CN203002685U - Cleaning device for electronic component - Google Patents

Cleaning device for electronic component Download PDF

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Publication number
CN203002685U
CN203002685U CN 201320005241 CN201320005241U CN203002685U CN 203002685 U CN203002685 U CN 203002685U CN 201320005241 CN201320005241 CN 201320005241 CN 201320005241 U CN201320005241 U CN 201320005241U CN 203002685 U CN203002685 U CN 203002685U
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CN
China
Prior art keywords
riser
descaling bath
cylinder
cleaning device
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201320005241
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Chinese (zh)
Inventor
马玉水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Liansheng Electronic Equipment Co., Ltd.
Original Assignee
Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd filed Critical Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd
Priority to CN 201320005241 priority Critical patent/CN203002685U/en
Application granted granted Critical
Publication of CN203002685U publication Critical patent/CN203002685U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a cleaning device for an electronic component. The cleaning device is provided with a single-row and two-station drum-type cleaning device, wherein a vertical plate rotates around a rotating shaft under the action of a cylinder, and a rotating drum can sink into a cleaning solution or be away from the cleaning solution; and the rotating drum rotates under the driving of acceleration and deceleration motors, so that the electronic component in the rotating drum is uniformly stirred to achieve the purpose of cleaning. The electronic component can be uniformly cleaned by using a concrete mixer type rotating drum design. In order to improve the cleaning effect, an ultrasonic generation device, a heating device and a cooling device are further additionally arranged in the cleaning device, the temperature variation is fed back to a programmable logic controller in time by a temperature controller, the programmable logic controller controls the heating device and the cooling device to adjust working liquid; and tiny particles are removed through ultrasonic resonance.

Description

A kind of electronic devices and components cleaning device
Technical field
The utility model relates to the cleaning device of electronic devices and components.
Background technology
Electronic devices and components are general names of element and device.Electronic component: refer to add in plant produced the finished product that do not change minute subconstiuent man-hour, as resistor, capacitor, inductor.Because itself does not produce electronics, it to voltage, electric current without controlling and change action, so claim again passive device.Electronic device: refer to add in plant produced the finished product that has changed molecular structure man-hour, for example transistor, electron tube, integrated circuit.Electronic devices and components are in the process of welding, and usually there are oxide layer and metal ion in the surface, need with first cleaning to remove its surperficial oxide layer and metal ion with acid solution, thereby and then carry out water rinse and reach the purpose that cleans up.The electronic devices and components cleaning device that uses at present, its structure mainly comprises: frame is placed with the electronic devices and components tooling basket in rinse bath.The electronic devices and components tooling basket is that a kind of shape of hollow out is as the frock of basket, during cleaning, the workman holds into electronic devices and components in the electronic devices and components tooling basket, the electronic devices and components tooling basket is put in the acid solution in rinse bath, acid solution enters the electronic devices and components tooling basket and the electronic devices and components in basket is cleaned again.Electronic devices and components are deposited in the electronic devices and components tooling basket, due to the electronic devices and components out-of-shape, the electronic devices and components on electronic devices and components heaps top layer with can be cleaned totally after acid solution fully contacts, and the inner electronic devices and components of electronic devices and components heap can't fully contact with acid solution, therefore can't once clean up.Above-mentioned cleaning device, cleaning performance is poor, and cleans and to waste time and energy, and human body directly contacts with acid solution, and acid solution can be corroded skin, and operational danger is higher.
The utility model content
The technical problem of the required solution of the utility model is: a kind of cleaning device of electronic devices and components will be provided, can realize that electronic devices and components effectively clean, and avoid human body directly to contact with acid solution.
The technical solution adopted in the utility model is:
A kind of electronic devices and components cleaning device, comprise support body, it is characterized in that: the height apart from ground 0.75-0.9m on support body is provided with door, the rear lower portion of door is provided with descaling bath, rinsing bowl side by side, be equipped with cleaning device on descaling bath and rinsing bowl, rear side at descaling bath and rinsing bowl is provided with two side draught wind apparatus apart from descaling bath, rinsing bowl end face 0.2-0.5m At The Height, and the exhaust outlet of side draught wind apparatus is located at the rear of support body; Described descaling bath, rinsing bowl are equipped with input duct and Drainage pipe.Apart from ground 0.75-0.9m, the handled easily person is not in the situation that bend over due to descaling bath, rinsing bowl, the loading and unloading cylinder.Treating method to acid mist in prior art is the top air draught, but acid mist easily expands in uphill process, can leak into the outside from door, the utility model adopts the side draught wind apparatus closely to absorb acid mist, apart from descaling bath, rinsing bowl 0.2-0.5m, can process with regard to inhaling from the side mist when acid mist just produces, avoid cross-ventilation that acid mist is gushed from door.Further can also install the top air intake device at the top, sop up remaining acid mist.
Described cleaning device comprises: rotating shaft is hinged on the sidewall top of descaling bath or rinsing bowl; Riser, vertical establishing, be connected with rotating shaft on the center line of its horizontal direction in vertical direction; Transverse slat is connected to the riser top, and transverse slat is vertical with riser; Swash plate is connected to the riser bottom, and the angle of 120-135 degree is arranged between swash plate and riser; Transmission device comprises a pair of intermeshing umbrella gear that is arranged on respectively on riser and swash plate, on the umbrella gear of swash plate, rotating disk is installed; Cylinder is movably connected on rotating disk, and the axis of cylinder is positioned at the axis of rotating disk and vertical with plane, rotating disk place, and the sidewall of cylinder is provided with aperture, and the cross section of cylinder is regular polygon; Rotate feedway, comprise the acceleration and deceleration motor that is arranged on transverse slat, be connected with driving gear on the output shaft of acceleration and deceleration motor, driving gear is connected with umbrella gear on riser by some driven gears; Lowering or hoisting gear comprises the cylinder that is arranged on support body bottom, the output shaft of cylinder and lagging hinge, and the motion of the output shaft by cylinder realizes that riser rotates along rotating shaft.The utility model forms a cylinder turning device by riser, transverse slat, swash plate, rotating shaft, the angle that the 120-135 degree is arranged between swash plate and riser, when riser is positioned at the upright position, this moment, cylinder entered descaling bath or rinsing bowl, the angle of cylinder and horizontal plane is 30-45 degree angle, this moment, lower floor's electronic devices and components can rise to the upper strata in the situation that cylinder rotates with inhomogeneous speed.The gradient of 30-45 degree can remain in the situation of cylinder rotation, and due to the existence of centripetal force, the electronic devices and components of cylinder bottom can circulate up and down along the cylinder limit.The gradient too greatly, too littlely all can not reach good effect.When adopting drum cleaning, be similar to the principle of on-vehicle concrete mixer.Because the cylinder cross section is regular polygon, when rotating, more easily stir electronic devices and components.Cylinder is provided with aperture, and hole diameter is 3 – 5mm, can guarantee in the cylinder rotation situation, the cleaning fluid in cylinder to be thrown away, and increases the efficient of cleaning.
Further, described rotating disk is provided with fixture block, and described fixture block is around the center of circle annular array of rotating disk, fixture block and the clamping of cylinder phase.Cylinder is connected with rotating disk by fixture block, and loading and unloading cylinder ratio is easier to.
Further, the described cleaning device that is positioned on descaling bath also comprises retention device, described retention device comprises barrier plate, barrier door, dividing plate, described barrier door is positioned at the top of rotating shaft, dividing plate is positioned at top and the outside of barrier door, the size of barrier plate is identical with the above part of riser rotating shaft, and the size of barrier plate is greater than the size of barrier door; The angle that the 30-45 degree is arranged between barrier plate and riser, when riser is positioned at vertical direction, the above part of the rotating shaft of riser seals barrier door, this moment, dividing plate was with the acid solution isolation of part beyond the cleaning device rotating shaft on descaling bath with the descaling bath volatilization, when lowering or hoisting gear driving riser rotates to the angle of above-mentioned angle along rotating shaft, barrier plate sealing barrier door, this moment, dividing plate was with the acid solution isolation of part beyond the cleaning device rotating shaft on descaling bath with the descaling bath volatilization.
Further, be provided with connecting rod between the above part of the rotating shaft of barrier plate and riser.Connecting rod is set, can keeps better stopping that version and the above part of the rotating shaft of riser keep fixing angle.
Further, also be provided with control device on support body, described control device is programmable logic controller (PLC), and control device is connected with the electrical system of the cylinder of the acceleration and deceleration motor that rotates feedway, lowering or hoisting gear.By control device, can improve the automatization level of equipment.
Further, be provided with electric heater unit, cooling device, ultrasonic generator in described descaling bath; Described electric heater unit is Teflon heater, is arranged on bottom descaling bath, and Teflon heater is by Resistant heating or electrothermal tube heating; Described cooling device is coldplate, is arranged on the sidewall of descaling bath sidepiece, is provided with the snake pipe for the cooling fluid circulation in coldplate, and coldplate is connected with cooling liquid bath by delivery pump; Described ultrasonic generator is the signal sound wave producer, is arranged on support body, is provided with the ultrasonic vibration box with ultrasonic transducer in descaling bath; Also be provided with sensor for measuring temperature in described descaling bath; Sensor for measuring temperature, electric heater unit, cooling device, ultrasonic generator all are connected with control device.Electric heater unit, cooling device, ultrasonic unit are set, can improve the efficient of cleaning.
Further, described rinsing bowl bottom is provided with the hand-hole for nitrogen injection, also is provided with spray equipment on rinsing bowl, and spray equipment is connected bottom rinsing bowl by pipeline, water pump.After being charged into nitrogen, stroke nitrogen bubble in rinsing bowl, improve cleaning quality again.Spray equipment helps under certain hydraulic pressure, cleans the remaining dirt in electronic devices and components surface.
The beneficial effects of the utility model: the electronic devices and components cylinder will be housed be arranged on rotating disk, driven by rotary disc cylinder and electronic devices and components wherein rotate together, electronic devices and components are fully contacted with acid solution or water, thereby electronic devices and components are cleaned up, greatly improved the efficient that electronic devices and components clean; The operator only need utilize the liter of lowering or hoisting gear or fall, just the electronic devices and components in the cylinder that is arranged on rotating disk can be put into or break away from rinse bath, has avoided contacting of human body and acid solution, has greatly improved the security of operation.
Description of drawings
Fig. 1 is the structural representation of the cylinder turning device of the utility model electronic devices and components cleaning device.
Fig. 2 is the syndeton schematic diagram of cylinder and rotating disk.
Fig. 3 is the structural representation of the utility model electronic devices and components cleaning device when cylinder is put into descaling bath or rinsing bowl.
Fig. 4 is the profile of Fig. 2 A-A ' direction.
Wherein: the 1-transverse slat; The 2-rotating shaft; The 3-riser; 4-umbrella gear two; The 5-swash plate; The 6-barrier plate; 7-umbrella gear one; The 8-cylinder; 9-acceleration and deceleration motor; The 10-door; The 11-descaling bath; The 12-rinsing bowl; 13-side draught wind apparatus; The 14-exhaust outlet; The 15-cylinder; The 16-output shaft; The 17-rotating disk; The 18-fixture block; The 19-barrier plate; The 20-barrier door; The 21-dividing plate; The 22-connecting rod; The 23-control device; The cooling liquid bath of 24-; 25-top air intake device; The 26-electric heater unit; The 27-cooling device; The 28-ultrasonic generator; The 29-delivery pump; The 30-hand-hole; The 31-input duct; The 32-Drainage pipe; The 33-support body.
The specific embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
As Fig. 1~shown in Figure 4, the electronic devices and components cleaning device, comprise support body 33, height apart from ground 1.2m on support body 33 is provided with door 10, the rear lower portion of door 10 is provided with descaling bath 11, rinsing bowl 12 side by side, be equipped with cleaning device on descaling bath 11 and rinsing bowl 12, be provided with two side draught wind apparatus 13 at the rear side of descaling bath 11 and rinsing bowl 12 apart from descaling bath 11, rinsing bowl 12 end face 0.3m At The Heights, the exhaust outlet 14 of side draught wind apparatus 13 is located at the rear of support body 33; Described descaling bath 11, rinsing bowl 12 are equipped with input duct 31 and Drainage pipe 32.Described door 10 be PVC dodge gate (type of push and pull up down), guarantees that the device external environment meets the relevant criterion of labour protection, with assurance equipment operator and staff's safety on every side thereof.
Described cleaning device comprises: rotating shaft 2 is hinged on the sidewall top of descaling bath 11 or rinsing bowl 12; Riser 3, vertical establishing, be connected with rotating shaft 2 on the center line of its horizontal direction in vertical direction; Transverse slat 1 is connected to riser 3 tops, and transverse slat 1 is vertical with riser 3; Swash plate 5 is connected to riser 3 bottoms, and the angles of 120 degree are arranged between swash plate 5 and riser 3; Transmission device comprises a pair of intermeshing umbrella gear 1, the umbrella gear 24 that are arranged on respectively on riser 3 and swash plate 5, on the umbrella gear 24 of swash plate 5, rotating disk is installed; Cylinder 8 is connected on rotating disk 17, and the axis of cylinder 8 is positioned at the axis of rotating disk 17 and vertical with rotating disk 17 planes, place, and the sidewall of cylinder 8 is provided with aperture, cylinder 8 mouthful less than the body of cylinder, and its cross section is octagon; Rotate feedway, comprise the acceleration and deceleration motor 9 that is arranged on transverse slat 1, be connected with driving gear on the output shaft of acceleration and deceleration motor 9, driving gear is connected by the turning cylinder of the umbrella gear 1 on some driven gears and riser 3; Lowering or hoisting gear comprises the cylinder 15 that is arranged on support body bottom, and the output shaft 16 of cylinder 15 is hinged with transverse slat 1, and the motion of the output shaft 16 by cylinder 15 realizes that riser 1 is along rotating shaft 2 rotations.Acceleration and deceleration motor and umbrella gear one 7 connected modes also can adopt other structure, and for example the output wheel of acceleration and deceleration motor is connected by the turning cylinder of chain with umbrella gear 1, comes transmission by chain.
Cylinder 8 with the snap fit of rotating disk 17 is: rotating disk is provided with fixture block 18, and described fixture block 18 has eight around the center of circle annular array of rotating disk, manually cylinder 8 is filled in fixture block 18, namely completes clamping.The aperture efficiency cylinder body of cylinder is little.
The described cleaning device that is positioned on descaling bath also comprises retention device, described retention device comprises barrier plate 19, barrier door 20, dividing plate 21, described barrier door 20 is positioned at the top of rotating shaft 2, dividing plate 21 is positioned at top and the outside of barrier door, the size of barrier plate 19 is identical with the above part of the rotating shaft of riser, and the size of barrier plate 19 is greater than the size of barrier door 20; Be provided with angle between barrier plate 19 and riser 3, when riser 3 is positioned at vertical direction, the above part of the rotating shaft of riser 3 seals barrier door 20, this moment, dividing plate 21 was with the acid solution isolation of part beyond the cleaning device rotating shaft on descaling bath 11 with descaling bath 11 volatilizations, when lowering or hoisting gear driving riser 3 rotates to the angle of above-mentioned angle along rotating shaft 2, barrier plate 19 sealing barrier doors 20, this moment, dividing plate 21 was with the acid solution isolation of part beyond the rotating shaft 2 of the cleaning device on descaling bath 11 with descaling bath 11 volatilizations.The rotating shaft of barrier plate 19 and riser 3 is provided with connecting rod 22 between part more than 2; Angle between barrier plate 19 and riser 3 is the 30-45 degree, can guarantee when barrier plate sealing barrier door, and the perpendicular to the ground and cylinder mouth of cylinder exceeds liquid level.
Support body is provided with control device 23, and described control device is programmable logic controller (PLC) (PLC), and control device is connected with the electrical system of the cylinder of the acceleration and deceleration motor that rotates feedway, lowering or hoisting gear.
Be provided with electric heater unit 26, cooling device 27, ultrasonic generator 28 in descaling bath 11; Described electric heater unit 26 is Teflon heater, is arranged on descaling bath 11 bottoms, and Teflon heater is by Resistant heating or electrothermal tube heating; Described cooling device 27 is coldplate, is arranged on the sidewall of descaling bath 11, is provided with the snake pipe for the cooling fluid circulation in coldplate 11; Coldplate is connected with cooling liquid bath 24 by delivery pump 29; Cooling liquid bath is arranged on support body 33 bottoms; Described ultrasonic generator 28 is the signal sound wave producer, is arranged on support body, is provided with the ultrasonic vibration box with ultrasonic transducer in descaling bath; Also be provided with sensor for measuring temperature in described descaling bath 11, sensor for measuring temperature, electric heater unit 26, cooling device 27, ultrasonic generator 28 all are connected with control device 23.
Rinsing bowl 12 bottoms are provided with the hand-hole 30 for nitrogen injection, also are provided with spray equipment on rinsing bowl 12, and spray equipment is connected bottom rinsing bowl by pipeline, water pump.
The utility model electronic devices and components cleaning device adopts single two station drum-type designs, adopts the cylinder design of concrete mixer truck formula more can allow workpiece cleaning more even, cleans more thorough.Under the effect of cylinder, riser rotates around rotating shaft, can realize that cylinder sinks to cleaning fluid or leaves cleaning fluid.For increasing cleaning performance, this device has further increased ultrasonic generator, heater, cooling device.According to process requirements, the heat of this groove and refrigerating function, temperature-controlled precision are ± 0.5 ℃.Be equipped with the Omron temperature controller, in time feedback temperature changes to programmable logic controller (PLC) (PLC), and programmable logic controller (PLC) (PLC) control heater and refrigeration plant adjust hydraulic fluid.Be equipped with simultaneously the 28KHZ ultrasonic wave, remove more small particle by hyperacoustic resonance.Rolling makes the product corrosion in cylinder even.

Claims (7)

1. electronic devices and components cleaning device, comprise support body, it is characterized in that: the height apart from ground 0.75-0.95m on support body is provided with door, the rear of door is provided with descaling bath, rinsing bowl side by side, be equipped with cleaning device on descaling bath and rinsing bowl, rear side at descaling bath and rinsing bowl is provided with two side draught wind apparatus apart from descaling bath, rinsing bowl end face 0.2-0.5m At The Height, and the exhaust outlet of side draught wind apparatus is located at the rear of support body; Described descaling bath, rinsing bowl are equipped with input duct and Drainage pipe;
Described cleaning device comprises: rotating shaft is hinged on the sidewall top of descaling bath or rinsing bowl; Riser, vertical establishing, be connected with rotating shaft on the center line of its horizontal direction in vertical direction; Transverse slat is connected to the riser top, and transverse slat is vertical with riser; Swash plate is connected to the riser bottom, and the angle of 120-135 degree is arranged between swash plate and riser; Transmission device comprises a pair of intermeshing umbrella gear that is arranged on respectively on riser and swash plate, on the umbrella gear of swash plate, rotating disk is installed; Cylinder is movably connected on rotating disk, and the axis of cylinder is positioned at the axis of rotating disk and vertical with plane, rotating disk place, and the sidewall of cylinder is provided with aperture, and the cross section of cylinder is regular polygon; Rotate feedway, comprise the acceleration and deceleration motor that is arranged on transverse slat, be connected with driving gear on the output shaft of acceleration and deceleration motor, driving gear is connected with umbrella gear on riser by some driven gears; Lowering or hoisting gear comprises the cylinder that is arranged on support body bottom, the output shaft of cylinder and lagging hinge, and the motion of the output shaft by cylinder realizes that riser rotates along rotating shaft.
2. a kind of electronic devices and components cleaning device as claimed in claim 1, it is characterized in that: described rotating disk is provided with fixture block, and described fixture block is around the center of circle annular array of rotating disk, fixture block and the clamping of cylinder phase.
3. a kind of electronic devices and components cleaning device as claimed in claim 1, it is characterized in that: the described cleaning device that is positioned on descaling bath also comprises retention device, described retention device comprises barrier plate, barrier door, dividing plate, described barrier door is positioned at the top of rotating shaft, dividing plate is positioned at top and the outside of barrier door, the size of barrier plate is identical with the above part of riser rotating shaft, and the size of barrier plate is greater than the size of barrier door; The angle that the 30-45 degree is arranged between barrier plate and riser, when riser is positioned at vertical direction, the above part of the rotating shaft of riser seals barrier door, this moment, dividing plate was with the acid solution isolation of part beyond the cleaning device rotating shaft on descaling bath with the descaling bath volatilization, when lowering or hoisting gear driving riser rotates to the angle of above-mentioned angle along rotating shaft, barrier plate sealing barrier door, this moment, dividing plate was with the acid solution isolation of part beyond the cleaning device rotating shaft on descaling bath with the descaling bath volatilization.
4. a kind of electronic devices and components cleaning device as claimed in claim 3, is characterized in that: be provided with connecting rod between the above part of the rotating shaft of barrier plate and riser.
5. a kind of electronic devices and components cleaning device as claimed in claim 1, it is characterized in that: also be provided with control device on support body, described control device is programmable logic controller (PLC), and control device is connected with the electrical system of the cylinder of the acceleration and deceleration motor that rotates feedway, lowering or hoisting gear.
6. a kind of electronic devices and components cleaning device as claimed in claim 5, is characterized in that: be provided with electric heater unit, cooling device, ultrasonic generator in described descaling bath; Described electric heater unit is Teflon heater, is arranged on bottom descaling bath, and Teflon heater is by Resistant heating or electrothermal tube heating; Described cooling device is coldplate, is arranged on the sidewall of descaling bath sidepiece, is provided with the snake pipe for the cooling fluid circulation in coldplate, and coldplate is connected with cooling liquid bath by delivery pump; Described ultrasonic generator is the signal sound wave producer, is arranged on support body, is provided with the ultrasonic vibration box with ultrasonic transducer in descaling bath; Also be provided with sensor for measuring temperature in described descaling bath, sensor for measuring temperature, electric heater unit, cooling device, ultrasonic generator all are connected with control device.
7. a kind of electronic devices and components cleaning device as claimed in claim 5 is characterized in that: described rinsing bowl bottom is provided with the hand-hole for nitrogen injection, also is provided with spray equipment on rinsing bowl, and spray equipment is connected bottom rinsing bowl by pipeline, water pump.
CN 201320005241 2013-01-07 2013-01-07 Cleaning device for electronic component Expired - Fee Related CN203002685U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320005241 CN203002685U (en) 2013-01-07 2013-01-07 Cleaning device for electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320005241 CN203002685U (en) 2013-01-07 2013-01-07 Cleaning device for electronic component

Publications (1)

Publication Number Publication Date
CN203002685U true CN203002685U (en) 2013-06-19

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ID=48594320

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Application Number Title Priority Date Filing Date
CN 201320005241 Expired - Fee Related CN203002685U (en) 2013-01-07 2013-01-07 Cleaning device for electronic component

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CN (1) CN203002685U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103008283A (en) * 2013-01-07 2013-04-03 山东高唐杰盛半导体科技有限公司 Cleaning device for electronic components
CN103834948A (en) * 2014-03-08 2014-06-04 山东高唐杰盛半导体科技有限公司 Double-tank groove etching machine
CN107030050A (en) * 2017-05-31 2017-08-11 深圳市江途机械科技有限公司 A kind of environmental protecting device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103008283A (en) * 2013-01-07 2013-04-03 山东高唐杰盛半导体科技有限公司 Cleaning device for electronic components
CN103008283B (en) * 2013-01-07 2015-08-26 山东高唐杰盛半导体科技有限公司 A kind of electronic devices and components cleaning device
CN103834948A (en) * 2014-03-08 2014-06-04 山东高唐杰盛半导体科技有限公司 Double-tank groove etching machine
CN103834948B (en) * 2014-03-08 2016-08-17 山东高唐杰盛半导体科技有限公司 A kind of double fluted trench etch machine
CN107030050A (en) * 2017-05-31 2017-08-11 深圳市江途机械科技有限公司 A kind of environmental protecting device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180604

Address after: 252800 Gaotang County Economic and Technological Development Zone, Liaocheng, Shandong Province

Patentee after: Shandong Liansheng Electronic Equipment Co., Ltd.

Address before: 252800 Gaotang County Economic Development Zone, Liaocheng, Shandong Province

Patentee before: Shandong Gaotang Jiesheng Semiconductor Technology Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130619

Termination date: 20210107