CN206502890U - A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell - Google Patents
A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell Download PDFInfo
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- CN206502890U CN206502890U CN201720069088.1U CN201720069088U CN206502890U CN 206502890 U CN206502890 U CN 206502890U CN 201720069088 U CN201720069088 U CN 201720069088U CN 206502890 U CN206502890 U CN 206502890U
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- guide shell
- face
- ring groove
- positioning ring
- supported
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Abstract
The utility model specifically discloses a kind of Czochralski method mono-crystal furnace two plane type guide shell support, body is supported including guide shell, guide shell support body includes the first face and the second face, first face ecto-entad is disposed with heat-preservation cylinder locating slot, upper guide shell positioning ring groove, guide shell entrance is provided with the upper guide shell positioning ring groove, second face ecto-entad is disposed with lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, the lower guide shell positioning ring groove and is provided with lower guide shell entrance.The two plane type guide shell is supported when in use, first installed and used according to the first face, when in use chipping phenomenon occurs for guide shell support, guide shell support is turned upside down and installed and used, it can avoid due to the influence that chipping material falls into molten silicon and brought to production caused by edge chipping, while solving the problem of guide shell support can not be continuing with after generation chipping phenomenon.
Description
Technical field
The utility model is related to single crystal growing furnace technical field, especially, is related to a kind of Czochralski method mono-crystal furnace two plane type water conservancy diversion
Cylinder support.
Background technology
Single crystal growing furnace be one kind in inert gas (based on argon gas) environment, with graphite heater by polycrystalline materials such as polysilicons
Fusing, and with the equipment of Grown by CZ Method dislocation-free monocrystalline.Vertical pulling method is prepared in monocrystalline silicon technology, and hot systems are by multiple parts groups
Conjunction is formed, and is reached supporting and space, is kept the purpose of internal temperature.
Wherein guide shell support, positioned at the surface of hot systems, is the critical component for supporting guide shell, by top low temperature argon
The influence of gas and bottom high temperature melting silicon, can occur chipping phenomenon, chipping material falls into molten silicon can be to life after using certain stove number
Production brings extreme influence.
Found in production practices, chipping frequently occur in part on along position, it is and lower intact along position, but because of positioning
The problem of design, causes guide shell support not continue with.
Utility model content
For problems of the prior art, the purpose of this utility model is that providing a kind of Czochralski method mono-crystal furnace uses double
Face formula guide shell support, solves the problem of original guide shell support causes not using completely because of one side chipping.
In order to achieve the above object, the utility model is achieved using following technical scheme.
A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell, including guide shell support body, it is characterised in that this is led
Flow cartridge support body include the first face and the second face, first face ecto-entad be disposed with heat-preservation cylinder locating slot, on
Be provided with guide shell entrance at guide shell positioning ring groove, the upper guide shell positioning ring groove, second face ecto-entad according to
Secondary be provided with lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, the lower guide shell positioning ring groove is provided with lower guide shell
Entrance.
Supported according to Czochralski method mono-crystal furnace of the present utility model with two plane type guide shell, guide shell support body includes having
The first face and the second face of reverse symmetry structure, the first face and the second face ecto-entad be disposed with heat-preservation cylinder locating slot,
Upper guide shell positioning ring groove, the second face ecto-entad is disposed with lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, above leads
It is provided with flow cartridge positioning ring groove at guide shell entrance, lower guide shell positioning ring groove and is provided with lower guide shell entrance；Using
When, first install and use, when in use chipping phenomenon occurs for guide shell support, guide shell is supported according to the first face
Lower overturn is installed and used, you can avoided due to the shadow that chipping material falls into molten silicon and brought to production caused by edge chipping
Ring, while solving the problem of guide shell support can not be continuing with after generation chipping phenomenon.
Preferably, the material of the guide shell support body is isostatic pressing formed graphite.
Brief description of the drawings
The utility model is described in further details with specific embodiment below in conjunction with the accompanying drawings.
Fig. 1 is a kind of overlooking the structure diagram of Czochralski method mono-crystal furnace two plane type guide shell support of the present utility model；
Fig. 2 is A-B cross section structure schematic diagrams in Fig. 1；
In figure：Heat-preservation cylinder locating slot on 1；Guide shell positioning ring groove on 2；Guide shell entrance on 3.
Embodiment
Embodiment of the present utility model is described in detail below in conjunction with embodiment, but those skilled in the art
Member will be understood that the following example is merely to illustrate the utility model, and is not construed as limiting scope of the present utility model.
With reference to Fig. 1, a kind of Czochralski method mono-crystal furnace two plane type guide shell provided according to the utility model is supported, including is led
Flow cartridge supports body, it is characterised in that guide shell support body includes the first face and the second face, first face ecto-entad
It is disposed with to be provided with heat-preservation cylinder locating slot 1, upper guide shell positioning ring groove 2, the upper guide shell positioning ring groove 2 and leads
Flow cartridge entrance 3, second face ecto-entad is disposed with lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, it is described under
Lower guide shell entrance is provided with guide shell positioning ring groove.
In the embodiment above, guide shell support body includes the first face and the second face with reverse symmetry structure, the
Upper heat-preservation cylinder locating slot 1, upper guide shell positioning ring groove 2 are simultaneously disposed with the second face ecto-entad, the second face is by extroversion
Inside it is disposed with lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, upper guide shell positioning ring groove 2 and is provided with guide shell
Lower guide shell entrance is provided with entrance 3, lower guide shell positioning ring groove；When in use, first guide shell is supported according to the first face
Used on guide shell, when guide shell support in use occur chipping phenomenon when, by guide shell support above and below run
Install and use, you can avoid due to the influence that chipping material falls into molten silicon and brought to production caused by edge chipping, together
When solve after generation chipping phenomenon guide shell support the problem of can not be continuing with.
A kind of Czochralski method mono-crystal furnace two plane type guide shell support provided according to the utility model, the guide shell support
The material of body is isostatic pressing formed graphite.
In the embodiment above, guide shell support body uses the material of isostatic pressing formed graphite, and isostatic pressing formed graphite has thin knot
The characteristics of structure, big specification, isotropism, the mechanical strength such as performance such as compression strength, tensile strength, hardness is high, as leading
The material of flow cartridge support, can make guide shell support have good supporting role.
Obviously, those skilled in the art can carry out various changes and modification without departing from this practicality to the utility model
New spirit and scope.So, if these modifications and variations of the present utility model belong to the utility model claim and
Within the scope of its equivalent technologies, then the utility model is also intended to comprising including these changes and modification.
Claims (2)
1. a kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell, including guide shell support body, it is characterised in that the water conservancy diversion
Cylinder support body include the first face and the second face, first face ecto-entad be disposed with heat-preservation cylinder locating slot, on lead
Guide shell entrance is provided with flow cartridge positioning ring groove, the upper guide shell positioning ring groove, second face ecto-entad is successively
It is provided with and is provided with lower guide shell at lower heat-preservation cylinder locating slot, lower guide shell positioning ring groove, the lower guide shell positioning ring groove and enters
Mouthful.
2. Czochralski method mono-crystal furnace according to claim 1 is supported with two plane type guide shell, it is characterised in that the guide shell
The material for supporting body is isostatic pressing formed graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720069088.1U CN206502890U (en) | 2017-01-17 | 2017-01-17 | A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720069088.1U CN206502890U (en) | 2017-01-17 | 2017-01-17 | A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206502890U true CN206502890U (en) | 2017-09-19 |
Family
ID=59839732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720069088.1U Active CN206502890U (en) | 2017-01-17 | 2017-01-17 | A kind of Czochralski method mono-crystal furnace is supported with two plane type guide shell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206502890U (en) |
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2017
- 2017-01-17 CN CN201720069088.1U patent/CN206502890U/en active Active
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