CN207050663U - A kind of optical detection apparatus - Google Patents
A kind of optical detection apparatus Download PDFInfo
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- CN207050663U CN207050663U CN201720683345.0U CN201720683345U CN207050663U CN 207050663 U CN207050663 U CN 207050663U CN 201720683345 U CN201720683345 U CN 201720683345U CN 207050663 U CN207050663 U CN 207050663U
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- mobile platform
- detection components
- sliding block
- table top
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Abstract
The utility model discloses a kind of optical detection apparatus, relate to technical field of optical detection, including frame, display, feeding material component, the first detection components, moving assembly and the second detection components;The display is fixed in the frame, and the upper surface of the frame is table top, and the feeding material component is fixed on the upper of the table top;The moving assembly, second detection components are fixedly installed on the table top, and the first detection components combination is arranged on the moving assembly;First detection components, second detection components are electrically connected with the display respectively.The detection of the length and width and upper hole site size of product is realized in the present embodiment by the first detection components, the detection of product profile tolerance is realized by the second detection components;The structure of optical detection apparatus described in the present embodiment is simple, and its detection difficulty is small, the data error of efficiency high and detection is small, precision is high.
Description
Technical field
Technical field of optical detection is the utility model is related to, more particularly to a kind of optical detection apparatus.
Background technology
With developing rapidly for social productive forces, new industry production technology means are also increasingly modernized;Wherein, wrap
Major industry such as electronic product, Aero-Space, automobile is included, various complicated 3D (3Dimensions) glass occurs
Product.
Usual people carry out management and control using the various instruments of inspections and inspection technology to the quality of 3D glass products, and traditional
Desk checking instrument and inspection technology when being measured to the size and profile tolerance of 3D glass products, it is measured, and difficulty is big, effect
Rate is low, error is big, and wastes manpower and time.
Utility model content
The purpose of this utility model is to be directed to technical problem existing for prior art, there is provided a kind of optical detection apparatus,
When mainly solving traditional desk checking instrument and inspection technology 3D glass products being measured, it is measured, and difficulty is big, efficiency is low
And error it is big the problem of.
In order to solve posed problems above, the utility model provides a kind of optical detection apparatus, including frame, display
Device, feeding material component, the first detection components, moving assembly and the second detection components;
The display is fixed in the frame, and the upper surface of the frame is table top, and the feeding material component is fixed on
The centre position of the table top;
The moving assembly is fixedly installed on the table top, and positioned at the top of the feeding material component, first inspection
Survey component combination to be arranged on the moving assembly, the moving assembly drives first detection components to transport in the horizontal direction
It is dynamic;
Second detection components are fixedly installed on the table top, and are located at the feeding material component and the first detection components
Top;First detection components, second detection components are electrically connected with the display respectively.
As further improvement of the utility model, the feeding material component includes fixture, the first drag chain and the first movement
Platform, the intermediate region of the fixture are machined with boss;
First mobile platform is fixed on the centre position of the table top, and the fixture is slided with first mobile platform
Dynamic connection, first drag chain are fixed on the side of the fixture by connector, and first drag chain drives the fixture to exist
Moved on first mobile platform.
As further improvement of the utility model, the feeding material component also include locating piece, locating dowel, light emitting source and
Light source mounting bracket;
The quantity of the light source mounting bracket is four, and is separately positioned on around the boss;The number of the light emitting source
Amount is identical with the quantity of the light source mounting bracket, and the light emitting source is separately mounted on the light source mounting bracket;
The locating piece is arranged on around the boss;The locating dowel is arranged on the boss, and the positioning
The lower section of post is provided with pneumatic means.
As further improvement of the utility model, the quantity of the locating piece and the locating dowel is three.
As further improvement of the utility model, first detection components include the second mobile platform, the first sliding block
And shaft coupling;
Second mobile platform is fixedly installed on the moving assembly, and second mobile platform can be with the shifting
Dynamic component side-to-side movement;
The shaft coupling, first sliding block are from top to bottom successively set in second mobile platform, the shaft coupling
The lower end of device is fixed on first sliding block, and the upper end of the shaft coupling is connected with motor, and the motor drives the shaft coupling
Device, and drive first sliding block to be moved up and down in second mobile platform.
As further improvement of the utility model, first detection components also include transfer block, installing plate and phase
Machine;
The transfer block is fixedly installed on first sliding block, and the installing plate is fixedly installed in the transfer block,
The camera is fixedly installed on the installing plate, and the camera is electrically connected with the display.
As further improvement of the utility model, the moving assembly is flat including two pieces of risers, supporting plate, the 3rd movement
Platform, the second sliding block and the second drag chain;
The lower end of two pieces of risers is separately fixed on the table top, and the both ends of the supporting plate are secured transverse to described
The upper end of two pieces of risers, the 3rd mobile platform are fixed in the supporting plate;
Second sliding block is slidably connected with the 3rd mobile platform, and second drag chain is arranged on second sliding block
Side, and be fixedly connected by connector with second sliding block, second drag chain drives second sliding block described
Moved left and right on 3rd mobile platform.
As further improvement of the utility model, the moving assembly also includes pinboard, vertical installing plate and added
Strengthening tendons;
The pinboard is fixed on the upper end of second sliding block, and the vertical installing plate is fixed on the pinboard vertically
On, the vertical installing plate is fixed by the reinforcement.
As further improvement of the utility model, second detection components include the first column, the second column and
Air-flotation system;
First column, second column are arranged side by side, and first column is arranged on the side of the table top, institute
State the opposite side that the second column is arranged on the table top;
The air-flotation system includes air floating platform, hoistable platform and the 4th mobile platform, and the air floating platform is fixed and set
Put in the side of the table top, positioned at the lower section of second column, the both ends of the 4th mobile platform are secured transverse to institute
The upper end of the first column and second column is stated, the hoistable platform is slidably connected on the 4th mobile platform, described
Hoistable platform carries out motion up and down in the 4th mobile platform.
As further improvement of the utility model, second detection components also include detector;
The detector is laser, and manipulator is integrated with the laser, and the detector passes through the manipulator
Installed in the lower end of the hoistable platform, the hoistable platform drives the detector to move up and down.
Compared with prior art, the beneficial effects of the utility model are:
The detection of the length and width and upper hole site size of product to be detected is realized in the present embodiment by the first detection components,
The detection of product profile tolerance to be detected is realized by the second detection components;The structure letter of optical detection apparatus described in the present embodiment
Single, its detection difficulty is small, the data error of efficiency high and detection is small, precision is high.
Brief description of the drawings
Fig. 1 is the structural representation of the optical detection apparatus described in the utility model embodiment;
Fig. 2 is the structural representation of the feeding material component described in the utility model embodiment;
Fig. 3 is the structural representation of the first detection components described in the utility model embodiment;
Fig. 4 is the structural representation of the moving assembly described in the utility model embodiment.
Description of reference numerals:100- frames;110- table tops;200- displays;300- feeding material components;310- locating pieces;
320- light emitting sources;330- light source mounting brackets;340- fixtures;350- locating dowels;The drag chains of 360- first;The mobile platforms of 370- first;
380- boss;The detection components of 400- first;The mobile platforms of 410- second;The sliding blocks of 420- first;430- transfer blocks;440- is installed
Plate;450- cameras;460- shaft couplings;500- moving assemblies;510- risers;520- supporting plates;The mobile platforms of 530- the 3rd;
The sliding blocks of 540- second;The drag chains of 550- second;560- pinboards;The vertical installing plates of 570-;580- reinforcements;600- second is detected
Component;The columns of 610- first;The columns of 620- second;630- air-flotation systems;631- air floating platforms;632- hoistable platforms;633-
Four mobile platforms;640- detectors.
Embodiment
For the ease of understanding the utility model, the utility model is more fully retouched below with reference to relevant drawings
State.Preferred embodiment of the present utility model is given in accompanying drawing.But the utility model can come in fact in many different forms
It is existing, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is made to public affairs of the present utility model
Open the understanding more thorough and comprehensive of content.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.
It is the structural representation of optical detection apparatus described in the utility model embodiment, it includes frame shown in reference picture 1
100th, display 200, feeding material component 300, the first detection components 400, the detection components 600 of moving assembly 500 and second;
The display 200 is fixed in the frame 100;The upper surface of the frame 100 is table top 110, described to send
Material component 300 is fixed on the centre position of the table top 110, and the feeding material component 300 is used for the transmission of product to be detected;
The moving assembly 500 is fixedly installed on the table top 110, and positioned at the top of the feeding material component 300, institute
State the combination of the first detection components 400 to be arranged on the moving assembly 500, the moving assembly 500 is used to drive described first
Detection components 400 are moved in the horizontal direction;Second detection components 600 are fixedly installed on the table top 110, and are located at
The top of the detection components 400 of feeding material component 300 and first;First detection components 400, second detection components
600 are electrically connected with the display 200 respectively;First detection components 400 are used to detect product appearance size to be detected
Data message, and the data information transfer of product appearance size to be detected is shown to the display 200;Second inspection
The data message that component 600 is used to detect product profile tolerance to be detected is surveyed, and the data message of product profile tolerance to be detected is passed
It is defeated to be shown to the display 200.
Shown in reference picture 2, for the structural representation of feeding material component 300 described in the utility model embodiment, the feeding group
Part 300 include locating piece 310, light emitting source 320, light source mounting bracket 330, fixture 340, locating dowel 350, the first drag chain 360 and
First mobile platform 370;
First mobile platform 370 is fixed on the centre position of the table top 110, the fixture 340 and described first
Mobile platform 370 is slidably connected, and first drag chain 360 is fixed on the side of the fixture 340 by connector, and described first
Drag chain 360 is used to drive the fixture 340 to move on first mobile platform 370;The intermediate region of the fixture 340 adds
Work has boss 380, and the boss 380 is used to place product to be detected;The light emitting source 320 is arranged on the light source mounting bracket
330, the light emitting source 320 is used to carry out polishing projection, the number of light source mounting bracket described in the present embodiment 330 to product to be detected
Measure as four, and be separately positioned on around the boss 380, the quantity of the light emitting source 320 and the light source mounting bracket
330 quantity is identical;Light emitting source 320 described in the present embodiment can be light emitting diode, LED (Light Emitting
Diode) lamp etc., the quantity of the locating piece 310 is three pieces, and is separately positioned on around the boss 380, and described three pieces fixed
Position block 310 can determine that the plane of product to be detected, and the direction of product to be detected is positioned;The locating dowel 350 is set
On the boss 380, the lower section of the locating dowel 350 is provided with pneumatic means (not shown), when the pneumatic means is ventilated,
The locating dowel 350 adsorbs product to be detected, avoids product to be detected from sliding the misalignment for causing to detect data in detection process;
The quantity of locating dowel 350 described in this implementation is three, so that the locating dowel 350 reaches optimal adsorption effect;In this reality
With in new other embodiment, the locating dowel 350 can set its quantity according to specific detection demand, in the utility model
It is defined in application not to this.
It is the structural representation of the first detection components 400 described in the utility model embodiment shown in reference picture 3, described the
One detection components 400 include the second mobile platform 410, the first sliding block 420, transfer block 430, installing plate 440, camera 450 and
Shaft coupling 460;Second mobile platform 410 is fixedly installed on the moving assembly 500, second mobile platform 410
Driven by the moving assembly 500 and side-to-side movement;The shaft coupling 460, first sliding block 420 are from top to bottom set successively
Put in second mobile platform 410, the lower end of the shaft coupling 460 is fixed on first sliding block 420, the shaft coupling
The upper end of device 460 is connected with motor (not shown), and the motor is used to drive the shaft coupling 460, and drives described first to slide
Block 420 moves up and down in second mobile platform 410;The transfer block 430 is fixedly installed on first sliding block 420
On, the installing plate 440 is fixedly installed in the transfer block 430, and the camera 450 is fixedly installed on the installing plate 440
On, the camera 450 is electrically connected with the display 200, and camera 450 described in the present embodiment is CCD (Charge
Coupled Device) detection camera, data message of the camera 450 for detecting product appearance size to be detected, and will
The data information transfer is on the display;The data message of apparent size described in the present embodiment is included with detection product
Length and width and the position dimension in upper hole.
Shown in reference picture 4, for the structural representation of the moving assembly 500 described in the utility model embodiment, the movement
Component 500 includes two pieces of risers 510, supporting plate 520, the 3rd mobile platform 530, the second sliding block 540, the second drag chain 550, switching
Plate 560, vertical installing plate 570 and reinforcement 580;The lower end of two pieces of risers 510 is separately fixed at the table top 110
On, the both ends of the supporting plate 520 are secured transverse to the upper end of two pieces of risers 510, and the 3rd mobile platform 530 is fixed
In the supporting plate 520, the supporting plate 520 is used to support and fixed 3rd mobile platform 530;Second sliding block
540 are slidably connected with the 3rd mobile platform 530, and second drag chain 550 is arranged on the side of second sliding block 540,
And be fixedly connected by connector with second sliding block 540, second drag chain 550 is used to drive second sliding block 540
Moved left and right on the 3rd mobile platform 530;The pinboard 560 is fixed on the upper end of second sliding block 540, described
Vertical installing plate 570 is fixed on the pinboard 560 vertically, and the vertical installing plate 570 is used to install first detection
Component 400, the vertical installing plate 570 are fixed by the reinforcement 580, and the reinforcement 580 is described vertical for supporting
Installing plate 570, and ensure the vertical position of first detection components 400.
Referring again to shown in Fig. 1, second detection components 600 include the first column 610, the second column 620, air supporting system
System 630 and detector 640;First column 610, second column 620 are arranged side by side, wherein, first column
610 are arranged on the side of the table top 110, and second column 620 is arranged on the opposite side of the table top 110, the present embodiment
Described in the second column 620 be provided with one layer of protecting crust, for protecting second column 620;
The air-flotation system 630 includes air floating platform 631, the mobile platform 633 of hoistable platform 632 and the 4th, the gas
Floating platform 631 is fixedly installed on the side of the table top 110, and positioned at the lower section of second column 620, the 4th movement is flat
The both ends of platform 633 are secured transverse to the upper end of first column 610 and second column 620, the hoistable platform 632
It is slidably connected on the 4th mobile platform 633, first column 610 is used to support and fixed 4th mobile platform
660, second column 620 is used to be oriented to the direction of motion of air-flotation system 630;When the air-flotation system 630 is logical
During gas, the hoistable platform 632 can be driven to be moved up and down in the 4th mobile platform 633;
The detector 640 is fixed on the lower end of the hoistable platform 632, and detector 640 described in this implementation is laser
Device, manipulator is integrated with the laser, the detector 640 is arranged on the hoistable platform 632 by the manipulator
Lower end, the detector 640 moves up and down with the hoistable platform 632, to realize the detector 640 to be checked
Survey the multi-orientation detection of product three dimensions.
In embodiment of the present utility model, the table top 110 is made up of marble, the marmorean stable performance,
Service life is grown, and the frame 100 is used to support and the fixed table top 110;In the present embodiment, set in the frame 100
Functional button, the function button include scram button, start button, power knob and indicator knob, are held with corresponding
Row to the jerk of the optical detection apparatus, start and the functions such as open and close to power supply and the display 200 control;
In other embodiment of the present utility model, the material of the table top 110 can use other materials according to the detection demand of reality,
It is defined in the present utility model application not to this.
In embodiment of the present utility model, the display 200 can be fixed on the table top 110 by a mounting bracket
Side, to save the space of the table top 110;The display 200 also includes matched keyboard and mouse,
The data message of apparent size and profile tolerance shown on the display 200 can be entered by the keyboard and mouse
The operation such as row preservation or modification.
In embodiment of the present utility model, apparent size of the camera 450 according to image principle to product to be detected
Detected, it is possible to achieve the detection of the length of product to be detected and upper hole site size;The detector 640 is laser
Device, the laser are sampled, and calculate these and put it according to laser reflection principle from the point of the multiple angles of product to be detected
Between distance, so as to draw the profile tolerance of product to be detected, realize the detection of product profile tolerance to be detected.In the present embodiment, institute
State laser caused by detector 640 not contact with product to be detected, to avoid product to be detected from being damaged or break;In this practicality
In new other embodiment, the detector 640 can select different lasers according to different detection demands, at this
It is defined in utility model application not to this.
In embodiment of the present utility model, the detection process of the optical detection apparatus is as follows:
Product to be detected is placed on the fixture 340, and passes through the locating dowel 310 and the locating dowel 350
Product to be detected is adsorbed and positioned;First drag chain 360 drives the fixture 340 in first mobile platform
Moved on 370, first mobile platform 370 is moved to the underface of the camera 450;
The light emitting source 320 is lighted, and to carrying out polishing projection on product to be detected, adjusts the position of the camera 450,
The camera 450 detects according to image principle to the apparent size of product to be detected, the apparent size of its product to be detected
Position including length and width and upper hole, the camera 450 is by the apparent size data information transfer detected to the display 200
On;
After to be detected, the correcting action of camera 450;The detector 640 drives in the air-flotation system 630
Under dynamic, as the hoistable platform 632 moves up and down, so as to be sampled to the point of multiple angles on product to be detected,
And the distance between these points are calculated, so as to draw the profile tolerance of product to be detected, the profile that the detector 640 will detect
Degrees of data information transfer is on the display 200, the corresponding apparent size for showing the product to be detected of the display 200
Data and profile degrees of data, by the apparent size data and profile degrees of data judge product to be detected length and width, on
Whether hole site size and profile tolerance meet the specification of product, that is, judge whether product to be detected is qualified.
In the present embodiment the length of product to be detected and upper hole site size are realized by first detection components 400
Detection, the detection of product profile tolerance to be detected is realized by second detection components 600;Optical detection described in the present embodiment
The structure of device is simple, and its detection difficulty is small, the data error of efficiency high and detection is small, precision is high.
In the present embodiment, those skilled in the art will be appreciated that term " comprising ", "comprising" or its it is any its
His variant is intended to including for nonexcludability, except comprising those listed key elements, but also can include and be not expressly set out
Other element.
In the present embodiment, the involved noun of locality such as forward and backward, upper and lower is located in figure and tied with structure in accompanying drawing
The mutual position of structure is intended merely to the clear of expression technology scheme and conveniently come what is defined.It should be appreciated that the noun of locality
Use should not limit the claimed scope of the application.
Embodiment of the present utility model is simultaneously not restricted to the described embodiments, other any without departing from the utility model
Spirit Essence with made under principle change, modification, replacement, combine, simplification, should be equivalent substitute mode, also all wrap
It is contained within the scope of protection of the utility model.
Claims (10)
- A kind of 1. optical detection apparatus, it is characterised in that:Including frame, display, feeding material component, the first detection components, movement Component and the second detection components;The display is fixed in the frame, and the upper surface of the frame is table top, and the feeding material component is fixed on described The centre position of table top;The moving assembly is fixedly installed on the table top, and positioned at the top of the feeding material component, the first detection group Part combination is arranged on the moving assembly, and the moving assembly drives first detection components to move in the horizontal direction;Second detection components are fixedly installed on the table top, and positioned at the upper of the feeding material component and the first detection components Side;First detection components, second detection components are electrically connected with the display respectively.
- 2. optical detection apparatus according to claim 1, it is characterised in that:The feeding material component drags including fixture, first Chain and the first mobile platform, the intermediate region of the fixture are machined with boss;First mobile platform is fixed on the centre position of the table top, and the fixture slides with first mobile platform to be connected Connect, first drag chain is fixed on the side of the fixture by connector, and first drag chain drives the fixture described Moved on first mobile platform.
- 3. optical detection apparatus according to claim 2, it is characterised in that:The feeding material component also includes locating piece, determined Position post, light emitting source and light source mounting bracket;The quantity of the light source mounting bracket is four, and is separately positioned on around the boss;The quantity of the light emitting source with The quantity of the light source mounting bracket is identical, and the light emitting source is separately mounted on the light source mounting bracket;The locating piece is arranged on around the boss;The locating dowel is arranged on the boss, and the locating dowel Lower section is provided with pneumatic means.
- 4. optical detection apparatus according to claim 3, it is characterised in that:The quantity of the locating piece and the locating dowel It is three.
- 5. optical detection apparatus according to claim 1, it is characterised in that:First detection components include the second movement Platform, the first sliding block and shaft coupling;Second mobile platform is fixedly installed on the moving assembly, and second mobile platform can be with described mobile group Part side-to-side movement;The shaft coupling, first sliding block are from top to bottom successively set in second mobile platform, the shaft coupling Lower end is fixed on first sliding block, and the upper end of the shaft coupling is connected with motor, and the motor drives the shaft coupling, and First sliding block is driven to be moved up and down in second mobile platform.
- 6. optical detection apparatus according to claim 5, it is characterised in that:First detection components also include switching Block, installing plate and camera;The transfer block is fixedly installed on first sliding block, and the installing plate is fixedly installed in the transfer block, described Camera is fixedly installed on the installing plate, and the camera is electrically connected with the display.
- 7. optical detection apparatus according to claim 1, it is characterised in that:The moving assembly includes two pieces of risers, branch Fagging, the 3rd mobile platform, the second sliding block and the second drag chain;The lower end of two pieces of risers is separately fixed on the table top, and the both ends of the supporting plate are secured transverse to described two pieces The upper end of riser, the 3rd mobile platform are fixed in the supporting plate;Second sliding block is slidably connected with the 3rd mobile platform, and second drag chain is arranged on the side of second sliding block Face, and be fixedly connected by connector with second sliding block, second drag chain drives second sliding block the described 3rd Moved left and right on mobile platform.
- 8. optical detection apparatus according to claim 7, it is characterised in that:The moving assembly also includes pinboard, erected To installing plate and reinforcement;The pinboard is fixed on the upper end of second sliding block, and the vertical installing plate is fixed on the pinboard vertically, The vertical installing plate is fixed by the reinforcement.
- 9. optical detection apparatus according to claim 1, it is characterised in that:It is vertical that second detection components include first Post, the second column and air-flotation system;First column, second column are arranged side by side, and first column is arranged on the side of the table top, and described Two columns are arranged on the opposite side of the table top;The air-flotation system includes air floating platform, hoistable platform and the 4th mobile platform, and the air floating platform is fixedly installed on The side of the table top, positioned at the lower section of second column, the both ends of the 4th mobile platform are secured transverse to described The upper end of one column and second column, the hoistable platform are slidably connected on the 4th mobile platform, the lifting Platform carries out motion up and down in the 4th mobile platform.
- 10. optical detection apparatus according to claim 9, it is characterised in that:Second detection components also include detection Head;The detector is laser, and manipulator is integrated with the laser, and the detector is installed by the manipulator In the lower end of the hoistable platform, the hoistable platform drives the detector to move up and down.
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108716935A (en) * | 2018-08-27 | 2018-10-30 | 陈富威 | Windshield detection device |
CN110989220A (en) * | 2019-12-18 | 2020-04-10 | 苏州精濑光电有限公司 | Detection device |
CN113008794A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Detection equipment and optical detection method |
CN113008537A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Damping rack and detection equipment adopting same |
CN113008520A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Integrated function outer box and detection equipment adopting same |
-
2017
- 2017-06-13 CN CN201720683345.0U patent/CN207050663U/en active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108716935A (en) * | 2018-08-27 | 2018-10-30 | 陈富威 | Windshield detection device |
CN110989220A (en) * | 2019-12-18 | 2020-04-10 | 苏州精濑光电有限公司 | Detection device |
CN110989220B (en) * | 2019-12-18 | 2022-08-26 | 苏州精濑光电有限公司 | Detection device |
CN113008794A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Detection equipment and optical detection method |
CN113008537A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Damping rack and detection equipment adopting same |
CN113008520A (en) * | 2021-03-02 | 2021-06-22 | 苏州天准科技股份有限公司 | Integrated function outer box and detection equipment adopting same |
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Effective date of registration: 20220721 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |