first electrode plates, 4 second electrode plates, 5 tungsten heating rods, 6 second cooling water pipes,
7 cross thermal insulation boards, 8 heating furnaces, 9 first cooling water pipes, 10 screws, 11 tungsten rings, 12 second water inlets, 13 second delivery ports, 14
Upper lid, 15 first water inlets, 16 first delivery ports, 17 cavitys.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Fig. 1-3 are referred to, the utility model provides a kind of technical scheme：A kind of carborundum processes cooling device, including right
Claim semicircle first electrode plate 3, the heating furnace 8 of the electrode periphery of second electrode plate 4 and two set, the He of first electrode plate 3
Second electrode plate 4 is connected to the upper end of tungsten heating rod 5 being vertically arranged, and the lower end of the tungsten heating rod 5 is plugged with tungsten ring 11, described
The outside of first electrode plate 3 and second electrode plate 4 is provided with installing plate 1, and the surface of the installing plate 1 is provided with mounting hole 2, described
Installing plate 1 is installed on the inside of heating furnace 8 by screw 10, and the upper end of the heating furnace 8 is provided with upper lid 14, the heating furnace 8
Inside four cavitys 17 are divided into by cross thermal insulation board 7, the inside of the cavity 17 is provided with the first cooling water pipe 9, described
The interior of heating furnace 8 is circumferentially with the second cooling water pipe 6, and the bottom of the heating furnace 8 is provided with the first water inlet 15, described
The top of heating furnace 8 is provided with the first delivery port 16, and the lower right side of the heating furnace 8 is provided with the second water inlet 12, the heating
The left upper portion of stove 8 is provided with the second delivery port 13.
Further, to be equidistantly symmetrical arranged, equidistant by tungsten heating rod 5 is symmetrical arranged the tungsten heating rod 5 so that
The dense distribution of tungsten heating rod 5, the distribution of high density ensures that thermal field is uniform, and realizes accurate control, and the more resistance of quantity are smaller,
In the case of identical operating voltage, electric conversion efficiency is higher.
Further, for the mounting hole 2 to be symmetrical arranged, the screw 10 is bolted in the inside of mounting hole 2, passes through installation
Hole 2 is symmetrical arranged so that the fixation of installing plate 1.
Further, first water inlet 15 is connected with the first delivery port 16 by the first cooling water pipe 9, cooling water by
First water inlet 15 enters the first cooling water pipe 9, cavity 17 is cooled by the internal cooling water of the first cooling water pipe 9, so
Cooling water is discharged via the first delivery port 16 afterwards.
Further, second water inlet 12 is connected with the second delivery port 13 by the second cooling water pipe 6, cooling water by
Second water inlet 12 enters the second cooling water pipe 6, and the internal cooling water of the second cooling water pipe 6 overall to heating furnace 8 will cool,
Then cooling water is discharged via the second delivery port 13.
Further, the upper lid 14 and the contact position of heating furnace 8 are provided with sealing gasket, by the setting of sealing gasket, in raising
Sealing of the lid 14 to heating furnace 8.
Specifically, in use, cooling water enters the second cooling water pipe 6 by the second water inlet 12, inside the second cooling water pipe 6
Cooling water overall to heating furnace 8 will cool, and then cooling water is discharged via the second delivery port 13, then by cooling water by the
One water inlet 15 enters the first cooling water pipe 9, cavity 17 is cooled by the internal cooling water of the first cooling water pipe 9, then
Cooling water is discharged via the first delivery port 16, and the single internal temperature to cavity 17 is not influenceed by other on cavity 17, treats temperature
After field is stable, lower seed crystal, the growth of crystal is controlled, the single-crystal silicon carbide for so avoiding the appearance of thermal field skewness glues pot
Phenomenon, so as to grow the single-crystal silicon carbide of high quality, the qualification rate of crystal is improved, reduces production cost.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from principle of the present utility model and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (4)
1. a kind of carborundum processes cooling device, including symmetrically arranged semicircle first electrode plate (3), second electrode plate (4)
With the heating furnace (8) of two electrode peripheries, it is characterised in that：Being connected to for the first electrode plate (3) and second electrode plate (4) is perpendicular
Tungsten heating rod (5) upper end directly set, the lower end of the tungsten heating rod (5) are plugged with tungsten ring (11), the first electrode plate (3)
Installing plate (1) is provided with the outside of second electrode plate (4), the surface of the installing plate (1) is provided with mounting hole (2), the installation
Plate (1) is installed on the inside of heating furnace (8) by screw (10), and the upper end of the heating furnace (8) is provided with upper lid (14), described to add
The inside of hot stove (8) is divided into four cavitys (17) by cross thermal insulation board (7), and the inside of the cavity (17) is cold provided with first
But water pipe (9), the interior of the heating furnace (8) are circumferentially with the second cooling water pipe (6), the bottom of the heating furnace (8),
Top is communicated with the first water inlet (15) of the first cooling water pipe (9), the first delivery port (16), the heating furnace (8) respectively
Lower right side, left upper portion be respectively equipped with connection the second cooling water pipe (6), the second water inlet (12), the second delivery port
(13)。
2. a kind of carborundum processing cooling device according to claim 1, its feature exist
In：The tungsten heating rod (5) is equidistantly to be symmetrical arranged.
3. a kind of carborundum processing cooling device according to claim 1, its feature exist
In：For the mounting hole (2) to be symmetrical arranged, the screw (10) is bolted in the inside of mounting hole (2).
4. a kind of carborundum processing cooling device according to claim 1, its feature exist
In：The upper lid (14) is provided with sealing gasket with heating furnace (8) contact position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720771010.4U CN207176119U (en) | 2017-06-29 | 2017-06-29 | A kind of carborundum processes cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720771010.4U CN207176119U (en) | 2017-06-29 | 2017-06-29 | A kind of carborundum processes cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207176119U true CN207176119U (en) | 2018-04-03 |
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ID=61734204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720771010.4U Active CN207176119U (en) | 2017-06-29 | 2017-06-29 | A kind of carborundum processes cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207176119U (en) |
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2017
- 2017-06-29 CN CN201720771010.4U patent/CN207176119U/en active Active
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| CP03 | "change of name, title or address" |
Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: 250100 Shandong city of Ji'nan province high tech Zone Xinyu Road West Century wealth center block AB room 1106-6-01 Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |
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| CP03 | "change of name, title or address" |