CN206444580U

CN206444580U - A kind of reactor with dedusting function

Info

Publication number: CN206444580U
Application number: CN201621180444.9U
Authority: CN
Inventors: 廖恒易; 肖三; 傅铸红
Original assignee: Jiangxi Huate Electronic Chemical Co Ltd; Guangdong Huate Gases Co Ltd
Current assignee: Jiangxi Huate Electronic Chemical Co Ltd; Guangdong Huate Gases Co Ltd
Priority date: 2016-10-27
Filing date: 2016-10-27
Publication date: 2017-08-29
Anticipated expiration: 2026-10-27

Abstract

A kind of reactor with dedusting function, including feed bin pipe, economizer bank, reaction tube and deduster；The bottom of feed bin pipe is provided with horn-like dilatation pipe；Feed bin pipe, dilatation pipe and economizer bank are vertically arranged, and reaction tube is laterally setting；The upper end of economizer bank is connected with the opening of dilatation pipe lower end, and the lower end of economizer bank is communicated in the outer wall of reaction tube；The two ends of reaction tube are provided with the first air inlet；Feed bin pipe is provided with downtake pipe, and it connects the inside and outside of feed bin pipe；Deduster includes dust removing tube and dividing plate；Dividing plate includes the quantity at least one of upper spacer and lower clapboard, upper spacer and lower clapboard；Upper spacer and lower clapboard are equally spacedly welded in dust removing tube；Adjacent upper spacer and lower clapboard formation dedusting gas circuit；The outer wall of dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside dust removing tube, and downtake pipe is connected with the second air inlet pipe.The capacity of reactor is big, and reaction efficiency is high, good dedusting effect, improves the purity of product.

Description

A kind of reactor with dedusting function

Technical field

The utility model is related to consersion unit field, more particularly to a kind of reactor with dedusting function.

Background technology

Carbon tetrafluoride is important plasma etching gas in current microelectronics industry, be widely used in silicon, silica, The etching of the thin-film materials such as silicon nitride, phosphorosilicate glass and tungsten, in electronic device surface clean, the production of solar cell, laser In terms of detergent, lubricant and brake fluid in technology, cryogenic refrigeration, gas-insulated, leak detectants, printed circuit production Also there is extensive application.Carbon tetrafluoride synthetic method is a lot, including hydrofluorocarbons and fluorine gas, cfc in the presence of a catalyst with Hydrogen fluoride and fluorine gas prepare carbon tetrafluoride etc. with the direct haptoreaction of carbon source.Wherein, current maturation process using hydrofluorocarbons, Cfc does carbon source and prepares carbon tetrafluoride, and the prices of raw materials are expensive, easily explode, and has in synthetic product and be difficult removal Impurity；The direct contact reaction method of fluorine carbon prepares carbon tetrafluoride, and this method passes through continuous development and perfection, can prepare height Pure carbon tetrafluoride.

But, existing cylindrical reactor capacity is small, easily blocks, and reaction efficiency is low, it is necessary to repeatedly add reactant, operates Personnel labor intensity is big, and without dedusting function, the purity of product carbon tetrafluoride is low, is unfavorable for the preparation of carbon tetrafluoride.

Utility model content

The purpose of this utility model is to propose a kind of reactor with dedusting function, can overcome of the prior art Deficiency, its capacity is big, and reaction efficiency is high, and dedusting efficiently, improves the purity of product.

For up to this purpose, the utility model uses following technical scheme：

A kind of reactor with dedusting function, including feed bin pipe, economizer bank, reaction tube and deduster；

The bottom of the feed bin pipe is provided with horn-like dilatation pipe, and the dilatation pipe is from the opening of its upper end to its lower end Opening is gradually inwardly narrowed；

The feed bin pipe, dilatation pipe and economizer bank are vertically arranged, and the reaction tube is laterally setting；

The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in described Reaction tube；

The two ends of the reaction tube are provided with the first air inlet；

The feed bin pipe is provided with downtake pipe, and it connects the inside and outside of the feed bin pipe；

The deduster includes dust removing tube and dividing plate；

The dividing plate includes upper spacer and lower clapboard, and the quantity of the upper spacer and lower clapboard is at least one；

The upper spacer and lower clapboard are equally spacedly welded in the dust removing tube；

The adjacent upper spacer and lower clapboard formation dedusting gas circuit；

The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, described Downtake pipe is connected with second air inlet pipe.

Further, the top of the feed bin pipe is provided with charge pipe and blow-down pipe；

One end of the charge pipe and one end of blow-down pipe are respectively communicated with the top of the feed bin pipe；

The two ends of the other end of the charge pipe and the reaction tube are equipped with flange and blind flange, and the blind flange is installed In the flange.

Further, the reactor also includes cooler bin；

The reaction tube is in the cooler bin, and the two ends of the reaction tube protrude from the outside of the cooler bin.

Further, the cooler bin is rectangular box, and its top is provided with opening.

Further, the reaction tube is provided with least one thermometer boss；

The lower end closed of the thermometer boss and in the reaction tube；

Temperature detector is provided with the thermometer boss.

Further, the two ends of the dust removing tube are equipped with blind flange and flange, the blind flange be installed on the flange with Seal the dust removing tube；

The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the lower clapboard Fitted with the upper surface of the blind flange of the dust removing tube bottom bottom.

Further, the deduster also includes multiple baffle plates；

The baffle plate is individually fixed in the blind flange at the dust removing tube two ends, and be located at respectively the upper spacer or under every The both sides of the weld of plate.

Further, the bottom of the dust removing tube is provided with horn-like seal pipe；

The blind flange of the bottom of the dust removing tube is communicated with the blow-off pipe inside the dust removing tube, the blowdown Pipe is provided with valve.

Further, the downtake pipe is laterally located at the outer wall of the feed bin tube top portion proximal end.

Further, the feed bin pipe also includes at least two support bases；

Outer wall circumference of the support base along the feed bin pipe is equally spacedly set.

The utility model proposes a kind of reactor with dedusting function according to the above, and its capacity is big, reaction efficiency Height, good dedusting effect improves the purity of product.

The reactor is used for fluorine gas and carbon reaction generation carbon tetrafluoride, and carbon is placed on the feed bin pipe, economizer bank and anti- In should managing, first air inlet is located at the two ends of reaction tube, on the one hand can increase fluorine gas in the unit interval and be passed through to described The amount of reaction tube, makes more fluorine gas fully be contacted with carbon, increases the efficiency of reaction；Released when fluorine gas chemically reacts with carbon Heat, because the lower end of the economizer bank is communicated in the reaction tube, substantial amounts of heat can be transmitted by reaction product carbon tetrafluoride These carbon are preheated by the carbon in the economizer bank, are kept reaction temperature stable, are made the reaction efficiency of follow-up carbon and fluorine gas It is higher.

With the progress of reaction, the carbon of the reaction tube is gradually consumed, due to the feed bin pipe, dilatation pipe and economizer bank It is vertically arranged, under gravity, the carbon in the economizer bank will drop down onto the reaction tube down to ensure reaction It is lasting to carry out, improve the stability and continuation of its work；Similarly, the carbon in the feed bin pipe can drop down onto the economizer bank down The interior carbon for ensureing question response is preheated, and is that follow-up reaction is ready.

The horn-like dilatation pipe has the effect for expanding the feed bin tube capacity product, because the dilatation pipe is by its upper end Opening gradually inwardly narrowed to the opening of its lower end, so being connected to the cross section of the feed bin pipe of the dilatation pipe upper end open Product can be more than the cross-sectional area for the economizer bank for being connected to the dilatation pipe lower ending opening, it is assumed that the feed bin pipe and economizer bank are in phase Under same length, the volume of the feed bin pipe can be greatly increased, so as to reduce the addition number of times of carbon, improve the reactor work Continuation.

So speed when carbon drops down onto the economizer bank under the dilatation pipe can slow down, the carbon tetrafluoride gas of generation is reacted Cognition is arranged to second air inlet pipe from the downtake pipe.

Some can be mixed in the carbon tetrafluoride gas for reacting generation and react insufficient carbon dust, most carbon dust can be with four Carbon fluoride gas are together discharged from the downtake pipe, when the carbon tetrafluoride gas for being contaminated with carbon dust passes through second air inlet When pipe enters to the dedusting gas circuit of the dust removing tube, in the presence of the iris action and gravity of the upper spacer and lower clapboard, Carbon dust can be settled down to the bottom of the dust removing tube, be easy to follow-up cleaning, to improve the purity of carbon tetrafluoride gas, finally be entered The carbon tetrafluoride gas of one step purifying is discharged from the second exhaust pipe.

Brief description of the drawings

Fig. 1 is the positive part sectioned view of the one of embodiment of the utility model.

Fig. 2 is the part sectioned view of the side of the one of embodiment of the utility model.

Fig. 3 is the positive part sectioned view of the deduster of the one of embodiment of the utility model.

Fig. 4 is the partial enlarged drawing at Fig. 3 C.

Wherein：Feed bin pipe 21, dilatation pipe 211, downtake pipe 212, charge pipe 213, blow-down pipe 214, support base 215, Economizer bank 22, reaction tube 23, the first air inlet 231, thermometer boss 232, flange 261, blind flange 262, cooler bin 24, water inlet Pipe 241, overflow pipe 242, deduster 25, dust removing tube 251, seal pipe 2511, dividing plate 252, upper spacer 2521, lower clapboard 2522, Dedusting gas circuit 253, the second air inlet pipe 254, second exhaust pipe 255, baffle plate 256, blow-off pipe 257.

Embodiment

Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by embodiment.

A kind of reactor with dedusting function, including feed bin pipe 21, economizer bank 22, reaction tube 23 and deduster 25；

The bottom of the feed bin pipe 21 be provided with horn-like dilatation pipe 211, the dilatation pipe 211 from its upper end opening to The opening of its lower end is gradually inwardly narrowed；

The feed bin pipe 21, dilatation pipe 211 and economizer bank 22 are vertically arranged, and the reaction tube 23 is laterally setting；

The upper end of the economizer bank 22 is connected with the opening of the lower end of dilatation pipe 211, and the lower end of the economizer bank 22 connects Pass through the reaction tube 23；

The two ends of the reaction tube 23 are provided with the first air inlet 231；

The feed bin pipe 21 is provided with downtake pipe 212, and it connects the feed bin pipe 21；

The deduster 25 includes dust removing tube 251 and dividing plate 252；

The dividing plate 252 includes upper spacer 2521 and lower clapboard 2522, the number of the upper spacer 2521 and lower clapboard 2522 Amount is at least one；

The upper spacer 2521 and lower clapboard 2522 are equally spacedly welded in the dust removing tube 251；

The adjacent upper spacer 2521 and the formation dedusting of lower clapboard 2522 gas circuit 253；

The dust removing tube 251 is communicated with the second air inlet pipe 254 and second exhaust pipe inside the dust removing tube 251 255, the downtake pipe 212 is connected with second air inlet pipe 254.

Such as Fig. 1, the reactor of the present embodiment is used for fluorine gas and carbon reaction generation carbon tetrafluoride, and carbon is placed on the material In storekeeper 21, economizer bank 22 and reaction tube 23, first air inlet 231 is located at the two ends of reaction tube 23, on the one hand can increase Plus fluorine gas is passed through to the amount of the reaction tube 23 in the unit interval, more fluorine gas is fully contacted with carbon, increase the effect of reaction Rate；Fluorine gas releases heat when being chemically reacted with carbon, because the lower end of the economizer bank 22 is communicated in the reaction tube 23, greatly The heat of amount can be transferred to the carbon in the economizer bank 22 by reaction product carbon tetrafluoride, and these carbon are preheated, and keep anti- Temperature stabilization is answered, makes the reaction efficiency of follow-up carbon and fluorine gas higher.

With the progress of reaction, the carbon of the reaction tube 23 is gradually consumed, due to the feed bin pipe 21, dilatation pipe 211 It is vertically arranged with economizer bank 22, under gravity, the carbon in the economizer bank 22 will drop down onto the reaction tube down 23, to ensure the lasting progress reacted, improve the stability and continuation of its work；Similarly, the carbon meeting in the feed bin pipe 21 Under drop down onto and ensure that the carbon of question response is preheated in the economizer bank 22, be that follow-up reaction is ready.

The horn-like dilatation pipe 211 has the effect for expanding the volume of feed bin pipe 21, due to the dilatation pipe 211 Gradually inwardly narrowed to the opening of its lower end from the opening of its upper end, so being connected to the material of the upper end open of dilatation pipe 211 The cross-sectional area of storekeeper 21 can be more than the cross-sectional area for the economizer bank 22 for being connected to the lower ending opening of dilatation pipe 211, it is assumed that institute Feed bin pipe 21 and economizer bank 22 are stated under identical length, the volume of the feed bin pipe 21 can be greatly increased, so as to reduce carbon Number of times is added, the continuation of the reactor work is improved.

So speed when carbon drops down onto the economizer bank 22 under the dilatation pipe 211 can slow down, the tetrafluoro of generation is reacted Changing carbon gas can be from the row of downtake pipe 212 to second air inlet pipe 254.

It can mix some such as Fig. 3, in the carbon tetrafluoride gas for reacting generation and react insufficient carbon dust, most carbon dust The collection that can be sunk when through carbon-coating drops back into the reaction tube 23, and fraction carbon dust is with carbon tetrafluoride gas together from the first exhaust Pipe 212 is discharged, and the dust removing tube 251 is entered to when being contaminated with the carbon tetrafluoride gas of carbon dust by second air inlet pipe 254 Dedusting gas circuit 253 when, in the presence of the iris action and gravity of the upper spacer 2521 and lower clapboard 2522, carbon dust can sink The bottom of the dust removing tube 251 is down to, is easy to follow-up cleaning, it is finally further to improve the purity of carbon tetrafluoride gas The carbon tetrafluoride gas of purifying is discharged from the second exhaust pipe 255.

The quantity of the upper spacer 2521 of the present embodiment is two, and the quantity of the lower clapboard 2522 is one, by welding, So that the upper spacer 2521 and lower clapboard 2522 are more firmly located in the dust removing tube 251.

Further, the top of the feed bin pipe 21 is provided with charge pipe 213 and blow-down pipe 214；

One end of the charge pipe 213 and one end of blow-down pipe 214 are respectively communicated with the top of the feed bin pipe 21；

The other end of the charge pipe 213 and the two ends of the reaction tube 23 are equipped with flange 261 and blind flange 262, institute State blind flange 262 and be installed on the flange 261；

Carbon in the reactor is added after reaction consumption from the charge pipe 213 located at the top of feed bin pipe 21 Carbon, operates simpler convenience directly, because one end of the charge pipe 213 and one end of blow-down pipe 214 are respectively communicated with institute The top of feed bin pipe 21 is stated, so carbon can drop down onto feed bin pipe 21, dilatation pipe 211, economizer bank 22 and anti-down under gravity Should pipe 23, with ensure reaction lasting progress；Because the other end of the charge pipe 213, the two ends of the reaction tube 23 are all provided with There are flange 261 and blind flange 262, the blind flange 262 is installed on the flange 261, so need to only be dismantled in charging described Blind flange 262, just can carry out feeding operation to the reactor.

The other end of the blow-down pipe 214 is communicated to exhaust gas treating tower, and emptying valve need to be only opened during operation can be to enter The emptying of promoting the circulation of qi body.

Further, the reactor also includes cooler bin 24；

The reaction tube 23 is in the cooler bin 24, and the two ends of the reaction tube 23 protrude from the cooler bin 24 It is outside.

Substantial amounts of heat can be released when fluorine gas and carbon reaction, the cooler bin 24 is built with cooling water, to reduce the reaction The temperature of pipe 23, so as to increase its service life.The two ends of the reaction tube 23 protrude from the outside of the cooler bin 24, convenient Installed in the dismounting of the blind flange 262 at its two ends, it is to avoid cooling water is entered in the reaction tube 23.

Further, the cooler bin 24 is rectangular box, and its top is provided with opening.

The casing of rectangle is easily produced, and the cooling water that can be loaded is also more, its opening for being provided with of top play observation and Check the effect of the reactor behaviour in service.

Further, the bottom outer wall of the wherein side wall of the cooler bin 24 is at least provided with a water inlet pipe 241；

Outer wall at the top proximal of the wherein side wall of the cooler bin 24 is at least provided with an overflow pipe 242.

Such as Fig. 2, the quantity of the water inlet pipe 241 of the present embodiment is one, and the quantity of the overflow pipe 242 is two, described Water inlet pipe 241 and overflow pipe 242 are located at the side wall of the cooler bin 24, are more convenient its installation；The cooler bin 24 is wherein The bottom outer wall of side wall, when water inlet of the cooling water by the water inlet pipe 241, cooling water is passed through to the cooler bin 24 When can more slowly stablize；Outer wall of the overflow pipe 242 at the top proximal of the wherein side wall of the cooler bin 24, Ensure that the cooling water in the cooler bin 24 is enough effectively to cool down the reaction tube 23, it is to avoid cooling dilutional hyponatremia overflows.

Further, the reaction tube 23 is provided with least one thermometer boss 232；

The lower end closed of the thermometer boss 232 and in the reaction tube 23；

Temperature detector is provided with the thermometer boss 232.

Such as Fig. 1, the quantity of the thermometer boss 232 of the present embodiment is two, and is symmetrically set in 22 liang of the economizer bank On the reaction tube 23 of side, it is possible to increase the temperature detector is described to the precision of the temperature detection in reaction tube 23 The lower end closed of thermometer boss 232, can seal the reaction tube 23 can also protect the temperature detector.

Further, the two ends of the dust removing tube 251 are equipped with blind flange 262 and flange 261, and the blind flange 262 is installed In the flange 261 to seal the dust removing tube 251；

The top of the upper spacer 2521 is fitted with the lower surface of the blind flange 262 on the top of dust removing tube 251, institute Fitted with the upper surface of the blind flange 262 of the bottom of dust removing tube 251 bottom for stating lower clapboard 2522.

Such as Fig. 3, the dust removing tube 251, the upper spacer 2521 can be rapidly cleared up by dismounting the blind flange 262 Top fitted with the lower surface of the blind flange 262 on the top of dust removing tube 251, the bottom of the lower clapboard 2522 and institute The upper surface laminating of the blind flange 262 of the bottom of dust removing tube 251 is stated, the carbon tetrafluoride gas mixed is removed along described as far as possible Dust and gas road 253 is moved, rather than is directly directly worn from the joint place of the blind flange 262 and upper spacer 2521 and lower clapboard 2522 Cross, improve the quality except carbon dust and the purity of carbon tetrafluoride gas.

Further, the deduster 25 also includes multiple baffle plates 256；

The baffle plate 256 is individually fixed in the blind flange 262 at the two ends of dust removing tube 251, and is located at respectively on described The both sides of the weld of dividing plate 2521 or lower clapboard 2522.

Such as Fig. 4, the quality except carbon dust and the purity of carbon tetrafluoride gas are further improved, the baffle plate 256 can stop The carbon tetrafluoride gas mixed is directly directly worn from the joint place of the blind flange 262 and upper spacer 2521 and lower clapboard 2522 Cross.

Further, the bottom of the dust removing tube 251 is provided with horn-like seal pipe 2511；

The blind flange 262 of the bottom of the dust removing tube 251 is communicated with the blow-off pipe inside the dust removing tube 251 257, the blow-off pipe 257 is provided with valve.

Such as Fig. 3, the blind flange 262 of the bottom of dust removing tube 251 need to periodically pull down discharge solid-state carbon dust, but described remove The diameter of the bottom of dirt pipe 251 is bigger, is more difficult to sealing, so the seal pipe 2511 is set to from the opening of its upper end to its lower end Opening gradually inside narrowed horn-like pipe, improve its seal degree.

The fluorine gas of the present embodiment is produced by electrolysis, so HF gases can be contaminated with fluorine gas, at a temperature of it Acid solution can be become after drop, in order to clear up safety during carbon dust, the valve on the blow-off pipe 257 is first opened, clear acid solution, then tear open Unload the cleaning dust of blind flange 262.

Further, the two ends of the reaction tube 23 are respectively equipped with flange 261 and blind flange 262, and the blind flange 262 is installed In the flange 261 to seal the reaction tube 23；

First air inlet 231 is located at the blind flange 262.

By installing the flange 261 in the blind flange 262, the reaction tube 23 can be effectively sealed, it is to avoid gas Body is leaked, such as leakage of reactant fluorine gas and the leakage of product carbon tetrafluoride gas；By dismantling the blind flange 262, energy The waste residue that enough reactions rapidly cleared up in the reaction tube 23 leave, it is simple to operate；First air inlet 231 is located at The blind flange 262, it is ensured that fluorine gas is effectively passed through to the reaction tube.

Further, the radial position of the downtake pipe 212 laterally at the top proximal of feed bin pipe 21.

Carbon reaction in part is insufficient during reaction, and the carbon dust of a residual part can be taken away by the gas of reaction generation, and described the One blast pipe 212 is laterally at the top proximal of feed bin pipe 21, and the distance increase that gas can be made to increase is conducive to carbon dust Sedimentation under gravity, improve carbon tetrafluoride gas purity.

Further, the feed bin pipe 21 also includes at least two support bases 215；The support base 215 is along the feed bin The outer wall circumference of pipe 21 is equally spacedly set.

The quantity of the support base 215 of the present embodiment is two, and its outer wall circumference along the feed bin pipe 21 is equally spacedly Set, can preferably support the feed bin pipe 21, being more uniformly stressed when being supported the feed bin pipe 21.

Technical principle of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality With new principle, and the limitation to the utility model protection domain can not be construed in any way.Based on explanation herein, Those skilled in the art, which would not require any inventive effort, can associate other embodiments of the present utility model, These modes are fallen within protection domain of the present utility model.

Claims

1. a kind of reactor with dedusting function, including feed bin pipe, economizer bank, reaction tube and deduster；

It is characterized in that：The bottom of the feed bin pipe be provided with horn-like dilatation pipe, the dilatation pipe from its upper end opening to The opening of its lower end is gradually inwardly narrowed；

The upper end of the economizer bank is connected with the opening of the dilatation pipe lower end, and the lower end of the economizer bank is communicated in the reaction Pipe；

The two ends of the reaction tube are provided with the first air inlet；

The deduster includes dust removing tube and dividing plate；

The outer wall of the dust removing tube is communicated with the second air inlet pipe and second exhaust pipe inside the dust removing tube, described first Blast pipe is connected with second air inlet pipe；

The downtake pipe is laterally located at the proximal end in the feed bin tube top portion；

The feed bin pipe also includes at least two support bases；

2. a kind of reactor with dedusting function according to claim 1, it is characterised in that：

The two ends of the dust removing tube are equipped with blind flange and flange, and the blind flange is installed on the flange to seal the dedusting Pipe；

The top of the upper spacer is fitted with the lower surface of the blind flange on the dust removing tube top, the bottom of the lower clapboard Fitted with the upper surface of the blind flange of the dust removing tube bottom.

3. a kind of reactor with dedusting function according to claim 2, it is characterised in that：The deduster also includes Multiple baffle plates；

The baffle plate is individually fixed in the blind flange at the dust removing tube two ends, and is located at the upper spacer or lower clapboard respectively The both sides of weld.

4. a kind of reactor with dedusting function according to claim 2, it is characterised in that：The bottom of the dust removing tube Provided with horn-like seal pipe；

The blind flange of the bottom of the dust removing tube is communicated with the blow-off pipe inside the dust removing tube, and the blow-off pipe is set There is valve.