CN106334499A - Spontaneous heating efficient reactor - Google Patents

Spontaneous heating efficient reactor Download PDF

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Publication number
CN106334499A
CN106334499A CN201610953750.XA CN201610953750A CN106334499A CN 106334499 A CN106334499 A CN 106334499A CN 201610953750 A CN201610953750 A CN 201610953750A CN 106334499 A CN106334499 A CN 106334499A
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CN
China
Prior art keywords
pipe
high efficiency
feed bin
dust leg
air inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610953750.XA
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Chinese (zh)
Inventor
肖三
廖恒易
陈艳珊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangxi Huate Electronic Chemical Co Ltd
Guangdong Huate Gases Co Ltd
Original Assignee
Jiangxi Huate Electronic Chemical Co Ltd
Guangdong Huate Gases Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangxi Huate Electronic Chemical Co Ltd, Guangdong Huate Gases Co Ltd filed Critical Jiangxi Huate Electronic Chemical Co Ltd
Priority to CN201610953750.XA priority Critical patent/CN106334499A/en
Publication of CN106334499A publication Critical patent/CN106334499A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/005Separating solid material from the gas/liquid stream
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/005Separating solid material from the gas/liquid stream
    • B01J8/006Separating solid material from the gas/liquid stream by filtration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/005Separating solid material from the gas/liquid stream
    • B01J8/007Separating solid material from the gas/liquid stream by sedimentation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • B01J8/06Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds in tube reactors; the solid particles being arranged in tubes
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00Preparation of halogenated hydrocarbons
    • C07C17/007Preparation of halogenated hydrocarbons from carbon or from carbides and halogens

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)

Abstract

A spontaneous heating efficient reactor comprises a stock bin pipe, a gas collecting pipe, heating sleeves and a first exhaust pipe. The gas collecting pipe is arranged at the bottom of the stock bin pipe, the top of the gas collecting pipe is provided with an opening and communicated with the inside of the stock bin pipe, a sieve plate is arranged at the position of the opening at the top of the gas collecting pipe, the gas collecting pipe is provided with a first air inlet pipe, the number of the heating sleeves is a lot, and the heating sleeves are hollow and transversely penetrate the stock bin pipe. Heating pipes are arranged in the heating sleeves. The spontaneous heating efficient reactor can perform spontaneous heating to control temperature of the reaction environment, and the reaction efficiency is high.

Description

A kind of high efficiency reactor of spontaneous heating
Technical field
The present invention relates to consersion unit field, more particularly, to a kind of high efficiency reactor of spontaneous heating.
Background technology
Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silicon dioxide, The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solaode, laser Technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit produce in detergent, the aspect such as lubricant and brake fluid Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, include hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with Fluohydric acid gas and fluorine gas prepare carbon tetrafluoride etc. with carbon source directly contact reaction.Wherein, current maturation process adopt hydrofluorocarbons, Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal Impurity;Fluorine carbon directly contact reaction method prepares carbon tetrafluoride, and the method, through continuous development and perfection, can prepare four Perfluorocarbon.
But, existing reactor reaction efficiency is low, and the temperature of reaction environment is wayward, is unfavorable for the system of carbon tetrafluoride Standby.
Content of the invention
It is an object of the invention to proposing a kind of high efficiency reactor of spontaneous heating, deficiency of the prior art can be overcome, Can spontaneous heating to control the temperature of reaction environment, reaction efficiency is high.
For reaching this purpose, the present invention employs the following technical solutions:
A kind of high efficiency reactor of spontaneous heating, including feed bin pipe, discharge, heating muff and downtake pipe;
Described discharge is located at the bottom of described feed bin pipe;
The top of described discharge is provided with opening and is communicated to the inside of described feed bin pipe;
The top open part of described discharge is provided with sieve plate;
Described discharge is provided with the first air inlet pipe;
Described heating muff has multiple, and it is hollow, and it extends transversely through in described feed bin pipe;
Setting heating tube in described heating muff.
Further, the top of described feed bin pipe is provided with charge pipe, and one end of described charge pipe is communicated in described feed bin pipe Inside, its other end is provided with flange and blind flange, and described blind flange is installed on described flange;
Described downtake pipe is located at the outside of described charge pipe.
Further, described heating muff is located at the proximal end of described feed bin bottom of the tube.
Further, described high efficiency reactor also includes temperature detector, and it is located at described feed bin pipe.
Further, described high efficiency reactor also includes cleaner unit, and it includes dust leg, blow-off pipe and the second air inlet pipe;
Described second air inlet pipe is communicated to described downtake pipe;
Described second air inlet pipe is vertically arranged, and its bottom is located in described dust leg, and its top is through described dust leg Top;
The bottom of described second air inlet pipe is provided with gas distributor, is provided with gas positioned at the top of described gas distributor and disturbs Stream plate;
Described blow-off pipe is located at the bottom of described dust leg;
Described dust leg is provided with second exhaust pipe, and it is located at the top of described gas spoiler.
Further, described gas distributor is horn-like;
Described gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end;
Described gas distributor is fixed on the bottom of described second air inlet pipe thereon at end opening.
Further, described gas distributor arranges full pore.
Further, described gas spoiler is horn-like;
Described gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end Edge is fixed on the inwall of described dust leg.
Further, described blow-off pipe is outward-dipping;
The top of described blow-off pipe side is obtuse angle with angle a of the base plane formation of described dust leg;
The top of described blow-off pipe opposite side is acute angle with angle b of the base plane formation of described dust leg;
The bottom of described blow-off pipe is provided with sewage draining exit.
Further, described second exhaust pipe located at described dust leg close to top outer wall;
It is provided with Semicircular baffle, it is located in described second air inlet pipe close to described second exhaust pipe in described dust leg That side, and be located at described second exhaust pipe lower section;
Described Semicircular baffle is downward-sloping setting.
The present invention according to the above propose a kind of high efficiency reactor of spontaneous heating, can spontaneous heating to control reaction environment Temperature, reaction efficiency is high.
Described high efficiency reactor is used for for the mixed gas being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust carrying out purification, The utilization rate of fluorine gas is made to reach absolutely.
Mixed gas enter described discharge by described first air inlet pipe, and described sieve plate is to allow in mixed gas Carbon dust falls in described discharge, in order to prevent from blocking;Fluorine gas and carbon tetrafluoride gas then enter to described feed bin by sieve plate Pipe, because described discharge is located at the bottom of described feed bin pipe, can be more convenient during follow-up cleaning carbon dust.
Because described heating muff is hollow, described heating tube is facilitated to put into the inside of described heating muff;Due to Described heating muff has multiple, and it extends transversely through in described feed bin pipe, effectively more carbon can be carried on described material In storekeeper;Described heating tube heating, makes the temperature of the carbon being supported by described heating muff raise, when fluorine gas and temperature rising During carbon haptoreaction, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then from described downtake pipe Discharge.
Brief description
Fig. 1 is the positive structure schematic of the one of embodiment of the present invention.
Fig. 2 is the cross-sectional view of the discharge of the one of embodiment of the present invention.
Fig. 3 is the perspective view of the cleaner unit of the one of embodiment of the present invention.
Wherein: feed bin pipe 31, downtake pipe 311, charge pipe 312, the second support feet 313, discharge 32, sieve plate 321, First air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, cleaner unit 35, dust leg 351, second exhaust pipe 3511st, Semicircular baffle 3512, blow-off pipe 352, sewage draining exit 3521, the first support feet 3522, the second air inlet pipe 353, gas divide Cloth device 354, pore 3541, gas spoiler 355, flange 361, blind flange 362.
Specific embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by specific embodiment.
A kind of high efficiency reactor of spontaneous heating, including feed bin pipe 31, discharge 32, heating muff 33 and downtake pipe 311;
Described discharge 32 is located at the bottom of described feed bin pipe 31;
The top of described discharge 32 is provided with opening and is communicated to the inside of described feed bin pipe 31;
The top open part of described discharge 32 is provided with sieve plate 321;
Described discharge 32 is provided with the first air inlet pipe 322;
Described heating muff 33 has multiple, and it is hollow, and it extends transversely through in described feed bin pipe 31;
Setting heating tube in described heating muff 33.
Carbon tetrafluoride gas are generated when fluorine gas and carbon are reacted, but, often the utilization rate of fluorine gas can not reach percentage Hundred, the described high efficiency reactor of the present embodiment is used for entering the mixed gas being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust Row reaction, purification, make the utilization rate of fluorine gas reach absolutely.
Mixed gas enter described discharge 32 by described first air inlet pipe 322, and described sieve plate 321 is to allow mixing Carbon dust in gas falls in described discharge 32, and in order to prevent from blocking, fluorine gas and carbon tetrafluoride gas are then entered by sieve plate 321 Enter to described feed bin pipe 31, because described discharge 32 is located at the bottom of described feed bin pipe 31, can be more during follow-up cleaning carbon dust Convenient and swift.
Because described heating muff 33 is hollow, described heating tube is facilitated to put into the inside of described heating muff 33; Because described heating muff 33 has multiple, it extends transversely through in described feed bin pipe 31, can effectively more carbon be carried In described feed bin pipe 31;Described heating tube heating, makes the temperature of the carbon being supported by described heating muff 33 raise, works as fluorine gas With reach temperature carbon haptoreaction when, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then from institute State downtake pipe 311 to discharge.
Further, the top of described feed bin pipe 31 is provided with charge pipe 312, and one end of described charge pipe 312 is communicated in described The inside of feed bin pipe 31, its other end is provided with flange 361 and blind flange 362, and described blind flange 362 is installed on described flange 361;
Described downtake pipe 311 is located at the outside of described charge pipe 312.
Carbon in described high efficiency reactor through reaction consume after, from the charge pipe 312 located at described feed bin pipe 31 top Add carbon, operate simpler convenience directly, one end of described charge pipe 312 is communicated in the inside of described feed bin pipe 31, so Carbon can fall in described feed bin pipe 31 in the presence of weight, only need to dismantle described blind flange 362 in charging, just can be to institute State high efficiency reactor and carry out feeding operation.
Further, described heating muff 33 is located at the proximal end of described feed bin pipe 31 bottom.
As far as possible many carbon can be made to be supported by described heating muff 33, on the one hand reduce the number of times subsequently adding carbon, another Aspect also can make fluorine gas contact with more carbon, improves the efficiency of its reaction.
Further, described high efficiency reactor also includes temperature detector 34, and it is located at described feed bin pipe 31.
Carbon near described heating muff 33 is higher with the reaction efficiency of fluorine gas, and described temperature detector 34 can be effectively Detect the reaction temperature of described feed bin pipe 31, thus preferably described in control heating tube heating-up temperature, to ensure carbon and fluorine gas It is continuously in optimal reaction temperature.
Further, described high efficiency reactor also includes cleaner unit 35, and it includes dust leg 351, blow-off pipe 352 and second and enters Trachea 353;
Described second air inlet pipe 353 is communicated to described downtake pipe 311;
Described second air inlet pipe 353 is vertically arranged, and its bottom is located in described dust leg 351, and its top is through described The top of dust leg 351;
The bottom of described second air inlet pipe 353 is provided with gas distributor 354, positioned at the top of described gas distributor 354 It is provided with gas spoiler 355;
Described blow-off pipe 352 is located at the bottom of described dust leg 351;
Described dust leg 351 is provided with second exhaust pipe 3511, and it is located at the top of described gas spoiler 355.
Some reactions can be mixed insufficient in the carbon tetrafluoride gas of the carbon in described feed bin pipe 31 and fluorine gas reaction generation Carbon dust, when be contaminated with the carbon tetrafluoride gas of carbon dust through downtake pipe 311 enter to after described second air inlet pipe 353 from The bottom of described second air inlet pipe 353 is discharged, described second air inlet pipe 353 vertically arranged so as to easier for installation, described the The top of two air inlet pipe 353 through described dust leg 351 top so as to the connection of described downtake pipe 311 more Convenient.
The carbon tetrafluoride gas being contaminated with carbon dust can be uniformly distributed by described gas distributor 354, disturbs in described gas In the presence of stream plate 355, the carbon tetrafluoride gas being contaminated with carbon dust can stop the longer time, more in described dust leg 351 Plus beneficial to carbon dust fall in described blow-off pipe 352, described second exhaust pipe 3511 be located at described gas spoiler 355 upper Side, makes finally more to increase from the purity of the carbon tetrafluoride gas of wherein discharge, mixes fewer carbon dust.
Further, described gas distributor 354 is horn-like;
Described gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end;
Described gas distributor 354 is fixed on the bottom of described second air inlet pipe 353 thereon at end opening.
Because the upper end open of described gas distributor 354 is less, it is possible to second air inlet pipe 353 less with aperture Coupling is fixed, and trumpet-shaped described gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end, makes The distribution obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.
Further, described gas distributor 354 arranges full pore 3541.
Further make the distribution of mixed gas more uniform, be more favorable for the sedimentation of carbon dust.
Further, described gas spoiler 355 is horn-like;
Described gas spoiler 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end The edge of mouth is fixed on the inwall of described dust leg 351.
The edge of the opening of described gas spoiler 355 upper end is fixed on the inwall of described dust leg 351, so being contaminated with The carbon tetrafluoride gas of carbon dust can be hindered towards the outer wall of described dust leg 351 bottom by described gas spoiler 355 effectively Gear, makes mixed gas have more times to rest in described dust leg 351, is conducive to the sedimentation of carbon dust;Described gas is disturbed Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from described gas spoiler 355 Top sedimentation, also will not be deposited on described gas spoiler 355, also can be along the opening of described gas spoiler 355 upper end Fall to the opening of its lower end, eventually fall in described blow-off pipe 352.
Further, described blow-off pipe 352 is outward-dipping;
The top of described blow-off pipe 352 side is obtuse angle with angle a of the base plane formation of described dust leg 351;
The top of described blow-off pipe 352 opposite side is acute angle with angle b of the base plane formation of described dust leg 351;
The bottom of described blow-off pipe 352 is provided with sewage draining exit 3521.
As Fig. 3, described angle a of the present embodiment is 120 °, and angle b is 30 °, convenient safely clears up described blowdown Carbon dust in pipe 352, the described sewage draining exit 3521 of the present embodiment is provided with blind flange 362 and flange 361, by dismantling blind flange 362 mode, carbon dust is finally discharged from described sewage draining exit 3521.
Further, described second exhaust pipe 3511 located at described dust leg 351 close to top outer wall;
It is provided with Semicircular baffle 3512, it is located in described second air inlet pipe 353 close to described in described dust leg 351 That side of second exhaust pipe 3511, and it is located at the lower section of described second exhaust pipe 3511;
Described Semicircular baffle 3512 is downward-sloping setting.
Described second exhaust pipe 3511 makes mixed gas have more located at described dust leg 351 close to the outer wall at top Time rest in described dust leg 351, be conducive to the sedimentation of carbon dust;It is provided with Semicircular baffle in described dust leg 351 3512, it can intercept the rising of mixed gas, and mixed gas are rushed for, away from described second exhaust pipe 3511 exit, entering one Step ground allows mixed gas have more times to rest in described dust leg 351, is more conducive to be conducive to the sedimentation of carbon dust, described partly Circular baffle plate 3512 is downward-sloping setting, and carbon dust is not easy to pile up thereon, whereabouts of taking advantage of a situation.
Further, the bottom of described discharge 32 is provided with blind flange 362 and flange 361;
Described blind flange 362 is installed on described flange 361 to seal described discharge 32.
By installing described blind flange 362, more enough can effectively seal described discharge 32, it is to avoid gas leaks;Logical Cross and dismantle described blind flange 362, can rapidly clear up the dust that the reaction in described discharge 32 stays, mainly described The carbon dust that sieve plate 321 filters.
Further, it is provided with support column 323 in described discharge 32;
The two ends of described support column 323 are respectively held against the bottom of described sieve plate 321 and the flange of described discharge 32 bottom The top surface of lid 362.
Described support column 323 has supporting role to described sieve plate 321, can effectively support described sieve plate 321 it is ensured that The stability of its work is so as to carbon dust can stably be filtered.
Further, the outer wall of described blow-off pipe 352 is at least vertically provided with three the first support feets 3522.
Described blow-off pipe 352 can be supported, facilitate its installation.
Further, the outer wall of described feed bin pipe 31 is at least vertically provided with three the second support feets 313.
Described feed bin pipe 31 can be supported, facilitate its installation.
Describe the know-why of the present invention above in association with specific embodiment.These descriptions are intended merely to explain the present invention's Principle, and limiting the scope of the invention can not be construed to by any way.Based on explanation herein, the technology of this area Personnel do not need to pay other specific embodiments that performing creative labour can associate the present invention, and these modes fall within Within protection scope of the present invention.

Claims (10)

1. a kind of high efficiency reactor of spontaneous heating, including feed bin pipe, discharge, heating muff and downtake pipe;
It is characterized in that: described discharge is located at the bottom of described feed bin pipe;
The top of described discharge is provided with opening and is communicated to the inside of described feed bin pipe;
The top open part of described discharge is provided with sieve plate;
Described discharge is provided with the first air inlet pipe;
Described heating muff has multiple, and it is hollow, and it extends transversely through in described feed bin pipe;
Setting heating tube in described heating muff.
2. a kind of spontaneous heating according to claim 1 high efficiency reactor it is characterised in that: the top of described feed bin pipe sets There is charge pipe, one end of described charge pipe is communicated in the inside of described feed bin pipe, its other end is provided with flange and blind flange, described Blind flange is installed on described flange;
Described downtake pipe is located at the outside of described charge pipe.
3. a kind of spontaneous heating according to claim 1 high efficiency reactor it is characterised in that: described heating muff is located at institute State the proximal end of feed bin bottom of the tube.
4. a kind of spontaneous heating according to claim 1 high efficiency reactor it is characterised in that: described high efficiency reactor also wraps Include temperature detector, it is located at described feed bin pipe.
5. a kind of spontaneous heating according to claim 1 high efficiency reactor it is characterised in that: described high efficiency reactor also wraps Include cleaner unit, it includes dust leg, blow-off pipe and the second air inlet pipe;
Described second air inlet pipe is communicated to described downtake pipe;
Described second air inlet pipe is vertically arranged, and its bottom is located in described dust leg, and its top is through the top of described dust leg Portion;
The bottom of described second air inlet pipe is provided with gas distributor, is provided with gas flow-disturbing positioned at the top of described gas distributor Plate;
Described blow-off pipe is located at the bottom of described dust leg;
Described dust leg is provided with second exhaust pipe, and it is located at the top of described gas spoiler.
6. a kind of spontaneous heating according to claim 5 high efficiency reactor it is characterised in that: described gas distributor be loudspeaker Shape;
Described gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end;
Described gas distributor is fixed on the bottom of described second air inlet pipe thereon at end opening.
7. a kind of spontaneous heating according to claim 6 high efficiency reactor it is characterised in that: on described gas distributor arrange The full pore of row.
8. a kind of spontaneous heating according to claim 5 high efficiency reactor it is characterised in that: described gas spoiler be loudspeaker Shape;
Described gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end It is fixed on the inwall of described dust leg.
9. a kind of spontaneous heating according to claim 5 high efficiency reactor it is characterised in that:
Described blow-off pipe is outward-dipping;
The top of described blow-off pipe side is obtuse angle with angle a of the base plane formation of described dust leg;
The top of described blow-off pipe opposite side is acute angle with angle b of the base plane formation of described dust leg;
The bottom of described blow-off pipe is provided with sewage draining exit.
10. according to claim 5 a kind of high efficiency reactor of spontaneous heating it is characterised in that: described second exhaust pipe located at Described dust leg is close to the outer wall at top;
Be provided with Semicircular baffle in described dust leg, its be located at described second in air inlet pipe close to described second exhaust pipe that Side, and it is located at the lower section of described second exhaust pipe;
Described Semicircular baffle is downward-sloping setting.
CN201610953750.XA 2016-10-27 2016-10-27 Spontaneous heating efficient reactor Pending CN106334499A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201610953750.XA CN106334499A (en) 2016-10-27 2016-10-27 Spontaneous heating efficient reactor

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106422993A (en) * 2016-10-27 2017-02-22 广东华特气体股份有限公司 Efficient dust-removal type reactor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2336928C1 (en) * 2007-07-13 2008-10-27 Олег Савельевич Кочетов Inertial dust separator
CN101580452A (en) * 2009-06-22 2009-11-18 黎明化工研究院 Preparation process of carbon tetrafluoride and equipment thereof
CN106422993A (en) * 2016-10-27 2017-02-22 广东华特气体股份有限公司 Efficient dust-removal type reactor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2336928C1 (en) * 2007-07-13 2008-10-27 Олег Савельевич Кочетов Inertial dust separator
CN101580452A (en) * 2009-06-22 2009-11-18 黎明化工研究院 Preparation process of carbon tetrafluoride and equipment thereof
CN106422993A (en) * 2016-10-27 2017-02-22 广东华特气体股份有限公司 Efficient dust-removal type reactor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106422993A (en) * 2016-10-27 2017-02-22 广东华特气体股份有限公司 Efficient dust-removal type reactor

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Application publication date: 20170118