CN207091552U - A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace - Google Patents
A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace Download PDFInfo
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- CN207091552U CN207091552U CN201720902787.XU CN201720902787U CN207091552U CN 207091552 U CN207091552 U CN 207091552U CN 201720902787 U CN201720902787 U CN 201720902787U CN 207091552 U CN207091552 U CN 207091552U
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- diffusion furnace
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace,The quartzy diffusion furnace includes shower,Quartz boat,Baffle plate,Heat-preserving container,Quartz furnace door,Waste pipe and TC pipes,Quartz boat is used to carry photovoltaic silicon wafer,Quartz furnace door is arranged on the head of quartzy diffusion furnace,Sealing function is played for quartzy diffusion furnace,Heat-preserving container is located in quartzy diffusion furnace close to Quartz furnace door side,Play heat-blocking action,Shower is located at quartzy diffusion furnace internal upper part,For being passed through spray protective gas POCl3,Baffle plate is arranged between shower and heat-preserving container with the mode of hook,For stopping quartzy diffusion furnace internal gas flow,The air inlet of quartzy diffusion furnace is arranged on the afterbody of quartzy diffusion furnace,For being passed through oxygen,Waste pipe and TC pipes are arranged on the bottom in quartzy diffusion furnace,Waste pipe is used to discharge waste liquid,TC is managed for placing thermocouple,Heat-preserving container is made up of multi-disc quartz plate arranged in parallel,It is welded to connect between quartz plate with quartzy pillar.
Description
Technical field
The utility model belongs to field of semiconductor fabrication processes, more particularly to a kind of heat-insulated reinforcement photovoltaic silicon wafer in more temperature measuring areas
Quartzy diffusion furnace.
Background technology
Application No. CN201521039652.2 patent document, mention " in crystal silicon solar energy battery manufacturing process,
Silicon chip diffusion technique is that silicon chip is put into high temperature dispersing furnace, passes to the gases such as nitrogen, oxygen and POCl3, sends out at high temperature
It is biochemical to react and form PN junction in silicon chip surface after spreading.Specifically, first silicon chip is inserted on quartz boat, then by quartz
Boat is put into high temperature dispersing furnace (being typically exactly diffusion quartz tube), is passed through the gas containing diffusion source, is spread under the high temperature conditions
Source reacts with silicon chip, realizes diffusion process so as to form PN junction.”
This document disclose " a kind of solar silicon wafers disperser, including quartz boat, between quartz boat and air inlet
Air-flow aggregating apparatus, multiple quartzy bar construction supporting constructions of the quartz boat by two supporting plates and between supporting plate, and
Multiple cuttings for being used to place silicon chip are provided with quartz pushrod, it is characterised in that：Quartz pushrod uses hollow type structure, is opened in supporting plate
There are multiple through holes communicated with each quartz pushrod；Air dispelling hole, and air dispelling hole and stone are also provided with quartz pushrod between adjacent cutting
English rod penetrates；Air-flow aggregating apparatus is a baffle-type structure with hole of confluxing, and hole exits end of confluxing supports towards quartz boat
The projection of through hole is respectively positioned in the port of export in hole of confluxing on plate ".
The purpose of above-mentioned technical proposal is " first, the air-flow aggregating apparatus air-flow in hole of being confluxed by band, makes air-flow fast
In the quartz pushrod that speed is flowed on quartz boat and silicon chip is blowed at air dispelling hole, effectively increases the utilization rate in diffusion source, can also
Further increase transmission range, so as to improve the yield of single stove diffusion, reduce production cost；Second, by hollow quartz pushrod and open
The air dispelling hole being located on quartz pushrod, the area of space that diffusion source is abundant and is evenly distributed between silicon chip can be carried significantly
High silicon chip diffusion uniformity, so as to improve conversion efficiency of solar cell, while the utilization in diffusion source is also substantially increased, saved
About production cost；Third, can be distributed by position of opening of the air dispelling hole on quartz pushrod, to control the direction of air-flow, make expansion
Dissipate source air-flow to be more evenly distributed in the range of silicon chip place, flexibly set according to production requirement, practical ".It is however, real
In trampling, when this quartzy diffusion furnace works, the problem of confluxing except considering air-flow, it is also contemplated that other factors, such as quartz expand
Dissipate the problem of temperature control is uneven in heat-insulating problem and the quartzy diffusion furnace in stove.
Utility model content
The utility model provides a kind of heat-insulated reinforcement photovoltaic silicon wafer quartz diffusion furnace in more temperature measuring areas, to solve quartz diffusion
The problem of in stove.
A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace, the quartzy diffusion furnace include shower, quartz boat,
Baffle plate, heat-preserving container, Quartz furnace door, waste pipe and multiple TC pipes,
Quartz boat is used to carry photovoltaic silicon wafer,
Quartz furnace door is arranged on the head of quartzy diffusion furnace, and sealing function is played for quartzy diffusion furnace,
Heat-preserving container is located in quartzy diffusion furnace close to Quartz furnace door side, plays heat-blocking action,
Shower is located at quartzy diffusion furnace internal upper part, for being passed through spray protective gas POCl3,
Baffle plate is arranged between shower and heat-preserving container with the mode of hook, for stopping quartzy diffusion furnace internal gas flow,
The air inlet of quartzy diffusion furnace is arranged on the afterbody of quartzy diffusion furnace, for being passed through oxygen,
Waste pipe and TC pipes are arranged on the bottom in quartzy diffusion furnace, and waste pipe is used to discharge waste liquid, and TC is managed for placing
Thermocouple,
The multiple TC pipes are the bottoms being installed in parallel in quartzy diffusion furnace, and the length of TC pipes is each unequal, according to etc.
The mode order arranged distribution of difference, quartzy diffusion furnace is divided into multiple temperature measuring areas, each TC pipe is responsible for survey corresponding to one
The temperature survey of warm area.
Heat-preserving container is made up of multi-disc quartz plate arranged in parallel, is welded to connect between quartz plate with quartzy pillar.Quartz plate
It is circular piece, material is opaque quartz material.
TC pipes are temperature tube, and TC is English thermocouple abbreviation.
The utility model is directed to photovoltaic silicon wafer quartz diffusion furnace, and the heat-preserving container in quartz ampoule, main function is in order to heat-insulated.
And opaque quartz has many stomatas, the ability of absorptive thermal radiation is stronger, and effect of heat insulation is substantially better than suprasil material, because
This introduces opaque quartz and substitutes original suprasil, greatly strengthen the effect of heat insulation of quartz thermal insulation barrel.Meanwhile quartz
There is flat-temperature zone in pipe, height warm area, multiple region welding TC sleeve pipes, facilitate interpolation thermocouple, realize not equality of temperature in quartz ampoule
The measurement of area's actual temp.
Brief description of the drawings
Detailed description below is read by reference to accompanying drawing, the utility model illustrative embodiments above-mentioned and other
Objects, features and advantages will become prone to understand.In the accompanying drawings, show that this practicality is new by way of example, and not by way of limitation
Some embodiments of type, wherein：
Fig. 1 is the utility model quartz diffusion-furnace structure schematic side view.
Fig. 2 is the schematic shapes of the utility model quartz diffusion furnace heat-preserving container quartz plate.
Fig. 3 is TC pipes distributed architecture schematic top plan view in the utility model quartz diffusion furnace.
1 --- shower, 2 --- quartz boat, 3 --- baffle plate, 4 --- heat-preserving container, 5 --- Quartz furnace door, 6 --- air inlet
Mouthful, 7 --- waste pipe, 8 --- TC is managed.
Embodiment
As shown in figure 1, a kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace, the quartzy diffusion furnace includes spray
Pipe, quartz boat, baffle plate, heat-preserving container, Quartz furnace door, waste pipe and TC pipes.
Quartz boat is used to carry photovoltaic silicon wafer.Quartz furnace door is arranged on the head of quartzy diffusion furnace, for quartzy diffusion furnace
Play sealing function.Heat-preserving container is located in quartzy diffusion furnace close to Quartz furnace door side, plays heat-blocking action.Shower is located at stone
English diffusion furnace internal upper part, for being passed through spray protective gas POCl3.Baffle plate is arranged on shower and guarantor with the mode of hook
Between warm bucket, for stopping quartzy diffusion furnace internal gas flow.The air inlet of quartzy diffusion furnace is arranged on the afterbody of quartzy diffusion furnace,
For being passed through oxygen.Waste pipe and TC pipes are arranged on the bottom in quartzy diffusion furnace, and waste pipe is used to discharge waste liquid, and TC, which is managed, to be used for
Place thermocouple.
The multiple TC pipes are the bottoms being installed in parallel in quartzy diffusion furnace, and the length of TC pipes is each unequal, according to etc.
The mode order arranged distribution of difference, quartzy diffusion furnace is divided into multiple temperature measuring areas, each TC pipe is responsible for survey corresponding to one
The temperature survey of warm area.
Heat-preserving container is made up of multi-disc quartz plate arranged in parallel, is welded to connect between quartz plate with quartzy pillar.Quartz plate
It is circular piece, and uses opaque quartz material.
What deserves to be explained is created although foregoing teachings describe the utility model by reference to some embodiments
Spirit and principle, it should be appreciated that, the utility model is not limited to disclosed embodiment, and each side is drawn
Divide and also do not mean that the feature in these aspects can not combine, this division is merely to the convenience of statement.The utility model purport
Covering various modifications included in spirit and scope of the appended claims and equivalent arrangements.
Claims (3)
1. a kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace, it is characterised in that the quartzy diffusion furnace includes spray
Pipe, quartz boat, baffle plate, heat-preserving container, Quartz furnace door, waste pipe and multiple TC pipes,
Quartz boat is used to carry photovoltaic silicon wafer,
Quartz furnace door is arranged on the head of quartzy diffusion furnace, and sealing function is played for quartzy diffusion furnace,
Heat-preserving container is located in quartzy diffusion furnace close to Quartz furnace door side, plays heat-blocking action,
Shower is located at quartzy diffusion furnace internal upper part, for being passed through spray protective gas POCl3,
Baffle plate is arranged between shower and heat-preserving container with the mode of hook, for stopping quartzy diffusion furnace internal gas flow,
The air inlet of quartzy diffusion furnace is arranged on the afterbody of quartzy diffusion furnace, for being passed through oxygen,
Waste pipe and TC pipes are arranged on the bottom in quartzy diffusion furnace, and waste pipe is used to discharge waste liquid, and TC is managed for placing thermoelectricity
It is even,
Heat-preserving container is made up of multi-disc quartz plate arranged in parallel, is welded to connect between quartz plate with quartzy pillar,
The multiple TC pipes are the bottoms being installed in parallel in quartzy diffusion furnace, and the length of TC pipes is each unequal, according to equal difference
Mode order arranged distribution, quartzy diffusion furnace is divided into multiple temperature measuring areas, each TC pipe is responsible for a corresponding temperature measuring area
Temperature survey.
2. more temperature measuring areas are heat-insulated as claimed in claim 1 strengthens photovoltaic silicon wafer quartz diffusion furnace, it is characterised in that quartz plate is round
Shape piece.
3. more temperature measuring areas are heat-insulated as claimed in claim 2 strengthens photovoltaic silicon wafer quartz diffusion furnace, it is characterised in that quartz plate is not
Suprasil material.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720902787.XU CN207091552U (en) | 2017-07-24 | 2017-07-24 | A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720902787.XU CN207091552U (en) | 2017-07-24 | 2017-07-24 | A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace |
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| CN207091552U true CN207091552U (en) | 2018-03-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111517257A (en) * | 2019-12-21 | 2020-08-11 | 张忠恕 | Tray lifting shaft weldment and machining process thereof |
-
2017
- 2017-07-24 CN CN201720902787.XU patent/CN207091552U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111517257A (en) * | 2019-12-21 | 2020-08-11 | 张忠恕 | Tray lifting shaft weldment and machining process thereof |
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Address after: 201507, No. 3312, Ting Wei Road, Cao Jing Town, Shanghai, Jinshan District Patentee after: Shanghai Qiang Hua Industrial Limited by Share Ltd Address before: 201507, No. 3312, Ting Wei Road, Cao Jing Town, Shanghai, Jinshan District Patentee before: Shanghai strong China Industrial Co., Ltd. |