CN206435171U - A kind of reactor of high-effective dust-removing - Google Patents
A kind of reactor of high-effective dust-removing Download PDFInfo
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- CN206435171U CN206435171U CN201621178832.3U CN201621178832U CN206435171U CN 206435171 U CN206435171 U CN 206435171U CN 201621178832 U CN201621178832 U CN 201621178832U CN 206435171 U CN206435171 U CN 206435171U
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Abstract
A kind of reactor of high-effective dust-removing, including feed bin pipe, discharge, heating muff, downtake pipe and deduster；Discharge is located at the bottom of feed bin pipe；The top of discharge is provided with opening and is communicated to the inside of feed bin pipe；The top open part of discharge is provided with sieve plate；Discharge is provided with the first air inlet pipe；Heating muff has multiple, and it is hollow, and it is extended transversely through in feed bin pipe；Heating tube is set in heating muff；Deduster includes dust leg, blow-off pipe and the second air inlet pipe；Second air inlet pipe is communicated to downtake pipe；Second air inlet pipe is vertically arranged, and its bottom is located in dust leg, and its top is through the top of dust leg；The bottom of second air inlet pipe is provided with gas distributor, and gas spoiler is provided with positioned at the top of gas distributor；Blow-off pipe is located at the bottom of dust leg；Dust leg is provided with second exhaust pipe, and it is located at the top of gas spoiler.The spontaneous heating of the utility model energy is to control the temperature of reaction environment, and efficiently, product purity is high for dedusting.
Description
Technical field
The utility model is related to consersion unit field, more particularly to a kind of reactor of high-effective dust-removing.
Background technology
Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silica,
The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solar cell, laser
In terms of detergent, lubricant and brake fluid in technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit production
Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, including hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with
Hydrogen fluoride and fluorine gas prepare carbon tetrafluoride etc. with the direct haptoreaction of carbon source.Wherein, current maturation process using hydrofluorocarbons,
Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal
Impurity；The direct contact reaction method of fluorine carbon prepares carbon tetrafluoride, and this method passes through continuous development and perfection, four can be prepared
Fluorocarbons.
But, existing reactor reaction efficiency is low, and the temperature of reaction environment is difficult to control, and dust removing effects are bad, production
The purity of thing carbon tetrafluoride is low, is unfavorable for the preparation of carbon tetrafluoride, is unfavorable for the preparation of carbon tetrafluoride.
Utility model content
The purpose of this utility model is to propose a kind of reactor of high-effective dust-removing, can overcome it is of the prior art not
Foot, can spontaneous heating to control the temperature of reaction environment, dedusting efficiently, improves the purity of product.
For up to this purpose, the utility model uses following technical scheme：
A kind of reactor of high-effective dust-removing, including feed bin pipe, discharge, heating muff, downtake pipe and deduster；
The discharge is located at the bottom of the feed bin pipe；
The top of the discharge is provided with opening and is communicated to the inside of the feed bin pipe；
The top open part of the discharge is provided with sieve plate；
The discharge is provided with the first air inlet pipe；
The heating muff has multiple, and it is hollow, and it is extended transversely through in the feed bin pipe；
Heating tube is set in the heating muff；
The deduster includes dust leg, blow-off pipe and the second air inlet pipe；
Second air inlet pipe is communicated to the downtake pipe；
Second air inlet pipe is vertically arranged, and its bottom is located in the dust leg, and its top is through the dust leg
Top；
The bottom of second air inlet pipe is provided with gas distributor, and the top positioned at the gas distributor is disturbed provided with gas
Flow plate；
The blow-off pipe is located at the bottom of the dust leg；
The dust leg is provided with second exhaust pipe, and it is located at the top of the gas spoiler.
Further, the top of the feed bin pipe is provided with charge pipe, and one end of the charge pipe is communicated in the feed bin pipe
Inside, its other end is provided with flange and blind flange, and the blind flange is installed on the flange；
The downtake pipe is located at the outside of the charge pipe.
Further, the high efficiency reactor also includes temperature detector, and it is located at the feed bin pipe.
Further, the gas distributor is horn-like；
The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor is fixed on the bottom of second air inlet pipe at its upper end open.
Further, full stomata is arranged on the gas distributor.
Further, the gas spoiler is horn-like；
The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end
Edge is fixed on the inwall of the dust leg.
Further, the blow-off pipe is outward-dipping；
The top of the blow-off pipe side is obtuse angle with the angle A that the base plane of the dust leg is formed；
The top of the blow-off pipe opposite side is acute angle with the angle B that the base plane of the dust leg is formed；
The bottom of the blow-off pipe is provided with sewage draining exit.
Further, the second exhaust pipe is located at the dust leg close to the outer wall at top；
Semicircular baffle is provided with the dust leg, it is located in second air inlet pipe close to the second exhaust pipe
That side, and positioned at the second exhaust pipe lower section；
The Semicircular baffle is to tilt down setting.
Further, the bottom of the discharge is provided with blind flange and flange；
The blind flange is installed on the flange to seal the discharge.
Further, support column is provided with the discharge；
The two ends of the support column are respectively held against the top surface of the bottom of the sieve plate and the blind flange of the gas collection bottom of the tube；
The outer wall of the blow-off pipe is at least vertically provided with three the first support feets.
The outer wall of the feed bin pipe is at least vertically provided with three the second support feets.
The utility model proposes a kind of reactor of high-effective dust-removing according to the above, can spontaneous heating to control to react ring
The temperature in border, dedusting efficiently, improves the purity of product.
The high efficiency reactor is used to be purified the mixed gas for being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust,
The utilization rate of fluorine gas is set to reach absolutely.
Mixed gas enters the discharge by first air inlet pipe, and the sieve plate is to allow in mixed gas
Carbon dust is fallen into the discharge, to prevent from blocking；Fluorine gas and carbon tetrafluoride gas then enter to the feed bin by sieve plate
Pipe, can be more convenient during follow-up cleaning carbon dust because the discharge is located at the bottom of the feed bin pipe.
Because the heating muff is hollow, the heating tube is facilitated to be put into the inside of the heating muff；Due to
The heating muff has multiple, and it is extended transversely through in the feed bin pipe, more carbon effectively can be carried on the material
In storekeeper；The heating tube heating, makes the temperature rise of carbon supported by the heating muff, when fluorine gas is elevated with temperature
During carbon haptoreaction, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then from the downtake pipe
Discharge.
Some reactions can be mixed in the carbon tetrafluoride gas that carbon and fluorine gas reaction in the feed bin pipe are generated insufficient
Carbon dust, when being contaminated with the carbon tetrafluoride gas of carbon dust after downtake pipe enters to second air inlet pipe from described second
The bottom discharge of air inlet pipe, second air inlet pipe is vertically arranged, makes its easier for installation, the top of second air inlet pipe
Through the top of the dust leg, the connection of itself and the downtake pipe is set more to facilitate.
The carbon tetrafluoride gas for being contaminated with carbon dust can be uniformly distributed by the gas distributor, in the gas spoiler
In the presence of, being contaminated with the carbon tetrafluoride gas of carbon dust can stop the longer time in the dust leg, be more favorable for carbon dust
Fall in the blow-off pipe so that dedusting is more efficient, the second exhaust pipe be located at the gas spoiler top,
The purity for the carbon tetrafluoride gas finally discharged therefrom is more increased, mix fewer carbon dust.
Brief description of the drawings
Fig. 1 is the positive structure schematic of the one of embodiment of the utility model.
Fig. 2 is the cross-sectional view of the discharge of the one of embodiment of the utility model.
Fig. 3 is the perspective view of the deduster of the one of embodiment of the utility model.
Wherein：Feed bin pipe 31, downtake pipe 311, charge pipe 312, the second support feet 313, discharge 32, sieve plate 321,
First air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, deduster 35, dust leg 351, second exhaust pipe
3511st, Semicircular baffle 3512, blow-off pipe 352, sewage draining exit 3521, the first support feet 3522, the second air inlet pipe 353, gas point
Cloth device 354, stomata 3541, gas spoiler 355, flange 361, blind flange 362.
Embodiment
Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by embodiment.
A kind of reactor of high-effective dust-removing, including feed bin pipe 31, discharge 32, heating muff 33, the and of downtake pipe 311
Deduster 35；
The discharge 32 is located at the bottom of the feed bin pipe 31；
The top of the discharge 32 is provided with opening and is communicated to the inside of the feed bin pipe 31；
The top open part of the discharge 32 is provided with sieve plate 321；
The discharge 32 is provided with the first air inlet pipe 322；
The heating muff 33 has multiple, and it is hollow, and it is extended transversely through in the feed bin pipe 31；
Heating tube is set in the heating muff 33；
The deduster 35 includes dust leg 351, the air inlet pipe 353 of blow-off pipe 352 and second；
Second air inlet pipe 353 is communicated to the downtake pipe 311；
Second air inlet pipe 353 is vertically arranged, and its bottom is located in the dust leg 351, and its top is through described
The top of dust leg 351；
The bottom of second air inlet pipe 353 is provided with gas distributor 354, positioned at the top of the gas distributor 354
Provided with gas spoiler 355；
The blow-off pipe 352 is located at the bottom of the dust leg 351；
The dust leg 351 is provided with second exhaust pipe 3511, and it is located at the top of the gas spoiler 355.
Fluorine gas generates carbon tetrafluoride gas when being reacted with carbon, and still, often the utilization rate of fluorine gas can not reach percentage
Hundred, the high efficiency reactor of the present embodiment is used to enter the mixed gas for being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust
Row reaction, purifying, make the utilization rate of fluorine gas reach absolutely.
Mixed gas enters the discharge 32 by first air inlet pipe 322, and the sieve plate 321 is to allow mixing
Carbon dust in gas is fallen into the discharge 32, and to prevent from blocking, fluorine gas and carbon tetrafluoride gas are then entered by sieve plate 321
Enter to the feed bin pipe 31, can be more during follow-up cleaning carbon dust because the discharge 32 is located at the bottom of the feed bin pipe 31
It is convenient and swift.
Because the heating muff 33 is hollow, the heating tube is facilitated to be put into the inside of the heating muff 33；
Due to the heating muff 33 have it is multiple, it is extended transversely through in the feed bin pipe 31, can effectively more carbon carry
In the feed bin pipe 31；The heating tube heating, makes the temperature rise of carbon supported by the heating muff 33, works as fluorine gas
During carbon haptoreaction with reaching suitable temperature, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then
Discharged from the downtake pipe 311.
Some reactions can be mixed in the carbon tetrafluoride gas that carbon and fluorine gas reaction in the feed bin pipe 31 are generated insufficient
Carbon dust, when be contaminated with the carbon tetrafluoride gas of carbon dust after downtake pipe 311 enters to second air inlet pipe 353 from
The bottom discharge of second air inlet pipe 353, second air inlet pipe 353 is vertically arranged, makes its easier for installation, and described the
The top of two air inlet pipe 353 makes its connection with the downtake pipe 311 more through the top of the dust leg 351
It is convenient.
The carbon tetrafluoride gas for being contaminated with carbon dust can be uniformly distributed by the gas distributor 354, be disturbed in the gas
Flow in the presence of plate 355, being contaminated with the carbon tetrafluoride gas of carbon dust can stop the longer time in the dust leg 351, more
Plus falling in the blow-off pipe 352 beneficial to carbon dust so that dedusting is more efficient, and the second exhaust pipe 3511 is located at described
The top of gas spoiler 355, makes the purity for the carbon tetrafluoride gas finally discharged therefrom more increase, mixes fewer carbon
Powder.
Further, the top of the feed bin pipe 31 is provided with charge pipe 312, and one end of the charge pipe 312 is communicated in described
The inside of feed bin pipe 31, its other end is provided with flange 361 and blind flange 362, and the blind flange 362 is installed on the flange 361；
The downtake pipe 311 is located at the outside of the charge pipe 312.
Carbon in the high efficiency reactor is after reaction consumption, from the charge pipe 312 located at the top of feed bin pipe 31
Carbon is added, operates simpler convenience directly, one end of the charge pipe 312 is communicated in the inside of the feed bin pipe 31, so
Carbon can in the presence of the weight under drop down onto in the feed bin pipe 31, need to only dismantle the blind flange 362 in charging, just can be to institute
State high efficiency reactor and carry out feeding operation.
Further, the heating muff 33 is located at the proximal end of the bottom of feed bin pipe 31.
As far as possible many carbon can be made to be supported by the heating muff 33, the number of times of follow-up plus carbon is on the one hand reduced, it is another
Aspect also can be such that fluorine gas is contacted with more carbon, improve the efficiency of its reaction.
Further, the high efficiency reactor also includes temperature detector 34, and it is located at the feed bin pipe 31；
The reaction efficiency of carbon and fluorine gas near the heating muff 33 is higher, and the temperature detector 34 can be effectively
The reaction temperature in the feed bin pipe 31 is detected, so that the preferably heating-up temperature of heating tube described in control, to ensure carbon and fluorine
Gas is continuously in optimal reaction temperature.
Further, the gas distributor 354 is horn-like；
The gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor 354 is fixed on the bottom of second air inlet pipe 353 at its upper end open.
Because the upper end open of the gas distributor 354 is smaller, so can be with less second air inlet pipe 353 in aperture
Matching is fixed, and the horn-like gas distributor 354 is gradually expanded outwardly to the opening of its lower end from the opening of its upper end, made
The distribution for obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.
Further, full stomata 3541 is arranged on the gas distributor 354.
Further make the distribution of mixed gas more uniform, be more favorable for the sedimentation of carbon dust.
Further, the gas spoiler 355 is horn-like；
The gas spoiler 355 gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, and its upper end is opened
The edge of mouth is fixed on the inwall of the dust leg 351.
The edge of the opening of the upper end of gas spoiler 355 is fixed on the inwall of the dust leg 351, so being contaminated with
The carbon tetrafluoride gas of carbon dust effectively can be hindered by the gas spoiler 355 towards the outer wall of the bottom of dust leg 351
Gear, makes mixed gas have more times to rest in the dust leg 351, is conducive to the sedimentation of carbon dust；The gas is disturbed
Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from the gas spoiler 355
Top settle, will not also be deposited on the gas spoiler 355, also can along the upper end of gas spoiler 355 opening
Under drop down onto the opening of its lower end, eventually fall into the blow-off pipe 352.
Further, the blow-off pipe 352 is outward-dipping；
The top of the side of blow-off pipe 352 is obtuse angle with the angle A that the base plane of the dust leg 351 is formed；
The top of the opposite side of blow-off pipe 352 is acute angle with the angle B that the base plane of the dust leg 351 is formed；
The bottom of the blow-off pipe 352 is provided with sewage draining exit 3521.
Such as Fig. 3, the angle A of the present embodiment is 120 °, and angle B is 30 °, more easily and safely clears up the blowdown
Carbon dust in pipe 352, the sewage draining exit 3521 of the present embodiment is provided with blind flange 362 and flange 361, by dismantling blind flange
362 mode, carbon dust is finally discharged from the sewage draining exit 3521.
Further, the second exhaust pipe 3511 is located at the dust leg 351 close to the outer wall at top；
Semicircular baffle 3512 is provided with the dust leg 351, it is located in second air inlet pipe 353 close to described
That side of second exhaust pipe 3511, and positioned at the lower section of the second exhaust pipe 3511；
The Semicircular baffle 3512 is to tilt down setting.
The second exhaust pipe 3511, close to the outer wall at top, has mixed gas more located at the dust leg 351
Time rest in the dust leg 351, be conducive to the sedimentation of carbon dust；Semicircular baffle is provided with the dust leg 351
3512, it can obstruct the rising of mixed gas, and mixed gas is rushed for, away from the exit of second exhaust pipe 3511, to enter one
Allow mixed gas there are more times to rest in the dust leg 351 to step, be more conducive to be conducive to the sedimentation of carbon dust, described half
Circular baffle plate 3512 is tilts down setting, and carbon dust is not easy to be deposited in thereon, and can take advantage of a situation whereabouts.
Further, the bottom of the discharge 32 is provided with blind flange 362 and flange 361；
The blind flange 362 is installed on the flange 361 to seal the discharge 32.
It is more enough effectively to seal the discharge 32 by installing the blind flange 362, it is to avoid gas is leaked；It is logical
Cross and dismantle the blind flange 362, the dust that the reaction that can rapidly clear up in the discharge 32 leaves is mainly described
The carbon dust that sieve plate 321 is filtered.
Further, support column 323 is provided with the discharge 32；
The two ends of the support column 323 are respectively held against the bottom of the sieve plate 321 and the flange of the bottom of the discharge 32
The top surface of lid 362.
323 pairs of the support column sieve plate 321 has supporting role, can effectively support the sieve plate 321, it is ensured that
The stability of its work, can stably filter carbon dust.
Further, the outer wall of the blow-off pipe 352 is at least vertically provided with three the first support feets 3522.
The blow-off pipe 352 can be supported, facilitates it to install.
Further, the outer wall of the feed bin pipe 31 is at least vertically provided with three the second support feets 313.
The feed bin pipe 31 can be supported, facilitates it to install.
Technical principle of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality
With new principle, and the limitation to the utility model protection domain can not be construed in any way.Based on explanation herein,
Those skilled in the art, which would not require any inventive effort, can associate other embodiments of the present utility model,
These modes are fallen within protection domain of the present utility model.
Claims (7)
1. a kind of reactor of high-effective dust-removing, including feed bin pipe, discharge, heating muff, downtake pipe and deduster；
It is characterized in that：The discharge is located at the bottom of the feed bin pipe；
The top of the discharge is provided with opening and is communicated to the inside of the feed bin pipe；
The top open part of the discharge is provided with sieve plate；
The discharge is provided with the first air inlet pipe；
The heating muff has multiple, and it is hollow, and it is extended transversely through in the feed bin pipe；
Heating tube is set in the heating muff；
The deduster includes dust leg, blow-off pipe and the second air inlet pipe；
Second air inlet pipe is communicated to the downtake pipe；
Second air inlet pipe is vertically arranged, and its bottom is located in the dust leg, and its top is through the top of the dust leg
Portion；
The bottom of second air inlet pipe is provided with gas distributor, and gas flow-disturbing is provided with positioned at the top of the gas distributor
Plate；
The blow-off pipe is located at the bottom of the dust leg；
The dust leg is provided with second exhaust pipe, and it is located at the top of the gas spoiler；
The bottom of the discharge is provided with blind flange and flange；
The blind flange is installed on the flange to seal the discharge；
Support column is provided with the discharge；
The two ends of the support column are respectively held against the top surface of the bottom of the sieve plate and the blind flange of the gas collection bottom of the tube；
The outer wall of the blow-off pipe is at least vertically provided with three the first support feets；
The outer wall of the feed bin pipe is at least vertically provided with three the second support feets.
2. a kind of reactor of high-effective dust-removing according to claim 1, it is characterised in that：The top of the feed bin pipe is provided with
Charge pipe, one end of the charge pipe is communicated in the inside of the feed bin pipe, and its other end is provided with flange and blind flange, the method
Orchid lid is installed on the flange；
The downtake pipe is located at the outside of the charge pipe.
3. a kind of reactor of high-effective dust-removing according to claim 1, it is characterised in that：The gas distributor is loudspeaker
Shape；
The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
The gas distributor is fixed on the bottom of second air inlet pipe at its upper end open.
4. a kind of reactor of high-effective dust-removing according to claim 3, it is characterised in that：Arranged on the gas distributor
Full stomata.
5. a kind of reactor of high-effective dust-removing according to claim 1, it is characterised in that：The gas spoiler is loudspeaker
Shape；
The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end
It is fixed on the inwall of the dust leg.
6. a kind of reactor of high-effective dust-removing according to claim 1, it is characterised in that：
The blow-off pipe is outward-dipping；
The top of the blow-off pipe side is obtuse angle with the angle A that the base plane of the dust leg is formed；
The top of the blow-off pipe opposite side is acute angle with the angle B that the base plane of the dust leg is formed；
The bottom of the blow-off pipe is provided with sewage draining exit.
7. a kind of reactor of high-effective dust-removing according to claim 1, it is characterised in that：The second exhaust pipe is located at described
Outer wall of the dust leg close to top；
Semicircular baffle is provided with the dust leg, its be located in second air inlet pipe close to the second exhaust pipe that
Side, and positioned at the lower section of the second exhaust pipe；
The Semicircular baffle is to tilt down setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621178832.3U CN206435171U (en) | 2016-10-27 | 2016-10-27 | A kind of reactor of high-effective dust-removing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621178832.3U CN206435171U (en) | 2016-10-27 | 2016-10-27 | A kind of reactor of high-effective dust-removing |
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| Publication Number | Publication Date |
|---|---|
| CN206435171U true CN206435171U (en) | 2017-08-25 |
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ID=59645187
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621178832.3U Active CN206435171U (en) | 2016-10-27 | 2016-10-27 | A kind of reactor of high-effective dust-removing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422993A (en) * | 2016-10-27 | 2017-02-22 | 广东华特气体股份有限公司 | Efficient dust-removal type reactor |
| CN109663423A (en) * | 2017-10-16 | 2019-04-23 | 天津市华赛尔气体有限公司 | A kind of double-flow gas absorption tower apparatus |
-
2016
- 2016-10-27 CN CN201621178832.3U patent/CN206435171U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422993A (en) * | 2016-10-27 | 2017-02-22 | 广东华特气体股份有限公司 | Efficient dust-removal type reactor |
| CN109663423A (en) * | 2017-10-16 | 2019-04-23 | 天津市华赛尔气体有限公司 | A kind of double-flow gas absorption tower apparatus |
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