Ball-type charging basket automatic rinser
Technical field
The cleaning device technical field of silicon material is the utility model is related to, more particularly to a kind of ball-type charging basket is automatic
Cleaning machine.
Background technology
Silicon material is a kind of particularly important defect semiconductor material, is to be used to manufacture transistor radio, recorder, video recording
The basic material of mechanical, electrical refrigerator, electronic computer etc., solar energy and photovoltaic industry are also widely used in addition.Silicon material makes
It is attached with multistage cleaning, metal ion, oxidizing substance, greasy dirt and the dust for being attached to surface with removal etc. will be passed through before
Thing.
The silicon material cleaning machine used at present, which mainly uses, cleans basketry feeding, and the manipulator in cleaning machine catches basketry both ends
Handle be put into rinse bath, pinion rotation is driven using motor, by chain drive, so as to drive cleaning basketry in groove
Rotate, realize cleaning.But existing cleaning machine is all using cleaning step by step, silicon material, need to be by manipulator by basket after the cleaning of every one-level
Basket proposes that placing into another cell body cleans, and causes the floor space of cleaning machine larger, and in transfer process, silicon material easily connects
Contact that air is oxidized, it is low in turn result in silicon material cleaning efficiency, and qualified silicon material yield is reduced.
Therefore, it is small how to provide a kind of floor space, is not easy to be oxidized, while the silicon material of cleaning efficiency and yield can be improved
The problem of cleaning machine is those skilled in the art's urgent need to resolve.
Utility model content
In view of this, the utility model provides a kind of ball-type charging basket automatic rinser, and the utility model uses PP materials,
Acid and alkali-resistance, high temperature resistant, pollution will not be produced to silicon material;Single rinse bath, floor space being reduced, charging basket is designed as ball-type,
Charging basket is rotated by connecting shaft in cleaning process, and silicon material is moved therewith under caused centrifugal action in rotation process, silicon material with
Cleaning fluid fully contacts, and improves cleaning efficiency;Acid concentration detector and PH detectors are realized by the operation of PLC control system
Real-time monitoring, realize the recycling of acid solution and pure water and improve cleaning efficiency.
In order to achieve the above object, the utility model adopts the following technical scheme that:
A kind of ball-type charging basket automatic rinser, including rinse bath, it is vertically installed in the connection of the rinse bath center
Axle, the charging basket being fixed on by the connecting shaft inside the rinse bath, the charging basket are in ball-type;The connecting shaft is through described
Charging basket, and the rinse bath inwall is fixed in the both ends of the connecting shaft by bearing;PLC is provided with outside the rinse bath
Control system;On the rinse bath, and the acid concentration detector being connected respectively with the PLC control system input
First, PH detectors one, the acid supplying system and pure water system of the rinse bath both sides are separately positioned on;
The acid supplying system includes the acid solution collection box connected with the rinse bath side by the first discharging tube, Yi Jiyu
Acid solution service tank that the acid solution collection box is sequentially communicated, acid solution configuration case;
The pure water system includes the pure water collection box connected with the rinse bath opposite side by the second discharging tube, and
Pure water service tank, the pure water supply source being sequentially communicated with the pure water collection box.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the charging basket is PP (polypropylene) material, and silicon material can not connect
The materials such as tactile steel, and PP sheet materials acid and alkali-resistance, high temperature resistant, are to best suit one of engineering plastics of environmental requirement at present.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the bottom of rinse bath is provided with ultrasonic cleaning machine, washing
During pass through ultrasonic oscillation, remove the impurity on silicon material surface.
Preferably, in above-mentioned ball-type charging basket automatic rinser, air pipeline is provided with the top of the rinse bath, has been cleaned
After complete and water is drained, the hot-air of cleaning is passed through, in charging basket rotation process, silicon material and hot air, baking can be reached
Dry effect.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the rinse bath has protection against oxidation by pipeline connection
Device, inert gas can be filled with silicon material cleaning process, prevent from improving the yield of qualified silicon material while silicon material from aoxidizing.
Preferably, in above-mentioned ball-type charging basket automatic rinser, in addition to, the motor with the connection axis connection, carry
For the power needed for silicon material cleaning process.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the acid solution collection box is provided with acid concentration detector two,
And the acid solution collection box is communicated with spent acid liquid case.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the pure water collection box is provided with PH detectors two, and
The pure water collection box is communicated with waste water tank.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the first valve is provided with first discharging tube.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the second valve is provided with second discharging tube.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the charging basket is PP materials, the not accessible steel of silicon material etc.
Material, and PP sheet materials acid and alkali-resistance, high temperature resistant, are to best suit one of engineering plastics of environmental requirement at present.
Preferably, in above-mentioned ball-type charging basket automatic rinser, the oxygen-proof protecting device by connecting tube with it is described
Communicated at the top of rinse bath, realize in silicon material cleaning process and be filled with inert gas, prevent silicon material from aoxidizing.
Understand that compared with prior art, the utility model, which discloses, provides a kind of ball-type material via above-mentioned technical scheme
Basket automatic rinser, charging basket used in cleaning process are PP materials, acid and alkali-resistance, high temperature resistant, will not produce pollution to silicon material;Cleaning
During, charging basket is rotated by connecting shaft, and silicon material is also moved therewith under caused centrifugal action in rotation process, and charging basket is set
Ball-type is calculated as, using the distinctive property of spheroid, ensure that the maximum of silicon material and cleaning fluid connects on the premise of minimum floor space
Contacting surface is accumulated, while charging basket both ends are connected by connecting shaft with rinse bath, are not only increased the steadiness of charging basket and are improved
Cleaning efficiency;The design of PLC control system realizes the automation of cleaning process, passes through acid concentration when cleaning machine is operated
The operation of detector and PH detectors, the real-time monitoring to cleaning fluid acid concentration and PH is realized, improves cleaning efficiency;For acid
System and pure water system can recycle the acid solution for meeting the standard of reusing and pure water, save ample resources, meet ring
Factoring is read.
Therefore, provided by the utility model is that a kind of floor space is small, is not easy to be oxidized, at the same can improve cleaning efficiency and
Yield, and the ball-type charging basket automatic rinser that cleaning fluid can recycle.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing of offer.
Fig. 1 accompanying drawings are overall structure diagram of the present utility model;
Fig. 2 accompanying drawings are the utility model PLC control system schematic diagram.
In Fig. 1:
1 it is rinse bath, 11 is that acid concentration detector one, 12 is ultrasonic cleaning machine, 13 is that PH detectors two, 14 are electronic
Machine, 15 be acid concentration detector two, 16 be PH detectors two, 17 be air pipeline, 2 be connecting shaft, 3 be charging basket, 6 be for acid be
System, 61 be acid solution collection box, 62 be acid solution service tank, 63 be acid solution configure case, 64 be spent acid liquid case, 7 be pure water system, 71 be
Pure water collection box, 72 be pure water service tank, 73 be pure water supply source, 74 be waste water tank, 81 be the first discharging tube, 82 be second row
Liquid pipe, 91 be the first valve, 92 be the second valve.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
The utility model embodiment discloses a kind of ball-type charging basket automatic rinser, just for block silicon material, is not suitable for
The cleaning of foam material, the utility model use PP materials, acid and alkali-resistance, high temperature resistant, pollution will not be produced to silicon material;Single cleaning
Groove, floor space is reduced, charging basket is designed as ball-type, and charging basket rotates by connecting shaft in cleaning process, in rotation process
Silicon material is moved therewith under caused centrifugal action, and silicon material fully contacts with cleaning fluid, improves cleaning efficiency;Controlled by PLC
The real-time monitoring of acid concentration detector and PH detectors is realized in the operation of system, realize acid solution and pure water recycling and
Improve cleaning efficiency.
Referring to accompanying drawing 1, the utility model provides a kind of ball-type charging basket automatic rinser, including rinse bath, is arranged at institute
It is in ball-type to state cleaning groove center and connecting shaft perpendicular to the ground, the charging basket inside the rinse bath, the charging basket, is led to
Cross the connecting shaft and be rotatably affixed to the rinse bath inwall through the charging basket and the connecting shaft, positioned at described clear
PLC control system outside washing trough, the acid concentration detector one being connected respectively with the PLC control system input, PH detections
Instrument one, it is separately positioned on the acid supplying system and pure water system of the rinse bath both sides;
Acid supplying system 6 includes the acid solution collection box 61 that is connected with the side of rinse bath 1 by the first discharging tube 81, and with acid
Acid solution service tank 62 that liquid collection box 61 is sequentially communicated, acid solution configuration case 63;
Pure water system 7 includes the pure water collection box 71, Yi Jiyu connected with the opposite side of rinse bath 1 by the second discharging tube 82
Pure water service tank 72 that pure water collection box 71 is sequentially communicated, pure water supply source 73.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, the charging basket 3 is PP materials
The material such as matter, the not accessible steel of silicon material, and PP sheet materials acid and alkali-resistance, high temperature resistant, are the engineering plastics for best suiting environmental requirement at present
One of material.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, the bottom of rinse bath 1 is set
There is ultrasonic cleaning machine 12, pass through ultrasonic oscillation, the impurity on removal silicon material surface in water-washing process.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, the top of rinse bath 1 is set
Have an air pipeline 17, cleaning finish and water it is drained after, be passed through the hot-air of cleaning, in charging basket rotation process, silicon material and heat
Air contact, drying effect can be reached.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, the rinse bath passes through
Pipeline connection has oxygen-proof protecting device, inert gas can be filled with silicon material cleaning process, while preventing that silicon material from aoxidizing
Improve the yield of qualified silicon material.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, connecting shaft 2 is connected with electricity
Motivation 14, there is provided the power needed for silicon material cleaning process.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, acid solution collection box 61 is set
Acid concentration detector 2 15 is equipped with, and acid solution collection box 61 is communicated with spent acid liquid case 64.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, pure water collection box 71 is set
PH detectors 2 16 are equipped with, and pure water collection box 71 is communicated with waste water tank 74.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, on the first discharging tube 81
It is provided with the first valve 91.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, on the second discharging tube 82
It is provided with the second valve 92.
In order to further optimize above-mentioned technical proposal, in above-mentioned ball-type charging basket automatic rinser, oxygen-proof protecting device 4
By connecting tube with being communicated inside rinse bath 1, realize in silicon material cleaning process and be filled with inert gas, prevent silicon material from aoxidizing.
The process cleaned using ball-type charging basket automatic rinser to silicon material is as follows:
(1) silicon material is put into charging basket 3, opens control power supply, motor 14 is started working, and charging basket 3 starts to rotate, simultaneously
From oxygen-proof protecting device 4 inert gas is filled with into rinse bath 1;
(2) pickling is carried out to silicon material, according to the program that PLC control system 5 is pre-set, opens the same of control power supply
When, acid solution enters acid solution service tank 62 by acid solution configuration case 63 by discharging tube, enters rinse bath by discharging tube afterwards
1, acid solution carries out pickling with spray regime in rinse bath 1 to silicon material, and certain pickling time is set by PLC control system 5,
In acid cleaning process, acid concentration detector 1 is monitored in real time in rinse bath 1 to cleaning fluid, until when reaching default
Between, acid cleaning process stops, if being detected before preset time is reached, acid concentration is reduced to cleaning fluid and presets acid concentration value, acid
Washed journey is automatically stopped, and the first valve 91 is opened, and cleaning fluid is discharged into acid solution collection box 61 by the first discharging tube 81, through acid concentration
Detector 2 15 detects, will be clear if the acid concentration of the acid solution in acid solution collection box 61 meets the default standard reused
Washing lotion, which is discharged into acid solution service tank 62, to be continued to recycle, and is otherwise drained into spent acid liquid case 64, so far acidization terminates;
(3) silicon material is washed, pure water is injected into pure water service tank 72 by pure water supply source 73 by discharging tube, then
Rinse bath 1 is entered by discharging tube, certain washing time is set, in water-washing process, PH detectors 1 are in rinse bath 1
Interior that cleaning fluid is monitored in real time, until reaching preset time, water-washing process stops, if being detected before preset time is reached
Qualified to cleaning fluid PH, then water-washing process is automatically stopped, and water-washing process is shaken with the operation of ultrasonic cleaning machine 12 by ultrasonic wave
The impurity for removing silicon material surface is swung, after reaching preset time, cleaning fluid is discharged into pure water collection box 71 by the second discharging tube 82, warp
PH detectors 2 16 detect, if the pure water PH in pure water collection box 71 meets the default standard reused, by cleaning fluid
It is discharged into pure water service tank 72 and continues cycling through use, be otherwise drained into waste water tank 74, so far water-washing process terminates;
(4) after water-washing process terminates, the rotary dehydration of charging basket 3 carries out spin-drying operation, sets drying effect in addition, and silicon material is clear
After washing, and after the completion of draining, the hot-air of cleaning, in the rotation process of charging basket 3, silicon material are passed through by air pipeline 17
With hot air, drying operation is realized, is finally discharged.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.For device disclosed in embodiment
For, because it is corresponded to the method disclosed in Example, so description is fairly simple, related part is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.