CN205845896U - A kind of expansible power two transmission electron microscopes of electricity specimen holder in situ - Google Patents
A kind of expansible power two transmission electron microscopes of electricity specimen holder in situ Download PDFInfo
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- CN205845896U CN205845896U CN201620833392.4U CN201620833392U CN205845896U CN 205845896 U CN205845896 U CN 205845896U CN 201620833392 U CN201620833392 U CN 201620833392U CN 205845896 U CN205845896 U CN 205845896U
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- specimen holder
- transmission electron
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- electricity
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Abstract
The utility model discloses a kind of expansible power two transmission electron microscopes of electricity specimen holder in situ, including coarse adjustment device, signal converting head, specimen holder shell, coarse adjustment adapter, switching fixing bar, same to blowout patche, drive link, piezoelectric ceramics holder, sample head, piezoelectric ceramic tube, retaining element, needle point holder, conduction needle tubing, conducting electrode, nanometer pinpoint and test electrode.Test and control signal wire insertion signal converting head are realized external control test module piezoelectric ceramic tube internal with specimen holder, nanometer pinpoint controls to be connected with the electricity of sample；After specimen holder inserts transmission electron microscope inside, control coarse adjustment device and nanometer pinpoint is accurately moved in the range of distance sample fine tuning, deformed by the original position driving signal to control piezoelectric ceramic tube of regulation external control test module, thus control nanometer pinpoint in the range of fine tuning, do the accurate mobile of Nano grade, finally realize nanometer pinpoint and the machinery of test sample and electrical contact, complete the experiment in situ of power electrical property.
Description
Technical field
This utility model belongs to nano material fields of measurement.Relate to transmission electron microscope accessory and nano material in-situ is surveyed
Quantity research field, specifically discloses a kind of expansible power two transmission electron microscopes of electricity specimen holder in situ.
Background technology
Along with the most ripe of Electronic Speculum in-situ techniques and development, transmission electron microscope (transmission electron microscope or TEM) is the most only
Only characterize material structure, it is also possible to realize high-precision nanometer processing, performance test, each by the structural evolution of material and material
Plant performance (such as power, electricity, heat) change to connect.
Completing above-mentioned functions must be by means of a series of original position physical property measurement specimen holder, but due to transmission electron microscope
Sample chamber size (millimeter magnitude) limits, and the in-situ techniques difficulty in transmission electron microscope is not only will be by various physics
Field is carried on sample accurately, the most also to ensure a series of exacting terms, such as, keep the mechanically stable that sample is high
Degree, keeps the vacuum of Electronic Speculum system superelevation, it is impossible to having much impact image-forming electron, structure must be compact to adapt to narrow
Little size of electron microscopic sample room etc..Therefore, it is achieved many study on regulation under transmission electron microscope remain great
Challenging problem.
There is no expansible power two transmission electron microscopes of electricity specimen holder in situ, the most commercial in-situ mechanical or electricity both at home and abroad
Learn sample for use in transmitted electron microscope bar function singleness, expensive, there is problems in that
The most existing commercial in-situ mechanical and electrical performance testing specimen holder, the nano-probe of specimen holder front end typically uses pressure
Electroceramics pipe drives and realizes the contact to sample and manipulation.But due to piezoelectric ceramic tube maximum output displacement the lowest
In tens microns, therefore sample must be placed at when loading, in the range of distance nano-probe tens microns, increasing experiment
The difficulty of operation.
The most existing commercial specimen holder, front end nano-probe is changed more complicated, and material producer limits, and installation difficulty is big.
The most existing specimen holder is on the basis of ensureing Mechanical loading, and electrical functions is relatively simple, and majority only meets single electrode
Testing requirement, and sample head and specimen holder integrally curing, it is impossible to realize the replacing of particular sample and the effective of specimen holder function
Extension.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, it is provided that one both can realize moving on a large scale,
Power electric performance test in situ can be realized again, moreover it is possible to realize more multi-functional in situ TEM sample by changing sample head
Bar.The technical solution of the utility model is as follows:
Expansible power two transmission electron microscopes of electricity specimen holder in situ includes outside coarse adjustment device, signal converting head, specimen holder
Shell, coarse adjustment adapter, switching are fixed bar, same to blowout patche, drive link, piezoelectric ceramics holder, sample head, piezoelectric ceramic tube, are consolidated
Determine part, needle point holder, conduction needle tubing, conducting electrode, nanometer pinpoint and test electrode；
Coarse adjustment device is mechanically connected with specimen holder shell, it is achieved the coaxial of coarse adjustment device is fixed, and coarse adjustment device is with coarse adjustment adapter even
Connecing, it is achieved the conversion that rotary motion is moved with axial stretching, coarse adjustment adapter bar fixing with switching is connected, the fixing bar of switching and biography
Lever connects, and drive link is connected with piezoelectric ceramics holder, and piezoelectric ceramics holder is connected with piezoelectric ceramic tube, and coarse adjustment is transferred
Device, the fixing bar of switching, drive link, piezoelectric ceramics holder are respectively positioned in specimen holder shell；Before finally realizing coarse adjustment and specimen holder
Being in transmission connection of end.Coarse adjustment range maximum can realize axially ± 15mm, radial motion scope ± 0.7mm, and precision can reach 1 μ
m。
Drive link and specimen holder shell is connected, it is achieved be positioned at piezoelectric ceramic tube the most unsettled of front end, prevent with blowout patche
Relative friction, motion-affecting stability, reduction of service life is produced with specimen holder inwall；Piezoelectric ceramic tube and needle point holder
Connecting, needle point holder is connected with conduction needle tubing, and conduction needle tubing is connected with nanometer pinpoint；So realize piezoelectric ceramic tube accurately to control
The the most mobile of nanometer pinpoint processed realizes contacting in situ with sample.The coaxial telescopic extensions of fine tuning is ± 4.5 μm, radial motion model
Enclosing for ± 35 μm, precision can reach 1nm, fully sufficient meets transmission electron microscope requirement of experiment in situ.
Sample head is connected with specimen holder shell by retaining element, and signal converting head and conducting electrode are by being positioned at sample
Wire in bar realizes being electrically connected, and conducting electrode buries circuit realiration and tests being electrically connected of electrode in passing through sample head,
Test electrode is directly fixing with sample electricity to be connected, finally realizes sample and passes through signal converting head and transmission electron microscope external testing system
System connects, and meets power electrical testing and the real-time monitoring of signal in situ.
Preferably, described expansible power two transmission electron microscopes of electricity specimen holder in situ also includes holding handle, holds
Handle is connected with specimen holder shell, it is achieved the mobile use of specimen holder.
Preferably, described handle of holding is provided with sensing pin, it is achieved specimen holder inserts the sensing location after transmission electron microscope.
Preferably, described specimen holder shell is provided with sealing ring, is used for completely cutting off vacuum inside and outside transmission electron microscope, and protection is thoroughly
Radio mirror inner vacuum.
Preferably, described specimen holder shell is provided with guide finger, is used for realizing guide effect, Spin Control transmission electron microscope
Valve either on or off.
Preferably, specimen holder internal connection line a size of 0.1mm；Specimen holder internal thread hole a size of 1-2mm；Specimen holder
Internal key component accessory size is in millimeter rank.Expansible power of the present utility model two transmission electron microscopes of electricity sample in situ
Product bar has the highest versatility, can be used for the transmission electron microscope of same producer, and the concrete structure of sample stage then can be because of
The design of transmission electron microscope producer is different and different.
This utility model compared with prior art provides the benefit that:
1. this utility model uses the mode that " coarse adjustment-fine tuning " combines, and can realize the other thick movement of grade respectively
Fine with Nano grade is moved, and reduces the difficulty of experimental implementation.
2. this utility model specialized designs conduction needle tubing of fixing nano-probe, can directly to millimeter when changing probe
The needle tubing of size operates, and reduces operation easier；Needle tubing has multiple different size, is respectively suitable for unlike material, no
The nano-probe of same specification, has widened research field.
3. the sample head that this utility model specialized designs is detachable, both can realize sample with specimen holder is first
Play entirety to shift, meet necessary processing；Can realize again testing the Function Extension of electrode (for FEI specimen holder
Can be extended to 4 electrodes, JEOL specimen holder can be extended at least 10 electrodes), carry out multiple in-situ test process simultaneously or carry out half
The in-situ test of conductor device etc..
Along with the further development of in-situ techniques, transmission electron microscope has become as nanometer manufacture, nanometer mechanics, nano-electron etc.
The innovative tool of research field, plays the effect that can not be substituted in existing scientific research.But existing commercial sample in situ
Product bar can only introduce the test of single outfield or single performance, and power two transmission electron microscopes of electricity specimen holder in situ will be applied to more
Research field widely.Believe that the research and development of expansible power two transmission electron microscopes of electricity specimen holder in situ will in visible future
Functional material research and development, the in situ research of dynamic electron micrology are produced important impact and promotion.
The example of transmission electron microscope bar of difference in functionality has become as transmission electron microscope most basic configuration.Meanwhile,
The present situation that the transmission electron microscope on-spot study specimen holder of function singleness is the most so favored by user at present, fully imply that
Expansible power two transmission electron microscopes of electricity specimen holder in situ necessarily has good market prospect.
Accompanying drawing explanation
Fig. 1: expansible power two transmission electron microscopes of electricity specimen holder overall schematic in situ；
Fig. 2: expansible power two transmission electron microscopes of electricity specimen holder generalized section in situ；
Fig. 3: expansible power two transmission electron microscopes of electricity specimen holder front end partial schematic diagram in situ.
In figure, coarse adjustment device 1, signal converting head 2, hold handle 3, sense pin 4, specimen holder shell 5, sealing ring 6, guide finger 7,
Coarse adjustment adapter 8, the fixing bar 9 of switching, with blowout patche 10, drive link 11, piezoelectric ceramics holder 12, sample head 13, piezoelectricity is made pottery
Porcelain tube 14, retaining element 15, needle point holder 16, conduction needle tubing 17, conducting electrode 18, nanometer pinpoint 19, test electrode 20, sample
Product 21.
Detailed description of the invention
Below in conjunction with Figure of description and embodiment, this utility model is described further.
Embodiment 1, as Figure 1-3, expansible power two transmission electron microscopes of electricity specimen holder in situ includes coarse adjustment device
1, signal converting head 2, specimen holder shell 5, coarse adjustment adapter 8, switching fix bar 9, with blowout patche 10, drive link 11, piezoelectric ceramics
Holder 12, sample head 13, piezoelectric ceramic tube 14, retaining element 15, needle point holder 16, conduction needle tubing 17, conducting electrode
18, nanometer pinpoint 19 and test electrode 20；
Coarse adjustment device 1 axial component is coaxially mechanically connected with specimen holder shell 5, the axial component of coarse adjustment device 1 and radial component
It is mechanically connected with specimen holder shell 5 respectively, it is achieved the coaxial of coarse adjustment device is fixed, and coarse adjustment device 1 is connected with coarse adjustment adapter 8, it is achieved
The conversion that rotary motion is moved with axial stretching, coarse adjustment adapter 8 bar 9 fixing with switching is connected, the fixing bar 9 of switching and drive link
11 connect, and drive link 11 is connected with piezoelectric ceramics holder 12, and piezoelectric ceramics holder 12 is connected with piezoelectric ceramic tube 14, coarse adjustment
Adapter 8, the fixing bar 9 of switching, drive link 11, piezoelectric ceramics holder 12 are respectively positioned in specimen holder shell 5；Finally realize coarse adjustment
With being in transmission connection of specimen holder front end.Coarse adjustment range maximum can realize axially ± 15mm, radial motion scope ± 0.7mm, precision
1 μm can be reached；
Drive link 11 and specimen holder shell 5 is connected, it is achieved be positioned at the same axle suspension of the piezoelectric ceramic tube 14 of front end with blowout patche 10
Sky, prevents from producing Relative friction, motion-affecting stability, reduction of service life with specimen holder inwall；Piezoelectric ceramic tube 14 with
Needle point holder 16 connects, and needle point holder 16 is connected with conduction needle tubing 17, and conduction needle tubing 17 is connected with nanometer pinpoint 19；So
Realize piezoelectric ceramic tube 14 accurately to control the accurately mobile of nanometer pinpoint 19 and realize original position with sample 21 and contact.Fine tuning is coaxially stretched
Contracting scope is ± 4.5 μm, and radial motion scope is ± 35 μm, and precision can reach 1nm, and fully sufficient to meet transmission electron microscope the most real
Test requirement；
Sample head 13 is connected with specimen holder shell 5 by retaining element 15, and signal converting head 2 passes through with conducting electrode 18
The wire being positioned at specimen holder realizes being electrically connected, and conducting electrode 18 is by burying circuit realiration and test electrode in sample head 13
20 be electrically connected, test electrode 20 is directly fixing with sample 21 electricity to be connected, and finally realizes sample 21 by signal converting head 2
It is connected with transmission electron microscope outer testing system, meets power electrical testing and the real-time monitoring of signal in situ.
Embodiment 2, as it is shown in figure 1, on the basis of embodiment 1, described expansible power two transmission electron microscopies of electricity
Mirror specimen holder in situ also includes holding handle 3, holds handle 3 and is connected with specimen holder shell 5, it is achieved the mobile use of specimen holder, and can
To realize moving on a large scale.
Embodiment 3, on the basis of embodiment 2, described handle 3 of holding is provided with sensing pin 4, and sensing pin 4 is used for realizing
Specimen holder inserts the sensing location after transmission electron microscope.
Embodiment 4, on the basis of previous embodiment, described specimen holder shell 5 is provided with sealing ring 6, in use,
Sealing ring 6 and transmission electron microscope are in close contact and realize sealing, and are used for completely cutting off vacuum inside and outside transmission electron microscope, inside protection transmission electron microscope
Vacuum.
Embodiment 5, on the basis of previous embodiment, described specimen holder shell 5 is provided with guide finger 7, and guide finger 7 is used
In realizing guide effect, and rotatable control transmission electron microscope valve either on or off.
Embodiment 6, on the basis of previous embodiment, specimen holder internal connection line a size of 0.1mm；The internal spiral shell of specimen holder
Silk hole dimension is 1-2mm；The internal key component accessory size of specimen holder is in millimeter rank.
Before using, test and control signal wire are inserted signal converting head 2 to realize in external control test module and specimen holder
Portion's piezoelectric ceramic tube 14, nanometer pinpoint 19 control to be connected with the electricity of sample 21；After specimen holder inserts transmission electron microscope inside, control
Nanometer pinpoint 19 is accurately moved in the range of distance sample 21 fine tuning by coarse adjustment device 1 processed, by regulation external control test mould
The signal that drives of block controls the original position deformation of piezoelectric ceramic tube 14, thus controls nanometer pinpoint 19 and do nanometer in the range of fine tuning
The accurate of rank is moved, and finally realizes nanometer pinpoint 19 and the machinery of test sample 21 and electrical contact, completes power electrical property former
Position experiment.
Expansible power of the present utility model two transmission electron microscopes of electricity specimen holder in situ has the highest versatility, can
For the transmission electron microscope of same producer, the concrete structure of sample stage then can be because of the design of transmission electron microscope producer
Different and different.
Finally, it should also be noted that disclosed above is only specific embodiment of the utility model.The common skill of this area
All deformation that art personnel can directly derive from this utility model disclosure or associate, are all considered as this utility model
Protection domain.
Claims (5)
1. expansible power two transmission electron microscopes of electricity specimen holder in situ, it is characterised in that include coarse adjustment device (1), signal
Adaptor (2), specimen holder shell (5), coarse adjustment adapter (8), the fixing bar (9) of switching, same to blowout patche (10), drive link (11), pressure
Electroceramics holder (12), sample head (13), piezoelectric ceramic tube (14), retaining element (15), needle point holder (16), conduction
Needle tubing (17), conducting electrode (18), nanometer pinpoint (19) and test electrode (20)；
Coarse adjustment device (1) is connected with coarse adjustment adapter (8), and coarse adjustment adapter (8) bar (9) fixing with switching is connected, the fixing bar of switching
(9) being connected with drive link (11), drive link (11) is connected with piezoelectric ceramics holder (12), piezoelectric ceramics holder (12) and pressure
Electroceramics pipe (14) connects, and coarse adjustment adapter (8), the fixing bar (9) of switching, drive link (11), piezoelectric ceramics holder (12) are equal
It is positioned at specimen holder shell (5)；
Same blowout patche (10) connects drive link (11) and specimen holder shell (5), it is achieved be positioned at piezoelectric ceramic tube (14) same of front end
Axle suspension is empty, and piezoelectric ceramic tube (14) is connected with needle point holder (16), and needle point holder (16) is connected with conduction needle tubing (17), leads
Acusector pipe (17) is connected with nanometer pinpoint (19)；
Sample head (13) is connected with specimen holder shell (5) by retaining element (15), signal converting head (2) and conducting electrode
(18) realizing being electrically connected by being positioned at the wire of specimen holder, conducting electrode (18) is real by burying circuit in sample head (13)
Now with test being electrically connected of electrode (20), test electrode (20) is directly fixed with sample (21) electricity and is connected.
Expansible power the most according to claim 1 two transmission electron microscopes of electricity specimen holder in situ, it is characterised in that also
Including holding handle (3), hold handle (3) and be connected with specimen holder shell (5), it is achieved the mobile use of specimen holder.
Expansible power the most according to claim 2 two transmission electron microscopes of electricity specimen holder in situ, it is characterised in that institute
The handle (3) of holding stated is provided with sensing pin (4), it is achieved specimen holder inserts the sensing location after transmission electron microscope.
Expansible power the most according to claim 1 two transmission electron microscopes of electricity specimen holder in situ, it is characterised in that institute
The specimen holder shell (5) stated is provided with sealing ring (6), is used for completely cutting off vacuum inside and outside transmission electron microscope, inside protection transmission electron microscope
Vacuum.
Expansible power the most according to claim 4 two transmission electron microscopes of electricity specimen holder in situ, it is characterised in that institute
The specimen holder shell (5) stated is provided with guide finger (7), is used for realizing guide effect, and Spin Control transmission electron microscope valve opens pass
Close.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620833392.4U CN205845896U (en) | 2016-08-03 | 2016-08-03 | A kind of expansible power two transmission electron microscopes of electricity specimen holder in situ |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620833392.4U CN205845896U (en) | 2016-08-03 | 2016-08-03 | A kind of expansible power two transmission electron microscopes of electricity specimen holder in situ |
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|---|---|
| CN205845896U true CN205845896U (en) | 2016-12-28 |
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|---|---|---|---|
| CN201620833392.4U Withdrawn - After Issue CN205845896U (en) | 2016-08-03 | 2016-08-03 | A kind of expansible power two transmission electron microscopes of electricity specimen holder in situ |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106057618A (en) * | 2016-08-03 | 2016-10-26 | 兰州大学 | Scalable force and electric field transmission electron microscope in situ sample rod |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN108183059A (en) * | 2017-12-13 | 2018-06-19 | 中国科学院宁波材料技术与工程研究所 | Transmission electron microscope original position sample club head and the specimen holder with the head |
| CN108550513A (en) * | 2018-05-25 | 2018-09-18 | 兰州大学 | Three-dimensional force electricity transmission electron microscope original position specimen holder |
| CN111463095A (en) * | 2020-01-07 | 2020-07-28 | 武汉大学 | Ultrahigh time resolution in-situ 5D TEM testing device and using method thereof |
| CN112697818A (en) * | 2020-12-14 | 2021-04-23 | 兰州大学 | Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation |
| CN116609362A (en) * | 2023-04-28 | 2023-08-18 | 云南大学 | Transmission electron microscope in-situ sample rod for researching magnetic property of nano material and control method |
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2016
- 2016-08-03 CN CN201620833392.4U patent/CN205845896U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106057618A (en) * | 2016-08-03 | 2016-10-26 | 兰州大学 | Scalable force and electric field transmission electron microscope in situ sample rod |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN107315020B (en) * | 2017-07-31 | 2023-08-04 | 中国科学院宁波材料技术与工程研究所 | In-situ chip fixing structure of transmission electron microscope sample rod |
| CN108183059A (en) * | 2017-12-13 | 2018-06-19 | 中国科学院宁波材料技术与工程研究所 | Transmission electron microscope original position sample club head and the specimen holder with the head |
| CN108550513A (en) * | 2018-05-25 | 2018-09-18 | 兰州大学 | Three-dimensional force electricity transmission electron microscope original position specimen holder |
| CN108550513B (en) * | 2018-05-25 | 2024-05-28 | 兰州大学 | Three-dimensional force transmission electron microscope in-situ sample rod |
| CN111463095A (en) * | 2020-01-07 | 2020-07-28 | 武汉大学 | Ultrahigh time resolution in-situ 5D TEM testing device and using method thereof |
| CN112697818A (en) * | 2020-12-14 | 2021-04-23 | 兰州大学 | Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation |
| CN112697818B (en) * | 2020-12-14 | 2023-07-25 | 兰州大学 | Magneto-electric in-situ sample rod of transmission electron microscope suitable for FIB (FIB field) technology sample preparation |
| CN116609362A (en) * | 2023-04-28 | 2023-08-18 | 云南大学 | Transmission electron microscope in-situ sample rod for researching magnetic property of nano material and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161228 Effective date of abandoning: 20171124 |