CN206109252U

CN206109252U - Carbon tetrafluoride's purification system

Info

Publication number: CN206109252U
Application number: CN201621180435.XU
Authority: CN
Inventors: 肖三; 廖恒易; 陈艳珊; 袁淑筠
Original assignee: Jiangxi Huate Electronic Chemical Co Ltd; Guangdong Huate Gases Co Ltd
Current assignee: Jiangxi Huate Electronic Chemical Co Ltd; Guangdong Huate Gases Co Ltd
Priority date: 2016-10-27
Filing date: 2016-10-27
Publication date: 2017-04-19
Anticipated expiration: 2026-10-27

Abstract

The utility model provides a carbon tetrafluoride's purification system, includes fluorine gas source, reaction unit, water wash column, caustic wash tower and rectifying column, reaction unit includes the second dust remover, the second dust remover includes dust leg, second blow off pipe and fourth intake pipe, the vertical setting of fourth intake pipe, its bottom is located the dust leg, and its top is run through in the top of dust leg, the bottom of fourth intake pipe is equipped with air distributor, and the top that is located air distributor is equipped with gaseous spoiler, the bottom of dust leg is located to the second blow off pipe, fluorine gas source, reaction unit, water wash column, caustic wash tower and rectifying column connect gradually. The utility model discloses according to above -mentioned content, provide a carbon tetrafluoride's purification system, its purification effect ideal, dust removal effect is good.

Description

A kind of purification system of carbon tetrafluoride

Technical field

This utility model is related to purification for gas field, more particularly to a kind of purification system of carbon tetrafluoride.

Background technology

Carbon tetrafluoride is plasma etching gas important in current microelectronics industry, be widely used in silicon, silicon dioxide, The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solaode, laser The aspects such as detergent, lubricant and brake fluid in technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit production Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, including hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with Fluohydric acid gas and fluorine gas prepare carbon tetrafluoride etc. with carbon source directly contact reaction.Wherein, current maturation process using hydrofluorocarbons, Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal Impurity；Fluorine carbon directly contact reaction method prepares carbon tetrafluoride, and the method can prepare four through continuous development and perfection Perfluorocarbon.

But, the purification effect of existing carbon tetrafluoride purification system is not high, and dust removing effects are unsatisfactory, are unfavorable for tetrafluoro Change the preparation of carbon.

Utility model content

The purpose of this utility model is to propose a kind of purification system of carbon tetrafluoride, good dedusting effect, carbon tetrafluoride Purification effect is preferable.

It is that, up to this purpose, this utility model is employed the following technical solutions：

A kind of purification system of carbon tetrafluoride, including fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column；

The reaction unit includes the second cleaner unit；

Second cleaner unit includes dust leg, the second blow-off pipe and the 4th air inlet pipe；

4th air inlet pipe is vertically arranged, and its bottom is located in the dust leg, and its top is through the dust leg Top；

The bottom of the 4th air inlet pipe is provided with gas distributor, is provided with gas above the gas distributor and disturbs Stream plate；

Second blow-off pipe is located at the bottom of the dust leg；

The fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column are sequentially connected.

Further, the purification system also includes airbag, cooler, lower pressure adsorber, pressurized adsorbent device and fills Device；

The fluorine source gas, reaction unit, water scrubber, caustic wash tower, airbag, cooler, lower pressure adsorber, pressurized adsorbent Device, rectifying column and filler are sequentially connected.

Further, the reaction unit includes first reactor and the second reactor being sequentially connected；

The first reactor includes the first cleaner unit, and the second reactor includes the second cleaner unit；

The first reactor also includes the first feed bin pipe, economizer bank and reaction tube；

The bottom of the first feed bin pipe is provided with trumpet-shaped dilatation pipe, and the opening of the dilatation Guan Youqi upper ends is under it The opening at end is gradually inwardly narrowed；

The first feed bin pipe, dilatation pipe and economizer bank be it is vertically arranged, the reaction tube be horizontally set；

The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in described The outer wall of reaction tube；

The two ends of the reaction tube are provided with the first air inlet；

The first feed bin pipe is provided with downtake pipe, and it is connected to first cleaner unit；

The second reactor also includes the second feed bin pipe, discharge, heating muff and the 3rd exhaustor；

The discharge is located at the bottom of the second feed bin pipe；

Opening is provided with the top of the discharge and the inside of the second feed bin pipe is communicated to；

The top open part of the discharge is provided with sieve plate；

The discharge is provided with the 3rd air inlet pipe, and it is connected to first cleaner unit；

3rd exhaustor is connected to the 4th air inlet pipe of second cleaner unit；

The heating muff has multiple, and it is hollow, and it is extended transversely through in the second feed bin pipe；

Heating tube is set in the heating muff.

Further, the first charge pipe and blow-down pipe are provided with the top of the first feed bin pipe；

Described one end of first charge pipe and one end of blow-down pipe are respectively communicated with the top of the first feed bin pipe；

The other end of first charge pipe and the two ends of the reaction tube are equipped with flange and blind flange, the blind flange It is installed on the flange

Further, the first reactor also includes cooler bin；

In the cooler bin, the two ends of the reaction tube protrude from the outside of the cooler bin to the reaction tube.

The cooler bin is rectangular box, and its top is provided with opening；

The bottom outer wall of the wherein side wall of the cooler bin is at least provided with a water inlet pipe；

Outer wall at the top proximal of the wherein side wall of the cooler bin is at least provided with an overflow pipe；

The reaction tube is provided with least one thermometer boss；

The lower end closed of the thermometer boss and in the reaction tube；

Temperature detector is provided with the thermometer boss.

Further, first cleaner unit includes dust removing tube and dividing plate；

The dividing plate includes that upper spacer and the quantity of lower clapboard, the upper spacer and lower clapboard are at least one；

The upper spacer and lower clapboard are equally spacedly welded in the dust removing tube；

The adjacent upper spacer and lower clapboard forms dedusting gas circuit；

The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, described Downtake pipe is connected with second air inlet pipe.

Further, the two ends of the dust removing tube are equipped with blind flange and flange, the blind flange be installed on the flange with Seal the dust removing tube；

The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the lower clapboard Fit with the upper surface of the blind flange of the dust removing tube bottom bottom；

First cleaner unit also includes baffle plate；

The baffle plate is fixed on the blind flange, and is located at the two of the weld of the upper spacer or lower clapboard respectively Side；

The bottom of the dust removing tube is provided with trumpet-shaped seal pipe；

The blind flange of the bottom of the dust removing tube is communicated with the first blow-off pipe inside the dust removing tube, described First blow-off pipe is provided with valve.

Further, the second charge pipe is provided with the top of the second feed bin pipe, one end of second charge pipe is communicated in The inside of the second feed bin pipe, its other end is provided with flange and blind flange, and the blind flange is installed on the flange；

Outer wall of 3rd exhaustor located at second charge pipe；

The second reactor also includes temperature detector, and it is located at the second feed bin pipe, and close to the heating Sleeve pipe.

Further, the gas distributor is horn-like；

The gas distributor is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；

The gas distributor is fixed on thereon the bottom of the 4th air inlet pipe at end opening；The gas distributor Upper arrangement completely pore.

Further, the gas spoiler is horn-like；

The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the opening of its upper end Edge is fixed on the inwall of the dust leg；

Second blow-off pipe is outward-dipping；

The angle A that the top of the second blow-off pipe side is formed with the base plane of the dust leg is obtuse angle；

The angle B that the top of the second blow-off pipe opposite side is formed with the base plane of the dust leg is acute angle；

The bottom of second blow-off pipe is provided with sewage draining exit；

The dust leg is provided with the 4th exhaustor, and it is located at the top of the gas spoiler, and close to the dust Outer wall at the top of pipe；

Semicircular baffle is provided with the dust leg, it is located in the 4th air inlet pipe close to the 4th exhaustor That side, and positioned at the lower section of the 4th exhaustor；

The Semicircular baffle is downward-sloping setting.

The purpose of this utility model is to propose a kind of purification system of carbon tetrafluoride, and its purification effect is preferable, dedusting effect It is really good.

When being contaminated with the carbon tetrafluoride gas of carbon dust after the 4th air inlet pipe from the bottom of the 4th air inlet pipe Discharge, the 4th air inlet pipe is vertically arranged so as to which easier for installation, the gas distributor can will be contaminated with carbon dust Carbon tetrafluoride gas are uniformly distributed, and in the presence of the gas spoiler, the carbon tetrafluoride gas for being contaminated with carbon dust can be in institute State in dust leg and stop the longer time, be more favorable for falling in second blow-off pipe for carbon dust, the 4th exhaustor Positioned at the top of the gas spoiler, make finally more to increase from the purity of the carbon tetrafluoride gas wherein discharged, mix more Few carbon dust.

Description of the drawings

Fig. 1 is the positive part sectioned view of the first reactor of the one of embodiment of this utility model.

Fig. 2 is the part sectioned view of the side of the first reactor of the one of embodiment of this utility model.

Fig. 3 is the positive part sectioned view of the first cleaner unit of the one of embodiment of this utility model.

Fig. 4 is the partial enlarged drawing at the C of Fig. 3.

Fig. 5 is the positive structure schematic of the second reactor of the one of embodiment of this utility model.

Fig. 6 is the cross-sectional view of the discharge of the one of embodiment of this utility model.

Fig. 7 is the perspective view of the second cleaner unit of the one of embodiment of this utility model.

Fig. 8 is the theory diagram of the one of embodiment of this utility model.

Wherein：Fluorine source gas 1, first reactor 2, the first feed bin pipe 21, dilatation pipe 211, downtake pipe 212, first add Expects pipe 213, blow-down pipe 214, support base 215, economizer bank 22, reaction tube 23, the first air inlet 231, thermometer boss 232, method Blue 261, blind flange 262, cooler bin 24, water inlet pipe 241, overflow pipe 242, the first cleaner unit 25, dust removing tube 251, seal pipe 2511st, dividing plate 252, upper spacer 2521, lower clapboard 2522, dedusting gas circuit 253, the second air inlet pipe 254, second exhaust pipe 255, gear Plate 256, the first blow-off pipe 257, second reactor 3, the second feed bin pipe 31, the 3rd exhaustor 311, the second charge pipe 312, second Support feet 313, discharge 32, sieve plate 321, the 3rd air inlet pipe 322, support column 323, heating muff 33, temperature detector 34, Two cleaner units 35, dust leg 351, the 4th exhaustor 3511, Semicircular baffle 3512, the second blow-off pipe 352, sewage draining exit 3521, First support feet 3522, the 4th air inlet pipe 353, gas distributor 354, pore 3541, gas spoiler 355, water scrubber 4, alkali Wash tower 5, airbag 6, cooler 7, lower pressure adsorber 81, pressurized adsorbent device 82, rectifying column 9, filler 10.

Specific embodiment

Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by specific embodiment.

As shown in figure 8, a kind of purification system of carbon tetrafluoride, including the fluorine source gas 1, reaction unit, the washing that are sequentially connected Tower 4, caustic wash tower 5, airbag 6, cooler 7, lower pressure adsorber 81, pressurized adsorbent device 82, rectifying column 9 and filler 10；

The reaction unit includes first reactor 2 and second reactor 3；

Be provided with booster pump between the caustic wash tower 5 and airbag 6, the lower pressure adsorber 81 and pressurized adsorbent device 82 it Between be provided with booster pump, provide power for a kind of purification system of carbon tetrafluoride.

The first reactor 2 includes the first cleaner unit 25, and the second reactor 3 includes the second cleaner unit 35；

The fluorine source gas 1 of the present embodiment prepare fluorine gas using the method for electrolysis, and fluorine gas is passed through to described the from the fluorine source gas 1 One reactor 2 generates carbon tetrafluoride gas with the carbon reaction in it, but, often the utilization rate of fluorine gas can not reach percent Hundred, and the carbon dust of incomplete reaction can be mixed with, reacted gas becomes to mainly contain carbon tetrafluoride, perfluoroethane, octafluoro third Alkane, carbon monoxide, carbon dioxide, carbon dust, fluorine gas, the mixed gas of fluohydric acid gas；First cleaner unit 25 being capable of filtration fraction Carbon dust, prevents dust from blocking follow-up system, improves the purity of carbon tetrafluoride gas.

After single filter, by the second reactor 3, the carbon in the second reactor can be fluorine for mixed gas Gas thoroughly reacts, and can improve the utilization rate of fluorine gas, and the water being avoided that again in fluorine gas and follow-up water scrubber occurs violent anti- Should, second cleaner unit 25 can filter out the overwhelming majority and react incomplete in first reactor 2 and second reactor Carbon dust, further improves the purity of carbon tetrafluoride gas.

The water scrubber 4 is entered from the second cleaner unit 35 mixed gas out, by the process washed, can either be removed Fluohydric acid gas in mixed gas, the aqueous solution of fluohydric acid gas can be stored as side-product, and can save what is needed in follow-up alkali cleaning Alkali liquor.From the mixed gas out of the water scrubber 4 through caustic wash tower 5, the fluorination for failing to completely remove in water-washing process Hydrogen is removed, and further improves the purity of the carbon tetrafluoride gas in mixed gas, and the alkali liquor used by the present embodiment is potassium hydroxide Solution.

The airbag 6 is entered to from the mixed gas out of the caustic wash tower 5, mixed gas are gathered up temporarily Come, ensure that follow-up technique has enough tolerance.During washing, mixed gas can carry substantial amounts of water, institute secretly Stating cooler 7 can remove substantial amounts of water in mixed gas, be easy to being further purified for follow-up carbon tetrafluoride gas；The low pressure Adsorber 81 further removes the impurity such as moisture carbon dioxide, the carbon monoxide in mixed gas, the energy of pressurized adsorbent device 82 Enough carbon monoxides further removed in mixed gas, carbon dioxide and micro moisture, further improve carbon tetrafluoride gas The purity of body；Again through the distillation operation of rectifying column, carbon tetrafluoride gas are separated, then the filler 10 is filled Dress operation, the carbon tetrafluoride gas after purification are filled.

As shown in figure 1, the first reactor 2 also includes the first feed bin pipe 21, economizer bank 22 and reaction tube 23；

The bottom of the first feed bin pipe 21 is provided with trumpet-shaped dilatation pipe 211, the opening by its upper end of dilatation pipe 211 Mouth is gradually inwardly narrowed to the opening of its lower end；

The first feed bin pipe 21, dilatation pipe 211 and economizer bank 22 are vertically arranged, and the reaction tube 23 is laterally to set Put；

The upper end of the economizer bank 22 is connected with the opening of the lower end of dilatation pipe 211, and the lower end of the economizer bank 22 connects Pass through the outer wall of the reaction tube 23；

The two ends of the reaction tube 23 are provided with the first air inlet 231；

The first feed bin pipe 21 is provided with downtake pipe 212, and it is connected to first cleaner unit 25；

As shown in figure 5, the second reactor 3 also includes the second feed bin pipe 31, discharge 32, heating muff 33 and the 3rd Exhaustor 311；

The discharge 32 is located at the bottom of the second feed bin pipe 31；

The top of the discharge 32 is provided with opening and is communicated to the inside of the second feed bin pipe 31；

The top open part of the discharge 32 is provided with sieve plate 321；

The discharge 32 is provided with the 3rd air inlet pipe 322, and it is connected to first cleaner unit 25；

3rd exhaustor 311 is connected to second cleaner unit 35；

The heating muff 33 have it is multiple, it is hollow, and it is extended transversely through in the second feed bin pipe 31；

Heating tube is set in the heating muff 33.

The first reactor 2 of the present embodiment is used for fluorine gas and carbon reaction generates carbon tetrafluoride, and carbon is placed on described the In one feed bin pipe 21, economizer bank 22 and reaction tube 23, first air inlet 231 is located at the two ends of reaction tube 23, one side energy Fluorine gas is passed through to the amount of the reaction tube 23 in enough increasing the unit interval, more fluorine gas is fully contacted with carbon, increases reaction Efficiency；Fluorine gas releases heat when there is chemical reaction with carbon, because the lower end of the economizer bank 22 is communicated in the reaction tube 23 outer wall, substantial amounts of heat can be transferred to the carbon in the economizer bank 22 by product carbon tetrafluoride, and these carbon are carried out Preheating, keeps reaction temperature to stablize, and makes the reaction efficiency of follow-up carbon and fluorine gas higher.

With the carrying out of reaction, the carbon of the reaction tube 23 is gradually consumed, due to the first feed bin pipe 21, dilatation pipe 211 and economizer bank 22 be vertically arranged, under gravity, the carbon in the economizer bank 22 will down drop down onto the reaction Pipe 23 is persistently carried out with ensureing what is reacted, improves the stability and persistence of its work；Similarly, in the first feed bin pipe 21 Carbon can down drop down onto and ensure in the economizer bank 22 that the carbon of question response is preheated, be that follow-up reaction is ready.

The trumpet-shaped dilatation pipe 211 has the effect for expanding the volume of the first feed bin pipe 21, due to the dilatation Pipe 211 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, so being connected to the upper end open of dilatation pipe 211 The first feed bin pipe 21 cross-sectional area can be more than be connected to the lower ending opening of dilatation pipe 211 economizer bank 22 cross section Product, it is assumed that under identical length, the volume of the first feed bin pipe 21 can be significantly for the first feed bin pipe 21 and economizer bank 22 Increase, so as to reduce the persistence for adding indegree, improving the work of first reactor 2 of carbon.

Mixed gas can carry out dust removal process from the row of the downtake pipe 212 to first cleaner unit 25, carry out just After level dedusting, the content of carbon dust is reduced in mixed gas, and the purity of carbon tetrafluoride gas is improved, and the mixing after primary dedusting Gas enters the discharge 32 by the 3rd air inlet pipe 322, and the sieve plate 321 is the carbon dust in order to allow in mixed gas Fall in the discharge 32, to prevent blocking；Fluorine gas and carbon tetrafluoride gas then enter to described second by sieve plate 321 Feed bin pipe 31, because the discharge 32 is located at the bottom of the second feed bin pipe 31, can be convenient during follow-up cleaning carbon dust Fast.

Because the heating muff 33 is hollow, the heating tube is facilitated to be put into the inside of the heating muff 33； Due to the heating muff 33 have it is multiple, it is extended transversely through in the second feed bin pipe 31, can effectively more carbon It is carried in the second feed bin pipe 31；Heating tube is heated, and the temperature for making the carbon supported by the heating muff 33 is raised, when During the elevated carbon haptoreaction of fluorine gas and temperature, the efficiency of reaction can be higher, can quickly generate carbon tetrafluoride gas, then Being expelled to second cleaner unit 35 from the 3rd exhaustor 311 carries out two-stage dust removal, and the utilization rate of final fluorine gas reaches hundred / hundred, the content of carbon dust is also preferably minimized, and greatly promotes the purity of carbon tetrafluoride gas.

Further, the top of the first feed bin pipe 21 is provided with the first charge pipe 213 and blow-down pipe 214；

One end of first charge pipe 213 and one end of blow-down pipe 214 are respectively communicated with the first feed bin pipe 21 Top；

The other end of first charge pipe 213 and the two ends of the reaction tube 23 are equipped with flange 261 and blind flange 262, the blind flange 262 is installed on the flange 261.

After carbon in the first reactor 2 is through reacting consumption, from first located at the top of the first feed bin pipe 21 Charge pipe 213 adds carbon, operates simpler convenience directly, because one end of first charge pipe 213 and blow-down pipe 214 One end is respectively communicated with the top of the first feed bin pipe 21, so carbon can down drop down onto under gravity the first feed bin pipe 21st, dilatation pipe 211, economizer bank 22 and reaction tube 23, to ensure that what is reacted is persistently carried out；Because first charge pipe 213 The two ends of the other end and the reaction tube 23 are equipped with flange 261 and blind flange 262, and the blind flange 262 is installed on the method Blue 261, so need to only dismantle the blind flange 262 in charging and during emptying gas, just the first reactor 2 can be carried out Feeding operation.

The other end of the blow-down pipe 214 is communicated to exhaust gas treating tower, and emptying valve need to be only opened during operation can be to enter The emptying of circulation of qi promoting body.

Further, the reaction tube 23 is respectively arranged at two ends with flange 261 and blind flange 262, and the blind flange 262 installs In the flange 261 sealing the reaction tube 23；

First air inlet 231 is located at the blind flange 262.

By installing the flange 261 in the blind flange 262, the reaction tube 23 can be effectively sealed, it is to avoid gas Body is leaked, the such as leakage of reactant fluorine gas and the leakage of product carbon tetrafluoride gas；By dismantling the blind flange 262, energy The waste residue that enough reactions rapidly cleared up in the reaction tube 23 are stayed, it is simple to operation；First air inlet 231 is located at The blind flange 262, it is ensured that fluorine gas is effectively passed through to the reaction tube.

Further, the radial position laterally at the top proximal of the first feed bin pipe 21 of the downtake pipe 212.

The outer wall laterally at the top proximal of the first feed bin pipe 21 of the downtake pipe 212, can make mixing The distance that gas rises increases, and is conducive to the sedimentation under gravity of carbon dust, improves the purity of carbon tetrafluoride gas.

Further, the first reactor 2 also includes cooler bin 24；

In the cooler bin 24, the two ends of the reaction tube 23 protrude from the cooler bin 24 to the reaction tube 23 It is outside.

Fluorine gas and carbon can release substantial amounts of heat when reacting, the cooler bin 24 built with cooling water, to reduce the reaction The temperature of pipe 23, so as to increase its service life.The two ends of the reaction tube 23 protrude from the outside of the cooler bin 24, convenient Installed in the dismounting of the blind flange 262 at its two ends, it is to avoid cooling water is entered in the reaction tube 23.

Further, the cooler bin 24 is rectangular box, and its top is provided with opening；

The bottom outer wall of the wherein side wall of the cooler bin 24 is at least provided with a water inlet pipe 241；

Outer wall at the top proximal of the wherein side wall of the cooler bin 24 is at least provided with an overflow pipe 242；

The reaction tube 23 is provided with least one thermometer boss 232；

The lower end closed of the thermometer boss 232 and in the reaction tube 23；

Temperature detector 34 is provided with the thermometer boss 232.

The casing of rectangle is easily produced, and the cooling water that can be loaded is also more, its opening for being provided with of top play observation and Check that the first reactor 2 is acted on.As shown in Fig. 2 the quantity of the water inlet pipe 241 of the present embodiment is one, the overflow The quantity of pipe 242 is two, and the water inlet pipe 241 and overflow pipe 242 are more convenient its peace located at the side wall of the cooler bin 24 Dress；The bottom outer wall of the wherein side wall of the cooler bin 24, it is cold when cooling water covers the water inlet of the water inlet pipe 241 But water is passed through to during the cooler bin 24 and can more slowly stablize；The overflow pipe 242 is located at wherein the one of the cooler bin 24 Outer wall at the top proximal of side wall, it is ensured that cooling water in the cooler bin 24 is enough effectively cooling down the reaction tube 23, it is to avoid cooling water excess overflows.

As shown in figure 1, the quantity of the thermometer boss 232 of the present embodiment is two, and it is symmetrically set in the economizer bank On the reaction tube 23 of 22 both sides, it is possible to increase the temperature detector 34 is accurate to the temperature detection in reaction tube 23 Degree, the lower end closed of the thermometer boss 232, can seal the reaction tube 23 can also protect the temperature detector 34.

Further, as shown in figure 3, first cleaner unit 25 includes dust removing tube 251 and dividing plate 252；

The dividing plate 252 includes the number of upper spacer 2521 and lower clapboard 2522, the upper spacer 2521 and lower clapboard 2522 Amount is at least one；

The upper spacer 2521 and lower clapboard 2522 are equally spacedly welded in the dust removing tube 251；

The adjacent upper spacer 2521 and lower clapboard 2522 forms dedusting gas circuit 253；

The outer wall of the dust removing tube 251 is communicated with the second air inlet pipe 254 and second row inside the dust removing tube 251 Trachea 255, the downtake pipe 212 is connected with second air inlet pipe 254.

When mixed gas enter to the dedusting gas circuit 253 of the dust removing tube 251 through second air inlet pipe 254, in institute In the presence of stating the iris action and gravity of upper spacer 2521 and lower clapboard 2522, carbon dust can be settled down to the dust removing tube 251 Bottom, is easy to follow-up cleaning, to improve the purity of carbon tetrafluoride gas, the carbon tetrafluoride gas being finally further purified from The second exhaust pipe 255 is expelled to the 3rd air inlet pipe 322.

The quantity of the upper spacer 2521 of the present embodiment is two, and the quantity of the lower clapboard 2522 is one, by welding, So that the upper spacer 2521 and lower clapboard 2522 are more firmly located in the dust removing tube 251.

Further, the two ends of the dust removing tube 251 are equipped with blind flange 262 and flange 261, and the blind flange 262 is installed In the flange 261 sealing the dust removing tube 251；

The top of the upper spacer 2521 is fitted with the lower surface of the blind flange 262 on the top of the dust removing tube 251, institute Fit with the upper surface of the blind flange 262 of the bottom of the dust removing tube 251 bottom for stating lower clapboard 2522；

First cleaner unit 25 also includes baffle plate 256；

The baffle plate 256 is fixed on the blind flange 262, and is located at the upper spacer 2521 or lower clapboard 2522 respectively Weld both sides；

The bottom of the dust removing tube 251 is provided with trumpet-shaped seal pipe 2511；

The blind flange 262 of the bottom of the dust removing tube 251 is communicated with the first row inside the dust removing tube 251 Dirty pipe 257, first blow-off pipe 257 is provided with valve.

As shown in Figure 3 and Figure 4, the dust removing tube 251 can be rapidly cleared up by dismounting the blind flange 262, it is described The top of upper spacer 2521 is fitted with the lower surface of the blind flange 262 on the top of the dust removing tube 251, the lower clapboard 2522 Bottom fit with the upper surface of the blind flange 262 of the bottom of the dust removing tube 251, mixed gas is removed along described as far as possible Dust and gas road 253 is moved, rather than is directly directly worn with the joint place of upper spacer 2521 and lower clapboard 2522 from the blind flange 262 Cross, improve the purity for removing the quality and carbon tetrafluoride gas of carbon dust.

The baffle plate 256 can stop mixed gas directly from the blind flange 262 and upper spacer 2521 and lower clapboard 2522 joint place is directly through further raising is except the quality of carbon dust and the purity of carbon tetrafluoride gas.

The blind flange 262 of the bottom of the dust removing tube 251 need to periodically pull down discharge solid-state carbon dust, but the dust removing tube The diameter of 251 bottoms is bigger, sealing is more difficult to, so the seal pipe 2511 is set to from opening the opening to its lower end of its upper end The trumpet-shaped pipe that mouth is gradually inwardly narrowed, improves its seal degree.

The fluorine gas of the present embodiment is produced by electrolysis, so hydrogen fluoride gas can be contaminated with fluorine gas, when its temperature Acid solution can be become after degree, in order to clear up safety during carbon dust, the valve on first blow-off pipe 257 is first opened, acid solution is cleared, The clear dust of blind flange 262 is dismantled again.

Further, the first feed bin pipe 21 also includes at least two support bases 215；

The support base 215 is equally spacedly arranged along the outer wall circumference of the first feed bin pipe 21.

The quantity of the support base 215 of the present embodiment is two, and it is along between the outer wall circumference etc. of the first feed bin pipe 21 Arrange away from ground, can preferably support the first feed bin pipe 21, stress when being supported the first feed bin pipe 21 is more Uniformly.

Further, the top of the second feed bin pipe 31 is provided with the second charge pipe 312, and the one of second charge pipe 312 End is communicated in the inside of the second feed bin pipe 31, and its other end is provided with flange 261 and blind flange 262, and the blind flange 262 is pacified Loaded on the flange 261；

Outer wall of 3rd exhaustor 311 located at second charge pipe 312；

As shown in figure 5, the second reactor 3 also includes temperature detector 34, it is located at the second feed bin pipe 31, and Close to the heating muff 33.

After carbon in the second reactor 3 is through reacting consumption, from second located at the top of the second feed bin pipe 31 Charge pipe 312 adds carbon, operates simpler convenience directly, and one end of second charge pipe 312 is communicated in second material The inside of storekeeper 31, so carbon can be dropped down onto down under gravity in the second feed bin pipe 31, in charging dismounting is only needed The blind flange 262, just can carry out feeding operation to the second reactor 3.

Carbon near the heating muff 33 is higher with the reaction efficiency of fluorine gas, and the temperature detector 34 can be effectively Detect in the second feed bin pipe 31 close to the temperature at the heating muff 33, so as to heating tube preferably described in control Heating-up temperature, to ensure that carbon and fluorine gas are continuously in optimal reaction temperature.

Further, as shown in figure 5, the bottom of the discharge 32 is provided with blind flange 262 and flange 261；

The blind flange 262 is installed on the flange 261 to seal the discharge 32.

It is more enough effectively to seal the discharge 32 by installing the blind flange 262, it is to avoid gas is leaked；It is logical Cross and dismantle the blind flange 262, the dust that the reaction that can rapidly clear up in the discharge 32 is stayed is mainly described The carbon dust that sieve plate 321 is filtered.

Further, as shown in fig. 6, being provided with support column 323 in the discharge 32；

The two ends of the support column 323 are respectively held against the top of the bottom of the sieve plate 321 and the blind flange 262.

323 pairs of sieve plates 321 of the support column have supporting role, can effectively support the sieve plate 321, it is ensured that The stability of its work so as to can stably filter carbon dust.

Further, proximal end of the heating muff 33 located at the bottom of the second feed bin pipe 31.

As far as possible many carbon can be made to be supported by the heating muff 33, on the one hand reduce the number of times of follow-up plus carbon, it is another Aspect can also be such that fluorine gas contacts with more carbon, improve the efficiency of its reaction.

The second reactor 3 also includes temperature detector 34, and it is located at the second feed bin pipe 31, and close to described Heating muff 33.

Further, second cleaner unit 35 includes dust leg 351, the second blow-off pipe 352 and the 4th air inlet pipe 353；

4th air inlet pipe 353 is communicated to the 3rd exhaustor 311；

4th air inlet pipe 353 is vertically arranged, and its bottom is located in the dust leg 351, and its top is through described The top of dust leg 351；

The bottom of the 4th air inlet pipe 353 is provided with gas distributor 354, positioned at the top of the gas distributor 354 It is provided with gas spoiler 355；

Second blow-off pipe 352 is located at the bottom of the dust leg 351；

The dust leg 351 is provided with the 4th exhaustor 3511, and it is located at the top of the gas spoiler 355.

Can mix some reactions not in the carbon tetrafluoride gas that carbon and fluorine gas reaction in the second feed bin pipe 31 is generated Sufficient carbon dust, when the carbon tetrafluoride gas for being contaminated with carbon dust enter to the 4th air inlet pipe 353 through the 3rd exhaustor 311 Discharge from the bottom of the 4th air inlet pipe 353 afterwards, the 4th air inlet pipe 353 is vertically arranged so as to easier for installation, institute State the top at the top of the 4th air inlet pipe 353 through the dust leg 351 so as to the connection with the 3rd exhaustor 311 It is convenient.

The gas distributor 354 can be uniformly distributed the carbon tetrafluoride gas for being contaminated with carbon dust, disturb in the gas In the presence of stream plate 355, being contaminated with the carbon tetrafluoride gas of carbon dust can stop the longer time in the dust leg 351, more Plus falling in second blow-off pipe 352 beneficial to carbon dust, the 4th exhaustor 3511 is positioned at the gas spoiler 355 Top, make finally more to increase from the purity of the carbon tetrafluoride gas wherein discharged, mix fewer carbon dust.

Further, the gas distributor 354 is horn-like；

The gas distributor 354 is gradually expanded outwardly from the opening of its upper end to the opening of its lower end；

The gas distributor 354 is fixed on thereon the bottom of the 4th air inlet pipe 353 at end opening；The gas Full pore 3541 is arranged on distributor 354.

Due to the upper end open of the gas distributor 354 it is less, it is possible to the 4th air inlet pipe 353 less with aperture Matching is fixed, and the trumpet-shaped gas distributor 354 is gradually expanded outwardly to the opening of its lower end from the opening of its upper end, made The distribution for obtaining mixed gas is more uniform, is more favorable for the sedimentation of carbon dust.The pore 3541 further makes mixed gas Distribution is more uniform, is more favorable for the sedimentation of carbon dust.

Further, the gas spoiler 355 is horn-like；

The gas spoiler 355 gradually inwardly narrows from the opening of its upper end to the opening of its lower end, and its upper end is opened The edge of mouth is fixed on the inwall of the dust leg 351；

Second blow-off pipe 352 is outward-dipping；

The top of the side of the second blow-off pipe 352 is blunt with the angle A that the base plane of the dust leg 351 is formed Angle；

The top of the opposite side of the second blow-off pipe 352 is sharp with the angle B that the base plane of the dust leg 351 is formed Angle；

The bottom of second blow-off pipe 352 is provided with sewage draining exit 3521；

4th exhaustor 3511 is located at the dust leg 351 close to the outer wall at top；

Semicircular baffle 3512 is provided with the dust leg 351, it is located in the 4th air inlet pipe 353 close to described That side of 4th exhaustor 3511, and positioned at the lower section of the 4th exhaustor 3511；

The Semicircular baffle 3512 is downward-sloping setting.

The edge of the opening of the upper end of gas spoiler 355 is fixed on the inwall of the dust leg 351, so being contaminated with The carbon tetrafluoride gas of carbon dust effectively can be hindered by the gas spoiler 355 towards the outer wall of the bottom of the dust leg 351 Gear, makes mixed gas have more times to rest in the dust leg 351, is conducive to the sedimentation of carbon dust；The gas is disturbed Stream plate 355 is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, even if carbon dust is from the gas spoiler 355 Top sedimentation, also will not be deposited on the gas spoiler 355, also can be along the opening of the upper end of gas spoiler 355 Under drop down onto the opening of its lower end, eventually fall in second blow-off pipe 352.

As shown in fig. 7, the angle A of the present embodiment is 120 °, angle B is 30 °, convenient safely to clear up described Carbon dust in second blow-off pipe 352, the sewage draining exit 3521 of the present embodiment is provided with blind flange 262 and flange 261, by dismounting The mode of blind flange 262, carbon dust is finally discharged from the sewage draining exit 3521.

4th exhaustor 3511, close to the outer wall at top, has mixed gas more located at the dust leg 351 Time rest in the dust leg 351, be conducive to the sedimentation of carbon dust；Semicircular baffle is provided with the dust leg 351 3512, it can intercept the rising of mixed gas, and mixed gas are rushed for, away from the exit of the 4th exhaustor 3511, to enter one Step ground allows mixed gas to have more times to rest in the dust leg 351, is more conducive to be conducive to the sedimentation of carbon dust, it is described partly Circular baffle plate 3512 is downward-sloping setting, and carbon dust is not easy to pile up thereon, and can take advantage of a situation whereabouts.

The outer wall of second blow-off pipe 352 is at least vertically provided with three the first support feets 3522, can support described Second blow-off pipe 352, facilitates it to install.The outer wall of the second feed bin pipe 31 is at least vertically provided with three the second support feets 313, the second feed bin pipe 31 can be supported, facilitate it to install.

Know-why of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality With new principle, and can not by any way be construed to the restriction to this utility model protection domain.Based on explanation herein, Those skilled in the art associates other specific embodiments of the present utility model by need not paying performing creative labour, These modes are fallen within protection domain of the present utility model.

Claims

1. a kind of purification system of carbon tetrafluoride, including fluorine source gas, reaction unit, water scrubber, caustic wash tower and rectifying column；

It is characterized in that：The reaction unit includes the second cleaner unit；

4th air inlet pipe is vertically arranged, and its bottom is located in the dust leg, top of its top through the dust leg Portion；

The bottom of the 4th air inlet pipe is provided with gas distributor, and gas flow-disturbing is provided with above the gas distributor Plate；

Second blow-off pipe is located at the bottom of the dust leg；

2. the purification system of a kind of carbon tetrafluoride according to claim 1, it is characterised in that：The purification system also includes Airbag, cooler, lower pressure adsorber, pressurized adsorbent device and filler；

3. the purification system of a kind of carbon tetrafluoride according to claim 1, it is characterised in that：

The reaction unit includes first reactor and the second reactor being sequentially connected；

The bottom of the first feed bin pipe is provided with trumpet-shaped dilatation pipe, and the opening of the dilatation Guan Youqi upper ends is to its lower end Opening is gradually inwardly narrowed；

The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in the reaction The outer wall of pipe；

The two ends of the reaction tube are provided with the first air inlet；

The discharge is located at the bottom of the second feed bin pipe；

The top open part of the discharge is provided with sieve plate；

3rd exhaustor is connected to the 4th air inlet pipe of second cleaner unit；

Heating tube is set in the heating muff.

4. the purification system of a kind of carbon tetrafluoride according to claim 3, it is characterised in that：Set at the top of first feed bin pipe There are the first charge pipe and blow-down pipe；

The other end of first charge pipe and the two ends of the reaction tube are equipped with flange and blind flange, and the blind flange is installed In the flange.

5. the purification system of a kind of carbon tetrafluoride according to claim 3, it is characterised in that：The first reactor is also wrapped Include cooler bin；

In the cooler bin, the two ends of the reaction tube protrude from the outside of the cooler bin to the reaction tube；

The cooler bin is rectangular box, and its top is provided with opening；

The reaction tube is provided with least one thermometer boss；

The lower end closed of the thermometer boss and in the reaction tube；

Temperature detector is provided with the thermometer boss.

6. the purification system of a kind of carbon tetrafluoride according to claim 3, it is characterised in that：First cleaner unit includes Dust removing tube and dividing plate；

The adjacent upper spacer and lower clapboard forms dedusting gas circuit；

The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, and described first Exhaustor is connected with second air inlet pipe.

7. the purification system of a kind of carbon tetrafluoride according to claim 6, it is characterised in that：The two ends of the dust removing tube are equal Blind flange and flange are provided with, the blind flange is installed on the flange to seal the dust removing tube；

The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the bottom of the lower clapboard Fit with the upper surface of the blind flange of the dust removing tube bottom；

First cleaner unit also includes baffle plate；

The baffle plate is fixed on the blind flange, and is located at the both sides of the weld of the upper spacer or lower clapboard respectively；

The blind flange of the bottom of the dust removing tube is communicated with the first blow-off pipe inside the dust removing tube, and described first Blow-off pipe is provided with valve.

8. the purification system of a kind of carbon tetrafluoride according to claim 3, it is characterised in that：The top of the second feed bin pipe Portion is provided with the second charge pipe, and one end of second charge pipe is communicated in the inside of the second feed bin pipe, and its other end is provided with Flange and blind flange, the blind flange is installed on the flange；

Outer wall of 3rd exhaustor located at second charge pipe；

The second reactor also includes temperature detector, and it is located at the second feed bin pipe, and close to the heating muff.

9. the purification system of a kind of carbon tetrafluoride according to claim 1, it is characterised in that：

The gas distributor is horn-like；

The gas distributor is fixed on thereon the bottom of the 4th air inlet pipe at end opening；Arrange on the gas distributor The full pore of row.

10. the purification system of a kind of carbon tetrafluoride according to claim 1, it is characterised in that：The gas spoiler is It is horn-like；

The gas spoiler is gradually inwardly narrowed from the opening of its upper end to the opening of its lower end, the edge of the opening of its upper end It is fixed on the inwall of the dust leg；

Second blow-off pipe is outward-dipping；

The bottom of second blow-off pipe is provided with sewage draining exit；

The dust leg is provided with the 4th exhaustor, and it is located at the top of the gas spoiler, and close to the dust leg top The outer wall in portion；

Be provided with Semicircular baffle in the dust leg, its be located in the 4th air inlet pipe close to the 4th exhaustor that Side, and positioned at the lower section of the 4th exhaustor；The Semicircular baffle is downward-sloping setting.