CN206318902U - A kind of carbon tetrafluoride purification system with nitrogen recycling function - Google Patents

Abstract

A kind of carbon tetrafluoride purification system with nitrogen recycling function, including fluorine source gas, reaction unit, water scrubber, caustic wash tower, rectifying column and nitrogen gas recovering apparatus；Reaction unit includes the second deduster；Second deduster includes dust leg, the second blow-off pipe and the 4th air inlet pipe；4th air inlet pipe is vertically arranged, and its bottom is located in dust leg, and its top is through the top of dust leg；The bottom of 4th air inlet pipe is provided with gas distributor, and gas spoiler is provided with positioned at the top of gas distributor；Second blow-off pipe is located at the bottom of dust leg；Fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column are sequentially connected, and nitrogen gas recovering apparatus is connected between rectifying column and reaction unit；The utility model proposes a kind of carbon tetrafluoride purification system with nitrogen recycling function according to the above, and it, which can stablize, reclaims nitrogen, and good dedusting effect, carbon tetrafluoride purification effect is preferable.

Description

A kind of carbon tetrafluoride purification system with nitrogen recycling function

Technical field

The utility model is related to purification for gas field, more particularly to a kind of carbon tetrafluoride purifying with nitrogen recycling function System.

Background technology

Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silica, The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solar cell, laser In terms of detergent, lubricant and brake fluid in technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit production Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, including hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with Hydrogen fluoride and fluorine gas prepare carbon tetrafluoride etc. with the direct haptoreaction of carbon source.Wherein, current maturation process using hydrofluorocarbons, Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal Impurity；The direct contact reaction method of fluorine carbon prepares carbon tetrafluoride, and this method passes through continuous development and perfection, four can be prepared Fluorocarbons.

But, the purification effect of existing carbon tetrafluoride purification system is not high, and dust removing effects are unsatisfactory, it is impossible to well The liquid nitrogen as rectifying column refrigerant is recycled, is unfavorable for the preparation of carbon tetrafluoride.

Utility model content

The purpose of this utility model is to propose a kind of carbon tetrafluoride purification system with nitrogen recycling function, and it can The stable liquid nitrogen recycled in rectifying column as refrigerant, and water and liquid nitrogen can be carried out heat exchange when reclaiming liquid nitrogen, will Obtained cooling water is used in the preparation process of carbon tetrafluoride, and good dedusting effect, and carbon tetrafluoride purification effect is preferable.

For up to this purpose, the utility model uses following technical scheme：

A kind of carbon tetrafluoride purification system with nitrogen recycling function, including fluorine source gas, reaction unit, water scrubber, alkali Wash tower, rectifying column and nitrogen gas recovering apparatus；

The reaction unit includes the second deduster；

Second deduster includes dust leg, the second blow-off pipe and the 4th air inlet pipe；

4th air inlet pipe is vertically arranged, and its bottom is located in the dust leg, and its top is through the dust leg Top；

The bottom of 4th air inlet pipe is provided with gas distributor, and the top positioned at the gas distributor is disturbed provided with gas Flow plate；

Second blow-off pipe is located at the bottom of the dust leg；

The fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column are sequentially connected, and the nitrogen gas recovering apparatus connects It is connected between the rectifying column and reaction unit；

The nitrogen gas recovering apparatus is used to reclaim the liquid nitrogen in the rectifying column as refrigerant, and when being reclaimed using liquid nitrogen Vaporize heat absorption principle with input to the nitrogen gas recovering apparatus water carry out heat exchange, and by the cooling water after heat exchange export to The reaction unit, nitrogen is recycled to again the rectifying column.

The utility model proposes a kind of carbon tetrafluoride purification system with nitrogen recycling function according to the above, leads to The cooperation of the fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column is crossed, the carbon tetrafluoride of high-purity can be obtained.

When being contaminated with the carbon tetrafluoride gas of carbon dust after the 4th air inlet pipe from the bottom of the 4th air inlet pipe Discharge, the 4th air inlet pipe is vertically arranged, makes its easier for installation, the gas distributor can will be contaminated with carbon dust Carbon tetrafluoride gas is uniformly distributed, in the presence of the gas spoiler, and the carbon tetrafluoride gas for being contaminated with carbon dust can be in institute State and the longer time is stopped in dust leg, be more favorable for falling in second blow-off pipe for carbon dust so that carbon tetrafluoride gas The purity of body is more increased, and mixes fewer carbon dust.

The nitrogen gas recovering apparatus is used to reclaim the liquid nitrogen in the rectifying column as refrigerant, and when being reclaimed using liquid nitrogen Vaporize heat absorption principle with input to the nitrogen gas recovering apparatus water carry out heat exchange, and by the cooling water after heat exchange export to The reaction unit, nitrogen is recycled to again the rectifying column, both can guarantee that nitrogen can be recycled, and can also utilize liquid nitrogen Liberated heat during vaporization, carries out heat exchange with water, cooling water is delivered into the reaction unit, the reaction of carbon tetrafluoride is prepared Substantial amounts of heat can be released, cooling water has the effect for cooling down the reaction unit, increases its service life.

Brief description of the drawings

Fig. 1 is the positive part sectioned view of the first reactor of the one of embodiment of the utility model.

Fig. 2 is the part sectioned view of the side of the first reactor of the one of embodiment of the utility model.

Fig. 3 is the positive part sectioned view of the first deduster of the one of embodiment of the utility model.

Fig. 4 is the partial enlarged drawing at Fig. 3 C.

Fig. 5 is the positive structure schematic of the second reactor of the one of embodiment of the utility model.

Fig. 6 is the cross-sectional view of the discharge of the one of embodiment of the utility model.

Fig. 7 is the perspective view of the second deduster of the one of embodiment of the utility model.

Fig. 8 is the theory diagram of the one of embodiment of the utility model.

Fig. 9 is the theory diagram of the nitrogen gas recovering apparatus of the one of embodiment of the utility model.

Wherein：Fluorine source gas 1, first reactor 2, the first feed bin pipe 21, dilatation pipe 211, downtake pipe 212, first add Expects pipe 213, blow-down pipe 214, support base 215, economizer bank 22, reaction tube 23, the first air inlet 231, thermometer boss 232, method Orchid 261, blind flange 262, cooler bin 24, water inlet pipe 241, overflow pipe 242, the first deduster 25, dust removing tube 251, seal pipe 2511st, dividing plate 252, upper spacer 2521, lower clapboard 2522, dedusting gas circuit 253, the second air inlet pipe 254, second exhaust pipe 255, gear Plate 256, the first blow-off pipe 257, second reactor 3, the second feed bin pipe 31, the 3rd blast pipe 311, the second charge pipe 312, second Support feet 313, discharge 32, sieve plate 321, the 3rd air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, Two dedusters 35, dust leg 351, the 4th blast pipe 3511, Semicircular baffle 3512, the second blow-off pipe 352, sewage draining exit 3521, First support feet 3522, the 4th air inlet pipe 353, gas distributor 354, stomata 3541, gas spoiler 355, water scrubber 4, alkali Wash tower 5, heat-exchange system 51, valve 501, standby valve 502, nitrogen road output end 511, water route output end 512, nitrogen road input 513rd, water route input 514, water bath type vaporizer 515, water-bath type water route output end 5151, plate type heat exchanger 516, board-like water route Input 5161, nitrogen buffer system 52, the first nitrogen buffer tank 521, constant pressure valve 5211, atmospheric valve 5212, charging system 5213rd, the second nitrogen buffer tank 522, safety valve 5221, supercharger 523, standby water route 53, the first standby water route 531, second are standby With water route 532, standby gas circuit 54, the first standby gas circuit 541, the second standby gas circuit 542, auxiliary air passage 55, airbag 6, cold But device 7, lower pressure adsorber 81, pressurized adsorbent device 82, rectifying column 9, filler 10.

Embodiment

Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by embodiment.

As shown in figure 8, a kind of carbon tetrafluoride purification system with nitrogen recycling function, including the fluorine source gas being sequentially connected 1st, reaction unit, water scrubber 4, caustic wash tower 5, airbag 6, cooler 7, lower pressure adsorber 81, pressurized adsorbent device 82, rectifying column 9 and filler 10；

Also include nitrogen gas recovering apparatus, it is connected between the rectifying column 9 and reaction unit；

The nitrogen gas recovering apparatus is used to reclaim the liquid nitrogen in the rectifying column 9 as refrigerant, and is reclaimed using liquid nitrogen When vaporization heat absorption principle with input to the nitrogen gas recovering apparatus water carry out heat exchange, and by after heat exchange cooling water export To the reaction unit, nitrogen is recycled to the rectifying column 9 again, both can guarantee that nitrogen can be recycled, and can also utilize The heat absorbed during liquid nitrogen vaporization, carries out heat exchange with water, cooling water is delivered into the reaction unit, the tetrafluoro of the present embodiment Change carbon to be made up of carbon and fluorine gas reaction, substantial amounts of heat can be released during reaction, cooling water has the work for cooling down the reaction unit With increasing its service life.Meanwhile, the nitrogen reclaimed from the nitrogen recycling system can also be sent to the reaction unit, right The pipeline of the reaction unit carries out purging displacement.

Be provided with booster pump between the caustic wash tower 5 and airbag 6, the lower pressure adsorber 81 and pressurized adsorbent device 82 it Between be provided with booster pump, provide power for the carbon tetrafluoride purification system.

The reaction unit includes first reactor 2 and second reactor 3；

The first reactor 2 includes the first deduster 25, and the second reactor 3 includes the second deduster 35；

The fluorine source gas 1 of the present embodiment prepares fluorine gas using the method for electrolysis, and fluorine gas is passed through to described from the fluorine source gas 1 One reactor 2 and the carbon reaction generation carbon tetrafluoride gas in it, still, often the utilization rate of fluorine gas can not reach percent Hundred, and the carbon dust of incomplete reaction can be mixed with, reacted gas becomes to mainly contain carbon tetrafluoride, perfluoroethane, octafluoro third Alkane, carbon monoxide, carbon dioxide, carbon dust, fluorine gas, the mixed gas of hydrogen fluoride；First deduster 25 being capable of filtration fraction Carbon dust, prevents that dust from blocking follow-up system, improves the purity of carbon tetrafluoride gas.

After by-pass filtration, mixed gas is by the second reactor 3, and the carbon in the second reactor can be fluorine Gas thoroughly reacts, and can improve the utilization rate of fluorine gas, is avoided that with the water in follow-up water scrubber acutely anti-occurs for fluorine gas again Should, second deduster 25 can filter out the overwhelming majority and react incomplete in first reactor 2 and second reactor Carbon dust, further improves the purity of carbon tetrafluoride gas.

The mixed gas come out from the second deduster 35 enters the water scrubber 4, by the processing of washing, can remove mixed The hydrogen fluoride in gas is closed, the aqueous solution of hydrogen fluoride can be stored as byproduct, and can save the alkali needed in follow-up alkali cleaning Liquid.The mixed gas come out from the water scrubber 4 passes through caustic wash tower 5, the hydrogen fluoride for failing to remove completely in water-washing process Remove, further improve the purity of the carbon tetrafluoride gas in mixed gas, the alkali lye used by the present embodiment is molten for potassium hydroxide Liquid.

The mixed gas come out from the caustic wash tower 5 enters to the airbag 6, and mixed gas is gathered up temporarily Come, ensure that follow-up technique has enough tolerance.During washing, mixed gas can carry substantial amounts of water, institute secretly Substantial amounts of water in mixed gas can be removed by stating cooler 7, be easy to being further purified for follow-up carbon tetrafluoride gas；The low pressure Absorber 81 further removes the impurity, the energy of pressurized adsorbent device 82 such as moisture, carbon dioxide, the carbon monoxide in mixed gas Enough carbon monoxide, carbon dioxide and the micro moisture further removed in mixed gas, further improves carbon tetrafluoride gas The purity of body；Pass through the distillation operation of rectifying column again, carbon tetrafluoride gas is separated, then the filler 10 is filled Dress operation, the carbon tetrafluoride gas after purification is filled.

As shown in figure 9, a kind of nitrogen recycling system of reliable operation, including it is heat-exchange system 51, nitrogen buffer system 52, standby With water route 53 and standby gas circuit 54；

It is defeated that the heat-exchange system 51 is provided with nitrogen road input 513, nitrogen road output end 511, water route input 514 and water route Go out end 512, nitrogen is exported to institute from nitrogen road input 513 by the heat-exchange system 51 by nitrogen road output end 511 Nitrogen buffer system 52 is stated, water is defeated by the water route output end 512 by the heat-exchange system 51 from the water route input 514 Go out；

Nitrogen road output end 511, water route output end 512, nitrogen road input 513 and the water route input of the heat-exchange system 51 514 are equipped with valve 501；

Further, the heat-exchange system also includes circulating water pool and water circulating pump.

The input and output end in the standby water route 53 are connected to the water route input 514 of the heat-exchange system 51 With water route output end 512；

The input and output end of the standby gas circuit 54 are connected to the nitrogen road input 513 of the heat-exchange system 51 With the input of the nitrogen buffer system 52；

The standby water route 53 and the standby gas circuit 54 are equipped with standby valve 502.

Further, the heat-exchange system 51 at least includes the heat transmission equipment of two-stage series connection.

More fully Jiang Shui and cold nitrogen carry out heat exchange, easily facilitate the recovery of nitrogen after heating, also cause water Temperature is lower, easily facilitates the use for the process for needing cooling water.

The heat-exchange system 51 of the present embodiment includes the heat transmission equipment of two-stage series connection, and first order heat transmission equipment is water-bath type Vaporizer 515, second level heat transmission equipment is plate type heat exchanger 516.

Rectifying column liquid nitrogen becomes cold nitrogen as refrigerant, liquid nitrogen after vaporization heat absorption, and cold nitrogen temperature is about -100 DEG C, the cold nitrogen for coming from rectifying column is inputted to the heat-exchange system 51 by the nitrogen road input 513 of the heat-exchange system 51, Meanwhile, water to be cooled is inputted to the water of the heat-exchange system 51 by the water route input 514 of the heat-exchange system 51 Bath vaporizer 515, water and cold nitrogen carry out heat exchange, flow into the circulating water pool 517 after the temperature reduction of water, are followed through described The plate type heat exchanger 516 that ring water pump 518 is again introduced into the heat-exchange system 51 is sufficiently cool, reaches after requirement from the water Road output end 512 is exported, and is easy to other techniques to use cooling water.The water circulating pump 518 can provide power for water circulation, make Water in circulating water pool 517 is recycled.

After heat exchange, the rise of the temperature of cold nitrogen becomes the nitrogen of normal temperature, and the nitrogen of normal temperature is from the heat-exchange system 51 nitrogen road output end 511 is exported to the nitrogen buffer system 52, because the amount of nitrogen is big, is first stored in the nitrogen buffering System 52, is easy to the follow-up recovery to nitrogen.

Under normal working condition, the nitrogen road output end 511 of the heat-exchange system 51, water route output end 512, the input of nitrogen road The valve 501 of end 513 and water route input 514 is in open mode, it is ensured that the normal work of the nitrogen recycling system.

When there are abnormal conditions, for example, the heat-exchange system 51 breaks down, it is necessary to close the valve thereon 501；The standby valve 502 of the standby gas circuit 54 is opened, cold nitrogen will be transmitted to the nitrogen from the standby gas circuit 54 Buffer system 52, it is ensured that the transmission of cold nitrogen does not stop, it is to avoid because the heat-exchange system 51 breaks down and completely stops production maintenance, Improve the reliability of the nitrogen recycling system.

Similarly, the operation principle in the standby water route 53 is similar to the operation principle of standby gas circuit 54, it is ensured that described to change When hot systems 51 break down, the transmission of water does not stop, it is to avoid completely stopping production dimension when being broken down because of the heat-exchange system 51 Repair, improve the reliability of the nitrogen recycling system.

On the premise of water and cold nitrogen heat exchange conditions is met, the heat exchange that the heat-exchange system 51 includes two-stage series connection is set It is standby to reduce the cost of the nitrogen recycling system, because the water-bath type vaporization of the price of the plate type heat exchanger 516 Device 515 is expensive, and second level heat transmission equipment is that plate type heat exchanger 516 can reduce nitrogen road and the water route import and export of plate type heat exchanger The temperature difference, plays a part of the protection reduction plate type heat exchanger, increases its service life.

Further, the quantity of the water bath type vaporizer 515 is two, and the quantity of the plate type heat exchanger 516 is one.

The heat exchange efficiency water bath type vaporizer of the plate type heat exchanger 516 is high, so its quantity is one, the water The quantity of bath vaporizer 515 is two.

Further, two composition of water bath type vaporizer 515 water bath type vaporizer groups, the water bath type vaporizer group Water-bath type water route output end 5151 is connected to the board-like water route input 5161 of the plate type heat exchanger 516；

Water-bath type water route output end 5151 and board-like water route input 5161 are respectively equipped with the valve 501；

53 points of the standby water route is the first standby water route 532 in standby water route 531 and second；

The standby water route 532 in the first standby water route 531 and second is equipped with the standby valve 502；

The input in the first standby water route 531 is connected to the water route input 514 of the heat-exchange system 51；

The output end in the first standby water route 531 respectively with water-bath type water route output end 5151, the second standby water The input on road 532 and board-like water route input 5161 are connected；

The output end in the second standby water route 532 is connected to the water route output end 512 of the heat-exchange system 51.

The reliability of the nitrogen recycling system water route work is further improved, when individual other valve 501 or standby , can be by operating the switches of other valves 501 or standby valve 502 when valve 502 breaks down, you can ensure described The water route of water bath type vaporizer group and plate type heat exchanger 516 can normally work independently, and improve the work of the nitrogen recycling system Make reliability, also reduce the difficulty of subsequent maintenance.

For example, when the valve 501 of the water-bath type water route output end 5151 of the water bath type vaporizer group breaks down When needing to be turned off, the standby valve 502 in the first standby water route 531 is opened, the board-like water route input is opened The valve 501 at end 5161, closes the standby valve 502 in the second standby water route 532, water can be from described first Standby water route 531 is passed through to the plate type heat exchanger 516, even if the water bath type vaporizer group cisco unity malfunction, the plate Formula heat exchanger 516 also being capable of normal work, it is to avoid the maintenance that completely stops production because of the wherein failure of some valve 501, enters one Step improves the reliability of the nitrogen recycling system.

Further, 54 points of the standby gas circuit is the first standby gas circuit 542 of standby gas circuit 541 and second, and is respectively equipped with The standby valve 502；

The input of the standby gas circuit 542 of the first standby gas circuit 541 and second is all connected to the heat-exchange system 51 Nitrogen road input 513；

The output end of the standby gas circuit 542 of the first standby gas circuit 541 and second is all connected to the nitrogen buffer system 52 input；

Nitrogen recycling system also includes auxiliary air passage 55, and it is provided with standby valve 502；

The input of the auxiliary air passage 55 is connected to the output end of the described first standby gas circuit 541, second standby The output end of gas circuit 542 and the input of nitrogen buffer system 52；

The output end of the auxiliary air passage 55 is connected to the plate type heat exchanger 516.

The reliability of the nitrogen recycling system gas circuit work is further improved, when individual other water bath type vaporizer 515 or during the failure of plate type heat exchanger 516, can be by operating the switch of other valves 501 or standby valve 502, you can Ensureing the gas circuit of the normal water bath type vaporizer 515 or plate type heat exchanger 516 can normally work independently, and improve the nitrogen The functional reliability of gas recovery system, also reduces the difficulty of subsequent maintenance.

Further, the nitrogen buffer system 52 includes the first nitrogen buffer tank 521 and the second nitrogen buffer tank 522；

The output end of first nitrogen buffer tank 521 is connected to the input of second nitrogen buffer tank 522；

Supercharger 523, second nitrogen are provided between the nitrogen buffer tank 522 of first nitrogen buffer tank 521 and second The output end of gas surge tank 522 is connected to the rectifying column 9.

In order to not influence normal operating, the operation of rectifying column, the nitrogen of 521 pairs of recovery of the first nitrogen buffer tank has slow Rush the effect of storage；The setting of the supercharger 523, increases the pressure of nitrogen, can be efficiently by described in the nitrogen of recovery the The output end of one nitrogen buffer tank 521 is transmitted to second nitrogen buffer tank 522, then from second nitrogen buffer tank 522 Transmit to the rectifying column 9, be that the rectifying column 9 sustainedly and stably provides nitrogen.

Further, first nitrogen buffer tank 521 is provided with constant pressure valve 5211.

Ensure the pressure value of first nitrogen buffer tank 521 in constant scope, can improve security can also carry The service life of high first nitrogen buffer tank 521, it is to avoid the work under conditions of overvoltage of the first nitrogen buffer tank 521 Make.

Further, the output end of first nitrogen buffer tank 521 is provided with atmospheric valve 5212.

78 the percent of nitrogen duty gas total amount, when the nitrogen amount in first nitrogen buffer tank 521 is excessive, It can be vented by the atmospheric valve 5212, be discharged in air, first nitrogen buffer tank 521 can be protected, and not Welding.

Further, the output end of first nitrogen buffer tank 521 is provided with charging system 5213.

The charging system 5213 of the present embodiment include it is multiple fill tank, the nitrogen of recovery, which is loaded in, described fills tank It is interior, it is easy to the transport and utilization follow-up to nitrogen.

Further, second nitrogen buffer tank 522 is provided with safety valve 5221.

Ensure the operating pressure in safety in second nitrogen buffer tank 522, when its interior pressure superpressure, Neng Goujin Row pressure discharge operations, improve its security and service life.

As shown in figure 1, the first reactor 2 also includes the first feed bin pipe 21, economizer bank 22 and reaction tube 23；

The bottom of the first feed bin pipe 21 is provided with horn-like dilatation pipe 211, the opening by its upper end of dilatation pipe 211 Mouth is gradually inwardly narrowed to the opening of its lower end；

The first feed bin pipe 21, dilatation pipe 211 and economizer bank 22 be it is vertically arranged, the reaction tube 23 for laterally set Put；

The upper end of the economizer bank 22 is connected with the opening of the lower end of dilatation pipe 211, and the lower end of the economizer bank 22 connects Pass through the reaction tube 23；

The two ends of the reaction tube 23 are provided with the first air inlet 231；

The first feed bin pipe 21 is provided with downtake pipe 212, and it is connected to first deduster 25；

As shown in figure 5, the second reactor 3 also includes the second feed bin pipe 31, discharge 32, heating muff 33 and the 3rd Blast pipe 311；

The discharge 32 is located at the bottom of the second feed bin pipe 31；

The top of the discharge 32 is provided with opening and is communicated to the inside of the second feed bin pipe 31；

The top open part of the discharge 32 is provided with sieve plate 321；

The discharge 32 is provided with the 3rd air inlet pipe 322, and it is connected to first deduster 25；

3rd blast pipe 311 is connected to second deduster 35；

The heating muff 33 has multiple, and it is hollow, and it is extended transversely through in the second feed bin pipe 31；

Heating tube is set in the heating muff 33.

The first reactor 2 of the present embodiment is used for fluorine gas and carbon reaction generation carbon tetrafluoride, and carbon is placed on described the In one feed bin pipe 21, economizer bank 22 and reaction tube 23, first air inlet 231 is located at the two ends of reaction tube 23, one side energy Enough fluorine gas is passed through to the amount of the reaction tube 23 in the increase unit interval, more fluorine gas is fully contacted with carbon, increase reaction Efficiency；Fluorine gas releases heat when being chemically reacted with carbon, because the lower end of the economizer bank 22 is communicated in the reaction tube 23, substantial amounts of heat can be transferred to the carbon in the economizer bank 22 by reaction product carbon tetrafluoride, and these carbon are preheated, and be protected Hold reaction temperature stable, make the reaction efficiency of follow-up carbon and fluorine gas higher.

With the progress of reaction, the carbon of the reaction tube 23 is gradually consumed, due to the first feed bin pipe 21, dilatation pipe 211 and economizer bank 22 be vertically arranged, under gravity, the carbon in the economizer bank 22 will drop down onto the reaction down Pipe 23 improves the stability and continuation of its work to ensure the lasting progress of reaction；Similarly, in the first feed bin pipe 21 Carbon can down drop down onto and ensure in the economizer bank 22 that the carbon of question response is preheated, be that follow-up reaction is ready.

The horn-like dilatation pipe 211 has the effect for expanding the volume of the first feed bin pipe 21, due to the dilatation Pipe 211 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, so being connected to the upper end open of dilatation pipe 211 The first feed bin pipe 21 cross-sectional area can be more than be connected to the lower ending opening of dilatation pipe 211 economizer bank 22 cross section Product, it is assumed that the first feed bin pipe 21 and economizer bank 22 are under identical length, and the volume of the first feed bin pipe 21 can be significantly Increase, so as to reduce the addition number of times of carbon, improves the continuation that the first reactor 2 works.

Mixed gas can carry out dust removal process from the row of downtake pipe 212 to first deduster 25, carry out just After level dedusting, the content reduction of carbon dust in mixed gas, the purity of carbon tetrafluoride gas is improved, and the mixing after primary dedusting Gas enters the discharge 32 by the 3rd air inlet pipe 322, and the sieve plate 321 is to allow carbon dust in mixed gas Fall into the discharge 32, to prevent from blocking；Fluorine gas and carbon tetrafluoride gas then enter to described second by sieve plate 321 Feed bin pipe 31, because the discharge 32 is located at the bottom of the second feed bin pipe 31, can more facilitate during follow-up cleaning carbon dust Fast.

Because the heating muff 33 is hollow, the heating tube is facilitated to be put into the inside of the heating muff 33； Due to the heating muff 33 have it is multiple, it is extended transversely through in the second feed bin pipe 31, can be effectively more carbon It is carried in the second feed bin pipe 31；Heating tube is heated, and makes the temperature rise of carbon supported by the heating muff 33, when When fluorine gas is with temperature elevated carbon haptoreaction, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then Second deduster 35 is expelled to from the 3rd blast pipe 311 and carries out two-stage dust removal, and the utilization rate of final fluorine gas reaches hundred / hundred, the content of carbon dust is also preferably minimized, and greatly promotes the purity of carbon tetrafluoride gas.

Further, the top of the first feed bin pipe 21 is provided with the first charge pipe 213 and blow-down pipe 214；

One end of first charge pipe 213 and one end of blow-down pipe 214 are respectively communicated with the first feed bin pipe 21 Top；

The other end of first charge pipe 213 and the two ends of the reaction tube 23 are equipped with flange 261 and blind flange 262, the blind flange 262 is installed on the flange 261.

Carbon in the first reactor 2 is after reaction consumption, from located at the first of the top of the first feed bin pipe 21 Charge pipe 213 adds carbon, operate simpler convenience directly, because one end and the blow-down pipe 214 of first charge pipe 213 One end is respectively communicated with the top of the first feed bin pipe 21, so carbon can drop down onto the first feed bin pipe down under gravity 21st, dilatation pipe 211, economizer bank 22 and reaction tube 23, to ensure the lasting progress of reaction；Because first charge pipe 213 The two ends of the other end and the reaction tube 23 are equipped with flange 261 and blind flange 262, and the blind flange 262 is installed on the method Orchid 261, so in charging and need to only dismantle the blind flange 262 during emptying gas, just can be carried out to the first reactor 2 Feeding operation.

The other end of the blow-down pipe 214 is communicated to exhaust gas treating tower, and emptying valve need to be only opened during operation can be with Carry out the emptying of gas.

Further, the reaction tube 23 is respectively arranged at two ends with flange 261 and blind flange 262, and the blind flange 262 installs In the flange 261 to seal the reaction tube 23；

First air inlet 231 is located at the blind flange 262.

By installing the flange 261 in the blind flange 262, the reaction tube 23 can be effectively sealed, it is to avoid gas Body is leaked, such as leakage of reactant fluorine gas and the leakage of product carbon tetrafluoride gas；By dismantling the blind flange 262, energy The waste residue that enough reactions rapidly cleared up in the reaction tube 23 leave, it is simple to operate；First air inlet 231 is located at The blind flange 262, it is ensured that fluorine gas is effectively passed through to the reaction tube.

Further, the radial position of the downtake pipe 212 laterally at the top proximal of the first feed bin pipe 21.

The outer wall of the downtake pipe 212 laterally at the top proximal of the first feed bin pipe 21, can make mixing The distance increase that gas rises, is conducive to the sedimentation under gravity of carbon dust, improves the purity of carbon tetrafluoride gas.

Further, the first reactor 2 also includes cooler bin 24；

The reaction tube 23 is in the cooler bin 24, and the two ends of the reaction tube 23 protrude from the cooler bin 24 It is outside.

Substantial amounts of heat can be released when fluorine gas and carbon reaction, the cooler bin 24 is built with cooling water, to reduce the reaction The temperature of pipe 23, so as to increase its service life.The two ends of the reaction tube 23 protrude from the outside of the cooler bin 24, convenient Installed in the dismounting of the blind flange 262 at its two ends, it is to avoid cooling water is entered in the reaction tube 23.

Further, the cooler bin 24 is rectangular box, and its top is provided with opening；

The bottom outer wall of the wherein side wall of the cooler bin 24 is at least provided with a water inlet pipe 241, the water inlet pipe 241 The water route output end 512 of the heat-exchange system 51 is connected to, the cooling water after the heat-exchange system 51 heat exchange can be from described Water inlet pipe 241 is delivered to cooler bin 24, to cool down the reaction tube 23；

Outer wall at the top proximal of the wherein side wall of the cooler bin 24 is at least provided with an overflow pipe 242；

The reaction tube 23 is provided with least one thermometer boss 232；

The lower end closed of the thermometer boss 232 and in the reaction tube 23；

Temperature detector 34 is provided with the thermometer boss 232.

The casing of rectangle is easily produced, and the cooling water that can be loaded is also more, its opening for being provided with of top play observation and Check the effect of the reactor behaviour in service.As shown in Fig. 2 the quantity of the water inlet pipe 241 of the present embodiment is one, it is described The quantity of overflow pipe 242 is two, and the water inlet pipe 241 and overflow pipe 242 are located at the side wall of the cooler bin 24, are more convenient it Install；The bottom outer wall of the wherein side wall of the cooler bin 24, when water inlet of the cooling water by the water inlet pipe 241, Cooling water, which is passed through to during the cooler bin 24, more slowly to be stablized；The overflow pipe 242 is located at the cooler bin 24 wherein Outer wall at the top proximal of side wall, it is ensured that cooling water in the cooler bin 24 is enough effectively to cool down the reaction Pipe 23, it is to avoid cooling dilutional hyponatremia overflows.

As shown in figure 1, the quantity of the thermometer boss 232 of the present embodiment is two, and it is symmetrically set in the economizer bank On the reaction tube 23 of 22 both sides, it is possible to increase the temperature detector 34 is to the accurate of the temperature detection in reaction tube 23 Degree, the lower end closed of the thermometer boss 232, can seal the reaction tube 23 can also protect the temperature detector 34.

Further, as shown in figure 3, first deduster 25 includes dust removing tube 251 and dividing plate 252；

The dividing plate 252 includes upper spacer 2521 and lower clapboard 2522, the number of the upper spacer 2521 and lower clapboard 2522 Amount is at least one；

The upper spacer 2521 and lower clapboard 2522 are equally spacedly welded in the dust removing tube 251；

The adjacent upper spacer 2521 and the formation dedusting of lower clapboard 2522 gas circuit 253；

The outer wall of the dust removing tube 251 is communicated with the second air inlet pipe 254 and second row inside the dust removing tube 251 Tracheae 255, the downtake pipe 212 is connected with second air inlet pipe 254.

When mixed gas enters to the dedusting gas circuit 253 of the dust removing tube 251 by second air inlet pipe 254, in institute In the presence of the iris action and gravity of stating upper spacer 2521 and lower clapboard 2522, carbon dust can be settled down to the dust removing tube 251 Bottom, is easy to follow-up cleaning, to improve the purity of carbon tetrafluoride gas, the carbon tetrafluoride gas being finally further purified from The second exhaust pipe 255 is expelled to the 3rd air inlet pipe 322.

The quantity of the upper spacer 2521 of the present embodiment is two, and the quantity of the lower clapboard 2522 is one, by welding, So that the upper spacer 2521 and lower clapboard 2522 are more firmly located in the dust removing tube 251.

Further, the two ends of the dust removing tube 251 are equipped with blind flange 262 and flange 261, and the blind flange 262 is installed In the flange 261 to seal the dust removing tube 251；

The top of the upper spacer 2521 is fitted with the lower surface of the blind flange 262 on the top of dust removing tube 251, institute Fitted with the upper surface of the blind flange 262 of the bottom of dust removing tube 251 bottom for stating lower clapboard 2522；

First deduster 25 also includes baffle plate 256；

The baffle plate 256 is fixed on the blind flange 262, and is located at the upper spacer 2521 or lower clapboard 2522 respectively Weld both sides；

The bottom of the dust removing tube 251 is provided with horn-like seal pipe 2511；

The blind flange 262 of the bottom of the dust removing tube 251 is communicated with the first row inside the dust removing tube 251 Dirty pipe 257, first blow-off pipe 257 is provided with valve.

As shown in Figure 3 and Figure 4, the dust removing tube 251 can be rapidly cleared up by dismounting the blind flange 262, it is described The top of upper spacer 2521 is fitted with the lower surface of the blind flange 262 on the top of dust removing tube 251, the lower clapboard 2522 Bottom fitted with the upper surface of the blind flange 262 of the bottom of dust removing tube 251, mixed gas is removed along described as far as possible Dust and gas road 253 is moved, rather than is directly directly worn from the joint place of the blind flange 262 and upper spacer 2521 and lower clapboard 2522 Cross, improve the quality except carbon dust and the purity of carbon tetrafluoride gas.

The baffle plate 256 can stop mixed gas directly from the blind flange 262 and upper spacer 2521 and lower clapboard 2522 joint place is directly through further raising is except the quality of carbon dust and the purity of carbon tetrafluoride gas.

The blind flange 262 of the bottom of dust removing tube 251 need to periodically pull down discharge solid-state carbon dust, but the dust removing tube The diameter of 251 bottoms is bigger, sealing is more difficult to, so the seal pipe 2511 is set to from opening the opening to its lower end of its upper end The horn-like pipe that mouth is gradually inwardly narrowed, improves its seal degree.

The fluorine gas of the present embodiment is produced by electrolysis, so HF gases can be contaminated with fluorine gas, at a temperature of it Acid solution can be become after drop, in order to clear up safety during carbon dust, the valve on the blow-off pipe 257 is first opened, clear acid solution, then tear open Unload the cleaning dust of blind flange 262.

Further, the first feed bin pipe 21 also includes at least two support bases 215；

Outer wall circumference of the support base 215 along the first feed bin pipe 21 is equally spacedly set.

The quantity of the support base 215 of the present embodiment is two, and it is along between outer wall circumference of the first feed bin pipe 21 etc. Set away from ground, can preferably support the first feed bin pipe 21, stress when being supported the first feed bin pipe 21 is more Uniformly.

Further, the top of the second feed bin pipe 31 is provided with the second charge pipe 312, the one of second charge pipe 312 End is communicated in the inside of the second feed bin pipe 31, and its other end is provided with flange 261 and blind flange 262, and the blind flange 262 is pacified Loaded on the flange 261；

3rd blast pipe 311 is located at the outer wall of second charge pipe 312；

As shown in figure 5, the second reactor 3 also includes temperature detector 34, it is located at the second feed bin pipe 31, and Close to the heating muff 33.

Carbon in the second reactor 3 is after reaction consumption, from located at the second of the top of the second feed bin pipe 31 Charge pipe 312 adds carbon, operates simpler convenience directly, one end of second charge pipe 312 is communicated in second material The inside of storekeeper 31, so carbon can be dropped down onto down in the second feed bin pipe 31 under gravity, dismounting is only needed in charging The blind flange 262, just can carry out feeding operation to the second reactor 3.

The reaction efficiency of carbon and fluorine gas near the heating muff 33 is higher, and the temperature detector 34 can be effectively The temperature of the reaction zone of the second feed bin pipe 31 is detected, so that the preferably heating-up temperature of heating tube described in control, to ensure carbon Optimal reaction temperature is continuously in fluorine gas.

Further, as shown in figure 5, the bottom of the discharge 32 is provided with blind flange 262 and flange 261；

The blind flange 262 is installed on the flange 261 to seal the discharge 32.

It is more enough effectively to seal the discharge 32 by installing the blind flange 262, it is to avoid gas is leaked；It is logical Cross and dismantle the blind flange 262, the dust that the reaction that can rapidly clear up in the discharge 32 leaves is mainly described The carbon dust that sieve plate 321 is filtered.

Further, as shown in fig. 6, being provided with support column 323 in the discharge 32；

The two ends of the support column 323 are respectively held against the bottom of the sieve plate 321 and the top of the blind flange 262.

323 pairs of the support column sieve plate 321 has supporting role, can effectively support the sieve plate 321, it is ensured that The stability of its work, can stably filter carbon dust.

Further, the heating muff 33 is located at the proximal end of the bottom of the second feed bin pipe 31.

As far as possible many carbon can be made to be supported by the heating muff 33, the number of times of follow-up plus carbon is on the one hand reduced, it is another Aspect can also be such that fluorine gas is contacted with more carbon, improve the efficiency of its reaction.

The second reactor 3 also includes temperature detector 34, and it is located at the second feed bin pipe 31.

The reaction efficiency of carbon and fluorine gas near the heating muff 33 is higher, and the temperature detector 34 can be effectively The temperature of the reaction zone of the second feed bin pipe 31 is detected, so that the preferably heating-up temperature of heating tube described in control, to ensure carbon Optimal reaction temperature is continuously in fluorine gas.

Further, second deduster 35 includes dust leg 351, the second blow-off pipe 352 and the 4th air inlet pipe 353；

4th air inlet pipe 353 is communicated to the 3rd blast pipe 311；

4th air inlet pipe 353 is vertically arranged, and its bottom is located in the dust leg 351, and its top is through described The top of dust leg 351；

The bottom of 4th air inlet pipe 353 is provided with gas distributor 354, positioned at the top of the gas distributor 354 Provided with gas spoiler 355；

Second blow-off pipe 352 is located at the bottom of the dust leg 351；

The dust leg 351 is provided with the 4th blast pipe 3511, and it is located at the top of the gas spoiler 355.

It can mix some reactions not in the carbon tetrafluoride gas that carbon and fluorine gas reaction in the second feed bin pipe 31 are generated Sufficient carbon dust, the 4th air inlet pipe 353 is entered to when being contaminated with the carbon tetrafluoride gas of carbon dust by the 3rd blast pipe 311 Discharged afterwards from the bottom of the 4th air inlet pipe 353, the 4th air inlet pipe 353 is vertically arranged, makes its easier for installation, institute The top of the 4th air inlet pipe 353 is stated through the top of the dust leg 351, makes its connection with the 3rd blast pipe 311 More facilitate.

The carbon tetrafluoride gas for being contaminated with carbon dust can be uniformly distributed by the gas distributor 354, be disturbed in the gas Flow in the presence of plate 355, being contaminated with the carbon tetrafluoride gas of carbon dust can stop the longer time in the dust leg 351, more Plus falling in second blow-off pipe 352 beneficial to carbon dust, the 4th blast pipe 3511 is positioned at the gas spoiler 355 Top, the purity of carbon tetrafluoride gas finally discharged therefrom is more increased, mix fewer carbon dust.

Further, the gas distributor 354 is horn-like；

The gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；

The gas distributor 354 is fixed on the bottom of the 4th air inlet pipe 353 at its upper end open；The gas Full stomata 3541 is arranged on distributor 354.

Because the upper end open of the gas distributor 354 is smaller, so can be with less 4th air inlet pipe 353 in aperture Matching is fixed, and the horn-like gas distributor 354 is gradually expanded outwardly to the opening of its lower end from the opening of its upper end, made The distribution for obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.The stomata 3541 further makes mixed gas Distribution is more uniform, is more favorable for the sedimentation of carbon dust.

Further, the gas spoiler 355 is horn-like；

The gas spoiler 355 gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, and its upper end is opened The edge of mouth is fixed on the inwall of the dust leg 351；

Second blow-off pipe 352 is outward-dipping；

The angle A of the base plane formation of the top of the side of second blow-off pipe 352 and the dust leg 351 is blunt Angle；

The angle B of the base plane formation of the top of the opposite side of second blow-off pipe 352 and the dust leg 351 is sharp Angle；

The bottom of second blow-off pipe 352 is provided with sewage draining exit 3521；

4th blast pipe 3511 is located at the dust leg 351 close to the outer wall at top；

Semicircular baffle 3512 is provided with the dust leg 351, it is located in the 4th air inlet pipe 353 close to described That side of 4th blast pipe 3511, and positioned at the lower section of the 4th blast pipe 3511；

The Semicircular baffle 3512 is set to be downward-sloping.

The edge of the opening of the upper end of gas spoiler 355 is fixed on the inwall of the dust leg 351, so being contaminated with The carbon tetrafluoride gas of carbon dust effectively can be hindered by the gas spoiler 355 towards the outer wall of the bottom of dust leg 351 Gear, makes mixed gas have more times to rest in the dust leg 351, is conducive to the sedimentation of carbon dust；The gas is disturbed Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from the gas spoiler 355 Top settle, will not also be deposited on the gas spoiler 355, also can along the upper end of gas spoiler 355 opening Under drop down onto the opening of its lower end, eventually fall into second blow-off pipe 352.

As shown in fig. 7, the angle A of the present embodiment is 120 °, angle B is 30 °, more easily and safely clears up described Carbon dust in second blow-off pipe 352, the sewage draining exit 3521 of the present embodiment is provided with blind flange 262 and flange 261, passes through dismounting The mode of blind flange 262, carbon dust is finally discharged from the sewage draining exit 3521.

4th blast pipe 3511, close to the outer wall at top, has mixed gas more located at the dust leg 351 Time rest in the dust leg 351, be conducive to the sedimentation of carbon dust；Semicircular baffle is provided with the dust leg 351 3512, it can obstruct the rising of mixed gas, and mixed gas is rushed for, away from the exit of the 4th blast pipe 3511, to enter one Step ground allows the mixed gas to have more times to rest in the dust leg 351, is more conducive to be conducive to the sedimentation of carbon dust, it is described partly Circular baffle plate 3512 is set to be downward-sloping, and carbon dust is not easy to be deposited in thereon, and can take advantage of a situation whereabouts.

The outer wall of second blow-off pipe 352 can be supported described at least vertically provided with three the first support feets 3522 Second blow-off pipe 352, facilitates it to install.The outer wall of the second feed bin pipe 31 is at least vertically provided with three the second support feets 313, the second feed bin pipe 31 can be supported, facilitates it to install.

Know-why of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality With new principle, and the limitation to the utility model protection domain can not be construed in any way.Based on explanation herein, Those skilled in the art, which would not require any inventive effort, can associate other embodiments of the present utility model, These modes are fallen within protection domain of the present utility model.

Claims (10)

1. a kind of carbon tetrafluoride purification system with nitrogen recycling function, including fluorine source gas, reaction unit, water scrubber, alkali cleaning Tower, rectifying column and nitrogen gas recovering apparatus；

It is characterized in that：The reaction unit includes the second deduster；

Second deduster includes dust leg, the second blow-off pipe and the 4th air inlet pipe；

4th air inlet pipe is vertically arranged, and its bottom is located in the dust leg, and its top is through the top of the dust leg Portion；

The bottom of 4th air inlet pipe is provided with gas distributor, and gas flow-disturbing is provided with positioned at the top of the gas distributor Plate；

Second blow-off pipe is located at the bottom of the dust leg；

The fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column are sequentially connected, and the nitrogen gas recovering apparatus is connected to Between the rectifying column and reaction unit；

The nitrogen gas recovering apparatus is used to reclaim the liquid nitrogen in the rectifying column as refrigerant, and is vaporized when being reclaimed using liquid nitrogen The principle of heat absorption and the water of input to the nitrogen gas recovering apparatus carry out heat exchange, and the cooling water after heat exchange is exported to described Reaction unit, nitrogen is recycled to again the rectifying column and reaction unit.

2. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 1, it is characterised in that：Institute Stating purification system also includes airbag, cooler, lower pressure adsorber, pressurized adsorbent device and filler；

The fluorine source gas, reaction unit, water scrubber, caustic wash tower, airbag, cooler, lower pressure adsorber, pressurized adsorbent device, Rectifying column and filler are sequentially connected.

3. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 2, it is characterised in that：Institute Stating nitrogen gas recovering apparatus includes heat-exchange system, nitrogen buffer system, standby water route and standby gas circuit；

The heat-exchange system is provided with nitrogen road input, nitrogen road output end, water route input and water route output end, and nitrogen is described in Nitrogen road input is exported to the nitrogen buffer system by the heat-exchange system by nitrogen road output end, and water is from the water route Input is exported by the heat-exchange system by the water route output end；

Nitrogen road output end, water route output end, nitrogen road input and the water route input of the heat-exchange system are equipped with valve；

The input and output end in the standby water route are connected to water route input and the water route output of the heat-exchange system End；

The input and output end of the standby gas circuit are connected to the nitrogen road input and the nitrogen of the heat-exchange system The input of buffer system；

The standby water route and the standby gas circuit are equipped with standby valve；

Heat-exchange system also includes circulating water pool and water circulating pump.

4. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 3, it is characterised in that：Institute Stating heat-exchange system includes the heat transmission equipment of two-stage series connection, and first order heat transmission equipment is water bath type vaporizer, second level heat transmission equipment For plate type heat exchanger；

The quantity of the water bath type vaporizer is two, and the quantity of the plate type heat exchanger is one；

Two water bath type vaporizer composition water bath type vaporizer groups, the water-bath type water route output of the water bath type vaporizer group End is connected to the board-like water route input of the plate type heat exchanger；

Water-bath type water route output end and board-like water route input are respectively equipped with the valve；

The standby water route is divided into the first standby water route and the second standby water route；

The first standby water route and the second standby water route are equipped with the standby valve；

The input in the first standby water route is connected to the water route input of the heat-exchange system；

The output end in the first standby water route respectively with water-bath type water route output end, the input in the second standby water route and Board-like water route input connection；

The output end in the second standby water route is connected to the water route output end of the heat-exchange system；

The standby gas circuit is divided into the first standby gas circuit and the second standby gas circuit, and is respectively equipped with the standby valve；

The input of the first standby gas circuit and the second standby gas circuit is all connected to the nitrogen road input of the heat-exchange system；

The output end of the first standby gas circuit and the second standby gas circuit is all connected to the input of the nitrogen buffer system；

Nitrogen gas recovering apparatus also includes auxiliary air passage, and it is provided with standby valve；

The input of the auxiliary air passage is connected to the output end of the described first standby gas circuit, the output of the second standby gas circuit End and the input of nitrogen buffer system；

The output end of the auxiliary air passage is connected to the plate type heat exchanger；

The nitrogen buffer system includes the first nitrogen buffer tank and the second nitrogen buffer tank；

The output end of first nitrogen buffer tank is connected to the input of second nitrogen buffer tank；

Supercharger, the output of second nitrogen buffer tank are provided between first nitrogen buffer tank and the second nitrogen buffer tank End is connected to the rectifying column.

5. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 4, it is characterised in that：

The reaction unit includes first reactor and second reactor；

The first reactor includes the first deduster, and the second reactor includes the second deduster；

The first reactor also includes the first feed bin pipe, economizer bank and reaction tube；

The bottom of the first feed bin pipe is provided with horn-like dilatation pipe, and the dilatation pipe is from the opening of its upper end to its lower end Opening is gradually inwardly narrowed；

The first feed bin pipe, dilatation pipe and economizer bank be it is vertically arranged, the reaction tube for laterally set；

The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in the reaction The outer wall of pipe；

The two ends of the reaction tube are provided with the first air inlet；

The first feed bin pipe is provided with downtake pipe, and it is connected to first deduster；

The second reactor also includes the second feed bin pipe, discharge, heating muff and the 3rd blast pipe；

The discharge is located at the bottom of the second feed bin pipe；

The top of the discharge is provided with opening and is communicated to the inside of the second feed bin pipe；

The top open part of the discharge is provided with sieve plate；

The discharge is provided with the 3rd air inlet pipe, and it is connected to first deduster；

3rd blast pipe is connected to the 4th air inlet pipe of second deduster；

The heating muff has multiple, and it is hollow, and it is extended transversely through in the second feed bin pipe；

Heating tube is set in the heating muff.

6. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 5, it is characterised in that：The The top of one feed bin pipe is provided with the first charge pipe and blow-down pipe；

One end of first charge pipe and one end of blow-down pipe are respectively communicated with the top of the first feed bin pipe；

The other end of first charge pipe and the two ends of the reaction tube are equipped with flange and blind flange, and the blind flange is installed In the flange.

7. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 5, it is characterised in that：Institute Stating first reactor also includes cooler bin；

The reaction tube is in the cooler bin, and the two ends of the reaction tube protrude from the outside of the cooler bin；

The cooler bin is rectangular box, and its top is provided with opening；

The bottom outer wall of the wherein side wall of the cooler bin is at least provided with a water inlet pipe, and the water inlet pipe is connected to described change The water route output end of hot systems；

Outer wall at the top proximal of the wherein side wall of the cooler bin is at least provided with an overflow pipe；

The reaction tube is provided with least one thermometer boss；

The lower end closed of the thermometer boss and in the reaction tube；

Temperature detector is provided with the thermometer boss；

First deduster includes dust removing tube and dividing plate；

The dividing plate includes upper spacer and lower clapboard, and the quantity of the upper spacer and lower clapboard is at least one；

The upper spacer and lower clapboard are equally spacedly welded in the dust removing tube；

The adjacent upper spacer and lower clapboard formation dedusting gas circuit；

The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, described first Blast pipe is connected with second air inlet pipe.

8. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 7, it is characterised in that：Institute The two ends for stating dust removing tube are equipped with blind flange and flange, and the blind flange is installed on the flange to seal the dust removing tube；

The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the bottom of the lower clapboard Fitted with the upper surface of the blind flange of the dust removing tube bottom；

First deduster also includes baffle plate；

The baffle plate is fixed on the blind flange, and is located at the both sides of the weld of the upper spacer or lower clapboard respectively；

The bottom of the dust removing tube is provided with horn-like seal pipe；

The blind flange of the bottom of the dust removing tube is communicated with the first blow-off pipe inside the dust removing tube, described first Blow-off pipe is provided with valve.

9. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 5, it is characterised in that：Institute The top for stating the second feed bin pipe is provided with the second charge pipe, and one end of second charge pipe is communicated in the interior of the second feed bin pipe Portion, its other end is provided with flange and blind flange, and the blind flange is installed on the flange；

3rd blast pipe is located at the outer wall of second charge pipe；

The second reactor also includes temperature detector, and it is located at the second feed bin pipe, and close to the heating muff.

10. a kind of carbon tetrafluoride purification system with nitrogen recycling function according to claim 1, it is characterised in that：

The gas distributor is horn-like；

The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；

The gas distributor is fixed on the bottom of the 4th air inlet pipe at its upper end open；Arranged on the gas distributor The full stomata of row；

The gas spoiler is horn-like；

The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end It is fixed on the inwall of the dust leg；

Second blow-off pipe is outward-dipping；

The top of the second blow-off pipe side is obtuse angle with the angle A that the base plane of the dust leg is formed；

The top of the second blow-off pipe opposite side is acute angle with the angle B that the base plane of the dust leg is formed；

The bottom of second blow-off pipe is provided with sewage draining exit；

The dust leg is provided with the 4th blast pipe, and it is located at the top of the gas spoiler, and close to the dust tube top The outer wall in portion；

Semicircular baffle is provided with the dust leg, its be located in the 4th air inlet pipe close to the 4th blast pipe that Side, and positioned at the lower section of the 4th blast pipe；

The Semicircular baffle is set to be downward-sloping.