CN111517257A - Tray lifting shaft weldment and machining process thereof - Google Patents

Tray lifting shaft weldment and machining process thereof Download PDF

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Publication number
CN111517257A
CN111517257A CN201911331291.1A CN201911331291A CN111517257A CN 111517257 A CN111517257 A CN 111517257A CN 201911331291 A CN201911331291 A CN 201911331291A CN 111517257 A CN111517257 A CN 111517257A
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China
Prior art keywords
connecting rod
connective bar
fixed
support plate
lift shaft
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Application number
CN201911331291.1A
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Chinese (zh)
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CN111517257B (en
Inventor
张忠恕
王连连
赵鹤
陈强
于洋
冯继瑶
张娟
边占宁
孙云涛
李宝军
张连兴
王建立
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Beijing Kai De Quartz Corp
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Individual
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Priority to CN201911331291.1A priority Critical patent/CN111517257B/en
Publication of CN111517257A publication Critical patent/CN111517257A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66FHOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F13/00Common constructional features or accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/16Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by turning

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Structural Engineering (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a tray lifting shaft weldment and a processing technology thereof, wherein the tray lifting shaft weldment comprises a first connecting rod, a second connecting rod, a third connecting rod, a fourth connecting rod, a support plate, a fixing table and an extension shaft, the first connecting rod, the second connecting rod, the third connecting rod and the fourth connecting rod are fixed into a whole in a welding mode, the third connecting rod is opal quartz, the extension shaft is fixed at the upper end of the fourth connecting rod, the extension shaft and the fourth connecting rod are of an integral structure, the support plate is fixedly arranged on the outer circumference of the joint of the extension shaft and the fourth connecting rod, a first through hole is formed in the center of the first connecting rod, and the first through hole extends to the second connecting rod.

Description

Tray lifting shaft weldment and machining process thereof
Technical Field
The invention relates to the technical field of quartz, in particular to a tray lifting shaft welding piece and a processing technology thereof.
Background
The existing quartz welding parts are of integrally molded structures and poor in transparency, an original quartz rod is of an integral plastic structure, integral overheating is not beneficial to diffusion in the using process, integral heat exceeds the integral heating limit degree of sealing, the use is limited, the service life is short, manpower and material resources are consumed for replacement, the manufacturing cost is high, and therefore the applicant designs a novel lifting shaft welding part particularly to meet the using requirement.
Disclosure of Invention
The invention aims to provide a tray lifting shaft weldment and a processing technology thereof, and aims to solve the problems in the background technology.
The purpose of the invention is realized by the following technical scheme: the utility model provides a tray lift axle weldment, includes first connective bar, second connective bar, third connective bar, fourth connective bar, mounting panel, fixed station, extension axle, first connective bar, second connective bar, third connective bar, fourth connective bar pass through the welding mode fixed as an organic whole, the third connective bar is opal quartz, is located fourth connective bar upper end is fixed with the extension axle, extend axle and fourth connective bar structure as an organic whole, be located extend the axle with the fixed mounting panel that is equipped with on the outer circumference of fourth connective bar department of meeting.
Furthermore, a first through hole is formed in the center of the first connecting rod and extends to the second connecting rod.
Furthermore, a second through hole is formed in the circumferential surface of the second connecting rod, the second connecting rod and the first connecting rod are welded and fixed into a whole, and the second through hole is communicated with the first through hole.
Furthermore, two concave grooves are symmetrically formed in the first connecting rod, and a transverse rectangular groove is fixedly formed in the outer end face of one end, far away from the second connecting rod, of the first connecting rod.
Furthermore, the number of the support plates is three, and the support plates are fixedly connected with the fourth connecting rods in a welding mode.
Further, a fixing table is fixedly formed at the upper end of the support plate, a fixing hole is fixedly formed at the upper end of the fixing table, and the fixing hole extends to penetrate through the support plate.
Furthermore, a welding table is fixed at one end, connected with the fourth connecting rod, of the support plate, and a slope opening angle is fixed on the welding table.
Furthermore, at least 2 symmetrical through holes are formed in the support plate.
A processing technology of a tray lifting shaft weldment comprises the following steps:
1) blanking integrally and cleaning blanks, soaking by 2% HF, and cleaning by pure water;
2) punching the first connecting rod and the second connecting rod through a lathe, integrally polishing, fully annealing, and keeping the temperature for 120 minutes; soaking by 2% HF, and cleaning by pure water;
3) milling and flat grinding the support plate, punching, chamfering, polishing the whole, fully annealing, keeping the temperature for 120 minutes, soaking by 2 percent HF, and cleaning by pure water;
4) connecting the first connecting rod, the second connecting rod and the third connecting rod through lathe fire processing, soaking by 2% of HF, and cleaning by pure water;
5) fully annealing after rod connection, and keeping the temperature for 120 minutes;
6) checking whether the concentricity of the butted quartz rods is qualified, turning a concave groove and a rectangular groove, processing an extension shaft, soaking by 2% HF, and cleaning by pure water;
7) welding, assembling and welding the support plate and the fourth connecting rod, soaking in 2% HF, and cleaning with pure water;
8) polishing the whole body, fully annealing, and keeping the temperature for 120 minutes;
9) and (5) checking the stress, then checking the appearance, packaging and warehousing.
Compared with the prior art, the invention has the beneficial effects that: according to the invention, the opaque quartz is added in the middle of the quartz rod, heat resistance is realized, the rod body is prevented from being overheated, the sealing ring exceeds the heating limit, the opaque quartz and the transparent quartz are butted and then connected in the processing process, namely the opaque quartz is added in the transparent quartz rod, and the support plate is ensured.
Drawings
FIG. 1 is a general schematic of the present invention;
fig. 2 is a schematic view of a first connecting rod of stone according to the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.
As shown in fig. 1-2, a tray lifting shaft weldment comprises a first connecting rod 1, a second connecting rod 2, a third connecting rod 3, a fourth connecting rod 31, a support plate 4, a fixing table 5 and an extension shaft 6, wherein the first connecting rod 1, the second connecting rod 2, the third connecting rod 3 and the fourth connecting rod 31 are fixed into a whole in a welding mode, the third connecting rod 3 is opal quartz, the extension shaft 6 is fixed at the upper end of the fourth connecting rod 31, the extension shaft 6 and the fourth connecting rod 31 are of an integral structure, and the support plate 4 is fixed on the outer circumference of the joint of the extension shaft 6 and the fourth connecting rod 31.
In this embodiment, a first through hole is formed in the center of the first connecting rod 1, and the first through hole extends to the second connecting rod 2.
In this embodiment, a second through hole is formed on the circumferential surface of the second connecting rod 2, the second connecting rod 2 and the first connecting rod 1 are welded and fixed into a whole, and the second through hole and the first through hole are mutually communicated.
In this embodiment, two concave grooves are symmetrically formed on the first connecting rod 1, and a transverse rectangular groove is fixed on the outer end face of the first connecting rod 1 away from one end of the second connecting rod 2.
In this embodiment, the number of the support plates 4 is three, and the support plates 4 are fixedly connected with the fourth connecting rods 31 in a welding manner.
In this embodiment, the fixed shaping of 4 upper ends of mounting panel is equipped with fixed station 5, fixed opening of 5 upper ends of fixed station has the fixed orifices, the fixed orifices extends and link up mounting panel 4.
In this embodiment, a welding table is fixed at one end of the support plate 4 connected with the fourth connecting rod 31, and an open slope angle is fixed on the welding table.
In this embodiment, the support plate 4 has at least 2 symmetrical through holes.
A processing technology of a tray lifting shaft weldment comprises the following steps:
1) blanking integrally and cleaning blanks, soaking by 2% HF, and cleaning by pure water;
2) punching the first connecting rod 1 and the second connecting rod 2 through a lathe, polishing the whole, fully annealing, and keeping the temperature for 120 minutes; soaking by 2% HF, and cleaning by pure water;
3) milling and flat grinding the support plate 4, punching, chamfering, polishing the whole, fully annealing, keeping the temperature for 120 minutes, soaking by 2 percent HF, and cleaning by pure water;
4) connecting the first connecting rod 1, the second connecting rod 2 and the third connecting rod 3 through lathe fire processing, soaking by 2% of HF, and cleaning by pure water;
5) fully annealing after rod connection, and keeping the temperature for 120 minutes;
6) checking whether the concentricity of the butted quartz rods is qualified, turning a concave groove and a rectangular groove, processing an extension shaft 6, soaking by 2% HF, and cleaning by pure water;
7) welding, assembling and welding the support plate 4 and the fourth connecting rod 31, soaking in 2% HF, and cleaning with pure water;
8) polishing the whole body, fully annealing, and keeping the temperature for 120 minutes;
9) and (5) checking the stress, then checking the appearance, packaging and warehousing.
In the single chip system, a silicon chip is processed each time, a shaft of the product in the process is a main component in the system, the shaft consists of a phi 15mm quartz rod and 3 quartz chips, the quartz rod is a main component of the shaft, a section of opaque quartz is welded on the shaft, the heat insulation effect is achieved, and the sealing ring at the contact part is prevented from being rapidly aged due to the fact that more heat energy is dissipated to the outside of a cavity from the quartz component. The locating slot under the quartz rod is connected with the mechanical rotating motor, which is the main locating mode for rotating the quartz shaft. The three support pieces are in a balanced state in the same plane and are uniformly distributed according to 120 degrees, so that the support pieces are in relative balance, when the main shaft rotates, the same centrifugal force exists, the silicon wafer on the shaft can rotate in a balanced manner, the centrifugal swing of the shaft is not generated, the silicon wafer process is stable and uniform, and the yield is high.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (9)

1. The utility model provides a tray lift shaft weldment which characterized in that: including first connective bar (1), second connective bar (2), third connective bar (3), fourth connective bar (31), mounting panel (4), fixed station (5), extension axle (6), first connective bar (1), second connective bar (2), third connective bar (3), fourth connective bar (31) are fixed as an organic whole through the welding mode, third connective bar (3) are opal quartz, are located fourth connective bar (31) upper end is fixed with extension axle (6), extend axle (6) and fourth connective bar (31) structure as an organic whole, be located extend axle (6) with fixed mounting panel (4) that are equipped with on the outer circumference of the department that meets fourth connective bar (31).
2. A pallet lift shaft weldment as claimed in claim 1 wherein: a first through hole is formed in the center of the first connecting rod (1) and extends to the second connecting rod (2).
3. A pallet lift shaft weldment according to claim 1 or 2 wherein: the second through hole is formed in the circumferential surface of the second connecting rod (2), the second connecting rod (2) and the first connecting rod (1) are welded and fixed into a whole, and the second through hole is communicated with the first through hole.
4. A pallet lift shaft weldment according to claim 1 or 2 wherein: two concave grooves are symmetrically formed in the first connecting rod (1), and a transverse rectangular groove is fixedly formed in the outer end face, far away from one end of the second connecting rod (2), of the first connecting rod (1).
5. A pallet lift shaft weldment as claimed in claim 1 wherein: the three support plates (4) are uniformly distributed, and the support plates (4) are fixedly connected with the fourth connecting rods (31) in a welding mode.
6. A pallet lift shaft weldment as claimed in claim 1 wherein: the fixing device is characterized in that a fixing table (5) is fixedly formed at the upper end of the support plate (4), a fixing hole is fixedly formed at the upper end of the fixing table (5), and the fixing hole extends to penetrate through the support plate (4).
7. A pallet lift shaft weldment as claimed in claim 1 wherein: one end of the support plate (4) connected with the fourth connecting rod (31) is fixed with a welding table, and a slope opening angle is fixed on the welding table.
8. A pallet lift shaft weldment according to claims 5-6 wherein: at least 2 symmetrical through holes are formed in the support plate (4).
9. The process for manufacturing a pallet lift shaft weldment according to claims 1-8, comprising the steps of:
1) blanking integrally and cleaning blanks, soaking by 2% HF, and cleaning by pure water;
2) punching the first connecting rod (1) and the second connecting rod (2) through a lathe, polishing the whole, fully annealing, and keeping the temperature for 120 minutes; washing with 2% HF and pure water;
3) milling and flat grinding the support plate (4), punching, chamfering, integrally polishing, fully annealing, keeping the temperature for 120 minutes, soaking by 2 percent HF, and cleaning by pure water;
4) connecting the first connecting rod (1), the second connecting rod (2) and the third connecting rod (3) through lathe fire processing, soaking with 2% HF, and cleaning with pure water;
5) fully annealing after rod connection, and keeping the temperature for 120 minutes;
6) checking whether the concentricity of the butted quartz rods is qualified, turning a concave groove and a rectangular groove, processing an extension shaft (6), soaking by 2% HF, and cleaning by pure water;
7) welding, assembling and welding a support plate (4) and a fourth connecting rod (31), wherein 3 support pieces are uniformly welded on the fourth connecting rod (31) at 120 degrees, the angle tolerance is guaranteed to be +/-2 degrees, the diameter tolerance is smaller than 0.2mm, and the support pieces are soaked in 2% HF and cleaned by pure water;
8) polishing the whole body, fully annealing, and keeping the temperature for 120 minutes;
9) and (5) checking the stress, then checking the appearance, packaging and warehousing.
CN201911331291.1A 2019-12-21 2019-12-21 Tray lifting shaft weldment and processing technology thereof Active CN111517257B (en)

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Application Number Priority Date Filing Date Title
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JP2003142411A (en) * 2001-10-31 2003-05-16 Applied Materials Inc Semiconductor manufacturing device
JP2004172392A (en) * 2002-11-20 2004-06-17 Komatsu Electronic Metals Co Ltd Apparatus for manufacturing semiconductor epitaxial wafer, susceptor, and apparatus for supporting susceptor
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CN107706126A (en) * 2016-08-09 2018-02-16 北京凯德石英股份有限公司 A kind of vertical bell jar and processing method
CN207091552U (en) * 2017-07-24 2018-03-13 上海强华实业有限公司 A kind of more temperature measuring areas are heat-insulated to strengthen photovoltaic silicon wafer quartz diffusion furnace
CN207121536U (en) * 2017-05-10 2018-03-20 北京凯德石英股份有限公司 A kind of Novel quartz pipe
CN207564754U (en) * 2017-12-04 2018-07-03 江西省环球陶瓷有限公司 A kind of Ceramic manufacturing device for clamping and rotating
CN110127993A (en) * 2019-05-17 2019-08-16 湖州东科电子石英有限公司 The welding procedure of opaque quartz plate and suprasil stick
CN212450536U (en) * 2019-12-21 2021-02-02 北京凯德石英股份有限公司 Tray lifting shaft weldment

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003037067A (en) * 2001-07-09 2003-02-07 Applied Materials Inc Apparatus and method for manufacturing semiconductor
JP2003142411A (en) * 2001-10-31 2003-05-16 Applied Materials Inc Semiconductor manufacturing device
JP2004172392A (en) * 2002-11-20 2004-06-17 Komatsu Electronic Metals Co Ltd Apparatus for manufacturing semiconductor epitaxial wafer, susceptor, and apparatus for supporting susceptor
CN101079371A (en) * 2006-05-22 2007-11-28 台湾圆益石英股份有限公司 Quartz component, heat-preservation canister and reactor and making method for quartz component and heat-preservation
CN101079372A (en) * 2006-05-25 2007-11-28 索尼株式会社 Substrate treating method and method of manufacturing semiconductor apparatus
JP2011119391A (en) * 2009-12-02 2011-06-16 Sumco Corp Susceptor for epitaxial growth, and epitaxial growth device using the susceptor
JP2011258895A (en) * 2010-06-11 2011-12-22 Shin Etsu Handotai Co Ltd Epitaxial growth system and method of manufacturing epitaxial wafer
JP2013138114A (en) * 2011-12-28 2013-07-11 Applied Materials Inc Semiconductor manufacturing apparatus and susceptor supporting member
CN107578984A (en) * 2013-03-27 2018-01-12 应用材料公司 Base supports portion and the epitaxial growth equipment for including base supports portion
CN203888041U (en) * 2014-06-03 2014-10-22 晶龙实业集团有限公司 Special cutter for machining slender graphite rod
CN104444090A (en) * 2014-09-28 2015-03-25 合肥常菱汽车零部件有限公司 Coating hook
CN205905227U (en) * 2016-06-13 2017-01-25 宜昌贝特石墨新材料有限公司 Production graphite seal ring's electrodeless regulation lathe chuck
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CN207564754U (en) * 2017-12-04 2018-07-03 江西省环球陶瓷有限公司 A kind of Ceramic manufacturing device for clamping and rotating
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Effective date of registration: 20210305

Address after: No.6, Fuxing 3rd Street, development zone, Fuxian Town, Tongzhou District, Beijing

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