CN103954436B - High precision spectral radiometric calibration device - Google Patents
High precision spectral radiometric calibration device Download PDFInfo
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- CN103954436B CN103954436B CN201410195217.2A CN201410195217A CN103954436B CN 103954436 B CN103954436 B CN 103954436B CN 201410195217 A CN201410195217 A CN 201410195217A CN 103954436 B CN103954436 B CN 103954436B
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- lens barrel
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- high precision
- integrating sphere
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Abstract
Technical matters to be solved by this invention is to provide a kind of high precision spectral radiometric calibration device, and its calibration precision is high, and device is simple to operate, and achieves multifunction.Comprise base, described base is movably set with support through X direction guiding rail; Described support is movably set with workbench through Y-direction guide rail; Lens barrel fixed mount is provided with above described workbench, described lens barrel fixed mount internal fixtion has lens barrel, the first smooth hurdle, lens, the second smooth hurdle is disposed with in described lens barrel, described lens barrel rear is provided with transmission integrating sphere, and the light inlet of described transmission integrating sphere mates with lens barrel, light-emitting window to be connected with spectroradiometric measurement instrument through popping one's head in; Also comprise luminance standard lamp, beacon light station undetermined, scalar product bulb separation station undetermined.
Description
Technical field
The present invention relates to optical test equipment, be specifically related to a kind of high precision spectral radiometric calibration device.
Background technology
Spectral radiometric calibration, be optical instrument before the use, the standard of repetition it can be calibrated with natural, is referred to as spectral radiometric calibration.Optically generally adopt at present, the lamp plate system of being irradiated diffusing panel by irradiance standard lamp is calibrated integrating sphere, and this calibrating method precision is not high, can only meet general requirement of engineering.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of high precision spectral radiometric calibration device, and its calibration precision is high, and device is simple to operate, and achieves multifunction.
For solving the problems of the technologies described above, high precision spectral radiometric calibration device of the present invention, comprises base, described base is movably set with support through X direction guiding rail; Described support is movably set with workbench through Y-direction guide rail; Lens barrel fixed mount is provided with above described workbench, described lens barrel fixed mount internal fixtion has lens barrel, the first smooth hurdle, lens, the second smooth hurdle is disposed with in described lens barrel, described lens barrel rear is provided with transmission integrating sphere, and the light inlet of described transmission integrating sphere mates with lens barrel, light-emitting window to be connected with spectroradiometric measurement instrument through popping one's head in; Also comprise luminance standard lamp, beacon light station undetermined, scalar product bulb separation station undetermined.
After have employed technique scheme, as standard after the signal that luminance standard lamp sends can be gathered by spectroradiometric measurement instrument through transmitting integrating sphere, measuring the measurand on beacon light station undetermined, scalar product bulb separation station undetermined again, high precision calibration can be carried out to measurand by the comparison of twice measurement data with converting.
Described lens barrel comprises the adjustable front lens barrel of radially relative position and rear lens barrel.After adopting technique scheme, can adjust the length of lens barrel, thus adapt to the collection needs of Different Light.
Described scalar product bulb separation station undetermined comprises scalar product bulb separation station base undetermined, described scalar product bulb separation station base undetermined is provided with rotating disk, described rotating disk is movably set with left and right clamping plate by scalar product bulb separation station guide rail undetermined.After adopting technique scheme, the location of tested integrating sphere can be facilitated.
Described lens barrel fixed mount is movably arranged on workbench by lift adjustment nut, thus is convenient to the height adapting to different object.
The invention has the advantages that: 1. optical system adopts transmission-type, solve the measurement visual field problem of detector.2., in measurement links, have employed aperture-variable diaphragm and add and transmit the mode of integrating sphere, cannot the brightness matching problem of matching measurement with to solve between the brightness of luminance standard lamp or high temperature blackbody and integrating sphere because both brightness differences are too large.3. used transmission integrating sphere dexterously in system, two difficult problems are solved in the lump well.4. pair measuring system realizes multifunction.The mode that the present invention adopts spectroscopic measurements to add comparison is calibrated, and namely directly carries out spoke brightness calibration with luminance standard lamp to integrating sphere to be measured.The advantage of this programme is the scheme of calibration precision higher than other.The research success of the method, mean and directly can carry out spoke brightness calibration with high temperature blackbody stove to integrating sphere, effectively can shorten the transfer chain of radiation standard, reduce standard transmission error, the precision that engineer applied is calibrated greatly improves.
Preferably, described base is movably set with two-dimension translational platform support through two-dimension translational platform guide rail, described two-dimension translational platform support is provided with auxiliary stand through a pair X to auxiliary guide rail, is also provided with the X that is made up of to stepper motor, X to auxiliary screw mandrel X between described two-dimension translational platform support and auxiliary stand to auxiliary drive; Described auxiliary stand is provided with Z-direction stepper motor, the main shaft of described Z-direction stepper motor is provided with Z-direction and drives screw mandrel, auxiliary stand drives screw mandrel and a pair Z-direction guideway to be connected with additional lock board mount through Z-direction, and on described additional lock board mount, movable being provided with assists clamping plate a pair.
Described X is connected to stepper motor, Z-direction stepper motor with translation stage controller able to programme, thus the movement of two-dimension translational platform can be controlled by the program and record.
After adopting technique scheme, integrating sphere to be measured fixed by auxiliary clamping plate, under the driving of Programmable Logic Controller, X coordinates to stepper motor and Z-direction stepper motor, integrating sphere to be measured moves along level and vertical direction pointwise, form a square pointwise lighting surface, lens barrel daylighting point focusing is in integrating sphere light-emitting window plane.Before measurement, lens barrel maintains static after moving to correct position, collects a series of photosignal successively, through software process, just can obtain the solid function image of the spoke lightness plane homogeneity of integrating sphere light-emitting window.
Accompanying drawing explanation
Fig. 1 is the principle schematic of high precision spectral radiometric calibration device of the present invention;
Fig. 2 is the structural representation of high precision spectral radiometric calibration device of the present invention;
Fig. 3 is the longitudinal 2 observation schematic diagram of high precision spectral radiometric calibration device of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
Visible as shown in Figure 1, Figure 2, of the present inventionly comprise base 1, described base 1 is movably set with support 2 through X direction guiding rail 20; Described support 2 is movably set with workbench 3 through Y-direction guide rail 30; Lens barrel fixed mount 31 is provided with above described workbench 3, described lens barrel fixed mount 31 internal fixtion has lens barrel 32, the first smooth hurdle 33, the smooth hurdle 35 of lens 34, second is disposed with in described lens barrel 32, described lens barrel 32 rear is provided with transmits integrating sphere 4, and the light inlet of described transmission integrating sphere 4 mates with lens barrel 32, light-emitting window 5 to be connected with spectroradiometric measurement instrument 6 through popping one's head in; Also comprise luminance standard lamp 7, beacon light station 8 undetermined, scalar product bulb separation station 9 undetermined.
Described luminance standard lamp 7, beacon light station 8 undetermined, scalar product bulb separation station 9 undetermined can be arranged in parallel with X direction guiding rail 20.Make like this in Y-direction, without position difference between luminance standard lamp 7, beacon light station 8 undetermined, scalar product bulb separation station 9 undetermined, reduce measuring error, reduce and control difficulty.
Described workbench 3 is connected with translation stage controller able to programme, thus is convenient to record and comparison work position.
As shown in Figure 2, described lens barrel 32 comprises the adjustable front lens barrel 320 of radially relative position and rear lens barrel 321.Can be threaded between front lens barrel 320 and rear lens barrel 321, conveniently adjust distance.In like manner, described first smooth hurdle 33 also can be movably arranged on lens barrel 32 threadably, is convenient to change and adjustment.
Described scalar product bulb separation station 9 undetermined comprises scalar product bulb separation station base 90 undetermined, described scalar product bulb separation station base 90 undetermined is provided with rotating disk 93, described rotating disk 93 is movably set with left and right clamping plate 92,92 ' by scalar product bulb separation station guide rail 91 undetermined.Rotating disk 93 bottom center is connected with scalar product bulb separation station base 90 undetermined by bearing, thus makes it rotatable, is convenient to treat calibration integrating sphere and carries out each to irradiation and demarcation.Described left and right clamping plate 92,92 ' lower end is installed with screw mandrel, and left-right rotary screw thread attacked respectively by screw mandrel, and left and right clamping plate 92,92 ' can move in opposite directions in guide-track groove, thus ensures that scalar product bulb separation undetermined is clamped in the center of scalar product bulb separation station base 90 undetermined.
Described lens barrel fixed mount 31 is movably arranged on workbench 3 by lift adjustment nut 36.
Technical solution of the present invention measuring principle is as follows: before work, and first just tested portable lamp is placed on beacon light station 8 undetermined, and tested integrating sphere is placed on scalar product bulb separation station 9 undetermined.
The light sent by luminance standard lamp 7, by after optical system 1:1 imaging, enters and transmits integrating sphere 4, measures, obtain the spectral radiance transmitting integrating sphere 4 generation
value, moves in parallel workbench 3, then carries out identical measurement to tested portable lamp or tested integrating sphere, obtain
value, because luminance standard lamp 7 and the light that tested portable lamp sends are through identical light path, and measure by same measuring system, so the spectral radiance of luminance standard lamp 7 and tested portable lamp
,
respectively with their photoelectricity signal
,
be directly proportional.
That is:
,
wherein:
for the proportionality constant that spectrum sensitivity with the luminous flux that lens pass through, transmitance, the aperture of the diaphragm, spectral transmission coefficient, dispersion, receiver etc. is relevant, ratio between two obtains formula:
in formula: the spectral radiance value of luminance standard lamp 7
by
try to achieve, measure the photoelectricity signal of luminance standard lamp 7 and tested portable lamp
,
, the spectral radiance value of tested portable lamp can be obtained by above formula
.
When measuring tested integrating sphere spectral radiance, in order to solve brightness matching problem, namely also can realize when tested integrating sphere brightness is lower measuring, the first smooth hurdle 35, smooth hurdle 33, second is disposed with in described lens barrel 32, thus add convertible smooth hurdle before making to transmit integrating sphere 4, the luminous flux entering and transmit integrating sphere 4 can be changed within the scope of tested integrating sphere output linearity, thus obtain larger measurable range.
When the brightness value of tested integrating sphere is less, increase the diameter of iris.If diaphragm diameter when measuring luminance standard lamp is
, diaphragm diameter when surveying integrating sphere is
, owing to adopting diameter
, making to enter the luminous flux transmitting integrating sphere is adopt diameter
time enter the luminous flux transmitting integrating sphere
doubly, the brightness value transmitting integrating sphere also becomes employing diameter
time
doubly, now the intrinsic brilliance of tested integrating sphere is:
the measurement range of spoke brightness can be expanded by this kind of method.
The invention solves two large technical barriers.1. the too little problem that can not be detected device and directly measure in the visual field of luminance standard lamp or high temperature blackbody stove.2. the brightness of luminance standard lamp or high temperature blackbody and the brightness of integrating sphere to be measured differ the problem that cannot compare too greatly.
As shown in Figure 3, the spoke lightness plane homogeneity that this device can also carry out integrating sphere light-emitting window is measured, and can also measure the brightness angle of radiation characteristic of integrating sphere light-emitting window.Described base 1 is movably set with two-dimension translational platform support 10 through two-dimension translational platform guide rail 100, described two-dimension translational platform support 10 is provided with auxiliary stand 104 through a pair X to auxiliary guide rail 103, is also provided with the X that is made up of to stepper motor 101, X to auxiliary screw mandrel 102 X between described two-dimension translational platform support 10 and auxiliary stand 104 to auxiliary drive; Described auxiliary stand 104 is provided with Z-direction stepper motor 105, the main shaft of described Z-direction stepper motor 105 is provided with Z-direction and drives screw mandrel 107, auxiliary stand 104 drives screw mandrel 107 and a pair Z-direction guideway 108 to be connected with additional lock board mount 106 through Z-direction, and on described additional lock board mount 106, movable being provided with assists clamping plate 109 a pair.
Described X is connected to stepper motor 101, Z-direction stepper motor 105 with translation stage controller able to programme.
After adopting technique scheme, integrating sphere to be measured fixed by auxiliary clamping plate 109, under the driving of Programmable Logic Controller, X coordinates to stepper motor 101 and Z-direction stepper motor 105, integrating sphere to be measured moves along level and vertical direction pointwise, form a square pointwise lighting surface, lens barrel daylighting point focusing is in integrating sphere light-emitting window plane.Before measurement, lens barrel maintains static after moving to correct position, collects a series of photosignal successively, through software process, just can obtain the solid function image of the spoke lightness plane homogeneity of integrating sphere light-emitting window.
Claims (6)
1. a high precision spectral radiometric calibration device, comprises base (1), it is characterized in that: described base (1) is movably set with support (2) through X direction guiding rail (20); Described support (2) is movably set with workbench (3) through Y-direction guide rail (30); Described workbench (3) top is provided with lens barrel fixed mount (31), described lens barrel fixed mount (31) internal fixtion has lens barrel (32), the first smooth hurdle (33), lens (34), the second smooth hurdle (35) is disposed with in described lens barrel (32), described lens barrel (32) rear is provided with transmits integrating sphere (4), and the light inlet of described transmission integrating sphere (4) mates with lens barrel (32), light-emitting window is connected with spectroradiometric measurement instrument (6) through pop one's head in (5); Also comprise luminance standard lamp (7), beacon light station undetermined (8), scalar product bulb separation station (9) undetermined.
2. high precision spectral radiometric calibration device as claimed in claim 1, is characterized in that: described lens barrel (32) comprises the adjustable front lens barrel (320) of radially relative position and rear lens barrel (321).
3. high precision spectral radiometric calibration device as claimed in claim 1, it is characterized in that: described scalar product bulb separation station (9) undetermined comprises scalar product bulb separation station base (90) undetermined, described scalar product bulb separation station base (90) undetermined is provided with rotating disk (93), described rotating disk (93) is movably set with left and right clamping plate (92,92 ') by scalar product bulb separation station guide rail (91) undetermined.
4. high precision spectral radiometric calibration device as claimed in claim 1, is characterized in that: described lens barrel fixed mount (31) is movably arranged on workbench (3) by lift adjustment nut (36).
5. high precision spectral radiometric calibration device as claimed in claim 1, it is characterized in that: described base (1) is movably set with two-dimension translational platform support (10) through two-dimension translational platform guide rail (100), described two-dimension translational platform support (10) is provided with auxiliary stand (104) through a pair X to auxiliary guide rail (103), is also provided with the X that is made up of to stepper motor (101), X to auxiliary screw mandrel (102) X between described two-dimension translational platform support (10) and auxiliary stand (104) to auxiliary drive; Described auxiliary stand (104) is provided with Z-direction stepper motor (105), the main shaft of described Z-direction stepper motor (105) is provided with Z-direction and drives screw mandrel (107), auxiliary stand (104) drives screw mandrel (107) and a pair Z-direction guideway (108) to be connected with additional lock board mount (106) through Z-direction, described additional lock board mount (106) is provided with actively a pair auxiliary clamping plate (109).
6. high precision spectral radiometric calibration device as claimed in claim 5, is characterized in that: described X is connected to stepper motor (101), Z-direction stepper motor (105) with translation stage controller able to programme.
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| CN104601983B (en) * | 2014-12-25 | 2016-10-19 | 中国科学院长春光学精密机械与物理研究所 | The off-axis absolute spectral transmittance of how anti-space camera and homogeneity test device thereof |
| CN104807742A (en) * | 2015-04-16 | 2015-07-29 | 西北核技术研究所 | Laser focusing irradiation effect experimental device and method |
| CN106840392A (en) * | 2015-12-03 | 2017-06-13 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Help device, spectral signal system and the semiconductor equipment of spectral signal collection |
| CN107132031B (en) * | 2017-01-19 | 2023-05-05 | 中国科学院上海技术物理研究所 | LED maximum radiance measuring device |
| CN110132417A (en) * | 2019-05-24 | 2019-08-16 | 长春理工大学 | A kind of spectrum polarizing mixing imaging simulation based on actual scene and verifying device |
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| CN203824740U (en) * | 2014-05-09 | 2014-09-10 | 安庆师范学院 | High precision spectrum radiation scaling device |
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| JPS61117552A (en) * | 1984-11-13 | 1986-06-04 | Ushio Inc | Exposing device |
| US7652755B2 (en) * | 2007-02-23 | 2010-01-26 | Yan Liu | Apparatus and method for color measurement and color grading of diamonds, gemstones and the like |
| CN101922974B (en) * | 2010-08-31 | 2012-02-01 | 中国科学院西安光学精密机械研究所 | Automatic calibration device and method for laser parameter performance test |
| US20130003064A1 (en) * | 2011-01-03 | 2013-01-03 | National Institute Of Standards And Technology | Dynamic Spectral Radiance Calibration Source |
| CN102353447B (en) * | 2011-07-22 | 2014-11-19 | 苏州大学 | Spectrum scaling apparatus used for spectrum imager |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101650225A (en) * | 2009-09-16 | 2010-02-17 | 中国科学院安徽光学精密机械研究所 | Absolute spectral radiance luminance responsivity calibrating system utilizing wide tunable laser |
| CN101915612A (en) * | 2010-08-05 | 2010-12-15 | 中国兵器工业第二〇五研究所 | Ultraviolet radiation comprehensive test device |
| CN203824740U (en) * | 2014-05-09 | 2014-09-10 | 安庆师范学院 | High precision spectrum radiation scaling device |
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