CN109490323A - The manufacturing method of flaw detection apparatus, defect detecting method, the manufacturing method of circularly polarizing plate or elliptical polarization plate and phase plate - Google Patents
The manufacturing method of flaw detection apparatus, defect detecting method, the manufacturing method of circularly polarizing plate or elliptical polarization plate and phase plate Download PDFInfo
- Publication number
- CN109490323A CN109490323A CN201811059584.4A CN201811059584A CN109490323A CN 109490323 A CN109490323 A CN 109490323A CN 201811059584 A CN201811059584 A CN 201811059584A CN 109490323 A CN109490323 A CN 109490323A
- Authority
- CN
- China
- Prior art keywords
- plate
- light
- circularly polarizing
- polarizing plate
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Abstract
The flaw detection apparatus for being used to check the defect of circularly polarizing plate or elliptical polarization plate or the defect of the phase plate used in the generation of circularly polarized light or elliptically polarized light and defect detecting method of present invention offer high universalizable and the manufacturing method for using the circularly polarizing plate of the defect detecting method or the manufacturing method of elliptical polarization plate and phase plate.Flaw detection apparatus has: illumination part, the linear polarization plate side possessed by circularly polarizing plate or elliptical polarization plate is configured, to circularly polarizing plate or the imaging area examination light of elliptical polarization plate；Reflecting member, configuration will check light that the circularly polarizing plate of light or elliptical polarization plate export to circularly polarizing plate or elliptical polarization plate lateral reflection in the side opposite with illumination part from illuminated when from circularly polarizing plate or elliptical polarization plate；Image pickup part, configuration is in side identical with illumination part when from circularly polarizing plate or elliptical polarization plate.
Description
Technical field
The present invention relates to the manufacturing method of flaw detection apparatus, defect detecting method, circularly polarizing plate or elliptical polarization plate and
The manufacturing method of phase plate.
Background technique
The prior art as the art, it is known to the technology of patent document 1.Patent document 1 discloses at least layer
It is laminated with manufacturing method, defect detecting device and the defect detecting method of the stacked film of polarization plates and optical compensating layer.In above-mentioned light
Learning compensation layer has the case where function (being equivalent to phase plate) by linear polarization photogenerated circularly polarized light or elliptically polarized light
Under, above-mentioned stacked film is equivalent to circularly polarizing plate or elliptical polarization plate.In the technology of patent document 1, from as check object
The lateral stacked film irradiation light of the polarization plates of stacked film, the image pickup part using configuration in the optical compensating layer side of stacked film obtain stacking
The transmission light image of film.Between stacked film and image pickup part, inspection phase difference optical filter and inspection are configured in order from stacked film side
It looks into and uses polarizing filter.It is obtained in the case where stacked film does not generate defect by image pickup part by the function of above-mentioned optical filter
To image be shown as black, stacked film generate defect in the case where, in the image obtained by image pickup part, defect part become
It is bright.As a result, can differentiate the presence or absence of defect in the image obtained by image pickup part.
[citation]
[patent document]
[patent document 1] Japanese Patent No. 4869053
The inspection phase difference optical filter that patent document 1 uses is caused to eliminate by the optical compensating layer that stacked film has
Phase difference and use.Because inspection phase difference optical filter must be according to optical compensating layer in order to more accurately implement to check
It is replaced.Therefore, in the defect inspection of implementation circularly polarizing plate or elliptical polarization plate or by linear polarization photogenerated circular polarization
When the defect inspection of the phase plate of light or elliptically polarized light, the technology of patent document l if applicable, then flaw detection apparatus and
The versatility of defect detecting method declines.
Summary of the invention
Therefore, it is an object of that present invention to provide it is a kind of can be realized high universalizable, for checking circularly polarizing plate or ellipse
The defect inspection of the defect of polarization plates or the defect of the phase plate used in the generation of circularly polarized light or elliptically polarized light
Device and defect detecting method and the circularly polarizing plate of the defect detecting method or the manufacturing method of elliptical polarization plate are used
And the manufacturing method of phase plate.
The flaw detection apparatus of a scheme of the invention is to linear polarization plate and being laminated in the linear polarization plate
The circularly polarizing plate of phase plate or the defect of elliptical polarization plate are checked that the flaw detection apparatus has: illumination part,
Configure the linear polarization plate side possessed by the circularly polarizing plate or elliptical polarization plate, Xiang Suoshu circularly polarizing plate or oval inclined
The imaging area examination light of vibration plate；Reflecting member, configuration exists when from the circularly polarizing plate or elliptical polarization plate
The side opposite with the illumination part will be exported from the illuminated circularly polarizing plate for checking light or elliptical polarization plate
Light to the circularly polarizing plate or elliptical polarization plate lateral reflection；And image pickup part, from the circularly polarizing plate or elliptical polarization
Configuration shoots the imaging area in side identical with the illumination part when plate is observed.
It is inclined from circle in the flaw detection apparatus when being assumed to circularly polarizing plate or defect is not present in elliptical polarization plate
The light that vibration plate or elliptical polarization plate are exported to reflecting member side is circularly polarized light or elliptically polarized light.Below for ease of description,
By light that is incident from linear polarization plate side to circularly polarizing plate or elliptical polarization plate and being exported from circularly polarizing plate or elliptical polarization plate
Circularly polarized light or elliptically polarized light are assumed to clockwise circularly polarized light or elliptically polarized light.In this case, by reflecting member
The circularly polarized light or elliptically polarized light for the light of reflection returned to circularly polarizing plate or elliptical polarization plate side are circular polarization counterclockwise
Light or elliptically polarized light.As a result, can not be by circularly polarizing plate or elliptical polarization plate by the light of reflecting member reflection, therefore pass through and take the photograph
As the image that portion obtains is displayed as black black image.Another program, when circularly polarizing plate or elliptical polarization plate generation defect, by
Lead to polarization state disorder in defect, therefore the light returned from reflecting member to circularly polarizing plate or elliptical polarization plate side is comprising logical
Cross the component of circularly polarizing plate or elliptical polarization plate.Therefore, in the image obtained by image pickup part, exist corresponding with defect bright
Highlights.As a result, the defect of circularly polarizing plate or elliptical polarization plate can be checked.
Rectilinearly polarized light is converted into circularly polarized light or ellipse partially by the flaw detection apparatus inspection of another program of the invention
The defect of vibration light and the phase plate exported, the flaw detection apparatus have: linear polarization plate；Illumination part makes to check
Light is irradiated by the linear polarization plate to the imaging area of the phase plate；Reflecting member, from the phase difference
Configuration is in the side opposite with the illumination part when plate is observed, will be defeated from the illuminated phase plate for checking light
Light out is to the phase plate lateral reflection；And image pickup part, when from the phase plate configuration with the light
The identical side of irradiation portion shoots the imaging area by the linear polarization plate.
When being assumed to phase plate there is no defect, in the flaw detection apparatus, due to passing through linear polarization plate
And to phase plate examination light, therefore the light exported from phase plate to reflecting member side is circularly polarized light or elliptical polarization
Light.Below for ease of description, will check light by linear polarization plate to when phase plate incidence from phase plate export
The circularly polarized light or elliptically polarized light of light are assumed to clockwise circularly polarized light or elliptically polarized light.In this case, by reflecting
The circularly polarized light or elliptically polarized light of component reflection and the light returned to phase plate side are circularly polarized light or ellipse counterclockwise
Polarised light.Since the light irradiated by the linear polarization plate to phase plate is clockwise circularly polarized light or elliptical polarization
Light, therefore when circularly polarized light or elliptically polarized light counterclockwise are from reflecting member to when phase plate incidence, with linear polarization plate
It is exported as the rectilinearly polarized light for intersecting Niccol state from phase plate towards linear polarization plate.It is obtained as a result, by image pickup part
The image arrived is black image.Another program leads to polarization state disorder due to defect when phase plate generates defect, because
This light for being reflected by reflecting member and having been passed through phase plate includes can be by the component of linear polarization plate.Therefore, passing through
Linear polarization plate and imaging area shoot in resulting image by image pickup part, there is bright portion corresponding with defect.Its
As a result, the defect of phase plate can be checked.
The illumination part can by the inspection light in a manner of with the light shaft coaxle of the image pickup part to the camera shooting
Area illumination.
Camera shooting described in the optical axis direction that the inspection light can be intersected with the optical axis with the image pickup part by the illumination part
Area illumination.
The illumination part can have the multiple light sources configured in the mode surrounded around the image pickup part.
The reflecting member can be surface by the roller of mirror finish.
The defect detecting method (hereinafter referred to as " the first defect detecting method ") of another program of the invention is to straight line
Polarization plates and it is laminated in the circularly polarizing plate of phase plate of linear polarization plate or the defect of elliptical polarization plate is checked, it is described to lack
Sunken inspection method includes: that the inspection light from illumination part is inclined from linear polarization plate side to the circularly polarizing plate or ellipse
The light irradiation process of the imaging area irradiation of vibration plate；It will be from the illuminated circular polarization for checking light using reflecting member
Reflection process of the light that plate or elliptical polarization plate export to the circularly polarizing plate or elliptical polarization plate lateral reflection；And by image pickup part
To shoot the shooting process of the imaging area, wherein the image pickup part is from the circularly polarizing plate or elliptical polarization plate
When configuration in side identical with the illumination part.
When being assumed to circularly polarizing plate or defect is not present in elliptical polarization plate, to circularly polarizing plate in the smooth irradiation process
Or when elliptical polarization plate examination light, circularly polarized light or ellipse are exported from circularly polarizing plate or elliptical polarization plate to reflecting member side
Polarised light.It below for ease of description, will be incident from linear polarization plate side to circularly polarizing plate or elliptical polarization plate and from circular polarization
The circularly polarized light or elliptically polarized light of plate or the light of elliptical polarization plate output are assumed to clockwise circularly polarized light or elliptical polarization
Light.In this case, it in reflection process, is reflected from reflecting member and the light that is returned to circularly polarizing plate or elliptical polarization plate side
Circularly polarized light or elliptically polarized light are circularly polarized light or elliptically polarized light counterclockwise.As a result, by reflecting member reflection light without
Method is black image by the image that image pickup part obtains by circularly polarizing plate or elliptical polarization plate, therefore in shooting process.It is another
Scheme leads to polarization state disorder due to defect when circularly polarizing plate or elliptical polarization plate generation defect, from reflection structure
Part includes the component by circularly polarizing plate or elliptical polarization plate to the light that circularly polarizing plate or elliptical polarization plate side return.Therefore, exist
In the image obtained in shooting process by image pickup part, there is bright portion corresponding with defect.As a result, circular polarization can be checked
The defect of plate or elliptical polarization plate.
The defect detecting method (hereinafter referred to as " the second defect detecting method ") of another program of the invention is checked straight line
Polarised light is converted into the defect of circularly polarized light or elliptically polarized light and the phase plate of output, and the defect detecting method includes:
The inspection light from illumination part is set to irradiate work by the light that linear polarization plate is irradiated to the imaging area of the phase plate
Sequence；It is using reflecting member that the light exported from the illuminated phase plate for checking light is anti-to the phase plate side
The reflection process penetrated；And the shooting process of the imaging area is shot by the linear polarization plate by image pickup part, wherein
The image pickup part configures when from the phase plate in side identical with the illumination part.
When being assumed to phase plate there is no defect, in the smooth irradiation process, by linear polarization plate to phase
When potential difference plate examination light, circularly polarized light or elliptically polarized light are exported from phase plate to reflecting member side.Below in order to just
In explanation, will check light by linear polarization plate to the circularly polarized light of the light exported when phase plate incidence from phase plate or
Elliptically polarized light is assumed to clockwise circularly polarized light or elliptically polarized light.In this case, by reflection structure in reflection process
The circularly polarized light or elliptically polarized light of part reflection and the light returned to phase plate side are circularly polarized light or oval inclined counterclockwise
Shake light.Since the light irradiated by the linear polarization plate to phase plate is clockwise circularly polarized light or elliptical polarization
Light, therefore when circularly polarized light or elliptically polarized light counterclockwise are from reflecting member to when phase plate incidence, with linear polarization plate
It is exported as the rectilinearly polarized light for intersecting Niccol state from phase plate towards linear polarization plate.As a result, in shooting process,
Imaging area is carried out shooting resulting image being black image by image pickup part by linear polarization plate.Another program works as phase
When poor plate generates defect, polarization state disorder is caused due to defect, is reflected by reflecting member and has passed through phase plate
Light include can pass through the component of linear polarization plate.Therefore, in shooting process, by linear polarization plate by image pickup part pair
Imaging area shoot in resulting image, there is bright portion corresponding with defect.As a result, phase plate can be checked
Defect.
It in first defect detecting method or the second defect detecting method, can be, reflecting member is surface by mirror
The roller that face machined utilizes the circularly polarizing plate or elliptical polarization plate of roller conveying strip or the phase difference on one side
Plate implements the smooth irradiation process, the reflection process and the shooting process on one side.
It, can will be described in the smooth irradiation process of first defect detecting method or the second defect detecting method
Check that light irradiates in a manner of with the light shaft coaxle of the image pickup part to the imaging area.
In the smooth irradiation process of first defect detecting method or the second defect detecting method, can with institute
The optical axis for stating the optical axis intersection of image pickup part irradiates the inspection light to the imaging area.
In the smooth irradiation process of first defect detecting method or the second defect detecting method, it can will come from
The inspection light of multiple light sources is irradiated to the imaging area, wherein the multiple light source is to surround week of the image pickup part
The mode enclosed configures.
The present invention also relates to check comprising first defect detecting method and using first defect detecting method
The manufacturing method of the circularly polarizing plate of the circularly polarizing plate.The present invention also relates to comprising first defect detecting method and utilize institute
State the first defect detecting method check the elliptical polarization plate elliptical polarization plate manufacturing method.
The present invention also relates to the manufacturing methods of the phase plate comprising second defect detecting method.
[invention effect]
In accordance with the invention it is possible to provide it is a kind of can be realized high universalizable, for checking circularly polarizing plate or elliptical polarization
The flaw detection apparatus of the defect of plate or the defect of the phase plate used in the generation of circularly polarized light or elliptically polarized light
And defect detecting method and the circularly polarizing plate of the defect detecting method or the manufacturing method and phase of elliptical polarization plate are used
The manufacturing method of potential difference plate.
Detailed description of the invention
Fig. 1 is the schematic diagram for indicating to check the brief configuration of an example of the flaw detection apparatus of the defect of circularly polarizing plate.
Fig. 2 is the cross-sectional view along II-II line of the circularly polarizing plate shown in FIG. 1 as check object.
Fig. 3 is the figure of the testing principle for description defect.
Fig. 4 is the schematic diagram for indicating the brief configuration of flaw detection apparatus of comparison other.
Fig. 5 is the schematic diagram for indicating the brief configuration of flaw detection apparatus of variation 1.
Fig. 6 is the schematic diagram for indicating the brief configuration of flaw detection apparatus of variation 2.
Fig. 7 is the flow chart for indicating the manufacturing method of circularly polarizing plate.
Fig. 8 is the defect inspection for indicating the defect to the phase plate by linear polarization photogenerated circularly polarized light and being checked
The schematic diagram of the brief configuration of an example of device.
[symbol description]
10,10A, 10B, 10C ... flaw detection apparatus, 12 ... circularly polarizing plates, 14 ... illumination parts, 16 ... reflecting members,
18 ... image pickup parts, 20 ... linear polarization plates, 22 ... phase plates, 28 ... check light, and 30 ... light sources, 34 ... optical axises be (image pickup part
Optical axis), 42 ... optical axises (optical axis of illumination part), 44 ... phase plates, 46 ... linear polarization plates, the imaging area A ...
Specific embodiment
Hereinafter, being described with reference to the accompanying drawings about embodiments of the present invention.For same element, same symbol is marked,
The repetitive description thereof will be omitted.The dimensional ratios of attached drawing and the structure of explanation may not be consistent.
(first embodiment)
Fig. 1 is the schematic diagram for indicating the structure of flaw detection apparatus of an embodiment.Flaw detection apparatus 10 is to check
The device of the defect of circularly polarizing plate 12 has illumination part 14, reflecting member 16, image pickup part 18.
As shown in Figures 1 and 2, have linear polarization plate 20 and phase plate 22 as the circularly polarizing plate of check object 12.
Linear polarization plate 20 by the one side of the polarizing coating 24 with linear polarization characteristic be bonded protective film 26A and
Protective film 26B is bonded on the another side of polarizing coating 24 and is constituted.As the material of polarizing coating 24, it can be mentioned, for example PVA
(Polyvinyl Alcohol).As the material of protective film 26A, it can be mentioned, for example TAC (Triacetyl cellulose),
COP (CycloOlefin Polymer), PET (Polyethylene Terephthalate) etc..Material as protective film 26B
The material as protective film 26A can be used and the material enumerated in material.The structure of linear polarization plate 20 is not limited to Fig. 2 institute
The structure shown.For example, as long as linear polarization plate 20 has the side in protective film 26A and protective film 26B.
Phase plate 22 is laminated in linear polarization plate 20, and the rectilinearly polarized light for having passed through linear polarization plate 20 is converted into justifying
Polarised light.That is, phase plate 22 is functioned as the plate of λ/4.Phase plate 22 is pasted via such as adhesive layer (not shown)
Together in linear polarization plate 20.Phase plate 22 can be single layer structure, function as long as phase plate 22 is whole as the plate of λ/4
, it is possible to have multilayered structure.For example, phase plate 22 can have structure made of the plate of λ/2 and the board stacking of λ/4.
As shown in Figure 1, illumination part 14 configures 20 side of linear polarization plate possessed by circularly polarizing plate 12, to circularly polarizing plate
12 imaging area A examination light 28.Illumination part 14 has the light source 30 of outgoing inspection light 28.As light source 30, can arrange
Citing such as fluorescent lamp (especially high-frequency florescent lamp), metal halide lamp, halogen transmit lamp, light emitting diode (LED).This reality
The illumination part 14 for applying mode is also equipped with semi-transparent semi-reflecting lens 32, the inspection light 28 that will be exported from light source 30 by semi-transparent semi-reflecting lens 32
It is irradiated in the mode coaxial with the optical axis 34 of image pickup part 18 to imaging area A.In Fig. 1, for the ease of illustration and explanation and incite somebody to action
Check that the direction of travel of light 28 indicates with being slightly staggered with optical axis 34.
When from circularly polarizing plate 12, reflecting member 16 is configured in the side opposite with illumination part 14.In other words, it reflects
Component 16 is configured in 22 side of phase plate of circularly polarizing plate 12.Reflecting member 16 will be from the illuminated circularly polarizing plate for checking light 28
The light of 12 outputs are to 12 lateral reflection of circularly polarizing plate.As reflecting member 16, it can be mentioned, for example reflecting plate (reflecting mirrors).In circular polarization
When plate 12 extends to a direction, as reflecting member 16, the roller for conveying circularly polarizing plate 12 along the long side direction can be used.
In this case, as long as the roller surface to the roller as reflecting member 16 carries out mirror finish.
When from circularly polarizing plate 12, image pickup part 18 is configured in side identical with illumination part 14, to imaging area A
It is shot.Imaging area A is equivalent to the area of visual field of image pickup part 18.The example of image pickup part 18 is camera.Camera can be area
Zone sensors camera (dimension sensor camera), is also possible to line sensor camera.The example of area sensor cameras is CCD phase
Machine.Image pickup part 18 can also have the condensing optical system for assembling light to camera being separately arranged relative to camera.
As shown in Figure 1, flaw detection apparatus 10 can have resolver 36.Resolver 36 has such as computer
(operational part), the inspection for be present in the defect of circularly polarizing plate 12 for image data corresponding with image are handled.It is specific and
Speech, resolver 36 parse the image data (photographed data) inputted from image pickup part 18 to detect defect part.Solution
Analysis apparatus 36, which can have, to be implemented to make by the function of the highlighted image procossing of defect part, for the image of circularly polarizing plate 12
At the function etc. for the defect map (map) for indicating defective locations.As long as resolver 36 be able to carry out defect inspection processing and
The device of image procossing thus, is not limited.For example, can be as resolver 36 to check that processing is used and is made
The device made is also possible to be equipped with the personal computer of the software of inspection processing.Resolver 36 can have to camera shooting
The function that the camera shooting opportunity in portion 18 is controlled.
Next, explanation has used the defect detecting method of flaw detection apparatus 10.In order to check lacking for circularly polarizing plate 12
It falls into, the imaging area A by the inspection light 28 from illumination part 14 from 20 side of linear polarization plate to circularly polarizing plate 12 irradiates (illumination
Penetrate process).The inspection light 28 for being irradiated to imaging area A is exported through circularly polarizing plate 12 to 16 side of reflecting member.From illuminated
Check light that the circularly polarizing plate 12 of light 28 exports from reflecting member 16 to 12 lateral reflection of circularly polarizing plate (reflection process).From illumination
It penetrates in the state that portion 14 outputs and check light 28, image pickup part 18 is shot (shooting process) to imaging area A.It is clapping as a result,
It takes the photograph in process, shoots the imaging area A in the state of being illuminated using the light reflected by reflecting member 16.Based on shooting
The image of imaging area A obtained in process and the presence or absence of the defect that can judge circularly polarizing plate 12.About this point, Fig. 3 is utilized
It is illustrated.
Fig. 3 shows the polarization state of the inspection light 28 when being assumed to 12 non-existing defects of circularly polarizing plate.In Fig. 3, in order to
Illustrate and circularly polarizing plate 12 is resolved into linear polarization plate 20 and phase plate 22 illustrates.Check light 28 travel condition by
The arrow of dotted line indicates.
As shown in figure 3, the no polarization state of the component of the component comprising the first polarization direction p1 and the second polarization direction p2
Inspection light 28 it is incident from 20 side of linear polarization plate to circularly polarizing plate 12.In this case, from the output of linear polarization plate 20 and directly
The polarization axle 20a of linear polarization plate 20 becomes the rectilinearly polarized light of the first polarization direction p1 of parallel-nicol state.It is inclined from straight line
When the rectilinearly polarized light that vibration plate 20 exports is incident to phase plate 22, revolved from phase plate 22 towards the output of reflecting member 16 first
Turn the circularly polarized light of direction r1 and the circularly polarized light is from reflecting member 16 to 12 lateral reflection of circularly polarizing plate.It is exported from phase plate 22
Circularly polarized light by reflecting member 16 reflect when, the circle of i.e. the second direction of rotation r2 in the direction opposite with the first direction of rotation r1 is inclined
Vibration light (opposite circular polarization light) is incident again to phase plate 22.For example, in the case where the first direction of rotation r1 is clockwise situation,
The light returned from reflecting member 16 to phase plate 22 is circularly polarized light counterclockwise.The circularly polarized light of second direction of rotation r2 to
When phase plate 22 is incident, there is the second polarization direction p2 orthogonal with the first polarization direction p1 towards the output of linear polarization plate 20
Rectilinearly polarized light.The rectilinearly polarized light of second polarization direction p2 becomes relative to linear polarization plate 20 intersects Niccol shape
State, therefore ended by linear polarization plate 20.Therefore, the light reflected by reflecting member 16 can not be by circularly polarizing plate 12.As a result, by
The image that image pickup part 18 obtains is displayed as black black image.
Another program is exported when 12 existing defects of circularly polarizing plate from above-mentioned linear polarization plate 20 and phase plate 22
Light polarization state disorder due to defect.As a result, from a part in the light that reflecting member 16 returns to circularly polarizing plate 12
Pass through circularly polarizing plate 12.It is detected by the light of circularly polarizing plate 12 to image pickup part 18 is incident.As a result, working as circularly polarizing plate
When 12 existing defects, in the image obtained using image pickup part 18, defect part occurs as bright portion.
As described above, black image is obtained in image pickup part 18 when defect is not present in circularly polarizing plate 12, in contrast, when circle
When 12 existing defects of polarization plates, in the image that image pickup part 18 obtains, defect part occurs as bright portion.It is based on as a result,
The image obtained by image pickup part 18 can judge the presence or absence of the defect of circularly polarizing plate 12.In other words, pass through flaw detection apparatus 10
It is able to carry out the defect inspection of circularly polarizing plate 12.
Such as the apparatus structure as the defect for checking circularly polarizing plate 12 without using 16 ground of reflecting member, it is contemplated that Fig. 4 institute
The flaw detection apparatus 38 shown.Flaw detection apparatus 38 and the difference of the structure of flaw detection apparatus 10 are: illumination part 14
For light source 30 itself and light source 30 configuration relative to circularly polarizing plate 12 and the side opposite with image pickup part 18 (circularly polarizing plate 12
22 side of phase plate) this point；And 40 this point of circularly polarizing plate is configured between circularly polarizing plate 12 and light source 30.Circularly polarizing plate
40 be the circular polarization filter of inspection, generates the opposite circular polarization for the circularly polarized light generated by circularly polarizing plate 12
Light.It, can not by the circularly polarized light that circularly polarizing plate 40 generates if circularly polarizing plate 12 does not have defect in flaw detection apparatus 38
It is black image by circularly polarizing plate 12, therefore by the image that image pickup part 18 obtains.Another program, when circularly polarizing plate 12 includes defect
When, in defect part, the polarization state disorder of light, therefore a part of the circularly polarized light generated by circularly polarizing plate 40 is inclined by circle
Vibration plate 12.As a result, defect part occurs as bright portion in the image obtained using image pickup part 18.
In flaw detection apparatus 38 shown in Fig. 4, the defect of circularly polarizing plate 12 can be also checked as described above.However,
Whenever replacing the circularly polarizing plate 12 as check object, need to prepare circularly polarizing plate 40 corresponding with check object.Moreover, by
It is configured near light source 30 in by the circularly polarizing plate 40 of inspection, therefore leads to circularly polarizing plate there are the deterioration of circularly polarizing plate 40
A possibility that 40 replacement number increases.
In contrast, in flaw detection apparatus 10, relative to circularly polarizing plate 12 and with illumination part 14 and image pickup part
18 opposite sides configure reflecting member 16, are reflected using reflecting member 16 from circularly polarizing plate 12 to 16 side of reflecting member and are exported
Light.Thereby, it is possible to using the opposite circular polarization light for the circularly polarized light generated by circularly polarizing plate 12 come inclined to circle
Vibration plate 12 is illuminated.The circularly polarizing plate 40 for needing to check unlike flaw detection apparatus 38 shown in Fig. 4 as a result,.And
And the light exported from circularly polarizing plate 12 is reflected using reflecting member 16, thus it enables that being generated relative to by circularly polarizing plate 12
Circularly polarized light for opposite circular polarization light it is incident to circularly polarizing plate 12, therefore, can using a flaw detection apparatus 10
More accurately check the defect with the circularly polarizing plate 12 of different circularly polarized light characteristics.That is, flaw detection apparatus 10 has height
Versatility.Due to the circularly polarizing plate 40 for not needing to check as shown in FIG. 4, in flaw detection apparatus 10, also not
There are circularly polarizing plates 40 to deteriorate such problems.When circularly polarizing plate 12 is suitable for such as liquid crystal display panel, form shown in FIG. 1 is real
It is circularly polarizing plate 12 on border close to the state for using form.Therefore, in flaw detection apparatus 10 shown in Fig. 1, Neng Gou
The defect that circularly polarizing plate 12 is checked in the state of form is used close to circularly polarizing plate 12.As a result, being filled in defect inspection
It sets in 10, the defect that should be excluded in the case where circularly polarizing plate 12 is using form can be effectively detected out.
Next, the variation of description defect check device 10.
(variation 1)
Fig. 5 is the schematic diagram of the flaw detection apparatus 10A of the variation 1 of first embodiment.Flaw detection apparatus 10A with
The main distinction of flaw detection apparatus 10 is that illumination part 14 is configured to the optical axis intersected with the optical axis 34 with image pickup part 18
(optical axis of illumination part) 42 will check that light 28 irradiates this point to imaging area A.The illumination part 14 of variation 1 can be light
Source 30 itself.In flaw detection apparatus 10A, as shown in figure 5, reflecting member 16 is preferably with the reflecting surface and circle of reflecting member 16
The mode that the phase plate 22 of polarization plates 12 connects configures.The inspection light of circularly polarizing plate 12 is irradiated to from illumination part 14 as a result,
28 and the light that is reflected by reflecting member 16 can be by the roughly the same region in circularly polarizing plate 12.As long as being shone from illumination part 14
The light for being mapped to the inspection light 28 of circularly polarizing plate 12 and being reflected by reflecting member 16 can be by roughly the same in circularly polarizing plate 12
Region, reflecting member 16 can also be separated from the phase plate 22 of circularly polarizing plate 12.Reflecting member 16 can be reflecting plate
(reflecting mirror) is also possible to roller surface by the roller of mirror finish.The roller can also be used for the conveying of such as circularly polarizing plate 12.Defect
Check device 10A is identical as the structure of flaw detection apparatus 10 other than the configuration relation of illumination part 14 and image pickup part 18.
As a result, flaw detection apparatus 10A and used flaw detection apparatus 10A defect detecting method have and flaw detection apparatus 10
And at least identical function and effect of the defect detecting method of flaw detection apparatus 10 are used.
(variation 2)
Fig. 6 is the schematic diagram of the flaw detection apparatus 10B of the variation 2 of first embodiment.Flaw detection apparatus 10B with
The main distinction of flaw detection apparatus 10 is, illumination part 14 have the multiple light sources 30 that will be surrounded around image pickup part 18 this
A bit.In Fig. 6, in order to illustrate conveniently, 2 light sources 30 are shown, but be optical axis of the multiple light sources 30 around image pickup part 18 in fact
34 are configured in a manner of annularly surrounding image pickup part 18.It is easy equably to irradiate imaging area A as a result,.Of light source 30
As long as number can equably irradiate the number of imaging area A.
In flaw detection apparatus 10B, for the reason same as the case where variation 1, as shown in fig. 6, reflecting member
16 preferably configure in such a way that the reflecting surface of reflecting member 16 connects with the phase plate 22 of circularly polarizing plate 12.As long as being irradiated from light
The light that portion 14 is irradiated to the inspection light 28 of circularly polarizing plate 12 and is reflected by reflecting member 16 can be by big in circularly polarizing plate 12
Identical region is caused, reflecting member 16 can also be separated from the phase plate 22 of circularly polarizing plate 12.The example of reflecting member 16
Son also with variation 1 the case where it is identical.Flaw detection apparatus 10B in addition to illumination part 14 and image pickup part 18 configuration relation with
Outside, identical as the structure of flaw detection apparatus 10.As a result, flaw detection apparatus 10B and used flaw detection apparatus 10B lack
Falling into inspection method has and flaw detection apparatus 10 and has used the defect detecting method of flaw detection apparatus 10 at least identical
Function and effect.
(second embodiment)
As second embodiment, illustrate the manufacturer of the circularly polarizing plate 12 of the check object as first embodiment
Method.Fig. 7 is the flow chart of the manufacturing method of the circularly polarizing plate of the check object as first embodiment.In manufacture circularly polarizing plate
When 12, the defect including the bonding process S01, inspection circularly polarizing plate 12 that are bonded linear polarization plate 20 with phase plate 22 is lacked
Fall into inspection operation S02.Hereinafter, as long as no being particularly limited to, then to using the linear polarization plate 20 of strip and the phase difference of strip
Plate 22 is illustrated come the method for manufacturing circularly polarizing plate 12.
[bonding process]
In bonding process S01, on one side by the linear polarization plate 20 of strip and the phase plate 22 of strip respectively along long side
Direction conveying, makes linear polarization plate 20 opposed with phase plate 22 on one side and is bonded them via such as adhesive layer.Bonding
Oxidant layer can be to be formed and to coating adhesive between them when being bonded linear polarization plate 20 with phase plate 22, example
Such as, adhesive layer can be pre-formed in at least one party in linear polarization plate 20 and phase plate 22.
[defect inspection process]
In defect inspection process S02, the conduct linear polarization plate 20 and phase that will be obtained on one side by bonding process S01
The circularly polarizing plate 12 of the laminated body of poor plate 22 conveys along the long side direction, on one side by configuring the dress of the defect inspection on transport path
Set the defect inspection of 10 implementation circularly polarizing plates 12.The defect detecting method such as first embodiment of flaw detection apparatus 10 is utilized
Middle explanation is such.In while conveying circularly polarizing plate 12 in such a way that flaw detection apparatus 10 checks circularly polarizing plate 12,
A roller in multiple rollers of a conveying mechanism in the conveying mechanism for constituting circularly polarizing plate 12 can be used as defect inspection
Reflecting member 16 possessed by device 10.At this point, the roller as reflecting member 16 is preferably roller surface by the roller of mirror finish.
The manufacturing method of circularly polarizing plate 12 may include will be inclined to circle by the defect information that defect inspection process S02 is obtained
The marking procedures that vibration plate 12 marks.In marking procedures, as long as based on the image obtained by image pickup part 18, using with pen etc.
The mark for indicating defect information is invested circularly polarizing plate 12 by the labelling apparatus of marking mechanism.In flaw detection apparatus 10 as schemed
In mode shown in 1 with resolver 36, for example, resolver 36 can be made based on the image obtained by image pickup part 18
At the defect map for indicating the defects of image position, above-mentioned labelling apparatus is based on defect map and assigns mark, example to defective locations
Such as, defect information can be written in edge of circularly polarizing plate 12 etc..In this way, if the mark write-in circle for indicating defective locations is inclined
Vibration plate 12 can cut out then when cutting out the circularly polarizing plate 12 of monolithic from the circularly polarizing plate 12 of strip and not have defective monolithic
Circularly polarizing plate 12, or effectively remove the circularly polarizing plate 12 comprising defect from the circularly polarizing plate 12 of the multiple monolithics cut out
It goes.Alternatively, can be according to defect inspection process S02's as a result, the linear polarization plate 20 that is bonded in bonding process of replacement and phase
At least one party in potential difference plate 22.
In the manufacturing method of circularly polarizing plate 12, using having used flaw detection apparatus 10 shown in first embodiment
Defect detecting method checks circularly polarizing plate 12.Thus, for example in bonding process S01, even if for example having replaced phase
Potential difference plate 22 also can not change flaw detection apparatus 10 and manufacture circularly polarizing plate 12 using identical manufacturing line.In addition, with
It is compared using the case where flaw detection apparatus 38 shown in Fig. 4, does not need circularly polarizing plate 40, therefore also do not needed and circularly polarizing plate
The replacement operation of the associated circularly polarizing plate 40 of 40 deterioration.As a result, can effectively implement defect inspection process S02.This
Outside, it in the case where manufacturing for example suitable for the circularly polarizing plate of liquid crystal display panel 12, in defect inspection process S02, can connect
It is bordering on the defect inspection using implementation circularly polarizing plate 12 in the state of form of circularly polarizing plate 12.Therefore, it can reliably detect
The defect that should be excluded in the case where circularly polarizing plate 12 is using form out, therefore the fabrication yield of circularly polarizing plate 12 is improved.
The manufacturing method of circularly polarizing plate 12 can include forming linear polarization plate 20 and phase before such as bonding process S01
The process of at least one party in potential difference plate 22.
In this second embodiment, the manufacture of the circularly polarizing plate 12 using flaw detection apparatus 10 shown in FIG. 1 is illustrated
Method.However, it is also possible to substitutional defect check device 10 and use flaw detection apparatus 10A shown in fig. 5 and it is shown in fig. 6 lack
Fall into check device 10B.
(third embodiment)
As a third embodiment, illustrate that check object is to generate the mode of the phase plate of circularly polarized light.Fig. 8 is third
The schematic diagram of the flaw detection apparatus 10C of embodiment.Flaw detection apparatus 10C is generated to by incident straight polarised light
The device that the defect of the phase plate 44 of circularly polarized light is checked.The phase of check object as flaw detection apparatus 10C
Poor plate 44 can be the phase plate 22 used in the circularly polarizing plate 12 of the check object as first embodiment.
The main distinction of the structure of flaw detection apparatus 10C and the flaw detection apparatus 10B of variation 2 shown in fig. 6 exists
In, have between the phase plate 44 and illumination part 14 and image pickup part 18 as check object linear polarization plate 46 this
Point.Illustrate flaw detection apparatus 10C centered on this point.
Linear polarization plate 46 is the linear polarization filter of the inspection with linear polarization characteristic, for checking phase plate 22
Mating plate.The illumination part 14 that flaw detection apparatus 10C has makes to check light 28 by linear polarization plate 46 to imaging area A
Irradiation.Illumination part 14 has the multiple light sources 30 for surrounding image pickup part 18.The number and configuration of the light source 30 of illumination part 14
The case where state is with flaw detection apparatus 10B is identical.The image pickup part 18 that flaw detection apparatus 10C has passes through linear polarization plate
46 shoot the imaging area A of phase plate 44.
Illustrate the defect detecting method for the phase plate 44 that flaw detection apparatus 10C is utilized.Firstly, from illumination part 14
By linear polarization plate 46 to the imaging area A examination light 28 (light irradiation process) of phase plate 44.It is irradiated to camera shooting
The inspection light 28 of region A is exported through phase plate 44 to 16 side of reflecting member.The light exported from phase plate 44 is by reflection structure
Part 16 is to 22 lateral reflection of phase plate (reflection process).In the state of outputing inspection light 28 from illumination part 14, image pickup part
18 are shot (shooting process) by linear polarization plate 46 to imaging area A.As a result, in shooting process, shooting is utilized
Imaging area A in the state of being illuminated by the light that reflecting member 16 reflects.
In light irradiation process, make to check that light 28 is shone by linear polarization plate 46 to the imaging area A of phase plate 22
It penetrates, therefore incident to phase plate 44 relative to the rectilinearly polarized light that linear polarization plate 46 becomes parallel-nicol state.
If phase plate 44 does not include defect, circularly polarized light is exported from phase plate 44 to reflecting member 16.In order to
Convenient for explanation, with first embodiment the case where is same, and the light exported from phase plate 44 is known as the first direction of rotation r1's
Circularly polarized light.When the light exported from phase plate 44 is reflected by reflecting member 16, relative to the light exported from phase plate 44
For the opposite circular polarization light i.e. circularly polarized light of the second direction of rotation r2 it is incident to phase plate 44.As a result, from phase plate
44 become linear polarization plate 46 to 46 side output phase of linear polarization plate the rectilinearly polarized light for intersecting Niccol state.Its result
It is that the image obtained from being shot as linear polarization plate 46 to imaging area A as image pickup part 18 is black image.
Another program, it is inclined at defect part when light passes through phase plate 44 if phase plate 44 generates defect
Vibration state generates disorder.Therefore, after from the light that reflecting member 16 reflects to phase plate 44 again incidence, from phase plate 44
The light exported to 46 side of linear polarization plate has the component for becoming parallel-nicol state relative to linear polarization plate 46.Its result
Be that in the image obtained by image pickup part 18, the defect part of phase plate 44 occurs as bright portion, thus by by
The image that image pickup part 18 obtains can judge the presence or absence of defect.In other words, in flaw detection apparatus 10C, it is able to carry out phase
The defect inspection of poor plate 44.
In flaw detection apparatus 10C, relative to phase plate 44 and with illumination part 14 and opposite with image pickup part 18
Side configure reflecting member 16, the light exported from phase plate 44 to 16 side of reflecting member is reflected using reflecting member 16.
Therefore, the opposite circular polarization light for the circularly polarized light generated by phase plate 44 can be utilized come to phase plate 44
It is illuminated.It does not need to prepare 40 phase of circularly polarizing plate with inspection possessed by flaw detection apparatus 38 shown in Fig. 4 as a result,
When inspection phase plate.Moreover, the light exported from phase plate 44 is reflected using reflecting member 16, thus it enables that
Opposite circular polarization light for the circularly polarized light generated from phase plate 44 is incident to phase plate 44, therefore, passes through
One flaw detection apparatus 10C can more accurately check the defect of the different phase plate 44 of phase difference characteristics.That is, defect is examined
Device 10C is looked into high universalizable.
The defect detecting method and flaw detection apparatus 10C for having used flaw detection apparatus 10C can be suitable for phase difference
The manufacturing method of plate 44.In this manufacturing method, firstly, forming the phase plate 44 (phase plate formation process) of strip.Phase
Potential difference plate 44 is formed for example, by carrying out twin shaft extension to resin film.In the situation with multi-layer structure of phase plate 44,
Phase plate 44 is formed by being bonded multiple phase plates.
After foring phase plate 44, phase plate 44 is conveyed along its longitudinal direction on one side, on one side using configuration
Defect inspection (the defect inspection work of flaw detection apparatus 10C implementing phase difference plate 44 as described above on transport path
Sequence).By the presence or absence of the defect of phase plate 44 known to defect inspection process, therefore the phase not comprising defect can be produced
Poor plate 44.
In the manufacturing method of phase plate 44, examined by using the defect detecting method of flaw detection apparatus 10C
Look into phase plate 44.Thus, for example, in phase plate formation process, even if forming the phase with different phase difference characteristics
Potential difference plate 44 also can not change flaw detection apparatus 10C and manufacture phase plate 44 using identical manufacturing line.
While conveying phase plate 44 by flaw detection apparatus 10C come check phase plate 44 in the way of in,
It can be by a roller in multiple rollers of a conveying mechanism in the conveying mechanism for constituting phase plate 44 used as defect
Reflecting member 16 possessed by check device 10C.At this point, the roller as reflecting member 16 is preferably roller surface by mirror finish
Roller.
The manufacturing method of phase plate 44 may include will be by defect information that defect inspection process obtains to phase difference
The marking procedures that plate 44 marks.Marking procedures can be identical as the marking procedures illustrated in second embodiment.If will indicate
The mark of defective locations is written to phase plate 44, then when cutting out the phase plate 44 of monolithic from the phase plate 44 of strip,
The phase plate 44 for not having defective monolithic can be cut out, or is effectively removed from the phase plate 44 of the multiple monolithics cut out
Remove the phase plate 44 comprising defect.Furthermore, it is possible to change phase plate formation process according to the result of defect inspection process
Condition.
The manufacturing method of phase plate 44 for example may include in the manufacturing method of the circularly polarizing plate 12 of second embodiment
A part.That is, the phase plate 22 being bonded in the bonding process S01 of the manufacturing method of circularly polarizing plate 12 can be by above-mentioned
The manufacturing method of phase plate manufactures.
As the illumination part 14 of flaw detection apparatus 10C, the mode of the second variation of first embodiment is instantiated.
However, illumination part 14 can be as shown in Figure 1 illumination part 14 like that have light 28 will be checked with the optical axis with image pickup part 18
The structure that 34 coaxial modes are irradiated to phase plate 22.Or can be as first variation, illumination part 14 will check
The optical axis direction imaging area A irradiation that light 28 is intersected with the optical axis 34 with image pickup part 18.
The present invention is not limited to the various embodiments and variation illustrated, including is disclosed by technical solution and and technology
Whole changes in the scheme equivalent meaning and range.As long as example, illumination part shown in FIG. 1 can will check light with take the photograph
As portion light shaft coaxle mode to imaging area irradiate, be not limited to the mode for having semi-transparent semi-reflecting lens.Above-mentioned
In various embodiments, the case where illustrating circularly polarized light.However, the present invention is for the elliptically polarized light other than circularly polarized light
It can be applicable in.Therefore, it is inclined that the flaw detection apparatus and defect detecting method illustrated in above-mentioned various embodiments can be substitution circle
Vibration plate and the device and method for checking the defect of elliptical polarization plate.Equally, the defect inspection illustrated in above-mentioned various embodiments
Device and method can be for rectilinearly polarized light is replaced be converted to circularly polarized light and be converted to elliptically polarized light and export
The device and method that the defect of phase plate is checked.Equally, the present invention also relates to include the defect for checking elliptical polarization plate
Defect detecting method elliptical polarization plate manufacturing method.
Claims (16)
1. a kind of flaw detection apparatus, to the circle with linear polarization plate He the phase plate for being laminated in the linear polarization plate
Polarization plates or the defect of elliptical polarization plate checked,
The flaw detection apparatus is characterized in that having:
Illumination part configures linear polarization plate side, Xiang Suoshu possessed by the circularly polarizing plate or elliptical polarization plate
The imaging area examination light of circularly polarizing plate or elliptical polarization plate；
Reflecting member, configuration is opposite with the illumination part one when from the circularly polarizing plate or elliptical polarization plate
Side, will be from the light that the illuminated circularly polarizing plate for checking light or elliptical polarization plate export to the circularly polarizing plate or ellipse
Circularly polarizing plate lateral reflection；And
Image pickup part, configuration is identical with the illumination part one when from the circularly polarizing plate or elliptical polarization plate
Side shoots the imaging area.
2. a kind of flaw detection apparatus checks the phase that rectilinearly polarized light is converted into circularly polarized light or elliptically polarized light and is exported
The defect of potential difference plate,
The flaw detection apparatus is characterized in that having:
Linear polarization plate；
Illumination part makes to check that light is irradiated by the linear polarization plate to the imaging area of the phase plate；
Reflecting member, configuration, will be from being shone in the side opposite with the illumination part when from the phase plate
The light of the phase plate output for checking light has been penetrated to the phase plate lateral reflection；And
Image pickup part, configuration is in side identical with the illumination part when from the phase plate, by described straight
Linear polarization plate shoots the imaging area.
3. flaw detection apparatus according to claim 1 or 2, wherein
The illumination part irradiates the inspection light in a manner of with the light shaft coaxle of the image pickup part to the imaging area.
4. flaw detection apparatus according to claim 1 or 2, wherein
Imaging area irradiation described in the optical axis direction that the inspection light is intersected with the optical axis with the image pickup part by the illumination part.
5. according to claim 1, flaw detection apparatus described in any one of 2,4, wherein
The illumination part has the multiple light sources configured in the mode surrounded around the image pickup part.
6. flaw detection apparatus according to any one of claims 1 to 5, wherein
The reflecting member is surface by the roller of mirror finish.
7. a kind of defect detecting method, to the circle with linear polarization plate He the phase plate for being laminated in the linear polarization plate
Polarization plates or the defect of elliptical polarization plate checked,
The defect detecting method is characterised by comprising:
By camera shooting of the inspection light from linear polarization plate side to the circularly polarizing plate or elliptical polarization plate from illumination part
The light irradiation process of area illumination；
It will be from the light that the illuminated circularly polarizing plate for checking light or elliptical polarization plate export to institute using reflecting member
State the reflection process of circularly polarizing plate or elliptical polarization plate lateral reflection；And
The shooting process of the imaging area is shot by image pickup part, wherein the image pickup part is from the circularly polarizing plate or ellipse
Configuration is in side identical with the illumination part when circularly polarizing plate is observed.
8. defect detecting method according to claim 7, wherein
The reflecting member is surface by the roller of mirror finish,
On one side using the roller conveying strip the circularly polarizing plate or elliptical polarization plate, implement on one side the smooth irradiation process,
The reflection process and the shooting process.
9. a kind of defect detecting method checks the phase that rectilinearly polarized light is converted into circularly polarized light or elliptically polarized light and is exported
The defect of potential difference plate,
The defect detecting method is characterised by comprising:
The illumination for irradiating the inspection light from illumination part to the imaging area of the phase plate by linear polarization plate
Penetrate process；
It will be from the light that the illuminated phase plate for checking light exports to the phase plate side using reflecting member
The reflection process of reflection；And
The shooting process of the imaging area is shot by the linear polarization plate by image pickup part, wherein the image pickup part exists
Configuration is in side identical with the illumination part when from the phase plate.
10. defect detecting method according to claim 9, wherein
The reflecting member is surface by the roller of mirror finish,
On one side using the phase plate of roller conveying strip, implement the smooth irradiation process, the reflection process on one side
And the shooting process.
11. the defect detecting method according to any one of claim 7~10, wherein
In the smooth irradiation process, by the inspection light to the imaging region in a manner of with the light shaft coaxle of the image pickup part
Domain irradiation.
12. the defect detecting method according to any one of claim 7~10, wherein
In the smooth irradiation process, the optical axis that is intersected with the optical axis with the image pickup part is by the inspection light to the imaging region
Domain irradiation.
13. the defect detecting method according to any one of claim 7~10,12, wherein
In the smooth irradiation process, the inspection light from multiple light sources is irradiated to the imaging area, wherein described
Multiple light sources are configured in the mode surrounded around the image pickup part.
14. a kind of manufacturing method of circularly polarizing plate, which is characterized in that
Including defect detecting method described in claim 7 or 8, the circular polarization is checked using the defect detecting method
Plate.
15. a kind of manufacturing method of elliptical polarization plate, which is characterized in that
Including defect detecting method described in claim 7 or 8, the elliptical polarization is checked using the defect detecting method
Plate.
16. a kind of manufacturing method of phase plate, which is characterized in that
Including defect detecting method described in claim 9 or 10.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017176088 | 2017-09-13 | ||
| JP2017-176088 | 2017-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109490323A true CN109490323A (en) | 2019-03-19 |
Family
ID=65689896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811059584.4A Pending CN109490323A (en) | 2017-09-13 | 2018-09-11 | The manufacturing method of flaw detection apparatus, defect detecting method, the manufacturing method of circularly polarizing plate or elliptical polarization plate and phase plate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7075853B2 (en) |
| KR (1) | KR20190030168A (en) |
| CN (1) | CN109490323A (en) |
| TW (1) | TWI782086B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721776A (en) * | 2019-03-22 | 2020-09-29 | 住友化学株式会社 | Inspection method and inspection apparatus |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102086407B1 (en) * | 2019-05-07 | 2020-03-09 | 주식회사 코엠에스 | PCB Plate Film Monitoring System |
| JP7413211B2 (en) * | 2020-08-28 | 2024-01-15 | 住友化学株式会社 | Inspection method |
| JP7413209B2 (en) * | 2020-08-28 | 2024-01-15 | 住友化学株式会社 | Inspection method |
| JP7413210B2 (en) * | 2020-08-28 | 2024-01-15 | 住友化学株式会社 | Inspection method |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62116236A (en) * | 1985-11-15 | 1987-05-27 | Toshiba Corp | Apparatus for inspecting roll |
| JPH0755721A (en) * | 1993-08-20 | 1995-03-03 | Konica Corp | Inspecting device for sheet material |
| JP2001159582A (en) * | 1999-12-01 | 2001-06-12 | Sumitomo Chem Co Ltd | Method for inspecting composite polarizing plate |
| JP2002250695A (en) * | 2001-02-26 | 2002-09-06 | Sekisui Chem Co Ltd | Detector for detecting defect in multilayered film |
| JP2003344302A (en) * | 2002-05-31 | 2003-12-03 | Sumitomo Chem Co Ltd | Method and equipment for inspecting polarization film |
| JP2006003226A (en) * | 2004-06-17 | 2006-01-05 | Toray Ind Inc | Defect inspection device for laminated film |
| JP2007185938A (en) * | 2005-12-14 | 2007-07-26 | Sekisui Chem Co Ltd | Method for manufacturing optical film and roll |
| JP2008045959A (en) * | 2006-08-12 | 2008-02-28 | Sharp Corp | Device and method for inspecting liquid crystal display panel |
| US20090288754A1 (en) * | 2006-01-11 | 2009-11-26 | Nitto Denko Corporation | Layered film fabrication method, layered film defect detection method, layered film defect detection device, layered film, and image display device |
| JP2013036888A (en) * | 2011-08-09 | 2013-02-21 | Mitsubishi Electric Corp | Silicon substrate inspection device and inspection method |
| WO2013191133A1 (en) * | 2012-06-18 | 2013-12-27 | 富士フイルム株式会社 | Inspection device and inspection method for pattern phase difference filter |
| JP2014206449A (en) * | 2013-04-12 | 2014-10-30 | 三菱レイヨン株式会社 | Apparatus and method of inspecting mirror-finished member, method of manufacturing mirror-finished member, and manufacturing method of optical film |
| DE102013106231B3 (en) * | 2013-06-14 | 2014-12-11 | Von Ardenne Gmbh | A process for producing a roll surface of a coating roll and use of a roll produced by the process |
| JP2015040835A (en) * | 2013-08-23 | 2015-03-02 | 旭硝子株式会社 | Defect inspection device and defect inspection method for transparent tabular body |
| JP2016011837A (en) * | 2014-06-27 | 2016-01-21 | 三菱レイヨン株式会社 | Method for inspecting mold and method for manufacturing mold |
| US20160187262A1 (en) * | 2014-12-29 | 2016-06-30 | Samsung Display Co., Ltd. | Inspection device of display device and inspection method of display device |
| WO2017110342A1 (en) * | 2015-12-24 | 2017-06-29 | コニカミノルタ株式会社 | Polarizing plate protective film, production method for same, and polarizing plate |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS528974B2 (en) | 1971-12-23 | 1977-03-12 | ||
| JP2004198163A (en) * | 2002-12-17 | 2004-07-15 | Sumitomo Chem Co Ltd | Defect inspection method for protective film adhered polarizing plate |
| JP2005009919A (en) * | 2003-06-17 | 2005-01-13 | Taiyo Denki Kk | Inspection device and inspecting method for polarization plate with protective film |
| FI20095794A0 (en) | 2009-07-16 | 2009-07-16 | Sparklike Ab Oy | A method and system for examining the properties of a reflective transparent object |
| JP5794070B2 (en) | 2011-09-22 | 2015-10-14 | 大日本印刷株式会社 | Film inspection system and film inspection method |
| JP2015137927A (en) | 2014-01-22 | 2015-07-30 | 株式会社ブルービジョン | imaging device and inspection system |
| CN107615051A (en) * | 2015-06-05 | 2018-01-19 | 住友化学株式会社 | The defects of transmitance film inspection method, the manufacture method of linear polarization piece film and the manufacture method of polarization plates |
-
2018
- 2018-09-10 JP JP2018168996A patent/JP7075853B2/en active Active
- 2018-09-10 KR KR1020180107575A patent/KR20190030168A/en not_active Application Discontinuation
- 2018-09-10 TW TW107131716A patent/TWI782086B/en active
- 2018-09-11 CN CN201811059584.4A patent/CN109490323A/en active Pending
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62116236A (en) * | 1985-11-15 | 1987-05-27 | Toshiba Corp | Apparatus for inspecting roll |
| JPH0755721A (en) * | 1993-08-20 | 1995-03-03 | Konica Corp | Inspecting device for sheet material |
| JP2001159582A (en) * | 1999-12-01 | 2001-06-12 | Sumitomo Chem Co Ltd | Method for inspecting composite polarizing plate |
| JP2002250695A (en) * | 2001-02-26 | 2002-09-06 | Sekisui Chem Co Ltd | Detector for detecting defect in multilayered film |
| JP2003344302A (en) * | 2002-05-31 | 2003-12-03 | Sumitomo Chem Co Ltd | Method and equipment for inspecting polarization film |
| JP2006003226A (en) * | 2004-06-17 | 2006-01-05 | Toray Ind Inc | Defect inspection device for laminated film |
| JP2007185938A (en) * | 2005-12-14 | 2007-07-26 | Sekisui Chem Co Ltd | Method for manufacturing optical film and roll |
| US20090288754A1 (en) * | 2006-01-11 | 2009-11-26 | Nitto Denko Corporation | Layered film fabrication method, layered film defect detection method, layered film defect detection device, layered film, and image display device |
| JP2008045959A (en) * | 2006-08-12 | 2008-02-28 | Sharp Corp | Device and method for inspecting liquid crystal display panel |
| JP2013036888A (en) * | 2011-08-09 | 2013-02-21 | Mitsubishi Electric Corp | Silicon substrate inspection device and inspection method |
| WO2013191133A1 (en) * | 2012-06-18 | 2013-12-27 | 富士フイルム株式会社 | Inspection device and inspection method for pattern phase difference filter |
| JP2014206449A (en) * | 2013-04-12 | 2014-10-30 | 三菱レイヨン株式会社 | Apparatus and method of inspecting mirror-finished member, method of manufacturing mirror-finished member, and manufacturing method of optical film |
| DE102013106231B3 (en) * | 2013-06-14 | 2014-12-11 | Von Ardenne Gmbh | A process for producing a roll surface of a coating roll and use of a roll produced by the process |
| JP2015040835A (en) * | 2013-08-23 | 2015-03-02 | 旭硝子株式会社 | Defect inspection device and defect inspection method for transparent tabular body |
| JP2016011837A (en) * | 2014-06-27 | 2016-01-21 | 三菱レイヨン株式会社 | Method for inspecting mold and method for manufacturing mold |
| US20160187262A1 (en) * | 2014-12-29 | 2016-06-30 | Samsung Display Co., Ltd. | Inspection device of display device and inspection method of display device |
| WO2017110342A1 (en) * | 2015-12-24 | 2017-06-29 | コニカミノルタ株式会社 | Polarizing plate protective film, production method for same, and polarizing plate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721776A (en) * | 2019-03-22 | 2020-09-29 | 住友化学株式会社 | Inspection method and inspection apparatus |
| CN111721776B (en) * | 2019-03-22 | 2024-02-20 | 住友化学株式会社 | Inspection method and inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201918702A (en) | 2019-05-16 |
| TWI782086B (en) | 2022-11-01 |
| JP2019053057A (en) | 2019-04-04 |
| KR20190030168A (en) | 2019-03-21 |
| JP7075853B2 (en) | 2022-05-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109490323A (en) | The manufacturing method of flaw detection apparatus, defect detecting method, the manufacturing method of circularly polarizing plate or elliptical polarization plate and phase plate | |
| JP5594254B2 (en) | Silicon substrate inspection apparatus and inspection method | |
| JP2017215277A (en) | Defect inspection system, film manufacturing device and defect inspection method | |
| KR101300132B1 (en) | Apparatus for detecting particle in flat glass and detecting method using same | |
| JP5274622B2 (en) | Defect inspection apparatus and method | |
| TWI775964B (en) | Defect inspection apparatus | |
| WO2016088623A1 (en) | Substrate examination device | |
| JP7184954B2 (en) | Defect inspection imaging device, defect inspection system, film manufacturing device, defect inspection imaging method, defect inspection method, and film manufacturing method | |
| KR20180010982A (en) | Inspection apparatus and inspection method | |
| WO2015182541A1 (en) | Laminated polarizing film defect inspection method, production method, and production device | |
| JP2015219085A (en) | Substrate inspection device | |
| WO2013035524A1 (en) | Transparent electrode observation device and transparent electrode observation method | |
| JP2013210245A (en) | Film inspection system, and film inspection method | |
| CN107764831A (en) | A kind of optical flat detection means | |
| JP2015194348A (en) | Inspection system and inspection method | |
| JP7390278B2 (en) | Appearance inspection method, appearance inspection device, processing method and device for structures | |
| KR102632190B1 (en) | Imaging apparatus for obtaining image of polarizing film, inspection apparatus, and inspection method | |
| JP2021025893A (en) | Method for inspecting filmed substrate, method for manufacturing filmed substrate, and device for inspecting filmed substrate | |
| CN203069521U (en) | Optical image detection device | |
| KR20200000221A (en) | System for inspecting foreign matter of display unit | |
| JP2018009810A (en) | Defect inspection system and film manufacturing device | |
| KR20220112567A (en) | Defect inspection apparatus | |
| JPH11312241A (en) | Pattern inspecting device | |
| JP2019138696A (en) | Visual inspection method and visual inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |