CN106944394A - A kind of silicon wafer turnover flusher - Google Patents

Abstract

The invention discloses a silicon wafer flipping flushing device, which comprises a flushing box, an air jet box and a hot air blower. A flushing box door is arranged on the flushing box, and a motor box is arranged on one side of the flushing box. The motor A control panel is installed on the outside of the box, a water outlet is provided at the bottom of the flushing box, one side of the water spray pipe is connected to the water pump, the other side of the water spray pipe is embedded in the flushing box, and the spray A number of nozzles are arranged on the other side of the water pipe, and a No. 1 rotating shaft is installed inside the flushing tank. The No. 1 rotating shaft and the No. 2 rotating shaft are connected by a transmission belt. The top of the flushing tank is equipped with A hot air blower, said hot air blower is connected with the jet box on the inside of the top of the flushing box through a pipeline. The silicon wafer turning and washing device is provided with two rotating shafts, and more silicon wafers can be installed, and the nozzles inside the cleaning box are evenly distributed, the cleaning effect is good, the working efficiency is high, and the water consumption is small.

Description

A silicon wafer flip flushing device

technical field

The invention relates to the field of mechanical technology, in particular to a silicon wafer flipping flushing device.

Background technique

With the development of large-scale integrated circuits, the integration level of integrated circuits continues to increase, and the line width continues to decrease. Integrated circuits have higher and higher requirements for the cleanliness, surface chemical state, and oxide film thickness of the silicon wafer surface. Silicon wafers in the production of semiconductor devices must be strictly cleaned, otherwise even a small amount of contamination can cause device failure.

The purpose of cleaning is to remove surface contamination impurities, including inorganic and organic matter. Some of these impurities exist in the atomic state or ion state, and some exist in the form of thin films or particles on the surface of the silicon wafer. Organic pollutants include photoresists, organic solvent residues, synthetic waxes, and grease or fibers from human contact with devices, tools, and utensils. Inorganic pollutants include heavy metals such as gold, copper, iron, and chromium, which seriously affect the lifetime of minority carriers and surface conductance; alkali metals and sodium can cause severe leakage. Particle pollution including silicon slag, dust, bacteria, microorganisms, organic colloidal fibers, etc. can cause various defects.

The existing silicon wafer rinsing device sprays water unevenly on the surface of the silicon wafer during the cleaning process, resulting in a large amount of liquid medicine residue on the surface of the silicon wafer, poor cleaning effect, low work efficiency, large water consumption, and needs to be taken out after cleaning Dry, waste of time.

Contents of the invention

The object of the present invention is to provide a device for flipping and rinsing silicon wafers to solve the problem of uneven spraying in the above background technology, resulting in a large amount of liquid medicine remaining on the surface of silicon wafers, poor cleaning effect, low work efficiency, and large water consumption. , and after cleaning, it needs to be taken out and dried, which is a waste of time.

In order to achieve the above object, the present invention provides the following technical solutions: a silicon wafer flip flushing device, including a flushing box, a flushing box door, a motor box, a control panel, a flushing box door lock, a motor, a transmission belt, a support frame, a water collection box, Water outlet, No. 2 rotating shaft, cleaning liquid tank, water suction pipe, water spray pipe, No. 1 rotating shaft, air jet box, hot air blower, nozzle and water pump, a flushing box door is arranged on the described flushing box, and a flushing box door is arranged on the flushing box. A motor box is arranged on the side, a control panel is installed on the outside of the motor box, a flushing box door lock is arranged on the flushing box door, a motor is installed in the motor box, and one side of the motor A No. 2 rotating shaft is provided, two supporting frames are installed at the bottom of the electric motor box, a water outlet is arranged at the bottom of the flushing box, a water collection box is arranged at the bottom of the water outlet, and the other of the flushing box is One side is provided with a cleaning liquid tank, the bottom of the cleaning liquid tank is equipped with two support frames, one side of the suction pipe is embedded in the cleaning liquid tank, the other side of the suction pipe is connected to the water pump, and the One side of the water spray pipe is connected to the water pump, the other side of the water spray pipe is embedded in the flushing box, and several nozzles are arranged on the other side of the water spray pipe, and the flushing box is also equipped with A No. 1 rotating shaft, the No. 1 rotating shaft and the No. 2 rotating shaft are connected by a transmission belt, and a hot air blower is installed on the top of the flushing tank, and the hot blower is connected with the jet box on the inside of the flushing tank top through a pipeline.

Preferably, the bottom of the flushing tank is a funnel-shaped structure.

Preferably, an observation window is provided on the cleaning liquid tank.

Preferably, clips are provided on the first rotating shaft and the second rotating shaft.

Preferably, the bottom of the air jet box is provided with several small ventilation holes.

Preferably, the water collection tank is a movable device with four universal wheels installed at the bottom.

Compared with the prior art, the beneficial effects of the present invention are: the silicon wafer flipping flushing device is provided with two rotating shafts, more silicon wafers can be installed, and the nozzles inside the cleaning box are more evenly distributed, the cleaning effect is better, and the working High efficiency, less water consumption, a hot air blower is installed on the top of the cleaning box, the hot air blower is connected to the air jet box inside the washing box, and there are several small holes on the air jet box, the air jet range is wider, and the drying effect is better. Convenient, more user-friendly design.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is a schematic diagram of the overhead structure of the flushing box of the present invention;

Fig. 3 is a schematic top view structure diagram of the air jet box of the present invention.

In the figure: flushing box-1; flushing box door-2; motor box-3; control panel-4; flushing box door lock-5; motor-6; transmission belt-7; support frame-8; Water outlet-10; No. 2 rotating shaft-11; Cleaning liquid tank-12; Suction pipe-13; Water spray pipe-14; No. 1 rotating shaft-15; 19.

detailed description

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Please refer to Figures 1-3, the present invention provides a technical solution: a silicon wafer flip flushing device, including a flushing box 1, a flushing box door 2, a motor box 3, a control panel 4, a flushing box door lock 5, and a motor 6 , transmission belt 7, support frame 8, water collection tank 9, water outlet 10, No. 2 rotating shaft 11, cleaning liquid tank 12, water suction pipe 13, water spray pipe 14, No. 1 rotating shaft 15, air jet box 16, hot air blower 17, nozzle 18 and the water pump 19, the flushing box 1 is provided with a flushing box door 2, one side of the flushing box 1 is provided with a motor box 3, a control panel 4 is installed on the outside of the motor box 3, and a flushing box door 2 is provided with a flushing Box door lock 5, a motor 6 is installed in the motor box 3, a No. Water outlet 10, the bottom of water outlet 10 is provided with a water collecting tank 9, and the other side of flushing tank 1 is provided with a cleaning liquid tank 12, and the bottom of cleaning liquid tank 12 is equipped with two support frames 8, and one of suction pipe 13 One side is embedded in the cleaning liquid tank 12, the other side of the water suction pipe 13 is connected with the water pump 19, one side of the water spray pipe 14 is connected with the water pump 19, and the other side of the water spray pipe 14 is embedded in the flushing tank 1, and the water spray Several nozzles 18 are arranged on the other side of the pipe 14, and a No. 1 rotating shaft 15 is also installed inside the flushing box 1. The No. 1 rotating shaft 15 and the No. 2 rotating shaft 11 are connected by transmission belt 7. The top of the flushing box 1 is installed There is a hot air blower 17, and the hot air blower 17 is connected with the jet box 16 on the inside of the flushing box 1 top by pipeline.

In the above embodiment, specifically, the bottom of the flushing tank 1 is a funnel-shaped structure, which is convenient for water to flow downward;

In the above embodiment, specifically, an observation window is provided on the cleaning liquid tank 12, which is convenient for observing the residual amount of internal cleaning liquid and adding cleaning liquid in time;

In the above embodiment, specifically, the No. 1 rotating shaft 15 and the No. 2 rotating shaft 11 are provided with clips, which can clamp the silicon wafer and are easy to use;

In the above-mentioned embodiment, specifically, the bottom of the jet box 16 is provided with several air-ventilating holes, the jet pressure is increased, and the jet range is wider;

In the above embodiment, specifically, the water collecting tank 9 is a movable device, and four universal wheels are installed at the bottom, which is convenient for moving and cleaning the used cleaning solution in the water collecting tank 9 .

Working principle: when using, first open the washing box door 2, fix the silicon wafer to be washed on the first rotating shaft 15 and the second rotating shaft 11 with clips, close the washing box door 2, connect the external power supply, and use the control panel 4 to control the motor 6 and water pump 19 start running, and motor 6 directly drives No. 2 rotating shaft 11 to rotate, and No. 2 rotating shaft 11 drives No. 1 rotating shaft 15 to rotate through transmission belt 7, and water pump 19 delivers the cleaning liquid in cleaning liquid tank 12 to spray pipe 14, and Spray from the nozzle 18 on the water spray pipe 14 to the silicon wafers on the first rotating shaft 15 and the second rotating shaft 11 to achieve the purpose of cleaning. The falling cleaning liquid flows into the water collection tank 9 from the water outlet 10. After the cleaning is completed, use the control panel 4 Control the operation of the hot air blower 17, and the hot air blows to the silicon chip from the small hole at the bottom of the jet box 16 to dry the silicon chip. After drying, the silicon chip can be taken out to complete a series of operation processes.

In summary, although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or modify some of the technical features. Equivalent replacement, within the spirit and principles of the present invention, any modification, equivalent replacement, improvement, etc., shall be included in the protection scope of the present invention.

Claims (6)

1. A silicon wafer flipping flushing device, including a flushing box (1), a flushing box door (2), a motor box (3), a control panel (4), a flushing box door lock (5), a motor (6), Drive belt (7), support frame (8), water collection tank (9), water outlet (10), second rotating shaft (11), cleaning fluid tank (12), water suction pipe (13), water spray pipe (14), No. 1 rotating shaft (15), jet box (16), hot air blower (17), nozzle (18) and water pump (19), characterized in that: the flushing box (1) is provided with a flushing box door (2) , one side of the flushing box (1) is provided with a motor box (3), the outer side of the motor box (3) is installed with a control panel (4), the flushing box door (2) is provided with a Washing box door lock (5), a motor (6) is installed in the motor box (3), a No. 2 rotating shaft (11) is arranged on one side of the motor (6), and the motor box (3 ) is equipped with two support frames (8), the bottom of the flushing box (1) is provided with a water outlet (10), and the bottom of the water outlet (10) is provided with a water collection box (9), so A cleaning solution tank (12) is provided on the other side of the flushing tank (1), and two support frames (8) are installed on the bottom of the cleaning solution tank (12), and one side of the suction pipe (13) Embedded inside the cleaning liquid tank (12), the other side of the water pumping pipe (13) is connected to the water pump (19), one side of the water spray pipe (14) is connected to the water pump (19), and the water spray pipe The other side of (14) is embedded into the inside of the flushing box (1), and several nozzles (18) are arranged on the other side of the water spray pipe (14), and the inside of the flushing box (1) is also installed with A No. 1 rotating shaft (15), the No. 1 rotating shaft (15) and the No. 2 rotating shaft (11) are connected through a transmission belt (7), and a hot air blower (17) is installed on the top of the flushing box (1), so The hot air blower (17) is connected with the jet box (16) on the inside of the top of the flushing box (1) through a pipeline. 2. The silicon wafer inversion flushing device according to claim 1, characterized in that: the bottom of the flushing box (1) is a funnel-shaped structure. 3. The silicon wafer inversion washing device according to claim 1, characterized in that: the cleaning solution tank (12) is provided with an observation window. 4. The silicon wafer inversion washing device according to claim 1, characterized in that: the first rotating shaft (15) and the second rotating shaft (11) are provided with clips. 5. The silicon wafer inversion washing device according to claim 1, characterized in that: the bottom of the air jet box (16) is provided with several air-ventilating holes. 6. A silicon wafer flipping flushing device according to claim 1, characterized in that: the water collecting tank (9) is a movable device, and four universal wheels are installed at the bottom.