CN206069999U - A kind of vacuum coating equipment - Google Patents

A kind of vacuum coating equipment Download PDF

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Publication number
CN206069999U
CN206069999U CN201620936336.3U CN201620936336U CN206069999U CN 206069999 U CN206069999 U CN 206069999U CN 201620936336 U CN201620936336 U CN 201620936336U CN 206069999 U CN206069999 U CN 206069999U
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CN
China
Prior art keywords
pallet
slice
backing plate
tumbler assembly
coating equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201620936336.3U
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Chinese (zh)
Inventor
廖荣新
禤瑞彬
黄进高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhaoqing Dexin Vacuum Equipment Co.,Ltd.
Original Assignee
ZHAOQING QIANYAN VACUUM EQUIPMENT CO LTD
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Priority to CN201620936336.3U priority Critical patent/CN206069999U/en
Application granted granted Critical
Publication of CN206069999U publication Critical patent/CN206069999U/en
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Abstract

This utility model is related to filming equipment field, and in particular to a kind of vacuum coating equipment.The vacuum coating equipment, including vacuum chamber and it is divided into the slice feeder and sheet outlet device at vacuum chamber two ends, also include being arranged at backing plate return mechanism above or below the vacuum chamber, described slice feeder includes into piece pallet and enter described in promoting that what piece pallet lifted between vacuum chamber and backing plate return mechanism back and forth enters piece elevating mechanism;The slice elevating mechanism that described sheet outlet device includes slice pallet and promotes the slice pallet to be lifted between vacuum chamber and backing plate return mechanism back and forth.By backing plate return mechanism is arranged above or below vacuum chamber, the overall structure of vacuum coating equipment is simplified, production cost has been saved, while also reduce vacuum coating equipment taking up room, be conducive to improving the utilization rate of Factory Building.

Description

A kind of vacuum coating equipment
Technical field
This utility model is related to filming equipment field, and in particular to a kind of vacuum coating equipment.
Background technology
Continuous vacuum coating equipment is made up of one or more vacuum chambers and slice feeder, sheet outlet device;Wherein enter Sheet devices are connected foremost with vacuum chamber, and sheet outlet device is connected with the rearmost end of vacuum chamber.Into and out of sheet devices and vacuum chamber all Equipped with some roll shafts, roll shaft is used for transport by the workpiece (such as glass, offset plate etc.) of plated film, a certain moment roll shaft of work rotate from And make workpiece make translational motion (making workpiece pass in and out some vacuum chamber or into and out of sheet devices).Due to the reason roller such as locus Spacing between axle can not be made it is too close, so processing reduced size workpiece when, workpiece can not directly on roll shaft realize translate Motion, so will increase a larger backing plate of area between workpiece and roll shaft (will be put in backing plate by workpiece in slice feeder On), backing plate makees translational motion on roll shaft, after vacuum chamber reaches sheet outlet device takes workpiece away (plated film from backing plate again Production line is continuous work so having more than one piece backing plate while on coating film production line when working).After workpiece is taken away from backing plate Backing plate is transported to into piece rack position from sheet outlet device, load work next time is carried out.
As shown in figure 1, the vacuum coating equipment backing plate return mechanism mode of prior art is backing plate return phase and vacuum chamber Same level, by shifting frame change backing plate direction of advance, (indication shifts the device that frame is change backing plate direction of advance, i.e. institute Form four corners of rectangle route), backing plate is then return to into horse b to return phase by horse a is gone out.The knot of displacement frame Structure as shown in Figure 2, arranges the roll shaft of two groups of different directions, so as to change its direction of advance (more usual way at displacement frame It is setting two groups of roll shafts of vertical and horizontal in frame, when horizontal roll shaft is driven, backing plate does longitudinal translational movement;When longitudinal roller When axle is raised and rotated, backing plate does translational sideways movement).Whole return route forms rectangularity structure, device institute with production line The area that takes up space is big, and manufacturing cost is high, low to the utilization rate of Factory Building.
Utility model content
The technical problems to be solved in the utility model is, for the drawbacks described above of prior art, there is provided a kind of Vacuum Deposition Film device, overcomes existing vacuum coating equipment complex structure, and production cost is high, the big defect of floor space.
This utility model solves the technical scheme adopted by its technical problem:A kind of vacuum coating equipment is provided, including Vacuum chamber and the slice feeder and sheet outlet device at vacuum chamber two ends are divided into, also including being arranged above or below the vacuum chamber Backing plate return mechanism, described slice feeder include into piece pallet and promote described in enter piece pallet in vacuum chamber and backing plate What is lifted between return mechanism back and forth enters piece elevating mechanism;Described sheet outlet device includes slice pallet and promotes the slice The slice elevating mechanism that pallet is lifted between vacuum chamber and backing plate return mechanism back and forth.
Still more preferably scheme of the present utility model is:The backing plate return mechanism includes what is be set up in parallel by several The 3rd motor that the backing plate pallet of roll shaft composition and at least one driving roll shaft are rotated.
Still more preferably scheme of the present utility model is:The backing plate pallet includes two groups of roll shafts being set up in parallel, Two groups of roll shafts being set up in parallel are operated alone by two the 3rd motors.
Still more preferably scheme of the present utility model is:It is described enter piece pallet include several roll shafts being set up in parallel And drive the first motor of the roll shaft rotation;It is described enter piece elevating mechanism include the first driving cylinder and be arranged at described Enter below piece pallet, and near the first tumbler assembly and the second tumbler assembly, institute for entering piece pallet both ends marginal position State and between the first tumbler assembly and the second tumbler assembly, be provided with the mutual first connecting rod of connection, first driving cylinder is used for synchronous Drive and enter the lifting of piece pallet described in first tumbler assembly and the drive of the second tumbler assembly.
Still more preferably scheme of the present utility model is:It is described enter piece pallet include several roll shafts being set up in parallel And drive the first motor of the roll shaft rotation;It is described enter piece elevating mechanism include being arranged at it is described enter piece pallet below The first driving cylinder.
Still more preferably scheme of the present utility model is:The slice elevating mechanism includes the second driving cylinder and setting Below the slice pallet, and near the 3rd tumbler assembly and the 4th pivoted arm group of slice pallet both ends marginal position The mutual second connecting rod of connection is provided between part, the 3rd tumbler assembly and the 4th tumbler assembly, second driving cylinder is used The 3rd tumbler assembly and the 4th tumbler assembly is driven to drive the slice pallet lifting in synchronous.
Still more preferably scheme of the present utility model is:The slice pallet includes several roll shafts being set up in parallel And drive the second motor of the roll shaft rotation;The slice elevating mechanism includes being arranged at below the slice pallet The second driving cylinder.
The beneficial effects of the utility model are, by backing plate return mechanism is arranged above or below vacuum chamber, The overall structure of vacuum coating equipment is simplified, production cost has been saved, while also reduce vacuum coating equipment take up room, Be conducive to improving the utilization rate of Factory Building.The backing plate that vacuum chamber is sent is transferred to backing plate return mechanism, slice feeder by sheet outlet device Reclaim the backing plate (carrying out load work next time) sent back to by backing plate return mechanism and be transferred to vacuum chamber, so as to complete backing plate Circulation transport.
Description of the drawings
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the vacuum coating equipment planar structure schematic diagram of prior art;
Fig. 2 is the displacement frame planar structure schematic diagram of the vacuum coating equipment of prior art;
Fig. 3 is the vacuum coating equipment planar structure schematic diagram of this utility model embodiment one;
Fig. 4 is the slice feeder planar structure schematic diagram of the vacuum coating equipment of this utility model embodiment one;
Fig. 5 is the sheet outlet device planar structure schematic diagram of the vacuum coating equipment of this utility model embodiment one;
Fig. 6 is the backing plate return mechanism and vacuum chamber planar structure schematic diagram of this utility model embodiment one;
Fig. 7 is slice feeder (sheet outlet device) planar structure schematic diagram of this utility model embodiment two.
Specific embodiment
In conjunction with accompanying drawing, preferred embodiment of the present utility model is elaborated.
Embodiment one
As in Figure 3-5, vacuum coating equipment of the present utility model, including vacuum chamber 1 and 1 two ends of vacuum chamber are divided into Slice feeder 2 and sheet outlet device 3, it is also including the backing plate return mechanism 4 being arranged above or below the vacuum chamber 1, described Slice feeder 2 includes next between vacuum chamber 1 and backing plate return mechanism 4 into piece pallet 21 is entered described in piece pallet 21 and promotion What rise was dropped enters piece elevating mechanism 22;Described sheet outlet device 3 includes slice pallet 31 and promotes the slice pallet 31 The slice elevating mechanism 32 for being lifted between vacuum chamber 1 and backing plate return mechanism 4 back and forth.The sheet outlet device 3 can be by vacuum chamber 1 The backing plate sent is transferred to backing plate return mechanism 4;The recyclable backing plate sent back to by backing plate return mechanism 4 of the slice feeder 2 (enters After row load work next time), and vacuum chamber 1 is transferred to, so as to the circulation for completing backing plate is transported.By by backing plate return mechanism 4 are arranged above or below vacuum chamber 1, simplify the overall structure of vacuum coating equipment, have saved production cost, while Reduce vacuum coating equipment to take up room, be conducive to improving the utilization rate of Factory Building.
As shown in Fig. 3,6, backing plate return mechanism of the present utility model 4 includes what is be made up of several roll shafts being set up in parallel The 3rd motor 42 that backing plate pallet 41 and at least one driving roll shaft are rotated.Preferably, the backing plate pallet 41 include two groups of roll shafts being set up in parallel, and two groups of roll shafts being set up in parallel individually are driven by two the 3rd motors 42 It is dynamic.Certainly, it is caul, the kind of drive adopted by the backing plate return mechanism 4 is not limited to above-mentioned roll shaft transmission Mode, which is alternatively the kind of drive such as V belt translation or chain rotation.
As in Figure 3-5, it is of the present utility model enter piece pallet 21 include several roll shafts being set up in parallel and drive institute State the first motor 211 of roll shaft rotation;It is described enter piece elevating mechanism 22 include being arranged at it is described enter piece pallet 21 below The first driving cylinder 221.The slice pallet 31 includes several roll shafts being set up in parallel and drives what the roll shaft was rotated Second motor 311;The slice elevating mechanism 32 includes being arranged at the second driving cylinder below the slice pallet 31 321.For caul, it is described enter the kind of drive that adopted of piece pallet 21 and slice pallet 31 be also not limited to it is above-mentioned The roll shaft kind of drive, which is alternatively the kind of drive such as V belt translation or chain rotation.First driving cylinder 221 and the second driving cylinder 321 are alternatively cylinder or hydraulic cylinder.The present embodiment illustrates this only so that backing plate return mechanism 4 is arranged at below vacuum chamber 1 as an example The operation principle of the vacuum coating equipment of utility model, after placing workpiece to be coated, enters piece fortune on the backing plate on slice feeder 2 The motor of defeated frame 21 drives its roll shaft to rotate, and backing plate is transported into vacuum chamber 1 treats film-coating workpiece to carry out plated film;Backing plate from Vacuum chamber 1 out enters (now, the cylinder of slice elevating mechanism 32 is in elongation state) on the roll shaft of slice pallet 31 afterwards, After unloading the workpiece on lower bolster, backing plate is transported to the backing plate return mechanism 4 by the cylinders retract of the slice elevating mechanism 32 Height and position, then the motor of the slice pallet 31 drive its roll shaft to rotate, backing plate is transferred and is returned into backing plate On the backing plate pallet 41 of device 4;The motor of backing plate return mechanism 4 drives its roll shaft to rotate and backing plate is transferred on chip Put 2 enter on piece pallet 21 (now, it is described enter piece elevating mechanism 22 cylinder be in contraction state), then it is described enter piece liter The backing plate has been delivered to the height of the vacuum chamber 1 by the cylinder elongation of descending mechanism 22, and backing plate completes one cycle.
Embodiment two
As shown in fig. 7, the population structure of the present embodiment is identical with embodiment one, difference is:It is described enter piece lifting Mechanism 22 is different with the structure of slice elevating mechanism 32.The present embodiment enter piece elevating mechanism 22 include the first driving cylinder 221 with And be arranged at it is described enter piece pallet 21 below, and near entering the first tumbler assembly of 21 both ends marginal position of piece pallet 222 and second tumbler assembly 223, between first tumbler assembly 222 and the second tumbler assembly 223, it is provided with connection mutual the One connecting rod 224, first driving cylinder 221 are used for synchronous driving first tumbler assembly 222 and 223 band of the second tumbler assembly Enter piece pallet 21 to lift described in dynamic.By arranging first turn in the lower section near the position for entering 21 both ends edge of piece pallet The first connecting rod of arm component 222 and the second tumbler assembly 223 and the first tumbler assembly 222 of connection and the second tumbler assembly 223 224, the setting of first connecting rod 224 can ensure the concordance of 223 action of the first tumbler assembly 222 and the second tumbler assembly, effectively Prevent into 21 run-off the straight of piece pallet or catching phenomenon, improve up and down balance system;By the first driving cylinder of only one 221 the first tumbler assemblies 222 of driving and the second tumbler assembly 223 are moved, just can drive it is described enter piece pallet 21 is steady lifts, It is not only simple in structure, is also beneficial to reduce lowering or hoisting gear production cost height.The slice elevating mechanism 32 includes the second driving cylinder 321 and it is arranged at below the slice pallet 31, and near the 3rd pivoted arm of 31 both ends marginal position of slice pallet Connection is provided between component 322 and the 4th tumbler assembly 323, the 3rd tumbler assembly 322 and the 4th tumbler assembly 323 each other Second connecting rod 324, second driving cylinder 321 is used to synchronous drive the 3rd tumbler assembly 322 and the 4th tumbler assembly 323 drive the slice pallet 31 to lift.By arranging in the lower section of the position near 31 both ends edge of slice pallet The of 3rd tumbler assembly 322 and the 4th tumbler assembly 323 and the 3rd tumbler assembly 322 of connection and the 4th tumbler assembly 323 Two connecting rods 324, the setting of second connecting rod 324 can ensure that the 3rd tumbler assembly 322 is consistent with 323 action of the 4th tumbler assembly Property, 31 run-off the straight of slice pallet or catching phenomenon are effectively prevented, up and down balance system is improve;By only one second Driving cylinder 321 drives the 3rd tumbler assembly 322 and the 4th tumbler assembly 323 to move, and the slice pallet 31 just can be driven flat It is steady to lift, it is not only simple in structure, is also beneficial to reduce lowering or hoisting gear production cost height.
It should be appreciated that above example is only to illustrate the technical solution of the utility model, it is rather than a limitation, right For those skilled in the art, the technical scheme described in above-described embodiment can be modified, or to which part skill Art feature carries out equivalent;And all such modifications and replacement, should all belong to the protection of this utility model claims Scope.

Claims (7)

1. a kind of vacuum coating equipment, including vacuum chamber and the slice feeder and sheet outlet device at vacuum chamber two ends are divided into, which is special Levy and be:Also include being arranged at the backing plate return mechanism above or below the vacuum chamber, described slice feeder is included into piece Pallet and enter that piece pallet lifted between vacuum chamber and backing plate return mechanism back and forth described in promoting enter piece elevating mechanism;Institute The sheet outlet device stated includes slice pallet and the promotion slice pallet between vacuum chamber and backing plate return mechanism back and forth The slice elevating mechanism of lifting.
2. vacuum coating equipment according to claim 1, it is characterised in that:The backing plate return mechanism is included by several The 3rd motor that the backing plate pallet and at least one driving roll shaft of the roll shaft composition being set up in parallel is rotated.
3. vacuum coating equipment according to claim 2, it is characterised in that:The backing plate pallet includes that two groups set side by side The roll shaft put, two groups of roll shafts being set up in parallel are operated alone by two the 3rd motors.
4. according to the arbitrary described vacuum coating equipment of claim 1-3, it is characterised in that:It is described enter piece pallet include it is some The first motor that the individual roll shaft being set up in parallel and the driving roll shaft are rotated;It is described enter piece elevating mechanism include the first driving Cylinder and be arranged at it is described enter piece pallet below, and near the first tumbler assembly for entering piece pallet both ends marginal position and It is provided with the mutual first connecting rod of connection between second tumbler assembly, first tumbler assembly and the second tumbler assembly, described the One driving cylinder is used for synchronous driving and enter the lifting of piece pallet described in first tumbler assembly and the drive of the second tumbler assembly.
5. according to the arbitrary described vacuum coating equipment of claim 1-3, it is characterised in that:It is described enter piece pallet include it is some The first motor that the individual roll shaft being set up in parallel and the driving roll shaft are rotated;It is described enter piece elevating mechanism include being arranged at institute State into the first driving cylinder below piece pallet.
6. vacuum coating equipment according to claim 4, it is characterised in that:The slice elevating mechanism includes the second driving Cylinder and be arranged at below the slice pallet, and the 3rd tumbler assembly near slice pallet both ends marginal position and It is provided with the mutual second connecting rod of connection between 4th tumbler assembly, the 3rd tumbler assembly and the 4th tumbler assembly, described the Two driving cylinders are used for synchronous driving the 3rd tumbler assembly and the 4th tumbler assembly drives the slice pallet lifting.
7. vacuum coating equipment according to claim 5, it is characterised in that:The slice pallet includes that several are arranged side by side The second motor that the roll shaft and the driving roll shaft of setting is rotated;The slice elevating mechanism includes being arranged at the slice The second driving cylinder below pallet.
CN201620936336.3U 2016-08-24 2016-08-24 A kind of vacuum coating equipment Active CN206069999U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620936336.3U CN206069999U (en) 2016-08-24 2016-08-24 A kind of vacuum coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620936336.3U CN206069999U (en) 2016-08-24 2016-08-24 A kind of vacuum coating equipment

Publications (1)

Publication Number Publication Date
CN206069999U true CN206069999U (en) 2017-04-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620936336.3U Active CN206069999U (en) 2016-08-24 2016-08-24 A kind of vacuum coating equipment

Country Status (1)

Country Link
CN (1) CN206069999U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119803A (en) * 2016-08-24 2016-11-16 肇庆市前沿真空设备有限公司 A kind of vacuum coating equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119803A (en) * 2016-08-24 2016-11-16 肇庆市前沿真空设备有限公司 A kind of vacuum coating equipment

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TR01 Transfer of patent right

Effective date of registration: 20210730

Address after: 526000 20 meters south of hongaisi Machinery Industry Co., Ltd., Jindu Industrial Park, Jindu Town, Gaoyao District, Zhaoqing City, Guangdong Province (one of the workshops of Shankou community residents committee)

Patentee after: Zhaoqing Dexin Vacuum Equipment Co.,Ltd.

Address before: 526108 zone F4, Jindu Town, Gaoyao District, Zhaoqing City, Guangdong Province (behind hongaisi, Century Avenue)

Patentee before: ZHAOQING QIANYAN VACUUM EQUIPMENT Co.,Ltd.