CN206114256U - Optical system ghost image measuring device - Google Patents
Optical system ghost image measuring device Download PDFInfo
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- CN206114256U CN206114256U CN201620935189.8U CN201620935189U CN206114256U CN 206114256 U CN206114256 U CN 206114256U CN 201620935189 U CN201620935189 U CN 201620935189U CN 206114256 U CN206114256 U CN 206114256U
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Abstract
The utility model provides an optical system ghost image measuring device has set gradually the light source, has expanded along the light path and has restrainted collimating system, the directional adjustable splitting system of double - circuit rotation type axial and the optical system that awaits measuring, the directional adjustable splitting system of double - circuit rotation type axial includes beam splitter assembly, rotating assembly, the flexible subassembly of axial, folding axis mirror, directional adjustment subassembly and support group spare, beam splitter assembly sets up in the one end of the flexible subassembly of axial, and directional adjustment subassembly sets up in the other end of the flexible subassembly of axial, the folding axis mirror is installed on directional adjustment subassembly, it is rotatory that rotating assembly drives the flexible subassembly of axial, beam splitter assembly, folding axis mirror and directional adjustment subassembly. Use beam splitting Prism's characteristic, expand a branch of collimation and restraint the light beam and divide into two the tunnel, through the directional adjustable splitting system of double - circuit rotation type axial, can realize that the beam split light path is rotatory around transmitted light axle clamp pyramidal plane, the distribution of the optical system's that is awaited measuring three dimensions ghost image position.
Description
Technical field
The utility model belongs to field of optical detection, is related to a kind of optical system ghost image measurement apparatus.
Background technology
In order to improve Photodetection system to remote and weak signal target detectivity it is necessary to increase optical system mouth as far as possible
Footpath, tries to improve suppression level of the optical system to veiling glare, so as to improve the signal to noise ratio of whole system；In order to realize in target range
To the measurement of objective contour and attitude it is necessary to realizing electro-optical system using the spectral characteristics of radiation of different target under complex environment
Multispectral survey, will improve electro-optical system performance by suppressing the spuious light energy of each spectral coverage in this process.
Veiling glare is the light energy for referring to reach the non-targeted imaging of electro-optical system detector target surface, and its presence can be led
The increase of the output noise of optical system is caused, so that the reduction of image planes contrast, can make the target letter that system is exported when serious
Number it is buried in completely in noise, has influence on the EFFECTIVE RANGE and resolution capability of optical system.
Veiling glare can be divided into according to the source of veiling glare：Outside non-imaged veiling glare, imaging veiling glare and inside heat
Radiation dispersion light.When imaging veiling glare refers to optical system imaging, because the residual reflectivity of optical element surface causes part
Imaging light reaches image planes inside optical system with improper light path, forms the veiling glare of optical noise, is mainly shown as ghost image
With cold emission phenomenon.
Cold emission phenomenon is primarily present in the infrared optical system with refrigeration mode detector, refers to the picture of detector itself
It is reflected to the phenomenon that target surface forms new noise image.And ghost image is referred to because the residual reflectivity of optical element surface causes
Part imaging light converges the picture of formation in optical system light path.For the research and development of optical system, the test of ghost image is
It is very necessary, especially to heavy caliber, multispectral, zoom photoelectricity test equipment, the test of its ghost image, analysis, positioning work
By the image quality of direct relation optical system, so the measurement apparatus for setting up a efficient measurement optical system ghost image are very
It is necessary.
Utility model content
Technical problem to be solved in the utility model is to provide and a kind of can quick and precisely measure optical system ghost image
Measurement apparatus and measuring method.
Technical solution of the present utility model is to provide a kind of optical system ghost image measurement apparatus, and its special feature exists
In：Light source, beam-expanding collimation system, two-way rotation type axial sensing adjustable light splitting system are disposed with along light path and treat photometry
System；
Larger Dynamic range brightness meter is provided with above-mentioned light source, for measuring in real time during optical system normal imaging to be measured
Light-source brightness and light-source brightness when there is ghost image；The exit end of the light source is provided with adjustable target mechanism, and outgoing light source passes through
Adjustable target mechanism forms target beam；
Above-mentioned two-way rotation type axial point to adjustable light splitting system include spectrum groupware, rotary components, axial stretching component,
Folding axle mirror, sensing adjustment component and support component；
Above-mentioned spectrum groupware is arranged at one end of axial stretching component, and it is centrally located at beam-expanding collimation system outgoing beam
On optical axis；
Above-mentioned sensing adjustment component is arranged at the other end of axial stretching component；
Above-mentioned folding axle mirror is installed on sensing adjustment component；The reflection optical axis of the folding axle mirror and the transmission optical axis of spectrum groupware
Between angle angle by point to adjustment component adjustment；The distance between folding axle mirror and spectrum groupware pass through axial stretching component
Adjustment；It is located at by the reflected beams apart from regulating guarantee folding axle mirror during adjustment assembly angle adjustment is pointed to and treats photometry
The entrance pupil position of system；
The side of above-mentioned rotary components and axial stretching component are connected, and opposite side is connected by rotating shaft and support component；Rotation
Turn the optical axis coincidence of the rotating shaft of component and the outgoing beam of beam-expanding collimation system；Rotary components can drive axial stretching component,
Spectrum groupware, folding axle mirror and sensing adjustment component rotate around the optical axis of the outgoing beam of beam-expanding collimation system.
The utility model optical system ghost image measurement apparatus also include master control system, and above-mentioned master control system includes connecting with light source
Connect light source control module and adjustable target mechanism connection and rotary components connection rotary components control module and point to adjustment
The sensing adjustment component control module of component connection and the axial stretching component control module of axial stretching component connection；Light source
Control module is to control light source assembly output spoke brightness；Adjustable target mechanism controls module is to control adjustable target mechanism mesh
Target motion；Rotary components control module is rotated to control rotary components；Adjustment component control module is pointed to control
Point to adjustment assembly angle change；Axial stretching component control module is to control axial telescopic component motion.
Pose adjustment is carried out in order to treat photometry system and beam-expanding collimation system, the utility model optical system ghost image is surveyed
Amount device also includes the first pose adjustment instrument and the second pose adjustment instrument, and above-mentioned first pose adjustment instrument is located at beam-expanding collimation system
Outside the optical axis of outgoing beam, above-mentioned second pose adjustment instrument carries optical system to be measured, and above-mentioned master control system also includes the first appearance
State adjusts the control module of instrument and the second pose adjustment instrument, for controlling the first pose adjustment instrument and the second pose adjustment instrument, can
Realize orientation, pitching, roll, beat and elevating movement.
Above-mentioned first pose adjustment instrument and the second pose adjustment instrument are multi-dimensional adjusting mechanisms, can be according to optical system to be measured
Actual conditions, realize that rapid alignment is adjusted in the test starting stage.
In order to adapt to different examining systems, above-mentioned adjustable target mechanism including multiple target replace turntable automatically with
And it is arranged on the plurality of target plate that multiple target is replaced on turntable automatically；The plurality of target plate is star tester；Various star testers
Star bore dia it is different, the star tester of suitable star bore dia can be selected according to the parameter of actual examining system.
In order to provide uniform light source, above-mentioned light source is integrating sphere light source, the integrating sphere light source xenon lamp and halogen tungsten lamp
Mixing light source, xenon lamp is provided with iris diaphgram with the emitting light path of halogen tungsten lamp, is capable of achieving the tune of integrating sphere light source light-emitting window brightness
Section, the dynamic range of integrating sphere light source is up to 120dB.
In order in alignment procedure, not introduce veiling glare as far as possible, above-mentioned beam-expanding collimation system is off-axis using bimirror form
Reflective optics, wherein primary mirror are spherical mirror.
Above-mentioned spectrum groupware is that the surface figure accuracy of Amici prism, the Amici prism and folding axle mirror reaches 1/50 λ, wherein λ=
632.8nm, hardly introduces aberration after such light splitting.
The utility model additionally provides a kind of optical system ghost image measuring method, comprises the following steps：
Step one：Point bright light source, treats that it is stablized；
Step 2：According to the design parameter of optical system to be measured, according to optical system diffraction formula, concrete formula such as formula
(1) the star bore dia of selection is needed when, calculating test, and selects suitable star hole to move into integrating sphere light from adjustable target mechanism
At the light-emitting window in source；
Wherein：D is star bore dia, and unit is mm；
λ is operating central wavelength, and unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
D is the Entry pupil diameters of optical system to be measured, and unit is mm；
Step 3：The transmitted light beam of spectrum groupware is imaged after optical system start to be measured；Need not roll in this process
The reflected beams imaging of axle mirror, therefore, it can point to adjustment component by adjustment and axial stretching component adjusts going out for folding axle mirror
Irradiating light beam is not at the entrance pupil of optical system to be measured；Master control system adjusts the appearance of the first pose adjustment instrument and the second pose adjustment instrument
State so that the optical axis or the optical axis of optical system to be measured is parallel with the optical axis of beam-expanding collimation system；
Step 4：Light-source brightness L is adjusted by master control system；In the case where keeping light-source brightness constant, by master control
System call interception points to adjustment component, the axial telescopic component of control, it is ensured that the outgoing beam of folding axle mirror covers optical system to be measured
Entrance pupil；Adjust rotary components by master control system simultaneously to rotate；Often adjust and once point to adjustment component and rotary components, record phase
Angle theta and rotary components rotational angle between the reflection optical axis of the folding axle mirror answered is pointed to and spectrum groupware transmission optical axis are pointed to
ω；Collection optical system image to be measured, checks ghost image is whether there is in gathered image, corresponding L, θ and ω when screening has ghost image；
Step 5：Change light-source brightness L, repeat step four, record difference θ and the corresponding ghost image information of difference ω.
Obtain ghost image information after can with according to formula (2) and formula (3) calculating optical system normal imaging to be measured when
Pupil luminance and Pupil luminance when there is ghost image；
Wherein：D is star bore dia, and unit is mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
LNormallyTo measure light-source brightness during optical system normal imaging, unit is W/m2·sr；
LGhost imageOccurs light-source brightness during ghost image for measurement optical system, unit is W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
By the illumination relation at the entrance pupil of the ghost image information and optical system normal imaging to be measured of acquisition with formation ghost image,
The structure of optical system can be improved through theoretical calculation, it is to avoid produce ghost image.
The beneficial effects of the utility model are：
1st, the utility model has used the characteristic of Amici prism, and a branch of collimator and extender light beam is divided into into two-way, and transmits
The sensing of collimated light beam is constant, and by two-way rotation type axial adjustable light splitting system is pointed to, and is capable of achieving light splitting optical path around transmitted light
Axle clamp pyramidal plane rotates, and is tested by ghost image, and the distribution of the three dimensions ghost image position of optical system to be measured is obtained, and is optics
The system especially requisite practical tool of high sensitivity detection class optical system ghost image genetic analysis；In addition, also can be
The optical lens design phase measures to ghost image distribution, and optical lens is adjusted in time, it is to avoid later stage optical system ghost
The appearance of picture；
2nd, two-way rotation type axial of the present utility model points to the folding axle mirror the reflected beams sensing side in adjustable light splitting system
Relation is established between spectrum groupware transmitted light beam axial direction, so can be in ghost image measurement process to forming ghost image
One-to-one relationship is set up in corresponding incident ray direction with system optical axis or the optical axis；
3rd, optical system ghost image measurement apparatus of the present utility model can be by the adjustment of master control system, automatically, quickly
Incident light position and energy that optical system forms ghost image are obtained, test process is stable, reliable, and can greatly improve test
Efficiency, is highly suitable for being applied in engineering test.
4th, a kind of optical system ghost image measurement apparatus of the present utility model, integrating sphere light source is by halogen tungsten lamp and xenon source group
Into up to 1%, light-emitting window brightness has very big dynamic range to stability, it is ensured that ghost image tests the need to light-source brightness
Will；Spectral region is capable of achieving visible, near-infrared optical system ghost image test up to 300nm～2500nm；
5th, a kind of optical system ghost image measurement apparatus of the present utility model, adjustable target mechanism is replaced automatically from multiple target
Turntable, quickly can be replaced to target target plate, be greatly saved the testing time；
6th, a kind of optical system ghost image measurement apparatus of the present utility model, pose adjustment instrument uses the tune of six degree of freedom
Whole, in spectrum groupware transmission optical axis and system optical axis to be measured or optical axis alignment procedures are carried out, it is right to can greatly improve
Quasi- efficiency.
Description of the drawings
Fig. 1 is a kind of structural representation of optical system ghost image measurement apparatus provided by the utility model；
Fig. 2 is the structural representation that two-way rotation type axial points to adjustable light splitting system in the utility model；
Fig. 3 is incident ray and optical axis angle schematic diagram.
Reference is in figure：1- light sources；2- adjustable targets mechanism；3- beam-expanding collimation systems；4- two-way rotation type axials
Point to adjustable light splitting system；5- the first pose adjustment instrument；6- master control systems；7- spectrum groupwares；8- rotary components；9- axial stretchings
Component；10- rolls over axle mirror；11- points to adjustment component；12- support components；13- the second pose adjustment instrument.
Specific embodiment
The utility model is further described below in conjunction with accompanying drawing.
As shown in figure 1, the utility model optical system ghost image measurement apparatus, including master control system 6, also include along light path according to
The integrating sphere light source 1 of secondary setting, beam-expanding collimation system 3, two-way rotation type axial point to adjustable light splitting system 4 and positioned at the second appearance
Optical system to be measured on state adjustment instrument 13.Integrating sphere light source 1 and beam-expanding collimation system 3 are placed on table top；In beam-expanding collimation
The outside of system 3 is provided with the first pose adjustment instrument 5.For the ease of the attitude regulation of examining system, six degree of freedom is introduced adjustable
Whole pose adjustment instrument, facilitates quick foundation between the incident direction of light and optical system to be measured to contact, and test can be greatly improved
Efficiency.
The present embodiment master control system 6 includes various control module, concrete control light source 1, pose adjustment instrument and two-way rotation
Formula is axially directed in adjustable light splitting system 4 work of each part and completes data record and process.
Integrating sphere light source 1 in the present embodiment is the mixing light source of xenon lamp and halogen tungsten lamp, in the outgoing of xenon lamp and halogen tungsten lamp
Light path is provided with iris diaphgram, and by the iris diaphgram light-emitting window brightness of integrating sphere light source, the dynamic of integrating sphere light source are adjusted
Scope is up to 120dB.Due to ghost image it is relatively low in the response ratio of optical system detector to be measured, only strong illumination when, ghost image
Relative response could be improved, and detector just can be responded.So, from the light source of dynamic range 120dB, energy ratio is reachable
106Magnitude, it is sufficient to which the response of ghost image is brought up to into detector can scope accordingly.Integrating sphere light source is also equipped with real-time monitoring
The Larger Dynamic range brightness meter of integrating sphere inside luminous power, can real-time monitoring integrating sphere light source brightness.
The exit end of integrating sphere light source 1 is provided with adjustable target mechanism 2, adjustable target mechanism 2 is used for adjusting integrating sphere
The emergent light of light source 1 forms target beam, the adjustable target mechanism 2 of the present embodiment including multiple target replace automatically turntable and
The plurality of target plate being disposed thereon；Target Board is star tester；Star tester has multigroup；The star bore dia of every group of star tester is not
Together.Multiple target replaces what turntable quickly can be replaced to target target plate automatically, saves the testing time, by drive circuit,
Drive target wheel to rotate, realize the replacing of target target plate, there are three optoelectronic switches in each target target plate coaxial direction, for compiling
Code detection, and coding information is returned into master control system.Light source control module in master control system is according to actual optical system to be measured
Parameter select the star tester of suitable star bore dia.
The beam-expanding collimation system 3 of the present embodiment is off-axis reflection optical system, and existing off-axis reflection optical system has list
Two kinds of systems of mirror and bimirror.No matter in single mirror or bimirror system, primary mirror is the primary scattering surface of system, and veiling glare is main
It is that mirror surface roughness is caused the reason for produce primary scattering from primary mirror, therefore to primary mirror in Stray Light Test system
The roughness requirements on surface are harsh, generally all in nm magnitudes.Relative to aspherical, the processing technology maturation of sphere, it is more easy to obtain
High-quality reflecting surface, therefore the present embodiment primary mirror adopts spherical mirror, due to single spherical mirror system, can not to meet the depth of parallelism excellent
In 10 " and use requirement of the system wave aberration better than 2 λ rms, therefore the present embodiment adopts bimirror system.
As shown in Fig. 2 the present embodiment two-way rotation type axial points to adjustable light splitting system 4 and including rotary components 8, axially stretching
Contracting component 9, spectrum groupware 7, sensing adjustment component 11, folding axle mirror 10 and support component 12, spectrum groupware 7 is Amici prism, point
Light prism is arranged at one end of axial stretching component 9, and it is centrally located on the optical axis of the outgoing beam of beam-expanding collimation system 3；Point to
Adjustment component 11 is arranged at the other end of axial stretching component 9, and folding axle mirror 10 is arranged on sensing adjustment component 11；Folding axle mirror 10
The transmission optical axis of reflection optical axis and spectrum groupware 7 can pass through to point to the change that the angle adjustment that adjust component 11 realize angle angle
Change；The extended distance of axial stretching component 9 is adjustable, for realizing that rolling over the distance between axle mirror 10 and spectrum groupware 7 is adjusted, and is being referred to
Entering for optical system is located to during the adjustment angle adjustment of component 11 by rolling over the reflected beams of axle mirror 10 apart from regulating guarantee
Pupil position；The side of rotary components 8 and axial stretching component 9 are connected, and opposite side is connected by rotating shaft and support component 12, rotate
Component 8 drives spectrum groupware 7, axial stretching component 9, points to adjustment component 11 and the going out around beam-expanding collimation system 3 of folding axle mirror 10
The optical axis rotation of irradiating light beam；In the present embodiment spectrum groupware 7, the surface figure accuracy of folding axle mirror 10 reach 1/50 λ, and wherein λ=
632.8nm, hardly introduces aberration after such light splitting.
Concrete test process is as follows：
Light source control module control integrating sphere in master control system 6 is lighted；F numbers, entrance pupil according to optical system to be measured is straight
The focal length f of footpath D and beam-expanding collimation system 3, calculating can make the star bore dia d of optical system diffraction to be measured, master control system control
Adjustable target mechanism 2 is rotated to suitable star hole；Integrating sphere illuminates selected star hole target, is formed by beam-expanding collimation system 3
Collimated light beam, simulates infinite point target；Collimated light beam points to light splitting group in adjustable light splitting system 4 by two-way rotation type axial
The transmitted light path of part 7, optical system to be measured is imaged to this light path target；Master control system light source control module adjusts integrating sphere
Output brightness, make optical system to be measured formed by image reach 80% quantization digit；Master control system pose adjustment instrument module is controlled
First pose adjustment instrument and the second pose adjustment instrument carry out pose adjustment, make optical system to be measured to transmitted light path institute into image position
In the center of photoelectronic imaging device；Master control system reads the attitude information of now pose adjustment instrument, enters as process data
Row record；Because two-way rotation type axial points to the transmission optical axis and folding axle mirror 10 of the spectrum groupware 7 in adjustable light splitting system 4
There are corresponding angled relationships between reflection optical axis, and be stored among master control system；Sensing adjustment component in master control system
The angle of adjustment component is pointed in control module adjustment, and correspondence adjusts the reflection optical axis of the transmission optical axis of spectrum groupware 7 and folding axle mirror 10
Angle theta, and while according to the needs of actual test, the axial telescopic component 9 of control is moved so that the reflected beams of folding axle mirror 10
Cover the entrance pupil of optical system to be measured；Master control system rotary components control module control rotary components are rotated, while record is now
Rotational angle ω, collection optical system image to be measured；Master control system light source control module control integrating sphere output brightness L increases
Plus, repeat the above steps are set up in collection image there is [L, θ, ω] matrix relationship corresponding during ghost image, and is stored in master control system
In system record, and final output is to result interface.
By the angle theta for constantly changing spectrum groupware transmission optical axis and the reflection optical axis of folding axle mirror, optical system to be measured is set up
Measurement relation (as shown in Figure 3) between the different incident rays of system and different brightness under the corresponding spheric coordinate system of optical axis angle theta.
Meanwhile, it is as follows according to beam-expanding collimation system light-emitting window illumination formula, can calculating optical system normal imaging when entrance pupil at
Illumination ENormallyWith illumination E at entrance pupil when there is ghost imageGhost image(beam-expanding collimation system light-emitting window illumination is multiplied by each Reuter's mistake of spectrum groupware
Rate as reaches the illumination formula at optical system entrance pupil).So through the quick measurement of whole measurement apparatus, light can be set up
Pupil luminance during system normal imaging and Pupil luminance proportionate relationship when there is ghost image.
Wherein：D is star bore dia, and unit is：mm；
F is the focal length of beam-expanding collimation system, and unit is mm；
LNormallyTo measure integrating sphere light source brightness during optical system normal imaging, unit is W/m2·sr；
LGhost imageOccurs integrating sphere light source brightness during ghost image for measurement optical system, unit is W/m2·sr；
τThoroughlyFor spectrum groupware transmitted light path transmitance；
τPointFor spectrum groupware light splitting optical path transmitance；
τ is the transmitance of beam-expanding collimation system.
Optical system ghost image measurement apparatus of the present utility model, can set up shape by the measurement to optical system ghost image
Into the space points relationship corresponding to ghost image, and shine at entrance pupil when can also set up to form ghost image and normal imaging by measurement
The relation of degree.By the acquisition of above two information, elimination can be looked for by theoretical calculation, software emulation or reduce ghost image shape
Into means, the structure of optical system is changed accordingly, in the hope of developing more excellent optical system.
Optical system ghost image measurement apparatus of the present utility model are highly suitable for detecting the optical systems such as class camera, star sensor
Apply in system, by the change of light source, in applying also for the test of high power laser optical system, be worth being widelyd popularize.
Claims (7)
1. a kind of optical system ghost image measurement apparatus, it is characterised in that：Along light path be disposed with light source, beam-expanding collimation system,
Two-way rotation type axial points to adjustable light splitting system and optical system to be measured；
Larger Dynamic range brightness meter is provided with the light source, the exit end of the light source is provided with adjustable target mechanism；
The two-way rotation type axial points to adjustable light splitting system includes spectrum groupware, rotary components, axial stretching component, folding axle
Mirror, sensing adjustment component and support component；
The spectrum groupware is arranged at one end of axial stretching component, and spectrum groupware is centrally located at beam-expanding collimation system emergent light
On the optical axis of beam；
It is described to point to the other end that adjustment component is arranged at axial stretching component；
The folding axle mirror is installed on sensing adjustment component；Between the reflection optical axis and the transmission optical axis of spectrum groupware of the folding axle mirror
Angle angle by point to adjustment component adjustment；The distance between folding axle mirror and spectrum groupware are adjusted by axial stretching component
It is whole；
The rotary components side and axial stretching component are connected, and rotary components opposite side is connected by rotating shaft and support component；
The rotating shaft of rotary components and the optical axis coincidence of the outgoing beam of beam-expanding collimation system；Rotary components drive axial stretching component, divide
Optical assembly, folding axle mirror and sensing adjustment component rotation.
2. optical system ghost image measurement apparatus according to claim 1, it is characterised in that：Also include master control system, it is described
Master control system includes light source control module, adjustable target mechanism controls module, rotary components control module, sensing adjustment component control
Molding block and axial stretching component control module；
The output end of the light source control module is connected with light source；The output end of the adjustable target mechanism controls module with it is adjustable
Target mechanism connects；The output end of the rotary components control module is connected with rotary components；It is described to point to adjustment component control
The output end of module is connected with adjustment component is pointed to；The output end of the axial stretching component control module and axial stretching component
Connection.
3. optical system ghost image measurement apparatus according to claim 2, it is characterised in that：Also include the first pose adjustment instrument
With the second pose adjustment instrument, the first pose adjustment instrument be located at beam-expanding collimation system outgoing beam optical axis outside, described second
Pose adjustment instrument carries optical system to be measured；
The master control system also includes the first pose adjustment instrument and the second pose adjustment instrument control module, first pose adjustment
Output end and the first pose adjustment instrument and the second pose adjustment instrument connection of instrument and the second pose adjustment instrument control module.
4. optical system ghost image measurement apparatus according to claim 1, it is characterised in that：The adjustable target mechanism includes
Multiple target is replaced turntable and is arranged on the plurality of target plate that multiple target is replaced on turntable automatically automatically；The plurality of target
Plate is star tester；The star bore dia of the star tester is different.
5. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that：The light source is product
Bulb separation light source, the integrating sphere light source is xenon lamp and halogen tungsten lamp mixing light source, and xenon lamp is provided with the emitting light path of halogen tungsten lamp can
Become diaphragm.
6. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that：The beam-expanding collimation
System is off-axis reflection optical system, and the off-axis reflection optical system adopts bimirror form, and wherein primary mirror is spherical mirror.
7. according to the arbitrary described optical system ghost image measurement apparatus of Claims 1-4, it is characterised in that：The spectrum groupware
Surface figure accuracy for Amici prism, the Amici prism and the folding axle mirror reaches 1/50 λ, wherein λ=632.8nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620935189.8U CN206114256U (en) | 2016-08-24 | 2016-08-24 | Optical system ghost image measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620935189.8U CN206114256U (en) | 2016-08-24 | 2016-08-24 | Optical system ghost image measuring device |
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| CN206114256U true CN206114256U (en) | 2017-04-19 |
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| CN201620935189.8U Expired - Fee Related CN206114256U (en) | 2016-08-24 | 2016-08-24 | Optical system ghost image measuring device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248351A (en) * | 2016-08-24 | 2016-12-21 | 中国科学院西安光学精密机械研究所 | A kind of optical system ghost image measurement apparatus and measuring method thereof |
| CN111637853A (en) * | 2020-06-16 | 2020-09-08 | 河北汉光重工有限责任公司 | Method for adjusting optical axis of large-span T-shaped rotary table |
| CN112539921A (en) * | 2020-11-30 | 2021-03-23 | 昆山工研院新型平板显示技术中心有限公司 | Visual residual image testing system |
| CN115164645A (en) * | 2022-07-15 | 2022-10-11 | 长春理工大学 | Panoramic aiming mirror image skipping rotation detection device and method |
-
2016
- 2016-08-24 CN CN201620935189.8U patent/CN206114256U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106248351A (en) * | 2016-08-24 | 2016-12-21 | 中国科学院西安光学精密机械研究所 | A kind of optical system ghost image measurement apparatus and measuring method thereof |
| CN106248351B (en) * | 2016-08-24 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | Optical system ghost image measurement method based on optical system ghost image measuring device |
| CN111637853A (en) * | 2020-06-16 | 2020-09-08 | 河北汉光重工有限责任公司 | Method for adjusting optical axis of large-span T-shaped rotary table |
| CN112539921A (en) * | 2020-11-30 | 2021-03-23 | 昆山工研院新型平板显示技术中心有限公司 | Visual residual image testing system |
| CN115164645A (en) * | 2022-07-15 | 2022-10-11 | 长春理工大学 | Panoramic aiming mirror image skipping rotation detection device and method |
| CN115164645B (en) * | 2022-07-15 | 2024-04-12 | 长春理工大学 | Device and method for detecting image jumping rotation of panoramic aiming mirror image |
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