CN103398836A - Photoelectric test system for photoelectric conversion device - Google Patents

Photoelectric test system for photoelectric conversion device Download PDF

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Publication number
CN103398836A
CN103398836A CN201310359282XA CN201310359282A CN103398836A CN 103398836 A CN103398836 A CN 103398836A CN 201310359282X A CN201310359282X A CN 201310359282XA CN 201310359282 A CN201310359282 A CN 201310359282A CN 103398836 A CN103398836 A CN 103398836A
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China
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light
electrooptical device
test system
photoelectric
rotating disc
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CN201310359282XA
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Chinese (zh)
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叶红波
王勇
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Shanghai IC R&D Center Co Ltd
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Shanghai Integrated Circuit Research and Development Center Co Ltd
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Priority to CN201310359282XA priority Critical patent/CN103398836A/en
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Abstract

The invention discloses a photoelectric test system for a photoelectric conversion device, which comprises an integrating sphere, a light source, a runner set, wave filtering sheets/attenuation sheets, a position adjustment mechanism, a driving mechanism and a data acquisition module, wherein a light outgoing port is arranged in the wall of the integrating sphere; the runner set comprises multiple runners, multiple light transmitting holes are arranged in each runner, and each runner rotates to enable one of the light transmitting holes to align to the light outgoing port; the wave filtering sheets/attenuation sheets are fixed in the light transmitting holes; the position adjustment mechanism comprises a track, a lifting platform mounted on the track and moving along the track, and a rotary table rotationally mounted on the lifting platform; the photoelectric conversion device is fixedly connected to the rotary table and vertical to the surface of the rotary table; the driving mechanism drives the lifting platform to rise and fall in the vertical direction and move in the horizontal direction, and drives the rotary table to rotate; the data acquisition module is electrically connected with the photoelectric conversion device, and is used for acquiring electric signals generated by the photoelectric conversion device. The photoelectric test system disclosed by the invention can test the performance of the photoelectric conversion device under different conditions.

Description

The photoelectric test system of electrooptical device
Technical field
The present invention relates to the photoelectricity test field, be specially a kind of photoelectric test system that is applied to electrooptical device.
Background technology
Electrooptical device is the important component part of optical camera, and it utilizes photoelectricity transformation principle that the object scene radiation information directly is converted to electric signal, thereby realizes the electrical measurement of non electrical quantity.Difference according to element, electrooptical device can be divided into CCD(Charge Coupled Device, charge coupled cell) imageing sensor and cmos image sensor (Complementary Metal-Oxide Semiconductor, metal oxide semiconductor device) two large classes.Because CCD has the plurality of advantages such as highly sensitive, that spectral response range is wide, dynamic range is large, operating rate is fast, measuring accuracy is high, be subject to people's great attention and be used widely.In recent years, along with the application of CMOS technology in large-scale production, based on many products of CMOS technology, aspect cost, embodying increasing advantage.Especially along with the continuous reduction (scaling down) of CMOS technology feature sizes, the cost of unit area chip is also constantly reducing.Therefore, have benefited from this, cmos image sensor shows stronger competitive power than ccd image sensor.
What be accompanied by CCD and CMOS is widely used in the numerous areas such as Aero-Space, biomedicine, industry, astronomical sight, and different applications emphasizes particularly on different fields for the performance index of electrooptical device, therefore, when exploitation electrooptical device chip, need to comprehensively assess the performance of each different aspect of chip, to judge whether to meet performance requirement.Wherein the characteristics such as most important conversion gain, dynamic range, the linearity, quantum efficiency, all need to carry out in specific photoelectric test system.
Therefore, need to provide the photoelectric properties of a kind of photoelectric test system with the precise measuring power conversion device.
Summary of the invention
Fundamental purpose of the present invention is to overcome the defect of prior art, and a kind of stabilized light source that has is provided, and can in different range, regulate optical wavelength, the photoelectric test system of light intensity and incident angle of light.
For reaching above-mentioned purpose, the invention provides a kind of photoelectric test system of electrooptical device, it comprises integrating sphere, its ball wall is provided with light-emitting window; Light source, be arranged in described integrating sphere; The runner group, comprise the vertical and spaced a plurality of runners that are parallel to each other, and each described runner is distributed with a plurality of light holes, fixedly filter plate or attenuator in described light hole; Each described runner rotation is so that one of them described light hole is aimed at described light-emitting window; Position adjusting mechanism, it comprises: guide rail; Lifting table, be installed on described guide rail and along described guide rail move with away from or near described runner group; Rotating disc, be rotatably mounted on described lifting table, and in order to drive the rotation of described electrooptical device, wherein said electrooptical device is fixedly connected with described rotating disc and perpendicular to the surface of described rotating disc; Driving mechanism, be used to driving the lifting in the vertical direction of described lifting table, along described guide rail, moving in the horizontal direction, and drive described rotating disc rotation; And data acquisition module, with described electrooptical device, be electrical connected, the electric signal that produces be used to gathering described electrooptical device.
Preferably, described position adjustment structure also comprises fixture, and described fixture comprises the horizontal part that is fixedly connected with described rotating disc and perpendicular to the vertical component effect of described rotating disc, described vertical component effect has the vertical plane for fixing described electrooptical device.
Preferably, described photoelectric test system also comprises light wave light intensity test instrument, and it is arranged at described vertical plane and is adjacent to described electrooptical device place, be used to surveying light wave and the light intensity at described electrooptical device place.
Preferably, described light wave light intensity test instrument is arranged at above or below described electrooptical device, and described driving mechanism drives described lifting table and moves in the vertical direction, so that described light wave light intensity test instrument is aimed at described light-emitting window.
Preferably, described light wave light intensity test instrument is arranged at left side or the right side of described electrooptical device equal altitudes, described driving mechanism drives described rotating disc rotation so that described light wave light intensity test instrument is aimed at described light-emitting window, and drives described lifting table and move so that described light wave light intensity test instrument is positioned at described electrooptical device present position before described rotating disc rotation along described guide rail.
Preferably, described position adjusting mechanism is installed in the lucifuge case, and described lucifuge case tank wall has light inlet window corresponding to the position of described light-emitting window.
Preferably, described runner group is installed in the lucifuge case, and the position corresponding to described light-emitting window on the relative tank wall of described lucifuge case has light inlet window.
Preferably, described light source is a plurality of, in order to the light source of different-colour to be provided.
Preferably, described light source is provided by halogen tungsten lamp or LED lamp.
Preferably, described light-emitting window is identical with the diameter of described light hole.
The invention has the advantages that photoelectric test system can provide stable light source, and by runner group and position adjusting mechanism, can realize simultaneously the adjusting of light intensity, wavelength and electrooptical device light-sensitive surface angle.
The accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of the invention photoelectric test system;
Fig. 2 is the schematic diagram of the integrating sphere of one embodiment of the invention photoelectric test system;
Fig. 3 is the schematic diagram of the runner group of one embodiment of the invention photoelectric test system;
Fig. 4 is the schematic diagram of the position adjustment structure of one embodiment of the invention photoelectric test system.
Embodiment
For making content of the present invention more clear understandable, below in conjunction with Figure of description, content of the present invention is described further.Certainly the present invention is not limited to this specific embodiment, and the known general replacement of those skilled in the art also is encompassed in protection scope of the present invention.
Please in conjunction with reference to figure 1～4, photoelectric test system of the present invention comprises integrating sphere 10, light source 20, runner group 30, position adjusting mechanism 40 and data acquisition module 50.As shown in Figure 2, integrating sphere 10, for the inner hollow spheres that scribbles diffuse-reflective material, wherein is equipped with light source 20.Light source 20 is generally halogen tungsten lamp or LED lamp, and it can be positioned at the integrating sphere centre of sphere or close inner wall position.The light that light source 20 sends is done random reflection at equally distributed ball wall, and the light intensity energy is uniformly distributed in integrating sphere 10 inside, so integrating sphere 10 can provide under certain color temperature, and homogeneity reaches the stabilized light source of 97% left and right.In a preferred embodiment of the present invention, configurable a plurality of different halogen tungsten lamps or LED bulb in integrating sphere, can realize the different-colour light source by controlling respectively its switch.On integrating sphere 10 ball walls, have light-emitting window 11, light penetrates from light-emitting window 11 after the reflection of integrating sphere inwall.The diameter of light-emitting window can change according to the size of tested electrooptical device between 4cm～10cm; When the diameter of light-emitting window changed, the sphere diameter of integrating sphere 10 also changed thereupon, and wherein the diameter of integrating sphere spheroid is about 5 times of light-emitting window diameter.
Runner group 30 comprises vertical and the spaced a plurality of runners 31 that are parallel to each other, and these runners 31 are fixed on support 33.In each runner 31, be provided with a plurality of light holes 32, light hole quantity is for example 6～10, for being uniformly distributed in runner.Preferably, the diameter of light hole 32 is identical with the diameter of light-emitting window 11, wherein by the screw thread mode such as fix, band pass filter or attenuator is installed.It should be noted that, in a plurality of light holes of each runner 31, filter plate and attenuator can be installed respectively, also can in whole light holes of same runner, filter plate or attenuator be installed all, the installation of filter plate and attenuator is determined according to the actual requirements, and the present invention is not limited to this.The driven rotation of each runner 31, thus make one of them light hole 32 aim at light-emitting window 11, different filter plates, attenuator are appeared on light path, so that the light of Different lightwave length and different light intensity reaches the light-sensitive surface of electrooptical device.By filter plate and attenuator are arranged on different runners and aim at light-emitting window, just can realize simultaneously that light intensity can be in harmonious proportion the adjustable demand of wavelength.Preferably, as shown in Figure 3, runner group 30 is to be positioned in lucifuge case 34, thereby prevents that extraneous veiling glare from entering light hole.At this moment, the position corresponding to light-emitting window 11 on relative two sidewalls of lucifuge case 34 has light inlet window 341, makes the light of light-emitting window 11 outgoing enter into the light hole 32 of each runner 31 and be penetrated by light inlet window 341 from the light inlet window (not shown) of front side.
Position adjusting mechanism 40 comprises guide rail 41, lifting table 42 and rotating disc 43.Lifting table 42 is arranged on guide rail 41 and can in surface level, moves along guide rail, thus away from or near runner group 30.Preferably, guide rail 41 is to be positioned at same straight line with the projection of light-emitting window 11.Rotating disc 43 is rotatably mounted on lifting table 42, electrooptical device 1(such as cmos image sensor or ccd image sensor) be fixedly connected on rotating disc 43 and with respect to the Surface Vertical of rotating disc 43, and drive the axis rotation around rotating disc 43 by rotating disc 43.Thus, according to the variation of rotating disc 43 anglecs of rotation, electrooptical device 1 changes the angle of its light-sensitive surface thereupon, thereby can carry out the characteristic test of incident ray and light-sensitive surface angulation.Preferably, in the present embodiment, position adjusting mechanism 40 also comprises fixture 44.This fixture comprises that level connection joint is in the horizontal part of rotating disc 43 upper surfaces and perpendicular to the vertical component effect of rotating disc 43 upper surfaces, and this vertical component effect has the surperficial S that is fixedly connected with electrooptical device 1.In the present embodiment, fixture 44 is L-type, and it also can be in other embodiments Type.By this fixture 44, make electrooptical device 1 arrange perpendicular to rotating disc 43.For preventing the impact of extraneous veiling glare on test, position adjusting mechanism 40 is also preferably to be positioned in lucifuge case 45, as shown in Figure 4, position corresponding to light-emitting window 11 on lucifuge case 45 sidewalls has light inlet window 451, makes therefrom to see through and enter into the light-sensitive surface of electrooptical device 1 from the light of runner group outgoing.
Lifting table 42 and rotating disc 43 are driven by the driving mechanism (not shown), driving mechanism drives lifting table 42 lifting in the vertical direction, along guide rail 41, moves in the horizontal direction specifically, and drive rotating disc 43 in surface level around self axle rotation, to realize electrooptical device height, electrooptical device and light-emitting window distance, and the variation of electrooptical device light-sensitive surface angle.By adjust electrooptical device and light-emitting window apart from capable of regulating light wave intensity, and the angle of the adjustable angle incident light by adjustment electrooptical device light-sensitive surface.Data acquisition module and electrooptical device 1 are electrical connected, the electric signal that produces through opto-electronic conversion when the diverse location be used to gathering electrooptical device, thus by follow-up data, process and analyze, finally obtain the various performance parameters of electrooptical device 1.
In a preferred embodiment of the present invention, on the fixture vertical component effect, also be provided with a light wave light intensity test instrument, this light wave light intensity test instrument can switch to electrooptical device 1 present position, be used to surveying light wave and the light intensity at electrooptical device 1 place, for follow-up test data provides the analysis foundation.Specifically, light wave light intensity test instrument can be arranged on vertical plane S and be adjacent to electrooptical device 1 place, as be positioned at electrooptical device 1 above or below, by driving mechanism, drive lifting table lifting in vertical direction, make light wave light intensity test instrument aim at light-emitting window 11, optical wavelength and light intensity in the time of can obtaining electrooptical device 1 and be positioned at this position.Certainly, light wave light intensity test instrument also can be arranged at vertical plane S and be positioned at the left side of photoelectric commutator 1 equal altitudes or the specific distance place that is separated by, right side, need this moment to drive rotating disc clockwise or be rotated counterclockwise 90 degree by driving mechanism, and drive lifting table and move this specific distance along guide rail, thereby obtain optical wavelength and the light intensity of electrooptical device 1 original present position, it should be noted that separately this moment, the sensitive surface of light wave light intensity test instrument was vertical with the light-sensitive surface of electrooptical device 1.In another embodiment of the present invention, light wave light intensity test instrument also can be arranged on the surface relative with vertical plane S, can drive the position that makes light wave light intensity test instrument by driving mechanism equally and switches to the original present position of electrooptical device 1 and obtain optical wavelength and the light intensity of this position.
In sum, photoelectric test system of the present invention provides stable light source by integrating sphere, the runner group is adjusted optical wavelength and light intensity, and the angle of position adjusting mechanism adjustment light intensity and electrooptical device light-sensitive surface and incident light, thereby can be in the various performance parameters of testing photoelectronic switching device under different condition; Further, photoelectric test system of the present invention also comprises light wave light intensity test instrument, more directly to survey light wave and the light intensity of electrooptical device at the diverse location place, for test data provides the analysis foundation.
Although the present invention discloses as above with preferred embodiment; so described many embodiment only give an example for convenience of explanation; not in order to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection domain that the present invention advocates should be as the criterion so that claims are described.

Claims (10)

1. the photoelectric test system of an electrooptical device, is characterized in that, comprising:
Integrating sphere, its ball wall is provided with light-emitting window;
Light source, be arranged in described integrating sphere;
The runner group, comprise the vertical and spaced a plurality of runners that are parallel to each other, and each described runner is distributed with a plurality of light holes, fixedly filter plate or attenuator in described light hole; Each described runner rotation is so that one of them described light hole is aimed at described light-emitting window;
Position adjusting mechanism, it comprises:
Guide rail;
Lifting table, be installed on described guide rail and along described guide rail move with away from or near described runner group;
Rotating disc, be rotatably mounted on described lifting table, and in order to drive the rotation of described electrooptical device, wherein said electrooptical device is fixedly connected with described rotating disc and perpendicular to the surface of described rotating disc;
Driving mechanism, be used to driving the lifting in the vertical direction of described lifting table, along described guide rail, moving in the horizontal direction, and drive described rotating disc rotation; And
Data acquisition module, be electrical connected with described electrooptical device, the electric signal that produces be used to gathering described electrooptical device.
2. photoelectric test system according to claim 1, it is characterized in that, described position adjustment structure also comprises fixture, described fixture comprises the horizontal part that is fixedly connected with described rotating disc and perpendicular to the vertical component effect of described rotating disc, described vertical component effect has the vertical plane for fixing described electrooptical device.
3. photoelectric test system according to claim 2, is characterized in that, also comprises light wave light intensity test instrument, and it is arranged at described vertical plane and is adjacent to described electrooptical device place, be used to surveying light wave and the light intensity at described electrooptical device place.
4. photoelectric test system according to claim 3, it is characterized in that, described light wave light intensity test instrument is arranged at above or below described electrooptical device, and described driving mechanism drives described lifting table and moves in the vertical direction, so that described light wave light intensity test instrument is aimed at described light-emitting window.
5. photoelectric test system according to claim 3, it is characterized in that, described light wave light intensity test instrument is arranged at left side or the right side of described electrooptical device equal altitudes, described driving mechanism drives described rotating disc rotation so that described light wave light intensity test instrument is aimed at described light-emitting window, and drives described lifting table and move so that described light wave light intensity test instrument is positioned at described electrooptical device present position before described rotating disc rotation along described guide rail.
6. photoelectric test system according to claim 1, is characterized in that, described position adjusting mechanism is installed in the lucifuge case, and described lucifuge case tank wall has light inlet window corresponding to the position of described light-emitting window.
7. photoelectric test system according to claim 1, is characterized in that, described runner group is installed in the lucifuge case, and the position corresponding to described light-emitting window on the relative tank wall of described lucifuge case has light inlet window.
8. photoelectric test system according to claim 1, is characterized in that, described light source is a plurality of, in order to the light source of different-colour to be provided.
9. photoelectric test system according to claim 8, is characterized in that, described light source is provided by halogen tungsten lamp or LED lamp.
10. photoelectric test system according to claim 1, is characterized in that, described light-emitting window is identical with the diameter of described light hole.
CN201310359282XA 2013-08-16 2013-08-16 Photoelectric test system for photoelectric conversion device Pending CN103398836A (en)

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CN105182513A (en) * 2015-09-07 2015-12-23 航天海鹰光电信息技术（天津）有限公司 Illumination system for operation microscope
CN105589161A (en) * 2015-12-18 2016-05-18 中国科学技术大学 Adjustable constant-temperature optical filter switching apparatus
CN105890641A (en) * 2016-04-01 2016-08-24 南京慧感电子科技有限公司 Photoelectric sensor test device and test method thereof
CN106017869A (en) * 2016-05-16 2016-10-12 深圳市矽电半导体设备有限公司 LED brightness test adjustment device and system
CN109000788A (en) * 2018-10-15 2018-12-14 吉林省远大光学检测技术有限公司 A kind of device that detector automatic measurement is linearly spent
CN110690857A (en) * 2019-10-17 2020-01-14 郑州航空工业管理学院 Photoelectric conversion device based on one-dimensional nano material
CN111474130A (en) * 2020-05-29 2020-07-31 南昌航空大学 Simple device and method for on-line detection of gaseous propionaldehyde and acrolein based on spectrum method
CN112462158A (en) * 2019-09-06 2021-03-09 余姚舜宇智能光学技术有限公司 Performance test system and method for projection module, test platform device and electronic equipment
CN113219502A (en) * 2021-04-19 2021-08-06 季华实验室 Remote sensor on-satellite calibration equipment, calibration system and calibration method
CN114878147A (en) * 2022-05-26 2022-08-09 上海科华实验系统有限公司 Detection device

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Publication number Priority date Publication date Assignee Title
CN105182513A (en) * 2015-09-07 2015-12-23 航天海鹰光电信息技术（天津）有限公司 Illumination system for operation microscope
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CN111474130A (en) * 2020-05-29 2020-07-31 南昌航空大学 Simple device and method for on-line detection of gaseous propionaldehyde and acrolein based on spectrum method
CN113219502A (en) * 2021-04-19 2021-08-06 季华实验室 Remote sensor on-satellite calibration equipment, calibration system and calibration method
CN114878147A (en) * 2022-05-26 2022-08-09 上海科华实验系统有限公司 Detection device
CN114878147B (en) * 2022-05-26 2024-08-23 上海科华实验系统有限公司 Detection device

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Application publication date: 20131120