CN206121704U - Reaction unit with second order reaction ware - Google Patents
Reaction unit with second order reaction ware Download PDFInfo
- Publication number
- CN206121704U CN206121704U CN201621179021.5U CN201621179021U CN206121704U CN 206121704 U CN206121704 U CN 206121704U CN 201621179021 U CN201621179021 U CN 201621179021U CN 206121704 U CN206121704 U CN 206121704U
- Authority
- CN
- China
- Prior art keywords
- pipe
- feed bin
- reaction
- gas
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model provides a reaction unit with second order reaction ware, is including the initial response ware, first dust remover, second reactor and the second dust remover that connect gradually, the initial response ware includes first feed bin pipe, economizer bank and reaction tube, the bottom of first feed bin pipe is equipped with the dilatation pipe of loudspeaker form, and dilatation pipe is inwards narrowed by the opening of the opening on it to its lower extreme gradually, the upper end and the opening of dilatation pipe lower extreme of economizer bank are connected, and the lower extreme of economizer bank communicates in the reaction tube, the both ends of reaction tube are equipped with first air inlet, the second reactor includes second feed bin pipe, discharge, heating tube and third blast pipe, the bottom of second feed bin pipe is located to the discharge, the top of discharge is equipped with the opening and communicates to the inside of second feed bin pipe, the open -top department of discharge is equipped with the sieve, heating tube wears second feed bin pipe, set up the heating pipe in the heating tube. The utility model discloses a reaction unit's reaction efficiency is high, and purity is high, and dust removal effect is good.
Description
Technical field
This utility model is related to consersion unit field, more particularly to a kind of reaction unit with second reactor.
Background technology
Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silicon dioxide,
The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solaode, laser
The aspect such as technology, cryogenic refrigeration, gas-insulated, leak detectants, the detergent in printed circuit production, lubricant and brake fluid
Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, including hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with
Fluohydric acid gas and fluorine gas prepare carbon tetrafluoride etc. with carbon source directly contact reaction.Wherein, current maturation process using hydrofluorocarbons,
Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, and blast easily occurs, and has in synthetic product and be difficult what is removed
Impurity；Fluorine carbon directly contact reaction method prepares carbon tetrafluoride, and the method can prepare four through continuous development and perfection
Perfluorocarbon.
But, the reaction efficiency of existing reactor is low, and the utilization rate of reactant is low, and dust removing effects are poor, is unfavorable for tetrafluoro
Change the preparation of carbon.
Utility model content
The purpose of this utility model is to propose a kind of reaction unit with second reactor, can overcome prior art
In deficiency, reaction efficiency is high, and product purity is high, good dedusting effect.
It is that, up to this purpose, this utility model is employed the following technical solutions：
A kind of reaction unit with second reactor, including the first reactor being sequentially connected, the first cleaner unit, second
Reactor and the second cleaner unit；
The first reactor includes the first feed bin pipe, economizer bank and reaction tube；
The bottom of the first feed bin pipe is provided with trumpet-shaped dilatation pipe, and the opening of the dilatation Guan Youqi upper ends is under which
The opening at end is gradually inwardly narrowed；
The first feed bin pipe, dilatation pipe and economizer bank be it is vertically arranged, the reaction tube be horizontally set；
The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in described
Reaction tube；
The two ends of the reaction tube are provided with the first air inlet；
The first feed bin pipe is provided with downtake pipe, and which is connected to first cleaner unit；
The second reactor includes the second feed bin pipe, discharge, heating muff and the 3rd exhaustor；
The discharge is located at the bottom of the second feed bin pipe；
Opening is provided with the top of the discharge and the inside of the second feed bin pipe is communicated to；
The top open part of the discharge is provided with sieve plate；
The discharge is provided with the 3rd air inlet pipe, and which is connected to first cleaner unit；
3rd exhaustor is connected to second cleaner unit；
The heating muff has multiple, and which is hollow, and which is extended transversely through in the second feed bin pipe；
Heating tube is set in the heating muff.
Further, the first charge pipe and blow-down pipe are provided with the top of the first feed bin pipe；
Described one end of first charge pipe and one end of blow-down pipe are respectively communicated with the top of the first feed bin pipe；
The two ends of the other end and the reaction tube of first charge pipe are equipped with flange and blind flange, the blind flange
It is installed on the flange.
Further, the first reactor also includes cooler bin；
In the cooler bin, the two ends of the reaction tube protrude from the outside of the cooler bin to the reaction tube.
Further, the cooler bin is rectangular box, and opening is provided with the top of which；
The bottom outer wall of the wherein side wall of the cooler bin is at least provided with a water inlet pipe；
Outer wall at the top proximal of the wherein side wall of the cooler bin is at least provided with an overflow pipe；
The reaction tube is provided with least one thermometer boss；
The lower end closed of the thermometer boss and be located at the reaction tube in；
Temperature detector is provided with the thermometer boss.
Further, first cleaner unit includes dust removing tube and dividing plate；
The dividing plate includes that the quantity of upper spacer and lower clapboard, the upper spacer and lower clapboard is at least one；
The upper spacer and lower clapboard are equally spacedly welded in the dust removing tube；
The adjacent upper spacer and lower clapboard form dedusting gas circuit；
The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, described
Downtake pipe is connected with second air inlet pipe.
Further, the two ends of the dust removing tube are equipped with blind flange and flange, the blind flange be installed on the flange with
Seal the dust removing tube；
The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the lower clapboard
Fit with the upper surface of the blind flange of the dust removing tube bottom bottom；
First cleaner unit also includes baffle plate；
The baffle plate is fixed on the blind flange, and is located at the two of the weld of the upper spacer or lower clapboard respectively
Side；
The bottom of the dust removing tube is provided with trumpet-shaped seal pipe；
The blind flange of the bottom of the dust removing tube is communicated with the first blow-off pipe inside the dust removing tube, described
First blow-off pipe is provided with valve.
Further, the second charge pipe is provided with the top of the second feed bin pipe, one end of second charge pipe is communicated in
The inside of the second feed bin pipe, its other end are provided with flange and blind flange, and the blind flange is installed on the flange；
Outer wall of 3rd exhaustor located at second charge pipe；
The second reactor also includes temperature detector, and which is located at the second feed bin pipe.
Further, second cleaner unit includes dust leg, the second blow-off pipe and the 4th air inlet pipe；
4th air inlet pipe is communicated to the 3rd exhaustor；
4th air inlet pipe is vertically arranged, and its bottom is located in the dust leg, through the dust leg at the top of which
Top；
The bottom of the 4th air inlet pipe is provided with gas distributor, is provided with gas and disturbs above the gas distributor
Stream plate；
Second blow-off pipe is located at the bottom of the dust leg；
The dust leg is provided with the 4th exhaustor, and which is located at the top of the gas spoiler.
Further, the gas distributor is horn-like；
The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor is fixed on the bottom of the 4th air inlet pipe thereon at end opening；The gas distributor
Upper arrangement completely pore.
Further, the gas spoiler is horn-like；
The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end
Edge is fixed on the inwall of the dust leg；
Second blow-off pipe is outward-dipping；
The top of the second blow-off pipe side is obtuse angle with the angle A of the base plane formation of the dust leg；
The top of the second blow-off pipe opposite side is acute angle with the angle B of the base plane formation of the dust leg；
The bottom of second blow-off pipe is provided with sewage draining exit；
4th exhaustor is located at the dust leg close to the outer wall at top；
Semicircular baffle is provided with the dust leg, which is located in the 4th air inlet pipe close to the 4th exhaustor
That side, and positioned at the lower section of the 4th exhaustor；
The Semicircular baffle is downward-sloping setting.
This utility model proposes a kind of reaction unit with second reactor according to the above, and its reaction efficiency is high,
Good dedusting effect.
The first reactor is used for fluorine gas and carbon reaction generates carbon tetrafluoride, and carbon is placed on the first feed bin pipe, pre-
In heat pipe and reaction tube, on the one hand first air inlet can increase fluorine gas in the unit interval and lead to located at the two ends of reaction tube
Enter to the amount of the reaction tube, more fluorine gas is fully contacted with carbon, increase the efficiency of reaction；It is anti-to there is chemistry with carbon in fluorine gas
Seasonable to release heat, as the lower end of the economizer bank is communicated in the reaction tube, substantial amounts of heat can be by product tetrafluoro
Change carbon and be transferred to the carbon in the economizer bank, these carbon are preheated, keep reaction temperature stable, make follow-up carbon and fluorine gas
Reaction efficiency is higher.
With the carrying out of reaction, the carbon of the reaction tube is gradually consumed, due to the first feed bin pipe, dilatation pipe and pre-
Heat pipe is vertically arranged, and under gravity, it is anti-to ensure that the carbon in the economizer bank will drop down onto down the reaction tube
That what is answered is persistently carried out, and improves the stability and persistence of its work；Similarly, the carbon in the first feed bin pipe can drop down onto down institute
The carbon for stating guarantee question response in economizer bank is preheated, and is that follow-up reaction is ready.
The trumpet-shaped dilatation pipe has the effect for expanding the first feed bin tube capacity product, due to the dilatation Guan Youqi
The opening of upper end is gradually inwardly narrowed to the opening of its lower end, so being connected to the first feed bin pipe of the dilatation pipe upper end open
Cross-sectional area can be more than be connected to the dilatation pipe lower ending opening economizer bank cross-sectional area, it is assumed that the first feed bin pipe
With economizer bank under identical length, the volume of the first feed bin pipe can be greatly increased, and so as to reduce the addition number of times of carbon, carry
The persistence of the high first reactor work.
Fluorine gas generates carbon tetrafluoride gas when being reacted with carbon, but, often the utilization rate of fluorine gas can not reach percentage
Hundred, and the carbon dust of incomplete reaction can be mixed with, become to mainly contain the mixed gas of carbon tetrafluoride, carbon dust and fluorine gas, mix
Gas can carry out dust removal process to first cleaner unit from the first exhaust bank of tubes, after carrying out primary dedusting, mixed gas
The content of middle carbon dust is reduced, and the purity of carbon tetrafluoride gas is improved, and the mixed gas after primary dedusting pass through the described 3rd
Air inlet pipe enters the discharge, and the sieve plate is fallen in the discharge for the carbon dust allowed in mixed gas, use in case
Only block；Fluorine gas and carbon tetrafluoride gas then enter to the second feed bin pipe by sieve plate, as the discharge is located at institute
The bottom of the second feed bin pipe is stated, can be more convenient during follow-up cleaning carbon dust.
As the heating muff is hollow, the heating tube is facilitated to be put into the inside of the heating muff；Due to
The heating muff has multiple, and which is extended transversely through in the second feed bin pipe, more carbon can be carried on institute effectively
State in the second feed bin pipe；Heating tube is heated, and raises the temperature of the carbon supported by the heating muff, when fluorine gas and temperature liter
During high carbon haptoreaction, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then from the 3rd row
Trachea is expelled to second cleaner unit and carries out two-stage dust removal, and the utilization rate of final fluorine gas reaches absolutely, the content of carbon dust
Also it is preferably minimized, greatly promotes the purity of carbon tetrafluoride gas.
Description of the drawings
Fig. 1 is the positive part sectioned view of the first reactor of the one of embodiment of this utility model.
Fig. 2 is the part sectioned view of the side of the first reactor of the one of embodiment of this utility model.
Fig. 3 is the positive part sectioned view of the first cleaner unit of the one of embodiment of this utility model.
Fig. 4 is the partial enlarged drawing at the C of Fig. 3.
Fig. 5 is the positive structure schematic of the second reactor of the one of embodiment of this utility model.
Fig. 6 is the cross-sectional view of the discharge of the one of embodiment of this utility model.
Fig. 7 is the perspective view of the second cleaner unit of the one of embodiment of this utility model.
Wherein：First reactor 2, the first feed bin pipe 21, dilatation pipe 211, downtake pipe 212, the first charge pipe 213,
Blow-down pipe 214, support base 215, economizer bank 22, reaction tube 23, the first air inlet 231, thermometer boss 232, flange 261, method
Blue lid 262, cooler bin 24, water inlet pipe 241, overflow pipe 242, the first cleaner unit 25, dust removing tube 251, seal pipe 2511, dividing plate
252nd, upper spacer 2521, lower clapboard 2522, dedusting gas circuit 253, the second air inlet pipe 254, second exhaust pipe 255, baffle plate 256,
One blow-off pipe 257, second reactor 3, the second feed bin pipe 31, the 3rd exhaustor 311, the second charge pipe 312, the second support feet
313rd, discharge 32, sieve plate 321, the 3rd air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, the second dedusting
Device 35, dust leg 351, the 4th exhaustor 3511, Semicircular baffle 3512, the second blow-off pipe 352, sewage draining exit 3521, first
Spike 3522, the 4th air inlet pipe 353, gas distributor 354, pore 3541, gas spoiler 355.
Specific embodiment
The technical solution of the utility model is further illustrated below in conjunction with the accompanying drawings and by specific embodiment.
As shown in Figures 1 to 7, a kind of reaction unit with second reactor, including the first reactor being sequentially connected
2nd, the first cleaner unit 25, second reactor 3 and the second cleaner unit 35；
The first reactor 2 includes the first feed bin pipe 21, economizer bank 22 and reaction tube 23；
The bottom of the first feed bin pipe 21 is provided with trumpet-shaped dilatation pipe 211,211 the opening by its upper end of dilatation pipe
Mouth is gradually inwardly narrowed to the opening of its lower end；
The first feed bin pipe 21, dilatation pipe 211 and economizer bank 22 are vertically arranged, and the reaction tube 23 is laterally to set
Put；
The upper end of the economizer bank 22 is connected with the opening of 211 lower end of dilatation pipe, and the lower end of the economizer bank 22 connects
Pass through the reaction tube 23；
The two ends of the reaction tube 23 are provided with the first air inlet 231；
The first feed bin pipe 21 is provided with downtake pipe 212, and which is connected to first cleaner unit 25；
The second reactor 3 includes the second feed bin pipe 31, discharge 32, heating muff 33 and the 3rd exhaustor 311；
The discharge 32 is located at the bottom of the second feed bin pipe 31；
The top of the discharge 32 is provided with opening and is communicated to the inside of the second feed bin pipe 31；
The top open part of the discharge 32 is provided with sieve plate 321；
The discharge 32 is provided with the 3rd air inlet pipe 322, and which is connected to first cleaner unit 25；
3rd exhaustor 311 is connected to second cleaner unit 35；
The heating muff 33 have it is multiple, which is hollow, and which is extended transversely through in the second feed bin pipe 31；
Heating tube is set in the heating muff 33.
The first reactor 2 of the present embodiment is used for fluorine gas and carbon reaction generates carbon tetrafluoride, and carbon is placed on described the
In one feed bin pipe 21, economizer bank 22 and reaction tube 23, first air inlet 231 is located at the two ends of reaction tube 23, one side energy
In enough increasing the unit interval, fluorine gas is passed through to the amount of the reaction tube 23, more fluorine gas is fully contacted with carbon, increases reaction
Efficiency；Fluorine gas releases heat when there is chemical reaction with carbon, as the lower end of the economizer bank 22 is communicated in the reaction tube
23, substantial amounts of heat can be transferred to the carbon in the economizer bank 22 by product carbon tetrafluoride, and these carbon are preheated, and protect
Hold reaction temperature stable, make the reaction efficiency of follow-up carbon and fluorine gas higher.
With the carrying out of reaction, the carbon of the reaction tube 23 is gradually consumed, due to the first feed bin pipe 21, dilatation pipe
211 and economizer bank 22 be vertically arranged, under gravity, the carbon in the economizer bank 22 will drop down onto down the reaction
Pipe 23 is persistently carried out with ensureing what is reacted, improves the stability and persistence of its work；Similarly, in the first feed bin pipe 21
Carbon can drop down onto down, be that follow-up reaction is ready.
The trumpet-shaped dilatation pipe 211 has the effect for expanding 21 volume of the first feed bin pipe, due to the dilatation
Pipe 211 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, so being connected to 211 upper end open of dilatation pipe
The first feed bin pipe 21 cross-sectional area can be more than be connected to 211 lower ending opening of dilatation pipe economizer bank 22 cross section
Product, it is assumed that, under identical length, the volume of the first feed bin pipe 21 can be significantly for the first feed bin pipe 21 and economizer bank 22
Increase, so as to reduce the addition number of times of carbon, improve the persistence of the work of first reactor 2.
Fluorine gas generates carbon tetrafluoride gas when being reacted with carbon, but, often the utilization rate of fluorine gas can not reach percentage
Hundred, and the carbon dust of incomplete reaction can be mixed with, reacted gas becomes to mainly contain carbon tetrafluoride, perfluoroethane, octafluoro
Propane, carbon monoxide, carbon dioxide, carbon dust, fluorine gas, the mixed gas of fluohydric acid gas, mixed gas can be from the downtake pipes
212 rows carry out dust removal process to first cleaner unit 25, and after carrying out primary dedusting, in mixed gas, the content of carbon dust is reduced,
The purity of carbon tetrafluoride gas is improved, and the mixed gas after primary dedusting enter described by the 3rd air inlet pipe 322
Discharge 32, fluorine gas and carbon tetrafluoride gas enter to the second feed bin pipe 31 by sieve plate 321, due to the discharge 32
Located at the bottom of the second feed bin pipe 31, can be more convenient during follow-up cleaning carbon dust.
As the heating muff 33 is hollow, the heating tube is facilitated to be put into the inside of the heating muff 33；
Due to the heating muff 33 have it is multiple, which is extended transversely through in the second feed bin pipe 31, can effectively more carbon
It is carried in the second feed bin pipe 31；Heating tube is heated, and raises the temperature of the carbon supported by the heating muff 33, when
When fluorine gas is with the carbon haptoreaction of temperature is reached, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then
Second cleaner unit 35 is expelled to from the 3rd exhaustor 311 carries out two-stage dust removal, and the utilization rate of final fluorine gas reaches hundred
/ hundred, the content of carbon dust is also preferably minimized, and greatly promotes the purity of carbon tetrafluoride gas, reduces blocking subsequent pipeline, sets
Standby generation.
Further, the top of the first feed bin pipe 21 is provided with the first charge pipe 213 and blow-down pipe 214；
One end of first charge pipe 213 and one end of blow-down pipe 214 are respectively communicated with the first feed bin pipe 21
Top；
The two ends of the other end and the reaction tube 23 of first charge pipe 213 are equipped with flange 261 and blind flange
262, the blind flange 262 is installed on the flange 261.
Carbon in the first reactor 2 after reaction is consumed, from first at the top of the first feed bin pipe 21
Charge pipe 213 adds carbon, operates simpler convenience directly, because one end of first charge pipe 213 and blow-down pipe 214
One end is respectively communicated with the top of the first feed bin pipe 21, so carbon can drop down onto down the first feed bin pipe under gravity
21st, dilatation pipe 211, economizer bank 22 and reaction tube 23, to ensure that what is reacted is persistently carried out；Because first charge pipe 213
The two ends of reaction tube 23 described in the other end are equipped with flange 261 and blind flange 262, and the blind flange 262 is installed on the flange
261, so the blind flange 262 need to be only dismantled in charging, just can carry out feeding operation to the first reactor 2.
The other end of the blow-down pipe 214 is communicated to exhaust gas treating tower, and emptying valve need to be only opened during operation can be to enter
The emptying of circulation of qi promoting body.
Further, the reaction tube 23 is respectively arranged at two ends with flange 261 and blind flange 262, and the blind flange 262 installs
In the flange 261 sealing the reaction tube 23；
First air inlet 231 is located at the blind flange 262.
By the flange 261 being installed in the blind flange 262, can effectively seal the reaction tube 23, it is to avoid gas
Body is leaked, the such as leakage of reactant fluorine gas and the leakage of product carbon tetrafluoride gas；By dismantling the blind flange 262, energy
The waste residue that enough reactions rapidly cleared up in the reaction tube 23 are stayed, it is simple to operation；First air inlet 231 is located at
The blind flange 262, it is ensured that fluorine gas is effectively passed through to the reaction tube.
Further, the radial position laterally at 21 top proximal of the first feed bin pipe of the downtake pipe 212.
The outer wall laterally at 21 top proximal of the first feed bin pipe of the downtake pipe 212, can make mixing
The distance that gas rises increases, and is conducive to the sedimentation under gravity of carbon dust, improves the purity of carbon tetrafluoride gas.
Further, the first reactor 2 also includes cooler bin 24；
In the cooler bin 24, the two ends of the reaction tube 23 protrude from the cooler bin 24 to the reaction tube 23
It is outside.
Fluorine gas and carbon can release substantial amounts of heat when reacting, the cooler bin 24 built with cooling water, to reduce the reaction
The temperature of pipe 23, so as to increase its service life.The two ends of the reaction tube 23 protrude from the outside of the cooler bin 24, convenient
Installed in the dismounting of the blind flange 262 at its two ends, it is to avoid cooling water is entered in the reaction tube 23.
Further, the cooler bin 24 is rectangular box, and opening is provided with the top of which；
The bottom outer wall of the wherein side wall of the cooler bin 24 is at least provided with a water inlet pipe 241；
Outer wall at the top proximal of the wherein side wall of the cooler bin 24 is at least provided with an overflow pipe 242；
The reaction tube 23 is provided with least one thermometer boss 232；
The lower end closed of the thermometer boss 232 and be located at the reaction tube 23 in；
Temperature detector 34 is provided with the thermometer boss 232.
The casing of rectangle is easily produced, and the cooling water that can be loaded is also more, the opening being provided with the top of which play observation and
Check the effect of 2 behaviour in service of the first reactor.As shown in Fig. 2 the quantity of the water inlet pipe 241 of the present embodiment is
One, the quantity of the overflow pipe 242 is two, the water inlet pipe 241 and overflow pipe 242 located at the side wall of the cooler bin 24,
It is more convenient its installation；The bottom outer wall of the wherein side wall of the cooler bin 24, when cooling water entering into the water inlet pipe 241
During the mouth of a river, cooling water is passed through to during the cooler bin 24 more slowly can be stablized；The overflow pipe 242 is located at the cooler bin 24
Wherein side wall top proximal at outer wall, it is ensured that cooling water in the cooler bin 24 is enough effectively cooling down institute
State reaction tube 23, it is to avoid cooling water excess overflows.
As shown in figure 1, the quantity of the thermometer boss 232 of the present embodiment is two, and it is symmetrically set in the economizer bank
On the reaction tube 23 of 22 both sides, it is possible to increase the temperature detector 34 is accurate to the temperature detection in reaction tube 23
Degree, the lower end closed of the thermometer boss 232 can seal the reaction tube 23 and can also protect the temperature detector 34.
Further, as shown in figure 3, first cleaner unit 25 includes dust removing tube 251 and dividing plate 252；
The dividing plate 252 includes the number of upper spacer 2521 and lower clapboard 2522, the upper spacer 2521 and lower clapboard 2522
Amount is at least one；
The upper spacer 2521 and lower clapboard 2522 are equally spacedly welded in the dust removing tube 251；
The adjacent upper spacer 2521 and lower clapboard 2522 form dedusting gas circuit 253；
The outside of the dust removing tube 251 is communicated with the second air inlet pipe 254 and second row inside the dust removing tube 251
Trachea 255, the downtake pipe 212 are connected with second air inlet pipe 254.
When mixed gas enter to the dedusting gas circuit 253 of the dust removing tube 251 through second air inlet pipe 254, in institute
In the presence of stating the iris action and gravity of upper spacer 2521 and lower clapboard 2522, carbon dust can be settled down to the dust removing tube 251
Bottom, is easy to follow-up cleaning, to improve the purity of carbon tetrafluoride gas, the carbon tetrafluoride gas being finally further purified from
The second exhaust pipe 255 is expelled to the 3rd air inlet pipe 322.
The quantity of the upper spacer 2521 of the present embodiment is two, and the quantity of the lower clapboard 2522 is one, by welding,
So that the upper spacer 2521 and lower clapboard 2522 are more firmly located in the dust removing tube 251.
Further, the two ends of the dust removing tube 251 are equipped with blind flange 262 and flange 261, and the blind flange 262 is installed
In the flange 261 sealing the dust removing tube 251；
The top of the upper spacer 2521 is fitted with the lower surface of the blind flange 262 on 251 top of the dust removing tube, institute
Fit with the upper surface of the blind flange 262 of 251 bottom of the dust removing tube bottom for stating lower clapboard 2522；
First cleaner unit 25 also includes baffle plate 256；
The baffle plate 256 is fixed on the blind flange 262, and is located at the upper spacer 2521 or lower clapboard 2522 respectively
Weld both sides；
The bottom of the dust removing tube 251 is provided with trumpet-shaped seal pipe 2511；
The blind flange 262 of the bottom of the dust removing tube 251 is communicated with the first row inside the dust removing tube 251
Dirty pipe 257, first blow-off pipe 257 are provided with valve.
As shown in Figure 3 and Figure 4, the dust removing tube 251 can rapidly be cleared up by dismounting the blind flange 262, it is described
The top of upper spacer 2521 is fitted with the lower surface of the blind flange 262 on 251 top of the dust removing tube, the lower clapboard 2522
Bottom fit with the upper surface of the blind flange 262 of 251 bottom of the dust removing tube, mixed gas is removed along described as far as possible
Dust and gas road 253 is moved, rather than directly the joint place from the blind flange 262 with upper spacer 2521 and lower clapboard 2522 is directly worn
Cross, improve the purity of the quality and carbon tetrafluoride gas except carbon dust.
The baffle plate 256 can stop mixed mixed gas directly from the blind flange 262 and upper spacer 2521 and lower clapboard
2522 joint place is directly through further raising is except the purity of the quality and carbon tetrafluoride gas of carbon dust.
The blind flange 262 of 251 bottom of the dust removing tube need to periodically pull down discharge solid-state carbon dust, but the dust removing tube
The diameter of 251 bottoms is bigger, is more difficult to sealing, so the seal pipe 2511 is set to from opening the opening to its lower end of its upper end
The trumpet-shaped pipe that mouth is gradually inwardly narrowed, improves its seal degree.
The fluorine gas of the present embodiment is produced by electrolysis, so hydrogen fluoride gas in fluorine gas, can be contaminated with, when its temperature
Degree can become acid solution after declining, and in order to clear up safety during carbon dust, first open the valve on first blow-off pipe 257, clear
Acid solution, then dismantle 262 dust of blind flange.
Further, the first feed bin pipe 21 also includes at least two support bases 215；
The support base 215 is equally spacedly arranged along the outer wall circumference of the first feed bin pipe 21.
The quantity of the support base 215 of the present embodiment is two, and which is along between the outer wall circumference etc. of the first feed bin pipe 21
Arrange away from ground, can preferably support the first feed bin pipe 21, stress when being supported the first feed bin pipe 21 is more
Uniformly.
Further, the top of the second feed bin pipe 31 is provided with the second charge pipe 312, and the one of second charge pipe 312
End is communicated in the inside of the second feed bin pipe 31, and its other end is provided with flange 261 and blind flange 262, and the blind flange 262 is pacified
Loaded on the flange 261；
3rd exhaustor 311 is on the outside of second charge pipe 312；
As shown in figure 5, the second reactor 3 also includes temperature detector 34, which is located at the second feed bin pipe 31.
Carbon in the second reactor 3 after reaction is consumed, from second at the top of the second feed bin pipe 31
Charge pipe 312 adds carbon, operates simpler convenience directly, and one end of second charge pipe 312 is communicated in second material
The inside of storekeeper 31, so carbon can be dropped down onto down in the second feed bin pipe 31 under gravity, only needs dismounting in charging
The blind flange 262, just can carry out feeding operation to the second reactor 3.
Carbon near the heating muff 33 is higher with the reaction efficiency of fluorine gas, and the temperature detector 34 can be effectively
Detect in the second feed bin pipe 31 close to the temperature at the heating muff 33, so as to heating tube preferably described in control
Heating-up temperature, to ensure that carbon and fluorine gas are continuously in optimal reaction temperature.
Further, as shown in figure 5, the bottom of the discharge 32 is provided with blind flange 262 and flange 261；
The blind flange 262 is installed on the flange 261 to seal the discharge 32.
It is by installing the blind flange 262, more enough effectively to seal the discharge 32, it is to avoid gas is leaked；It is logical
Cross and dismantle the blind flange 262, the dust that the reaction that rapidly can be cleared up in the discharge 32 is stayed.
Further, as shown in fig. 6, being provided with support column 323 in the discharge 32；
The two ends of the support column 323 are respectively held against the top of the bottom of the sieve plate 321 and the blind flange 262.
323 pairs of sieve plates 321 of the support column have supporting role, can effectively support the sieve plate 321, it is ensured that
The stability of its work so as to can stably filter carbon dust.
Further, proximal end of the heating muff 33 located at 31 bottom of the second feed bin pipe.
As far as possible many carbon can be made to be supported by the heating muff 33, on the one hand reduce the number of times of follow-up plus carbon, it is another
Aspect can also be such that fluorine gas contacts with more carbon, improve the efficiency of its reaction.
The second reactor 3 also includes temperature detector 34, and which is located at the second feed bin pipe 31, and close to described
Heating muff 33.
Carbon near the heating muff 33 is higher with the reaction efficiency of fluorine gas, and the temperature detector 34 can be effectively
Detect the reaction temperature of the second feed bin pipe 31, so as to the heating-up temperature of heating tube preferably described in control, with ensure carbon and
Fluorine gas is continuously in optimal reaction temperature.
Further, second cleaner unit 35 includes dust leg 351, the second blow-off pipe 352 and the 4th air inlet pipe 353；
4th air inlet pipe 353 is communicated to the 3rd exhaustor 311；
4th air inlet pipe 353 is vertically arranged, and its bottom is located in the dust leg 351, through described at the top of which
The top of dust leg 351；
The bottom of the 4th air inlet pipe 353 is provided with gas distributor 354, positioned at the top of the gas distributor 354
It is provided with gas spoiler 355；
Second blow-off pipe 352 is located at the bottom of the dust leg 351；
The dust leg 351 is provided with the 4th exhaustor 3511, and which is located at the top of the gas spoiler 355.
Some reactions can be mixed not in the carbon tetrafluoride gas that carbon and fluorine gas reaction in the second feed bin pipe 31 is generated
Sufficient carbon dust, when the carbon tetrafluoride gas for being contaminated with carbon dust enter to the 4th air inlet pipe 353 through the 3rd exhaustor 311
Discharge from the bottom of the 4th air inlet pipe 353 afterwards, the 4th air inlet pipe 353 is vertically arranged so as to easier for installation, institute
State the top at the top of the 4th air inlet pipe 353 through the dust leg 351 so as to the connection with the 3rd exhaustor 311
It is convenient.
The carbon tetrafluoride gas for being contaminated with carbon dust can be uniformly distributed by the gas distributor 354, disturb in the gas
In the presence of stream plate 355, the carbon tetrafluoride gas for being contaminated with carbon dust can stop the longer time in the dust leg 351, more
Plus falling in second blow-off pipe 352 beneficial to carbon dust, the 4th exhaustor 3511 is positioned at the gas spoiler 355
Top, make finally more to increase from the purity of the carbon tetrafluoride gas wherein discharged, mix fewer carbon dust.
Further, the gas distributor 354 is horn-like；
The gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor 354 is fixed on the bottom of the 4th air inlet pipe 353 thereon at end opening；The gas
Full pore 3541 is arranged on distributor 354.
Due to the upper end open of the gas distributor 354 it is less, it is possible to the 4th air inlet pipe 353 less with aperture
Matching is fixed, and the trumpet-shaped gas distributor 354 is gradually expanded outwardly to the opening of its lower end from the opening of its upper end, made
The distribution for obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.The pore 3541 further makes mixed gas
Distribution is more uniform, is more favorable for the sedimentation of carbon dust.
Further, the gas spoiler 355 is horn-like；
The gas spoiler 355 gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, and its upper end is opened
The edge of mouth is fixed on the inwall of the dust leg 351；
Second blow-off pipe 352 is outward-dipping；
The top of 352 side of the second blow-off pipe is blunt with the angle A that the base plane of the dust leg 351 is formed
Angle；
The top of 352 opposite side of the second blow-off pipe is sharp with the angle B that the base plane of the dust leg 351 is formed
Angle；
The bottom of second blow-off pipe 352 is provided with sewage draining exit 3521；
4th exhaustor 3511 is located at the dust leg 351 close to the outer wall at top；
Semicircular baffle 3512 is provided with the dust leg 351, which is located in the 4th air inlet pipe 353 close to described
That side of 4th exhaustor 3511, and positioned at the lower section of the 4th exhaustor 3511；
The Semicircular baffle 3512 is downward-sloping setting.
The edge of the opening of 355 upper end of gas spoiler is fixed on the inwall of the dust leg 351, so being contaminated with
The carbon tetrafluoride gas of carbon dust effectively can be hindered towards the outer wall of 351 bottom of the dust leg by the gas spoiler 355
Gear, makes mixed gas have more times to rest in the dust leg 351, is conducive to the sedimentation of carbon dust；The gas is disturbed
Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from the gas spoiler 355
Top sedimentation, will not also be deposited on the gas spoiler 355, also can be along the opening of 355 upper end of gas spoiler
Under drop down onto the opening of its lower end, eventually fall in second blow-off pipe 352.
As shown in fig. 7, the angle A of the present embodiment is 120 °, angle B is 30 °, convenient safely to clear up described
Carbon dust in second blow-off pipe 352, the sewage draining exit 3521 of the present embodiment are provided with blind flange 262 and flange 261, by dismounting
The mode of blind flange 262, carbon dust are finally discharged from the sewage draining exit 3521.
4th exhaustor 3511 has mixed gas more located at the dust leg 351 close to the outer wall at top
Time rest in the dust leg 351, be conducive to the sedimentation of carbon dust；Semicircular baffle is provided with the dust leg 351
3512, which can intercept the rising of mixed gas, and mixed gas are rushed for, away from 3511 exit of the 4th exhaustor, entering one
Step ground allows mixed gas to have more times to rest in the dust leg 351, is more conducive to be conducive to the sedimentation of carbon dust, it is described partly
Circular baffle plate 3512 be downward-sloping setting, carbon dust be not easy pile up thereon, whereabouts of taking advantage of a situation.
The outer wall of second blow-off pipe 352 is vertically provided with three the first support feets 3522, can support described second
Blow-off pipe 352, facilitates which to install.The outer wall of the second feed bin pipe 31 is at least vertically provided with three the second support feets 313, energy
The second feed bin pipe 31 is enough supported, facilitates which to install.
Know-why of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality
With new principle, and the restriction to this utility model protection domain can not be construed to by any way.Based on explanation herein,
Those skilled in the art associates other specific embodiments of the present utility model by need not paying performing creative labour,
These modes are fallen within protection domain of the present utility model.
Claims (10)
1. a kind of reaction unit with second reactor, including the first reactor being sequentially connected, the first cleaner unit, second anti-
Answer device and the second cleaner unit；
It is characterized in that：The first reactor includes the first feed bin pipe, economizer bank and reaction tube；
The bottom of the first feed bin pipe is provided with trumpet-shaped dilatation pipe, and the opening of the dilatation Guan Youqi upper ends is to its lower end
Opening is gradually inwardly narrowed；
The first feed bin pipe, dilatation pipe and economizer bank be it is vertically arranged, the reaction tube be horizontally set；
The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in the reaction
Pipe；
The two ends of the reaction tube are provided with the first air inlet；
The first feed bin pipe is provided with downtake pipe, and which is connected to first cleaner unit；
The second reactor includes the second feed bin pipe, discharge, heating muff and the 3rd exhaustor；
The discharge is located at the bottom of the second feed bin pipe；
Opening is provided with the top of the discharge and the inside of the second feed bin pipe is communicated to；
The top open part of the discharge is provided with sieve plate；
The discharge is provided with the 3rd air inlet pipe, and which is connected to first cleaner unit；
3rd exhaustor is connected to second cleaner unit；
The heating muff has multiple, and which is hollow, and which is extended transversely through in the second feed bin pipe；
Heating tube is set in the heating muff.
2. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：First feed bin
The first charge pipe and blow-down pipe are provided with the top of pipe；
Described one end of first charge pipe and one end of blow-down pipe are respectively communicated with the top of the first feed bin pipe；
The two ends of the other end and the reaction tube of first charge pipe are equipped with flange and blind flange, and the blind flange is installed
In the flange.
3. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：First reaction
Device also includes cooler bin；
In the cooler bin, the two ends of the reaction tube protrude from the outside of the cooler bin to the reaction tube.
4. a kind of reaction unit with second reactor according to claim 3, it is characterised in that：The cooler bin is
Rectangular box, is provided with opening at the top of which；
The bottom outer wall of the wherein side wall of the cooler bin is at least provided with a water inlet pipe；
Outer wall at the top proximal of the wherein side wall of the cooler bin is at least provided with an overflow pipe；
The reaction tube is provided with least one thermometer boss；
The lower end closed of the thermometer boss and be located at the reaction tube in；
Temperature detector is provided with the thermometer boss.
5. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：First dedusting
Device includes dust removing tube and dividing plate；
The dividing plate includes that the quantity of upper spacer and lower clapboard, the upper spacer and lower clapboard is at least one；
The upper spacer and lower clapboard are equally spacedly welded in the dust removing tube；
The adjacent upper spacer and lower clapboard form dedusting gas circuit；
The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, and described first
Exhaustor is connected with second air inlet pipe.
6. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：The dust removing tube
Two ends are equipped with blind flange and flange, and the blind flange is installed on the flange to seal the dust removing tube；
The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the bottom of the lower clapboard
Fit with the upper surface of the blind flange of the dust removing tube bottom；
First cleaner unit also includes baffle plate；
The baffle plate is fixed on the blind flange, and is located at the both sides of the weld of the upper spacer or lower clapboard respectively；
The bottom of the dust removing tube is provided with trumpet-shaped seal pipe；
The blind flange of the bottom of the dust removing tube is communicated with the first blow-off pipe inside the dust removing tube, and described first
Blow-off pipe is provided with valve.
7. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：Second feed bin
The second charge pipe is provided with the top of pipe, one end of second charge pipe is communicated in the inside of the second feed bin pipe, and which is another
End is provided with flange and blind flange, and the blind flange is installed on the flange；
Outer wall of 3rd exhaustor located at second charge pipe；
The second reactor also includes temperature detector, and which is located at the second feed bin pipe.
8. a kind of reaction unit with second reactor according to claim 1, it is characterised in that：Second dedusting
Device includes dust leg, the second blow-off pipe and the 4th air inlet pipe；
4th air inlet pipe is communicated to the 3rd exhaustor；
4th air inlet pipe is vertically arranged, its bottom be located at the dust leg in, at the top of which through the dust leg top
Portion；
The bottom of the 4th air inlet pipe is provided with gas distributor, above the gas distributor is provided with gas flow-disturbing
Plate；
Second blow-off pipe is located at the bottom of the dust leg；
The dust leg is provided with the 4th exhaustor, and which is located at the top of the gas spoiler.
9. a kind of reaction unit with second reactor according to claim 8, it is characterised in that：The gas distribution
Device is horn-like；
The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor is fixed on the bottom of the 4th air inlet pipe thereon at end opening；Arrange on the gas distributor
The full pore of row.
10. a kind of reaction unit with second reactor according to claim 8, it is characterised in that：The gas is disturbed
Stream plate is horn-like；
The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end
It is fixed on the inwall of the dust leg；
Second blow-off pipe is outward-dipping；
The top of the second blow-off pipe side is obtuse angle with the angle A of the base plane formation of the dust leg；
The top of the second blow-off pipe opposite side is acute angle with the angle B of the base plane formation of the dust leg；
The bottom of second blow-off pipe is provided with sewage draining exit；
4th exhaustor is located at the dust leg close to the outer wall at top；
Semicircular baffle is provided with the dust leg, its be located in the 4th air inlet pipe close to the 4th exhaustor that
Side, and positioned at the lower section of the 4th exhaustor；
The Semicircular baffle is downward-sloping setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621179021.5U CN206121704U (en) | 2016-10-27 | 2016-10-27 | Reaction unit with second order reaction ware |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621179021.5U CN206121704U (en) | 2016-10-27 | 2016-10-27 | Reaction unit with second order reaction ware |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206121704U true CN206121704U (en) | 2017-04-26 |
Family
ID=58577749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621179021.5U Active CN206121704U (en) | 2016-10-27 | 2016-10-27 | Reaction unit with second order reaction ware |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206121704U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422988A (en) * | 2016-10-27 | 2017-02-22 | 广东华特气体股份有限公司 | Reaction device with secondary reactor |
-
2016
- 2016-10-27 CN CN201621179021.5U patent/CN206121704U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422988A (en) * | 2016-10-27 | 2017-02-22 | 广东华特气体股份有限公司 | Reaction device with secondary reactor |
| CN106422988B (en) * | 2016-10-27 | 2023-10-03 | 广东华特气体股份有限公司 | Reaction device with secondary reactor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5829343B2 (en) | Method and system for cooling and cleaning biomass synthesis gas | |
| CN206121704U (en) | Reaction unit with second order reaction ware | |
| CN110292828A (en) | A kind of water lift disappears white device and its water lift disappears whitening method | |
| CN206435171U (en) | A kind of reactor of high-effective dust-removing | |
| CN106397107A (en) | Purification system for carbon tetrafluoride | |
| CN106397104B (en) | A kind of carbon tetrafluoride purification system with nitrogen recycling function | |
| CN106390876A (en) | Large-capacity reactor | |
| CN206435214U (en) | A kind of reactor with refrigerating function | |
| CN206109252U (en) | Carbon tetrafluoride's purification system | |
| CN106422988A (en) | Reaction device with secondary reactor | |
| CN106345389B (en) | A kind of reactor with refrigerating function | |
| CN206444580U (en) | A kind of reactor with dedusting function | |
| CN206843096U (en) | One kind recovery special distiller of titanium tetrachloride | |
| CN206435176U (en) | A kind of reactor of Large Copacity | |
| CN106422993A (en) | Efficient dust-removal type reactor | |
| CN106334499A (en) | Spontaneous heating efficient reactor | |
| CN206444578U (en) | A kind of high efficiency reactor of spontaneous heating | |
| CN106268538A (en) | A kind of reactor with dedusting function | |
| CN210237534U (en) | Dry quenching dust removal cooling device | |
| CN207347524U (en) | A kind of biomass gasifying furnace water cooling equipment | |
| CN209968052U (en) | Anthracene oil crystallization zone tail gas treatment system | |
| CN206318902U (en) | A kind of carbon tetrafluoride purification system with nitrogen recycling function | |
| CN207379308U (en) | A kind of energy saving and environment friendly reviver reclaiming smelting device | |
| CN206404545U (en) | A kind of efficient phosphoric acid tail gas wash mill | |
| CN218910417U (en) | Internal cooling ash discharging structure of high-temperature dust removing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |