CN206602095U - 用于化学机械抛光承载头的外部夹环，和承载头 - Google Patents

用于化学机械抛光承载头的外部夹环，和承载头 Download PDF

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Publication number
CN206602095U
CN206602095U CN201621064946.5U CN201621064946U CN206602095U CN 206602095 U CN206602095 U CN 206602095U CN 201621064946 U CN201621064946 U CN 201621064946U CN 206602095 U CN206602095 U CN 206602095U
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CN
China
Prior art keywords
clamp ring
cylindrical wall
outside clamp
hydrophobic coating
carrier head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201621064946.5U
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English (en)
Chinese (zh)
Inventor
帕特里克·阿拉
丁博
胡永其
西蒙·亚沃伯格
麦特斯·拉尔森
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Applied Materials Inc
Original Assignee
Applied Materials Inc
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Publication date
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Publication of CN206602095U publication Critical patent/CN206602095U/zh
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/402—Chemomechanical polishing [CMP] of semiconductor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7606—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201621064946.5U 2015-10-16 2016-09-20 用于化学机械抛光承载头的外部夹环，和承载头 Active CN206602095U (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201562242946P 2015-10-16 2015-10-16
US62/242,946 2015-10-16
US15/176,998 US10029346B2 (en) 2015-10-16 2016-06-08 External clamp ring for a chemical mechanical polishing carrier head
US15/176,998 2016-06-08

Publications (1)

Publication Number Publication Date
CN206602095U true CN206602095U (zh) 2017-10-31

Family

ID=58517708

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201621064946.5U Active CN206602095U (zh) 2015-10-16 2016-09-20 用于化学机械抛光承载头的外部夹环，和承载头
CN201610833897.5A Active CN106965077B (zh) 2015-10-16 2016-09-20 用于化学机械抛光承载头的外部夹环

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201610833897.5A Active CN106965077B (zh) 2015-10-16 2016-09-20 用于化学机械抛光承载头的外部夹环

Country Status (7)

Country Link
US (1) US10029346B2 (https=)
EP (1) EP3363041B1 (https=)
JP (1) JP6956710B2 (https=)
KR (1) KR102640177B1 (https=)
CN (2) CN206602095U (https=)
TW (2) TWI680828B (https=)
WO (1) WO2017065861A1 (https=)

Cited By (1)

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CN116512115A (zh) * 2022-01-20 2023-08-01 格科半导体(上海)有限公司 挡板、防溅装置、化学机械研磨机台及研磨废液防溅方法

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JP7003838B2 (ja) * 2018-05-17 2022-01-21 株式会社Sumco 研磨ヘッド及びこれを用いたウェーハ研磨装置及び研磨方法
CN108857909A (zh) * 2018-07-20 2018-11-23 宁波江丰电子材料股份有限公司 一种用于cmp保持环粘接面的加工方法以及cmp保持环的制备方法
JP7374710B2 (ja) * 2019-10-25 2023-11-07 株式会社荏原製作所 研磨方法および研磨装置
CN110842766B (zh) * 2019-11-26 2022-07-12 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 一种芯片装载机构及芯片研抛系统
CN116000784B (zh) * 2022-12-29 2024-08-16 西安奕斯伟材料科技股份有限公司 硅片双面抛光装置的承载件及硅片双面抛光装置

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US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116512115A (zh) * 2022-01-20 2023-08-01 格科半导体(上海)有限公司 挡板、防溅装置、化学机械研磨机台及研磨废液防溅方法

Also Published As

Publication number Publication date
EP3363041B1 (en) 2023-06-07
CN106965077A (zh) 2017-07-21
JP6956710B2 (ja) 2021-11-02
US20170106496A1 (en) 2017-04-20
US10029346B2 (en) 2018-07-24
EP3363041A4 (en) 2019-06-12
TWM544392U (zh) 2017-07-01
EP3363041A1 (en) 2018-08-22
KR20180058838A (ko) 2018-06-01
JP2018531804A (ja) 2018-11-01
TWI680828B (zh) 2020-01-01
TW201714705A (zh) 2017-05-01
KR102640177B1 (ko) 2024-02-22
CN106965077B (zh) 2021-07-30
WO2017065861A1 (en) 2017-04-20

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