CN112697818A - Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation - Google Patents
Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation Download PDFInfo
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- CN112697818A CN112697818A CN202011471198.3A CN202011471198A CN112697818A CN 112697818 A CN112697818 A CN 112697818A CN 202011471198 A CN202011471198 A CN 202011471198A CN 112697818 A CN112697818 A CN 112697818A
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- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method
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- G01N2223/03—Investigating materials by wave or particle radiation by transmission
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
- G01N2223/0565—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction diffraction of electrons, e.g. LEED
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
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Abstract
The invention discloses a magnetoelectric in-situ sample rod of a transmission electron microscope, which is suitable for FIB technology sample preparation and belongs to the field of micro-nano material measurement research. The sample rod comprises a sample rod head, a sample rod body and a hand-held handle, wherein the sample rod body consists of a front-end thin rod and a rear-end thick rod which are coaxially arranged, the sample rod head is provided with an objective table suitable for FIB technology sample preparation, and the objective table consists of a fixed bottom sheet and a gland. Through holes are arranged on two sides of the objective table bottom sheet and can be electrified by a lead circuit. The sample rod head is provided with a micro electromagnet. The invention can directly load FIB special micro-grid, and is applied to direct in-situ observation of magnetic structure magnetic interaction mechanism and dynamic magnetic regulation mechanism under the action of horizontal magnetic field in Lorentz mode in transmission electron microscope. The microstructure change of the sample under the horizontal magnetic field and the electrified state can also be directly observed in situ under other modes in the transmission electron microscope.
Description
Technical Field
The invention relates to a transmission electron microscope accessory, and belongs to the field of micro-nano material measurement research. In particular to a magnetoelectric in-situ sample rod of a transmission electron transmission microscope, which is suitable for FIB technology sample preparation.
Background
The performance of the material is often closely related to the composition, microstructure and atom position in the crystal, and the microstructure can not be separated from the sample rod and the sample platform when observed under an electron microscope. The in-situ technology in the transmission electron microscope is a research field which is rapidly developed at present, and has the advantages that various structural changes and physical properties of materials and devices can be observed in real time under the condition of microscopic size, and the research on the macroscopic performance and the use effect of the materials and the devices is facilitated. A transmission electron microscope is an instrument for observing the microstructure inside a solid material by utilizing the fluctuation of electrons. Transmission electron microscopes resemble the principle of optical microscopes, but transmission electron microscopes can increase the magnification to tens of millions of times, and even can observe atoms, which is much larger than that of optical microscopes.
The magnetic property and the electrical property are one of the important properties of materials and devices, and can reflect various physical properties of the materials and the devices, for example, different types of hysteresis loops can reflect different arrangement modes of microscopic magnetic domain structures of the materials, the magnetoresistance effect can reflect the characteristics of domain wall displacement and domain inversion of the materials, and the dielectric polarization occurs when current passes through the materials and the devices. When the influence of magnetic signals and electric signals on materials and devices needs to be studied in situ in a transmission electron mirror, a magnetic field and an electric field need to be applied to a sample, and the performance change of the sample is studied by changing the strength and the direction of the signals. At present, the addition of a magnetic field and an electric field on a sample rod of a transmission electron microscope is an important branch of the development of the in-situ electron microscope technology.
High performance Focused Ion Beam Systems (FIBs) have many unique and important functions and have been widely used in the semiconductor industry. FIBs have also been widely used in the field of research in material science in recent years. The method is mainly applied to the fields of transmission electron microscope/high-resolution transmission electron microscope (TEM/HRTEM) sample preparation and the like. The FIB technology is often used for preparing the transmission electron microscope, and the FIB special micro grid is directly loaded to the in-situ sample rod, so that the experimental process can be simplified, and the experimental efficiency can be improved.
Disclosure of Invention
Aiming at the defects and shortcomings in the prior art, the invention provides a magnetoelectric in-situ sample rod of a transmission electron microscope suitable for FIB technology sample preparation, which can be used for adding a magnetic field and an electric field, directly loading a special FIB micro-grid, and in-situ observing a magnetic interaction mechanism and a dynamic magnetic regulation mechanism of a magnetic structure under the action of a horizontal magnetic field in a Lorentz mode, and in-situ observing the microstructure change of the sample under the horizontal magnetic field and a power-on state in other modes.
The invention is realized by the following technical scheme:
a magnetoelectric in-situ sample rod of a transmission electron microscope suitable for FIB technology sample preparation comprises a sample rod head, a sample rod body and a hand grip, wherein the sample rod body consists of a front-end thin rod and a rear-end thick rod which are coaxially arranged; the method is characterized in that:
the sample rod head is provided with a micro electromagnet and an object stage; the miniature electromagnet is fixed on one side close to the thin rod at the front end, the objective table is fixed on the other side, a semicircular through hole and a semicircular groove used for clamping a sample to be tested are arranged on one side, close to the miniature electromagnet, of the objective table, the semicircular through hole and the semicircular groove are concentric, and the radius of the semicircular groove is larger than that of the semicircular through hole;
a first guide groove is formed in the grab handle, the rear end thick rod and the front end thin rod, a second guide groove is formed in the sample rod head, one end of the second guide groove is communicated with the first guide groove, and the other end of the second guide groove is communicated with a semi-annular groove in the objective table; a first switching lead and a second switching lead are arranged in the first guide groove, the electric connection ends of the first switching lead and the second switching lead are located at the hand grab handle, the power transmission end of the first switching lead is connected with the micro-electromagnet, and the power transmission end of the second switching lead is connected with a sample to be detected.
Preferably, the micro-electromagnet is composed of a micro closely-arranged solenoid and an iron core, and the iron core is arranged on the inner axis of the micro closely-arranged solenoid.
Preferably, the outer surface of the miniature closely-arranged solenoid is wound with an enameled copper wire, and two ends of the enameled copper wire and the first junction wire form a closed loop.
Preferably, the sample rod head is connected with the front end slender rod through a clamp, and the clamp is also provided with a limiting groove for fixing the micro electromagnet; the clamp comprises an upper clamp and a lower clamp, and the clamping force of the upper clamp and the clamping force of the lower clamp are adjusted through bolts.
Preferably, the objective table comprises a fixed bottom plate and a gland plate, wherein the fixed bottom plate and the gland plate are provided with matched semicircular through holes; the semi-annular groove is arranged on the fixed bottom sheet and communicated with the second guide groove, and the height of the annular groove is matched with the sample height of the FIB technology sample preparation; the semi-annular groove is positioned on the axis of the micro electromagnet.
Preferably, the fixed bottom plate and the pressing cover plate are provided with four threaded holes, and the four threaded holes are pressed and fixed through self-locking screws.
Preferably, the four threaded holes are arranged on the object stage in an isosceles trapezoid shape, the bottom edge of the isosceles trapezoid is perpendicular to the axis of the sample rod, and the bottom edge of the isosceles trapezoid is close to the semi-annular groove.
Preferably, the side surface of the hand grab handle and the front end slender rod in the sample rod body are both provided with guide pins.
Preferably, the front end slender rod and the rear end thick rod are connected through a conical transition section.
Preferably, a branching connector is arranged at the joint of the rear end thick rod and the hand grip, and the first switching lead and the second switching lead enter the interior of the hand grip through the branching connector, then extend outwards through the leading-out opening and are finally connected to a control device outside the transmission electron microscope.
The invention has the beneficial effects that:
1) the sample rod is suitable for FIB technology sample preparation, and the objective table of the sample rod is provided with a semicircular groove with the diameter of 3mm, so that a sample prepared on a FIB special micro-grid by using the FIB technology can be directly loaded on the objective table.
2) The micro electromagnet is arranged at the front end of the sample rod, a continuously adjustable planar magnetic field can be generated, and the sample can be magnetized in the transmission electron microscope without adjusting the angle of the sample.
3) In the invention, through holes are arranged in the sample rods on two sides of the objective table, the conducting wires are connected to the samples of the objective table through the through holes in the rod heads so as to apply electrical signals to electrify the samples, and the microstructure change of the samples under the stimulation of the electrical signals can be observed in situ in the transmission electron microscope.
4) The sample rod can directly observe the monomer transport property of the low-dimensional magnetic material or the magnetic structure in situ under a magnetic field, and intuitively and dynamically research the magnetization reversal and the magnetoresistance effect physical process of a single low-dimensional magnetic material or the magnetic structure under the simultaneous action of the magnetic field or a plurality of magnetic fields in different directions by combining the research on the appearance, structure, components, magnetic force line distribution and magnetic domain structure of the low-dimensional magnetic material or the low-dimensional magnetic structure, so that the essential physical phenomena of the interaction and the magnetoresistance effect of the low-dimensional magnetic material or the magnetic structure can be accurately known, and the understanding of the magnetic interaction mechanism and the magnetic regulation mechanism of the low-dimensional magnetic material or the magnetic structure on a nanometer or even atomic scale can be realized. This is not currently possible with many in-situ sample rods for transmission electron microscopy.
Drawings
The invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a TEM sample holder according to the present invention;
FIG. 2 is a schematic cross-sectional view of a TEM sample rod of the present invention taken along a central axis;
FIG. 3 is a schematic view of the structure of a front sample club head of the present invention;
FIG. 4 is a schematic view of the structure of the stage holding plate of the present invention;
FIG. 5 is a schematic cross-sectional view of a front end sample club head of the present invention;
FIG. 6 is a schematic view of the structure of the cover plate of the objective table of the present invention;
wherein, 1-sample club head; 2-front end slender rod; 3-rear end thick rod; 4-hand grab handle; 5-an object stage; 6-micro electromagnet; 7-a first guide groove; 8-a guide pin; 9-a tapered transition section; 10-a sealing ring; 11-a tap; 12-a lead-out port; 13-micro close-packed solenoids; 14-fixing the bottom sheet; 15-pressing a cover plate; 16-a threaded through hole; 17-upper clamp; 18-lower clamp; 19-second guide groove.
Detailed Description
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations where mutually exclusive features or steps are mutually exclusive.
Any feature disclosed in this specification may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, the magnetoelectric in-situ sample rod of the transmission electron microscope suitable for preparing samples by FIB technology comprises a sample rod head 1, a sample rod body and a hand-held handle 4, wherein the sample rod body consists of a front end thin rod 2 and a rear end thick rod 3 which are coaxially arranged, the sample rod head 1 is provided with an objective table 5, the objective table consists of a fixed bottom sheet 14 and a gland sheet 15, and the two are tightly connected through a threaded through hole 16.
In one embodiment of the invention, in the sample rod body, one end of the front thin rod 2 is connected with the rear thick rod 3 through the sealing ring 10, the other end of the front thin rod 2 is connected with the sample rod head 1, and the rear thick rod 3 is connected with the hand grip 4.
As shown in fig. 2, a coaxial first guide groove 7 is provided from the grip 4 to the inside of the sample rod head 1, and a wire having a different function is introduced into the sample rod through the first guide groove 7. As shown in the schematic cross-sectional structure of the sample rod head in fig. 5, the sample rod at both sides of the stage is provided with a second guide groove 19 inside, one end of the second guide groove 19 is communicated with the first guide groove 7, and the other end of the second guide groove 19 is communicated with the semi-annular groove in the stage; a first switching lead and a second switching lead are arranged in the first guide groove 7, the electric connection ends of the first switching lead and the second switching lead are positioned at the hand grab handle 4, the power transmission end of the first switching lead is connected with the micro-electromagnet 6, and the power transmission end of the second switching lead is connected with a sample to be detected.
In one embodiment of the present invention, as shown in fig. 5, a semicircular through hole and a semicircular groove for holding a sample to be tested are disposed on a side of the stage close to the micro-electromagnet, the semicircular through hole and the semicircular groove are concentric, and a radius of the semicircular groove is larger than that of the semicircular through hole.
The object stage 5 is provided with a micro electromagnet 6, the micro electromagnet 6 is composed of a micro close-packed solenoid 13 and an internal iron core, and the internal iron core is arranged at the position of the inner axis of the micro close-packed solenoid 13. Enameled wires are densely wound on the outer surface of the miniature densely-arranged solenoid 13, the enameled wires and the conducting wires are converged at the tail part of the head of the sample rod, then the enameled wires and the conducting wires directly enter the interior of the sample rod body along the first guide groove 7, and two ends of the enameled copper conducting wires and the first switching conducting wires form a closed loop.
As shown in fig. 3 and 4, the objective table includes a fixed bottom plate 14 and a cover pressing plate 15, and the fixed bottom plate 14 and the cover pressing plate 15 are provided with matched semicircular through holes; the semi-annular groove is arranged on the fixed bottom plate 14 and is communicated with the second guide groove 19, and the height of the annular groove is matched with the sample height of the FIB technology sample preparation; the semi-annular groove is positioned on the axis of the micro electromagnet. In use, a test sample FIB specific micro grid or copper mesh is loaded through a stationary base plate 14 and a gland plate 15 in the stage 5. In this embodiment, the fixed bottom plate 14 and the pressing cover plate 15 are provided with four threaded holes 16, and are pressed and fixed by self-locking screws, the four threaded holes 16 are arranged on the stage in an isosceles trapezoid shape, as shown in fig. 6, the bottom side of the isosceles trapezoid is perpendicular to the axis of the sample rod, and the bottom side is close to the semi-annular groove.
As shown in fig. 3, the sample rod head is connected with the front end slender rod 2 through a clamp, and the clamp is also provided with a limit groove for fixing the micro-electromagnet 6; the clamp comprises an upper clamp 17 and a lower clamp 18, and the clamping force of the upper clamp 17 and the clamping force of the lower clamp 18 are adjusted through bolts.
In one embodiment of the present invention, as shown in fig. 1 and 2, the side of the hand grip 4 and the front end pin of the sample rod body are provided with guide pins 8. Wherein, the side surface of the grab handle 4 is provided with a first guide pin which faces the sample rod head 1 and is parallel to the axial direction of the sample rod body; and a second guide pin is arranged on the front end slender rod 2 and is vertical to the axial direction of the sample rod body. The front end slender rod 2 and the rear end thick rod 3 are connected through a conical transition section 9. The junction of the rear end thick rod 3 and the hand grab handle 4 is provided with a wire distributing joint 11, a wire is connected to the wire distributing joint 11 in the rear end thick rod 3, and the wire at the other end of the wire distributing joint 11 enters the interior of the hand grab handle 4 and then extends outwards through a leading-out opening and is finally connected to a control device outside the transmission electron microscope.
In one embodiment of the present invention, the sample prepared by FIB technology is tested by using the sample rod, the semicircular groove on the stage is adapted to the shape of the sample, the sample can be clamped from various angles, and the trapezoidal threaded through holes can also clamp the sample to be tested at various angles.
During the test, the magnetic field enters the sample chamber of the transmission electron microscope from the outside of the transmission electron microscope through the lead, and the electric signal outside the transmission electron microscope is converted into a magnetic signal through the lead and the micro electromagnet and is applied to the sample in the sample rod object stage. The electric field enters the sample chamber of the transmission electron microscope from the outside of the transmission electron microscope through a lead, and the electric signal outside the transmission electron microscope is directly applied to the sample through the lead.
The sample is placed on the object stage of the sample rod head, and the micro electromagnet is connected with the lead to generate a magnetic signal and a planar magnetic field. The wire is connected to the sample of the stage through a through hole in the rod head to apply an electrical signal. All wires are integrated and processed at a transition table of the sample rod head, then are transmitted to a hand grip at the tail of the sample rod through the inside of the sample rod, are classified and processed through the wire distributing connectors, and are then connected to a power supply driving and testing system outside the electron microscope through cables. And collecting signals, detecting magnetic or electrical data, and characterizing the material.
The invention is a coaxial through hole guide groove from a grab handle to a sample rod head, and a lead is arranged in the coaxial through hole guide groove; the wires are laid in the coaxial through hole guide grooves in the sample rod, and are separated through the wire dividing connectors, so that the influence of electrical signals between the wires is avoided as much as possible. Because the branch connectors are various in types, on the basis of ensuring the same diameter specification, the connector terminals with the wiring holes as many as possible can be selected, so that the electrical signals in various ranges can be selected for input, and the magnetic signals and the electrical signals in different ranges with different sizes can be conveniently applied to samples.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (10)
1. A magnetoelectric in-situ sample rod of a transmission electron microscope suitable for FIB technology sample preparation comprises a sample rod head (1), a sample rod body and a hand grip (4), wherein the sample rod body consists of a front-end thin rod (2) and a rear-end thick rod (3) which are coaxially arranged, one end of the front-end thin rod (2) is connected with one end of the rear-end thick rod (3) through a sealing ring (14), the other end of the front-end thin rod (2) is connected with the sample rod head (1), and the other end of the rear-end thick rod (3) is connected with the hand grip (4); the method is characterized in that:
the sample rod head (1) is provided with a micro electromagnet (6) and an object stage; the miniature electromagnet is fixed on one side close to the thin rod (2) at the front end, the objective table is fixed on the other side, a semicircular through hole and a semicircular groove used for clamping a sample to be detected are arranged on one side, close to the miniature electromagnet, of the objective table, the semicircular through hole and the semicircular groove are concentric, and the radius of the semicircular groove is larger than that of the semicircular through hole;
a first guide groove (7) is formed in the grab handle (4), the rear end thick rod (3) and the front end thin rod (2), a second guide groove (19) is formed in the sample rod head, one end of the second guide groove (19) is communicated with the first guide groove (7), and the other end of the second guide groove (19) is communicated with a semi-annular groove in the objective table; a first switching lead and a second switching lead are arranged in the first guide groove (7), the electric connection ends of the first switching lead and the second switching lead are located at the hand grab handle (4), the power transmission end of the first switching lead is connected with the micro-electromagnet (6), and the power transmission end of the second switching lead is connected with a sample to be tested.
2. The TEM magnetoelectric in-situ sample rod suitable for FIB-based sampling according to claim 1, wherein the micro-electromagnet (6) is composed of a micro closely-arranged solenoid (13) and an iron core, and the iron core is placed on the internal axis of the micro closely-arranged solenoid (13).
3. The TEM magnetoelectric in-situ sample rod suitable for FIB-technology sampling according to claim 2, wherein the outer surface of the miniature close-packed solenoid (13) is wound with an enameled copper wire, and both ends of the enameled copper wire and the first transfer wire form a closed loop.
4. The magnetoelectric in-situ sample rod of the transmission electron microscope suitable for FIB technology sampling according to claim 1, characterized in that the sample rod head is connected with the front end slender rod (2) through a clamp, and the clamp is further provided with a limit groove for fixing the micro-electromagnet (6); the clamp comprises an upper clamp (17) and a lower clamp (18), and the clamping force of the upper clamp (17) and the clamping force of the lower clamp (18) are adjusted through bolts.
5. The TEM magnetoelectric in-situ sample holder suitable for FIB technology sampling according to claim 1, wherein the stage comprises a fixed bottom plate (14) and a cover pressing plate (15), and the fixed bottom plate (14) and the cover pressing plate (15) are provided with matched semicircular through holes; the semi-annular groove is arranged on the fixed bottom plate (14), the semi-annular groove is communicated with the second guide groove (19), and the height of the annular groove is matched with the sample height of the FIB technology sample preparation; the semi-annular groove is positioned on the axis of the micro electromagnet.
6. The TEM magnetoelectric in-situ sample holder suitable for FIB technology sampling according to claim 5, wherein the fixing bottom plate (14) and the cover pressing plate (15) are provided with four threaded holes (16) for compressing and fixing by self-locking screws.
7. The TEM magnetoelectric in-situ sample holder according to claim 6, wherein the four screw holes (16) are arranged in an isosceles trapezoid on the stage, the base of the isosceles trapezoid is perpendicular to the axis of the sample holder and the base is close to the semi-circular groove.
8. The TEM magnetoelectric in-situ sample holder suitable for FIB-based sampling according to claim 1, wherein the side of the hand-held handle (4) and the front end thin rod (2) in the sample holder are provided with guide pins (8).
9. The TEM magnetoelectric in-situ sample rod suitable for FIB-based sampling according to claim 1, characterized in that the front thin rod (2) and the rear thick rod (3) are connected by a tapered transition section (9).
10. The TEM magnetoelectric in-situ sample holder suitable for FIB technology sampling according to claim 1, wherein a branch connector (11) is provided at the connection of the rear thick rod (3) and the handle (4), and the first and second switching wires enter the handle (4) through the branch connector (11), then extend outwards through the outlet, and finally are connected to a control device outside the TEM.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011471198.3A CN112697818B (en) | 2020-12-14 | 2020-12-14 | Magneto-electric in-situ sample rod of transmission electron microscope suitable for FIB (FIB field) technology sample preparation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011471198.3A CN112697818B (en) | 2020-12-14 | 2020-12-14 | Magneto-electric in-situ sample rod of transmission electron microscope suitable for FIB (FIB field) technology sample preparation |
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| CN112697818A true CN112697818A (en) | 2021-04-23 |
| CN112697818B CN112697818B (en) | 2023-07-25 |
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