CN204953426U - Washing device of solar battery silicon wafers - Google Patents
Washing device of solar battery silicon wafers Download PDFInfo
- Publication number
- CN204953426U CN204953426U CN201520584548.5U CN201520584548U CN204953426U CN 204953426 U CN204953426 U CN 204953426U CN 201520584548 U CN201520584548 U CN 201520584548U CN 204953426 U CN204953426 U CN 204953426U
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- China
- Prior art keywords
- rinse bath
- washing tank
- outlet pipe
- valve
- cleaning device
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- Expired - Fee Related
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Abstract
The utility model relates to a washing device of solar battery silicon wafers, drive the rotary drum that has the hole including support, washing tank, surface, the washing tank setting is equipped with the rotary drum in the washing tank on the support, and the washing tank below is equipped with the motor, and the pivot is connected to the motor output, and in the pivot extended to the washing tank, the pivot was connected with the rotary drum, it separates the net to be equipped with a plurality of layers in the rotary drum, be equipped with temperature sensor, heating device, supersonic generator in the washing tank, the washing tank outside is equipped with the controller, and temperature sensor, heating device are connected with the controller respectively, washing tank outer wall lower extreme is equipped with the outlet pipe, the outlet pipe with arrange water piping connection, be equipped with the feed pipe between outlet pipe and the drain pipe, the play water end (W. E. ) of feed pipe extends to the washing tank top, be equipped with first valve on the outlet pipe, be equipped with the second valve on the drain pipe, be equipped with the water pump on the feed pipe, the utility model provides a belt cleaning device cleaning performance with wash after the inconvenient problem of operation of spin -drying.
Description
Technical field
The utility model relates to a kind of cleaning device, particularly relates to a kind of silicon chip of solar cell cleaning device.
Background technology
Along with the development of science and technology, the application of silicon chip is more and more wider, in various field, be obtained for application.
In semiconductor devices production, silicon chip must through strict cleaning.Micropollution also can cause component failure.The object of cleaning is to remove surface contamination impurity, comprises organic matter and inorganic matter.These impurity have with state of atom or ionic condition, have in the form of a film or particle form be present in silicon chip surface.Organic contamination comprises the grease or fiber that photoresist, organic solvent residual thing, synthetic wax and people's contact devices, instrument, vessel bring.Inorganic pollution comprises heavy metal gold, copper, iron, chromium etc., has a strong impact on minority carrier lifetime and surface conductance; Alkali metal, as sodium etc., causes serious drain; Particle contamination comprises white residue, dust, bacterium, microorganism, organic colloid fiber etc., can cause various defect.Remove the method polluted and have physical cleaning and Chemical cleaning two kinds.
Need during Wafer Cleaning to use cleaning device, but general cleaning device cleaning performance is poor, and also will takes out after Wafer Cleaning and dry, operate cumbersome.
Utility model content
The purpose of the present utility model is to provide a kind of silicon chip of solar cell cleaning device, and this silicon chip of solar cell cleaning device solves cleaning device cleaning performance problem that is bad and spin-drying operation inconvenience after cleaning.
In order to realize foregoing invention object, silicon chip of solar cell cleaning device of the present utility model comprises support, rinse bath, pertusate rotating cylinder is driven on surface, rinse bath is arranged on support, rotating cylinder is provided with in rinse bath, motor is provided with below rinse bath, motor output end connection rotating shaft, rotating shaft extends in rinse bath, rotating shaft is connected with rotating cylinder, some layers of filter are provided with in described rotating cylinder, temperature sensor is provided with in described rinse bath, heater, supersonic generator, controller is provided with outside rinse bath, temperature sensor, heater is connected with controller respectively, described rinse bath outer wall lower end is provided with outlet pipe, outlet pipe is connected with drainpipe, feed pipe is provided with between outlet pipe and drainpipe, the water side of feed pipe extends to above rinse bath, described outlet pipe is provided with the first valve, drainpipe is provided with the second valve, feed pipe is provided with water pump.
Described heater is heating tube.
Described motor is Anti-vibration motor.
Described filter is connected with rotating cylinder inwall draw-in groove.
Described first valve, the second valve are magnetic valve.
Adopt this silicon chip of solar cell cleaning device, have the following advantages:
1, owing to being provided with rotating cylinder in rinse bath, motor is provided with below rinse bath, motor output end connection rotating shaft, rotating shaft extends in rinse bath, and rotating shaft is connected with rotating cylinder, like this when Wafer Cleaning, cleaning performance can be improved, and after having cleaned, rotating cylinder can be utilized to dry, operate very convenient;
2, owing to being provided with temperature sensor, heater in rinse bath, temperature sensor, heater are connected with controller respectively, when the rinse liquid temperature in rinse bath is higher or lower than range of set value, control heater by controller whether to work, so just can ensure that cleaning fluid remains at optimum cleaning temperature, improves cleaning performance; And employ supersonic generator, further increase cleaning performance;
3, because rinse bath outer wall lower end is provided with outlet pipe, outlet pipe is connected with drainpipe, is provided with feed pipe between outlet pipe and drainpipe, cleaning fluid can be made like this to circulate, further increase cleaning performance.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is the structural representation of the utility model silicon chip of solar cell cleaning device.
Wherein have: 1. support; 2. rinse bath; 3. rotating cylinder; 4. motor; 5. rotating shaft; 6. filter; 7. supersonic generator; 8. temperature sensor; 9. heater; 10. controller; 11. outlet pipes; 12. drainpipes; 13. feed pipes; 14. first valves; 15. water pumps; 16. second valves.
Detailed description of the invention
The cleaning device of silicon chip of solar cell shown in Fig. 1, comprise support 1, rinse bath 2, pertusate rotating cylinder 3 is driven on surface, rinse bath 2 is arranged on support 1, rotating cylinder 3 is provided with in rinse bath 2, motor 4 is provided with below rinse bath 2, motor 4 output connection rotating shaft 5, rotating shaft 5 extends in rinse bath 2, rotating shaft 5 is connected with rotating cylinder 3, some layers of filter 6 are provided with in described rotating cylinder 3, temperature sensor 8 is provided with in described rinse bath 2, heater 9, supersonic generator 7, controller 10 is provided with outside rinse bath 2, temperature sensor 8, heater 9 is connected with controller 10 respectively, described rinse bath 2 outer wall lower end is provided with outlet pipe 11, outlet pipe 11 is connected with drainpipe 12, feed pipe 13 is provided with between outlet pipe 11 and drainpipe 12, the water side of feed pipe 13 extends to above rinse bath 2, described outlet pipe 11 is provided with the first valve 14, drainpipe 12 is provided with the second valve 16, feed pipe 13 is provided with water pump 15.
Described heater 9 is heating tube.
Described motor 4 is Anti-vibration motor.
Described filter 6 is connected with rotating cylinder 3 inwall draw-in groove.
Described first valve 14, second valve 16 is magnetic valve.
When needs clean, be placed on by silicon chip on the filter 6 in rotating cylinder 3, then starter motor 4, rotating cylinder 3 is rotated, open the first valve 14 and water pump 15 simultaneously, close the second valve 16, such cleaning fluid just can be in recurrent state all the time; When rinse liquid temperature exceed or lower than design temperature time, temperature signal is passed to controller 10 by temperature sensor 8, is controlled whether to start or close heater 9 by controller 10, makes cleaning fluid remain at optimum temperature; After Wafer Cleaning is complete, switch off the pump 15, open the second valve 16, cleaning fluid is discharged by drainpipe 12, is then dried by silicon chip by rotating cylinder 3.
The technical characteristic described in detail is not had to be prior art in the application.Above-described embodiment is the principle of illustrative the application and effect thereof only, but not for limiting the application.Any person skilled in the art scholar all under the spirit and category of the application, can modify above-described embodiment or changes.Therefore, have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the application discloses, must be contained by the claim of the application.
Claims (5)
1. a silicon chip of solar cell cleaning device, it is characterized in that: comprise support, rinse bath, pertusate rotating cylinder is driven on surface, rinse bath is arranged on support, rotating cylinder is provided with in rinse bath, motor is provided with below rinse bath, motor output end connection rotating shaft, rotating shaft extends in rinse bath, rotating shaft is connected with rotating cylinder, some layers of filter are provided with in described rotating cylinder, temperature sensor is provided with in described rinse bath, heater, supersonic generator, controller is provided with outside rinse bath, temperature sensor, heater is connected with controller respectively, described rinse bath outer wall lower end is provided with outlet pipe, outlet pipe is connected with drainpipe, feed pipe is provided with between outlet pipe and drainpipe, the water side of feed pipe extends to above rinse bath, described outlet pipe is provided with the first valve, drainpipe is provided with the second valve, feed pipe is provided with water pump.
2. according to silicon chip of solar cell cleaning device according to claim 1, it is characterized in that: described heater is heating tube.
3. according to silicon chip of solar cell cleaning device according to claim 1, it is characterized in that: described motor is Anti-vibration motor.
4. according to silicon chip of solar cell cleaning device according to claim 1, it is characterized in that: described filter is connected with rotating cylinder inwall draw-in groove.
5. according to silicon chip of solar cell cleaning device according to claim 1, it is characterized in that: described first valve, the second valve are magnetic valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520584548.5U CN204953426U (en) | 2015-08-05 | 2015-08-05 | Washing device of solar battery silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520584548.5U CN204953426U (en) | 2015-08-05 | 2015-08-05 | Washing device of solar battery silicon wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204953426U true CN204953426U (en) | 2016-01-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520584548.5U Expired - Fee Related CN204953426U (en) | 2015-08-05 | 2015-08-05 | Washing device of solar battery silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204953426U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105855225A (en) * | 2016-06-12 | 2016-08-17 | 周末 | Novel environment-friendly ore cleaning equipment |
| CN106269305A (en) * | 2016-09-30 | 2017-01-04 | 四川大学华西第二医院 | A kind of chamber mirror apparatus dehydration device |
| CN108097649A (en) * | 2017-12-28 | 2018-06-01 | 南京康翱峰自动化科技有限公司 | Automobile absorber cleaning device |
| CN108339797A (en) * | 2017-12-28 | 2018-07-31 | 南京康翱峰自动化科技有限公司 | The cleaning device of microelectronics shell |
| CN110052443A (en) * | 2019-05-07 | 2019-07-26 | 芜湖远景塑胶制品有限公司 | A kind of air-conditioning face component handling implement |
| CN115193814A (en) * | 2022-02-22 | 2022-10-18 | 江苏亚电科技有限公司 | Multifunctional efficient wafer cleaning tank |
-
2015
- 2015-08-05 CN CN201520584548.5U patent/CN204953426U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105855225A (en) * | 2016-06-12 | 2016-08-17 | 周末 | Novel environment-friendly ore cleaning equipment |
| CN106269305A (en) * | 2016-09-30 | 2017-01-04 | 四川大学华西第二医院 | A kind of chamber mirror apparatus dehydration device |
| CN106269305B (en) * | 2016-09-30 | 2019-05-24 | 四川大学华西第二医院 | A kind of hysteroscope instrument dehydration device |
| CN108097649A (en) * | 2017-12-28 | 2018-06-01 | 南京康翱峰自动化科技有限公司 | Automobile absorber cleaning device |
| CN108339797A (en) * | 2017-12-28 | 2018-07-31 | 南京康翱峰自动化科技有限公司 | The cleaning device of microelectronics shell |
| CN110052443A (en) * | 2019-05-07 | 2019-07-26 | 芜湖远景塑胶制品有限公司 | A kind of air-conditioning face component handling implement |
| CN115193814A (en) * | 2022-02-22 | 2022-10-18 | 江苏亚电科技有限公司 | Multifunctional efficient wafer cleaning tank |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160113 Termination date: 20190805 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |