CN106422993A - Efficient dust-removal type reactor - Google Patents
Efficient dust-removal type reactor Download PDFInfo
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- CN106422993A CN106422993A CN201610955909.1A CN201610955909A CN106422993A CN 106422993 A CN106422993 A CN 106422993A CN 201610955909 A CN201610955909 A CN 201610955909A CN 106422993 A CN106422993 A CN 106422993A
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- Prior art keywords
- pipe
- gas
- dust
- reactor
- feed bin
- Prior art date
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- 239000000428 dust Substances 0.000 claims abstract description 81
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 239000010865 sewage Substances 0.000 claims abstract description 8
- 210000002683 foot Anatomy 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 20
- 238000007599 discharging Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 50
- 229910052799 carbon Inorganic materials 0.000 description 49
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 27
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 18
- 229910052731 fluorine Inorganic materials 0.000 description 18
- 239000011737 fluorine Substances 0.000 description 18
- 238000004062 sedimentation Methods 0.000 description 6
- 238000009434 installation Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- MXXWOMGUGJBKIW-YPCIICBESA-N piperine Chemical compound C=1C=C2OCOC2=CC=1/C=C/C=C/C(=O)N1CCCCC1 MXXWOMGUGJBKIW-YPCIICBESA-N 0.000 description 1
- 229940075559 piperine Drugs 0.000 description 1
- 235000019100 piperine Nutrition 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1818—Feeding of the fluidising gas
- B01J8/1827—Feeding of the fluidising gas the fluidising gas being a reactant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/02—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising gravity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/0013—Controlling the temperature of the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/002—Avoiding undesirable reactions or side-effects, e.g. avoiding explosions, or improving the yield by suppressing side-reactions
- B01J19/0026—Avoiding carbon deposits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00058—Temperature measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/0015—Feeding of the particles in the reactor; Evacuation of the particles out of the reactor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Abstract
The invention relates to an efficient dust-removal type reactor. The reactor comprises a stock bin pipe, a gas collecting pipe, a plurality of heating sleeves, a first exhaust pipe and a dust remover, wherein the gas collecting pipe is arranged at the bottom of the stock bin pipe; an opening is formed in the top of the gas collecting pipe, and the top of the gas collecting pipe is communicated to the inside of the stock bin pipe; a sieve plate is arranged at the opening in the top of the gas collecting pipe; a first gas inlet pipe is arranged at the gas collecting pipe; the heating sleeves are hollow and transversely penetrate through the stock bin pipe; heating pipes are arranged in the heating sleeves; the dust remover comprises a dust collecting pipe, a sewage discharging pipe and a second gas inlet pipe; the second gas inlet pipe is communicated to the first gas inlet pipe and is vertically arranged, the bottom of the second gas inlet pipe is located in the dust collecting pipe, and the top of the second gas inlet pipe penetrates through the top of the dust collecting pipe; a gas distributor is arranged at the bottom of the second gas inlet pipe, and the second gas inlet pipe is provided with a gas spoiler above the gas distributor; the sewage discharging pipe is arranged at the bottom of the dust collecting pipe; and the dust collecting pipe is provided with a second gas exhaust pipe above the gas spoiler. The efficient dust-removal type reactor is capable of automatically heating so as to control the temperature of a reaction temperature and efficiently removing the dust, and the product purity is high.
Description
Technical field
The present invention relates to consersion unit field, more particularly, to a kind of reactor of high-effective dust-removing.
Background technology
Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silicon dioxide,
The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solaode, laser
Technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit produce in detergent, the aspect such as lubricant and brake fluid
Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, include hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with
Fluohydric acid gas and fluorine gas prepare carbon tetrafluoride etc. with carbon source directly contact reaction.Wherein, current maturation process adopt hydrofluorocarbons,
Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal
Impurity；Fluorine carbon directly contact reaction method prepares carbon tetrafluoride, and the method, through continuous development and perfection, can prepare four
Perfluorocarbon.
But, existing reactor reaction efficiency is low, and the temperature of reaction environment is wayward, and dust removing effects are bad, produces
The purity of thing carbon tetrafluoride is low, is unfavorable for the preparation of carbon tetrafluoride, is unfavorable for the preparation of carbon tetrafluoride.
Content of the invention
It is an object of the invention to proposing a kind of reactor of high-effective dust-removing, deficiency of the prior art, energy can be overcome
To control the temperature of reaction environment, dedusting efficiently, improves the purity of product for enough spontaneous heatings.
For reaching this purpose, the present invention employs the following technical solutions：
A kind of reactor of high-effective dust-removing, including feed bin pipe, discharge, heating muff, downtake pipe and cleaner unit；
Described discharge is located at the bottom of described feed bin pipe；
The top of described discharge is provided with opening and is communicated to the inside of described feed bin pipe；
The top open part of described discharge is provided with sieve plate；
Described discharge is provided with the first air inlet pipe；
Described heating muff has multiple, and it is hollow, and it extends transversely through in described feed bin pipe；
Setting heating tube in described heating muff；
Described cleaner unit includes dust leg, blow-off pipe and the second air inlet pipe；
Described second air inlet pipe is communicated to described downtake pipe；
Described second air inlet pipe is vertically arranged, and its bottom is located in described dust leg, and its top is through described dust leg
Top；
The bottom of described second air inlet pipe is provided with gas distributor, is provided with gas positioned at the top of described gas distributor and disturbs
Stream plate；
Described blow-off pipe is located at the bottom of described dust leg；
Described dust leg is provided with second exhaust pipe, and it is located at the top of described gas spoiler.
Further, the top of described feed bin pipe is provided with charge pipe, and one end of described charge pipe is communicated in described feed bin pipe
Inside, its other end is provided with flange and blind flange, and described blind flange is installed on described flange；
Described downtake pipe is located at the outside of described charge pipe.
Further, described high efficiency reactor also includes temperature detector, and it is located at described feed bin pipe.
Further, described gas distributor is horn-like；
Described gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
Described gas distributor is fixed on the bottom of described second air inlet pipe thereon at end opening.
Further, described gas distributor arranges full pore.
Further, described gas spoiler is horn-like；
Described gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end
Edge is fixed on the inwall of described dust leg.
Further, described blow-off pipe is outward-dipping；
The top of described blow-off pipe side is obtuse angle with the angle A of the base plane formation of described dust leg；
The top of described blow-off pipe opposite side is acute angle with the angle B of the base plane formation of described dust leg；
The bottom of described blow-off pipe is provided with sewage draining exit.
Further, described second exhaust pipe located at described dust leg close to top outer wall；
It is provided with Semicircular baffle, it is located in described second air inlet pipe close to described second exhaust pipe in described dust leg
That side, and be located at described second exhaust pipe lower section；
Described Semicircular baffle is downward-sloping setting.
Further, the bottom of described discharge is provided with blind flange and flange；
Described blind flange is installed on described flange to seal described discharge.
Further, it is provided with support column in described discharge；
The two ends of described support column are respectively held against the bottom of described sieve plate and the top surface of the blind flange of described gas collection bottom of the tube；
The outer wall of described blow-off pipe is at least vertically provided with three the first support feets.
The outer wall of described feed bin pipe is at least vertically provided with three the second support feets.
The present invention according to the above propose a kind of reactor of high-effective dust-removing, can spontaneous heating to control reaction environment
Temperature, dedusting efficiently, improves the purity of product.
Described high efficiency reactor is used for for the mixed gas being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust carrying out purification,
The utilization rate of fluorine gas is made to reach absolutely.
Mixed gas enter described discharge by described first air inlet pipe, and described sieve plate is to allow in mixed gas
Carbon dust falls in described discharge, in order to prevent from blocking；Fluorine gas and carbon tetrafluoride gas then enter to described feed bin by sieve plate
Pipe, because described discharge is located at the bottom of described feed bin pipe, can be more convenient during follow-up cleaning carbon dust.
Because described heating muff is hollow, described heating tube is facilitated to put into the inside of described heating muff；Due to
Described heating muff has multiple, and it extends transversely through in described feed bin pipe, effectively more carbon can be carried on described material
In storekeeper；Described heating tube heating, makes the temperature of the carbon being supported by described heating muff raise, when fluorine gas and temperature rising
During carbon haptoreaction, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then from described downtake pipe
Discharge.
Some reactions can be mixed insufficient in the carbon tetrafluoride gas of the carbon in described feed bin pipe and fluorine gas reaction generation
Carbon dust, when the carbon tetrafluoride gas being contaminated with carbon dust enter to after described second air inlet pipe from described second through downtake pipe
The bottom of air inlet pipe is discharged, described second air inlet pipe vertically arranged so as to easier for installation, the top of described second air inlet pipe
Through described dust leg top so as to convenient with the connection of described downtake pipe.
The carbon tetrafluoride gas being contaminated with carbon dust can be uniformly distributed by described gas distributor, in described gas spoiler
In the presence of, the carbon tetrafluoride gas being contaminated with carbon dust can stop the longer time in described dust leg, is more favorable for carbon dust
Fall to so that dedusting is more efficient in described blow-off pipe, described second exhaust pipe be located at described gas spoiler top,
Make finally more to increase from the purity of the carbon tetrafluoride gas of wherein discharge, mix fewer carbon dust.
Brief description
Fig. 1 is the positive structure schematic of the one of embodiment of the present invention.
Fig. 2 is the cross-sectional view of the discharge of the one of embodiment of the present invention.
Fig. 3 is the perspective view of the cleaner unit of the one of embodiment of the present invention.
Wherein：Feed bin pipe 31, downtake pipe 311, charge pipe 312, the second support feet 313, discharge 32, sieve plate 321,
First air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, cleaner unit 35, dust leg 351, second exhaust pipe
3511st, Semicircular baffle 3512, blow-off pipe 352, sewage draining exit 3521, the first support feet 3522, the second air inlet pipe 353, gas divide
Cloth device 354, pore 3541, gas spoiler 355, flange 361, blind flange 362.
Specific embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by specific embodiment.
A kind of reactor of high-effective dust-removing, including feed bin pipe 31, discharge 32, heating muff 33, downtake pipe 311 and
Cleaner unit 35；
Described discharge 32 is located at the bottom of described feed bin pipe 31；
The top of described discharge 32 is provided with opening and is communicated to the inside of described feed bin pipe 31；
The top open part of described discharge 32 is provided with sieve plate 321；
Described discharge 32 is provided with the first air inlet pipe 322；
Described heating muff 33 has multiple, and it is hollow, and it extends transversely through in described feed bin pipe 31；
Setting heating tube in described heating muff 33；
Described cleaner unit 35 includes dust leg 351, blow-off pipe 352 and the second air inlet pipe 353；
Described second air inlet pipe 353 is communicated to described downtake pipe 311；
Described second air inlet pipe 353 is vertically arranged, and its bottom is located in described dust leg 351, and its top is through described
The top of dust leg 351；
The bottom of described second air inlet pipe 353 is provided with gas distributor 354, positioned at the top of described gas distributor 354
It is provided with gas spoiler 355；
Described blow-off pipe 352 is located at the bottom of described dust leg 351；
Described dust leg 351 is provided with second exhaust pipe 3511, and it is located at the top of described gas spoiler 355.
Carbon tetrafluoride gas are generated when fluorine gas and carbon are reacted, but, often the utilization rate of fluorine gas can not reach percentage
Hundred, the described high efficiency reactor of the present embodiment is used for entering the mixed gas being contaminated with fluorine gas, carbon tetrafluoride gas and carbon dust
Row reaction, purification, make the utilization rate of fluorine gas reach absolutely.
Mixed gas enter described discharge 32 by described first air inlet pipe 322, and described sieve plate 321 is to allow mixing
Carbon dust in gas falls in described discharge 32, and in order to prevent from blocking, fluorine gas and carbon tetrafluoride gas are then entered by sieve plate 321
Enter to described feed bin pipe 31, because described discharge 32 is located at the bottom of described feed bin pipe 31, can be more during follow-up cleaning carbon dust
Convenient and swift.
Because described heating muff 33 is hollow, described heating tube is facilitated to put into the inside of described heating muff 33；
Because described heating muff 33 has multiple, it extends transversely through in described feed bin pipe 31, can effectively more carbon be carried
In described feed bin pipe 31；Described heating tube heating, makes the temperature of the carbon being supported by described heating muff 33 raise, works as fluorine gas
With reach suitable temperature carbon haptoreaction when, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then
Discharge from described downtake pipe 311.
Some reactions can be mixed insufficient in the carbon tetrafluoride gas of the carbon in described feed bin pipe 31 and fluorine gas reaction generation
Carbon dust, when be contaminated with the carbon tetrafluoride gas of carbon dust through downtake pipe 311 enter to after described second air inlet pipe 353 from
The bottom of described second air inlet pipe 353 is discharged, described second air inlet pipe 353 vertically arranged so as to easier for installation, described the
The top of two air inlet pipe 353 through described dust leg 351 top so as to the connection of described downtake pipe 311 more
Convenient.
The carbon tetrafluoride gas being contaminated with carbon dust can be uniformly distributed by described gas distributor 354, disturbs in described gas
In the presence of stream plate 355, the carbon tetrafluoride gas being contaminated with carbon dust can stop the longer time, more in described dust leg 351
Plus falling in described blow-off pipe 352 so that dedusting is more efficient beneficial to carbon dust, described second exhaust pipe 3511 is located at described
The top of gas spoiler 355, makes finally more to increase from the purity of the carbon tetrafluoride gas of wherein discharge, mixes fewer carbon
Powder.
Further, the top of described feed bin pipe 31 is provided with charge pipe 312, and one end of described charge pipe 312 is communicated in described
The inside of feed bin pipe 31, its other end is provided with flange 361 and blind flange 362, and described blind flange 362 is installed on described flange 361；
Described downtake pipe 311 is located at the outside of described charge pipe 312.
Carbon in described high efficiency reactor through reaction consume after, from the charge pipe 312 located at described feed bin pipe 31 top
Add carbon, operate simpler convenience directly, one end of described charge pipe 312 is communicated in the inside of described feed bin pipe 31, so
Carbon can fall in described feed bin pipe 31 in the presence of weight, only need to dismantle described blind flange 362 in charging, just can be to institute
State high efficiency reactor and carry out feeding operation.
Further, described heating muff 33 is located at the proximal end of described feed bin pipe 31 bottom.
As far as possible many carbon can be made to be supported by described heating muff 33, on the one hand reduce the number of times subsequently adding carbon, another
Aspect also can make fluorine gas contact with more carbon, improves the efficiency of its reaction.
Further, described high efficiency reactor also includes temperature detector 34, and it is located at described feed bin pipe 31；
Carbon near described heating muff 33 is higher with the reaction efficiency of fluorine gas, and described temperature detector 34 can be effectively
Detect the reaction temperature in described feed bin pipe 31, thus preferably described in control heating tube heating-up temperature, to ensure carbon and fluorine
Gas is continuously in optimal reaction temperature.
Further, described gas distributor 354 is horn-like；
Described gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
Described gas distributor 354 is fixed on the bottom of described second air inlet pipe 353 thereon at end opening.
Because the upper end open of described gas distributor 354 is less, it is possible to second air inlet pipe 353 less with aperture
Coupling is fixed, and trumpet-shaped described gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end, makes
The distribution obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.
Further, described gas distributor 354 arranges full pore 3541.
Further make the distribution of mixed gas more uniform, be more favorable for the sedimentation of carbon dust.
Further, described gas spoiler 355 is horn-like；
Described gas spoiler 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end
The edge of mouth is fixed on the inwall of described dust leg 351.
The edge of the opening of described gas spoiler 355 upper end is fixed on the inwall of described dust leg 351, so being contaminated with
The carbon tetrafluoride gas of carbon dust can be hindered towards the outer wall of described dust leg 351 bottom by described gas spoiler 355 effectively
Gear, makes mixed gas have more times to rest in described dust leg 351, is conducive to the sedimentation of carbon dust；Described gas is disturbed
Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from described gas spoiler 355
Top sedimentation, also will not be deposited on described gas spoiler 355, also can be along the opening of described gas spoiler 355 upper end
Fall to the opening of its lower end, eventually fall in described blow-off pipe 352.
Further, described blow-off pipe 352 is outward-dipping；
The top of described blow-off pipe 352 side is obtuse angle with the angle A of the base plane formation of described dust leg 351；
The top of described blow-off pipe 352 opposite side is acute angle with the angle B of the base plane formation of described dust leg 351；
The bottom of described blow-off pipe 352 is provided with sewage draining exit 3521.
As Fig. 3, the described angle A of the present embodiment is 120 °, and angle B is 30 °, convenient safely clears up described blowdown
Carbon dust in pipe 352, the described sewage draining exit 3521 of the present embodiment is provided with blind flange 362 and flange 361, by dismantling blind flange
362 mode, carbon dust is finally discharged from described sewage draining exit 3521.
Further, described second exhaust pipe 3511 located at described dust leg 351 close to top outer wall；
It is provided with Semicircular baffle 3512, it is located in described second air inlet pipe 353 close to described in described dust leg 351
That side of second exhaust pipe 3511, and it is located at the lower section of described second exhaust pipe 3511；
Described Semicircular baffle 3512 is downward-sloping setting.
Described second exhaust pipe 3511 makes mixed gas have more located at described dust leg 351 close to the outer wall at top
Time rest in described dust leg 351, be conducive to the sedimentation of carbon dust；It is provided with Semicircular baffle in described dust leg 351
3512, it can intercept the rising of mixed gas, and mixed gas are rushed for, away from described second exhaust pipe 3511 exit, entering one
Step ground allows mixed gas have more times to rest in described dust leg 351, is more conducive to be conducive to the sedimentation of carbon dust, described partly
Circular baffle plate 3512 is downward-sloping setting, and carbon dust is not easy to pile up thereon, whereabouts of taking advantage of a situation.
Further, the bottom of described discharge 32 is provided with blind flange 362 and flange 361；
Described blind flange 362 is installed on described flange 361 to seal described discharge 32.
By installing described blind flange 362, more enough can effectively seal described discharge 32, it is to avoid gas leaks；Logical
Cross and dismantle described blind flange 362, can rapidly clear up the dust that the reaction in described discharge 32 stays, mainly described
The carbon dust that sieve plate 321 filters.
Further, it is provided with support column 323 in described discharge 32；
The two ends of described support column 323 are respectively held against the bottom of described sieve plate 321 and the flange of described discharge 32 bottom
The top surface of lid 362.
Described support column 323 has supporting role to described sieve plate 321, can effectively support described sieve plate 321 it is ensured that
The stability of its work is so as to carbon dust can stably be filtered.
Further, the outer wall of described blow-off pipe 352 is at least vertically provided with three the first support feets 3522.
Described blow-off pipe 352 can be supported, facilitate its installation.
Further, the outer wall of described feed bin pipe 31 is at least vertically provided with three the second support feets 313.
Described feed bin pipe 31 can be supported, facilitate its installation.
Describe the know-why of the present invention above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed to by any way.Based on explanation herein, the technology of this area
Personnel do not need to pay other specific embodiments that performing creative labour can associate the present invention, and these modes fall within
Within protection scope of the present invention.
Claims (10)
1. a kind of reactor of high-effective dust-removing, including feed bin pipe, discharge, heating muff, downtake pipe and cleaner unit；
It is characterized in that：Described discharge is located at the bottom of described feed bin pipe；
The top of described discharge is provided with opening and is communicated to the inside of described feed bin pipe；
The top open part of described discharge is provided with sieve plate；
Described discharge is provided with the first air inlet pipe；
Described heating muff has multiple, and it is hollow, and it extends transversely through in described feed bin pipe；
Setting heating tube in described heating muff；
Described cleaner unit includes dust leg, blow-off pipe and the second air inlet pipe；
Described second air inlet pipe is communicated to described downtake pipe；
Described second air inlet pipe is vertically arranged, and its bottom is located in described dust leg, and its top is through the top of described dust leg
Portion；
The bottom of described second air inlet pipe is provided with gas distributor, is provided with gas flow-disturbing positioned at the top of described gas distributor
Plate；
Described blow-off pipe is located at the bottom of described dust leg；
Described dust leg is provided with second exhaust pipe, and it is located at the top of described gas spoiler.
2. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：The top of described feed bin pipe is provided with
Charge pipe, one end of described charge pipe is communicated in the inside of described feed bin pipe, and its other end is provided with flange and blind flange, described method
Blue lid is installed on described flange；
Described downtake pipe is located at the outside of described charge pipe.
3. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：Described high efficiency reactor also includes
Temperature detector, it is located at described feed bin pipe.
4. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：Described gas distributor is loudspeaker
Shape；
Described gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；
Described gas distributor is fixed on the bottom of described second air inlet pipe thereon at end opening.
5. a kind of high-effective dust-removing according to claim 4 reactor it is characterised in that：Arrange on described gas distributor
Full pore.
6. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：Described gas spoiler is loudspeaker
Shape；
Described gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end
It is fixed on the inwall of described dust leg.
7. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：
Described blow-off pipe is outward-dipping；
The top of described blow-off pipe side is obtuse angle with the angle A of the base plane formation of described dust leg；
The top of described blow-off pipe opposite side is acute angle with the angle B of the base plane formation of described dust leg；
The bottom of described blow-off pipe is provided with sewage draining exit.
8. according to claim 1 a kind of reactor of high-effective dust-removing it is characterised in that：Described second exhaust pipe is located at described
Dust leg is close to the outer wall at top；
Be provided with Semicircular baffle in described dust leg, its be located at described second in air inlet pipe close to described second exhaust pipe that
Side, and it is located at the lower section of described second exhaust pipe；
Described Semicircular baffle is downward-sloping setting.
9. a kind of high-effective dust-removing according to claim 1 reactor it is characterised in that：The bottom of described discharge is provided with
Blind flange and flange；
Described blind flange is installed on described flange to seal described discharge.
10. a kind of high-effective dust-removing according to claim 9 reactor it is characterised in that：It is provided with described discharge and prop up
Dagger；
The two ends of described support column are respectively held against the bottom of described sieve plate and the top surface of the blind flange of described gas collection bottom of the tube；
The outer wall of described blow-off pipe is at least vertically provided with three the first support feets；
The outer wall of described feed bin pipe is at least vertically provided with three the second support feets.
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| CN201610955909.1A CN106422993A (en) | 2016-10-27 | 2016-10-27 | Efficient dust-removal type reactor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610955909.1A CN106422993A (en) | 2016-10-27 | 2016-10-27 | Efficient dust-removal type reactor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106334499A (en) * | 2016-10-27 | 2017-01-18 | 广东华特气体股份有限公司 | Spontaneous heating efficient reactor |
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| RU2336928C1 (en) * | 2007-07-13 | 2008-10-27 | Олег Савельевич Кочетов | Inertial dust separator |
| CN101580452A (en) * | 2009-06-22 | 2009-11-18 | 黎明化工研究院 | Preparation process of carbon tetrafluoride and equipment thereof |
| CN106334499A (en) * | 2016-10-27 | 2017-01-18 | 广东华特气体股份有限公司 | Spontaneous heating efficient reactor |
| CN206435171U (en) * | 2016-10-27 | 2017-08-25 | 广东华特气体股份有限公司 | A kind of reactor of high-effective dust-removing |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2336928C1 (en) * | 2007-07-13 | 2008-10-27 | Олег Савельевич Кочетов | Inertial dust separator |
| CN101580452A (en) * | 2009-06-22 | 2009-11-18 | 黎明化工研究院 | Preparation process of carbon tetrafluoride and equipment thereof |
| CN106334499A (en) * | 2016-10-27 | 2017-01-18 | 广东华特气体股份有限公司 | Spontaneous heating efficient reactor |
| CN206435171U (en) * | 2016-10-27 | 2017-08-25 | 广东华特气体股份有限公司 | A kind of reactor of high-effective dust-removing |
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| CN106334499A (en) * | 2016-10-27 | 2017-01-18 | 广东华特气体股份有限公司 | Spontaneous heating efficient reactor |
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Application publication date: 20170222 |