CN206672892U - A kind of multi-electrode transmission electron microscope original position electrical functions specimen holder - Google Patents
A kind of multi-electrode transmission electron microscope original position electrical functions specimen holder Download PDFInfo
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- CN206672892U CN206672892U CN201720413871.5U CN201720413871U CN206672892U CN 206672892 U CN206672892 U CN 206672892U CN 201720413871 U CN201720413871 U CN 201720413871U CN 206672892 U CN206672892 U CN 206672892U
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- specimen holder
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Abstract
The utility model discloses a kind of multi-electrode transmission electron microscope original position electrical functions specimen holder, including holding handle, specimen holder shell, sealing ring, guide finger, specimen holder front end, signal converting head, sensing pin, pad before anter, test electrode, sample room are provided with described plug-in PCB anter, test electrode is divided to two rows to be arranged in around sample room.The utility model had both realized multielectrode testing requirement, and made sample size no longer strictly limited because of the design of symmetrical structure, and because using PCB material, it is easy that sample need to only use elargol to be fixedly mounted.Detachable specimen holder front end is specially designed, can both realize and integrally shifted sample together with specimen holder front end, meet necessary processing.
Description
Technical field
The utility model belongs to transmission electron microscope accessory and nano material in-situ measuring study field, is mainly used in micro-
Receive the in-situ observation of material electromagnetic property under yardstick.
Background technology
Traditional transmissioning electric mirror test, often to before experiment process or with testing the material progress ex situ after terminating
Test characterizes.The change of the crystal defect of front and rear material, microstructure and chemical composition is tested by comparative analysis, is obtained indirectly
Understanding between material structure and property relationship, so as to infer the physical mechanism for causing it to change.This indirect view mode
Due to lacking intuitively microstructural alternative data, the useful information in many change procedures can be lost, is showed for many science
As definite conclusion can not be provided.For this problem, the transmission electron microscope in-situ techniques of rising in recent years provide effective solution
Scheme, the advantages of it inherits high spatial, high time resolution possessed by conventional transmission Electronic Speculum, while and can is in transmission electron microscope
Inside introduces the external drives such as electricity, magnetic, power, heat, the observation, research material and device under micro-scale in real time, in situ
Structure change and physical property, many new phenomenons are found in corresponding research and propose many new theories, enriches and carries
The high cognition of people.
In order to realize that above-mentioned function must be by means of a series of transmission electron microscope original position specimen holder, but because transmitted electron shows
Micro mirror sample chamber size (millimeter magnitude) limits, and the in-situ techniques difficulty in transmission electron microscope is various physical fields not only
Accurately it is carried on sample, while also ensures a series of exacting terms, such as keeps the high mechanical stability of sample,
Keep the vacuum of Electronic Speculum system superelevation, it is impossible to image-forming electron is had much impact, structure must be compact narrow and small to adapt to
The size of electron microscopic sample room etc..Therefore, realize that the more study on regulation under transmission electron microscope are still great choose
The problem of war property.
Commercial electricity transmission electron microscope sample bar in situ is expensive at present and many drawbacks be present.It is primarily due to specimen holder chi
Very little limitation causes using difficult complex operation and restricted to sample size, and it is limited and be difficult to upgrade to test number of electrodes in addition,
And because technical reason, commercial specimen holder ancillary chip consumptive material are expensive.Expansible multi-electrode transmission electron microscope is there is no both at home and abroad
Specimen holder in situ, for this problem, the present invention develops a kind of both simplified operations flow loosely limitation to sample size, again
Expansible multi-channel electric signal come realize nano material in-situ electromagnetic performance test, moreover it is possible to pass through detachable sample head design realize
More multi-functional transmission electron microscope original position electrical functions specimen holder.
Existing business or the transmission electron microscope original position electricity specimen holder of independent development, are primarily present problems with：
1. existing commercial transmission electron microscope original position electricity specimen holder, due to the design of specimen holder front end, to material sample chi
Very little requirement is strict and installation difficulty is big, wants to realize the loading of sample electric field, and the installation to sample proposes very big technical requirements, needs
The precision welding of sample and chip electrode is realized by FIB, then difficulty is bigger to drop sample.
2. existing specimen holder electrical functions are simpler, majority only meets two electrode test demands, and sample head and sample
Product bar integrally curing, the replacing of particular sample and effective extension of specimen holder function can not be realized.Nano-i/v is only capable of realizing 4 electricity
Pole loading electric field, and two kinds of model specimen holder front end integrally curings of JEM2010 and JEM200CX.
The content of the invention
The purpose of this utility model is customer service the deficiencies in the prior art, there is provided a kind of multi-electrode transmission electron microscope is former
Position electrical functions specimen holder.
Multi-electrode transmission electron microscope original position electrical functions specimen holder of the present utility model, including hold handle, specimen holder
Shell, sealing ring, guide finger, specimen holder front end, signal converting head, sensing pin, described holding handle one end and specimen holder shell
Connection, other end installation signal converting head, sensing pin, which is arranged on, to be held on handle, and sealing ring and guiding are installed on specimen holder shell
Pin；Specimen holder case nose installation specimen holder front end, described specimen holder front end includes plug-in PCB anter and plug
Piece after formula PCB；Specimen holder front end is connected by enameled conducting wire with signal converting head；Described enameled conducting wire is located at sample
In bar shell；
Pad before anter, test electrode, sample room are provided with described plug-in PCB anter, tests electrode
It is divided to two rows to be arranged in around sample room；Preceding pad is connected with test electrode, is provided with after described plug-in PCB on piece
Pad before pad and rear piece afterwards；The preceding pad of anter is together with pad solder before rear piece；The preceding pad of piece passes through collection with rear pad afterwards
Into the circuit connection in PCB, sample is placed at sample room and with elargol and the test electrode adhesion of selection；After weld
Disk is connected with signal converting head by enameled conducting wire.
Corresponding position is provided with screw hole on piece and plug-in PCB anter after described plug-in PCB,
Fastened by screw and front end pad with specimen holder shell head.
The utility model employs the design of PCB, and multipair electrode is symmetrical structure, has both been realized multielectrode
Testing requirement, and because the design of symmetrical structure makes sample size no longer strictly limited, and because using PCB material, sample is only
It need to be fixedly mounted with elargol easy.Detachable specimen holder front end is specially designed, can both be realized sample with specimen holder
Front end is integrally shifted together, meets necessary processing；It can realize that the Function Extension of test electrode (is directed to FEI again
Specimen holder extends to 8 electrodes, at most can be to 16 electrodes), while carry out multiple in-situ test processes.
Brief description of the drawings
Fig. 1：Multi-electrode transmission electron microscope original position electricity specimen holder overall schematic；
Fig. 2：Multi-electrode transmission electron microscope original position electricity specimen holder front end partial schematic diagram；
Fig. 3, plug-in PCB anter schematic diagram；
Fig. 4：Piece schematic diagram after plug-in PCB.
Embodiment
As shown in figure 1, multi-electrode transmission electron microscope original position electrical functions specimen holder of the present utility model includes holding
Handle 1, specimen holder shell 2, sealing ring 3, guide finger 4, specimen holder front end 5, signal converting are first 6, sensing pin 7, described holding handle 1
One end and specimen holder shell 2 are connected, and other end installation signal converting first 6, sensing pin 7, which is arranged on, to be held on handle 1, specimen holder shell
Sealing ring 3 and guide finger 4 are installed on 2；The front end of specimen holder shell 2 installation specimen holder front end 5, described specimen holder front end 5 includes
Piece 9 after plug-in PCB anter 8 and plug-in PCB；Specimen holder front end 5 passes through enameled conducting wire and signal converting
First 6 are connected；Described enameled conducting wire is located in specimen holder shell 2.
As shown in Figures 3 and 4, in a specific embodiment of the present utility model, described plug-in PCB anter
Pad 11 before anter, test electrode 12, sample room 13 are provided with 8, test electrode 12 (can be extended to 16 for totally 8 as needed
It is individual), it is divided to two rows to be arranged in around sample room 13；Preceding pad 11 is welded on pcb board and is connected with test electrode 12, and described inserts
Pull out and be provided with pad 16 before rear pad 14 and rear piece on piece 9 after formula PCB；The preceding pad 11 of anter welds with pad 16 before rear piece
It is connected together；The preceding pad 16 of piece is connected with rear pad 14 by the circuit being integrated in PCB afterwards, and sample is placed on sample
Between at 13 and with elargol and the adhesion of test electrode 12 selected；Pad 14 is connected with signal converting first 6 by enameled conducting wire afterwards.
As shown in Fig. 2 corresponding position on piece 9 and plug-in PCB anter 8 after described plug-in PCB
Screw hole 10 has been installed, has been fastened by screw and front end pad 15 with the head of specimen holder shell 2.
Hold handle 1 to be connected with specimen holder shell 2, realize the daily mobile use of specimen holder, sensing pin 7 connects with holding handle 1
Connect, realize the sensing positioning after specimen holder insertion transmission electron microscope；Sealing ring 3 is connected with specimen holder shell 2, for completely cutting off transmission electricity
Vacuum inside and outside mirror, protect transmission electron microscope inner vacuum；Guide finger 4 is connected with specimen holder shell 2, and the part is that specimen holder is overall
Realize guide effect, rotation control transmission electron microscope valve either on or off.
Specimen holder internal connection line size is 0.1mm；Specimen holder internal thread hole size is 1-2mm；Closed inside specimen holder
Key section accessory size is in millimeter rank.The multi-electrode transmission electron microscope original position electricity specimen holder of the present invention has very high
Versatility, available for the transmission electron microscope of same producer, the concrete structure of sample stage then can be because of transmission electron microscope
The design of producer is different and different.
Test and control signal wire insertion signal converting first 6 are realized that outside control test module is inserted with specimen holder using preceding
The electrical signal for pulling out test electrode 12 and sample room 13 on formula PCB anter 8 loads；Treat that specimen holder inserts transmission electron microscope
Behind inside, by controlling outside control testing source to adjust the loading of sample power on signal, electric property experiment in situ is completed.
Claims (2)
1. a kind of multi-electrode transmission electron microscope original position electrical functions specimen holder, it is characterised in that including holding handle (1), sample
Bar shell (2), sealing ring (3), guide finger (4), specimen holder front end (5), signal converting head (6), sensing pin (7), described hand
Lever (1) one end and specimen holder shell (2) connection, other end installation signal converting head (6), sensing pin (7), which is arranged on, holds handle
(1) on, sealing ring (3) and guide finger (4) are installed on specimen holder shell (2)；Specimen holder shell (2) front end installation specimen holder front end
(5), described specimen holder front end (5) includes piece (9) after plug-in PCB anter (8) and plug-in PCB；Sample
Product bar front end (5) is connected by enameled conducting wire with signal converting head (6)；Described enameled conducting wire is located in specimen holder shell (2)；
Pad (11) before anter, test electrode (12), sample room are provided with described plug-in PCB anter (8)
(13), testing electrode (12) is divided to two rows to be arranged in around sample room (13)；Pad (11) is connected with test electrode (12) before anter,
Pad (16) before rear pad (14) and rear piece is provided with after described plug-in PCB on piece (9)；Pad (11) before anter
Weld together with rear preceding pad (16)；The preceding pad of piece (16) and rear pad (14) are by being integrated in PCB afterwards
Circuit connect, sample be placed on sample room (13) place and with elargol with selection test electrode (12) adhesion；Afterwards pad (14) with
Signal converting head (6) is connected by enameled conducting wire.
2. multi-electrode transmission electron microscope original position electrical functions specimen holder according to claim 1, it is characterised in that institute
Corresponding position is provided with screw hole (10) on piece (9) and plug-in PCB anter (8) after the plug-in PCB stated,
Fastened by screw and front end pad (15) with specimen holder shell (2) head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720413871.5U CN206672892U (en) | 2017-04-19 | 2017-04-19 | A kind of multi-electrode transmission electron microscope original position electrical functions specimen holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720413871.5U CN206672892U (en) | 2017-04-19 | 2017-04-19 | A kind of multi-electrode transmission electron microscope original position electrical functions specimen holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206672892U true CN206672892U (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720413871.5U Expired - Fee Related CN206672892U (en) | 2017-04-19 | 2017-04-19 | A kind of multi-electrode transmission electron microscope original position electrical functions specimen holder |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108183059A (en) * | 2017-12-13 | 2018-06-19 | 中国科学院宁波材料技术与工程研究所 | Transmission electron microscope original position sample club head and the specimen holder with the head |
| CN108878238A (en) * | 2018-05-25 | 2018-11-23 | 兰州大学 | Three-dimensionalreconstruction specimen holder |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
| CN112697818A (en) * | 2020-12-14 | 2021-04-23 | 兰州大学 | Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation |
| CN112924909A (en) * | 2021-01-14 | 2021-06-08 | 西部超导材料科技股份有限公司 | Superconducting wire critical current performance parallel test rod and preparation method and application thereof |
| CN113155878A (en) * | 2021-04-06 | 2021-07-23 | 北京化工大学 | Transmission electron microscope sample silking platform and preparation method and application thereof |
| CN109270100B (en) * | 2018-11-30 | 2024-04-19 | 复旦大学 | Transmission electron microscope in-situ electrical test chip for focused ion beam sample preparation process |
-
2017
- 2017-04-19 CN CN201720413871.5U patent/CN206672892U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108183059A (en) * | 2017-12-13 | 2018-06-19 | 中国科学院宁波材料技术与工程研究所 | Transmission electron microscope original position sample club head and the specimen holder with the head |
| CN108878238A (en) * | 2018-05-25 | 2018-11-23 | 兰州大学 | Three-dimensionalreconstruction specimen holder |
| CN109270100B (en) * | 2018-11-30 | 2024-04-19 | 复旦大学 | Transmission electron microscope in-situ electrical test chip for focused ion beam sample preparation process |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
| CN112697818A (en) * | 2020-12-14 | 2021-04-23 | 兰州大学 | Magnetoelectric in-situ sample rod of transmission electron microscope suitable for FIB technology sample preparation |
| CN112697818B (en) * | 2020-12-14 | 2023-07-25 | 兰州大学 | Magneto-electric in-situ sample rod of transmission electron microscope suitable for FIB (FIB field) technology sample preparation |
| CN112924909A (en) * | 2021-01-14 | 2021-06-08 | 西部超导材料科技股份有限公司 | Superconducting wire critical current performance parallel test rod and preparation method and application thereof |
| CN113155878A (en) * | 2021-04-06 | 2021-07-23 | 北京化工大学 | Transmission electron microscope sample silking platform and preparation method and application thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171124 Termination date: 20200419 |