CN206583816U - Defect inspection filming apparatus, defect inspecting system and film manufacturing device - Google Patents
Defect inspection filming apparatus, defect inspecting system and film manufacturing device Download PDFInfo
- Publication number
- CN206583816U CN206583816U CN201621361034.4U CN201621361034U CN206583816U CN 206583816 U CN206583816 U CN 206583816U CN 201621361034 U CN201621361034 U CN 201621361034U CN 206583816 U CN206583816 U CN 206583816U
- Authority
- CN
- China
- Prior art keywords
- shooting area
- polarization
- defect inspection
- filming apparatus
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
- G01N2021/8864—Mapping zones of defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
The utility model provides defect inspection filming apparatus, defect inspecting system and film manufacturing device, can integrate different inspection series, cut down and check serial number.Defect inspection involved by an embodiment of the present utility model is used for the defect inspection for carrying out the film with polarization characteristic with filming apparatus, possesses：Light irradiating means, its to film shooting area irradiation light；Photographic unit, the shooting area of film is shot for two dimensional image by it；First Polarization filter, it is configured between light irradiating means and the shooting area of film in the way of with film formation orthogonal polarization state；Carrying mechanism, it relatively carries film relative to light irradiating means, photographic unit and Polarization filter along direction Y is carried, shooting area, which is included in, carries the first shooting area and the second shooting area that direction is divided out, and the first Polarization filter is configured between light irradiating means and the first shooting area.
Description
Technical field
The utility model be related to the defect inspection filming apparatus of the defect for checking film, defect inspecting system and
Film manufacturing device.
Background technology
The known defect to the film that is used in the optical films such as polarizing coating and phase retardation film, the barrier film of battery etc. is examined
The defect inspecting system of survey.This defect inspecting system using carrying mechanism carry film, using shooting from light irradiating means to film
Area illumination light, the shooting area of film is shot using photographic unit, and carry out defect inspection according to captured image.As
The species of the defect detecting method carried out based on this defect inspecting system, is broadly divided into transmission beam method and bounce technique.In more detail
Say, as transmission beam method, have regular transmission method, cross-polarization (crossed nicol) transmission beam method, transmission scattering method, be used as reflection
Method, there is normal reflection method, cross-polarization bounce technique, specular scattering method.In patent document 1, disclose makes as transmission beam method
With regular transmission method, transmit scattering method defect inspecting system, in addition, disclose used as bounce technique normal reflection method,
The defect inspecting system of specular scattering method, in patent document 2, discloses and cross-polarization transmission has been used as transmission beam method
The defect inspecting system of method.
For example, regular transmission method is adapted to detect for being mixed into, adhering to caused black foreign matter, cross-polarization in film bonding process
Transmission beam method is adapted to detect for being mixed into, adhering to caused bright spot in adhesive working procedure of coating, and transmission scattering method is adapted to detect for film and removed
Cut transfers brought deformation caused by transporting the attachment foreign matter in process.On the other hand, bounce technique (normal reflection method, it is orthogonal partially
Shake bounce technique, specular scattering method) it is adapted to detect for biting caused bubble in bonding process.
Citation
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2012-167975 publications
Patent document 2：Japanese Unexamined Patent Publication 2007-212442 publications
In order to detect different multiple defects of black foreign matter, bright spot, deformation, bubble, it is considered to using different a variety of
Inspection method (checks series).If however, checking that serial number becomes many, input cost, management cost are uprised, and it is desirable to cut
Subtract the serial number of inspection.
Utility model content
The utility model problem to be solved
Therefore, the purpose of this utility model is to provide and can integrate different inspection series and cut down and check serial number
Defect inspection filming apparatus, defect inspecting system and film manufacturing device.
Means for solving the problems
Defect inspection of the present utility model is used for the defect inspection for carrying out the film with polarization characteristic with filming apparatus, its
In, the defect inspection possesses with filming apparatus：Light irradiating means, its to film shooting area irradiation light；Photographic unit, its
The shooting area of film is shot for two dimensional image；First Polarization filter, its with film formation orthogonal polarization state or first
The mode of nonopiate polarization state, is configured between light irradiating means and the shooting area of film or the shooting area of film and bat
Take the photograph between mechanism；And carrying mechanism, it is carried relative to light irradiating means, photographic unit and the first Polarization filter edge
Film is relatively carried in direction, and shooting area, which is included in, carries the first shooting area being divided out on direction and the second shooting
Region, the configuration of the first Polarization filter is between light irradiating means and the first shooting area or the first shooting area is with shooting
Between mechanism.
In addition, defect inspection image pickup method of the present utility model is using possessing light irradiating means, photographic unit, first
The defect inspection of Polarization filter and carrying mechanism is carried out with filming apparatus for checking lacking for the film with polarization characteristic
Sunken shooting, wherein, the defect inspection includes following process with image pickup method：First Polarization filter arrangement step, by
One Polarization filter is configured in light irradiation in the way of with film formation orthogonal polarization state or the first nonopiate polarization state
Between mechanism and the shooting area of film or between the shooting area and photographic unit of film；Transportation process, utilizes carrying mechanism
Relative to light irradiating means, photographic unit and the first Polarization filter film is relatively carried along direction is carried；Light irradiation work
Sequence, using shooting area irradiation light from light irradiating means to film；And process is shot, using photographic unit by the shooting area of film
Domain is shot for two dimensional image, and shooting area, which is included in, carries the first shooting area being divided out on direction and the second shooting
Region, in the first Polarization filter arrangement step, area is shot by the configuration of the first Polarization filter in light irradiating means with first
Between domain or between the first shooting area and photographic unit.
Here, orthogonal polarization state refers to the polarization axle (polarization absorption axle) of Polarization filter and the polarization axle of film
(polarization absorption axle) substantial orthogonal state, i.e. the polarization axle of the polarization axle (polarization absorption axle) of Polarization filter and film is (inclined
Shake absorption axiss) with the state of substantial 90 degree of angular cross.On the other hand, nonopiate polarization (Japanese：The Off Network ロ ス of Ha one
ニ Us Le) state refers to that the polarization axle (polarization absorption axle) of the polarization axle (polarization absorption axle) of Polarization filter and film is real
Matter does not go up state that is orthogonal but intersecting, i.e. the polarization axle (polarization of the polarization axle (polarization absorption axle) of Polarization filter and film
Absorption axiss) with the state of the angular cross beyond substantial 90 degree.
According to the defect inspection filming apparatus and defect inspection image pickup method, for example, due to the first polarization filtering
Device is configured between light irradiating means and the first shooting area or first count in the way of with film formation orthogonal polarization state
Take the photograph between region and photographic unit, photographic unit claps the shooting area including the first shooting area and the second shooting area
Take the photograph as two dimensional image, therefore, it is possible to shoot simultaneously the cross-polarization transmission inspection of the first shooting area with image (or it is orthogonal partially
Reflex shake with image), such as regular transmission inspection of the second shooting area is with image (or normal reflection inspection image).
That is, cross-polarization transmission inspections can be integrated and shoot series (or cross-polarization reflex shooting serial) and such as
Regular transmission inspection is serial (or normal reflection inspection shooting series) with shooting.As a result, cross-polarization transmission can be integrated
Check that series (or cross-polarization reflex series) and such as regular transmission check series (or normal reflection checks series),
Serial number is checked so as to cut down.
On the basis of above-mentioned defect inspection filming apparatus, it would however also be possible to employ following manner, the first Polarization filter
Configuration is between light irradiating means and the first shooting area.In addition, on the basis of above-mentioned defect inspection image pickup method,
Can also in the following way, in the first Polarization filter arrangement step, by the configuration of the first Polarization filter in light irradiation machine
Between structure and the first shooting area.
However, cross-polarization transmission check with shoot series (or cross-polarization reflex with shoot series) with
Such as regular transmission inspection is with shooting in series (or normal reflection inspection shooting series), and the brightness value of appropriate light is different.
Accordingly it is also possible in the following way, above-mentioned defect inspection is also equipped with brightness regulation mechanism with filming apparatus,
Brightness regulation mechanism regulation exposes to the light or thoroughly of the first shooting area and at least one party in the second shooting area
Cross the first shooting area and at least one party in the second shooting area or by the first shooting area and the second shooting area
At least one party reflection light brightness value.
Thereby, it is possible to be exposed to using the regulation of brightness regulation mechanism in the first shooting area and the second shooting area
The light or the first shooting area of transmission of at least one party and at least one party in the second shooting area shoot area by first
At least one party in domain and the second shooting area penetrates the brightness value of light, therefore, it is possible in the first shooting area and second count
The brightness value of appropriate light is set in the shooting for taking the photograph region, can be with serial (or just with cross-polarization transmission inspections shooting
Friendship reflection of polarization inspection is serial with shooting) and such as regular transmission inspection shooting series (or normal reflection inspection shooting system
Row) brightness value of corresponding light checked.
Can also be that above-mentioned brightness regulation mechanism regulation exposes to the light of the second shooting area or passes through second count
Take the photograph the brightness value of region or the light reflected by the second shooting area.
Sometimes cross-polarization transmission, which checks to use, shoots the appropriate of series (or cross-polarization reflex is serial with shooting)
Light brightness value it is larger, the regular transmission inspection appropriate light for shooting series (or normal reflection inspection with shoot series)
Brightness value is smaller.In this case, if as described above, the second shooting area is exposed to using the regulation of brightness regulation mechanism
Light or the light reflected through the second shooting area or by the second shooting area brightness value mode, such as by from light
Irradiation means export the light of larger brightness value, can make to shoot series towards for carrying out cross-polarization transmission inspection
The brightness value of first light for shooting area illumination of (or cross-polarization reflex is serial with shooting) is larger, on the other hand,
Brightness regulation mechanism, which can be utilized, to be made to expose to and shoots series (or normal reflection inspection bat for carrying out regular transmission inspection
Take the photograph series) the second shooting area light or through the second shooting area or by the second shooting area reflect light brightness
Value is smaller.
Alternatively, it is also possible to be, above-mentioned brightness regulation mechanism be disposed on light irradiating means and the second shooting area it
Between or the attentuating filter between the second shooting area and photographic unit.
Alternatively, it is also possible to be, above-mentioned brightness regulation mechanism is configured at light irradiating means, individually adjusts and is shot to first
The brightness value of the light of area illumination and the brightness value to the second light for shooting area illumination.
On the basis of above-mentioned defect inspection filming apparatus or, the first of the first Polarization filter and film
Shooting area formation orthogonal polarization state, brightness regulation mechanism includes the first brightness regulation Polarization filter, first brightness
Regulation Polarization filter is configured in illumination in the way of with the second shooting area of film the first nonopiate polarization state of formation
Penetrate between mechanism and the second shooting area or between the second shooting area and photographic unit.
Here, present inventors have found, regular transmission method is suitable to the detection of black foreign matter, and cross-polarization transmission beam method is fitted
In the detection of bright spot, but cross-polarization transmission beam method is difficult to detection bright spot slightly weak compared with stronger bright spot.On this point,
Present inventors are found that the profit in black foreign matter that cross-polarization transmission beam method is difficult to detect, the detection of slightly weak bright spot
Use nonopiate transmission beam method.
On this point, according to the defect inspection filming apparatus, because the first brightness regulation is (bright with Polarization filter
Spend governor motion) with the second shooting area of film the first nonopiate polarization state of formation, therefore, it is possible to improve black foreign matter and on
State the detection of slightly weak bright spot.
In addition, on the basis of above-mentioned defect inspection filming apparatus or, the first Polarization filter and film
The first shooting area the first nonopiate polarization state of formation, brightness regulation mechanism is disposed on light irradiating means and second count
Take the photograph the attentuating filter between region or between the second shooting area and photographic unit.
According to the defect inspection filming apparatus, due to the first shooting area formation the of the first Polarization filter and film
One nonopiate polarization state, therefore, it is possible to improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned defect inspection filming apparatus or, the first Polarization filter and film
The first shooting area the first nonopiate polarization state of formation, brightness regulation mechanism is configured at light irradiating means, individually adjust to
First shoots the brightness value of the light of area illumination and the brightness value to the second light for shooting area illumination.
In the defect inspection filming apparatus, due to the first shooting area formation the of the first Polarization filter and film
One nonopiate polarization state, therefore can also improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned defect inspection filming apparatus or, shooting area is included in carrying
The third shot being divided out on direction takes the photograph region, and brightness regulation mechanism includes the second brightness regulation Polarization filter and regulation
The brightness value that third shot takes the photograph the light in region is exposed to, second brightness regulation takes the photograph area with Polarization filter with the third shot with film
Domain forms the mode of the second nonopiate polarization state, configures between light irradiating means and third shot take the photograph region or third shot
Take the photograph between region and photographic unit.
According to the defect inspection filming apparatus, because the first brightness regulation is with Polarization filter (brightness regulation mechanism)
With the second shooting area the first nonopiate polarization state of formation of film, the second brightness regulation Polarization filter (brightness regulation machine
Structure) take the photograph region with the third shot of film and form the second nonopiate polarization state, therefore, it is possible to improve black foreign matter and above-mentioned slightly weak
The detection of bright spot.
In addition, on the basis of above-mentioned defect inspection filming apparatus or, shooting area is included in carrying
The third shot being divided out on direction takes the photograph region, and defect inspection is also equipped with the second Polarization filter with filming apparatus, and this is second inclined
Polarization filter configuration is between light irradiating means and third shot take the photograph region or third shot is taken the photograph between region and photographic unit, with
The third shot of film takes the photograph region and forms the second nonopiate polarization state.
According to the defect inspection filming apparatus, due to the first shooting area formation the of the first Polarization filter and film
The third shot of one nonopiate polarization state, the second Polarization filter and film takes the photograph region and forms the second nonopiate polarization state, therefore
The detection of black foreign matter and above-mentioned slightly weak bright spot can be improved.
In addition, on the basis of above-mentioned defect inspection filming apparatus or, the first Polarization filter and film
The first shooting area formation the first nonopiate polarization state, brightness regulation mechanism include the first brightness regulation polarization filtering
Device, the first brightness regulation Polarization filter is with the side with the second shooting area of film the second nonopiate polarization state of formation
Formula, is configured between light irradiating means and the second shooting area or between the second shooting area and photographic unit.
According to the defect inspection filming apparatus, due to the first shooting area formation the of the first Polarization filter and film
One nonopiate polarization state, the first brightness regulation the second shooting area shape of Polarization filter (brightness regulation mechanism) and film
Into the second nonopiate polarization state, therefore, it is possible to improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
The defect that another defect inspection of the present utility model is used to carry out the film without polarization characteristic with filming apparatus is examined
Look into, wherein, the defect inspection possesses with filming apparatus：Light irradiating means, its to film shooting area irradiation light；Photographic unit,
The shooting area of film is shot for two dimensional image by it；A pair of first Polarization filters, it is to form orthogonal polarization state or
The mode of one nonopiate polarization state, be arranged respectively between light irradiating means and the shooting area of film and film shooting area
Between domain and photographic unit；And carrying mechanism, it is relative to light irradiating means, photographic unit and a pair first polarization filters
Ripple device relatively carries film along direction is carried, shooting area be included in carry the first shooting area for being divided out on direction with
And second shooting area, a pair of first Polarization filters configurations are between light irradiating means and the first shooting area and first
Between shooting area and photographic unit.
Another defect inspection image pickup method of the present utility model using possess light irradiating means, photographic unit, a pair
The defect inspection of one Polarization filter and carrying mechanism is carried out with filming apparatus for checking the film without polarization characteristic
Defect shooting, wherein, the defect inspection with image pickup method include following process：First Polarization filter arrangement step, will
A pair of first Polarization filters are arranged respectively in the way of forming orthogonal polarization state or the first nonopiate polarization state
Between light irradiating means and the shooting area of film and between the shooting area and photographic unit of film；Transportation process, using removing
Film is relatively carried relative to light irradiating means, photographic unit and a pair of first Polarization filters along direction is carried by fortune mechanism；
Light irradiation process, using shooting area irradiation light from light irradiating means to film；And process is shot, using photographic unit by film
Shooting area be shot for two dimensional image, shooting area be included in carry the first shooting area for being divided out on direction and
A pair of first Polarization filters in the first Polarization filter arrangement step, are arranged respectively at light irradiation by the second shooting area
Between mechanism and the first shooting area and between the first shooting area and photographic unit.
According to another the defect inspection filming apparatus and defect inspection image pickup method, for example, due to a pair first
Polarization filter in the way of forming orthogonal polarization state, be arranged respectively between light irradiating means and the first shooting area, with
And first between shooting area and photographic unit, photographic unit is by the bat including the first shooting area and the second shooting area
Take the photograph region and be shot for two dimensional image, therefore, it is possible to simultaneously shoot the first shooting area cross-polarization transmission inspection with image (or
Person's cross-polarization reflex image), such as regular transmission inspection of the second shooting area image (or normal reflection inspection
With image).That is, can integrate cross-polarization transmission inspections shoot series (or cross-polarization reflex shooting be
Row) and such as regular transmission inspection shooting series (or normal reflection inspection is serial with shooting).As a result, can integrate just
Polarization transmission is handed over to check that series (or cross-polarization reflex series) and such as regular transmission check serial (or normal reflection
Check series), check serial number so as to cut down.
However, as described above, check that (or cross-polarization reflex is used with series is shot in cross-polarization transmission
Shoot series) with such as regular transmission inspection with shooting in series (or normal reflection inspection with shoot series), appropriate light it is bright
Angle value is different.
Accordingly it is also possible to which in the following way, above-mentioned another defect inspection is also equipped with brightness regulation machine with filming apparatus
Structure, brightness regulation mechanism regulation expose to the first shooting area and at least one party in the second shooting area light or
Through at least one party in the first shooting area and the second shooting area or by the first shooting area and the second shooting area
In at least one party reflection light brightness value.
Thereby, it is possible to be exposed to using the regulation of brightness regulation mechanism in the first shooting area and the second shooting area
The light or the first shooting area of transmission of at least one party and at least one party in the second shooting area shoot area by first
At least one party in domain and the second shooting area penetrates the brightness value of light, therefore, it is possible in the first shooting area and second count
The brightness value of appropriate light is set in the shooting for taking the photograph region, can be with serial (or just with cross-polarization transmission inspections shooting
Friendship reflection of polarization inspection is serial with shooting) and such as regular transmission inspection shooting series (or normal reflection inspection shooting system
Row) brightness value of corresponding light checked.
Can also be that above-mentioned brightness regulation mechanism regulation exposes to the light of the second shooting area or passes through second count
Take the photograph the brightness value of region or the light reflected by the second shooting area.
As described above, cross-polarization sometimes transmission check with shoot series (or cross-polarization reflex shooting
Series) appropriate light brightness value it is larger, regular transmission inspection is with shooting series (or normal reflection inspection with shoot series)
The brightness value of appropriate light is smaller.In this case, if as described above, the is exposed to using the regulation of brightness regulation mechanism
The mode of the brightness value of the light of two shooting areas or the light reflected through the second shooting area or by the second shooting area, example
Such as by exporting the light of larger brightness value from light irradiating means, it can make to use towards for carrying out cross-polarization transmission inspection
The brightness value for shooting the first light for shooting area illumination of series (or cross-polarization reflex is serial with shooting) is larger,
On the other hand, can utilize brightness regulation mechanism makes to expose to and shoots serial (or normal reflection for carrying out regular transmission inspection
Check with shoot series) the second shooting area light or through the second shooting area or by the second shooting area reflect
The brightness value of light is smaller.
Alternatively, it is also possible to be, above-mentioned brightness regulation mechanism be disposed on light irradiating means and the second shooting area it
Between or the attentuating filter between the second shooting area and photographic unit.
Alternatively, it is also possible to be, above-mentioned brightness regulation mechanism is configured at light irradiating means, individually adjusts and is shot to first
The brightness value of the light of area illumination and the brightness value to the second light for shooting area illumination.
On the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, a pair first inclined
Polarization filter formation orthogonal polarization state, brightness regulation mechanism includes a pair of first brightness regulation Polarization filters, and this is a pair
First brightness regulation Polarization filter is in the way of forming the first nonopiate polarization state, and configuration is in light irradiating means and the
Between two shooting areas and between the second shooting area and photographic unit.
According to another defect inspection filming apparatus, due to a pair of first brightness regulations, with Polarization filter, (brightness is adjusted
Save mechanism) the first nonopiate polarization state is formed, therefore, it is possible to improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, a pair
First Polarization filter the first nonopiate polarization state of formation, brightness regulation mechanism is disposed on light irradiating means and second count
Take the photograph the attentuating filter between region or between the second shooting area and photographic unit.
Area is shot according to another defect inspection filming apparatus, first due to a pair of first Polarization filters and film
Domain forms the first nonopiate polarization state, therefore, it is possible to improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, a pair
First Polarization filter the first nonopiate polarization state of formation, brightness regulation mechanism is configured at light irradiating means, individually adjust to
First shoots the brightness value of the light of area illumination and the brightness value to the second light for shooting area illumination.
In another defect inspection filming apparatus, because a pair of first Polarization filter formation first is nonopiate partially
Shake state, therefore, it is possible to improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, shoot
Region is included in the third shot being divided out on carrying direction and takes the photograph region, and brightness regulation mechanism includes a pair of second brightness regulations
With Polarization filter, regulation exposes to the brightness value that third shot takes the photograph the light in region, a pair of second brightness regulation polarization filterings
Device is in the way of forming the second nonopiate polarization state, and configuration is between light irradiating means and third shot take the photograph region and the 3rd
Between shooting area and photographic unit.
According to another defect inspection filming apparatus, due to a pair of first brightness regulations, with Polarization filter, (brightness is adjusted
Save mechanism) with the second shooting area of film the first nonopiate polarization state of formation, a pair of second brightness regulation Polarization filters
The third shot of (brightness regulation mechanism) and film takes the photograph region and forms the second nonopiate polarization state, therefore, it is possible to improve black foreign matter with
And the detection of above-mentioned slightly weak bright spot.
In addition, on the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, shoot
Region is included in the third shot being divided out on carrying direction and takes the photograph region, and defect inspection is also equipped with a pair second with filming apparatus
Polarization filter, a pair of second Polarization filters are arranged respectively at illumination in the way of forming the second nonopiate polarization state
Penetrate mechanism and third shot takes the photograph between region and third shot is taken the photograph between region and photographic unit.
According to another defect inspection filming apparatus, because a pair of first Polarization filter formation first is nonopiate partially
Shake state, a pair of second Polarization filters the second nonopiate polarization states of formation, therefore, it is possible to improve black foreign matter and it is above-mentioned slightly
The detection of weak bright spot.
In addition, on the basis of above-mentioned another defect inspection filming apparatus, it would however also be possible to employ following manner, a pair
First Polarization filter the first nonopiate polarization state of formation, brightness regulation mechanism includes a pair of first brightness regulation polarizations
Wave filter, a pair of first brightness regulation Polarization filters are configured in light in the way of forming the second nonopiate polarization state
Between irradiation means and the second shooting area and between the second shooting area and photographic unit.
According to another defect inspection filming apparatus, because a pair of first Polarization filter formation first is nonopiate partially
Shake state, a pair of first brightness regulations wave filter (brightness regulation mechanism) the second nonopiate polarization state of formation, therefore, it is possible to
Improve the detection of black foreign matter and above-mentioned slightly weak bright spot.
Defect inspecting system of the present utility model possesses：Above-mentioned defect inspection filming apparatus or the inspection of another defect
Look into and use filming apparatus；And test section, its according to by defect inspection with filming apparatus or another defect inspection filming apparatus
The two dimensional image that photographs and detect defect present in film.In addition, defect detecting method of the present utility model is including above-mentioned
Defect inspection image pickup method or another defect inspection image pickup method, the defect detecting method include defects detection process,
In the defects detection process, shot according to using defect inspection with image pickup method or another defect inspection with image pickup method
To two dimensional image and detect defect present in film.
Film manufacturing device of the present utility model possesses above-mentioned defect inspecting system.In addition, the system of film of the present utility model
Making method includes above-mentioned defect detecting method.
Utility model effect
According to the utility model, different inspection series can be integrated in the defect inspection of film, so as to cut down inspection system
Columns.
Brief description of the drawings
Fig. 1 is the manufacture device and the figure of manufacture method for showing the film involved by an embodiment of the present utility model.
Fig. 2 is to show the defect inspecting system and defect detecting method involved by embodiment of the present utility model
Figure.
Fig. 3 is to show defect inspection filming apparatus and the defect involved by first embodiment of the present utility model
The figure of inspection image pickup method.
Fig. 4 is to show defect inspection filming apparatus and the defect involved by second embodiment of the present utility model
The figure of inspection image pickup method.
Fig. 5 is to show the defect inspection filming apparatus and defect involved by the 3rd embodiment of the present utility model
The figure of inspection image pickup method.
Fig. 6 is to show the defect inspection filming apparatus and defect involved by the 4th embodiment of the present utility model
The figure of inspection image pickup method.
Fig. 7 is to show the defect inspection filming apparatus and defect involved by the 5th embodiment of the present utility model
The figure of inspection image pickup method.
And the figure of defect inspection image pickup method.
Fig. 8 is to show the defect inspection filming apparatus and defect involved by the 6th embodiment of the present utility model
The figure of inspection image pickup method.
Fig. 9 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 10 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 11 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 12 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 13 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 14 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 15 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 16 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 17 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 18 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 19 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 20 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 21 (a)~(c) is to show that the defect inspection filming apparatus of second embodiment and defect inspection are clapped
Take the photograph the figure of the result of method.
Figure 22 is to show the defect inspecting system and defect detecting method involved by embodiment of the present utility model
Figure.
Figure 23 is to show the defect inspection filming apparatus and defect involved by the 7th embodiment of the present utility model
The figure of inspection image pickup method.
Figure 24 is to show the defect inspection filming apparatus and defect involved by the 8th embodiment of the present utility model
The figure of inspection image pickup method.
Figure 25 is to show the defect inspection filming apparatus and defect involved by the 9th embodiment of the present utility model
The figure of inspection image pickup method.
Figure 26 is to show the defect inspection filming apparatus and defect involved by the tenth embodiment of the present utility model
The figure of inspection image pickup method.
Figure 27 is to show defect inspection filming apparatus involved by the 11st embodiment of the present utility model and lack
Fall into the figure of inspection image pickup method.
Figure 28 is to show defect inspection filming apparatus involved by the 12nd embodiment of the present utility model and lack
Fall into the figure of inspection image pickup method.
Figure 29 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 30 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 31 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 32 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 33 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 34 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 35 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 36 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 37 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 38 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 39 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 40 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 41 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 42 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 43 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 44 is the defect inspection filming apparatus and defect inspection shooting involved by variation of the present utility model
The figure of method.
Figure 45 (a)~(d) is to show that the defect inspection filming apparatus of the 7th embodiment and defect inspection are clapped
Take the photograph the figure of the result of method.
Description of reference numerals
10th, 10A, 10B, 10C, 10D, 10E... defect inspecting system；20th, 20A, 20B, 20C, 20D, 20E... defect
Inspection filming apparatus；21... light source (light irradiating means)；21A... light sources (brightness regulation mechanism)；22... region is sensed
Device (photographic unit)；22a...CCD or CMOS；22b... lens；231, the Polarization filters of 241... first；232、242...
Second Polarization filter；251、253... the first brightness regulation is with Polarization filter (brightness regulation mechanism)；252、254... the
Two brightness regulations are with Polarization filter (brightness regulation mechanism)；26... attentuating filter (brightness regulation mechanism)；30... image
Analysis portion；40... labelling apparatus；100... manufacture device (film manufacturing device)；101st, 102,103... stock rolls；104、
105... doubling roller；106... transport roller；110... film；111... polarizing coating main part；112... the bonding of barrier film is carried
Part；113... surface protection film；R... shooting area；R0... shooting area in the middle of；R1... the first shooting area；R2...
Two shooting areas；R3... third shot takes the photograph region.
Embodiment
Hereinafter, refer to the attached drawing, preferred embodiment of the present utility model is described in detail.It should be noted that
In each accompanying drawing, identical reference is marked for same or equivalent part.
The manufacture device and manufacture method of film involved by embodiment of the present utility model, which are used to manufacture, has polarization
The polarizing coating (optical film) of characteristic and phase retardation film (optical film), battery barrier film without polarization characteristic etc..
Shown in Fig. 1 the film (polarizing coating) with polarization characteristic manufacture device and one of manufacture method, omit without polarization
The manufacture device of phase retardation film, the battery barrier film of characteristic etc. and the explanation of manufacture method.
Manufacture device (film manufacturing device) 100 shown in Fig. 1 is first in the interarea both sides laminating diaphragm of polarizer, life
Into polarizing coating main part (optical film main part) 111.Pasted next, manufacture device 100 is taken out from stock roll 101 on adhesive
Conjunction has the adhesive 112 with barrier film of barrier film (mold release film), using doubling roller 104 by the adhesive with barrier film
112 fit in the interarea side of a side of polarizing coating main part 111.Next, manufacture device 100 takes out surface from stock roll 102
Diaphragm 113, fits in surface protection film 113 using doubling roller 105 the interarea side of the opposing party of polarizing coating main part 111,
So as to generate the film 110 with polarization characteristic.Next, manufacture device 100 carries generated film 110 using transport roller 106
And wind the film 110 using stock roll 103.
As the material of the polarizer in polarizing coating main part 111, PVA (Polyvinyl Alcohol) etc. can be enumerated,
As the material of the diaphragm in polarizing coating main part 111, TAC (Triacetylcellulose) etc. can be enumerated.In addition,
As the barrier film and the material of surface protection film 113 in the adhesive 112 with barrier film, PET can be enumerated
(Polyethylene Terephthalate) etc..By peeling off barrier film, film 110 can fit in liquid crystal using adhesive
Panel, other optical films etc..
In addition, manufacture device 100 possesses the defect inspecting system 10 for the defect inspection for carrying out film 110 and polarized
The defect inspecting system 10 of the defect inspection of film main part 111.It should be noted that due to these phases of defect inspecting system 10
Together, therefore below the defect inspecting system 10 of the defect inspection of progress film 110 is illustrated.
[first embodiment]
Defect inspecting system and defect detecting method involved by first embodiment of the present utility model are in progress
The defect inspecting system 10 and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.Fig. 2 is to show
The figure of defect inspecting system and defect detecting method involved by first embodiment of the present utility model, Fig. 3 is to show this
The figure of defect inspection filming apparatus and defect inspection image pickup method involved by the first embodiment of utility model.
Defect inspecting system 10 shown in Fig. 2 possesses defect inspection filming apparatus 20, graphical analysis portion (test section) 30
And labelling apparatus 40, the defect inspection filming apparatus 20 shown in Fig. 3 possesses light source (light irradiating means) 21, multiple regions
The Polarization filter 23 of sensor (photographic unit) 22 and first1.XYZ orthogonal coordinates, X side are shown in Fig. 2 and Fig. 3
To the width for representing polarizing coating, Y-direction represents the carrying direction of polarizing coating.
In the present embodiment, the transport roller 106 and stock roll 103 mainly shown in Fig. 1 are sent out as carrying mechanism
Wave function.Using these carrying mechanisms, along carrying direction Y relative to light source 21, the polarization filtering of area sensor 22 and first
Device 231Relatively carry film 110.
Light source 21 is arranged on the interarea side of the opposing party of film 110, to the shooting area R irradiation lights of film 110.For example, light source
21 be the light source of the wire of X extensions in the width direction.
Area sensor 22 is configured in the interarea side of a side of film 110, and X is arranged in the width direction.Area sensor 22 is wrapped
Include CCD (Charge Coupled Device) or CMOS (Complementary Metal-Oxide
Semiconductor) 22a and lens 22b.Area sensor 22 is continuous in time through the light after film 110 by receiving
The shooting area R of film 110 is shot for two dimensional image by ground.
It is preferred that the carrying direction Y of two dimensional image captured by each area sensor 22 length is, from each region sensing
Device 22 obtain at least 2 times of the transport distance that two dimensional image is handled upside down to film 110 during the next two dimensional image of acquisition with
On.In other words, it is preferable that being shot more than 2 times to the same area of film 110.So, by making the carrying direction Y of two dimensional image
Length obtained than image during transport distance it is big, increase same a part of shooting number of times of film 110, so as to high-precision
Degree ground checks defect.
Here, shooting area R, which is included in, carries the shootings of the first shooting area R1 being divided out on the Y of direction and second
Region R2.In addition, shooting area R includes the middle shooting area R0 between the first shooting area R1 and the second shooting area R2.
First Polarization filter 231Configuration is between light source 21 and film 110.Specifically, the first Polarization filter 231Match somebody with somebody
Put between light source 21 and shooting area R the first shooting area R1.In the present embodiment, the first Polarization filter 231Match somebody with somebody
It is set to, when from area sensor 22, the half for carrying the shooting area R on the Y of direction is blocked (Japanese：ナイフエッ
ジ).In addition, the first Polarization filter 231With the formation orthogonal polarization state of film 110.Here, orthogonal polarization state is referred to
The polarization axle (polarization absorption axle) of Polarization filter and the substantial orthogonal state of the polarization axle (polarization absorption axle) of film, i.e. partially
The polarization axle of polarization filter and the polarization axle of film are with the state of substantial 90 degree of angular cross.Above-mentioned " substantial 90 degree " refer to
, such as 85 degree less than 95 degree, more preferably 90 degree.
Thereby, it is possible to shoot cross-polarization transmission inspection image in the first shooting area R1, in the second shooting area R2
Regular transmission inspection image is shot, transmission scattering inspection image is shot in middle shooting area R0.
Graphical analysis portion 30 defect present in film 110 is detected according to the two dimensional image from area sensor 22.Separately
Outside, graphical analysis portion 30 is according to the pixel coordinate of two dimensional image, the distance that film is handled upside down during image taking, by X-Y scheme
As upper coordinate position is converted to the coordinate position on film 110, defective locations information is generated.Graphical analysis portion 30 is according to defect
Positional information and synthesize the image corresponding with the whole region of film 110, make defect mapping graph.
Labelling apparatus 40 is marked according to the defect mapping graph from graphical analysis portion 30 on film.
Next, using the defect detecting method involved by first embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light source 21
Between the first shooting area R1 of film 110 (the first Polarization filter arrangement step).
Next, using carrying mechanism, relative to light source 21, the Polarization filter 23 of area sensor 22 and first1Phase
Over the ground along carry direction Y carry film 110 (transportation process), using shooting area R irradiation light (light irradiations from light source 21 to film 110
Process), the shooting area R of film 110 is shot for two dimensional image (shooting process) using area sensor 22.
Next, using graphical analysis portion 30, being deposited according to being detected from the two dimensional image of area sensor 22 in film 110
Defect, and according to defective locations information make defect mapping graph (defects detection process).Next, utilizing mark dress
40 are put, is marked according to the defect mapping graph from graphical analysis portion 30 on film 110 (marking procedures).
Defect inspection filming apparatus 20 and defect inspection shooting side according to involved by the first embodiment
Method, due to the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light source (light irradiation machine
Structure) 21 and first between shooting area R1, area sensor (photographic unit) 22 will include the first shooting area R1, second count
The shooting area R for taking the photograph region R2 and middle shooting area R0 is shot for two dimensional image, is shot therefore, it is possible to shoot first simultaneously
Regular transmission inspection image and the middle bat of region R1 cross-polarization transmission inspection image, the second shooting area R2
Take the photograph region R0 transmission scattering inspection image.That is, cross-polarization transmission inspection can be integrated and shoot series, regular transmission inspection
Look into and shoot serial with shooting series and transmission scattering inspection.
As a result, according to the defect inspecting system 10 and defect detecting method of first embodiment, can integrate just
Polarization transmission is handed over to check that series, regular transmission check that series and transmission scattering check series.
Therefore, according to the defect inspection of first embodiment filming apparatus 20, defect inspection image pickup method, defect
Inspection system 10 and defect detecting method, can cut down the serial number of inspection.
[second embodiment]
Defect inspecting system and defect detecting method involved by second embodiment of the present utility model are in progress
The defect inspecting system 10 and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.
The difference of defect inspecting system 10A and first embodiment involved by second embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Fig. 2, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20A.In addition, the defect inspection shown in Fig. 4 is existed with filming apparatus 20A and first embodiment difference
In in the defect inspection shown in Fig. 3 with being also equipped with attentuating filter (brightness regulation mechanism) 26 in filming apparatus 20.
Attentuating filter 26 is configured between the shooting area R2 of light source 21 and second.Thus, attentuating filter 26 can drop
The brightness value of the low light for exposing to the second shooting area R2.Attentuating filter 26 can also configure the second shooting area R2 with
Between area sensor 22, brightness of the reduction through the second shooting area R2 light.
Next, using the defect detecting method involved by second embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, attentuating filter 26 is configured in light
Between the shooting area R2 of source 21 and second.Thereby, it is possible to reduce the brightness value (brightness for the light for exposing to the second shooting area R2
Adjust process).Attentuating filter 26 can also be configured between the second shooting area R2 and area sensor 22, and reduction is passed through
The brightness of second shooting area R2 light.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
According to the defect inspection of second embodiment filming apparatus 20A, defect inspection image pickup method, defect inspection
System 10A and defect detecting method are looked into, the defect inspection filming apparatus 20 with first embodiment is also resulted in, lacks
Fall into inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
However, checked in cross-polarization transmission with shooting series and regular transmission inspection with shooting series, appropriate light
Brightness value is different.More specifically, cross-polarization transmission checks larger with the brightness value for the appropriate light for shooting series, just thoroughly
The brightness value for penetrating the appropriate light that inspection shoots series is smaller.
On this point, clapped according to the defect inspection of the second embodiment with filming apparatus 20A and defect inspection
Method is taken the photograph, the second shooting area R2 light is exposed to due to that can be adjusted using attentuating filter (brightness regulation mechanism) 26
Brightness value, thus, for example the light by exporting larger brightness value from light source (light irradiating means) 21, can be used for direction
Carry out cross-polarization transmission and check that the brightness value for the light for using the first shooting area R1 irradiations for shooting series is larger, on the other hand,
Attentuating filter (brightness regulation mechanism) 26 can be utilized to make towards for carrying out regular transmission inspection shoots series second
The brightness value of the light of shooting area R2 irradiations is smaller.As described above, area is shot second even if attentuating filter 26 is configured
Between domain R2 and area sensor 22, regulation passes through the brightness value of the light after the second shooting area R2, can also expect same
Effect.
Hereinafter, the checking of the effect above is carried out.Shown in Figure 21 (a) in cross-polarization transmission beam method and regular transmission
The detection image of various defects (black foreign matter, weaker bright spot, stronger bright spot) in method during change light-source brightness.In addition,
The flaw indication pictorialization of detection image that the cross-polarization transmission beam method of (a) based on Figure 21 is obtained is shown in Figure 21 (b)
Figure, the flaw indication chart of detection image that the regular transmission method of (a) based on Figure 21 is obtained is shown in Figure 21 (c)
The figure of change.It should be noted that light-source brightness is shown as light-source brightness (regular transmission during using the brightness value on image as 128
In optimal light quantity) on the basis of 1 times~40 times.
According to Figure 21 (a) and Figure 21 (c), in regular transmission method, light-source brightness is preferably 1 times or so, if by light
Source light quantity is set to more than 2 times, then the brightness on image is too high, and image integrally bleaches.On the other hand, according to Figure 21 (a) and
Figure 21 (b) is understood, in cross-polarization transmission beam method, in the case where light-source brightness is 1 times or so, the brightness on picture
Low, it is impossible to recognize defect, light-source brightness is preferably more than 20 times, more preferably more than 40 times.
In above-mentioned checking, the brightness on image is adjusted by adjusting the light quantity of the light source irradiated to shooting area
Value, but as brightness adjusting method, same effect can also be realized by using the method for attentuating filter as described above
Really.
[the 3rd embodiment]
Defect inspecting system and defect detecting method involved by 3rd embodiment of the present utility model are in progress
The defect inspecting system 10 and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.
The difference of defect inspecting system 10B and first embodiment involved by 3rd embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Fig. 2, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20B.In addition, the defect inspection shown in Fig. 5 is existed with filming apparatus 20B and first embodiment difference
In in the defect inspection shown in Fig. 3 with filming apparatus 20, possessing light source 21A instead of light source 21.
Light source 21A, which has, individually to be adjusted to the brightness value of the first shooting area R1 light irradiated and to the second shooting area
The brightness control function of the brightness value of the light of R2 irradiations.Thereby, it is possible to the brightness value for the light for making to expose to the first shooting area R1
It is larger, make the brightness value for exposing to the second shooting area R2 light smaller.
Next, using the defect detecting method involved by the 3rd embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, individually being adjusted to using light source 21A
The brightness value and the brightness value to the second shooting area R2 light irradiated of the light of one shooting area R1 irradiations.Thereby, it is possible to make photograph
The brightness value for being incident upon the first shooting area R1 light is larger, makes the brightness value for exposing to the second shooting area R2 light smaller (bright
Degree regulation process).
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Examined according to the defect inspection filming apparatus 20B, defect inspection image pickup method, defect of the 3rd embodiment
System 10B and defect detecting method are looked into, the defect inspection filming apparatus 20 with first embodiment is also resulted in, lacks
Fall into inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
In addition, according to the defect inspection of the 3rd embodiment filming apparatus 20B and defect inspection shooting side
Method, due to can individually be adjusted using light source 21A to the brightness value of the first shooting area R1 light irradiated and shoot area to second
The brightness value of the light of domain R2 irradiations, therefore, it is possible to make to shoot the first of series towards for carrying out cross-polarization transmission inspection
The brightness value of the light of shooting area R1 irradiations is larger, on the other hand, can make to shoot system towards for carrying out regular transmission inspection
The brightness value of the light of the second shooting area R2 irradiations of row is smaller.
[the 4th embodiment]
Defect inspecting system and defect detecting method involved by 4th embodiment of the present utility model are in progress
The defect inspecting system and defect of the defect inspection of the phase retardation film without polarization characteristic, the battery barrier film stated etc.
Inspection method.Defect inspecting system and defect detecting method involved by 4th embodiment can be applied to without inclined
The manufacture device and manufacture method of phase retardation film, the battery barrier film of characteristic of shaking etc..In the phase without polarization characteristic
In the manufacture device and manufacture method of poor film, battery barrier film etc., except the defect inspection illustrated in the 4th embodiment
The content looked into beyond system and defect detecting method is known, therefore omitted the description as described above.For with progress
The defect inspecting system of the defect inspection of phase retardation film without polarization characteristic, battery barrier film etc. and defect inspection
Method related other embodiment and variation, based on same viewpoint, are omitted to the phase difference without polarization characteristic
The manufacture device of film, battery barrier film etc. and the explanation of manufacture method.In the 4th embodiment, film 110 is that do not have
The film of polarization characteristic.
The difference of defect inspecting system 10C and first embodiment involved by 4th embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Fig. 2, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20C.In addition, the defect inspection shown in Fig. 6 is existed with filming apparatus 20C and first embodiment difference
In in the defect inspection shown in Fig. 3 with filming apparatus 20, instead of the first Polarization filter 231And possess a pair first polarizations
Wave filter 231、241。
First Polarization filter 231Configured in the same manner as first embodiment between light source 21 and film 110.Specifically
Say, the first Polarization filter 231Configuration is between light source 21 and shooting area R the first shooting area R1.In present embodiment
In, the first Polarization filter 231It is configured to, when from area sensor 22, carries the half of the shooting area R on the Y of direction
It is blocked.
On the other hand, the first Polarization filter 241Configuration is between film 110 and area sensor 22.Specifically,
One Polarization filter 241Configuration is between shooting area R the first shooting area R1 and area sensor 22.In this embodiment party
In formula, the first Polarization filter 241It is configured to, when from area sensor 22, carries one of the shooting area R on the Y of direction
Partly it is blocked.
In addition, the first Polarization filter 231With the first Polarization filter 241Form orthogonal polarization state.Thereby, it is possible to
First shooting area R1 shoots cross-polarization transmission inspection image, and regular transmission inspection figure is shot in the second shooting area R2
Picture, transmission scattering inspection image is shot in middle shooting area R0.
Next, using the defect detecting method involved by the 4th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231Configuration is between light source 21 and the first shooting area R1 of film 110, by the
One Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.Now, by the first polarization
Wave filter 231And first Polarization filter 241It is configured to form orthogonal polarization state (the first Polarization filter arrangement step).
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Defect inspection filming apparatus 20C and defect inspection shooting side according to involved by the 4th embodiment
Method, due to a pair of first Polarization filters 231、241Light source (light irradiation is arranged respectively in the way of forming orthogonal polarization state
Mechanism) 21 and first between shooting area R1 and between the first shooting area R1 and area sensor (photographic unit) 22,
Area sensor (photographic unit) 22 will include the first shooting area R1, the second shooting area R2 and middle shooting area R0
Shooting area R be shot for two dimensional image, therefore, it is possible to simultaneously shoot the first shooting area R1 cross-polarization transmission check use
Image, the second shooting area R2 regular transmission inspection scatter inspection image with the transmission of image, middle shooting area R0.That is,
Cross-polarization transmission inspection can be integrated and shoot serial, regular transmission inspection shooting series and transmission scattering inspection bat
Take the photograph series.
As a result, according to the defect inspecting system 10C and defect detecting method of the 4th embodiment, can integrate
Cross-polarization transmission checks that series, regular transmission check that series and transmission scattering check series.
Therefore, according to the defect inspection filming apparatus 20C, defect inspection image pickup method, defect of the 4th embodiment
Inspection system 10C and defect detecting method, can cut down the serial number of inspection.
[the 5th embodiment]
Defect inspecting system and defect detecting method involved by 5th embodiment of the present utility model are in progress
The defect inspecting system and defect of the defect inspection of the phase retardation film without polarization characteristic, the battery barrier film stated etc.
Inspection method.In the 5th embodiment, film 110 is the film without polarization characteristic.
The difference of defect inspecting system 10D and the 4th embodiment involved by 5th embodiment of the present utility model
Part is in the defect inspecting system 10C shown in Fig. 2, possess defect inspection instead of defect inspection filming apparatus 20C
Look into and use filming apparatus 20D.In addition, defect inspection filming apparatus 20D and the difference of the 4th embodiment shown in Fig. 7
It is, in the defect inspection shown in Fig. 6 with being also equipped with attentuating filter (brightness regulation mechanism) 26 in filming apparatus 20C.
Attentuating filter 26 is configured between the shooting area R2 of light source 21 and second.Thus, attentuating filter 26 can drop
The brightness value of the low light for exposing to the second shooting area R2.Attentuating filter 26 can also configure the second shooting area R2 with
Between area sensor (photographic unit) 22, brightness of the reduction through the second shooting area R2 light.
Next, using the defect detecting method involved by the 5th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, attentuating filter 26 is configured in light
Between the shooting area R2 of source 21 and second.Thereby, it is possible to reduce the brightness value (brightness for the light for exposing to the second shooting area R2
Adjust process).Attentuating filter 26 can also configure the second shooting area R2 and area sensor (photographic unit) 22 it
Between, brightness of the reduction through the second shooting area R2 light.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Examined according to the defect inspection filming apparatus 20D, defect inspection image pickup method, defect of the 5th embodiment
Look into system 10D and defect detecting method, also result in the defect inspection filming apparatus 20C of the 4th embodiment,
Defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
In addition, according to the defect inspection of the 5th embodiment filming apparatus 20D and defect inspection shooting side
Method, due to the brightness for the light for exposing to the second shooting area R2 can be adjusted using attentuating filter (brightness regulation mechanism) 26
Value, thus, for example the light by exporting larger brightness value from light source (light irradiating means) 21, can make towards for carrying out
Cross-polarization transmission checks that the brightness value of the light with the first shooting area R1 irradiations for shooting series is larger, on the other hand, can
Made using attentuating filter (brightness regulation mechanism) 26 towards the second shooting for being used to carry out regular transmission inspection shooting series
The brightness value of the light of region R2 irradiations is smaller.Even if in addition, attentuating filter 26 is configured in the second shooting area R2 and region
Between sensor (photographic unit) 22, regulation passes through the brightness value of the light after the second shooting area R2, can also realize same
Effect.
[the 6th embodiment]
Defect inspecting system and defect detecting method involved by 6th embodiment of the present utility model are in progress
The defect inspecting system and defect of the defect inspection of the phase retardation film without polarization characteristic, the battery barrier film stated etc.
Inspection method.In the 6th embodiment, film 110 is the film without polarization characteristic.
The difference of defect inspecting system 10E and the 4th embodiment involved by 6th embodiment of the present utility model
Part is in the defect inspecting system 10C shown in Fig. 2, possess defect inspection instead of defect inspection filming apparatus 20C
Look into and use filming apparatus 20E.In addition, defect inspection filming apparatus 20E and the difference of the 4th embodiment shown in Fig. 8
It is, in the defect inspection shown in Fig. 6 with filming apparatus 20C, possess light source 21A instead of light source 21.
Light source 21A, which has, individually to be adjusted to the brightness value of the first shooting area R1 light irradiated and to the second shooting area
The brightness control function of the brightness value of the light of R2 irradiations.Thereby, it is possible to the brightness value for the light for making to expose to the first shooting area R1
It is larger, make the brightness value for exposing to the second shooting area R2 light smaller.
Next, using the defect detecting method involved by the 6th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, individually being adjusted to using light source 21A
The brightness value and the brightness value to the second shooting area R2 light irradiated of the light of one shooting area R1 irradiations.Thereby, it is possible to make photograph
The brightness value for being incident upon the first shooting area R1 light is larger, makes the brightness value for exposing to the second shooting area R2 light smaller (bright
Degree regulation process).
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Examined according to the defect inspection filming apparatus 20E, defect inspection image pickup method, defect of the 6th embodiment
Look into system 10E and defect detecting method, also result in the defect inspection filming apparatus 20C of the 4th embodiment,
Defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
In addition, according to the defect inspection of the 6th embodiment filming apparatus 20E and defect inspection shooting side
Method, due to can individually be adjusted using light source 21A to the brightness value of the first shooting area R1 light irradiated and shoot area to second
The brightness value of the light of domain R2 irradiations, therefore, it is possible to make to shoot the first of series towards for carrying out cross-polarization transmission inspection
The brightness value of the light of shooting area R1 irradiations is larger, on the other hand, can make to shoot system towards for carrying out regular transmission inspection
The brightness value of the light of the second shooting area R2 irradiations of row is smaller.
It should be noted that the utility model is not limited to above-mentioned present embodiment, various modifications can be carried out.For example,
In first, second and the 3rd in embodiment, exemplified with make use of the defect inspection filming apparatus 20 of transmission beam method, 20A,
20B and defect inspection image pickup method, but feature of the present utility model can also apply to such as Fig. 9, Figure 10 and Figure 11 institute
Show and make use of the defect inspection of bounce technique like that with filming apparatus 20,20A, 20B and defect inspection image pickup method.
Defect inspection filming apparatus 20,20A, 20B and defect inspection according to Fig. 9, Figure 10 and Figure 11 are used
Image pickup method, due to the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light source (illumination
Penetrate mechanism) 21 and first between shooting area R1, area sensor (photographic unit) 22 will include the first shooting area R1, the
Two shooting area R2 and middle shooting area R0 shooting area R are shot for two dimensional image, therefore, it is possible to shoot the simultaneously
One shooting area R1 cross-polarization reflex image, the second shooting area R2 normal reflection inspection image, Yi Jizhong
Between shooting area R0 specular scattering inspection image.That is, cross-polarization reflex can be integrated and shoot serial, positive and negative
Penetrate inspection and shoot series and specular scattering inspection shooting series.As a result, defect inspecting system 10,10A,
In 10B and defect detecting method, cross-polarization reflex series, normal reflection can be integrated and check series and reflection
Scattering checks series, and serial number is checked so as to cut down.
However, in cross-polarization reflex with shooting series and normal reflection inspection with shooting series, appropriate light
Brightness value is different.More specifically, cross-polarization reflex is larger with the brightness value for the appropriate light for shooting series, positive and negative
The brightness value for penetrating the appropriate light that inspection shoots series is smaller.
On this point, the defect inspection according to Figure 10 and Figure 11 is examined with filming apparatus 20A, 20B and defect
Look into and use image pickup method, due to attentuating filter (brightness regulation mechanism) 26 and light source (brightness regulation mechanism) 21A can be utilized
Regulation exposes to the brightness value of the second shooting area R2 light, thus, for example by from light source (light irradiating means) 21 and light
Source (light irradiating means) 21A exports the light of larger brightness value, can make towards for carrying out the bat of cross-polarization reflex
The brightness value for taking the photograph the light of the first shooting area R1 irradiations of series is larger, on the other hand, can utilize attentuating filter (brightness
Governor motion) 26 and light source (brightness regulation mechanism) 21A makes to shoot serial second towards being used to carrying out normal reflection inspection
The brightness value of the light of shooting area R2 irradiations is smaller.In the case of using attentuating filter (brightness regulation mechanism) 26 (for example
The mode illustrated in Figure 10), attentuating filter 26 can also be configured and (be shot in the second shooting area R2 and area sensor
Mechanism) between 22, the brightness value of reflected light is adjusted in the second shooting area R2.
Similarly, in the four, the 5th and the 6th embodiment, clapped exemplified with using the defect inspection of transmission beam method
Device 20C, 20D, 20E and defect inspection image pickup method are taken the photograph, but feature of the present utility model can also apply to such as figure
12nd, Figure 13 and as shown in Figure 14 utilize bounce technique defect inspection filming apparatus 20C, 20D, 20E and defect inspection
Use image pickup method.
Defect inspection filming apparatus 20C, 20D, 20E and defect inspection according to Figure 12, Figure 13 and Figure 14
With image pickup method, due to a pair of first Polarization filters 231、241Light is arranged respectively in the way of forming orthogonal polarization state
Between the shooting area R1 of source (light irradiating means) 21 and first and the first shooting area R1 and area sensor (camera
Structure) between 22, area sensor (photographic unit) 22 will include the first shooting area R1, the second shooting area R2 and centre
Shooting area R0 shooting area R is shot for two dimensional image, therefore, it is possible to shoot the first shooting area R1 cross-polarization simultaneously
Reflex image, the second shooting area R2 normal reflection inspection image, middle shooting area R0 specular scattering inspection
Use image.That is, cross-polarization reflex can be integrated and shoot series, normal reflection inspection and shoot series and reflect and dissipated
Penetrate inspection and shoot series.As a result, in defect inspecting system 10C, 10D, 10E and defect detecting method, can
Integrate cross-polarization reflex series, normal reflection and check that series and specular scattering check series, so as to cut down inspection
Look into serial number.
In addition, the defect inspection according to Figure 13 and Figure 14 is clapped with filming apparatus 20D, 20E and defect inspection
Method is taken the photograph, can be exposed to using attentuating filter (brightness regulation mechanism) 26 and light source (brightness regulation mechanism) 21A regulations
The brightness value of second shooting area R2 light, thus, for example by from light source (light irradiating means) 21 and light source (light irradiation
Mechanism) 21A exports the light of larger brightness value, can make to shoot serial towards being used to carrying out cross-polarization reflex
The brightness value of the light of first shooting area R1 irradiations is larger, on the other hand, can utilize attentuating filter (brightness regulation mechanism)
26 and light source (brightness regulation mechanism) 21A makes towards the second shooting area for being used to carry out normal reflection inspection shooting series
The brightness value of the light of R2 irradiations is smaller.(such as example in Figure 13 in the case of using attentuating filter (brightness regulation mechanism) 26
The mode shown), attentuating filter 26 can also be configured in the second shooting area R2 and area sensor (photographic unit) 22
Between, the brightness value of reflected light is adjusted in the second shooting area R2.
In addition, in first, second and the 3rd in embodiment and mode shown in Fig. 9, Figure 10 and Figure 11, example
The first Polarization filter 23 is shown1It is arranged on the side between light source (light irradiating means) 21 and the first shooting area R1 of film 110
Formula, but it is also possible to using such as Figure 15, Figure 16, Figure 17, Figure 18, Figure 19 and as shown in Figure 20 the first Polarization filter 231Match somebody with somebody
Put the mode between the first shooting area R1 and area sensor (photographic unit) 22 of film 110.
[the 7th embodiment]
Defect inspecting system and defect detecting method involved by 7th embodiment of the present utility model are in progress
The defect inspecting system 10 and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.Figure 22 is to show
The figure of defect inspecting system and defect detecting method involved by 7th embodiment of the present utility model, Figure 23 is to show
Defect inspection filming apparatus and defect inspection image pickup method involved by 7th embodiment of the present utility model
Figure.
Defect inspecting system 10 shown in Figure 22 possesses defect inspection filming apparatus 20, graphical analysis portion (test section)
30 and labelling apparatus 40, the defect inspection filming apparatus 20 shown in Figure 23 possesses light source (light irradiating means) 21, Duo Gequ
The Polarization filter 23 of zone sensors (photographic unit) 22, first1And the first brightness regulation Polarization filter (brightness regulation
Mechanism) 251.XYZ orthogonal coordinates are shown in Figure 22 and Figure 23, X-direction represents the width of polarizing coating, Y directions
Represent the carrying direction of polarizing coating.
In the present embodiment, the transport roller 106 and stock roll 103 mainly shown in Fig. 1 are sent out as carrying mechanism
Wave function.Using these carrying mechanisms, along carrying direction Y relative to light source 21, the polarization filtering of area sensor 22 and first
Device 231Relatively carry film 110.
Light source 21 is arranged on the interarea side of the opposing party of film 110, to the shooting area R irradiation lights of film 110.For example, light source
21 be the light source of the wire of X extensions in the width direction.
Area sensor 22 is configured in the interarea side of a side of film 110, and X is arranged in the width direction.Area sensor 22 is wrapped
Include CCD (Charge Coupled Device) or CMOS (Complementary Metal-Oxide
Semiconductor) 22a and lens 22b.Area sensor 22 by receive through film 110 light and continuously in time
The shooting area R of film 110 is shot for two dimensional image.
It is preferred that the carrying direction Y of two dimensional image captured by each area sensor 22 length is, from each region sensing
Device 22 obtain at least 2 times of the transport distance that two dimensional image is handled upside down to film 110 during the next two dimensional image of acquisition with
On.In other words, it is preferable that being shot more than 2 times to the same area of film 110.So, by making the carrying direction Y of two dimensional image
Length obtained than image during transport distance it is big, increase same a part of shooting number of times of film 110, so as to high-precision
Degree ground checks defect.
Here, shooting area R, which is included in, carries the shootings of the first shooting area R1 being divided out on the Y of direction and second
Region R2.In addition, shooting area R includes the middle shooting area R0 between the first shooting area R1 and the second shooting area R2.
First Polarization filter 231Configuration is between light source 21 and film 110.Specifically, the first Polarization filter 231Match somebody with somebody
Put between light source 21 and shooting area R the first shooting area R1.In the present embodiment, the first Polarization filter 231Match somebody with somebody
It is set to, when from area sensor 22, the half for carrying the shooting area R on the Y of direction is blocked.In addition, the first polarization filter
Ripple device 231With the formation orthogonal polarization state of film 110.Here, orthogonal polarization state refers to the polarization axle of Polarization filter (partially
Shake absorption axiss) with the polarization axle (polarization absorption axle) of film substantially orthogonal state, i.e. the polarization axle and film of Polarization filter
Polarization axle with the state of substantial 90 degree of angular cross.Above-mentioned " substantial 90 degree " refer to such as more than 85 degree and small
In 95 degree, more preferably 90 degree.
First Polarization filter 231With the formation orthogonal polarization state of film 110, the first Polarization filter 231Can also
Configuration is between the first shooting area R1 and area sensor 22.
First brightness regulation Polarization filter 251To form the first nonopiate polarization (half crossed with film 110
Nicol) mode of state is configured in the Polarization filter 23 of light source 21 and first1Between and the shooting area of light source 21 and second
Between R2.Here, nonopiate polarization state refers to the polarization axle (polarization absorption axle) of Polarization filter and the polarization axle of film
(polarization absorption axle) substantially it is orthogonal but intersect state, i.e. the polarization axle of Polarization filter and the polarization axle of film are with reality
The state of angular cross in matter beyond 90 degree.Polarization axle (the polarization absorption of Polarization filter under nonopiate polarization state
Axle) with the angle of the polarization axle (polarization absorption axle) of film according to the reference object of photographic unit it is the transmissivity of film and from light
Brightness value of the light of source outgoing etc. and it is different, e.g. utilize defined area of the area sensor 22 through shooting area R
The angle that the brightness value on image when domain (being the second shooting area R2 in Figure 23 example) is shot is less than 200, preferably
The angle for being less than 130 for the brightness value on image.For example it is aftermentioned such, the first brightness regulation Polarization filter 251It is inclined
The intersecting angle of polarization axle of axle and film 110 of shaking is 75 degree less than 85 degree or is more than 95 degree and less than 105 degree.
Thus, the first brightness regulation Polarization filter 251The brightness value for the light for exposing to the second shooting area R2 can be reduced.
In this specification, " brightness value " is the value that each pixel on 8 gray level images has.
In addition, the first brightness regulation Polarization filter 251Can only configure the shooting area R2 of light source 21 and second it
Between, the brightness of irradiated light is adjusted, can also be configured between film 110 and area sensor 22, regulation is shot through second
The brightness of region R2 light.
Thereby, it is possible to shoot cross-polarization transmission inspection image in the first shooting area R1, in the second shooting area R2
Nonopiate polarization (the first nonopiate polarization) transmission inspection image is shot, transmission scattering inspection is shot in middle shooting area R0
Look into and use image.
Graphical analysis portion 30 defect present in film 110 is detected according to the two dimensional image from area sensor 22.Separately
Outside, graphical analysis portion 30 is according to the pixel coordinate of two dimensional image and film is handled upside down during image taking distance, by two dimension
Coordinate position on image is converted to the coordinate position on film 110, generates defective locations information.Graphical analysis portion 30 is according to scarce
Fall into positional information and synthesize the image corresponding with the whole region of film 110, make defect mapping graph.
Labelling apparatus 40 is marked according to the defect mapping graph from graphical analysis portion 30 on film.
Next, using the defect detecting method involved by the 7th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light source 21
Between the first shooting area R1 of film 110 (the first Polarization filter arrangement step).Can also be by the first Polarization filter
231Configuration is between the first shooting area R1 and area sensor 22.Next, by the first brightness regulation Polarization filter
251By with being configured in the way of the first nonopiate polarization state of formation of film 110 in the Polarization filter 23 of light source 21 and first1Between,
And between the shooting area R2 of light source 21 and second.Thereby, it is possible to reduce the brightness for the light for exposing to the second shooting area R2
It is worth (brightness regulation process).Can be by the first brightness regulation Polarization filter 251Only configure and shoot area in light source 21 and second
Between the R2 of domain, it can also configure between film 110 and area sensor 22.
Next, using carrying mechanism, relative to light source 21, the Polarization filter 23 of area sensor 22 and first1Phase
Over the ground along carry direction Y carry film 110 (transportation process), using shooting area R irradiation light (light irradiations from light source 21 to film 110
Process), the shooting area R of film 110 is shot for two dimensional image (shooting process) using area sensor 22.
Next, using graphical analysis portion 30, being detected according to the two dimensional image from area sensor 22 in film 110
The defect of presence, and defect mapping graph (defects detection process) is made according to defective locations information.Next, utilizing mark
Device 40, is marked (marking procedures) according to the defect mapping graph from graphical analysis portion 30 on film 110.
Defect inspection filming apparatus 20 and defect inspection shooting side according to involved by the first embodiment
Method, due to the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light source (light irradiation machine
Structure) 21 and first between shooting area R1, area sensor (photographic unit) 22 will include the first shooting area R1, second count
The shooting area R for taking the photograph region R2 and middle shooting area R0 is shot for two dimensional image, is shot therefore, it is possible to shoot first simultaneously
Region R1 cross-polarization transmission inspection image, the second shooting area R2 nonopiate polarization (the first nonopiate polarization) are thoroughly
Penetrate inspection and scatter inspection image with image and middle shooting area R0 transmission.That is, cross-polarization transmission can be integrated
With shooting, serial, nonopiate polarization transmission inspection shooting is serial and transmission scattering checks and uses shooting series for inspection.
As a result, according to the defect inspecting system 10 and defect detecting method of the 7th embodiment, can integrate just
Polarization transmission is handed over to check that serial, nonopiate polarization transmission checks that series and transmission scattering check series.
Therefore, according to the defect inspection filming apparatus 20, defect inspection image pickup method, defect of the 7th embodiment
Inspection system 10 and defect detecting method, can cut down the serial number of inspection.
According to the defect inspection of the 7th embodiment filming apparatus 20 and defect inspection image pickup method, Neng Gouli
With the first brightness regulation Polarization filter (brightness regulation mechanism) 251Regulation exposes to the bright of the second shooting area R2 light
Angle value.Thus, for example the light by exporting larger brightness value from light source (light irradiating means) 21, can make towards be used for into
Row cross-polarization transmission checks that the brightness value of the light with the first shooting area R1 irradiations for shooting series is larger, on the other hand, energy
Enough utilize the first brightness regulation Polarization filter (brightness regulation mechanism) 251Make towards being used to carry out nonopiate polarization (the
One nonopiate polarization) transmission check with shoot series the second shooting area R2 irradiation light brightness value it is smaller.
However, present inventors have found, regular transmission method is suitable to the detection of black foreign matter, and cross-polarization transmission beam method is fitted
In the detection of bright spot, but cross-polarization transmission beam method is difficult to detection bright spot slightly weak compared with stronger bright spot.On this point,
Present inventors are found that the profit in black foreign matter that cross-polarization transmission beam method is difficult to detect, the detection of slightly weak bright spot
Use nonopiate transmission beam method.
On this point, shot according to the defect inspection of the 7th embodiment with filming apparatus 20 and defect inspection
Method, due to the first brightness regulation Polarization filter (brightness regulation mechanism) 251Formed with the second shooting area R2 of film 110
First nonopiate polarization state, therefore, it is possible to improve black foreign matter and the inspection of weaker bright spot (including above-mentioned slightly weak bright spot)
Survey.In this manual, below, weaker bright spot includes the concept of above-mentioned " slightly weak bright spot ".
Hereinafter, the checking of the effect above is carried out.Shown in Figure 45 (a) it is during 40 times of light-source brightness, change polarization filter
Ripple device relative to film intersecting angle when various defects (black foreign matter, weaker bright spot, stronger bright spot) detection image,
Shown the figure of the brightness value pictorialization of the detection image of Figure 45 (a) in Figure 45 (b).Similarly, at Figure 45 (c)
In show by it is during 20 times of light-source brightness, change Polarization filter relative to film intersecting angle when various defects it is (black different
Thing, weaker bright spot, stronger bright spot) detection image brightness value pictorialization figure, shown light in Figure 45 (d)
It is during 10 times of source light quantity, change Polarization filter relative to film intersecting angle when various defects it is (black foreign matter, weaker bright
Point, stronger bright spot) detection image brightness value pictorialization figure.It should be noted that for 40 times of light-source brightness, 20
Times, for 10 times, the light-source brightness (optimal light quantity in regular transmission) when using the brightness value on image being 128 is as 1 times
Show.
Understood according to Figure 45 (a), (b), in the case where light-source brightness is 40 times, for the defect of stronger bright spot
Detection, intersecting angle is essentially 90 degree, i.e. cross-polarization transmission beam method is suitable, for the detection of the defect of weaker bright spot,
Intersecting angle is 105 degree, i.e., nonopiate polarization transmission method is suitable.It should be noted that intersecting angle be less than 70 degree and
In the case of more than 110 degree, the brightness on image is too high, and image integrally bleaches.In addition, the inspection of the defect for black foreign matter
Survey, it is known that regular transmission method is suitable, but when Polarization filter is used as into brightness regulation in regular transmission method, it is known that hand over
Angle is pitched for 75 degree less than 85 degree or more than 95 degree and less than 105 degree, i.e., nonopiate polarization transmission method is suitable.
In addition, being understood according to Figure 45 (b), (c), (d), according to the difference of light-source brightness, for lacking for weaker bright spot
Optimal intersecting angle in sunken detection and the detection of the defect of black foreign matter, nonopiate polarization transmission method is different.
Accordingly, for the situation that Polarization filter is used as to brightness regulation in regular transmission method, that is, utilize nonopiate polarization
The situation of transmission beam method, the defect that flaw indication is uprised when to be conducive to intersecting angle be essentially beyond 90 degree, such as weaker is bright
The detection of point, black foreign matter.
In addition, the inspection under two intersecting angles can be considered, the power of defect rank is judged.For example, it is also possible to
Be essentially using intersecting angle 90 degree of cross-polarization transmission beam method and intersecting angle be 75 degree less than 85 degree,
Or in the case that more than 95 degree and less than 105 degree of nonopiate polarization transmission method this two side confirms flaw indication, in other words
In the case of confirming flaw indication in larger angular range, it is judged as that defect rank is strong, real only by intersecting angle
In the case that cross-polarization transmission beam method in matter for 90 degree confirms flaw indication, it is judged as that defect rank is weak.
In above-mentioned checking, by Polarization filter configuration between light source and shooting area, regulation exposes to shooting area
The brightness of the light in domain, but brightness tune is carried out to the light through shooting area by using the nonopiate transmission beam method of Polarization filter
Section, can also realize same effect.
[variation of the 7th embodiment]
In the 7th embodiment, exemplified with the defect for combining cross-polarization transmission beam method with nonopiate polarization transmission method
Inspection filming apparatus 20 and defect inspection image pickup method, but it is also possible to by cross-polarization transmission beam method and two or more not
Same nonopiate polarization transmission method combination.Hereinafter, as the variation of the 7th embodiment, illustrate cross-polarization transmission beam method
Defect inspection filming apparatus 20 and defect inspection shooting side that the nonopiate polarization transmission method different with two is combined
Method.
The defect inspection of variation shown in Figure 39 is with filming apparatus 20 and the difference of the 7th embodiment,
In the defect inspection shown in Figure 23 with being also equipped with the second brightness regulation Polarization filter (brightness regulation machine in filming apparatus 20
Structure) 252。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the second shooting area R2 is abutted.
Second brightness regulation Polarization filter (brightness regulation mechanism) 252With with the first brightness regulation polarization filtering
Device 251Mode adjacent and that the second nonopiate polarization state is formed with film 110, configuration takes the photograph region R3 in light source 21 and third shot
Between.Here, the second nonopiate polarization state is different from the first nonopiate polarization state.That is, under the second nonopiate polarization state
Polarization filter polarization axle and film polarization axle intersecting angle and the first nonopiate polarization state under Polarization filter
Polarization axle it is different from the intersecting angle of the polarization axle of film.Thus, the second brightness regulation Polarization filter 252It can reduce
Expose to the brightness value that third shot takes the photograph region R3 light.Second brightness regulation Polarization filter 252With the formation of film 110 second
Nonopiate polarization state, can also be taken the photograph between region R3 and area sensor 22 in third shot, and regulation is taken the photograph through third shot
The brightness value of region R3 light.
Next, being entered to the defect detecting method and defect inspection of the variation of the 7th embodiment with image pickup method
Row explanation.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, as described above, the first brightness is adjusted
Save Polarization filter 251Polarized by with being configured in the way of the first nonopiate polarization state of formation of film 110 in light source 21 and first
Wave filter 231Between and the shooting area R2 of light source 21 and second between.Next, by the second brightness regulation polarization filtering
Device 252Configured in the way of the second nonopiate polarization state of formation of film 110 between light source 21 and third shot take the photograph region R3.
Thereby, it is possible to reduce expose to the second shooting area R2 and third shot take the photograph region R3 light brightness value (brightness regulation work
Sequence).Can also be by the second brightness regulation Polarization filter 252Configuration third shot take the photograph region R3 and area sensor 22 it
Between.Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20 of the variation of the 7th embodiment, defect inspection image pickup method,
Defect inspecting system 10 and defect detecting method, also result in the defect inspection filming apparatus with the 7th embodiment
20th, defect inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[the 8th embodiment]
Defect inspecting system and defect detecting method involved by 8th embodiment of the present utility model are in progress
The defect inspecting system 10A and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.
The difference of defect inspecting system 10A and the 7th embodiment involved by 8th embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Figure 22, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20A.In addition, the defect inspection shown in Figure 24 is existed with filming apparatus 20A and the 7th embodiment difference
In in the defect inspection shown in Figure 23 with filming apparatus 20, instead of the first brightness regulation Polarization filter (brightness regulation
Mechanism) 251And possess attentuating filter (brightness regulation mechanism) 26.In addition, defect inspection is real with filming apparatus 20A and the 7th
The difference for applying mode is, in defect inspection with filming apparatus 20, the first Polarization filter 231Polarization axle it is relative
It is different in the intersecting angle of the polarization axle (polarization absorption axle) of film 110.
First Polarization filter 231With the first shooting area R1 the first nonopiate polarization states of formation of film 110.For example
It is aftermentioned such, the first Polarization filter 231Polarization axle and film 110 polarization axle intersecting angle for 75 degree less than
85 degree or more than 95 degree and less than 105 degree.In addition, the first Polarization filter 231With the first shooting area R1 shapes of film 110
Into the first nonopiate polarization state, the first Polarization filter 231It can also configure in the first shooting area R1 and region
Between sensor 22 (reference picture 35).
Attentuating filter 26 is configured between the shooting area R2 of light source 21 and second.Thus, attentuating filter 26 can drop
The brightness value of the low light for exposing to the second shooting area R2.In addition, attentuating filter 26 can also be configured in the second shooting area
Between R2 and area sensor 22, brightness value of the reduction through the second shooting area R2 light.
Next, using the defect detecting method involved by the 8th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231By with being configured in the way of the first nonopiate polarization state of formation of film 110
Between light source 21 and the first shooting area R1 of film 110 (the first Polarization filter arrangement step).First polarization can also be filtered
Ripple device 231Configuration is between the first shooting area R1 and area sensor 22.Next, attentuating filter 26 is configured in light
Between the shooting area R2 of source 21 and second.Thereby, it is possible to reduce the brightness value (brightness for the light for exposing to the second shooting area R2
Adjust process).Attentuating filter 26 can also be configured between the second shooting area R2 and area sensor 22.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Examined according to the defect inspection filming apparatus 20A, defect inspection image pickup method, defect of the 8th embodiment
Look into system 10A and defect detecting method, also result in the defect inspection filming apparatus 20 of the 7th embodiment, lack
Fall into inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[the first variation of the 8th embodiment]
In the 8th embodiment, used exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
Filming apparatus 20A and defect inspection image pickup method, but it is also possible to by the different nonopiate polarization transmission method of two or more with
Regular transmission method is combined.Hereinafter, as the first variation of the 8th embodiment, illustrate two different nonopiate polarizations are saturating
Defect inspection that method combines with regular transmission method is penetrated with filming apparatus 20A and defect inspection image pickup method.
Defect inspection the filming apparatus 20A and the difference of the 7th embodiment of the first variation shown in Figure 40
It is, in the defect inspection shown in Figure 24 with being also equipped with the second Polarization filter 23 in filming apparatus 20A2。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the first shooting area R1 is abutted.
Second Polarization filter 232With with the first Polarization filter 231Abut and form the second nonopiate polarization with film 110
The mode of state is configured between light source 21 and third shot take the photograph region R3.Here, the second nonopiate polarization state and the first anon-normal
Hand over polarization state different.That is, the polarization axle of Polarization filter and intersecting for the polarization axle of film under the second nonopiate polarization state
The polarization axle of angle and the Polarization filter under the first nonopiate polarization state is different from the intersecting angle of the polarization axle of film.The
Two Polarization filters 232It is configured to take the photograph region R3 the second nonopiate polarization states of formation with third shot, can also be relative
In the first Polarization filter 231Third shot is independently disposed to take the photograph between region R3 and area sensor 22.
Next, defect detecting method and defect inspection shooting side to the first variation of the 8th embodiment
Method is illustrated.
First, as described above, by the first Polarization filter 231To form the first nonopiate polarization state with film 110
Mode is configured between light source 21 and the first shooting area R1 of film 110 (the first Polarization filter arrangement step).Next,
By the second Polarization filter 232By with being configured in the way of the second nonopiate polarization state of formation of film 110 in light source 21 and film 110
Third shot take the photograph between the R3 of region (the second Polarization filter arrangement step).Can also be by the second Polarization filter 232Relative to
First Polarization filter 231Third shot is independently disposed to take the photograph between region R3 and area sensor 22.Next, on carrying out
Brightness regulation process, transportation process, light irradiation process, shooting process, defects detection process, the marking procedures stated.
Shot according to the defect inspection filming apparatus 20A of the first variation of the 8th embodiment, defect inspection
Method, defect inspecting system 10A and defect detecting method, also result in the defect inspection with the 7th embodiment and clap
Take the photograph device 20, defect inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[the second variation of the 8th embodiment]
In the 8th embodiment, used exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
Filming apparatus 20A and defect inspection image pickup method, but it is also possible to by the different nonopiate polarization transmission method group of two or more
Close.Hereinafter, as the second variation of the 8th embodiment, illustrate combine two different nonopiate polarization transmission methods
Defect inspection is with filming apparatus 20A and defect inspection image pickup method.
The defect inspection of second variation is with filming apparatus 20A and the difference of the 8th embodiment, in Figure 24
Shown defect inspection is adjusted with filming apparatus 20A, possessing the first brightness instead of attentuating filter (brightness regulation mechanism) 26
Save Polarization filter (brightness regulation mechanism) 251。
First brightness regulation Polarization filter (brightness regulation mechanism) 251To form the second nonopiate polarization with film 110
The mode of state is configured between the shooting area R2 of light source 21 and second.Here, the second nonopiate polarization state and the first anon-normal
Hand over polarization state different.That is, the polarization axle of Polarization filter and intersecting for the polarization axle of film under the second nonopiate polarization state
The polarization axle of angle and the Polarization filter under the first nonopiate polarization state is different from the intersecting angle of the polarization axle of film.By
This, the first brightness regulation Polarization filter 251The brightness value for the light for exposing to the second shooting area R2 can be reduced.
First brightness regulation Polarization filter 251With the second nonopiate polarization state of formation of film 110, first is bright
Spend regulation Polarization filter 251It can also configure between the second shooting area R2 and area sensor 22, regulation passes through the
The brightness value of two shooting area R2 light.
Next, defect detecting method and defect inspection shooting side to the second variation of the 8th embodiment
Method is illustrated.
First, as described above, by the first Polarization filter 231To form the first nonopiate polarization state with film 110
Mode is configured between light source 21 and the first shooting area R1 of film 110 (the first Polarization filter arrangement step).Next,
By the first brightness regulation Polarization filter 251In the way of with the second nonopiate polarization state of formation of film 110, configure in light
The Polarization filter 23 of source 21 and first1Between and the shooting area R2 of light source 21 and second between.Thereby, it is possible to reduce irradiation
To the brightness value (brightness regulation process) of the second shooting area R2 light.Can also be by the first brightness regulation Polarization filter
251Configuration is between the second shooting area R2 and area sensor 22, brightness of the regulation through the second shooting area R2 light
Value.Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Shot according to the defect inspection filming apparatus 20A of the second variation of the 8th embodiment, defect inspection
Method, defect inspecting system 10A and defect detecting method, also result in the defect inspection with the 7th embodiment and clap
Take the photograph device 20, defect inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[the 9th embodiment]
Defect inspecting system and defect detecting method involved by 9th embodiment of the present utility model are in progress
The defect inspecting system 10 and defect detecting method of the defect inspection for the film 110 with polarization characteristic stated.
The difference of defect inspecting system 10B and the 7th embodiment involved by 9th embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Figure 22, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20B.In addition, the defect inspection shown in Figure 25 is existed with filming apparatus 20B and the 7th embodiment difference
In in the defect inspection shown in Figure 23 with filming apparatus 20, instead of the brightness regulation Polarization filter of light source 21 and first
(brightness regulation mechanism) 251And possess light source 21A.In addition, defect inspection with filming apparatus 20B and the 7th embodiment not
It is with part, in defect inspection with filming apparatus 20, the first Polarization filter 231Polarization axle it is inclined relative to film 110
Shake axle (polarization absorption axle) intersecting angle it is different.
First Polarization filter 231With the first shooting area R1 the first nonopiate polarization states of formation of film 110.For example
It is aftermentioned such, the first Polarization filter 231Polarization axle and film 110 polarization axle intersecting angle for 75 degree less than
85 degree or more than 95 degree and less than 105 degree.First Polarization filter 231With the first shooting area R1 of film 110 formation the
One nonopiate polarization state, the first Polarization filter 231Can also configure light source 21A and the first shooting area R1 it
Between (reference picture 25), or configure between the first shooting area R1 and area sensor 22 (reference picture 36).
Light source 21A, which has, individually to be adjusted to the brightness value of the first shooting area R1 light irradiated and to the second shooting area
The brightness control function of the brightness value of the light of R2 irradiations.Thereby, it is possible to the brightness value for the light for making to expose to the first shooting area R1
It is larger, make the brightness value for exposing to the second shooting area R2 light smaller.
Next, using the defect detecting method involved by the 9th embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231By with being configured in the way of the first nonopiate polarization state of formation of film 110
Between light source 21 and the first shooting area R1 of film 110 (the first Polarization filter arrangement step).First polarization can also be filtered
Ripple device 231Configuration is between the first shooting area R1 and area sensor 22.Next, individually being adjusted to using light source 21A
The brightness value and the brightness value to the second shooting area R2 light irradiated of the light of one shooting area R1 irradiations.Thereby, it is possible to make photograph
The brightness value for being incident upon the first shooting area R1 light is larger, makes the brightness value for exposing to the second shooting area R2 light smaller (bright
Degree regulation process).
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Examined according to the defect inspection filming apparatus 20B, defect inspection image pickup method, defect of the 9th embodiment
Look into system 10B and defect detecting method, also result in the defect inspection filming apparatus 20 of the 7th embodiment, lack
Fall into inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[variation of the 9th embodiment]
In the 9th embodiment, used exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
Filming apparatus 20B and defect inspection image pickup method, but it is also possible to by the different nonopiate polarization transmission method of two or more with
Regular transmission method is combined.Hereinafter, as the variation of the 9th embodiment, illustrate two different nonopiate polarization transmission methods
The defect inspection combined with regular transmission method is with filming apparatus 20B and defect inspection image pickup method.
Defect inspection shown in Figure 41 is with filming apparatus 20B and the difference of the 7th embodiment, in Figure 25 institutes
The defect inspection shown is with being also equipped with the second Polarization filter 23 in filming apparatus 20B2。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the first shooting area R1 is abutted.
Second Polarization filter 232With with the first Polarization filter 231Abut and form the second nonopiate polarization with film 110
The mode of state is configured between light source 21 and third shot take the photograph region R3.Here, the second nonopiate polarization state and the first anon-normal
Hand over polarization state different.That is, the polarization axle of Polarization filter and intersecting for the polarization axle of film under the second nonopiate polarization state
The polarization axle of angle and the Polarization filter under the first nonopiate polarization state is different from the intersecting angle of the polarization axle of film.The
Two Polarization filters 232With the second nonopiate polarization state of formation of film 110, the second Polarization filter 232It can also configure
Taken the photograph in third shot between region R3 and area sensor 22.
Next, being entered to the defect detecting method and defect inspection of the variation of the 9th embodiment with image pickup method
Row explanation.
First, as described above, by the first Polarization filter 231To form the first nonopiate polarization state with film 110
Mode, is configured between light source 21 and the first shooting area R1 of film 110 (the first Polarization filter arrangement step).Next,
By the second Polarization filter 232In the way of with the second nonopiate polarization state of formation of film 110, configure in light source 21 and film 110
Third shot take the photograph between the R3 of region (the second Polarization filter arrangement step).Can also be by the second Polarization filter 232Configuration exists
Third shot is taken the photograph between region R3 and area sensor 22.Next, carrying out above-mentioned brightness regulation process, transportation process, illumination
Penetrate process, shoot process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20B of the variation of the 9th embodiment, defect inspection shooting side
Method, defect inspecting system 10B and defect detecting method, also result in the defect inspection with the 7th embodiment and shoot
Device 20, defect inspection image pickup method, defect inspecting system 10 and the same advantage of defect detecting method.
[the tenth embodiment]
Defect inspecting system and defect detecting method involved by tenth embodiment of the present utility model are in progress
The defect inspecting system and defect of the defect inspection of the phase retardation film without polarization characteristic, the battery barrier film stated etc.
Inspection method.Defect inspecting system and defect detecting method involved by tenth embodiment can be applied to without inclined
The manufacture device and manufacture method of phase retardation film, the battery barrier film of characteristic of shaking etc..In the phase without polarization characteristic
In the manufacture device and manufacture method of poor film, battery barrier film etc., except the defect inspection illustrated in the tenth embodiment
The content looked into beyond system and defect detecting method is known, therefore omitted the description as described above.For with progress
The defect inspecting system of the defect inspection of phase retardation film without polarization characteristic, battery barrier film etc. and defect inspection
Method related other embodiment and variation, based on same viewpoint, are omitted on the phase without polarization characteristic
The manufacture device of poor film, battery barrier film etc. and the explanation of manufacture method.In saying for the tenth embodiment and its variation
In bright, film 110 is the film without polarization characteristic.
The difference of defect inspecting system 10C and the 7th embodiment involved by tenth embodiment of the present utility model
Part is in the defect inspecting system 10 shown in Figure 22, possess defect inspection instead of defect inspection filming apparatus 20
Use filming apparatus 20C.In addition, defect inspection filming apparatus 20C and the even difference of the 7th embodiment shown in Figure 26
It is, in the defect inspection shown in Figure 23 with filming apparatus 20, instead of the first Polarization filter 231And possess a pair first
Polarization filter 231、241, in the first brightness regulation Polarization filter 251On the basis of be also equipped with and the first brightness regulation
With Polarization filter 251Paired the first brightness regulation Polarization filter 253。
First Polarization filter 231Configured in the same manner as the 7th embodiment between light source 21 and film 110.Specifically
Say, the first Polarization filter 231Configuration is between light source 21 and shooting area R the first shooting area R1.In present embodiment
In, the first Polarization filter 231It is configured to, when from area sensor 22, carries the half of the shooting area R on the Y of direction
It is blocked.
On the other hand, the first Polarization filter 241Configuration is between film 110 and area sensor 22.Specifically,
One Polarization filter 241Configuration is between shooting area R the first shooting area R1 and area sensor 22.In this embodiment party
In formula, the first Polarization filter 241It is configured to, when from area sensor 22, carries one of the shooting area R on the Y of direction
Partly it is blocked.
In addition, a pair of first brightness regulation Polarization filters 251、253In the first brightness regulation Polarization filter
251Configured in the same manner as the 7th embodiment between light source 21 and film 110.On the other hand, the first brightness regulation is filtered with polarization
Ripple device 253Configuration is between film 110 and area sensor 22.Specifically, the first brightness regulation Polarization filter 253Configuration
Between shooting area R the second shooting area R2 and area sensor 22.In the tenth embodiment, the first brightness regulation
With Polarization filter 253It is configured to, when from area sensor 22, the half for carrying the shooting area R on the Y of direction (is being schemed
It is the part of the second shooting area R2 sides in 26 example) it is blocked.
In addition, the first Polarization filter 231With the first Polarization filter 241Form orthogonal polarization state.On the other hand,
One brightness regulation Polarization filter 251With the first brightness regulation Polarization filter 253Form the first nonopiate polarization state.
For example, the first brightness regulation Polarization filter 251Polarization axle and the first brightness regulation Polarization filter 253Polarization axle
Intersecting angle for 75 degree less than 85 degree or more than 95 degree and less than 105 degree.Thereby, it is possible to shoot area first
Domain R1 shoots cross-polarization transmission inspection image, and nonopiate polarization transmission inspection image is shot in the second shooting area R2,
Transmission scattering inspection image is shot in middle shooting area R0.
Next, using the defect detecting method involved by the tenth embodiment of the present utility model and defect inspection
Image pickup method is illustrated.
First, by the first Polarization filter 231Configuration is between light source 21 and the first shooting area R1 of film 110, by the
One Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.Now, by the first polarization
Wave filter 231And first Polarization filter 241It is configured to form orthogonal polarization state (the first Polarization filter arrangement step).
Next, by the first brightness regulation Polarization filter 251Configuration is in the Polarization filter 23 of light source 21 and first1It
Between and the shooting area R2 of light source 21 and second between, by the first brightness regulation Polarization filter 253Configuration is in film 110
Between second shooting area R2 and area sensor 22.Now, the first brightness regulation Polarization filter 251With the first brightness
Regulation Polarization filter 253It is configured to form the first nonopiate polarization state.The second shooting area is passed through thereby, it is possible to reduce
The brightness value (brightness regulation process) for the light that domain R2 is observed by area sensor 22.Can also be by the first brightness regulation with partially
Polarization filter 251Only configure between the shooting area R2 of light source 21 and second.
Alternatively, it is also possible to replace the first brightness regulation Polarization filter 253And make the first Polarization filter 241Extend to
Second shooting area R2, in this case, by the first brightness regulation Polarization filter 251It is configured to and the first polarization filtering
Device 241Form the first nonopiate polarization state.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
Defect inspection filming apparatus 20C and defect inspection shooting side according to involved by the tenth embodiment
Method, due to a pair of first Polarization filters 231、241Light source (light irradiation is arranged respectively in the way of forming orthogonal polarization state
Mechanism) 21 and first between shooting area R1 and between the first shooting area R1 and area sensor (photographic unit) 22,
Area sensor (photographic unit) 22 will include the first shooting area R1, the second shooting area R2 and middle shooting area R0
Shooting area R be shot for two dimensional image, therefore, it is possible to simultaneously shoot the first shooting area R1 cross-polarization transmission check use
Image, the second shooting area R2 nonopiate polarization (the first nonopiate polarization) transmission inspection image, middle shooting area R0
Transmission scattering inspection image.That is, can integrate cross-polarization transmission inspections shooting it is serial, it is nonopiate polarize (first is non-
Cross-polarization) transmission inspection uses shooting serial and transmission scatters inspection shooting series.
As a result, according to the defect inspecting system 10C and defect detecting method of the tenth embodiment, can integrate
Cross-polarization transmission checks that serial, nonopiate polarization transmission checks that series and transmission scattering check series.
Therefore, according to the defect inspection filming apparatus 20C, defect inspection image pickup method, defect of the tenth embodiment
Inspection system 10C and defect detecting method, can cut down the serial number of inspection.
In addition, according to the defect inspection of the tenth embodiment filming apparatus 20C and defect inspection shooting side
Method, can utilize a pair of first brightness regulation Polarization filters (brightness regulation mechanism) 251、253, regulation is through the second shooting
The brightness value for the light that region R2 is observed by area sensor 22.Thus, for example by being exported from light source (light irradiating means) 21
The light of larger brightness value, can make towards the first shooting area for being used to carry out cross-polarization transmission inspection shooting series
The brightness value of the light of R1 irradiations is larger, on the other hand, can utilize a pair of first brightness regulation Polarization filters (brightness tune
Save mechanism) 251、253Make to pass through the second shooting area R2 for being used for carrying out nonopiate polarization transmission inspection shooting series by area
The brightness value for the light that zone sensors are observed is smaller.
In addition, according to the defect inspection of the tenth embodiment filming apparatus 20C and defect inspection image pickup method,
Due to a pair of first brightness regulations Polarization filter (brightness regulation mechanism) 251、 253The first nonopiate polarization state is formed,
Therefore, it is possible to improve the detection of black foreign matter and weaker bright spot.
[variation of the tenth embodiment]
In the tenth embodiment, exemplified with the defect for combining cross-polarization transmission beam method with nonopiate polarization transmission method
Inspection filming apparatus 20 and defect inspection image pickup method, but it is also possible to by cross-polarization transmission beam method and two or more not
Same nonopiate polarization transmission method combination.Hereinafter, as the variation of the tenth embodiment, illustrate cross-polarization transmission beam method
Defect inspection filming apparatus 20C and defect inspection shooting side that the nonopiate polarization transmission method different with two is combined
Method.
The defect inspection of variation shown in Figure 42 is with filming apparatus 20C and the difference of the 7th embodiment,
In the defect inspection shown in Figure 26 with filming apparatus 20C, being also equipped with a pair of second brightness regulation Polarization filter (brightness
Governor motion) 252、254。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the second shooting area R2 is abutted.
Second brightness regulation Polarization filter (brightness regulation mechanism) 252With with the first brightness regulation polarization filtering
Device 251Adjacent mode is configured between light source 21 and third shot take the photograph region R3, on the other hand, the second brightness regulation polarization
Wave filter 254With with the first brightness regulation Polarization filter 253Adjacent mode is configured takes the photograph region R3 and region in third shot
Between sensor 22.A pair of second brightness regulations Polarization filter (brightness regulation mechanism) 252、254It is configured to form second
Nonopiate polarization state.Here, a pair of second brightness regulations Polarization filter (brightness regulation mechanism) 252、 254Formed
Second nonopiate polarization state is different from the first nonopiate polarization state.That is, the polarization filtering under the second nonopiate polarization state
The intersecting angle of the polarization axle of the intersecting angle of the polarization axle of device and the Polarization filter under the first nonopiate polarization state is not
Together, thus, the second brightness regulation Polarization filter 252、254It can reduce and take the photograph region R3 by area sensor through third shot
The brightness value of 22 light observed.
Next, being entered to the defect detecting method and defect inspection of the variation of the tenth embodiment with image pickup method
Row explanation.
First, the first above-mentioned Polarization filter arrangement step is carried out.Next, the first brightness is adjusted as described above
Save Polarization filter 251Configuration is in the Polarization filter 23 of light source 21 and first1Between and the shooting area of light source 21 and second
Between R2, and by the first brightness regulation Polarization filter 253Configure and passed in the second shooting area R2 of film 110 with region
Between sensor 22.Now, the first brightness regulation Polarization filter 251、253It is configured to form the first nonopiate polarization state.
Next, by the second brightness regulation Polarization filter 252Configure between light source 21 and third shot take the photograph region R3, and will
Second brightness regulation Polarization filter 254The third shot configured in film 110 is taken the photograph between region R3 and area sensor 22.This
When, the second brightness regulation Polarization filter 252、254It is configured to form the second nonopiate polarization state.Thereby, it is possible to reduce
Brightness value (the brightness tune for the light that region R3 is observed by area sensor 22 is taken the photograph through the second shooting area R2 and third shot
Save process).Can also be by the first brightness regulation Polarization filter 251Only configure the shooting area R2 of light source 21 and second it
Between.
Alternatively, it is also possible to replace the first brightness regulation Polarization filter 253, make the first Polarization filter 241Extend to
Second shooting area R2, in this case, by the first brightness regulation Polarization filter 251It is configured to and the first polarization filtering
Device 241Form the first nonopiate polarization state.Or, the second brightness regulation Polarization filter 25 can also be replaced4, make
First brightness regulation Polarization filter 253Extend to third shot and take the photograph region R3, in this case, the second brightness regulation is used
Polarization filter 252It is configured to relative to the first brightness regulation Polarization filter 253Form the second nonopiate polarization state i.e.
Can.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20C of the variation of the tenth embodiment, defect inspection shooting side
Method, defect inspecting system 10C and defect detecting method, also result in the defect inspection with the tenth embodiment and shoot
Device 20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
[the 11st embodiment]
Defect inspecting system and defect detecting method involved by 11st embodiment of the present utility model are to carry out
The defect inspecting system of the defect inspection of the above-mentioned phase retardation film without polarization characteristic, battery barrier film etc. and lack
Fall into inspection method.In the explanation of the 11st embodiment and its variation, film 110 is the film without polarization characteristic.
Defect inspecting system 10D and the tenth embodiment involved by 11st embodiment of the present utility model are not
It is in the defect inspecting system 10C shown in Figure 22, possess defect instead of defect inspection filming apparatus 20C with part
Filming apparatus 20D is used in inspection.In addition, defect inspection shown in Figure 27 with filming apparatus 20D it is different from the tenth embodiment it
It is in in the defect inspection shown in Figure 26 with filming apparatus 20C, instead of the Polarization filter (brightness of the first brightness regulation
Governor motion) 251And possess attentuating filter (brightness regulation mechanism) 26.In addition, defect inspection filming apparatus 20D and
The difference of ten embodiments is, in defect inspection with filming apparatus 20C, a pair of first Polarization filters 231、241
Polarization axle (polarization absorption axle) intersecting angle it is different.
First Polarization filter 231With the first Polarization filter 241Form the first nonopiate polarization state.For example, first
Polarization filter 231Polarization axle and the first Polarization filter 241Polarization axle intersecting angle for 75 degree less than 85
Spend or more than 95 degree and less than 105 degree.
Attentuating filter 26 is configured between the shooting area R2 of light source 21 and second.Thus, attentuating filter 26 can drop
The brightness value of the low light for exposing to the second shooting area R2.
Next, to the defect detecting method involved by the 11st embodiment of the present utility model and defect inspection
Illustrated with image pickup method.
First, by the first Polarization filter 231Configuration is between light source 21 and the first shooting area R1 of film 110, by the
One Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.Now, by the first polarization
Wave filter 231And first Polarization filter 241It is configured to form first nonopiate polarization state (the first Polarization filter configuration
Process).Next, attentuating filter 26 is configured between the shooting area R2 of light source 21 and second.Thereby, it is possible to reduce photograph
It is incident upon the brightness value (brightness regulation process) of the second shooting area R2 light.Attentuating filter 26 can also be configured in film 110
The second shooting area R2 and area sensor 22 between, reduction through the second shooting area R2 light brightness value.
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20D, defect inspection image pickup method, defect of the 11st embodiment
Inspection system 10D and defect detecting method, also result in the defect inspection filming apparatus with the tenth embodiment
20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
[the first variation of the 11st embodiment]
In the 11st embodiment, exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
With filming apparatus 20D and defect inspection image pickup method, but it is also possible to by more than two different nonopiate polarization transmissions
Method is combined with regular transmission method.Hereinafter, as the first variation of the 11st embodiment, illustrate different nonopiate by two
The defect inspection that polarization transmission method is combined with regular transmission method is with filming apparatus 20D and defect inspection image pickup method.
The defect inspection of the first variation shown in Figure 43 with filming apparatus 20D it is different from the 11st embodiment it
It is in in the defect inspection shown in Figure 27 with being also equipped with a pair of second Polarization filters 23 in filming apparatus 20D2、242。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the first shooting area R1 is abutted.
Second Polarization filter 232With with the first Polarization filter 231Adjacent mode is configured in light source 21 and third shot
Take the photograph between the R3 of region, the second Polarization filter 242With with the first Polarization filter 241Adjacent mode is configured takes the photograph area in third shot
Between domain R3 and area sensor 22.A pair of second Polarization filters 232、242Form the second nonopiate polarization state.Here,
Second nonopiate polarization state is different from the first nonopiate polarization state.That is, the polarization filtering under the second nonopiate polarization state
The intersecting angle of the polarization axle of the intersecting angle of the polarization axle of device and the Polarization filter under the first nonopiate polarization state is not
Together.
Next, the defect detecting method and defect inspection to the first variation of the 11st embodiment are shot
Method is illustrated.
First, as described above, by the first Polarization filter 231Configure the first shooting area in light source 21 and film 110
Between R1, by the first Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.This
When, by the first Polarization filter 231And first Polarization filter 241It is configured to form the first nonopiate polarization state (first
Polarization filter arrangement step).Next, by the second Polarization filter 232The third shot configured in light source 21 and film 110 is taken the photograph
Between the R3 of region, by the second Polarization filter 242The third shot configured in film 110 is taken the photograph between region R3 and area sensor 22.
Now, by the second Polarization filter 232And second Polarization filter 242It is configured to form the second nonopiate polarization state (
Two Polarization filter arrangement steps).Next, carrying out above-mentioned brightness regulation process, transportation process, light irradiation process, shooting
Process, defects detection process, marking procedures.
Clapped according to the defect inspection filming apparatus 20D of the first variation of the 11st embodiment, defect inspection
Method, defect inspecting system 10D and defect detecting method are taken the photograph, the defect inspection with the tenth embodiment is also resulted in and uses
Filming apparatus 20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
[the second variation of the 11st embodiment]
In the 11st embodiment, exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
With filming apparatus 20D and defect inspection image pickup method, but it is also possible to by the different nonopiate polarization transmission method of two or more
Combination.Hereinafter, as the second variation of the 11st embodiment, illustrate two different nonopiate polarization transmission method groups
The defect inspection of conjunction is with filming apparatus 20D and defect inspection image pickup method.
The defect inspection of second variation is with filming apparatus 20D and the difference of the 11st embodiment, in figure
Defect inspection shown in 27 possesses a pair first with filming apparatus 20D instead of attentuating filter (brightness regulation mechanism) 26
Brightness regulation Polarization filter (brightness regulation mechanism) 251、253。
First brightness regulation Polarization filter (brightness regulation mechanism) 251Configuration is in the shooting area of light source 21 and second
Between R2, the first brightness regulation Polarization filter 253Configure the second shooting area R2 and area sensor 22 in film 110
Between.Now, a pair of first brightness regulation Polarization filters 251、253It is configured to form the second nonopiate polarization state.
This, the second nonopiate polarization state is different from the first nonopiate polarization state.That is, the polarization under the second nonopiate polarization state
The angle of the crossing of the polarization axle of the intersecting angle of the polarization axle of wave filter and the Polarization filter under the first nonopiate polarization state
Degree.Thus, a pair of first brightness regulation Polarization filters 251、253Can reduce through the second shooting area R2 light it is bright
Angle value.
Next, the defect detecting method and defect inspection to the second variation of the 11st embodiment are shot
Method is illustrated.
First, as described above, by the first Polarization filter 231Configure the first shooting area in light source 21 and film 110
Between R1, by the first Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.This
When, by the first Polarization filter 231And first Polarization filter 241It is configured to form the first nonopiate polarization state (first
Polarization filter arrangement step).Next, by the first brightness regulation Polarization filter 251Configuration is in light source 21 and second count
Take the photograph between the R2 of region, by the first brightness regulation Polarization filter 253Configuration is in the second shooting area R2 of film 110 and region
Between sensor 22.Now, by a pair of first brightness regulation Polarization filters 251、253Be configured to be formed second it is nonopiate partially
Shake state.Thereby, it is possible to reduce the brightness value (brightness regulation process) for the light for passing through the second shooting area R2.Next, carrying out
Above-mentioned transportation process, light irradiation process, shoot process, defects detection process, marking procedures.
Clapped according to the defect inspection filming apparatus 20D of the second variation of the 11st embodiment, defect inspection
Method, defect inspecting system 10D and defect detecting method are taken the photograph, the defect inspection with the tenth embodiment is also resulted in and uses
Filming apparatus 20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
[the 12nd embodiment]
Defect inspecting system and defect detecting method involved by 12nd embodiment of the present utility model are to carry out
The defect inspecting system of the defect inspection of the above-mentioned phase retardation film without polarization characteristic, battery barrier film etc. and lack
Fall into inspection method.In the explanation of the 12nd embodiment and its variation, film 110 is the film without polarization characteristic.
Defect inspecting system 10E and the tenth embodiment involved by 12nd embodiment of the present utility model are not
It is in the defect inspecting system 10C shown in Figure 22, possess defect instead of defect inspection filming apparatus 20C with part
Filming apparatus 20E is used in inspection.In addition, defect inspection shown in Figure 28 with filming apparatus 20E it is different from the tenth embodiment it
It is in in the defect inspection shown in Figure 26 with filming apparatus 20C, instead of the brightness regulation of light source 21 and first polarization
Wave filter (brightness regulation mechanism) 251And possess light source 21A.In addition, defect inspection filming apparatus 20E and the tenth embodiment party
The difference of formula is, in defect inspection with filming apparatus 20C, a pair of first Polarization filters 231、241Polarization axle
The intersecting angle of (polarization absorption axle) is different.
First Polarization filter 231With the first Polarization filter 241Form the first nonopiate polarization state.For example, first
Polarization filter 231Polarization axle and the first Polarization filter 241Polarization axle intersecting angle for 75 degree less than 85
Spend or more than 95 degree and less than 105 degree.
Light source 21A, which has, individually to be adjusted to the brightness value of the first shooting area R1 light irradiated and to the second shooting area
The brightness control function of the brightness value of the light of R2 irradiations.Thereby, it is possible to the brightness value for the light for making to expose to the first shooting area R1
It is larger, make the brightness value for exposing to the second shooting area R2 light smaller.
Next, to the defect detecting method involved by the 12nd embodiment of the present utility model and defect inspection
Illustrated with image pickup method.
First, by the first Polarization filter 231Configuration is between light source 21 and the first shooting area R1 of film 110, by the
One Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.Now, by the first polarization
Wave filter 231And first Polarization filter 241It is configured to form first nonopiate polarization state (the first Polarization filter configuration
Process).Next, individually being adjusted to the brightness value of the first shooting area R1 light irradiated and to second count using light source 21A
Take the photograph the brightness value of the light of region R2 irradiations.The brightness value of light thereby, it is possible to make to expose to the first shooting area R1 is larger, makes
The brightness value for exposing to the second shooting area R2 light is smaller (brightness regulation process).
Next, carrying out above-mentioned transportation process, light irradiation process, shooting process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20E, defect inspection image pickup method, defect of the 12nd embodiment
Inspection system 10E and defect detecting method, also result in the defect inspection filming apparatus with the tenth embodiment
20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
[variation of the 12nd embodiment]
In the 12nd embodiment, exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method
With filming apparatus 20E and defect inspection image pickup method, but it is also possible to by the different nonopiate polarization transmission method of two or more
Combined with regular transmission method.Hereinafter, as the variation of the 12nd embodiment, illustrate two different nonopiate polarizations are saturating
Defect inspection that method combines with regular transmission method is penetrated with filming apparatus 20E and defect inspection image pickup method.
Defect inspection shown in Figure 44 is with filming apparatus 20E and the difference of the tenth embodiment, in Figure 28 institutes
The defect inspection shown is with being also equipped with a pair of second Polarization filters 23 in filming apparatus 20E2、242。
Here, shooting area R, which is additionally included in the third shot being divided out on carrying direction Y, takes the photograph region R3, the third shot is taken the photograph
Region R3 and the first shooting area R1 is abutted.
Second Polarization filter 232With with the first Polarization filter 231Adjacent mode is configured in light source 21 and third shot
Take the photograph between the R3 of region, the second Polarization filter 242With with the first Polarization filter 241Adjacent mode is configured takes the photograph area in third shot
Between domain R3 and area sensor 22.A pair of second Polarization filters 232、242Form the second nonopiate polarization state.Here,
Second nonopiate polarization state is different from the first nonopiate polarization state.That is, the polarization filtering under the second nonopiate polarization state
The intersecting angle of the polarization axle of the intersecting angle of the polarization axle of device and the Polarization filter under the first nonopiate polarization state.
Next, to the defect detecting method and defect inspection image pickup method of the variation of the 12nd embodiment
Illustrate.
First, as described above, by the first Polarization filter 231Configure the first shooting area in light source 21 and film 110
Between R1, by the first Polarization filter 241Configuration is between the first shooting area R1 and area sensor 22 of film 110.This
When, by the first Polarization filter 231And first Polarization filter 241It is configured to form the first nonopiate polarization state (first
Polarization filter arrangement step).Next, by the second Polarization filter 232The third shot configured in light source 21 and film 110 is taken the photograph
Between the R3 of region, by the second Polarization filter 242The third shot configured in film 110 is taken the photograph between region R3 and area sensor 22.
Now, by the second Polarization filter 232And second Polarization filter 242It is configured to form the second nonopiate polarization state (
Two Polarization filter arrangement steps).Next, carrying out above-mentioned brightness regulation process, transportation process, light irradiation process, shooting
Process, defects detection process, marking procedures.
According to the defect inspection filming apparatus 20E of the variation of the 12nd embodiment, defect inspection shooting side
Method, defect inspecting system 10E and defect detecting method, also result in the defect inspection with the tenth embodiment and shoot
Device 20C, defect inspection image pickup method, defect inspecting system 10C and the same advantage of defect detecting method.
It should be noted that the utility model is not limited to above-mentioned present embodiment, various modifications can be carried out.For example,
In the seven, the 8th and the 9th embodiment, exemplified with defect inspection filming apparatus 20,20A, 20B using transmission beam method
And defect inspection image pickup method, but feature of the present utility model can also apply to as shown in Figure 29, Figure 30 and Figure 31
Like that using the defect inspection of bounce technique with filming apparatus 20,20A, 20B and defect inspection image pickup method.
In addition, in Figure 29, exemplified with the defect inspection for combining cross-polarization bounce technique with nonopiate reflection of polarization method
With filming apparatus 20 and defect inspection image pickup method, but it is also possible to by cross-polarization bounce technique and two in the same manner as Figure 39
Different nonopiate reflection of polarization methods combination more than individual.In addition, in fig. 30, exemplified with by nonopiate reflection of polarization method and just
Defect inspection filming apparatus 20A and the defect inspection image pickup method of bounce technique combination, but it is also possible to same with Figure 40
Ground, the different nonopiate reflection of polarization method of two or more is combined with normal reflection method, can also be by different non-of two or more
Cross-polarization bounce technique is combined.In addition, in Figure 31, exemplified with lacking of combining nonopiate reflection of polarization method with normal reflection method
Fall into inspection filming apparatus 20B and defect inspection image pickup method, but it is also possible in the same manner as Figure 41, by two or more not
Same nonopiate reflection of polarization method is combined with normal reflection method.
Defect inspection filming apparatus 20,20A, 20B and defect inspection according to Figure 29, Figure 30 and Figure 31
With image pickup method, for example, due to the first Polarization filter 231By with being configured in the way of the formation orthogonal polarization state of film 110 in light
Between the shooting area R1 of source (light irradiating means) 21 and first, area sensor (photographic unit) 22 will include first and shoot area
Domain R1, the second shooting area R2 and middle shooting area R0 shooting area R are shot for two dimensional image, therefore, it is possible to simultaneously
Shoot the first shooting area R1 cross-polarization reflex image, the second shooting area R2 normal reflection it is (or nonopiate
Polarizing emission) inspection is with image and middle shooting area R0 specular scattering inspection image.That is, it can integrate orthogonal inclined
The reflex that shakes shoots serial, nonopiate reflection of polarization inspection and shoots serial (reference picture 29) or normal reflection inspection use
Shoot serial (reference picture 30,31) and specular scattering inspection serial with shooting.As a result, defect inspecting system 10,
In 10A, 10B and defect detecting method, it can integrate that cross-polarization reflex is serial, nonopiate reflection of polarization inspection system
Row or normal reflection check that series and specular scattering check series, and serial number is checked so as to cut down.
However, in cross-polarization reflex uses shooting series to use shooting serial with such as normal reflection inspection, appropriate
The brightness value of light is different.More specifically, cross-polarization reflex is larger with the brightness value for the appropriate light for shooting series,
Such as normal reflection inspection is smaller with the brightness value for the appropriate light for shooting series.
On this point, defect inspection filming apparatus 20,20A, 20B according to Figure 29, Figure 30 and Figure 31 with
And defect inspection image pickup method, Polarization filter (brightness regulation mechanism) 25 can be utilized1, attentuating filter (brightness regulation
Mechanism) 26 and light source (brightness regulation mechanism) 21A, adjust the brightness value for the light for exposing to the second shooting area R2.Therefore,
For example by exporting the light of larger brightness value from light source (light irradiating means) 21 and light source (brightness regulation mechanism) 21A,
It can make towards the brightness value for being used to carry out the light that cross-polarization reflex shoots serial the first shooting area R1 irradiations
It is larger, on the other hand, Polarization filter (brightness regulation mechanism) 25 can be utilized1, attentuating filter (brightness regulation mechanism) 26
And light source (brightness regulation mechanism) 21A, make to shoot serial (reference picture towards for carrying out nonopiate reflection of polarization inspection
29) or normal reflection inspection with the brightness value of the light for the second shooting area R2 irradiations for shooting serial (reference picture 30,31) compared with
It is small.
Similarly, in the ten, the 11st and the 12nd in embodiment, exemplified with the defect inspection using transmission beam method
With filming apparatus 20C, 20D, 20E and defect inspection image pickup method, but feature of the present utility model can also apply to as
Figure 32, Figure 33 and defect inspection filming apparatus 20C, 20D, 20E and the defect inspection for utilizing bounce technique as shown in Figure 34
Look into and use image pickup method.
In addition, in Figure 32, exemplified with the defect inspection for combining cross-polarization bounce technique with nonopiate reflection of polarization method
With filming apparatus 20C and defect inspection image pickup method, but it is also possible to by cross-polarization bounce technique and two in the same manner as Figure 42
Different nonopiate reflection of polarization methods combination more than individual.In this case, region R3 is taken the photograph relative to Figure 42 third shots illustrated,
By the second brightness regulation Polarization filter (brightness regulation mechanism) 252With with the first brightness regulation Polarization filter 251It is adjacent
The mode connect is configured between light source 21 and third shot take the photograph region R3, on the other hand, will be with the second brightness regulation with partially
Polarization filter (brightness regulation mechanism) 252Paired the second brightness regulation Polarization filter 254To be used with the first brightness regulation
Polarization filter 253Adjacent mode, configuration is taken the photograph between region R3 and area sensor 22 in third shot.
In addition, in fig. 33, being shot exemplified with the defect inspection for combining nonopiate reflection of polarization method with normal reflection method
Device 20D and defect inspection image pickup method, but it is also possible in the same manner as Figure 43, by two or more it is different it is nonopiate partially
The bounce technique that shakes is combined with normal reflection method, reflection of polarization method can also be handed over to combine the different non-coin of two or more.In the situation
Under, relative to Figure 43 illustrate third shot take the photograph region R3, can as the 11st embodiment the first variation in illustrate that
Sample, by the second Polarization filter 232With with the first Polarization filter 231Adjacent mode is configured to be taken the photograph in light source 21 and third shot
, will be with the second Polarization filter 23 between the R3 of region2The second paired Polarization filter 242With with the first Polarization filter 241
Adjacent mode is configured to be taken the photograph between region R3 and area sensor 22 in third shot, can also be such as the of the 11st embodiment
Illustrate such in two variations, polarize a pair of first brightness regulations instead of attentuating filter (brightness regulation mechanism) 26
Wave filter (brightness regulation mechanism) 251、253It is configured to form the second nonopiate polarization state.Adjusted using a pair of first brightness
Save Polarization filter (brightness regulation mechanism) 251、253In the case of, by the first brightness regulation, with Polarization filter, (brightness is adjusted
Save mechanism) 251Configuration is between the shooting area R2 of light source 21 and second, by the first brightness regulation Polarization filter 253Configuration
Between the second shooting area R2 and area sensor 22 of film 110.
In addition, in Figure 34, being shot exemplified with the defect inspection for combining nonopiate reflection of polarization method with normal reflection method
Device 20E and defect inspection image pickup method, but it is also possible in the same manner as Figure 44, by two or more it is different it is nonopiate partially
The bounce technique that shakes is combined with normal reflection method.In this case, region R3 is taken the photograph relative to Figure 44 third shots illustrated, by the second polarization
Wave filter 232With with the first Polarization filter 231Adjacent mode is configured between light source 21 and third shot take the photograph region R3, will be with
Second Polarization filter 232The second paired Polarization filter 242With with the first Polarization filter 241Adjacent mode is configured
Taken the photograph in third shot between region R3 and area sensor 22.
Defect inspection filming apparatus 20C, 20D, 20E and defect inspection according to Figure 32, Figure 33 and Figure 34
With image pickup method, for example, due to a pair of first Polarization filters 231、241It is respectively configured in the way of forming orthogonal polarization state
Between the shooting area R1 of light source (light irradiating means) 21 and first and the first shooting area R1 and area sensor (are shot
Mechanism) between 22, area sensor (photographic unit) 22 will include the first shooting area R1, the second shooting area R2 and in
Between shooting area R0 shooting area R be shot for two dimensional image, therefore, it is possible to shoot simultaneously the first shooting area R1 it is orthogonal partially
Shake reflex image, the second shooting area R2 normal reflection (or nonopiate polarizing emission) inspection image, middle clap
Take the photograph region R0 specular scattering inspection image.That is, cross-polarization reflex can be integrated and shoot serial, nonopiate inclined
Reflection of shaking shoots serial (reference picture 32) or normal reflection inspection shoots serial (reference picture 33,34) and reflection dissipates
Penetrate inspection and shoot series.As a result, in defect inspecting system 10C, 10D, 10E and defect detecting method, can be whole
Close serial cross-polarization reflex, nonopiate reflection of polarization inspection series or normal reflection and check series and specular scattering
Series is checked, serial number is checked so as to cut down.
In addition, defect inspection according to Figure 32, Figure 33 and Figure 34 is with filming apparatus 20C, 20D, 20E and lacks
Sunken inspection image pickup method, can utilize a pair of first brightness regulation Polarization filters (brightness regulation mechanism) 251、253, decline
Subtract wave filter (brightness regulation mechanism) 26 and light source (brightness regulation mechanism) 21A, regulation exposes to the second shooting area R2's
The brightness value of light.Thus, for example by from light source (light irradiating means) 21 and light source (brightness regulation mechanism) 21A output compared with
The light of big brightness value, can make towards the first shooting area R1 for being used to carry out cross-polarization reflex shooting series
The brightness value of the light of irradiation is larger, on the other hand, can utilize a pair of first brightness regulation Polarization filter (brightness regulations
Mechanism) 251、253, attentuating filter (brightness regulation mechanism) 26 and light source (brightness regulation mechanism) 21A, make towards be used for into
The nonopiate reflection of polarization of row is used with shooting serial (reference picture 32) or normal reflection inspection and shot serial (reference picture 33,34)
The brightness value of the light of second shooting area R2 irradiations is smaller.
In addition, in the mode shown in the 8th and the 9th embodiment and Figure 30 and Figure 31, exemplified with first
Polarization filter 231The mode between light source (light irradiating means) 21 and the first shooting area R1 of film 110 is arranged on, but
It can use as shown in Figure 35, Figure 36, Figure 37 and Figure 38, the first Polarization filter 231Configuration is the first of film 110
Mode between shooting area R1 and area sensor (photographic unit) 22.
In Figure 35, exemplified with the defect inspection filming apparatus for combining nonopiate polarization transmission method with regular transmission method
20A and defect inspection image pickup method, but it is also possible in the same manner as Figure 40, the different nonopiate polarization of two or more is saturating
Penetrate method to combine with regular transmission method, the different nonopiate polarization transmission method of two or more can also be combined.In addition, in Figure 36,
Used exemplified with the defect inspection for combining nonopiate polarization transmission method with regular transmission method with filming apparatus 20B and defect inspection
Image pickup method, can also combine the different nonopiate polarization transmission method of two or more with regular transmission method in the same manner as Figure 41.
In addition, in Figure 37, being shot exemplified with the defect inspection for combining nonopiate reflection of polarization method with normal reflection method
Device 20A and defect inspection image pickup method, but it is also possible in the same manner as Figure 40, by two or more it is different it is nonopiate partially
The bounce technique that shakes is combined with normal reflection method, can also combine more than two different nonopiate reflection of polarization methods.In addition,
In Figure 38, exemplified with defect inspection filming apparatus 20B and the defect for combining nonopiate reflection of polarization method with bounce technique
Inspection image pickup method, but it is also possible in the same manner as Figure 41, by the different nonopiate reflection of polarization method of two or more with it is positive and negative
Penetrate method combination.
It is in the case where configuring brightness regulation mechanism in addition relative to light irradiating means, this is bright in explanation before
Degree governor motion is configured to, and regulation exposes to the second shooting area R2 light or through the second shooting area or by second count
Take the photograph the brightness of the light of region R2 reflections.However, in the mode of brightness regulation mechanism is configured in addition relative to light irradiating means,
Brightness regulation mechanism is configured to, adjust the light of at least one party that exposes in first and second shooting area R1, R2 or
Through at least one party in first and second shooting area R1, R2 or by first and second shooting area R1, R2
The brightness of the light of at least one party's reflection.In addition, be arranged at by brightness regulation mechanism in the mode of light irradiating means,
Brightness regulation mechanism can be further set in addition relative to the brightness regulation mechanism for being configured at light irradiating means.
Claims (29)
1. a kind of defect inspection filming apparatus, the defect inspection for carrying out the film with polarization characteristic, it is characterised in that
The defect inspection possesses with filming apparatus：
Light irradiating means, its to the film shooting area irradiation light；
Photographic unit, the shooting area of the film is shot for two dimensional image by it；
First Polarization filter, its by with the film formation orthogonal polarization state or the first nonopiate polarization state in the way of,
Configure between the light irradiating means and the shooting area of the film or the film the shooting area with it is described
Between photographic unit；And
Carrying mechanism, it is carried relative to the light irradiating means, the photographic unit and first Polarization filter edge
The film is relatively carried in direction,
The shooting area is included in the first shooting area and the second shooting area being divided out on the carrying direction,
First Polarization filter configuration is between the light irradiating means and first shooting area or described first
Between shooting area and the photographic unit.
2. defect inspection filming apparatus according to claim 1, it is characterised in that
First Polarization filter and film formation orthogonal polarization state.
3. defect inspection filming apparatus according to claim 2, it is characterised in that
The defect inspection is also equipped with brightness regulation mechanism with filming apparatus, and brightness regulation mechanism regulation exposes to described first
The light of shooting area and at least one party in second shooting area or through first shooting area and described
At least one party in second shooting area or by least one party in first shooting area and second shooting area
The brightness value of the light of reflection.
4. defect inspection filming apparatus according to claim 3, it is characterised in that
Brightness regulation mechanism regulation expose to the light of second shooting area or through second shooting area or
The brightness value of the light reflected by second shooting area.
5. defect inspection filming apparatus according to claim 4, it is characterised in that
The brightness regulation mechanism is disposed between the light irradiating means and second shooting area or described second
Attentuating filter between shooting area and the photographic unit.
6. the defect inspection filming apparatus according to claim 3 or 4, it is characterised in that
The brightness regulation mechanism is configured at the light irradiating means, individually adjusts to the described first light for shooting area illumination
Brightness value and the brightness value to the described second light for shooting area illumination.
7. defect inspection filming apparatus according to claim 1, it is characterised in that
The first Polarization filter configuration is between the light irradiating means and first shooting area.
8. defect inspection filming apparatus according to claim 1, it is characterised in that
The defect inspection is also equipped with brightness regulation mechanism with filming apparatus, and brightness regulation mechanism regulation exposes to described first
The light of shooting area and at least one party in second shooting area or through first shooting area and described
At least one party in second shooting area or by least one party in first shooting area and second shooting area
The brightness value of the light of reflection.
9. defect inspection filming apparatus according to claim 8, it is characterised in that
First shooting area formation orthogonal polarization state of first Polarization filter and the film,
The brightness regulation mechanism include the first brightness regulation Polarization filter, the first brightness regulation Polarization filter with
With the mode of second shooting area of the film the first nonopiate polarization state of formation, configuration the light irradiating means with
Between second shooting area or between second shooting area and the photographic unit.
10. defect inspection filming apparatus according to claim 8, it is characterised in that
First shooting area the first nonopiate polarization state of formation of first Polarization filter and the film,
The brightness regulation mechanism is disposed between the light irradiating means and second shooting area or described second
Attentuating filter between shooting area and the photographic unit.
11. defect inspection filming apparatus according to claim 8, it is characterised in that
First shooting area the first nonopiate polarization state of formation of first Polarization filter and the film,
The brightness regulation mechanism is configured at the light irradiating means, individually adjusts to the described first light for shooting area illumination
Brightness value and the brightness value to the described second light for shooting area illumination.
12. defect inspection filming apparatus according to claim 9, it is characterised in that
The shooting area is included in the third shot being divided out on the carrying direction and takes the photograph region,
The brightness regulation mechanism includes the second brightness regulation Polarization filter and regulation exposes to the third shot and takes the photograph region
Light brightness value, second brightness regulation takes the photograph region with the third shot with the film with Polarization filter and forms second non-
The mode of orthogonal polarization state, is configured between the light irradiating means and the third shot take the photograph region or the third shot
Take the photograph between region and the photographic unit.
13. the defect inspection filming apparatus according to claim 10 or 11, it is characterised in that
The shooting area is included in the third shot being divided out on the carrying direction and takes the photograph region,
The defect inspection is also equipped with the second Polarization filter with filming apparatus, and second Polarization filter is configured in the illumination
Penetrate mechanism and the third shot takes the photograph between region or the third shot is taken the photograph between region and the photographic unit, and this second
The third shot of Polarization filter and the film takes the photograph region and forms the second nonopiate polarization state.
14. defect inspection filming apparatus according to claim 8, it is characterised in that
First shooting area the first nonopiate polarization state of formation of first Polarization filter and the film,
The brightness regulation mechanism include the first brightness regulation Polarization filter, the first brightness regulation Polarization filter with
With the mode of second shooting area of the film the second nonopiate polarization state of formation, configuration the light irradiating means with
Between second shooting area or between second shooting area and the photographic unit.
15. a kind of defect inspection filming apparatus, the defect inspection for carrying out the film without polarization characteristic, its feature exists
In,
The defect inspection possesses with filming apparatus：
Light irradiating means, its to the film shooting area irradiation light；
Photographic unit, the shooting area of the film is shot for two dimensional image by it；
A pair of first Polarization filters, it is in the way of forming orthogonal polarization state or the first nonopiate polarization state, respectively
Configure between the light irradiating means and the shooting area of the film and the film the shooting area with it is described
Between photographic unit；And
Carrying mechanism, it is relative to the first Polarization filter edge described in the light irradiating means, the photographic unit and a pair
Carry direction and relatively carry the film,
The shooting area is included in the first shooting area and the second shooting area being divided out on the carrying direction,
First Polarization filter described in a pair be arranged respectively between the light irradiating means and first shooting area and
Between first shooting area and the photographic unit.
16. defect inspection filming apparatus according to claim 15, it is characterised in that
First Polarization filter formation orthogonal polarization state described in a pair.
17. defect inspection filming apparatus according to claim 16, it is characterised in that
The defect inspection is also equipped with brightness regulation mechanism with filming apparatus, and brightness regulation mechanism regulation exposes to described first
The light of shooting area and at least one party in second shooting area or through first shooting area and described
At least one party in second shooting area or by least one party in first shooting area and second shooting area
The brightness value of the light of reflection.
18. defect inspection filming apparatus according to claim 17, it is characterised in that
Brightness regulation mechanism regulation expose to the light of second shooting area or through second shooting area or
The brightness value of the light reflected by second shooting area.
19. defect inspection filming apparatus according to claim 18, it is characterised in that
The brightness regulation mechanism is disposed between the light irradiating means and second shooting area or described second
Attentuating filter between shooting area and the photographic unit.
20. the defect inspection filming apparatus according to claim 17 or 18, it is characterised in that
The brightness regulation mechanism is configured at the light irradiating means, individually adjusts to the described first light for shooting area illumination
Brightness value and the brightness value to the described second light for shooting area illumination.
21. defect inspection filming apparatus according to claim 15, it is characterised in that
The defect inspection is also equipped with brightness regulation mechanism with filming apparatus, and brightness regulation mechanism regulation exposes to described first
The light of shooting area and at least one party in second shooting area or through first shooting area and described
At least one party in second shooting area or by least one party in first shooting area and second shooting area
The brightness value of the light of reflection.
22. defect inspection filming apparatus according to claim 21, it is characterised in that
First Polarization filter formation orthogonal polarization state described in a pair,
The brightness regulation mechanism includes a pair of first brightness regulation Polarization filters, a pair of first brightness regulation polarizations
Wave filter in the way of forming the first nonopiate polarization state, configuration the light irradiating means and second shooting area it
Between and second shooting area and the photographic unit between.
23. defect inspection filming apparatus according to claim 21, it is characterised in that
The first nonopiate polarization state of first Polarization filter formation described in a pair,
The brightness regulation mechanism is disposed between the light irradiating means and second shooting area or described second
Attentuating filter between shooting area and the photographic unit.
24. defect inspection filming apparatus according to claim 21, it is characterised in that
The first nonopiate polarization state of first Polarization filter formation described in a pair,
The brightness regulation mechanism is configured at the light irradiating means, individually adjusts to the described first light for shooting area illumination
Brightness value and the brightness value to the described second light for shooting area illumination.
25. defect inspection filming apparatus according to claim 22, it is characterised in that
The shooting area is included in the third shot being divided out on the carrying direction and takes the photograph region,
The brightness regulation mechanism includes a pair of second brightness regulation Polarization filters and regulation exposes to the third shot and taken the photograph
The brightness value of the light in region, a pair of second brightness regulation Polarization filters are to form the side of the second nonopiate polarization state
Formula, configuration is between the light irradiating means and the third shot take the photograph region and the third shot is taken the photograph region and shot with described
Between mechanism.
26. the defect inspection filming apparatus according to claim 23 or 24, it is characterised in that
The shooting area is included in the third shot being divided out on the carrying direction and takes the photograph region,
The defect inspection is also equipped with a pair of second Polarization filters with filming apparatus, and a pair of second Polarization filters are to form
The mode of second nonopiate polarization state, be arranged respectively at the light irradiating means and the third shot take the photograph between region and
The third shot is taken the photograph between region and the photographic unit.
27. defect inspection filming apparatus according to claim 21, it is characterised in that
The first nonopiate polarization state of first Polarization filter formation described in a pair,
The brightness regulation mechanism includes a pair of first brightness regulation Polarization filters, a pair of first brightness regulation polarizations
Wave filter in the way of forming the second nonopiate polarization state, configuration the light irradiating means and second shooting area it
Between and second shooting area and the photographic unit between.
28. a kind of defect inspecting system, it is characterised in that possess：
Defect inspection filming apparatus any one of claim 1 to 27；And
Test section, its basis is detected and deposited in the film by the two dimensional image that the defect inspection is photographed with filming apparatus
Defect.
29. a kind of film manufacturing device, it is characterised in that possess the defect inspecting system described in claim 28.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015244564 | 2015-12-15 | ||
| JP2015244553 | 2015-12-15 | ||
| JP2015-244553 | 2015-12-15 | ||
| JP2015-244564 | 2015-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206583816U true CN206583816U (en) | 2017-10-24 |
Family
ID=59081510
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621361034.4U Active CN206583816U (en) | 2015-12-15 | 2016-12-12 | Defect inspection filming apparatus, defect inspecting system and film manufacturing device |
| CN201611142936.3A Active CN107024482B (en) | 2015-12-15 | 2016-12-12 | Defect imaging device and method, film manufacturing device and method, and defect inspection method |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611142936.3A Active CN107024482B (en) | 2015-12-15 | 2016-12-12 | Defect imaging device and method, film manufacturing device and method, and defect inspection method |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JP6902347B2 (en) |
| KR (1) | KR20170071430A (en) |
| CN (2) | CN206583816U (en) |
| TW (1) | TWI773655B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6949538B2 (en) * | 2017-04-20 | 2021-10-13 | 株式会社カネカ | Defect inspection equipment, defect inspection method, and method for manufacturing balloon catheters |
| JP6924645B2 (en) * | 2017-07-31 | 2021-08-25 | 日東電工株式会社 | Polarizing film imaging device, inspection device, and inspection method |
| JP6948215B2 (en) * | 2017-10-11 | 2021-10-13 | 住友化学株式会社 | Defect inspection equipment, defect inspection method, and film manufacturing method |
| CN115989407A (en) * | 2020-08-31 | 2023-04-18 | 日东电工株式会社 | Method for inspecting optical laminate |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04329339A (en) * | 1991-04-30 | 1992-11-18 | Kanzaki Paper Mfg Co Ltd | Double refraction measuring device |
| JP2003344302A (en) * | 2002-05-31 | 2003-12-03 | Sumitomo Chem Co Ltd | Method and equipment for inspecting polarization film |
| JP4396160B2 (en) * | 2003-07-31 | 2010-01-13 | 住友化学株式会社 | Foreign film inspection method for transparent film |
| JP2005274383A (en) * | 2004-03-25 | 2005-10-06 | Sumitomo Chemical Co Ltd | Inspection method for hole defect of oriented film |
| JP2006337630A (en) * | 2005-06-01 | 2006-12-14 | Sumitomo Chemical Co Ltd | Method for manufacturing multilayer optical film |
| JP4869053B2 (en) * | 2006-01-11 | 2012-02-01 | 日東電工株式会社 | LAMINATED FILM MANUFACTURING METHOD, LAMINATED FILM DEFECT DETECTING METHOD, LAMINATED FILM DEFECT DETECTOR, LAMINATED FILM, AND IMAGE DISPLAY DEVICE |
| JP5118311B2 (en) * | 2006-03-27 | 2013-01-16 | 株式会社フォトニックラティス | Measuring device for phase difference and optical axis orientation |
| JP5024935B2 (en) * | 2007-01-16 | 2012-09-12 | 富士フイルム株式会社 | Device and method for detecting defect of light transmitting member |
| JP2008298566A (en) * | 2007-05-31 | 2008-12-11 | Fujifilm Corp | Apparatus and method for inspecting defect of film |
| JP5140409B2 (en) * | 2007-12-26 | 2013-02-06 | 株式会社フォトニックラティス | Polarimeter, measurement system |
| JP2009244064A (en) * | 2008-03-31 | 2009-10-22 | Sumitomo Chemical Co Ltd | Inspection method of polarization film |
| KR101177299B1 (en) * | 2010-01-29 | 2012-08-30 | 삼성코닝정밀소재 주식회사 | Detection apparatus for particle on the glass |
| JP5589422B2 (en) * | 2010-02-15 | 2014-09-17 | 株式会社リコー | Transparent body detection system |
| JP5589423B2 (en) * | 2010-02-15 | 2014-09-17 | 株式会社リコー | Transparent flat plate detection system |
| JP2011226957A (en) * | 2010-04-21 | 2011-11-10 | Sanritz Corp | Defect inspection method and defect inspection device of polarizing plate |
| JP5944165B2 (en) * | 2010-05-25 | 2016-07-05 | 東レ株式会社 | Film defect inspection apparatus and defect inspection method |
| JP5508352B2 (en) * | 2011-07-05 | 2014-05-28 | 富士フイルム株式会社 | Optical characteristic measuring method and apparatus |
| CN102590221A (en) * | 2012-02-24 | 2012-07-18 | 深圳大学 | Apparent defect detecting system and detecting method of polarizer |
| JP2013205091A (en) * | 2012-03-27 | 2013-10-07 | Dainippon Printing Co Ltd | Film inspection system, and film inspection method |
| CN203053851U (en) * | 2013-01-10 | 2013-07-10 | 南京中迅微传感技术有限公司 | Micro-polarizing film array-based digital-electronic speckle shearing interferometer |
| JP5825278B2 (en) * | 2013-02-21 | 2015-12-02 | オムロン株式会社 | Defect inspection apparatus and defect inspection method |
| KR20150007719A (en) * | 2013-07-12 | 2015-01-21 | 동우 화인켐 주식회사 | Inspecting method for polarizing plate |
| JP5649705B1 (en) * | 2013-09-24 | 2015-01-07 | 田中 研治 | Distortion measurement system for transparent film |
| KR102191414B1 (en) * | 2013-11-12 | 2020-12-16 | 삼성디스플레이 주식회사 | Defect detecting device and method for detecting defect using the same |
| JP2015225041A (en) * | 2014-05-29 | 2015-12-14 | 住友化学株式会社 | Defect inspection method for laminated polarizing film |
-
2016
- 2016-12-12 CN CN201621361034.4U patent/CN206583816U/en active Active
- 2016-12-12 CN CN201611142936.3A patent/CN107024482B/en active Active
- 2016-12-13 KR KR1020160169337A patent/KR20170071430A/en active Search and Examination
- 2016-12-13 TW TW105141211A patent/TWI773655B/en active
- 2016-12-15 JP JP2016243605A patent/JP6902347B2/en active Active
-
2021
- 2021-04-09 JP JP2021066416A patent/JP7184954B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6902347B2 (en) | 2021-07-14 |
| JP2017111150A (en) | 2017-06-22 |
| CN107024482B (en) | 2020-11-20 |
| TWI773655B (en) | 2022-08-11 |
| JP2021103190A (en) | 2021-07-15 |
| CN107024482A (en) | 2017-08-08 |
| KR20170071430A (en) | 2017-06-23 |
| TW201800744A (en) | 2018-01-01 |
| JP7184954B2 (en) | 2022-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206583816U (en) | Defect inspection filming apparatus, defect inspecting system and film manufacturing device | |
| TWI418779B (en) | Method and apparatus for inspecting defect | |
| KR101300132B1 (en) | Apparatus for detecting particle in flat glass and detecting method using same | |
| TWI457556B (en) | Surface inspection method and apparatus for steel plate with resin coating film | |
| TWI468674B (en) | Method for inspection of multi - crystalline wafers | |
| JP6749321B2 (en) | Defect inspection method for light-transmitting film, manufacturing method for linear polarizer film, and manufacturing method for polarizing plate | |
| TWI775964B (en) | Defect inspection apparatus | |
| CN102412170A (en) | System and method for capturing illumination reflected in multiple directions | |
| JP5924511B2 (en) | Optical film sticking position measuring device | |
| CN109490323A (en) | The manufacturing method of flaw detection apparatus, defect detecting method, the manufacturing method of circularly polarizing plate or elliptical polarization plate and phase plate | |
| TW201209391A (en) | An apparatus and method for inspecting inner defect of substrate | |
| CN109791113A (en) | Use the optical detection device and optical inspection for semiconductor element of visible light and infrared ray | |
| JP5167542B2 (en) | Inspection illumination device and inspection method | |
| JP2017219343A (en) | Defect inspection device, defect inspection method, film manufacturing device, and film manufacturing method | |
| JP7151469B2 (en) | Sheet defect inspection device | |
| JP4647090B2 (en) | Inspection device for transparent laminate | |
| CN109297973A (en) | Defect inspecting system and defect detecting method | |
| JP3357968B2 (en) | Lenticular lens sheet defect inspection method | |
| CN110018582B (en) | Optical display panel continuous inspection method and apparatus, continuous manufacturing method and system | |
| CN108204982A (en) | Multi-view image capturing device and multi-view image detecting equipment | |
| CN108871191B (en) | Frame glue width measuring equipment and frame glue width measuring method | |
| JP6086277B2 (en) | Pattern inspection apparatus and illumination optical system used therefor | |
| TWI405962B (en) | A stain detection method and a device thereof | |
| JP2021025893A (en) | Method for inspecting filmed substrate, method for manufacturing filmed substrate, and device for inspecting filmed substrate | |
| TWI601950B (en) | Bubble defect inspection system and method for an infrared cut-off filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |