CN107511359A - Environment-friendly type silicon chip cleaning device - Google Patents
Environment-friendly type silicon chip cleaning device Download PDFInfo
- Publication number
- CN107511359A CN107511359A CN201710907782.0A CN201710907782A CN107511359A CN 107511359 A CN107511359 A CN 107511359A CN 201710907782 A CN201710907782 A CN 201710907782A CN 107511359 A CN107511359 A CN 107511359A
- Authority
- CN
- China
- Prior art keywords
- rinse bath
- silicon chip
- rotating cylinder
- motor
- environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 36
- 239000010703 silicon Substances 0.000 title claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 abstract description 6
- 238000010981 drying operation Methods 0.000 abstract description 2
- 238000011109 contamination Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- -1 sodium etc. Chemical class 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/007—Heating the liquid
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention relates to a kind of environment-friendly type silicon chip cleaning device,Including support,Rinse bath,Surface is provided with the rotating cylinder of hole,Rinse bath is arranged on support,Rotating cylinder is provided with rinse bath,Motor is provided with below rinse bath,Motor output end connection rotating shaft,Rotating shaft is extended in rinse bath,Rotating shaft is connected with rotating cylinder,The rotating cylinder inwall is provided with several silicon chip storing units,The rinse bath upper end is provided with water inlet pipe,Temperature sensor is provided with rinse bath,Heater,Supersonic generator,Controller is provided with the outside of rinse bath,Temperature sensor,Heater is connected with controller respectively,The bottom of rinse bath connects outlet pipe,Outlet pipe lower end connects purifier,Purifier lower end connects drainpipe,Electro-motor is provided with the outside of silicon chip storing unit,Bristle is provided with silicon chip storing unit,It is bad that the present invention solves cleaning device cleaning performance,Spin-drying operation is inconvenient after cleaning and the problem of cleaning fluid direct exhaust emission environment.
Description
Technical field
The present invention relates to a kind of cleaning device, more particularly to a kind of environment-friendly type silicon chip cleaning device.
Background technology
With the development of science and technology, the application of silicon chip is more and more wider, and application is obtained in various fields.
Silicon chip must be through strict cleaning in semiconductor devices production.Micropollution also results in component failure.The purpose of cleaning
It is to remove surface contamination impurity, including organic matter and inorganic matter.These impurity some have with state of atom or ionic condition
In the form of a film or particle form is present in silicon chip surface.Organic contamination include photoresist, organic solvent residual thing, synthetic wax and
People contacts the grease or fiber that device, instrument, vessel are brought.Inorganic pollution includes heavy metal gold, copper, iron, chromium etc., has a strong impact on
Minority carrier lifetime and surface conductance；Alkali metal such as sodium etc., causes serious drain；Particle contamination includes white residue, dust, thin
Bacterium, microorganism, organic colloid fiber etc., can cause various defects.The method for removing pollution has physical cleaning and Chemical cleaning two
Kind.
Need to use cleaning device during Wafer Cleaning, but in general cleaning device cleaning performance is poor, Wafer Cleaning
Also to take out and be dried afterwards, be operated cumbersome, and the cleaning fluid after cleaning often directly discharges, and pollutes environment.
The content of the invention
It is an object of the invention to provide a kind of environment-friendly type silicon chip cleaning device, the environment-friendly type silicon chip cleaning device solves clearly
Cleaning device cleaning performance is bad, spin-drying operation is inconvenient after cleaning and the problem of cleaning fluid direct exhaust emission environment.
In order to realize foregoing invention purpose, environment-friendly type silicon chip cleaning device of the invention is opened including support, rinse bath, surface
The rotating cylinder of hole, rinse bath are arranged on support, and rotating cylinder is provided with rinse bath, and motor, motor output are provided with below rinse bath
Connection rotating shaft is held, rotating shaft is extended in rinse bath, and rotating shaft is connected with rotating cylinder, and the rotating cylinder inwall is deposited provided with several silicon chips
Device, the rinse bath upper end are provided with water inlet pipe, are provided with temperature sensor, heater, supersonic generator in rinse bath, clearly
Controller is provided with the outside of washing trough, temperature sensor, heater are connected with controller respectively, and the bottom of rinse bath connects water outlet
Pipe, outlet pipe lower end connection purifier, purifier lower end connection drainpipe, silicon chip storing unit outside is provided with electronic horse
Reach, bristle is provided with silicon chip storing unit.
The heater is heating tube.
The motor is clockwise and anticlockwise motor.
The purifier from top to bottom includes filter layer, decomposition layer, stenlizing layer successively.
Using this environment-friendly type silicon chip cleaning device, there is advantages below：
1st, due to being provided with rotating cylinder in rinse bath, motor, motor output end connection rotating shaft are provided with below rinse bath, rotating shaft extends to clearly
In washing trough, rotating shaft is connected with rotating cylinder, so in Wafer Cleaning, can improve cleaning performance, and after having cleaned, can be utilized
Rotating cylinder is dried, and is operated very convenient；
2nd, due to being provided with temperature sensor, heater in rinse bath, temperature sensor, heater connect with controller respectively
Connect, when the rinse liquid temperature in rinse bath is higher or lower than range of set value, whether worked by controller control heater,
This ensures that cleaning fluid remains at optimum cleaning temperature, cleaning performance is improved；And ultrasonic wave is used
Generator, further increase cleaning performance；
3rd, because bottom of rinse bath connects outlet pipe, outlet pipe lower end connection purifier, purifier lower end connects drainpipe,
Can so purified treatment be carried out to used cleaning fluid, avoid direct exhaust emission environment, and can be with after purified treatment two
Secondary utilization.
4th, due to being provided with electro-motor on the outside of silicon chip storing unit, bristle is provided with silicon chip storing unit, can so be entered
One step improves cleaning performance.
Brief description of the drawings
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description.
Fig. 1 is the structural representation of environment-friendly type silicon chip cleaning device of the present invention.
Wherein have：1. support；2. rinse bath；3. rotating cylinder；4. motor；5. rotating shaft；6. silicon chip storing unit；7.
Water inlet pipe；8. supersonic generator；9. temperature sensor；10. heater；11. controller；12. outlet pipe；13.
Purifier；13.1. filter layer；13.2. decomposition layer；13.3. stenlizing layer；14. drainpipe；15. bristle；It is 16. electronic
Motor.
Embodiment
Environment-friendly type silicon chip cleaning device shown in Fig. 1, including support, rinse bath, surface are provided with the rotating cylinder of hole, and rinse bath is set
Put on support, rotating cylinder is provided with rinse bath, is provided with motor, motor output end connection rotating shaft below rinse bath, rotating shaft extends to
In rinse bath, rotating shaft is connected with rotating cylinder, and the rotating cylinder inwall is provided with several silicon chip storing units, and the rinse bath upper end is set
There is water inlet pipe, temperature sensor, heater, supersonic generator are provided with rinse bath, controller is provided with the outside of rinse bath, temperature
Degree sensor, heater are connected with controller respectively, and the bottom of rinse bath connects outlet pipe, the connection purification of outlet pipe lower end
Device, purifier lower end connection drainpipe, silicon chip storing unit outside are provided with electro-motor, brush are provided with silicon chip storing unit
Hair.
The heater is heating tube.
The motor is clockwise and anticlockwise motor.
The purifier from top to bottom includes filter layer, decomposition layer, stenlizing layer successively.
When needing cleaning, silicon chip is placed in the silicon chip storing unit in rotating cylinder, then starts motor, turn rotating cylinder
Dynamic, when rinse liquid temperature is above or below design temperature, temperature signal is transmitted to controller by temperature sensor, by controller control
Whether system starts or closes heater, cleaning fluid is remained at optimum temperature；After Wafer Cleaning is complete, cleaning
Liquid entered by outlet pipe in purifier filtered, decomposed, sterilization processing, then discharged by drainpipe, then silicon
Piece is dried by rotating cylinder.Due to being provided with electro-motor on the outside of silicon chip storing unit, bristle is provided with silicon chip storing unit, so may be used
Further to improve cleaning performance.
The technical characteristic for not having to describe in detail in the application is prior art.Above-described embodiment only illustrative the application
Principle and its effect, not for limitation the application.Any person skilled in the art all can be in the essence without prejudice to the application
God and under the scope of, to above-described embodiment carry out modifications and changes.Therefore, those of ordinary skill in the art is not taking off
, should be by the right of the application from spirit disclosed herein and all equivalent modifications completed under technological thought or change
It is required that covered.
Claims (4)
- A kind of 1. environment-friendly type silicon chip cleaning device, it is characterised in that：The rotating cylinder of hole is provided with including support, rinse bath, surface, clearly Washing trough is arranged on support, and rotating cylinder is provided with rinse bath, motor, motor output end connection rotating shaft, rotating shaft are provided with below rinse bath Extend in rinse bath, rotating shaft is connected with rotating cylinder, and the rotating cylinder inwall is provided with several silicon chip storing units, the rinse bath Upper end is provided with water inlet pipe, and temperature sensor, heater, supersonic generator are provided with rinse bath, control is provided with the outside of rinse bath Device processed, temperature sensor, heater are connected with controller respectively, and the bottom of rinse bath connects outlet pipe, outlet pipe lower end Purifier is connected, purifier lower end connection drainpipe, silicon chip storing unit outside is provided with electro-motor, silicon chip storing unit It is interior to be provided with bristle.
- 2. according to the environment-friendly type silicon chip cleaning device described in claim 1, it is characterised in that：The heater is heating tube.
- 3. according to the environment-friendly type silicon chip cleaning device described in claim 1, it is characterised in that：The motor is clockwise and anticlockwise motor.
- 4. according to the environment-friendly type silicon chip cleaning device described in claim 1, it is characterised in that：The purifier from top to bottom according to It is secondary including filter layer, decomposition layer, stenlizing layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710907782.0A CN107511359A (en) | 2017-09-29 | 2017-09-29 | Environment-friendly type silicon chip cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710907782.0A CN107511359A (en) | 2017-09-29 | 2017-09-29 | Environment-friendly type silicon chip cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107511359A true CN107511359A (en) | 2017-12-26 |
Family
ID=60725537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710907782.0A Pending CN107511359A (en) | 2017-09-29 | 2017-09-29 | Environment-friendly type silicon chip cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107511359A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108339797A (en) * | 2017-12-28 | 2018-07-31 | 南京康翱峰自动化科技有限公司 | The cleaning device of microelectronics shell |
| CN109396093A (en) * | 2018-10-25 | 2019-03-01 | 徐海艳 | A kind of cleaning and sterilizing slot device for Endoscope room |
| CN109900877A (en) * | 2019-03-18 | 2019-06-18 | 浙江水利水电学院 | Water quality detection wireless sensing and display node |
| CN110715523A (en) * | 2019-10-16 | 2020-01-21 | 戴林涛 | Lens spin-drying device |
| CN112775137A (en) * | 2020-12-22 | 2021-05-11 | 内蒙古东岳金峰氟化工有限公司 | Multichannel alkali washing circulation tank |
-
2017
- 2017-09-29 CN CN201710907782.0A patent/CN107511359A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108339797A (en) * | 2017-12-28 | 2018-07-31 | 南京康翱峰自动化科技有限公司 | The cleaning device of microelectronics shell |
| CN109396093A (en) * | 2018-10-25 | 2019-03-01 | 徐海艳 | A kind of cleaning and sterilizing slot device for Endoscope room |
| CN109900877A (en) * | 2019-03-18 | 2019-06-18 | 浙江水利水电学院 | Water quality detection wireless sensing and display node |
| CN110715523A (en) * | 2019-10-16 | 2020-01-21 | 戴林涛 | Lens spin-drying device |
| CN112775137A (en) * | 2020-12-22 | 2021-05-11 | 内蒙古东岳金峰氟化工有限公司 | Multichannel alkali washing circulation tank |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171226 |